JP2008176095A - パターン形成方法及び薄膜トランジスタの作製方法 - Google Patents

パターン形成方法及び薄膜トランジスタの作製方法 Download PDF

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Publication number
JP2008176095A
JP2008176095A JP2007009926A JP2007009926A JP2008176095A JP 2008176095 A JP2008176095 A JP 2008176095A JP 2007009926 A JP2007009926 A JP 2007009926A JP 2007009926 A JP2007009926 A JP 2007009926A JP 2008176095 A JP2008176095 A JP 2008176095A
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layer
light
mask
light absorption
laser beam
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JP2007009926A
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Japanese (ja)
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JP2008176095A5 (enExample
Inventor
Hironobu Shoji
博信 小路
Masafumi Morisue
将文 森末
Yasuhiro Jinbo
安弘 神保
Hidekazu Miyairi
秀和 宮入
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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Priority to JP2007009926A priority Critical patent/JP2008176095A/ja
Publication of JP2008176095A publication Critical patent/JP2008176095A/ja
Publication of JP2008176095A5 publication Critical patent/JP2008176095A5/ja
Withdrawn legal-status Critical Current

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  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Thin Film Transistor (AREA)
JP2007009926A 2007-01-19 2007-01-19 パターン形成方法及び薄膜トランジスタの作製方法 Withdrawn JP2008176095A (ja)

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JP2007009926A JP2008176095A (ja) 2007-01-19 2007-01-19 パターン形成方法及び薄膜トランジスタの作製方法

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JP2007009926A JP2008176095A (ja) 2007-01-19 2007-01-19 パターン形成方法及び薄膜トランジスタの作製方法

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JP2008176095A true JP2008176095A (ja) 2008-07-31
JP2008176095A5 JP2008176095A5 (enExample) 2010-01-21

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017177152A (ja) * 2016-03-30 2017-10-05 古河電気工業株式会社 レーザ光遮蔽材
CN112271195A (zh) * 2020-10-22 2021-01-26 Oppo广东移动通信有限公司 发光元件及其制备方法、显示屏和电子设备
CN112992929A (zh) * 2019-12-17 2021-06-18 弗莱克英纳宝有限公司 半导体装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535207A (ja) * 1991-08-02 1993-02-12 Fuji Xerox Co Ltd El駆動装置
JP2006106118A (ja) * 2004-09-30 2006-04-20 Semiconductor Energy Lab Co Ltd 液晶表示装置の作製方法
JP2006128650A (ja) * 2004-09-30 2006-05-18 Semiconductor Energy Lab Co Ltd 表示装置の作製方法
JP2006148082A (ja) * 2004-10-19 2006-06-08 Semiconductor Energy Lab Co Ltd 配線基板及び半導体装置の作製方法
JP2006245557A (ja) * 2005-02-03 2006-09-14 Semiconductor Energy Lab Co Ltd 半導体装置、電子機器および半導体装置の作製方法
JP2006352087A (ja) * 2005-05-20 2006-12-28 Semiconductor Energy Lab Co Ltd 薄膜トランジスタ及び半導体デバイスの作製方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0535207A (ja) * 1991-08-02 1993-02-12 Fuji Xerox Co Ltd El駆動装置
JP2006106118A (ja) * 2004-09-30 2006-04-20 Semiconductor Energy Lab Co Ltd 液晶表示装置の作製方法
JP2006128650A (ja) * 2004-09-30 2006-05-18 Semiconductor Energy Lab Co Ltd 表示装置の作製方法
JP2006148082A (ja) * 2004-10-19 2006-06-08 Semiconductor Energy Lab Co Ltd 配線基板及び半導体装置の作製方法
JP2006245557A (ja) * 2005-02-03 2006-09-14 Semiconductor Energy Lab Co Ltd 半導体装置、電子機器および半導体装置の作製方法
JP2006352087A (ja) * 2005-05-20 2006-12-28 Semiconductor Energy Lab Co Ltd 薄膜トランジスタ及び半導体デバイスの作製方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017177152A (ja) * 2016-03-30 2017-10-05 古河電気工業株式会社 レーザ光遮蔽材
CN112992929A (zh) * 2019-12-17 2021-06-18 弗莱克英纳宝有限公司 半导体装置
CN112271195A (zh) * 2020-10-22 2021-01-26 Oppo广东移动通信有限公司 发光元件及其制备方法、显示屏和电子设备

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