JP2008150274A - トリクロロシラン製造装置 - Google Patents
トリクロロシラン製造装置 Download PDFInfo
- Publication number
- JP2008150274A JP2008150274A JP2007268617A JP2007268617A JP2008150274A JP 2008150274 A JP2008150274 A JP 2008150274A JP 2007268617 A JP2007268617 A JP 2007268617A JP 2007268617 A JP2007268617 A JP 2007268617A JP 2008150274 A JP2008150274 A JP 2008150274A
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- JP
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- Prior art keywords
- gas
- trichlorosilane
- reaction vessel
- heat transfer
- transfer body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 239000005052 trichlorosilane Substances 0.000 title claims abstract description 41
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000007789 gas Substances 0.000 claims abstract description 92
- 238000006243 chemical reaction Methods 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 239000007795 chemical reaction product Substances 0.000 claims abstract description 14
- 230000008018 melting Effects 0.000 claims abstract description 8
- 238000002844 melting Methods 0.000 claims abstract description 8
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 claims abstract description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 7
- 239000001257 hydrogen Substances 0.000 claims abstract description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims abstract description 6
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims abstract description 6
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 239000011800 void material Substances 0.000 abstract description 2
- 239000002245 particle Substances 0.000 abstract 3
- 239000008187 granular material Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- SLLGVCUQYRMELA-UHFFFAOYSA-N chlorosilicon Chemical compound Cl[Si] SLLGVCUQYRMELA-UHFFFAOYSA-N 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910003902 SiCl 4 Inorganic materials 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical compound C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10715—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material
- C01B33/10731—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
- B01J12/007—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor in the presence of catalytically active bodies, e.g. porous plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0242—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly vertical
- B01J8/025—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds the fluid flow within the bed being predominantly vertical in a cylindrical shaped bed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
- B01J8/0285—Heating or cooling the reactor
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/08—Compounds containing halogen
- C01B33/107—Halogenated silanes
- C01B33/1071—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof
- C01B33/10715—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material
- C01B33/10731—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane
- C01B33/10736—Tetrachloride, trichlorosilane or silicochloroform, dichlorosilane, monochlorosilane or mixtures thereof prepared by reacting chlorine with silicon or a silicon-containing material with the preferential formation of trichlorosilane from silicon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00389—Controlling the temperature using electric heating or cooling elements
- B01J2208/00415—Controlling the temperature using electric heating or cooling elements electric resistance heaters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2208/00—Processes carried out in the presence of solid particles; Reactors therefor
- B01J2208/00008—Controlling the process
- B01J2208/00017—Controlling the temperature
- B01J2208/00513—Controlling the temperature using inert heat absorbing solids in the bed
Abstract
【解決手段】 テトラクロロシランと水素とを含む供給ガスが内部に供給されてトリクロロシランと塩化水素とを含む反応生成ガスが生成される反応容器1と、反応容器1内に充填され少なくとも1400℃を超えた融点を有する複数の粒塊2と、反応容器1内の粒塊2を加熱する加熱機構3とを備えている。これにより、粒塊2同士の間に形成される空隙部2aによって隙間が多く、供給ガスと粒塊との接触面積も多くなるため、効率的に加熱することができる。
【選択図】 図1
Description
4SiHCl3 → Si+3SiCl4+2H2 ・・・(2)
SiCl4+H2 → SiHCl3+HCl ・・・(3)
このトリクロロシランを製造する装置として、例えば特許文献1には、発熱体に囲まれた反応室が、同心配置の2つの管によって形成された外室と内室をもった二重室設計とされ、この反応室に下方から水素とテトラクロロシランとの供給ガスを供給すると共に反応室の下方から反応生成ガスを排出する反応器が提案されている。この反応器では、炭素等で形成されたヒータ部である発熱体が通電により発熱し、反応室内を外側から加熱することで管を加熱し、これら管の間に同心円状に形成される円筒状の経路をガスが通過する間に加熱されて反応する構成とされている。
Claims (5)
- テトラクロロシランと水素とを含む供給ガスが内部に供給されてトリクロロシランと塩化水素とを含む反応生成ガスが生成される反応容器と、
前記反応容器内に充填され少なくとも1400℃を超えた融点の材料により形成されるとともにガスが流通可能な空隙部を有する伝熱体と、
前記反応容器内の前記伝熱体を加熱する加熱機構とを備えていることを特徴とするトリクロロシラン製造装置。 - 請求項1に記載のトリクロロシラン製造装置において、
前記反応容器が、前記供給ガスを前記反応容器内に導入するガス供給口と、
前記反応生成ガスを前記反応容器から外部に導出するガス導出口と、
前記伝熱体を充填した充填部とを備え、
前記充填部の一端側に前記ガス供給口が配されていると共に他端側に前記ガス導出口が配されていることを特徴とするトリクロロシラン製造装置。 - 請求項1又は2に記載のトリクロロシラン製造装置において、
前記伝熱体が複数の粒塊又は成型されたブロック体から構成されていることを特徴とするトリクロロシラン製造装置。 - 請求項3に記載のトリクロロシラン製造装置において、
前記粒塊又は成型されたブロック体の表面に、複数の凹凸が形成されていることを特徴とするトリクロロシラン製造装置。 - 請求項1から4のいずれか一項に記載のトリクロロシラン製造装置において、
前記伝熱体が、多結晶シリコン、炭化珪素、炭化珪素で表面がコーティングされたカーボンのいずれかであることを特徴とするトリクロロシラン製造装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007268617A JP5160181B2 (ja) | 2006-11-21 | 2007-10-16 | トリクロロシラン製造装置 |
US12/312,471 US8221691B2 (en) | 2006-11-21 | 2007-10-25 | Apparatus for producing trichlorosilane |
CN2007800429212A CN101535180B (zh) | 2006-11-21 | 2007-10-25 | 三氯硅烷制造装置 |
PCT/JP2007/070805 WO2008062632A1 (fr) | 2006-11-21 | 2007-10-25 | Appareil de production de trichlorosilane |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006314896 | 2006-11-21 | ||
JP2006314896 | 2006-11-21 | ||
JP2007268617A JP5160181B2 (ja) | 2006-11-21 | 2007-10-16 | トリクロロシラン製造装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008150274A true JP2008150274A (ja) | 2008-07-03 |
JP5160181B2 JP5160181B2 (ja) | 2013-03-13 |
Family
ID=39652868
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007268617A Active JP5160181B2 (ja) | 2006-11-21 | 2007-10-16 | トリクロロシラン製造装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8221691B2 (ja) |
JP (1) | JP5160181B2 (ja) |
CN (1) | CN101535180B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5412447B2 (ja) * | 2009-01-30 | 2014-02-12 | 電気化学工業株式会社 | 炭素含有材料からなる反応容器を備える反応装置、その反応装置の腐食防止方法およびその反応装置を用いたクロロシラン類の生産方法 |
WO2019098348A1 (ja) * | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | 流動床方式反応装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4847500A (ja) * | 1971-10-21 | 1973-07-05 | ||
JPS56169119A (en) * | 1980-05-27 | 1981-12-25 | Mitsubishi Metal Corp | Manufacture of trichlorosilane |
JPS62123011A (ja) * | 1985-11-25 | 1987-06-04 | Koujiyundo Silicon Kk | トリクロルシランの製造方法およびその装置 |
JPH07232910A (ja) * | 1994-01-28 | 1995-09-05 | Hemlock Semiconductor Corp | テトラクロロシランの水素添加法 |
Family Cites Families (11)
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US3493423A (en) * | 1964-05-01 | 1970-02-03 | Union Carbide Corp | Coating carbon substrates with refractory metal carbides |
DE3782213T2 (de) * | 1986-07-10 | 1993-03-11 | Chiyoda Chem Eng Construct Co | Verfahren zur enthalogenierung eines halogenids und katalysator hierfuer. |
US5906799A (en) * | 1992-06-01 | 1999-05-25 | Hemlock Semiconductor Corporation | Chlorosilane and hydrogen reactor |
FR2732453B1 (fr) * | 1995-03-31 | 1997-05-23 | Patry Jean | Dispositif echangeur-stockeur de calories et/ou de frigories |
US5755569A (en) * | 1996-02-26 | 1998-05-26 | Koch Engineering Company, Inc. | Media for heat exchange columns in regenerative thermal oxidizers |
JP3929140B2 (ja) * | 1997-10-27 | 2007-06-13 | 日本碍子株式会社 | 耐蝕性部材およびその製造方法 |
JP4166345B2 (ja) * | 1998-10-07 | 2008-10-15 | 日本碍子株式会社 | 塩素系ガスに対する耐蝕性部材 |
US6703530B2 (en) * | 2002-02-28 | 2004-03-09 | General Electric Company | Chemical reactor system and process |
CN2547719Y (zh) * | 2002-03-13 | 2003-04-30 | 中国有色工程设计研究总院 | 一种四氯化硅氢化生产三氯氢硅的装置 |
US20070178028A1 (en) * | 2004-02-23 | 2007-08-02 | Eiichi Fukasawa | Apparatus for production of metal chloride |
CA2584217C (en) * | 2004-10-29 | 2012-05-22 | Eisenmann Corporation | Natural gas injection system for regenerative thermal oxidizer |
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2007
- 2007-10-16 JP JP2007268617A patent/JP5160181B2/ja active Active
- 2007-10-25 US US12/312,471 patent/US8221691B2/en active Active
- 2007-10-25 CN CN2007800429212A patent/CN101535180B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS4847500A (ja) * | 1971-10-21 | 1973-07-05 | ||
JPS56169119A (en) * | 1980-05-27 | 1981-12-25 | Mitsubishi Metal Corp | Manufacture of trichlorosilane |
JPS62123011A (ja) * | 1985-11-25 | 1987-06-04 | Koujiyundo Silicon Kk | トリクロルシランの製造方法およびその装置 |
JPH07232910A (ja) * | 1994-01-28 | 1995-09-05 | Hemlock Semiconductor Corp | テトラクロロシランの水素添加法 |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5412447B2 (ja) * | 2009-01-30 | 2014-02-12 | 電気化学工業株式会社 | 炭素含有材料からなる反応容器を備える反応装置、その反応装置の腐食防止方法およびその反応装置を用いたクロロシラン類の生産方法 |
WO2019098348A1 (ja) * | 2017-11-20 | 2019-05-23 | 株式会社トクヤマ | 流動床方式反応装置 |
KR20200088287A (ko) * | 2017-11-20 | 2020-07-22 | 가부시끼가이샤 도꾸야마 | 유동상 방식 반응 장치 |
JPWO2019098348A1 (ja) * | 2017-11-20 | 2020-12-03 | 株式会社トクヤマ | 流動床方式反応装置 |
US10933396B2 (en) | 2017-11-20 | 2021-03-02 | Tokuyama Corporation | Fluidized bed reactor |
JP7284706B2 (ja) | 2017-11-20 | 2023-05-31 | 株式会社トクヤマ | 流動床方式反応装置およびトリクロロシランの製造方法 |
KR102632909B1 (ko) | 2017-11-20 | 2024-02-05 | 가부시끼가이샤 도꾸야마 | 유동상 방식 반응 장치 및 트리클로로실란의 제조 방법 |
Also Published As
Publication number | Publication date |
---|---|
US20100061901A1 (en) | 2010-03-11 |
US8221691B2 (en) | 2012-07-17 |
CN101535180A (zh) | 2009-09-16 |
CN101535180B (zh) | 2012-04-25 |
JP5160181B2 (ja) | 2013-03-13 |
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