JP2008122277A - エンコーダ - Google Patents
エンコーダ Download PDFInfo
- Publication number
- JP2008122277A JP2008122277A JP2006307842A JP2006307842A JP2008122277A JP 2008122277 A JP2008122277 A JP 2008122277A JP 2006307842 A JP2006307842 A JP 2006307842A JP 2006307842 A JP2006307842 A JP 2006307842A JP 2008122277 A JP2008122277 A JP 2008122277A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- encoder
- signals
- light
- moving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005286 illumination Methods 0.000 claims description 20
- 230000007274 generation of a signal involved in cell-cell signaling Effects 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 abstract description 15
- 238000005259 measurement Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
-
- G—PHYSICS
- G08—SIGNALLING
- G08B—SIGNALLING OR CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
- G08B21/00—Alarms responsive to a single specified undesired or abnormal condition and not otherwise provided for
- G08B21/18—Status alarms
Abstract
【解決手段】受光素子26からの光電変換信号Ia,Ib,Ic,Idに、演算を施し、その結果として2つの信号IA,IBとを算出する。そして、信号IA,IBから信号IABを生成し、この信号IABをエンコーダ10から出力する。この信号IABは、上記式(7)に示されるように、時間tに依存する項が4d・sin(ωt)である。一方、信号IA,IBの時間tに依存する項は上記式(5)及び(6)に示されるように、2d・sin(ωt)であるから、信号IABは、信号IA,IBに対して、変調度dを実質的に2倍にしたとのと同様に変化する。したがって、信号IABに基づいて移動スケール24の位置を検出した場合には、変調度dを2倍にしたのと同程度に精度よく移動スケール24の位置を検出することが可能となる。
【選択図】図1
Description
Ib=1+sin[4πx/p−2d・sin(ωt)] …(2)
Ic=1−cos[4πx/p−2d・sin(ωt)] …(3)
Id=1−sin[4πx/p−2d・sin(ωt)] …(4)
IB=Ib−Id=2sin[4πx/p−2d・sin(ωt)] …(6)
=2sin[8πx/p−4d・sin(ωt)] …(7)
Claims (4)
- 変調された照明光の干渉を利用して、移動体の位置情報を検出するエンコーダであって、
前記移動体に固定され、前記移動体の移動方向に配列されたパターンを有するスケールと;
前記照明光を前記スケールに照射して、相互に異なる2つ以上の位相情報を含む出射光を生成する光学系と;
前記出射光を受光して前記位相情報にそれぞれ対応した信号を生成する信号生成装置と;
前記信号生成装置で生成された信号に基づいて、前記移動体の位置情報を出力する出力装置と;を備えるエンコーダ。 - 前記信号生成装置により生成されたそれぞれの信号の、和算、減算、乗算、及び除算のうちの少なくとも1つの演算結果に基づいて、前記照明光の変調度合いを調整する処理装置を更に備える請求項1に記載のエンコーダ。
- 前記出力装置は、前記照明光の変調が停止した際にも、前記信号生成装置によって生成される信号に基づいて、前記移動体の位置情報を出力することを特徴とする請求項1又は2に記載のエンコーダ。
- 前記照明光の変調が停止した際に、外部にアラーム信号を出力するアラーム検出装置を更に備える請求項1〜3のいずれか一項に記載のエンコーダ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006307842A JP4924879B2 (ja) | 2006-11-14 | 2006-11-14 | エンコーダ |
EP07831432A EP2098830A4 (en) | 2006-11-14 | 2007-11-08 | CODER |
PCT/JP2007/071701 WO2008059748A1 (fr) | 2006-11-14 | 2007-11-08 | Codeur |
KR1020097008344A KR20090080504A (ko) | 2006-11-14 | 2007-11-08 | 인코더 |
CNA2007800420843A CN101535777A (zh) | 2006-11-14 | 2007-11-08 | 编码器 |
US12/432,025 US20090267781A1 (en) | 2006-11-14 | 2009-04-29 | Encoder |
US13/565,373 US20120292539A1 (en) | 2006-11-14 | 2012-08-02 | Encoder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006307842A JP4924879B2 (ja) | 2006-11-14 | 2006-11-14 | エンコーダ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008122277A true JP2008122277A (ja) | 2008-05-29 |
JP4924879B2 JP4924879B2 (ja) | 2012-04-25 |
Family
ID=39401554
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006307842A Expired - Fee Related JP4924879B2 (ja) | 2006-11-14 | 2006-11-14 | エンコーダ |
Country Status (6)
Country | Link |
---|---|
US (2) | US20090267781A1 (ja) |
EP (1) | EP2098830A4 (ja) |
JP (1) | JP4924879B2 (ja) |
KR (1) | KR20090080504A (ja) |
CN (1) | CN101535777A (ja) |
WO (1) | WO2008059748A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010078566A (ja) * | 2008-09-29 | 2010-04-08 | Canon Inc | 変位計測装置 |
CN102308187A (zh) * | 2009-02-06 | 2012-01-04 | 株式会社尼康 | 编码器 |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101484435B1 (ko) | 2003-04-09 | 2015-01-19 | 가부시키가이샤 니콘 | 노광 방법 및 장치, 그리고 디바이스 제조 방법 |
TWI609409B (zh) | 2003-10-28 | 2017-12-21 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造方法 |
TWI385414B (zh) | 2003-11-20 | 2013-02-11 | 尼康股份有限公司 | 光學照明裝置、照明方法、曝光裝置、曝光方法以及元件製造方法 |
TWI505329B (zh) | 2004-02-06 | 2015-10-21 | 尼康股份有限公司 | 光學照明裝置、曝光裝置、曝光方法以及元件製造方法 |
EP2660853B1 (en) | 2005-05-12 | 2017-07-05 | Nikon Corporation | Projection optical system, exposure apparatus and exposure method |
US8451427B2 (en) | 2007-09-14 | 2013-05-28 | Nikon Corporation | Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method |
JP5267029B2 (ja) | 2007-10-12 | 2013-08-21 | 株式会社ニコン | 照明光学装置、露光装置及びデバイスの製造方法 |
KR101546987B1 (ko) | 2007-10-16 | 2015-08-24 | 가부시키가이샤 니콘 | 조명 광학 시스템, 노광 장치 및 디바이스 제조 방법 |
EP2179330A1 (en) | 2007-10-16 | 2010-04-28 | Nikon Corporation | Illumination optical system, exposure apparatus, and device manufacturing method |
US8379187B2 (en) | 2007-10-24 | 2013-02-19 | Nikon Corporation | Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method |
US9116346B2 (en) | 2007-11-06 | 2015-08-25 | Nikon Corporation | Illumination apparatus, illumination method, exposure apparatus, and device manufacturing method |
WO2009145048A1 (ja) | 2008-05-28 | 2009-12-03 | 株式会社ニコン | 空間光変調器の検査装置および検査方法、照明光学系、照明光学系の調整方法、露光装置、およびデバイス製造方法 |
NL2005259A (en) * | 2009-09-29 | 2011-03-30 | Asml Netherlands Bv | Imprint lithography. |
KR101387951B1 (ko) * | 2013-05-10 | 2014-04-22 | 한국기계연구원 | 싱글 필드 방식의 엔코더를 이용한 웹 이송 속도 측정 방법 |
CN104410445B (zh) * | 2014-10-16 | 2017-05-17 | 北京理工大学 | 一种光发射机调制度测量设备的校准装置和方法 |
JP6521676B2 (ja) * | 2015-03-09 | 2019-05-29 | キヤノン株式会社 | 動き情報取得装置および動き情報取得方法 |
USD844562S1 (en) | 2016-10-05 | 2019-04-02 | General Electric Company | Fuel cell |
US10302466B2 (en) * | 2017-06-29 | 2019-05-28 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration including first and second illumination source diffraction gratings arranged in first and second parallel planes for providing displacement signals |
US10295648B2 (en) * | 2017-06-29 | 2019-05-21 | Mitutoyo Corporation | Contamination and defect resistant optical encoder configuration including a normal of readhead plane at a non-zero pitch angle relative to measuring axis for providing displacement signals |
DE102018251727A1 (de) * | 2017-12-29 | 2019-07-04 | Mitutoyo Corporation | Verschmutzungs- und defektbeständige optische Drehpositionsgeberkonfiguration zum Bereitstellen von Verschiebungssignalen |
KR20220074118A (ko) | 2020-11-27 | 2022-06-03 | 김유진 | 아두이노기반의 다이어트 체중 관리 시스템 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005326231A (ja) * | 2004-05-13 | 2005-11-24 | Sendai Nikon:Kk | 光電式エンコーダ |
WO2006064801A1 (ja) * | 2004-12-13 | 2006-06-22 | Nikon Corporation | 光電式エンコーダ |
JP2006170899A (ja) * | 2004-12-17 | 2006-06-29 | Sendai Nikon:Kk | 光電式エンコーダ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5098190A (en) * | 1989-08-07 | 1992-03-24 | Optra, Inc. | Meterology using interferometric measurement technology for measuring scale displacement with three output signals |
JPH074993A (ja) * | 1993-03-23 | 1995-01-10 | Ricoh Co Ltd | エンコーダ装置 |
US6639686B1 (en) | 2000-04-13 | 2003-10-28 | Nanowave, Inc. | Method of and apparatus for real-time continual nanometer scale position measurement by beam probing as by laser beams and the like of atomic and other undulating surfaces such as gratings or the like relatively moving with respect to the probing beams |
JP2002243503A (ja) * | 2001-02-13 | 2002-08-28 | Nikon Corp | 光学式エンコーダ |
US7315381B2 (en) * | 2004-10-26 | 2008-01-01 | Mitutoyo Corporation | Monolithic quadrature detector |
US7332709B2 (en) * | 2004-12-13 | 2008-02-19 | Nikon Corporation | Photoelectric encoder |
US7502122B2 (en) * | 2006-07-31 | 2009-03-10 | Mitutoyo Corporation | Fiber-optic miniature encoder for fine pitch scales |
-
2006
- 2006-11-14 JP JP2006307842A patent/JP4924879B2/ja not_active Expired - Fee Related
-
2007
- 2007-11-08 CN CNA2007800420843A patent/CN101535777A/zh active Pending
- 2007-11-08 KR KR1020097008344A patent/KR20090080504A/ko active IP Right Grant
- 2007-11-08 EP EP07831432A patent/EP2098830A4/en not_active Withdrawn
- 2007-11-08 WO PCT/JP2007/071701 patent/WO2008059748A1/ja active Application Filing
-
2009
- 2009-04-29 US US12/432,025 patent/US20090267781A1/en not_active Abandoned
-
2012
- 2012-08-02 US US13/565,373 patent/US20120292539A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005326231A (ja) * | 2004-05-13 | 2005-11-24 | Sendai Nikon:Kk | 光電式エンコーダ |
WO2006064801A1 (ja) * | 2004-12-13 | 2006-06-22 | Nikon Corporation | 光電式エンコーダ |
JP2006170899A (ja) * | 2004-12-17 | 2006-06-29 | Sendai Nikon:Kk | 光電式エンコーダ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010078566A (ja) * | 2008-09-29 | 2010-04-08 | Canon Inc | 変位計測装置 |
CN102308187A (zh) * | 2009-02-06 | 2012-01-04 | 株式会社尼康 | 编码器 |
Also Published As
Publication number | Publication date |
---|---|
EP2098830A4 (en) | 2012-11-14 |
WO2008059748A1 (fr) | 2008-05-22 |
US20120292539A1 (en) | 2012-11-22 |
KR20090080504A (ko) | 2009-07-24 |
US20090267781A1 (en) | 2009-10-29 |
CN101535777A (zh) | 2009-09-16 |
EP2098830A1 (en) | 2009-09-09 |
JP4924879B2 (ja) | 2012-04-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4924879B2 (ja) | エンコーダ | |
JP5500075B2 (ja) | エンコーダ | |
US7332709B2 (en) | Photoelectric encoder | |
JP5479255B2 (ja) | 光学式エンコーダ | |
JP4827857B2 (ja) | エンコーダ | |
JP2007170938A (ja) | エンコーダ | |
JP4924884B2 (ja) | エンコーダ | |
JP4946362B2 (ja) | エンコーダ | |
JP4899455B2 (ja) | 光電式エンコーダ | |
JP5212840B2 (ja) | エンコーダ | |
WO2007138869A1 (ja) | エンコーダ | |
WO2007074752A1 (ja) | チルトセンサ及びエンコーダ | |
JP5152613B2 (ja) | エンコーダ | |
JP6111852B2 (ja) | エンコーダ装置 | |
JP6115655B2 (ja) | エンコーダ装置、及び装置 | |
JP2007303957A (ja) | エンコーダ | |
JP2016151516A (ja) | エンコーダ、およびそれを用いた装置 | |
JP2007147283A (ja) | エンコーダ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20080620 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A711 Effective date: 20080624 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090909 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100922 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110906 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111104 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20111104 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120112 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120125 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150217 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4924879 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150217 Year of fee payment: 3 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |