JP2008088879A - 真空排気装置 - Google Patents

真空排気装置 Download PDF

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Publication number
JP2008088879A
JP2008088879A JP2006270047A JP2006270047A JP2008088879A JP 2008088879 A JP2008088879 A JP 2008088879A JP 2006270047 A JP2006270047 A JP 2006270047A JP 2006270047 A JP2006270047 A JP 2006270047A JP 2008088879 A JP2008088879 A JP 2008088879A
Authority
JP
Japan
Prior art keywords
pump
vacuum
discharge port
compression
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006270047A
Other languages
English (en)
Japanese (ja)
Inventor
Shiro Tanigawa
志郎 谷川
Takamitsu Nakayama
貴光 中山
Ryusuke Muto
龍介 武藤
Minako Toda
美奈子 戸田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Priority to JP2006270047A priority Critical patent/JP2008088879A/ja
Priority to US11/861,005 priority patent/US20080080984A1/en
Priority to EP07018943A priority patent/EP1906022A1/de
Priority to CNA2007101676558A priority patent/CN101230858A/zh
Publication of JP2008088879A publication Critical patent/JP2008088879A/ja
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/102—Geometry of the inlet or outlet of the outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
JP2006270047A 2006-09-29 2006-09-29 真空排気装置 Pending JP2008088879A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006270047A JP2008088879A (ja) 2006-09-29 2006-09-29 真空排気装置
US11/861,005 US20080080984A1 (en) 2006-09-29 2007-09-25 Evacuation apparatus
EP07018943A EP1906022A1 (de) 2006-09-29 2007-09-26 Entleerungsvorrichtung
CNA2007101676558A CN101230858A (zh) 2006-09-29 2007-09-29 抽空装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006270047A JP2008088879A (ja) 2006-09-29 2006-09-29 真空排気装置

Publications (1)

Publication Number Publication Date
JP2008088879A true JP2008088879A (ja) 2008-04-17

Family

ID=38933486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006270047A Pending JP2008088879A (ja) 2006-09-29 2006-09-29 真空排気装置

Country Status (4)

Country Link
US (1) US20080080984A1 (de)
EP (1) EP1906022A1 (de)
JP (1) JP2008088879A (de)
CN (1) CN101230858A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011077930A1 (ja) 2009-12-24 2011-06-30 アネスト岩田株式会社 多段真空ポンプ
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
KR101935336B1 (ko) * 2011-12-14 2019-01-04 스털링 인더스트리 컨설트 게엠베하 체임버를 배기시키고 상기 체임버로부터 추출된 기체를 정화하는 장치 및 방법
DE202012007108U1 (de) * 2012-07-24 2012-08-22 Ellcie Industries Gmbh Vakuum-Vorrichtung
JP6232868B2 (ja) 2012-10-23 2017-11-22 株式会社島津製作所 モータ駆動装置および真空ポンプ
JP2014147170A (ja) * 2013-01-28 2014-08-14 Shimadzu Corp 真空ポンプ用モータ駆動装置および真空ポンプ
KR101928804B1 (ko) * 2013-05-30 2018-12-13 오리온 기까이 가부시끼가이샤 2축 회전펌프
WO2017031807A1 (zh) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 一种多驱动腔非共轴真空泵

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US6534940B2 (en) * 2001-06-18 2003-03-18 Smart Marine Systems, Llc Marine macerator pump control module
WO2003023229A1 (fr) * 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2005155540A (ja) * 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011077930A1 (ja) 2009-12-24 2011-06-30 アネスト岩田株式会社 多段真空ポンプ
US8517701B2 (en) 2009-12-24 2013-08-27 Anest Iwata Corporation Multistage vacuum pump
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Also Published As

Publication number Publication date
CN101230858A (zh) 2008-07-30
US20080080984A1 (en) 2008-04-03
EP1906022A1 (de) 2008-04-02

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Effective date: 20090915

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