CN101230858A - 抽空装置 - Google Patents

抽空装置 Download PDF

Info

Publication number
CN101230858A
CN101230858A CNA2007101676558A CN200710167655A CN101230858A CN 101230858 A CN101230858 A CN 101230858A CN A2007101676558 A CNA2007101676558 A CN A2007101676558A CN 200710167655 A CN200710167655 A CN 200710167655A CN 101230858 A CN101230858 A CN 101230858A
Authority
CN
China
Prior art keywords
exhaust port
discharge
pump
gas
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2007101676558A
Other languages
English (en)
Chinese (zh)
Inventor
谷川志郎
中山贵光
武藤龙介
户田美奈子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Publication of CN101230858A publication Critical patent/CN101230858A/zh
Pending legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/102—Geometry of the inlet or outlet of the outlet

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
CNA2007101676558A 2006-09-29 2007-09-29 抽空装置 Pending CN101230858A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP270047/06 2006-09-29
JP2006270047A JP2008088879A (ja) 2006-09-29 2006-09-29 真空排気装置

Publications (1)

Publication Number Publication Date
CN101230858A true CN101230858A (zh) 2008-07-30

Family

ID=38933486

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2007101676558A Pending CN101230858A (zh) 2006-09-29 2007-09-29 抽空装置

Country Status (4)

Country Link
US (1) US20080080984A1 (de)
EP (1) EP1906022A1 (de)
JP (1) JP2008088879A (de)
CN (1) CN101230858A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103780189A (zh) * 2012-10-23 2014-05-07 株式会社岛津制作所 电动机驱动装置及真空泵
CN103973184A (zh) * 2013-01-28 2014-08-06 株式会社岛津制作所 真空泵用电机驱动装置及真空泵
CN104066989A (zh) * 2011-12-14 2014-09-24 斯特林工业咨询有限公司 用于排空腔室并净化从所述腔室抽取的气体的装置和方法
CN105164420A (zh) * 2013-05-30 2015-12-16 奥利安机械股份有限公司 双轴旋转泵

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI467092B (zh) * 2008-09-10 2015-01-01 Ulvac Inc 真空排氣裝置
JP5284940B2 (ja) 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
DE202012007108U1 (de) * 2012-07-24 2012-08-22 Ellcie Industries Gmbh Vakuum-Vorrichtung
WO2017031807A1 (zh) * 2015-08-27 2017-03-02 上海伊莱茨真空技术有限公司 一种多驱动腔非共轴真空泵
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100190310B1 (ko) * 1992-09-03 1999-06-01 모리시따 요오이찌 진공배기장치
US6534940B2 (en) * 2001-06-18 2003-03-18 Smart Marine Systems, Llc Marine macerator pump control module
WO2003023229A1 (fr) * 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2005155540A (ja) * 2003-11-27 2005-06-16 Aisin Seiki Co Ltd 多段ドライ真空ポンプ

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104066989A (zh) * 2011-12-14 2014-09-24 斯特林工业咨询有限公司 用于排空腔室并净化从所述腔室抽取的气体的装置和方法
CN103780189A (zh) * 2012-10-23 2014-05-07 株式会社岛津制作所 电动机驱动装置及真空泵
US9515589B2 (en) 2012-10-23 2016-12-06 Shimadzu Corporation Motor driving device and vacuum pump
CN103780189B (zh) * 2012-10-23 2017-04-26 株式会社岛津制作所 电动机驱动装置及真空泵
CN103973184A (zh) * 2013-01-28 2014-08-06 株式会社岛津制作所 真空泵用电机驱动装置及真空泵
CN103973184B (zh) * 2013-01-28 2017-08-29 株式会社岛津制作所 真空泵用电机驱动装置及真空泵
US10260559B2 (en) 2013-01-28 2019-04-16 Shimadzu Corporation Motor driving device and vacuum pump
CN105164420A (zh) * 2013-05-30 2015-12-16 奥利安机械股份有限公司 双轴旋转泵

Also Published As

Publication number Publication date
EP1906022A1 (de) 2008-04-02
JP2008088879A (ja) 2008-04-17
US20080080984A1 (en) 2008-04-03

Similar Documents

Publication Publication Date Title
CN101230858A (zh) 抽空装置
KR100876318B1 (ko) 진공배기장치 및 진공배기장치의 운전방법
CN204003387U (zh) 水气两用的微型气泵
RU2674297C2 (ru) Система откачки для создания вакуума и способ откачки при помощи этой системы откачки
TWI734588B (zh) 真空幫浦系統中的抽泵方法及真空幫浦系統
US20080080982A1 (en) Evacuation apparatus
JP2007291940A (ja) 真空ポンプ
TWI725943B (zh) 用於產生真空的泵送系統及利用此泵送系統的泵送方法
KR101878088B1 (ko) 진공 펌프 시스템
JPH11270326A (ja) ドレン回収機能付き吐出サイレンサ
CN102322424B (zh) 喷射式自吸离心水泵
JP2003129957A (ja) 真空排気方法および真空排気装置
CN101545471B (zh) 风动潜水泵
EP0974756A3 (de) Vakuumpumpe und vakuumvorrichtung
CN105782135A (zh) 一种气压真空产生器
US10260502B2 (en) Pumping method in a system of vacuum pumps and system of vacuum pumps
CN211059033U (zh) 一种低噪声离心风机
CN212672096U (zh) 一种真空自动换气装置
CN213063874U (zh) 一种新型真空泵
CN212318292U (zh) 一种节能高效低噪音螺杆真空泵
CN219840764U (zh) 一种微型气泵
CN209444561U (zh) 一种真空泵的节能控制装置
CN116464639A (zh) 双流道罗茨液环真空泵系统及其控制方法
CN116025542A (zh) 一种真空泵高效节能装置
JP3413526B2 (ja) リショルム型コンプレッサ

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C02 Deemed withdrawal of patent application after publication (patent law 2001)
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20080730