EP1906022A1 - Entleerungsvorrichtung - Google Patents

Entleerungsvorrichtung Download PDF

Info

Publication number
EP1906022A1
EP1906022A1 EP07018943A EP07018943A EP1906022A1 EP 1906022 A1 EP1906022 A1 EP 1906022A1 EP 07018943 A EP07018943 A EP 07018943A EP 07018943 A EP07018943 A EP 07018943A EP 1906022 A1 EP1906022 A1 EP 1906022A1
Authority
EP
European Patent Office
Prior art keywords
discharging
gas
pump
discharge opening
vacuum pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07018943A
Other languages
English (en)
French (fr)
Inventor
Shiro Tanigawa
Takamitsu Nakayama
Ryusuke Muto
Minako Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Publication of EP1906022A1 publication Critical patent/EP1906022A1/de
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/102—Geometry of the inlet or outlet of the outlet

Definitions

  • the present invention relates to an evacuation apparatus for evacuating a tank, a chamber, and the like; wherein a mechanical booster pump for vacuums is provided at an up-stream side of an exterior side vacuum pump.
  • a mechanical booster pump for vacuums is conventionally utilized by being placed at an up-stream side (a vacuum side) of an exterior side vacuum pump (a back pump) with a lower pumping speed.
  • a mechanical booster pump Roots type vacuum pumps are applied in general. And Roots type vacuum pumps perform compression/discharge works by rotating pairs of Roots type vanes.
  • Roots type vacuum pump 020 As shown in Fig. 4, while a pair of axes of Roots type rotors rotate each other to reverse directions, suction and discharge of gas are performed by changing a volume of a closed space.
  • the ultimate pressure to be attained (the pressure to be lowered) is not advantageous one because of the small compression ratio due to Roots type rotors.
  • a claw type vacuum pump 026 As a vacuum pump of large compression ratio, a claw type vacuum pump 026 (Fig. 5), which has a claw (like a nail of raptorial birds) shaped rotor 024, has been known.
  • the claw type vacuum pump 026 is apt to suffer from power loss (increased power consumption) and/or heat loss (increased heat generation), since the claw type vacuum pump 026 has a large interior discharge resistance for the diameter of a discharge opening 028 for discharging compressed gas being small.
  • the exterior side vacuum pump (the back pump) installed at the down-stream side can not be fully utilized due to the large discharge resistance, there arises a problem that an improved discharge speed by placing a booster pump is difficult to be obtained.
  • reference 1 Japanese granted utility model publication No.JP7-19554 (hereafter referred to as reference 1) is disclosed an evacuation apparatus, wherein a booster pump like a mechanical booster pump is provided at the up-stream side of a vacuum pump, and wherein gas discharge is performed by the two stage vacuum pumps in series.
  • a preliminary discharge line (passage) A and a main discharge line B start from the inside of a chamber and are connected to each other.
  • a stop valve 03a and a butterfly valve 04 are provided in series.
  • the preliminary discharge line A is connected to a preliminary pump 01.
  • stop valves 03b1, 03b2 and a discharge pump 02 are provided on the main discharge line B.
  • a main discharge (evacuating) is performed through the preliminary pump 01 and the discharge pump 02; wherein the stop valve 03a and the butterfly valve 04, on the preliminary discharge line A, are closed; and the stop valves 03b1, 03b2 and the discharge pump 02, on the main discharge line B, are opened.
  • a booster pump 012 is connected to an intermediate stage of a dry Roots pump 010 of a multi-stage type or the last stage 011 of the Roots pump 10 so that the reduction of power consumption is aimed at (Patent reference 2; JP: 2003-155988,A ).
  • the booster pump 012 in the patent reference 2 aims at the reduction of power consumption necessary for driving the dry vacuum pump 010. Improving an ultimate pressure as well as securing the pumping speed is not mentioned in the patent reference 2.
  • a subject of the present invention is to realize an evacuation apparatus for evacuating a tank, a chamber, and the like; wherein a mechanical booster pump for vacuums is provided at an up-stream side of an exterior side vacuum pump so as to improve an ultimate pressure of the exterior side vacuum pump as well as to secure a pumping speed by utilizing the performance of the exterior side vacuum pump.
  • the present invention proposes an evacuation apparatus for evacuating a tank, a chamber and the like; wherein a mechanical booster pump is provided at the up-stream side of an exterior side vacuum pump; wherein the mechanical booster pump comprises a discharge opening for discharging a low compression gas and a discharge opening for discharging a high compression gas; wherein, in case when the exterior side vacuum pump starts discharging a gas, the gas is sent to the exterior side vacuum pump through both the discharge opening for discharging a low compression gas and the discharge opening for discharging a high compression gas and, in case when the discharged gas pressure reaches afterward an ultimate pressure attainable by the exterior side vacuum pump, the gas is sent to the exterior side vacuum pump only through the discharge opening for discharging a high compression gas.
  • the above embodiment of the present invention for evacuating a tank, a chamber and the like, realizes a medium vacuum (an ultimate pressure) of the exterior side vacuum pump without deteriorating a pumping speed in a manner comprising the steps of: (i)discharging a gas into the exterior side vacuum pump through both the discharge opening for discharging a low compression gas and the discharge opening for discharging a high compression gas of the mechanical booster pump in case when the vacuum is within a range from the pressure of the discharge commencement till the attainable pressure of the exterior side vacuum pump, (ii) restraining the discharging resistance of the mechanical booster pump by means of securing a large cross sectional area of the discharge opening of the mechanical booster pump, and (iii) obtaining an increased pumping speed and utilizing the performance intrinsic to the exterior side vacuum pump. Furthermore, this invention usefully contributes to the reduction of heat loss and power loss of the mechanical booster pump because of the low compression ratio of the gas emitted through the discharge opening for discharging a low compression gas and the discharge opening
  • the invention makes it possible to lower the ultimate pressure in view of the whole equipment while the pumping speed is secured.
  • Another preferable embodiment of the invention further includes: (i) a pressure sensor for detecting the pressure in a tank, a chamber and the like, and (ii) a controller for opening/closing, by a signal from the pressure sensor, an open/close valve which is placed between the discharge opening for discharging a low compression gas and the exterior side vacuum pump; wherein the controller closes the open/close valve when the controller recognizes the ultimate pressure by the signal mentioned above.
  • the controller automatically closes, based on a signal from the sensor, the open/close valve between the discharge opening for discharging a low compression gas and the exterior side vacuum pump, when the ultimate pressure is reached. Therefore, the embodiment makes it possible that the gas is sent to the exterior side vacuum pump through both the discharge opening for discharging a low compression gas and the discharge opening for discharging a high compression gas before the ultimate pressure is reached and the gas is sent to the exterior side vacuum pump only through the discharge opening for discharging a high compression gas after the ultimate pressure is reached.
  • Another preferable embodiment of the invention includes (i) a controller for opening/closing an open/close valve which is placed between the discharge opening for discharging a low compression gas and the exterior side vacuum pump; wherein the controller closes the open/close valve in case when a predetermined time passes after the exterior side vacuum pump starts discharging a gas till the ultimate pressure is attained.
  • the controller automatically closes the open/close valve between the discharge opening for discharging a low compression gas and the exterior side vacuum pump, in case when a predetermined time passes after the exterior side vacuum pump starts discharging a gas till the ultimate pressure is attained. Therefore, the embodiment makes it possible that the gas is sent to the exterior side vacuum pump through both the discharge opening for discharging a low compression gas and the discharge opening for discharging a high compression gas before the ultimate pressure is reached and the gas is sent to the exterior side vacuum pump only through the discharge opening for discharging a high compression gas after the ultimate pressure is reached.
  • Another preferable embodiment of the invention comprises: a vacuum pump of a claw type as the mechanical booster pump; wherein the discharge opening for discharging a high compression gas is located at the wall of the pump casing, the wall being in a plane vertical to the axes of the pump rotors, while the discharge opening for discharging a high compression gas faces the compression space; wherein the discharge opening for discharging a low compression gas is located in a plane parallel to the plane containing both rotation axes of the pump rotors as well as the discharge openings for low compression located on a side-wall-surface of the pump casing; and further wherein the cross-sectional area of the discharge opening for discharging a low compression gas is formed more greatly than the cross-sectional area of the discharge opening for discharging a high compression gas.
  • the discharge opening for discharging a high compression gas is located at the wall of the pump casing, the wall being in a plane vertical to the axes of the pump rotors, while the discharge opening for discharging a high compression gas faces the compression space; wherein the discharge opening for discharging a low compression gas is located in a plane parallel to the plane containing both rotation axes of the pump rotors as well as the discharge openings for low compression located on a side-wall-surface of the pump casing; and further wherein the cross-sectional area of the discharge opening for discharging a low compression gas is formed more greatly than the cross-sectional area of the discharge opening for discharging a high compression gas, the invention realizes a booster pump provided with the discharge opening for discharging a high compression gas and the discharge opening for discharging a low compression gas.
  • the present invention can realize an evacuation apparatus for evacuating a tank, a chamber and the like, comprising a mechanical booster pump at the up-stream side of an exterior side vacuum pump, wherein the mechanical booster pump utilizes the performance of the exterior side vacuum pump and improves an ultimate pressure of the exterior side vacuum pump without deterioration of pumping speed.
  • FIG. 1 shows a whole embodiment of the embodiment of the present invention and FIG. 2 shows a view of the A-A cross-section in Fig. 1.
  • an evacuation apparatus 1 is equipped with an exterior side vacuum pump (a vacuum pump) 3 and a mechanical booster pump (a mechanical booster pump for a vacuum) 5 which is provided at the up-stream side of the vacuum pump 3 so that a vacuum in a vacuum tank 7 is obtained by running the both pumps 3 and 5.
  • a vacuum pump a vacuum pump
  • a mechanical booster pump a mechanical booster pump for a vacuum
  • the mechanical booster pump 5 is of a claw type vacuum pump 9, comprising a pair of pump rotors 11a and 11b, a gas suction port 13, and a gas discharge port 15.
  • the mechanical booster pump 5 further comprise a pump casing (a housing) 17; wherein the pair of pump rotors 11a and 11b are built-in, and a rotating mechanism; wherein shafts 19 rotates the pump rotors 11a and 11b by transferring powers from a motor (not shown) as a power source to the rotors.
  • the type of the exterior side vacuum pump 3 is not limited to a Roots-type and can be any other type of vacuum pumps such as a claw type, a screw type, a gear type and so on.
  • the pump rotors 11a and 11b have protrusive parts 21a and 21b like a claw (a nail of raptorial birds) respectively. And the protrusive parts 21a and 21b fit into counter-depressed parts 23b and 23a respectively. Thus, the fitting space forms a compression space 25.
  • the gas discharge port 15 has two openings, namely, a discharge opening for discharging a low compression gas (a DOLC) 27 and a discharge opening for discharging a high compression gas (a DOHC) 29.
  • the DOLC 27 discharges the gas compressed within the mechanical booster pump at a stage of a lower compression ratio, while the DOHC 29 discharges the gas when a stage of a higher compression ratio is realized.
  • the DOLC 27 is placed so that the gas inhaled through the gas suction port 13 is discharged before the gas is compressed into a compression space 25 formed by the pump rotors 11a and 11b.
  • the DOLC 27 is comprised of a first discharge opening for discharging a low compression gas 27a corresponding to the pump rotor 11a and a second discharge opening for discharging a low compression gas 27b corresponding to the pump rotor 11b.
  • the cross-sectional area of the first discharge opening for discharging a low compression gas 27a is the same as that of the second discharge opening for discharging a low compression gas 27b, the cross sectional area of the openings 27a and 27b is formed more greatly than the cross-sectional area of the DOHC 29.
  • the DOHC 29 is located at the wall of the pump casing 17, the wall being in a plane vertical to the axes of the pump rotors 11a and 11b, while the DOHC 29 faces the compression space 25 so as to discharge highly compressed gas.
  • the gas suction port 13 is located in a plane parallel to the plane containing both the rotation axes of the pump rotors 11a and 11b as well as the gas suction port 13 is located on one side-wall-surface of the pump casing 17, while the first and second discharge openings for low compression 27a and 27b are located in a plane parallel to the plane containing both the rotation axes of the pump rotors 11a and 11b as well as the first and second discharge openings for low compression 27a and 27b are located on another side-wall-surface of the pump casing 17.
  • a mechanical booster pump 5 provided with a DOHC 29 and a DOLC 27 can be composed.
  • a first low compression discharge passage 30 which communicatively connects the first discharge opening for discharging a low compression gas 27a and the exterior side vacuum pump 3, is provided an open/close valve 34, the opening/closing of which is controlled by the a controller 32.
  • a second low compression discharge passage 36 which feeds the gas through the second discharge opening for discharging a low compression gas 27b, flows into the first low compression discharge passage 30 at the up-stream side of the valve 34.
  • a high compression discharge passage 38 which feeds the gas through the discharge opening for discharging a high compression gas 29, flows into a passage 30 at the down-stream side of the valve 34.
  • Pressure signals from the vacuum tank 7 or inlet pressure signals from the mechanical booster pump 5 are inputted into a controller 32 via a pressure sensor 40, and elapsed-time signals are inputted into the controller 32 from a timer 42.
  • the open/close valve 34 is opened, the exterior side vacuum pump 3 is started, and the mechanical booster pump 5 is consecutively started.
  • the discharged gas from the first discharge opening for discharging a low compression gas 27a, the second discharge opening for discharging a low compression gas 27b, and/or the DOHC 29 is sent to the exterior side vacuum pump 3 through the first low compression discharge passage 30, the second low compression discharge passage 36, and/or the high compression discharge passage 38 respectively.
  • the power loss as well as the heat loss in the mechanical booster pump 5 can be reduced because of the lower compression ratio.
  • the controller 32 closes the open/close valve 34 by an input signal from the pressure sensor 40, when a predetermined ultimate pressure based on the capacity of the exterior side vacuum pump 3 is reached.
  • a discharge from the first discharge opening for discharging a low compression gas 27a as well as from the second discharge opening for discharging a low compression gas 27b is intercepted, and the discharge only from the DOHC 29 remains.
  • a differential pressure by the compression action of the compression space 25 in the mechanical booster pump 5 can be generated, and the mentioned differential pressure is added to the medium vacuum generated based on the capability of the exterior side vacuum pump 3. Consequently, a high vacuum, thereof pressure is lower than a pressure of the medium vacuum, can be attained.
  • FIG. 3 illustrates a characteristic of an evacuating process for a vacuum.
  • the compression action is performed at the exterior side vacuum pump 3. That is, the exterior side vacuum pump 3 performs an evacuating process from an ambient pressure P0 to an ultimate pressure P1. In addition, the starting pressure P0 is lowered to the medium pressure P1.
  • a mechanical booster pump 5 provided with a discharge opening for discharging a low compression gas (a DOLC) 27, which discharges a gas of low compression ratio, and a discharge opening for discharging a high compression gas (a DOHC) 29, which discharges a gas of high compression ratio, an ultimate pressure is lowered and a high vacuum can be attained while a pumping speed is secured.
  • a DOLC low compression gas
  • a DOHC high compression gas
  • an elapsed time signal from a timer 42 instead of a pressure signal from a pressure sensor 40, switches an open/close condition of the open/close valve 34.
  • Fig. 3 describes elapsed time t0, t1, and/or t2 in relation to corresponding vacuum conditions.
  • a time t0 is defined as the time of beginning of gas discharging into the exterior side vacuum pump 3; through all the passages of the first low compression discharge passage 30, the second low compression discharge passage 36, and the high compression discharge passage 38; after the open/close valve 34 is opened, the exterior side vacuum pump 3 is driven, and further the mechanical booster pump 5 is driven.
  • a time t1 is defined as a time span in which the pressure of gas decreases from an ambient pressure P0 to a pressure P1 (medium vacuum pressure) on the condition that all the passages 30, 36 and 38 are fully communicatively open.
  • the time span (t1 minus t0) is to be predetermined by calculation based on the volume of the vacuum tank 7, the discharging capacity (swept volume)of the exterior side vacuum pump 3, the discharging capacity of the mechanical booster pump 5, driving conditions of each pump, the ambient temperature and so on.
  • the open/close valve 34 is closed. Then, with the aid of a differential pressure due to the compression action of the compression space 25 of a mechanical booster pump 5, a lower pressure, namely, the high vacuum is realized at the time t2.
  • the second embodiment makes it possible to improve the ultimate pressure toward a lower pressure, that is, to attain the high vacuum without deteriorating the pumping speed.
  • the controller 32 automatically opens and closes the open/close valve 34.
  • operators can manually open and closes the valve 34, based on their own judgment as to the values detected by the pressure sensor 40.
  • the mechanical booster pump 5 As for the mechanical booster pump 5, the explanation was given in consideration that the mechanical booster pump 5 is of a claw type vacuum pump 9. However, it goes without saying that the mechanical booster pump 5 can be of a Roots type pump or of a screw type pump other than of a claw type pump, so long as the mechanical booster pump 5 is provided with the DOLC 27 which discharges the gas of low compression ratio and the DOHC 29 which discharges the gas of high compression ratio.
  • the gas as a medium is any one of general gases including a specific gas such as air.
  • the present invention discloses an evacuation apparatus for evacuating a tank, a chamber and the like, wherein a mechanical booster pump is provided at the up-stream side of an exterior side vacuum pump so as to utilize the performance of the exterior side vacuum pump and improve an ultimate pressure of the exterior side vacuum pump without deterioration of pumping speed. And the present invention can be usefully applied to evacuation apparatuses.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
EP07018943A 2006-09-29 2007-09-26 Entleerungsvorrichtung Withdrawn EP1906022A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006270047A JP2008088879A (ja) 2006-09-29 2006-09-29 真空排気装置

Publications (1)

Publication Number Publication Date
EP1906022A1 true EP1906022A1 (de) 2008-04-02

Family

ID=38933486

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07018943A Withdrawn EP1906022A1 (de) 2006-09-29 2007-09-26 Entleerungsvorrichtung

Country Status (4)

Country Link
US (1) US20080080984A1 (de)
EP (1) EP1906022A1 (de)
JP (1) JP2008088879A (de)
CN (1) CN101230858A (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2330299A4 (de) * 2008-09-10 2016-06-15 Ulvac Inc Vorrichtung für vakuumentleerung
CN106438365A (zh) * 2015-08-27 2017-02-22 上海伊莱茨真空技术有限公司 一种模块一体式多级多驱动腔部分非共轴干式真空单泵

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5284940B2 (ja) 2009-12-24 2013-09-11 アネスト岩田株式会社 多段真空ポンプ
KR101935336B1 (ko) * 2011-12-14 2019-01-04 스털링 인더스트리 컨설트 게엠베하 체임버를 배기시키고 상기 체임버로부터 추출된 기체를 정화하는 장치 및 방법
DE202012007108U1 (de) * 2012-07-24 2012-08-22 Ellcie Industries Gmbh Vakuum-Vorrichtung
JP6232868B2 (ja) 2012-10-23 2017-11-22 株式会社島津製作所 モータ駆動装置および真空ポンプ
JP2014147170A (ja) * 2013-01-28 2014-08-14 Shimadzu Corp 真空ポンプ用モータ駆動装置および真空ポンプ
KR101928804B1 (ko) * 2013-05-30 2018-12-13 오리온 기까이 가부시끼가이샤 2축 회전펌프
GB2619105A (en) * 2022-05-23 2023-11-29 Leybold France S A S Pump start up control

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585911A1 (de) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Zweistufige Trockenprimärpumpe
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
WO2005038255A2 (en) * 2003-10-17 2005-04-28 Ebara Corporation Evacuation apparatus
EP1536140A1 (de) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Mehrstufige trockene Vakuumpumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6534940B2 (en) * 2001-06-18 2003-03-18 Smart Marine Systems, Llc Marine macerator pump control module

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0585911A1 (de) * 1992-09-03 1994-03-09 Matsushita Electric Industrial Co., Ltd. Zweistufige Trockenprimärpumpe
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
WO2005038255A2 (en) * 2003-10-17 2005-04-28 Ebara Corporation Evacuation apparatus
EP1536140A1 (de) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Mehrstufige trockene Vakuumpumpe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2330299A4 (de) * 2008-09-10 2016-06-15 Ulvac Inc Vorrichtung für vakuumentleerung
CN106438365A (zh) * 2015-08-27 2017-02-22 上海伊莱茨真空技术有限公司 一种模块一体式多级多驱动腔部分非共轴干式真空单泵

Also Published As

Publication number Publication date
CN101230858A (zh) 2008-07-30
US20080080984A1 (en) 2008-04-03
JP2008088879A (ja) 2008-04-17

Similar Documents

Publication Publication Date Title
EP1906022A1 (de) Entleerungsvorrichtung
US9169840B2 (en) Piston operated bypass valve for a screw compressor
KR101389221B1 (ko) 스크류 압축기
KR101361346B1 (ko) 스크롤 압축기
CN109477485B (zh) 用于降低负载锁中的压力的方法和相关泵单元
EP1906023A1 (de) Entleerungsvorrichtung
US9163634B2 (en) Apparatus and method for enhancing compressor efficiency
KR101995358B1 (ko) 챔버를 배기시키기 위한 방법 및 펌프 장치
JP2003254273A (ja) 車両空調用２段圧縮機
US10006459B2 (en) Claw pump
JP2004084654A (ja) スクロール圧縮機の容量可変装置
US20100209277A1 (en) Scroll compressor
CN1034604C (zh) 旋转压缩机的压缩气体排出装置
JPH0642475A (ja) シングルスクリュー圧縮機
CN106662108A (zh) 真空泵系统中的泵送方法以及真空泵系统
KR930009734B1 (ko) 가변용량형 회전식 압축기
JP2010077897A (ja) スクリュー圧縮機
CN1955477B (zh) 多级旋转压缩机
US9470229B2 (en) Single screw compressor
JP2011021535A (ja) スクリュー圧縮機
JPS62233492A (ja) 油回転真空ポンプ
CN207795573U (zh) 具有残余气体排出功能的液环泵
KR20040035177A (ko) 스크롤 압축기의 용량 가변 장치
CN220646146U (zh) 帐篷自动充气泵
EP4184010A1 (de) Spiralverdichter

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC MT NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL BA HR MK YU

17P Request for examination filed

Effective date: 20080929

AKX Designation fees paid

Designated state(s): DE FR GB

17Q First examination report despatched

Effective date: 20081127

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20090408