JP2008060304A - プラズマ処理装置およびプラズマ処理方法 - Google Patents
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Abstract
【解決手段】プラズマ処理室10と、処理室10内に被処理基板5を戴置するための基板電極11と、処理室10にプラズマ処理用のガスを所定流量供給するガス供給装置14と、プラズマ処理室を排気する排気速度可変の排気装置(図示せず)と、プラズマ発生用の高周波電源21と、高周波電源21の反射電力を自動的に低減する自動整合機22と、処理室10に静磁界を印加するための静磁界の強度および分布が可変の静磁界発生装置41と、ガス供給装置および排気装置の排気速度を制御してプラズマ処理室の圧力を制御する圧力制御機構(図示せず)を備えたプラズマ処理装置において、プラズマ着火のためのステップとプラズマ処理のためのステップを有し、プラズマ着火のためのステップとプラズマ処理のためのステップ間でプラズマを消失させることなく連続してステップを切り替える。
【選択図】図3
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Claims (4)
- 被処理基板をプラズマ処理室でプラズマ処理する装置において、
少なくとも、プラズマ着火のためのステップと、
前記プラズマ処理室に処理ガスを供給するガス供給装置と、
プラズマ処理のためのステップを備え、
前記プラズマ着火ステップ時の着火遅れ防止手段として、プラズマの着火を容易にし着火時間を短くするための、整合器の制御手段、又は磁場設定手段、又は圧力制御手段の少なくともいずれかの一つの手段を具備したことを特徴とするプラズマ処理装置。 - 被処理基板をプラズマ処理室でプラズマ処理する装置において、
少なくとも、プラズマ着火のためのステップと、
前記プラズマ処理室に処理ガスを供給するガス供給装置と、
プラズマ処理のためのステップを備え、
前記プラズマ着火ステップ時、プラズマ着火直後にRF電位を印加、又は高周波電力の投入と同時にRF電位を印加することを特徴とするプラズマ処理装置。 - 被処理基板をプラズマ処理室でプラズマ処理する方法において、
少なくとも、プラズマ着火のための工程と、
前記プラズマ処理室に処理ガスを供給する工程と、
プラズマ処理のための工程を備え、
前記プラズマ着火工程時の着火遅れ防止工程として、プラズマの着火を容易にし着火時間を短くするための、整合器の制御工程、又は磁場設定工程、又は圧力制御工程の少なくともいずれかの一つの工程を具備したことを特徴とするプラズマ処理方法。 - 被処理基板をプラズマ処理室でプラズマ処理する方法において、
少なくとも、プラズマ着火のための工程と、
前記プラズマ処理室に処理ガスを供給する工程と、
プラズマ処理のための工程を備え、
前記プラズマ着火ステップ時、プラズマ着火直後にRF電位を印加、又は高周波電力の投入と同時にRF電位を印加することを特徴とするプラズマ処理方法。
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