JP2008047643A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2008047643A JP2008047643A JP2006220275A JP2006220275A JP2008047643A JP 2008047643 A JP2008047643 A JP 2008047643A JP 2006220275 A JP2006220275 A JP 2006220275A JP 2006220275 A JP2006220275 A JP 2006220275A JP 2008047643 A JP2008047643 A JP 2008047643A
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- probing
- detection pattern
- conductor
- depth detection
- chip
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/0212—Auxiliary members for bonding areas, e.g. spacers
- H01L2224/02122—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body
- H01L2224/02163—Auxiliary members for bonding areas, e.g. spacers being formed on the semiconductor or solid-state body on the bonding area
- H01L2224/02165—Reinforcing structures
- H01L2224/02166—Collar structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
【解決手段】ICチップのプロービングにおけるプロービング深さ検知用パタン450としての導電体606を、プロービング時に電気的測定を行うための通常のパッド領域201の導電体606よりも高さ方向で低い位置に設置し、これら両方の導電体606をICチップ内で電気的に接続しておき、これら両方の導電体606に同時に接触するように同じ高さに設定した二つのプローブにより針あてを行う。プロービングが十分なオーバードライブ量をもって行われているかは、二つのプローブの接触抵抗の検出により確認できる。
【選択図】図1
Description
201 パッド領域
301 スクライブ領域
450 プロービング深さ検知用パタン
606 導電体
651 下地の絶縁膜
652 第2の絶縁膜
701 保護膜
Claims (5)
- トランジスタやプロービング用のパッド領域などの素子からなるシリコン基板上に構成された複数のICチップからなる半導体装置において、前記ICチップ内部もしくは前記ICチップに隣接するスクライブ領域にプロービング深さ検知用パタンを有し、前記プロービング深さ検知用パタンの導電体は、高さ方向において前記パッド領域の導電体に比較して低い位置に配置されていることを特徴とする半導体装置。
- 前記プロービング深さ検知用パタンの導電体は、前記パッド領域における導電体と同一の材料により形成されていることを特徴とする請求項1記載の半導体装置。
- 前記プロービングずれ検知用パタンは、前記ICチップ1つに対して1つ以上設けられていることを特徴とする請求項1記載の半導体装置。
- 前記プロービングずれ検知用パタンは、プロービング工程において同時に測定される前記ICチップ数毎に最低1つ設けられていることを特徴とする請求項1記載の半導体装置。
- 前記プロービング深さ検知用パタンの導電体は、前記パッド領域の導電体の少なくとも一つに電気的に接続されていることを特徴とする請求項1記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006220275A JP2008047643A (ja) | 2006-08-11 | 2006-08-11 | 半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006220275A JP2008047643A (ja) | 2006-08-11 | 2006-08-11 | 半導体装置 |
Publications (1)
Publication Number | Publication Date |
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JP2008047643A true JP2008047643A (ja) | 2008-02-28 |
Family
ID=39181107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2006220275A Pending JP2008047643A (ja) | 2006-08-11 | 2006-08-11 | 半導体装置 |
Country Status (1)
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JP (1) | JP2008047643A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008198776A (ja) * | 2007-02-13 | 2008-08-28 | Seiko Instruments Inc | 半導体装置 |
KR20160021375A (ko) * | 2014-08-14 | 2016-02-25 | 삼성전자주식회사 | 반도체 장치, 그의 제조 방법, 및 그의 제조 설비 |
KR101794136B1 (ko) * | 2016-05-10 | 2017-11-06 | (주)엑시콘 | 반도체 테스트를 위한 검사용 소켓 및 검사장치 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62261139A (ja) * | 1986-05-07 | 1987-11-13 | Nippon Denso Co Ltd | 半導体装置 |
JPH0737929A (ja) * | 1993-07-23 | 1995-02-07 | Nec Corp | 半導体集積回路装置 |
JPH08330368A (ja) * | 1995-05-31 | 1996-12-13 | Mitsubishi Electric Corp | 半導体回路装置群及びそのプローブ試験方法 |
-
2006
- 2006-08-11 JP JP2006220275A patent/JP2008047643A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62261139A (ja) * | 1986-05-07 | 1987-11-13 | Nippon Denso Co Ltd | 半導体装置 |
JPH0737929A (ja) * | 1993-07-23 | 1995-02-07 | Nec Corp | 半導体集積回路装置 |
JPH08330368A (ja) * | 1995-05-31 | 1996-12-13 | Mitsubishi Electric Corp | 半導体回路装置群及びそのプローブ試験方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008198776A (ja) * | 2007-02-13 | 2008-08-28 | Seiko Instruments Inc | 半導体装置 |
KR20160021375A (ko) * | 2014-08-14 | 2016-02-25 | 삼성전자주식회사 | 반도체 장치, 그의 제조 방법, 및 그의 제조 설비 |
KR102317023B1 (ko) * | 2014-08-14 | 2021-10-26 | 삼성전자주식회사 | 반도체 장치, 그의 제조 방법, 및 그의 제조 설비 |
KR101794136B1 (ko) * | 2016-05-10 | 2017-11-06 | (주)엑시콘 | 반도체 테스트를 위한 검사용 소켓 및 검사장치 |
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