JP2008036512A - Positioning method, head unit assembling method, head unit assembling apparatus, head unit and droplet discharge apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a positioning method in which the positioning accuracy of a droplet discharge nozzle in a head unit is improved by suppressing the positioning error of the droplet discharge nozzle to the reference point of the droplet discharge head, a head unit assembling method, a head unit assembling apparatus, a head unit and a droplet discharge apparatus. <P>SOLUTION: The head unit assembling method of forming a head unit by positioning and fixing a plurality of the droplet discharge heads of the head unit having the plurality of the droplet discharge heads fixed to a unit plate to a prescribed position in the unit plate has a positioning adjusting step for positioning the droplet discharge head having the droplet discharge nozzles to a prescribed position in the unit plate by positioning the gravity center point of ≥2 droplet discharge nozzles in the plurality of the droplet discharge nozzles provided in the respective droplet discharge head to a prescribed position. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a positioning method for positioning a member at a predetermined position of a plate. The present invention also relates to a droplet discharge device including a head unit having a head for discharging droplets, a head unit assembly method for assembling the head unit, and a head unit assembly device.

  Conventionally, as a technique for forming a functional film such as a color filter film of a color liquid crystal device or a light emitting film of an organic electroluminescence device, a droplet discharge device having a droplet discharge head for discharging a liquid as a droplet is used. A technique is known in which droplets of a liquid material containing a functional film material are ejected and landed at an arbitrary position on a substrate, and the landed liquid material is dried to form a functional film. Since the droplet discharge head of the droplet discharge device used for forming such a film can accurately and selectively discharge minute droplets from the nozzle row, manufacturing a color filter of a liquid crystal display device, etc. In addition, application to manufacturing apparatuses such as various electronic devices and optical devices is also expected.

  Considering such applied technology, in addition to the performance of the droplet discharge head itself, the droplet discharge head and the substrate are relatively moved so that the droplet discharge nozzle of the droplet discharge head faces a desired position of the substrate. High accuracy is required for the positional accuracy of the scanning mechanism and the positional accuracy (assembly accuracy) of the nozzles (nozzle rows) in the droplet discharge device which is the premise thereof. In addition, depending on the liquid to be ejected, the life of the droplet ejection head is shortened, and frequent replacement of the droplet ejection head needs to be considered. In other words, it is necessary to consider frequently performing assembly requiring high accuracy. Patent Document 1 discloses a head unit configuration and assembly method (a plurality of IJ head-mounted sub-carriages and an assembly method thereof) capable of stably and accurately assembling a plurality of droplet discharge heads on a single carriage. ing.

Japanese Patent Laid-Open No. 2005-224665

  However, in general, since there is a shape error in a single droplet discharge head, the liquid point is not compared with a standard point that is positioned with respect to a reference point as a portion representing the position of the droplet discharge head when the head unit is assembled. There is a position error of the droplet discharge nozzle. When the position error of the droplet discharge nozzle increases, there is a problem that the position accuracy of the droplet discharge nozzle in the assembled head unit is lowered.

  The present invention is for solving the above-described problem, and suppresses the position error of the droplet discharge nozzle with respect to the reference point of the droplet discharge head, thereby reducing the position error of the droplet discharge nozzle in the assembled droplet discharge head. It is an object to realize a positioning method, a head unit assembly method, a head unit assembly device, a head unit, and a droplet discharge device that can increase the positional accuracy of a droplet discharge nozzle in the head unit To do.

  A positioning method according to the present invention is a positioning method for positioning a member at a predetermined position on a plate, and positioning a center of gravity of a plurality of member standard points defined on the member at a predetermined position. It has the position adjustment step which positions a member, It is characterized by the above-mentioned.

According to the positioning method of the present invention, the member is positioned at a predetermined position on the plate by positioning the barycentric points of the plurality of member standard points. In general, since there is a shape error in the shape of the member, it is very difficult to position all the members at predetermined positions without error. When one point on the member is positioned, the other point on the member is positioned with an accuracy in which an error in the distance between the point and the positioned one point is added. In the positioning method according to the present invention, the error in the distance between the member standard point and the centroid point is the error in the distance between the two member standard points when the centroid point is the position of the centroid of the two member standard points. Thus, the error of the distance between the member standard points is a proportional error, and is smaller than the error of the distance between the member standard points. Each member standard point is arranged with a position error smaller than the error of the distance between the member standard points. On the other hand, when any one of the plurality of member standard points is positioned, the member standard points other than the positioned member standard points are arranged with a position error substantially equal to the dimensional error between the member standard points. In this way, in order to position and position the member at a predetermined position on the plate, by positioning the barycentric point of the plurality of member standard points, each of the member standard points can be compared with each other. The position error of the member standard point can be reduced and the member can be positioned with high accuracy. The barycentric points of the plurality of member standard points are expressed as follows when expressed in XY coordinates. The position of the center of gravity is expressed as (XG, YG), and the positions of the n member standard points A, B,..., N are (XA, YA), (XB, YB),. , YN), XG and YG are expressed as follows.
XG = (XA + XB +... + XN) / n
YG = (YA + YB +... + YN) / n

  In the present invention, the positioning method includes a reference point setting position of a reference point used as a reference when positioning a member provided on a plate, and a plurality of members on which a plurality of member standard points with respect to the reference point setting position are to be placed. And a setting position acquisition step for acquiring position information of the standard point position. In the position adjustment step, a plurality of members are arranged at the center of gravity of the plurality of member standard point positions in the position information acquired in the setting position acquisition step. It is preferable to position the member by positioning the barycentric point of the standard point.

  According to this positioning method, in the set position acquisition step, the position of the reference point and the position where the member standard point with respect to the reference point should be arranged are acquired as position information of the reference point setting position and the member standard point position. Since it is not necessary to create a large number of position information sources, it is possible to create a highly accurate information source with almost no error. In the position adjustment step, in order to position the barycentric point of the member standard point at the barycentric position of the member standard point position indicated in the position information, the position error of the reference point of the positioning device itself, the operation error of the positioning device, It is possible to eliminate the possibility that a change with time of the positioning device affects the positioning accuracy. Therefore, the member can be positioned with high accuracy regardless of errors in the assembling apparatus and changes with time.

  In the head unit assembling method according to the present invention, each of a plurality of droplet discharge heads of a head unit in which a plurality of droplet discharge heads are fixed to a unit plate is positioned and fixed at a predetermined position of the unit plate. A method of assembling a head unit, wherein the center of gravity of two or more droplet discharge nozzles of a plurality of droplet discharge nozzles of each of the plurality of droplet discharge heads is positioned at a predetermined position. Thus, the liquid crystal display apparatus has a position adjusting step of positioning a droplet discharge head having the droplet discharge nozzle at a predetermined position of the unit plate.

  According to the head unit assembling method of the present invention, the center of gravity of two or more droplet discharge nozzles of the droplet discharge nozzles of the droplet discharge head is positioned at a predetermined position, so that the droplet discharge The head is positioned at a predetermined position on the unit plate. In order to accurately arrange the droplets on the drawing target, it is necessary to accurately position the droplet discharge head, and the droplet discharge nozzle that discharges the droplets should be positioned with high accuracy. When one of the droplet discharge nozzles is positioned, the droplet discharge nozzle can be positioned with high accuracy, but the droplet discharge nozzles other than the droplet discharge nozzle can be accurately adjusted with a dimensional error in the distance between the droplet discharge nozzles. Positioned. In the case of the head unit assembling method according to the present invention, the error in the distance between the droplet discharge nozzle and the center of gravity is such that when the center of gravity is the position of the center of gravity of the two droplet discharge nozzles, The error in the distance between the droplet discharge nozzles is a proportional error, which is half the error in the distance between the nozzles, and is smaller than the error in the distance between the droplet discharge nozzles. When positioning one of the droplet discharge nozzles by positioning the center of gravity of the plurality of droplet discharge nozzles in order to position and position the droplet discharge head at a predetermined position on the plate in this way Compared to the above, the position error of each droplet discharge nozzle can be reduced, and the droplet discharge head can be positioned with high accuracy.

  In the present invention, the head unit assembling method includes a reference point setting position of a reference point used as a reference when positioning a droplet discharge head provided on a unit plate, and a plurality of droplet discharge nozzles for the reference point setting position, respectively. A plurality of nozzle standard positions to be arranged, and a setting position acquisition step for acquiring position information, and in the position adjustment step, among the plurality of nozzle standard positions in the position information acquired in the setting position acquisition step It is preferable to position the droplet discharge head by positioning the center of gravity of the two or more droplet discharge nozzles corresponding to the two or more nozzle standard positions at the center of gravity of the two or more nozzle standard positions.

  According to this head unit assembling method, in the setting position acquisition step, the position of the reference point and the position where the droplet discharge nozzle with respect to the reference point should be arranged are acquired as position information of the reference point setting position and the nozzle standard position. The The information source of the position information is, for example, a master plate in which the position of the droplet discharge nozzle is accurately marked on the plate, and it is not necessary to create a large number. Therefore, it is possible to create a highly accurate information source with almost no error. Is possible. In the position adjustment process, in order to position the barycentric point of the droplet discharge nozzle at the barycentric position of the nozzle standard position indicated in the position information, the position error of the reference point of the assembling apparatus itself for assembling the head unit, There is almost no possibility that an operation error, a change with time of the assembling apparatus, or the like affects the positioning accuracy. Therefore, it is possible to accurately position the droplet discharge head regardless of errors in the head unit assembly apparatus and changes with time.

  In the present invention, in the head unit assembling method, the reference point setting position of the reference point used as a reference when positioning the droplet discharge head provided on the unit plate and the barycentric point with respect to the reference point setting position should be arranged respectively. A center-of-gravity point standard position and a center-of-gravity setting position acquisition step for acquiring position information, and the position adjustment step includes two or more droplet discharge nozzles among a plurality of droplet discharge nozzles of a droplet discharge head to be positioned. A detection step for detecting the position of the liquid, a calculation step for calculating the position of the center of gravity of the two or more droplet discharge nozzles from the two or more droplet discharge nozzle positions detected in the detection step, and a position in the calculation step A positioning step for positioning the droplet discharge head having the center of gravity at a predetermined position on the unit plate by positioning the center of gravity at the center of gravity point standard position; It will be preferable to include.

  According to this head unit assembling method, in the center-of-gravity setting position acquisition step, information on the center-of-gravity point standard position where the center-of-gravity point should be arranged is acquired, thereby clarifying the position where the center-of-gravity point should be arranged. By detecting the position of two or more droplet discharge nozzles in the detection step and calculating the position of the center of gravity of the two or more droplet discharge nozzles in the calculation step, the position of the center of gravity of the droplet discharge nozzle to be aligned is calculated. The position before the positioning is performed becomes clear. In the positioning step, the center of gravity point whose position is clarified in the calculation step is positioned at the position where the center of gravity point clarified in the center of gravity setting position acquisition step is to be placed, so that the center of gravity point is accurately positioned, The droplet discharge head can be accurately positioned.

  In the present invention, in the head unit assembly method, the droplet discharge head has one or more nozzle rows in which a plurality of droplet discharge nozzles are aligned. It is preferable to position the droplet discharge head having the first nozzle row at a predetermined position on the unit plate by positioning the center of gravity of two or more droplet discharge nozzles constituting one nozzle row.

  According to this head unit assembly method, the center of gravity of two or more droplet discharge nozzles among the droplet discharge nozzles included in one nozzle row of the droplet discharge head is positioned at a predetermined position. The droplet discharge head is positioned at a predetermined position on the unit plate. Thereby, the droplet discharge nozzles included in the single nozzle row can be accurately positioned.

  In the present invention, in the head unit assembling method, in the position adjusting step, the center of gravity point of the two droplet discharge nozzles positioned at both ends of the first nozzle row is positioned, so that the droplet having the first nozzle row It is preferable to position the discharge head at a predetermined position on the unit plate.

  According to this head unit assembling method, the distance between the droplet discharge nozzles that defines the center of gravity for positioning is the longest. Thereby, it is possible to reduce the influence of the positional deviation in the direction perpendicular to the extending direction of the nozzle row of the droplet discharge nozzles on the shift in the extending direction of the straight line connecting the droplet discharge nozzles defining the center of gravity. .

  In the present invention, the head unit assembling method includes a droplet discharge head in which a plurality of droplet discharge nozzles are aligned and have two or more nozzle rows that are substantially parallel to each other. By positioning the center of gravity of the quadrangle formed by each of the two droplet discharge nozzles of the first nozzle row and the second nozzle row located at both ends in the above nozzle row, the first nozzle row and the second nozzle row are positioned. It is preferable to position a droplet discharge head having two nozzle rows at a predetermined position on the unit plate.

  According to this head unit assembling method, the center of gravity of each of the two droplet ejection nozzles included in the two nozzle arrays of the droplet ejection head, that is, a total of four droplet ejection nozzles, is positioned at a predetermined position. The droplet discharge head is positioned at a predetermined position on the unit plate. Thereby, the droplet discharge nozzles included in the two nozzle rows can be accurately positioned.

  In the present invention, the head unit assembling method positions the center of gravity of the quadrangle formed by a total of four droplet discharge nozzles located at both ends of the first nozzle row and the second nozzle row in the position adjustment step. By doing so, it is preferable to position a droplet discharge head having two or more nozzle rows at a predetermined position of the unit plate.

  According to this head unit assembling method, the distance between the droplet discharge nozzles that defines the center of gravity for positioning is the longest. Thereby, it is possible to reduce the influence of the positional deviation in the direction perpendicular to the extending direction of the nozzle row of the droplet discharge nozzles on the shift in the extending direction of the straight line connecting the droplet discharge nozzles defining the center of gravity. .

  In the present invention, the head unit assembling method further includes a head measurement step of measuring the accuracy of the droplet discharge head including the positional accuracy of each of the droplet discharge nozzles using the center of gravity of two or more droplet discharge nozzles as a measurement reference. In the position adjustment step, it is preferable to position the droplet discharge head by positioning the center of gravity of two or more droplet discharge nozzles used as the measurement reference in the head measurement step.

  According to this head unit assembly method, the center of gravity used as a reference when measuring the droplet discharge head is positioned at a predetermined position. Each part other than the center of gravity point in the droplet discharge head is positioned with the same accuracy as the position accuracy based on the center of gravity point that is known when the droplet discharge head is measured. Thereby, the position accuracy of each part of the droplet discharge head can be made substantially known.

  A head unit assembling apparatus according to the present invention positions and fixes each of a plurality of droplet discharge heads of a head unit, in which a plurality of droplet discharge heads are fixed to a unit plate, to a predetermined position of the unit plate. A head unit assembling apparatus to be formed, wherein a detection unit that detects positions of a plurality of droplet discharge nozzles included in each droplet discharge head of the plurality of droplet discharge heads, and two of the plurality of droplet discharge nozzles Position for positioning the droplet discharge head having the droplet discharge nozzle at a predetermined position on the unit plate by positioning the center of gravity point at a predetermined position by calculating the center of gravity of the droplet discharge nozzle as described above And an adjustment unit.

  According to the head unit assembling apparatus according to the present invention, the detection unit detects the positions of two or more droplet discharge nozzles, the calculation unit calculates the position of the center of gravity of the two or more droplet discharge nozzles, and adjusts the position. The unit positions the center of gravity at a predetermined position. In order to accurately arrange the droplets on the drawing target, it is necessary to accurately position the droplet discharge head, and the droplet discharge nozzle that discharges the droplets should be positioned with high accuracy. When one of the droplet discharge nozzles is positioned, the droplet discharge nozzle can be positioned with high accuracy, but the droplet discharge nozzles other than the droplet discharge nozzle can be accurately adjusted with a dimensional error in the distance between the droplet discharge nozzles. Positioned. In the head unit assembling apparatus according to the present invention, the error in the distance between the droplet discharge nozzle and the center of gravity is such that when the center of gravity is the position of the center of gravity of the two droplet discharge nozzles, The error in the distance between the droplet discharge nozzles is a proportional error, which is half the error in the distance between the nozzles, and is smaller than the error in the distance between the droplet discharge nozzles. When positioning one of the droplet discharge nozzles by positioning the center of gravity of the plurality of droplet discharge nozzles in order to position and position the droplet discharge head at a predetermined position on the plate in this way Compared to the above, the position error of each droplet discharge nozzle can be reduced, and the droplet discharge head can be positioned with high accuracy.

  In the present invention, the head unit assembling apparatus includes a reference point setting position of a reference point used as a reference when positioning the droplet discharge head provided on the unit plate, and a plurality of droplet discharge nozzles for the reference point setting position, respectively. It is preferable to further include a setting position acquisition unit that acquires position information of at least one of the center-of-gravity point standard positions where the center-of-gravity points with respect to the plurality of nozzle standard positions to be arranged or the reference point setting positions are to be arranged.

  According to this head unit assembling apparatus, the setting position acquisition unit acquires the position of the reference point and the position where the droplet discharge nozzle with respect to the reference point should be respectively arranged as the position information of the reference point setting position and the nozzle standard position. . The information source of the position information is, for example, a master plate in which the position of the droplet discharge nozzle is accurately marked on the plate, and it is not necessary to create a large number. Therefore, it is possible to create a highly accurate information source with almost no error. Is possible. The position adjustment unit positions the barycentric point of the droplet discharge nozzle at the barycentric position of the nozzle standard position indicated in the position information, so that the position error of the reference point of the head unit assembly device itself, the operation error, and the change over time Etc. can almost eliminate the possibility of affecting the positioning accuracy. Therefore, the droplet discharge head can be accurately positioned regardless of errors in the head unit assembling apparatus or changes with time.

  The head unit according to the present invention is a head unit in which a plurality of droplet discharge heads are fixed to a unit plate, and each droplet discharge head of each of the plurality of droplet discharge heads has the droplet discharge head. The center of gravity of two or more droplet discharge nozzles among the plurality of droplet discharge nozzles is positioned at a predetermined position, thereby being positioned at a predetermined position on the unit plate.

  According to the head unit of the present invention, the center of gravity of two or more droplet discharge nozzles among the droplet discharge nozzles of the droplet discharge head is positioned at a predetermined position, so that the droplet discharge head It is positioned at a predetermined position on the unit plate. In order to accurately arrange the droplets on the drawing target, it is necessary to accurately position the droplet discharge head, and the droplet discharge nozzle that discharges the droplets should be positioned with high accuracy. When one of the droplet discharge nozzles is positioned, the droplet discharge nozzle can be positioned with high accuracy, but the droplet discharge nozzles other than the droplet discharge nozzle can be accurately adjusted with a dimensional error in the distance between the droplet discharge nozzles. Positioned. In the head unit according to the present invention, the error in the distance between the droplet discharge nozzles and the center of gravity is the distance between the two droplet discharge nozzles when the center of gravity is the position of the center of gravity of the two droplet discharge nozzles. The error of the distance between the droplet discharge nozzles is an error that is prorated, and is smaller than the error of the distance between the droplet discharge nozzles. In this way, since the droplet discharge head is positioned and positioned at a predetermined position of the plate by positioning the center of gravity of the plurality of droplet discharge nozzles, any one of the droplet discharge nozzles is By positioning, it is possible to reduce the position error of each droplet discharge nozzle and to increase the positioning accuracy of the droplet discharge head in the head unit as compared with the case where positioning is performed.

  A droplet discharge device according to the present invention is a droplet discharge device including a head unit in which a plurality of droplet discharge heads are fixed to a unit plate, and each of the plurality of droplet discharge heads. Is positioned at a predetermined position of the unit plate by positioning the center of gravity of two or more droplet discharge nozzles of the plurality of droplet discharge nozzles of the droplet discharge head at a predetermined position. It is characterized by.

  According to the droplet discharge device according to the present invention, the center of gravity of two or more droplet discharge nozzles of the droplet discharge nozzles of the droplet discharge head is positioned at a predetermined position, so that the droplet discharge The head is positioned at a predetermined position on the unit plate. In order to accurately arrange the droplets on the drawing target, it is necessary to accurately position the droplet discharge head, and the droplet discharge nozzle that discharges the droplets should be positioned with high accuracy. When one of the droplet discharge nozzles is positioned, the droplet discharge nozzle can be positioned with high accuracy, but the droplet discharge nozzles other than the droplet discharge nozzle can be accurately adjusted with a dimensional error in the distance between the droplet discharge nozzles. Positioned. In the droplet discharge device according to the present invention, the error in the distance between the droplet discharge nozzle and the center of gravity is such that when the center of gravity is the position of the center of gravity of the two droplet discharge nozzles, the two droplet discharge nozzles The error in the distance between the droplet discharge nozzles is a proportional error, which is half of the error in the distance between the droplets, and is smaller than the error in the distance between the droplet discharge nozzles. In this way, since the droplet discharge head is positioned and positioned at a predetermined position of the plate by positioning the center of gravity of the plurality of droplet discharge nozzles, any one of the droplet discharge nozzles is By positioning, the position error of each droplet discharge nozzle can be reduced compared with the case of positioning, and the assembly accuracy of the droplet discharge head in the droplet discharge apparatus can be increased.

  In the present invention, in the droplet discharge device, the droplet discharge head has one or more nozzle rows in which a plurality of droplet discharge nozzles are aligned, and the first nozzle row in the one or more nozzle rows. Is preferably positioned at a predetermined position of the unit plate by positioning the center of gravity of the two or more droplet discharge nozzles constituting the.

  According to the configuration of this droplet discharge device, the center of gravity of two or more droplet discharge nozzles among the droplet discharge nozzles included in one nozzle row of the droplet discharge head is positioned at a predetermined position. Thus, the droplet discharge head is positioned at a predetermined position on the unit plate. Thereby, the positioning accuracy of the droplet discharge nozzles included in the one nozzle row can be increased.

  In the present invention, the droplet discharge device includes two or more droplet discharge nozzles as the first reference nozzle and the second reference nozzle, and the droplet discharge head includes the center point of the first reference nozzle and the first reference nozzle. A unit plate in which a straight line connecting the center points of the two reference nozzles forms a certain angle with respect to a first direction among a plurality of moving directions for relatively moving the plurality of droplet discharge heads and the drawing target. The plurality of liquid droplet ejection heads of the head unit are positioned at predetermined positions on the unit plate, and are directed from the center point of the first reference nozzle toward the center point of the second reference nozzle. Is the first direction, and the direction from the center point of the first reference nozzle to the center point of the second reference nozzle is a second direction different from the first direction. A second droplet discharge head, Preferred.

  According to the configuration of this droplet discharge device, two or more droplet discharge nozzles can be used when the droplet discharge head is attached to the unit plate regardless of the arrangement posture of the droplet discharge head on the droplet discharge device. As a result, the droplet discharge head is positioned at a predetermined position on the unit plate. Thereby, it is possible to increase the assembly position accuracy of the droplet discharge head of the droplet discharge device regardless of the arrangement posture of the droplet discharge head on the droplet discharge device.

  DESCRIPTION OF EXEMPLARY EMBODIMENTS An embodiment of a positioning method, a head unit assembling method, a head unit assembling apparatus, a head unit, and a droplet discharge apparatus according to the invention will be described below with reference to the drawings.

(Droplet discharge device)
First, the overall configuration of the droplet discharge device will be described with reference to FIG. FIG. 1 is an external perspective view showing a schematic configuration of a droplet discharge device. As shown in FIG. 1, a droplet discharge apparatus 1 mainly includes a substrate stage 14 for placing a substrate W as a drawing target, which is a target for discharging and landing a liquid material as droplets, and a substrate stage 14. And an X-axis scanning mechanism 10 that moves in the scanning direction. The carriage unit 20 includes a carriage 22 (see FIG. 5) having a head unit 30 (see FIG. 5) on which a plurality of droplet discharge heads 40 (see FIG. 2) is mounted, and the carriage unit 20 is moved in the sub-scanning direction. And a Y-axis scanning mechanism 17 to be operated. As indicated by arrows in FIG. 1, the main scanning direction is the X-axis direction, the sub-scanning direction substantially orthogonal to the main scanning direction (X-axis direction) is the Y-axis direction, and the direction orthogonal to the X-axis direction and the Y-axis direction The Z-axis direction and the rotation direction around the Z-axis direction are denoted as the θ direction.

  The substrate stage 14 is a suction table that vacuum-sucks and fixes the substrate W, and is fixed to the X-axis moving plate 12 via the stage rotation mechanism 16 so as to be rotatable in the θ direction. The X-axis scanning mechanism 10 is installed on the floor with the X-axis moving plate 12 and extends in the X-axis direction, and moves the X-axis moving plate 12 in the X-axis direction via an air slider (not shown). It has a pair of X-axis guide rails 11 and 11 provided with a linear motor 11a. Two accommodation boxes 9 are disposed so as to sandwich the pair of X-axis guide rails 11, 11. The accommodation box 9 accommodates an air supply pipe of an air supply means for supplying compressed air to the air slider, a signal cable for sending a drive signal to the X-axis scanning mechanism 10, and the like.

  The carriage unit 20 includes a carriage plate 21, and the carriage 22 is attached to the carriage plate 21 so as to be rotatable in the θ direction. The carriage plate 21 is disposed so as to be passed between the pair of Y-axis guide rails 18 and 18. On the carriage plate 21 that has been passed, a predetermined amount of liquid material fed from a tank in which each liquid material is stored via a pipe is stored, and the liquid material is supplied to each droplet discharge head 40. A liquid supply unit 23 and a head electrical unit 24 for supplying an electric signal for driving each droplet discharge head 40 are mounted.

  The Y-axis scanning mechanism 17 has a pair of Y-axis guide rails 18 and 18 each having a linear motor 18a that moves ten carriage units 20 in the Y-axis direction via air sliders (not shown). The ten carriage units 20 are individually movable in the Y-axis direction. The pair of Y-axis guide rails 18 and 18 are disposed on the six support stands 19 standing on the floor with a space therebetween so as to straddle the X-axis scanning mechanism 10.

  Between the pair of Y-axis guide rails 18, 18, the clogging of the nozzles of the plurality of droplet discharge heads 40 mounted on the carriage 22 (head unit 30) is eliminated, and foreign matters and dirt on the nozzle surface are removed. A maintenance unit 26 that performs maintenance such as the above is disposed at a position facing the plurality of droplet discharge heads 40.

(Droplet ejection head)
Next, the droplet discharge head 40 will be described with reference to FIG. FIG. 2 is an external perspective view of the droplet discharge head as viewed from the nozzle forming plate side. This droplet discharge head 40 is a so-called two-unit type, a liquid introduction part 45 having two connection needles 46, 46, a two-head head substrate 47 that continues to the side of the liquid introduction part 45, and a liquid Two pump parts 48 connected to the introduction part 45 and a nozzle forming plate 41 connected to the pump part 48 are provided. A pipe connecting member is connected to the liquid introducing portion 45, and a flexible flat cable is connected to the head substrate 47. On the other hand, the pump portion 48 and the nozzle forming plate 41 constitute a square head main body 40A.

  A flange portion 44 is formed in a square flange shape on the base portion side of the pump portion 48, that is, the base portion side of the head main body 40 </ b> A so as to receive the liquid introduction portion 45. A pair of screw holes (female screws) 49 for small screws for fixing the droplet discharge head 40 to the sub head holding member 33 (see FIG. 3) are formed in the flange portion 44. The pair of screw holes 49, 49 are located at both long side portions and are arranged so as to be point-symmetric with respect to the center of the nozzle forming surface 41a. Although details will be described later, the droplet discharge head 40 is fixed to the sub head holding member 33 by a head set screw 37 that passes through the sub head holding member 33 and is screwed into the screw hole 49 (see FIG. 3).

  On the nozzle forming surface 41 a of the nozzle forming plate 41, two nozzle rows 43, 43 formed on the nozzle forming plate 41 and including discharge nozzles 42 that discharge droplets are formed. The two nozzle rows 43, 43 are arranged in parallel to each other, and each nozzle row 43 has 180 discharge nozzles 42 (schematically shown in the drawing) arranged at an equal pitch. . That is, two nozzle rows 43 and 43 are symmetrically arranged on the nozzle forming surface 41a of the head main body 40A with the center line therebetween.

(Installation of droplet discharge head)
Next, a structure for attaching the droplet discharge head 40 to the unit plate 51 will be described with reference to FIG. FIG. 3 is a view showing a structure for attaching the droplet discharge head to the unit plate. 3A is a plan view of the droplet discharge head attached to the unit plate as viewed from the nozzle plate side, and FIG. 3B is a cross-sectional view taken along line AA in FIG. 3A. FIG.

  As shown in FIGS. 3A and 3B, a head opening 51a is formed in the unit plate 51, and the main head holding member 32 is fixed to the unit plate 51 so as to substantially cover the head opening 51a. Yes. The main head holding member 32 passes through a hole formed in the main head holding member 32 and is screwed into a screw hole formed in the unit plate 51, so that the unit plate 51 includes the three holding member screws 38, 38, 38. It is fixed to. (Hereafter, the side on which the main head holding member 32 is set is referred to as “back side”, and the opposite side is referred to as “front side”.)

  A flange opening 32a is formed in the main head holding member 32, and the sub head holding member 33 is fixed to the back side of the main head holding member 32 so as to straddle the flange opening 32a at both ends in the long side direction. Has been. The sub head holding member 33 is configured to hold the main head by two holding member screws 38, 38 that pass through holes formed in the sub head holding member 33 and are screwed into screw holes formed in the main head holding member 32. It is fixed to the member 32.

  The sub head holding member 33 is formed in a substantially rectangular flat plate shape made of stainless steel or the like. The sub head holding member 33 is formed with a square head main body opening 33d through which the head main body 40A of the droplet discharge head 40 is inserted. As described above, the sub head holding member 33 is set on the back surface side of the main head holding member 32 so as to straddle the flange opening 32a. On the other hand, the droplet discharge head 40 is inserted into the head main body opening 33d through the head main body 40A so that the head main body 40A protrudes to the back side of the sub head holding member 33, so It is set from. The droplet discharge head 40 includes two head set screws 37, 37 that pass through a hole formed in the sub head holding member 33 and are screwed into a pair of screw holes 49, 49 formed in the flange portion 44. It is fixed to the sub head holding member 33.

  Around the head body opening 33d of the sub head holding member 33, there are two through holes corresponding to the pair of screw holes 49, 49, and the first adjustment hole 33a and the second adjustment hole on the center line of the head body opening 33d. A hole 33b is formed. The first adjustment hole 33a and the second adjustment hole 33b are parts to which position correction adjustment pins 121 (see FIG. 7) in the head unit assembly apparatus 100 (see FIG. 7) described later are engaged. In this case, the first adjustment hole 33a is formed in a circular shape and the second adjustment hole 33b is formed in an oval shape that is long in the center line direction so that the pair of adjustment pins 121 and 121 can be easily engaged. .

  On the center line of the head main body opening 33d, two adhesive holes 33c and 33c are located on the opposite side of the first adjustment hole 33a and the second adjustment hole 33b from the head main body opening 33d, and are substantially symmetrical with respect to the head main body opening 33d. Is formed. The adhesive hole 33 c is a long hole extending in the transverse direction of the sub head holding member 33. An adhesive is injected into the adhesive hole 33c, and the sub head holding member 33 is bonded and fixed to the main head holding member 32 with the adhesive (not shown).

  The droplet discharge head 40 is fixed to the sub head holding member 33 by the head set screw 37, and the sub head holding member 33 is not fixed to the main head holding member 32 by the holding member screw 38 and the adhesive. In the state, the droplet discharge head 40 is fixed to the unit plate 51 so as to be movable by the gap between the flange portion 44 and the flange opening 32a or the gap between the head substrate 47 and the head opening 51a. It becomes. In the present embodiment, such a state is referred to as a “temporary mounting” state. Since the sub head holding member 33 and the head substrate 47 are larger than the opening of the flange opening 32a, the temporarily mounted droplet discharge head 40 (the droplet discharge head 40 is fixed to the sub head holding member 33 across the main head holding member 32). The set of the droplet discharge head 40 and the sub head holding member 33) does not fall off from the main head holding member 32. Assembling the droplet discharge head 40 to the unit plate 51 is performed by temporarily mounting the droplet discharge head 40 and then adjusting the position of the droplet discharge head 40 in the temporarily mounted state, and then adjusting the sub head holding member 33. This is performed by performing adhesive fixing to the main head holding member 32 with an adhesive and screw fixing with the holding member screw 38.

(Reference pin)
Next, the reference pin 54 that serves as a reference for defining the position of the droplet discharge head 40 on the unit plate 51 will be described with reference to FIG. The pair of reference pins 54 and 54 (see FIG. 5) is also used as a reference for positioning (position recognition) in the θ direction when the carriage unit 20 to which the head unit 30 is attached is attached to the droplet discharge device 1. . Further, it is also used as a reference for positioning in the θ direction when the head unit 30 (unit plate 51) is attached to the head unit assembly apparatus 100 (see FIG. 7). The arrangement position of the pair of reference pins 54 and 54 on the unit plate 51 will be described later.

  4A is a plan view of the reference pin viewed from the reference mark hole side, and FIG. 4B is a side view of the reference pin. As shown in FIG. 4, each reference pin 54 is composed of a cylindrical pin body and a concave, specifically, hole-shaped reference mark hole 56 formed at the center of the tip surface 57 of the pin body. Yes. The pin body includes a base press-fit portion 54b for press-fitting into the unit plate 51, a barrel portion 54a connected to the base press-fit portion 54b, and a mark forming portion 54c formed protruding from the tip of the barrel portion 54a. A reference mark hole 56 is formed in the front end surface 57 of 54c.

  The front end surface 57 is mirror-finished, and a small hole serving as a reference mark hole 56 is formed at the center position of the front end surface 57. The small hole (reference mark hole 56) has a diameter of about 0.3 mm, for example, and communicates with an axial hole formed in the axial center portion from the base press-fitting portion 54b to the trunk portion 54a. Although the reference pin 54 has been described with a circular cross section, it may be oval or polygonal. Furthermore, the reference mark hole 56 of the small hole is not limited to the small hole, but may be a concave shape having a groove that can provide sufficient contrast, and the planar shape of the concave is also limited to a circular shape. It is not a thing.

  The reference pin 54 thus formed is press-fitted so that the base press-fitting portion 54 b is driven into the mounting hole portion formed in the unit plate 51. The reference pin 54 press-fitted into the unit plate 51 is such that the tip surface 57 has substantially the same height as the nozzle formation surface 41a (see FIG. 2 or FIG. 3) of the droplet discharge head 40 attached to the unit plate 51. It protrudes from the back side of unit plate 51 so that it may become. That is, the front end surface 57 serving as the image recognition surface of the reference pin 54 and the nozzle forming surface 41a serving as the image recognition surface of the droplet discharge head 40 are positioned in substantially the same plane.

(Head unit)
Next, the overall configuration of the head unit 30 will be described with reference to FIG. FIG. 5 is a plan view of the head unit in the carriage. As described with reference to FIG. 3, the droplet discharge head 40 is attached to the unit plate 51 of the head unit 30 via the main head holding member 32 and the sub head holding member 33. As shown in FIG. 5, one head unit 30 includes twelve droplet discharge heads 40. A pair of reference pins 54 and 54 in which a reference mark hole 56 (see FIG. 4) is formed are fixed to the unit plate 51, and each of the twelve droplet discharge heads 40 is a reference formed on the reference pin 54. The mark hole 56 is positioned and fixed at an appropriate position. The reference mark hole 56 corresponds to a reference point used as a reference when positioning the droplet discharge head.

  The unit plate 51 is also formed with a first position restricting hole 52a and a second position restricting hole 52b. The first position restricting hole 52a and the second position restricting hole 52b are fitted to a position restricting pin 63 erected on the carriage frame 62, so that the X-axis with respect to the carriage frame 62 of the unit plate 51 (head unit 30). The position in the plane direction parallel to the Y axis is defined. In this case, the first position restricting hole 52a is circular and the second position restricting hole 52b is first so that the engagement can be easily performed even if the distance between the pair of position restricting pins 63, 63 varies. It is formed in an oval shape that is long in the direction of a straight line connecting the center of the position restricting hole 52a and the center of the second position restricting hole 52b. The X axis, Y axis, and Z axis shown in FIG. 5 are the same as the X axis, Y axis, and Z axis shown in FIG. That is, in a state where the head unit 30 is attached to the droplet discharge device 1, the nozzle row 43 (see FIG. 2) formed in the droplet discharge head 40 is configured to extend in the Y-axis direction. The head unit 30 is fixed to the carriage frame 62 by four unit fixing screws 68 that pass through the unit fixing holes 53 formed in the unit plate 51 and are screwed into screw holes 64 formed in the carriage frame 62. Yes.

  Next, the positional relationship on the unit plate 51 among the droplet discharge head 40, the pair of reference mark holes 56, 56, the first position restricting hole 52a, and the second position restricting hole 52b will be described. A line A indicated by a one-dot chain line in FIG. 5 is an imaginary line passing through the center of each of the pair of reference mark holes 56 and 56. Similarly, a line B indicated by a one-dot chain line is a virtual line orthogonal to the line A at the midpoint G of the pair of reference mark holes 56 and 56. In a state where the head unit 30 is attached to the droplet discharge device 1, the line A extends in the X-axis direction that is the main operation direction, and the line B extends in the Y-axis direction that is the sub-operation direction. Both the first position restricting hole 52a and the second position restricting hole 52b are formed at positions where the line A passes through the center thereof. As shown in FIG. 5, the twelve droplet discharge heads 40 are represented as heads 400a, 400b, 400c, 400d, 400e, 400f, 401a, 401b, 401c, 401d, 401e, 401f, respectively.

  The head 400a and the head 400d are shifted by the length of the nozzle row 43 in the Y-axis direction. The nozzle rows 43 and 43 of the head 400a and the nozzle rows 43 and 43 of the head 400d constitute a nozzle row twice as long as the nozzle row 43 of the droplet discharge head 40. When a part of the discharge nozzles 42 constituting the nozzle row 43 is not used, the discharge nozzles 42 used by the head 400a and the head 400d are configured to be a continuous nozzle row. Similarly, the head 400b and the head 400e, or the head 400c and the head 400f constitute a nozzle row twice as long as the nozzle row 43. The head 400a, the head 400b, and the head 400c are shifted by a length of one third of the length of the nozzle row 43 in the Y-axis direction. Accordingly, the six heads 400a, 400b, 400c, 400d, 400e, and 400f are arranged so as to be shifted by a length that is one third of the length of the nozzle row 43 in the Y-axis direction. The six heads 400a, 400b, 400c, 400d, 400e, and 400f are arranged on the both sides of the line B at regular intervals in the X-axis direction.

  The heads 401f, 401e, 401d, 401c, 401b, and 401a are arranged at positions and directions that are point-symmetric with respect to the midpoint G with respect to the heads 400a, 400b, 400c, 400d, 400e, and 400f. The main head holding member 32 and the sub head holding member 33 for fixing the heads 401f, 401e, 401d, 401c, 401b, and 401a also fix the heads 400a, 400b, 400c, 400d, 400e, and 400f, respectively. The main head holding member 32 and the sub head holding member 33 are arranged in a point-symmetric position and direction with respect to the middle point G. The outer shape of the unit plate 51 is also a shape that is point-symmetric with respect to the midpoint G, and the first position restricting hole 52a and the second position restricting hole 52b are formed at positions symmetrical with respect to the line B. The four screw holes 64 are also formed symmetrically with respect to the line B.

(Discharge nozzle position measurement)
Next, the position measurement of the discharge nozzle 42 in the droplet discharge head 40 will be described with reference to FIG. FIG. 6 is a schematic plan view of a nozzle formation surface of a droplet discharge head in which discharge nozzles are formed.

  The droplet discharge head 40 has two nozzle rows 43 including 180 discharge nozzles 42. Each nozzle row 43 is described as an A nozzle row 43A and a B nozzle row 43B. The discharge nozzle 42 at the end of the A nozzle row 43A is denoted as the first nozzle 001A, the second discharge nozzle 42 is denoted as the second nozzle 002A in the arrangement order, and the 180th discharge nozzle 42 is denoted as the 180th nozzle 180A. write. Similarly, the discharge nozzles 42 of the B nozzle row 43B are also expressed as No. 1 nozzle 001B to No. 180 nozzle 180B. When the droplet discharge head 40 is attached to the unit plate 51 like the head 400a to the head 400f shown in FIG. 5, the X2 axis direction and the Y2 direction shown in FIG. 6 correspond to the X axis direction shown in FIG. And the Y direction. When the droplet discharge head 40 is attached to the unit plate 51 like the head 401a to the head 401f shown in FIG. 5, the X1 axis direction and the Y1 direction shown in FIG. 6 correspond to the X axis direction shown in FIG. And the Y direction.

  The position of the discharge nozzle 42 is measured with reference to the center of gravity (middle point) between the first nozzle 001A and the 180th nozzle 180A of the A nozzle row 43A. First, the first nozzle 001A and the 180th nozzle 180A are detected as reference lines, and a virtual A nozzle row line 430A passing through the center of the first nozzle 001A and the center of the 180th nozzle 180A is defined. The extending direction of the A nozzle row line 430A is defined as the Y-axis (Y1 axis or Y2 axis in FIG. 6) direction. In addition, as a reference point, an A-row center of gravity 420A that is a midpoint between the center of the first nozzle 001A and the center of the 180th nozzle 180A is defined. The positions of the discharge nozzles 42 constituting the A nozzle row 43A are the distance in the extending direction (Y-axis direction) of the A nozzle row line 430A from the A row center of gravity 420A and the distance from the A nozzle row line 430A. It is expressed as a distance (deviation amount).

  The B nozzle row line 430B used as a reference for measuring the position of the discharge nozzles 42 constituting the B nozzle row 43B is separated from the A nozzle row line 430A by a standard value of the distance between the A nozzle row 43A and the B nozzle row 43B. Further, an imaginary line parallel to the A nozzle row line 430A is defined. The positions of the discharge nozzles 42 constituting the B nozzle row 43B are the distances in the extending direction (Y-axis direction) of the A nozzle row line 430A from the A row center of gravity 420A and the B nozzle row 43B from the B nozzle row line 430B. It is expressed as a distance (deviation amount). If the position of each discharge nozzle 42 is as defined, the B nozzle row line 430B is a straight line passing through the center of each discharge nozzle 42 constituting the B nozzle row 43B.

  6 is the midpoint between the center of the first nozzle 001B and the center of the 180th nozzle 180B, and the nozzle center of gravity 420G is the center of the first nozzle 001A and the center of the 180th nozzle 180A. This is the center of gravity of the center, the center of the first nozzle 001B, and the center of the 180th nozzle 180B. The positions of the respective discharge nozzles 42 shown in FIG. 6 are the positions as defined, and the A column center of gravity 420A is also the center of gravity of all the discharge nozzles 42 constituting the A nozzle row 43A. The column centroid 420B is also the centroid point of all the discharge nozzles 42 constituting the B nozzle column 43B. Similarly, the nozzle center of gravity 420G is also the center of gravity of all the discharge nozzles 42 constituting the A nozzle row 43A and the B nozzle row 43B, that is, all the discharge nozzles 42 included in the droplet discharge head 40. The A nozzle row 43A or the B nozzle row 43B corresponds to the first nozzle row or the second nozzle row. The A column centroid 420A or the B column centroid 420B is a centroid point of two or more droplet discharge nozzles among a plurality of droplet discharge nozzles or a centroid point of two or more droplet discharge nozzles constituting the first nozzle row. Correspondingly, the nozzle center of gravity 420G corresponds to the center of gravity of two or more droplet discharge nozzles of a plurality of droplet discharge nozzles or the center of gravity of a quadrangle formed by the droplet discharge nozzles.

  The distance (shift amount) from the A nozzle row line 430A of the first nozzle 001A and the 180th nozzle 180A, which are two points that define the reference A nozzle row line 430A, is zero. The error (deviation amount) from the specified value of the distance in the Y-axis direction from the A-line centroid 420A of the No. 1 nozzle 001A and the No. 180 nozzle 180A, which are two points that define the A-line centroid 420A that is the reference in the Y-axis direction This is one half of the error from the specified value of the inter-nozzle dimension between the first nozzle 001A and the 180th nozzle 180A. The distance from the center of each discharge nozzle 42 constituting the A nozzle row 43A to the A nozzle row line 430A is preferably 0 and needs to be equal to or less than the standard value of the A nozzle row. The distance from the center of each discharge nozzle 42 constituting the B nozzle row 43B to the B nozzle row line 430B is preferably 0, and is less than the standard value of the B nozzle row, which is larger than the standard value of the A nozzle row, It is necessary that the variation is within about twice the standard value of the A nozzle row.

(Head unit assembly equipment)
Next, the head unit assembling apparatus 100 for assembling the head unit 30 will be described. The head unit assembling apparatus 100 uses the above-described head unit 30 as an assembly target, and positions and bonds (primarily fixes) the 12 droplet discharge heads 40 temporarily mounted on the unit plate 51 with high accuracy. In the head unit assembly apparatus 100, the head unit 30 to which the droplet discharge head 40 is primarily fixed is set on the carriage frame 62 through a secondary fixing process and a cleaning process in which the droplet discharging head 40 is further fixed using the holding member screw 38. The FIG. 7 is a schematic diagram showing the configuration of the head unit assembling apparatus.

  As shown in FIG. 7, the head unit assembly device 100 includes a unit moving device 101, a head correction device 102, an adhesive fixing device (not shown), and a recognition device 104. The unit moving device 101 mounts the head unit 30 and moves it in the X axis direction, the Y axis direction, and the θ direction in a plane parallel to the X axis and the Y axis. The head correction device 102 performs position correction to adjust the position of each droplet discharge head 40 temporarily mounted on the unit plate 51 to an appropriate position. The head correction device 102 corresponds to a position adjustment unit. The adhesive fixing device supplies the adhesive so as to flow into the adhesive hole 33c (see FIG. 3), and primarily fixes each droplet discharge head 40 whose position is corrected with respect to the unit plate 51 to the position ( Adhesive fixation). The recognition device 104 recognizes the position of the unit plate 51 and each droplet discharge head 40 prior to the position correction of the droplet discharge head 40. The head unit assembling apparatus 100 also includes a control device (not shown) that performs overall control of the unit moving device 101, the head correction device 102, the adhesive fixing device, and the recognition device 104. The control device includes an arithmetic device corresponding to the calculation unit. The control device and the recognition device 104 correspond to a setting position acquisition unit. The unit moving device 101, the head correction device 102, the adhesive fixing device, and the recognition device 104 are installed on the machine base 106 or supported by a support stand 116 installed on the machine base 106.

  The unit moving device 101 includes a holding table 110 that holds and holds the head unit 30 that is an assembly target. Further, the holding table 110 is fixed, and a rotation mechanism 109 that rotates the head unit 30 mounted on the holding table 110 in the θ direction by rotating the holding table 110 in the θ direction is provided. The unit moving device 101 also moves the rotation mechanism 109 in the X-axis direction to move the head unit 30 in the X-axis direction, and moves the rotation mechanism 109 in the Y-axis direction. And a Y-axis moving mechanism 108 for moving the head unit 30 in the Y-axis direction.

  The Y-axis moving mechanism 108 is provided on the Y-axis moving plate 117 and the machine base 106 so as to extend in the Y-axis direction. The Y-axis moving plate 117 is attached to the Y-axis moving plate 117 via an air slider (not shown). It has a pair of Y-axis rails 118, 118 provided with a linear motor 118a that moves in the axial direction. The X-axis moving mechanism 107 is provided on the X-axis moving plate 112 and the Y-axis moving plate 117 so as to extend in the X-axis direction, and the X-axis moving plate 112 is passed through an air slider (not shown). And a pair of X-axis rails 111 and 111 having a linear motor 111a that moves in the X-axis direction. The rotation mechanism 109 includes a fixed plate 119a fixed to the X-axis moving plate 112 and a rotation plate 119b supported by the fixed plate 119a so as to be rotatable in the θ direction via a rotation motor (not shown). Have. The holding table 110 is fixed to the rotating plate 119b.

  The holding table 110 is formed with two substantially rectangular unit receiving portions 162 that are portions where the unit plate 51 fixed to the holding table 110 abuts. The two unit receiving portions 162 are planes substantially parallel to the X axis and the Y axis, and are substantially the same plane in the Z-axis direction. A position regulating pin 163 is erected near the center of the unit receiving portion 162. Two screw holes 164 are formed in each unit receiving portion 162. Mask receiving portions 161 are formed on both sides of the unit receiving portion 162. The mask receiving part 161 is higher than the unit receiving part 162. The mask receiving portion 161 is used to place the alignment mask 200 when attaching an alignment mask 200 (see FIG. 9) described later. Although not shown, the mask receiving portion 161 is provided with a positioning structure for positioning the alignment mask 200.

  The recognizing device 104 adjusts the focus by moving the camera 143 and the lens 144 for recognizing the image of the head, the illumination device 146 for illuminating the object, and the camera 143 and the lens 144 in the Z-axis direction. A camera elevating mechanism 147 and a camera elevating motor 148. The recognition device 104 includes a pair of a camera 143, a lens 144, a lighting device 146, a camera lifting mechanism 147, and a camera lifting motor 148. The recognition device 104 is supported by a support stand 116 so that the lens 144 can face the head unit 30 placed on the holding table 110.

  The head correction device 102 has a pair of adjustment pins 121 and 121. The pair of adjustment pins 121, 121 are engaged with the first adjustment hole 33 a and the second adjustment hole 33 b formed in the sub head holding member 33, so that the droplet discharge head 40 temporarily attached to the unit plate 51 is attached. A force for slight movement is applied to the sub head holding member 33 in order to position it at an appropriate position. The head correction device 102 also includes a pin X-axis movement mechanism, a pin Y-axis movement mechanism, a pin rotation mechanism, and an adjustment pin lifting / lowering mechanism provided in the shadowed portion of the recognition device 104 in FIG. Yes. The adjustment pin 121 is lowered by the adjustment pin lifting mechanism to engage with the first adjustment hole 33a or the second adjustment hole 33b. The pair of adjustment pins 121 and 121 engaged with the first adjustment hole 33a and the second adjustment hole 33b are moved in a direction parallel to the X axis and the Y axis by the pin X axis movement mechanism and the pin Y axis movement mechanism. And by rotating in the θ direction by the pin rotation mechanism, the droplet discharge head 40 temporarily mounted on the unit plate 51 is slightly moved and positioned at an appropriate position. The positional relationship between the pair of adjustment pins 121 and 121 in the X-axis and Y-axis plane direction is fixed, and is moved simultaneously by the pin X-axis movement mechanism, the pin Y-axis movement mechanism, and the pin rotation mechanism. Movement by the adjustment pin lifting mechanism is performed individually for each adjustment pin 121.

  Next, a state where the head unit 30 is placed on the holding table 110 will be described with reference to FIG. FIG. 8 is a plan view of the holding table and the head unit placed on the holding table. As described above, the unit plate 51 of the head unit 30 is formed with the first position restricting hole 52a, the second position restricting hole 52b, and the unit fixing hole 53. The holding table 110 is formed with two unit receiving portions 162, two position restricting pins 163, and four screw holes 164. As shown in FIG. 8, the head unit 30 is configured to fit the position restriction pins 163 provided on the holding table 110 into the first position restriction holes 52 a and the second position restriction holes 52 b formed in the unit plate 51. It is positioned with respect to the holding table 110. The positioned head unit 30 passes through the unit fixing holes 53 formed in the unit plate 51 and is screwed into four unit fixing screws 68 that are screwed into screw holes 164 (see FIG. 7) formed in the holding table 110. The holding table 110 is fixed. The position of the rotation mechanism 109 and the holding table 110 in the plane direction parallel to the X axis and the Y axis is configured such that the rotation center 109G of the rotation mechanism 109 is positioned approximately at the center of the holding table 110. . The pair of reference mark holes 56, 56 are on a straight line passing through the rotation center 109G and extending in the X-axis direction, and their centers are located at symmetrical positions with the rotation center 109G interposed therebetween. As described with reference to FIG. 5, in a state where the head unit 30 is attached to the droplet discharge device 1, the nozzle row 43 formed in the droplet discharge head 40 is configured to extend in the Y-axis direction. It has become. The nozzle row 43 formed in the droplet discharge head 40 whose position adjustment by the head unit assembling apparatus 100 has been completed extends in the Y-axis direction.

(Alignment mask)
Next, the alignment mask 200 will be described in detail with reference to FIG. FIG. 9 is a plan view showing a schematic configuration of the alignment mask. In the head unit assembling apparatus 100 of this embodiment, it is necessary to always supply a head unit 30 having a certain level of assembly accuracy regardless of the number of assembled head units 30. Therefore, an alignment mask 200 is prepared in which the reference positions of the pair of reference mark holes 56 and 56 and the 12 droplet discharge heads 40 are marked. That is, the alignment mask 200 is used as a prototype (original) at the part position, and the head unit 30 as a duplicate is assembled by the head unit assembling apparatus 100. As a result, it is possible to eliminate the influence of the wrinkles and temporal changes of each head unit assembly apparatus 100 with respect to the head unit 30 on the positional accuracy of the droplet discharge head 40.

  The alignment mask 200 includes a master plate 201 on which a reference position of the reference mark hole 56 and a reference position of each droplet discharge head 40 are formed as a mask pattern, and a plate holder (not shown) that holds the master plate 201 from below. Has been. The master plate 201 is made of thick transparent quartz glass so as not to be distorted as a prototype.

  On the surface of the master plate 201, seven sets of seven head reference marks 204 each representing the reference position of each droplet discharge head 40 are formed as a set, and six sets of six sets are formed on both sides. A pair of mark hole reference marks 205 and 205 representing the reference position of the reference mark hole 56 are formed on both sides of the 12 sets of head reference marks 204. Each of the seven head reference marks 204 includes an A reference mark 204A indicating the center position of the first nozzle 001A and the 180th nozzle 180A, a B reference mark 204B indicating the center position of the first nozzle 001B and the 180th nozzle 180B, A C reference mark 204C indicating the position of the nozzle center of gravity 420G, a D reference mark 204D indicating the position of the A column center of gravity 420A, and an E reference mark 204E indicating the position of the B column center of gravity 420B. The position of the mark hole reference mark 205 corresponds to the reference point setting position, the position of the head reference mark 204 corresponds to the nozzle standard position, the A reference mark 204A, the B reference mark 204B, the C reference mark 204C, the D reference mark 204D, Alternatively, the position of the E reference mark 204E corresponds to the center-of-gravity point standard position.

  As described with reference to FIG. 6, the A-row center of gravity 420A is the center of gravity of all the discharge nozzles 42 constituting the A nozzle row 43A, and is also the center of gravity of the first nozzle 001A and the 180th nozzle 180A. . The B row center of gravity 420B is the center of gravity of all the discharge nozzles 42 constituting the B nozzle row 43B, and is also the center of gravity of the first nozzle 001B and the 180th nozzle 180B. The nozzle center of gravity 420G is the center of gravity of all the discharge nozzles 42 constituting the A nozzle row 43A and the B nozzle row 43B, that is, all the discharge nozzles 42 of the droplet discharge head 40, and the first nozzle 001A and the 180th nozzle It is also the center of gravity of 180A, No. 1 nozzle 001B and No. 180 nozzle 180B.

  Each of the seven head reference marks 204 representing the reference positions of the droplet discharge heads 40 that are the head 400a to the head 400f shown in FIG. 5 is the first nozzle 001A and the 180th nozzle of the A nozzle row 43A on the upper side of FIG. The A reference mark 204A indicates the center position of 180A, and the lower side is the B reference mark 204B that indicates the center positions of the first nozzle 001B and the 180th nozzle 180B of the B nozzle row 43B. Each of the seven head reference marks 204 representing the reference positions of the droplet discharge heads 40 that are the head 401a to the head 401f shown in FIG. 5 is the first nozzle 001A and the 180th nozzle of the A nozzle row 43A on the lower side of FIG. The A reference mark 204A indicates the center position of 180A, and the upper side is the B reference mark 204B that indicates the center positions of the first nozzle 001B and the 180th nozzle 180B of the B nozzle row 43B.

  For ease of explanation, the A reference mark 204A and the B reference mark 204B are distinguished from each other. However, since the head reference mark 204 is formed at a predetermined position with almost no error, the seven reference marks 204A and 204B are distinguished from each other. In the head reference mark 204, the A reference mark 204A and the B reference mark 204B are formed at substantially the same positions and are not distinguished. Similarly, the D reference mark 204D and the E reference mark 204E are formed at substantially the same positions and are not distinguished. Accordingly, the seven head reference marks 204 are formed at symmetrical positions with respect to the C reference mark 204C. The head 400a to the head 400f and the head 401a to the head 401f shown in FIG. 5 have the same extending direction of the nozzle row 43 and are rotated 180 degrees in the θ direction, and the first nozzle 001A to the 180th nozzle. Although the arrangement direction of 180A is reversed, the seven head reference marks 204 corresponding to the respective droplet discharge heads 40 are formed in substantially the same positional relationship.

  Each head reference mark 204 is formed by drawing a hollow cross inside the circular line and drawing a diagonal line inside the circle excluding the cross. Therefore, when the image is recognized (captured) by the recognition device 104, a bright cross is recognized inside the dark circular portion. Similarly, each mark hole reference mark 205 is formed by drawing a hollow cross inside the circular line and by drawing a diagonal line inside the circle excluding the cross. The C reference mark 204C may be omitted because it can be calculated from the two A reference marks 204A and the two B reference marks 204B. Similarly, since the D reference mark 204D and the E reference mark 204E can be calculated from the two A reference marks 204A or the two B reference marks 204B, they may be omitted. Each pattern formed on the master plate 201 is formed by forming an opaque film typified by a metal such as Cr and patterning the film using semiconductor technology.

  The plate holder that supports the master plate 201 holds the alignment mask 200 in cooperation with the positioning structure formed in the mask receiving portion 161 when the alignment mask 200 is fixed to the holding table 110 of the head unit assembly apparatus 100. It has a positioning structure (not shown) for positioning with respect to 110. The alignment mask 200 and the head unit 30 are exchanged and set on the holding table 110 of the head unit assembling apparatus 100.

(Head unit assembly method)
Next, an assembly method by the head unit assembly apparatus 100 for assembling the head unit 30 will be described in detail with reference to FIG. FIG. 10 is a flowchart showing the process of assembling the head unit by the head unit assembling apparatus.

  Prior to execution of the work, the alignment mask 200 is introduced into the holding table 110, and the head reference mark 204 and the mark hole reference mark 205 of the alignment mask 200 are image-recognized by the recognition device 104. The step of recognizing the head reference mark 204 and the mark hole reference mark 205 of the alignment mask 200 corresponds to a setting position acquisition step or a setting position acquisition step. The head unit assembling apparatus 100 stores reference position data of the head reference mark 204 and the mark hole reference mark 205 that have been image-recognized, and the position of each droplet discharge head 40 is corrected based on this reference position data (master data). Is called. The alignment mask 200 is periodically introduced not only when the new head unit 30 is introduced and assembled, but also with the same head unit 30 based on the number of assembled units and the operation time. Of course, the reference position data is reset at that time.

  In the head unit assembly apparatus 100, the head unit 30 on which the droplet discharge head 40 is temporarily mounted is set. The head unit 30 is set on the upper surface of the holding table 110 with the head main body 40A of each droplet discharge head 40 facing upward. The head unit 30 is set on the upper surface of the holding table 110, and the assembly process of the head unit 30 which is the position adjustment of the droplet discharge head 40 by the head unit assembling apparatus 100 is started.

  In step S <b> 21 of FIG. 10, the position of the reference mark hole 56 is detected by recognizing the reference mark hole 56 formed in one of the pair of reference pins 54 and 54 by the recognition device 104.

  Next, in step S <b> 22, the other reference pin 54 recognizes the recognition device 104 so that the recognition device 104 can recognize the reference mark hole 56 formed in the other reference pin 54 of the pair of reference pins 54, 54. The head unit 30 set on the holding table 110 is moved in the X-axis direction by the X-axis moving mechanism 107 so as to reach the position facing the head.

  Next, in step S23, the recognition device 104 detects the position of the other reference mark hole 56 by recognizing the reference mark hole 56 formed in the other reference pin 54 of the pair of reference pins 54 and 54. .

  Next, in step S24, whether the amount of deviation in the Y-axis direction between the position of one reference mark hole 56 recognized in step S21 and the position of the other reference mark hole 56 recognized in step S23 satisfies the standard. Determine whether. As described with reference to FIG. 8, the pair of reference mark holes 56, 56 are on a straight line passing through the rotation center 109G and extending in the X-axis direction, and are symmetrical with respect to the rotation center 109G. It is defined that its center is located at the position. That is, the deviation in the Y-axis direction between the position of one reference mark hole 56 and the position of the other reference mark hole 56 is caused by the head unit 30 being inclined in the θ direction.

  If the amount of deviation in the Y-axis direction does not satisfy the standard (NO in step S24), the process proceeds to step S25. In step S <b> 25, the direction of the head unit 30 is adjusted by rotating the head unit 30 on the holding table 110 in the θ direction by the rotation mechanism 109. As described above, since the pair of reference mark holes 56 and 56 are located at substantially symmetrical positions with the rotation center 109G interposed therebetween, one of the reference mark holes 56 moves about half the amount of deviation in the Y-axis direction. Rotating to correct the deviation in the Y-axis direction. After step S25, the process proceeds to step S21, and steps S21 to S24 are repeated.

  If the amount of deviation in the Y-axis direction satisfies the standard (YES in step S24), the process proceeds to step S26. In step S26, the head unit 30 is moved so that the position of the recognized reference mark hole 56 matches the position of the mark hole reference mark 205 on the previously acquired reference position data. The head unit 30 is moved by moving the head unit 30 on the holding table 110 in the X-axis direction and the Y-axis direction using the X-axis moving mechanism 107 and the Y-axis moving mechanism 108.

  Next, in step S <b> 27, the head unit 30 is moved to a position where the recognition device 104 can recognize the discharge nozzle 42 of the droplet discharge head 40 to be subjected to position adjustment next time. The head unit 30 is moved by moving the head unit 30 on the holding table 110 in the X-axis direction and the Y-axis direction using the X-axis moving mechanism 107 and the Y-axis moving mechanism 108.

  Next, in step S <b> 28, the pair of adjustment pins 121, 121 of the head correction device 102 are engaged with the first adjustment hole 33 a and the second adjustment hole 33 b formed in the sub head holding member 33. The positional relationship between the head correction device 102 and the recognition device 104 is such that when the droplet discharge head 40 is located at a position where the recognition device 104 can recognize the discharge nozzle 42 of the droplet discharge head 40, the head correction device. The pair of adjustment pins 121 and 121 of 102 are in such a positional relationship that they face the first adjustment hole 33a and the second adjustment hole 33b formed in the sub head holding member 33 to which the droplet discharge head 40 is fixed. It has become. At this position, the pair of adjustment pins 121, 121 are lowered by the adjustment pin lifting mechanism to engage with the first adjustment hole 33a and the second adjustment hole 33b.

  Next, in step S29, the position of the droplet discharge head 40 is detected by the recognition device 104. The detection of the droplet discharge head 40 is executed by recognizing the discharge nozzle 42 of the droplet discharge head 40 by the recognition device 104. More specifically, the first nozzle 001A (see FIG. 6) at one end of the A nozzle row 43A and the 180th nozzle 180A (see FIG. 6) at the other end are recognized. The first nozzle 001A and the 180th nozzle 180A are the discharge nozzles 42 used as a reference when measuring the position of the discharge nozzle 42 in the droplet discharge head 40 described with reference to FIG. Step S29 corresponds to a detection step.

  Next, in step S30, the positional deviation in the X-axis direction between the first nozzle 001A and the 180th nozzle 180A and the distance in the Y-axis direction from the positions of the first nozzle 001A and the 180th nozzle 180A detected in step S29. And calculate. As described with reference to FIG. 8, the nozzle row 43 formed in the droplet discharge head 40 whose position adjustment by the head unit assembly apparatus 100 has been completed is configured to extend in the Y-axis direction. The positional deviation in the X-axis direction between the first nozzle 001A and the 180th nozzle 180A occurs when the A nozzle row 43A is inclined with respect to the Y-axis direction. From the calculated positions of the first nozzle 001A and the 180th nozzle 180A in the X-axis direction and the distance in the Y-axis direction, the inclination of the A nozzle row 43A with respect to the Y-axis direction is calculated.

  Next, in step S31, it is determined whether or not the inclination of the A nozzle row 43A calculated in step S30, that is, the inclination of the droplet discharge head 40 satisfies the standard.

  When the inclination amount of the A nozzle row 43A does not satisfy the standard (NO in step S31), the process proceeds to step S32. In step S <b> 32, the head correction device 102 corrects the inclination of the droplet discharge head 40. In order to correct the inclination of the droplet discharge head 40, the pair of adjustment pins 121 and 121 engaged with the first adjustment hole 33a and the second adjustment hole 33b in step S28 are rotated in the θ direction by a pin rotation mechanism. Thus, the droplet discharge head 40 temporarily mounted on the unit plate 51 is slightly rotated and executed. Note that the rotation center of the pin rotation mechanism is set to the approximate center of the line segment connecting the centers of the pair of adjustment pins 121 and 121, so that A is associated with rotation of the droplet discharge head 40 by the pin rotation mechanism. The movement of the column centroid 420A (see FIG. 6) can be reduced.

  After step S32, the process proceeds to step S29 while maintaining a state where the pair of adjustment pins 121, 121 are engaged with the first adjustment hole 33a and the second adjustment hole 33b, and steps S29 to S31 are performed. Repeat.

  When the inclination amount of the A nozzle row 43A satisfies the standard (YES in step S31), the process proceeds to step S33. In step S33, the position of the center of gravity A 420A (see FIG. 6) is calculated from the positions of the first nozzle 001A and the 180th nozzle 180A detected in step S29. Step S33 corresponds to a calculation step.

  Next, in step S34, the position data of the column A center of gravity 420A calculated in step S28 is compared with the position data of the D reference mark 204D (see FIG. 9) on the reference position data acquired in advance. Then, it is determined whether or not the deviation amount between the position of the column A center of gravity 420A and the position of the D reference mark 204D satisfies the standard.

  If the amount of deviation between the position of the A column center of gravity 420A and the position of the D reference mark 204D does not satisfy the standard (NO in step S34), the process proceeds to step S35. In step S35, the head correction device 102 corrects the position of the droplet discharge head 40 in the X-axis direction and the Y-axis direction.

  To correct the position of the droplet discharge head 40 in the X-axis direction and the Y-axis direction, the pair of adjustment pins 121 and 121 engaged with the first adjustment hole 33a and the second adjustment hole 33b in step S28 are moved by the pin X-axis. It is executed by moving the droplet discharge head 40 temporarily mounted on the unit plate 51 by moving it in a direction parallel to the X axis and the Y axis by the mechanism and the pin Y axis moving mechanism. By slightly moving the droplet discharge head 40, the position of the A column center of gravity 420A calculated in step S28 is moved to the position of the D reference mark 204D on the reference position data acquired in advance. Thereby, the droplet discharge head 40 is moved to the position of the droplet discharge head 40 on the reference position data acquired in advance, and is positioned at the position. Step S35 corresponds to a positioning step.

  After step S35, the process proceeds to step S29 while maintaining the state where the pair of adjustment pins 121, 121 are engaged with the first adjustment hole 33a and the second adjustment hole 33b, and steps S29 to S34 are performed. Repeat. Since the droplet discharge head 40 is hardly rotated in the θ direction by position correction by the pin X-axis moving mechanism and the pin Y-axis moving mechanism, steps S30 to S32 are omitted, and steps S29 and S29 are performed. S33 and step S34 may be repeated.

  If the deviation amount satisfies the standard (YES in step S34), the process proceeds to step S36 while maintaining this positioning completion state. In order to maintain the positioning completion state, the adjustment pins 121 and 121 are maintained in a state where they are engaged with the first adjustment hole 33a and the second adjustment hole 33b. In step S36, the adhesive is fixed to the main head holding member 32 of the sub head holding member 33 by injecting the adhesive into the adhesive hole 33c by the adhesive fixing device. The adhesive is cured by maintaining the state where the adjustment pins 121 and 121 are engaged with the first adjustment hole 33a and the second adjustment hole 33b until the adhesive is substantially cured after the injection of the adhesive. The occurrence of a new misalignment of the droplet discharge head 40 due to deformation in the process is suppressed.

  Next, in step S <b> 37, it is determined whether or not positioning and adhesive fixing have been executed for all the 12 droplet discharge heads 40 of the head unit 30. If positioning and adhesion fixing have not been performed for all of the 12 droplet ejection heads 40 (NO in step S37), the process proceeds to step S27, and the droplet ejection head 40 in which positioning and adhesion fixation has not been performed. Then, the steps from Step S27 to Step S35 are repeated to perform positioning and adhesive fixing of the respective droplet discharge heads 40.

  The head 400a to the head 400f and the head 401a to the head 401f shown in FIG. 5 have the same extending direction of the nozzle row 43 and are rotated 180 degrees in the θ direction. Therefore, in the head 400a to the head 400f, the upper nozzle row 43 in FIG. 5 or FIG. 8 is the A nozzle row 43A, and in the head 401a to the head 401f, the lower nozzle row 43 in FIG. This is the A nozzle row 43A. In any of the head 400a to the head 400f or the head 401a to the head 401f, the first nozzle 001A and the 180th nozzle 180A of the A nozzle row 43A are recognized, and the position of the A row center of gravity 420A is determined as the position of the D reference mark 204D. Align to.

  If positioning and adhesive fixing have been completed for all twelve droplet discharge heads 40 (YES in step S37), the assembly process of the head unit 30 by the head unit assembling apparatus 100 is terminated.

  Further, the sub-head holding member 33 is fixed to the main head holding member 32 by using the holding member screw 38 by manual operation, so that the droplet discharge head 40 is unitized as described with reference to FIG. It is fixed to the plate 51.

Hereinafter, effects of the embodiment will be described. According to the present embodiment, the following effects can be obtained.
(1) When the droplet discharge head 40 is positioned and fixed to the unit plate 51, the position of the column A center of gravity 420A is aligned with the position of the D reference mark 204D. Position. The A row center of gravity 420A is calculated as the midpoint of the first nozzle 001A and the 180th nozzle 180A of the A nozzle row 43A by recognizing them. The error in the distance between the No. 1 nozzle 001A and the No. 180 nozzle 180A is prorated as the error in the distance between the A-line centroid 420A and the No. 1 nozzle 001A and the distance between the No. 180 nozzle 180A and the No. 1 nozzle 001A. The positioning accuracy of the discharge nozzle 42 is improved compared to the case where one of the nozzle 180A and the 180th nozzle 180A is positioned and the other is positioned with the accuracy of the error in the distance between the first nozzle 001A and the 180th nozzle 180A. Can be made. Thereby, the droplet discharge head 40 can be accurately positioned.

  (2) In order to align the position of the A column center of gravity 420A with the D reference mark 204D in the head reference mark 204 using the alignment mask 200 on which the head reference mark 204 is accurately formed, the A column center of gravity 420A The droplet discharge head 40 having the position is generally positioned with the accuracy of the head reference mark 204 in the alignment mask 200. Thus, the droplet discharge head 40 can be accurately positioned by suppressing the wrinkles and changes with time of each head unit assembly apparatus 100 with respect to the head unit 30 from affecting the position accuracy of the droplet discharge head 40. Can do.

  As mentioned above, although preferred embodiment which concerns on this invention was described referring an accompanying drawing, embodiment of this invention is not restricted to the said embodiment. The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the present invention, and can be implemented as follows.

  (Modification 1) In the above embodiment, the head unit assembly apparatus 100 that positions the droplet discharge head 40 in the head unit 30 to the unit plate 51 has been described as an example. However, the positioning target is the droplet discharge head. It is not essential. In order to accurately position the member at a predetermined position on the plate, the same effect as that of the above-described embodiment can be obtained by executing the positioning method of the present invention.

  (Modification 2) In the above-described embodiment, the alignment mask 200 is used as a prototype of the component position, and the head unit 30 as a duplicate is assembled by the head unit assembling apparatus 100. However, the use of the alignment mask 200 is not essential. . For example, the position where the droplet discharge head 40 is to be arranged may be input as numerical information to the head unit assembling apparatus, and the unit may be assembled according to the numerical information.

  (Modification 3) In the above embodiment, the center of gravity of the first nozzle 001A and the nozzle 180A of the A nozzle row 43A, or the center of gravity of the A nozzle 420A that is the center of gravity of the discharge nozzles 42 constituting the A nozzle row 43A. However, it is not essential to use the center of gravity of the nozzle row as a point that represents the droplet discharge head 40. The point that the drop center 40G represents the center of gravity of all the discharge nozzles 42 constituting the A nozzle row 43A and the B nozzle row 43B, that is, the center of gravity of all the discharge nozzles 42 of the droplet discharge head 40, is representative of the droplet discharge head 40. It may be used as

  (Modification 4) In the embodiment, the head reference mark 204 indicating the position of the discharge nozzle 42 formed on the alignment mask 200 indicates the position of the first nozzle or the 180th nozzle and is used for positioning. The discharge nozzles 42 to be used were the first nozzle and the 180th nozzle located at both ends of the nozzle row 43. However, it is not essential that the discharge nozzle used for positioning is a discharge nozzle located at the end of the nozzle row. Any discharge nozzle may be used as long as it can determine the center of gravity position at a predetermined position representative of the extending direction of the nozzle row and the position of the discharge head for determining the direction and position of the discharge head.

  (Modification 5) In the embodiment, the extending direction of the nozzle row 43 in the droplet discharge device 1 is the sub-scanning direction (Y-axis direction), but the extending direction of the nozzle row 43 is the sub-scanning direction. It is not essential to match, and the extending direction of the nozzle row 43 may be inclined at a certain angle.

  (Modification 6) In the embodiment, the head 400a to the head 400f and the head 401a to the head 401f provided in the head unit 30 have the same nozzle line 43 extending direction and the direction is 180 degrees in the θ direction. Although rotating, it is not essential that the direction of the θ direction of the droplet discharge head 40 is different. The orientations in the θ direction of the plurality of droplet discharge heads 40 constituting the head unit 30 may all be the same.

  (Modification 7) In the embodiment described above, the relative movement between the substrate W and the droplet discharge head 40 is performed by moving both the substrate W and the droplet discharge head 40 in the scanning direction. It is not essential for both parties to move. The scanning may be configured such that one is fixed and the other moves in the main scanning direction and the sub-scanning direction.

  (Modification 8) In the above embodiment, the relative movement between the substrate W and the droplet discharge head 40 is configured to move in the main scanning direction and the sub-scanning direction. Relative movement in both directions is not essential. The discharge nozzle 42 may be formed over the entire surface of the substrate W in the sub-scanning direction, and only main scanning may be performed.

  (Modification 9) In the above embodiment, after the fixing using the adhesive is completed for the 12 droplet discharge heads 40 of one head unit 30, the main head holding member 33 using the holding member screw 38 is used. Although the fixing to the head holding member 32 has been executed, it is not essential to execute the screw fixing using the holding member screw 38 after the adhesive fixing of the 12 droplet discharge heads 40 is completed. Screw fixing may be executed for each one of the droplet discharge heads 40 following the adhesive fixing.

  (Modification 10) In the above embodiment, the assembly process by the head unit assembly apparatus 100 is completed by applying and fixing the adhesive, but after the adhesive is applied, the droplet discharge head 40 is again formed. You may confirm a position. Since the assembly (position adjustment of the droplet discharge head 40) result can be verified, the reliability of the head unit 30 is improved.

  (Modification 11) In the above embodiment, the reference mark hole 56 which is a small hole formed in the reference pin 54 is used as a reference when the position of the droplet discharge head 40 on the unit plate 51 is defined. However, it is not essential that the reference is a hole. Any device that can be clearly detected by the recognition device 104 may be used. You may use the top of the projection of a micro warp as a reference | standard.

  (Modification 12) In the above embodiment, the reference mark hole 56 which is a small hole formed in the reference pin 54 is used as a reference when the position of the droplet discharge head 40 on the unit plate 51 is defined. However, it is not essential to form the reference mark hole 56 in the reference pin 54. The reference mark hole 56 may be formed directly on the unit plate 51. By directly forming the reference mark hole 56 in the unit plate 51, it is possible to eliminate the influence of the shape error of the reference pin 54 and form the reference mark hole 56 at a more accurate position.

FIG. 3 is an external perspective view showing a schematic configuration of a droplet discharge device. FIG. 3 is an external perspective view of the droplet discharge head as viewed from the nozzle forming plate side. (A) The top view which looked at the droplet discharge head attached to the unit plate from the nozzle plate side. (B) Sectional drawing of the cross section shown by AA in FIG. (A) The top view which looked at the reference | standard pin from the reference | standard mark hole side. (B) A side view of the reference pin. The top view of the head unit in a carriage. FIG. 3 is a schematic plan view of a nozzle formation surface of a droplet discharge head on which discharge nozzles are formed. The schematic diagram which shows the structure of a head unit assembly apparatus. The top view of the head unit mounted in the holding table and the holding table. The top view which shows schematic structure of an alignment mask. 6 is a flowchart showing a process of assembling the head unit by the head unit assembling apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device, 001A, 001B ... No. 1 nozzle, 30 ... Head unit, 32 ... Main head holding member, 33 ... Sub head holding member, 33a ... First adjustment hole, 33b ... Second adjustment hole, 40 ... Droplet discharge head, 42 ... discharge nozzle, 43 ... nozzle row, 43A ... A nozzle row, 43B ... B nozzle row, 51 ... unit plate, 54 ... reference pin, 56 ... reference mark hole, 100 ... head unit assembly device, DESCRIPTION OF SYMBOLS 101 ... Unit movement apparatus, 102 ... Head correction apparatus, 104 ... Recognition apparatus, 110 ... Holding table, 121 ... Adjustment pin, 180A, 180B ... No. 180 nozzle, 200 ... Alignment mask, 204 ... Head reference mark, 204A ... A reference Mark, 204B ... B reference mark, 204C ... C reference mark, 204D ... D reference mark, 204E ... E reference mark, 05 ... Mark hole reference mark, 400a, 400b, 400c, 400d, 400e, 400f, 401a, 401b, 401c, 401d, 401e, 401f ... Head, 420A ... A row center of gravity, 420B ... B row center of gravity, 420G ... Nozzle center of gravity, 430A ... A nozzle row line, 430B ... B nozzle row line.

Claims (16)

A positioning method for positioning and positioning a member at a predetermined position on a plate,
A positioning method comprising: a position adjusting step of positioning the member by positioning a center of gravity of a plurality of member standard points defined on the member at a predetermined position. A reference point setting position of a reference point used as a reference when positioning the member provided on the plate, and a plurality of member standard point positions at which the plurality of member standard points with respect to the reference point setting position are respectively arranged A setting position acquisition step of acquiring position information of
In the position adjustment step, the member is positioned by positioning the center of gravity of the plurality of member standard points on the center of gravity of the plurality of member standard point positions in the position information acquired in the setting position acquisition step. The positioning method according to claim 1, wherein: A head unit assembly method for forming the head unit by positioning and fixing each of the plurality of droplet discharge heads of a head unit having a plurality of droplet discharge heads fixed to the unit plate at a predetermined position of the unit plate. Because
By positioning the center of gravity of two or more droplet discharge nozzles among the plurality of droplet discharge nozzles of each of the plurality of droplet discharge heads at a predetermined position, the droplet discharge nozzles A method of assembling the head unit, comprising: a position adjusting step of positioning the droplet discharge head having a predetermined position on the unit plate. A reference point setting position of a reference point used as a reference when positioning the liquid droplet discharge head provided on the unit plate, and a plurality of liquid droplet discharge nozzles for the reference point setting position are respectively arranged. A nozzle standard position, and a setting position acquisition step of acquiring position information;
In the position adjustment step, two or more nozzles corresponding to the two or more nozzle standard positions are arranged at the center of gravity of two or more nozzle standard positions among the plurality of nozzle standard positions in the position information acquired in the set position acquisition step. 4. The head unit assembling method according to claim 3, wherein the droplet discharge head is positioned by positioning a center of gravity of the droplet discharge nozzle. A reference point setting position of a reference point used as a reference when positioning the droplet discharge head provided on the unit plate, and a centroid point standard position at which the centroid point with respect to the reference point setting position is to be placed, A center-of-gravity setting position acquisition step for acquiring position information of
The position adjustment step includes
A detection step of detecting positions of two or more droplet discharge nozzles among the plurality of droplet discharge nozzles of the droplet discharge head to be positioned;
A calculation step of calculating the position of the center of gravity of the two or more droplet discharge nozzles from the two or more droplet discharge nozzle positions detected in the detection step;
A positioning step of positioning the liquid droplet ejection head having the barycentric point at a predetermined position of the unit plate by positioning the barycentric point whose position has been calculated in the calculating step at the barycentric point standard position. The head unit assembling method according to claim 3. The droplet discharge head has one or more nozzle rows in which a plurality of the droplet discharge nozzles are aligned,
In the position adjustment step, the center of gravity of the two or more droplet discharge nozzles constituting the first nozzle row in the one or more nozzle rows is positioned, whereby the first nozzle row is provided. 5. The head unit assembling method according to claim 3, wherein the droplet discharge head is positioned at a predetermined position of the unit plate.   In the position adjusting step, by positioning the gravity center points of the two droplet discharge nozzles positioned at both ends of the first nozzle row, the droplet discharge head having the first nozzle row is moved to the unit. The head unit assembling method according to claim 6, wherein the head unit is positioned at a predetermined position of the plate. The droplet discharge head is formed by arranging a plurality of the droplet discharge nozzles, and has two or more nozzle rows substantially parallel to each other.
In the position adjusting step, the center of gravity of the quadrangle formed by each of the two droplet discharge nozzles of the first nozzle row and the second nozzle row located at both ends of the two or more nozzle rows is positioned. 5. The head unit assembly according to claim 3, wherein the liquid droplet ejection head having the first nozzle row and the second nozzle row is positioned at a predetermined position of the unit plate. Method.   In the position adjusting step, by positioning the center of gravity of a quadrangle formed by a total of four droplet discharge nozzles positioned at both ends of the first nozzle row and the second nozzle row, the 2 9. The head unit assembling method according to claim 8, wherein the liquid droplet ejection head having the nozzle row is positioned at a predetermined position of the unit plate. A head measurement step of measuring the accuracy of the droplet discharge head including the positional accuracy of each of the droplet discharge nozzles using the center of gravity of the two or more droplet discharge nozzles as a measurement reference;
4. The liquid droplet ejection head is positioned in the position adjustment step by positioning a center of gravity of the two or more liquid droplet ejection nozzles used as a measurement reference in the head measurement step. The head unit assembling method according to any one of claims 1 to 9. A head unit assembling apparatus that positions and fixes each of the plurality of droplet discharge heads of a head unit having a plurality of droplet discharge heads fixed to a unit plate to a predetermined position of the unit plate to form the head unit. Because
A detection unit for detecting positions of a plurality of droplet discharge nozzles included in each of the plurality of droplet discharge heads;
A calculation unit that calculates the center of gravity of two or more droplet discharge nozzles of the plurality of droplet discharge nozzles;
And a position adjusting unit that positions the droplet discharge head having the droplet discharge nozzle at a predetermined position by positioning the center of gravity at a predetermined position. Assembly equipment.   A reference point setting position of a reference point used as a reference when positioning the liquid droplet discharge head provided on the unit plate, and a plurality of liquid droplet discharge nozzles for the reference point setting position are respectively arranged. The apparatus further comprises a setting position acquisition unit that acquires position information of at least one of the center-of-gravity point standard positions where the center-of-gravity points with respect to the nozzle standard position or the reference point setting position are to be arranged. 11. A head unit assembling apparatus according to 11. A head unit in which a plurality of droplet discharge heads are fixed to a unit plate,
Each of the plurality of droplet discharge heads has a center of gravity of two or more droplet discharge nozzles of the plurality of droplet discharge nozzles of the droplet discharge head at a predetermined position. The head unit is positioned at a predetermined position of the unit plate by positioning. A droplet discharge device comprising a head unit in which a plurality of droplet discharge heads are fixed to a unit plate,
Each of the plurality of droplet discharge heads has a center of gravity of two or more droplet discharge nozzles of the plurality of droplet discharge nozzles of the droplet discharge head at a predetermined position. A droplet discharge device characterized by being positioned at a predetermined position of the unit plate by positioning.   The droplet discharge head has one or more nozzle rows in which a plurality of the droplet discharge nozzles are aligned, and two or more of the liquids constituting the first nozzle row in the one or more nozzle rows. The droplet discharge device according to claim 14, wherein the droplet discharge nozzle is positioned at a predetermined position of the unit plate by positioning a center of gravity of the droplet discharge nozzle. The two or more droplet discharge nozzles are a first reference nozzle and a second reference nozzle,
The droplet discharge head includes a plurality of lines in which a straight line connecting the center point of the first reference nozzle and the center point of the second reference nozzle relatively moves the plurality of droplet discharge heads and the drawing target. It is attached to the unit plate at a certain angle with respect to the first direction in the moving direction,
The plurality of droplet discharge heads of the head unit are positioned at predetermined positions on the unit plate, and a direction from the center point of the first reference nozzle toward the center point of the second reference nozzle is A first droplet discharge head that is a first direction and a second direction that is different from the first direction in a direction from the center point of the first reference nozzle toward the center point of the second reference nozzle. The liquid droplet ejection apparatus according to claim 15, further comprising a second liquid droplet ejection head having a direction.

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