JP2009069093A - Correction method for aging shift amount of reference value - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a correcting method of the aging shift amount of the reference value that estimates the aging shift amount of the reference value and determine its physical quantity correction value. <P>SOLUTION: This correcting method comprises a process of determining original reference positions A1-A3, by using a calibration means and simultaneously recording the times T1-T3; a process of aligning work pieces using a predetermined duration, predetermined quantity, or the original reference positions A1-A3 as the reference and recording alignment times t1-t7; a process of determining the last reference positions A2-A4 by using the calibrating means again and simultaneously recording the times T2-T4; and a process of estimating individual shift amounts Δ1-1 to Δ2-2 during the alignment of individual workpieces from the original reference positions, by using the differences Δ1-Δ3 between the original reference positions and the last reference positions, the time elapsed, while both the reference positions are determined, and the individual alignment times and setting them as the alignment correction values of individual work pieces. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

In the present invention, a physical quantity reference value (reference position, etc.) used as a reference when determining a physical quantity to be applied to a workpiece, such as alignment (positioning) of the workpiece, has changed over time while determining physical quantities of a plurality of workpieces. This is related to a method for correcting a shift amount with time of a reference value for obtaining a correction value for determining a physical quantity.

Conventionally, for example, a printer or the like uses a head unit in which a plurality of (many) droplet discharge heads are mounted on a single carriage. Since this type of droplet discharge head can selectively discharge minute droplets from the nozzle row with high accuracy, it can be used in liquid crystal display devices and organic EL devices.
It can be applied to the manufacture of color filters such as display devices, and is also expected to be applied to manufacturing apparatuses for various electronic devices and optical devices. Considering such applied technology, in addition to the performance of the droplet discharge head itself, high accuracy is required for the positional accuracy (assembly accuracy) of the nozzles (nozzle rows) in the plane and the positional accuracy of the carriage that is the prerequisite. The Further, depending on the liquid to be ejected, the life of the droplet ejection nozzle is shortened, and frequent replacement of the droplet ejection head needs to be considered.

For this reason, conventionally, as shown in Patent Document 1, for example, a head unit assembling apparatus and method capable of accurately assembling a plurality of droplet discharge heads on a single carriage have been proposed. The head unit assembling method includes a head unit in which a plurality of droplet discharge heads held by a head holding member are temporarily mounted on a single carriage via the head holding member, and the position of the carriage and the carriage mounted on the carriage. An alignment mask having a pattern formed on the position of each droplet discharge head to be prepared is prepared. First, the alignment mask is set in an assembly apparatus, and the position of the carriage and the position of each droplet discharge head formed on the alignment mask (these Each of which is a reference position) is recognized by a recognizing means (recognition camera), and a carriage on which each of the droplet discharge heads is mounted instead of the alignment mask is set in an assembling apparatus. The position and the position of each droplet discharge head are image-recognized by the recognition means, On the basis of the recognition result of the recognizing means, the moving means for holding the carriage is driven to position the carriage, and then the droplet is passed through the head holding member to the carriage positioned by the correcting means. The position of the discharge head is adjusted and positioned, and then each of the droplet discharge heads positioned by the fixing means is fixed to the carriage via each head holding member. If the head unit is assembled as described above, the position of the carriage and the position of each droplet discharge head mounted on the carriage are exactly the same as the pattern (reference position) indicating these positions formed on the alignment mask. Since the position can be set, the head unit with high accuracy can be manufactured. Here, a head unit in which the plurality of droplet discharge heads are attached to a single carriage is referred to as a work, and the alignment mask and recognition means are referred to as calibration means.

However, in the above method, as described above, a reference position for aligning the workpiece is determined in advance using calibration means such as an alignment mask and a recognition means, and the workpiece is moved with respect to this reference position. Because it aligns in a single wafer,
Due to the heating of the recognition means, which is the calibration means, the reference position to be measured will shift over time, and the workpiece alignment set based on this shifted reference position may also shift. It was.

In order to solve this problem, it is sufficient to determine the reference position by the calibration means each time the workpiece is aligned. However, if it does so, the time for a calibration will take much and the problem that the operation rate of an apparatus will fall arises.
Therefore, calibration is usually performed every time a predetermined number of workpieces are aligned for a predetermined period.

This is shown in the figure as follows. That is, the point A1 shown in FIG. 1 (measurement time T = T1 = 0)
First, the first reference position is measured and determined by the calibration means.
Next, the first workpiece alignment is performed using the reference position as a reference. At this time, a predetermined alignment time t1 has elapsed from the measurement time T1 of the reference position by the calibration means. An error L1 occurs in the measured value by the means due to the heating or the like compared with the initial measured value (T = T1). Since it cannot be confirmed that the error L1 has occurred, the workpiece is aligned with the error L1 included, and therefore an error occurs in this alignment. Next, the workpiece is aligned for the second time using the reference position. At this time, since a predetermined alignment time t2 has elapsed from the measurement time T1 of the reference position by the calibration means, an even larger error L2 during that time. Therefore, the workpiece is aligned with the error L2 included, and therefore an error also occurs in this alignment. Next, at the point A2 (T = T2), the second reference position is measured again by the calibration means. Thereby, a new reference position of the calibration means after the change with time can be measured. The third workpiece alignment is performed using the latest reference position. At this time as well, since a predetermined time (t3-T2) has elapsed from the measurement time T2 of the reference position by the calibration means, An error occurs in the alignment. Similarly, an error also occurs in the alignment of the workpiece after the fourth time. FIG. 1 (the same applies to FIGS. 2 and 3 below) shows, for example, a state in the X-axis direction, and a similar error occurs in the Y-axis direction.

Such a workpiece alignment error L is 1 for a plurality of workpiece alignments.
As long as the calibration is performed once, it is inevitably generated. However, if at least how much the error is generated is not grasped, the quality evaluation of the finished product cannot be performed. Further, it is impossible to feed back quality evaluation data with high accuracy to improve the alignment error of the workpiece.

Ideally, as shown in FIG. 2, the workpiece alignment is performed while correcting the reference position so as to coincide with the deviation of the reference position of the calibration means (reference position change curve H) that changes with time. Is to go. If it can do in this way, the error L will not arise at all in the alignment of each workpiece.
JP 2003-127392 A

The present invention has been made in view of the above points, and its purpose is to estimate a time-dependent shift amount of a physical quantity reference value (reference position etc.) used when determining a physical quantity to be applied to a work such as alignment of the work. It is an object of the present invention to provide a correction method for the shift amount of the reference value with time that can determine the correction value for determining the physical quantity.

According to the correction method for the reference value aging shift amount of the present invention, the initial physical quantity reference value used to determine the physical quantity to be given to the workpiece is determined using the calibration means, and at the same time, the initial physical quantity reference value is determined. A step of recording a time, a step of determining a physical quantity based on the physical quantity reference value for a predetermined period or a predetermined quantity of the work, recording a time when the physical quantity of each of the workpieces is determined, and the calibration means again Determining the latest physical quantity reference value at the same time, recording the time when the latest physical quantity reference value was determined, and obtaining a difference Δn between the initial physical quantity reference value and the latest physical quantity reference value, Using the elapsed time between determining the difference Δn and the two physical quantity reference values and the time determining the individual physical quantities, the individual physical quantities from the initial physical quantity reference value And a step of estimating each shift amount when the physical quantity of the workpiece is determined, and setting each shift amount as a correction value for determining the physical quantity of each workpiece.

This is shown in the figure as follows. The physical quantity reference value will be described as a reference position. That is, at the point A1 (measurement time T = T1 = 0) shown in FIG. 3, first, the first reference position (initial reference position) is measured and determined by the calibration means. At the same time, the time T1 when the initial reference position is determined is recorded. Next, the first workpiece alignment is performed using the reference position as a reference, and the measurement time t1 is recorded at the same time. At this time, since a predetermined positioning time t1 has elapsed from the measurement time T1 of the reference position by the calibration means, the measurement value by the calibration means is compared with the initial measurement value (T = T1) by heating or the like during that time. Thus, an error L1 occurs. Since it cannot be confirmed that the error L1 has occurred, the workpiece is aligned with the error L1 included, and therefore an error occurs in this alignment. Next, the second workpiece alignment is performed using the reference position as a reference, and the measurement time t2 is recorded simultaneously. At this time, since the predetermined alignment time t2 has elapsed from the measurement time T1 of the reference position by the calibration means, a larger error L2 is generated during that time, and the workpiece is aligned with this error L2 included. An error also occurs in this alignment. Next, point A2 (T = T2)
In step 2, the second reference position (latest reference position) is again obtained by the calibration means.
Measure. As a result, a new reference position of the calibration means after the change with time can be measured and determined. In the present invention, a difference Δ1 between the initial reference position and the latest reference position determined by the calibration means is obtained, and an elapsed time (T2) between times T2 and T1 at which the difference Δ1 and both reference positions are determined. -T1) is used to estimate the shift amount from the initial reference position during the alignment of the individual workpieces, and this is used as the alignment correction value.

As an example, the shift amount is determined by changing the reference position with time (difference Δ1) as the elapsed time (T2−T1).
) Is assumed to be a linear change. That is, in FIG. 3, the points A1 and A2
It is estimated that the reference position has shifted along the line C1 connecting This straight line C
1 is not the same as the reference position temporal change curve H which is an actual temporal change shift amount, but is an approximation. That is, the shift amount is obtained by proportionally distributing the difference Δ1 with respect to the elapsed time (T2−T1) at the individual alignment times t1 and t2. In other words, the shift amount (Δ1-1, Δ1-2) from the original reference position of each workpiece is obtained using the difference Δ1, the elapsed time (T2-T1), and the alignment time t1, t2 of each workpiece. These are used as alignment correction values for individual workpieces. If the alignment correction values of these workpieces are obtained, it is possible to estimate and know the amount of positional deviation of the actually positioned workpiece. Therefore, the alignment correction value data can be used as high-quality quality evaluation data of the positioned workpiece. It is also possible to feed back accurate quality evaluation data to improve the workpiece positioning error. Thereafter, the workpiece is aligned for the third and subsequent times in the same manner.

Further, the present invention is a method for correcting a reference value aging shift amount, wherein the physical quantity reference value,
Reference position, reference temperature, reference humidity, reference flow rate, reference weight, or reference viscosity.

Further, the present invention provides a method for correcting a shift value of a reference value with time, wherein each of the shift amounts from the physical quantity reference value at the time of determining the physical quantity of each of the workpieces, The physical quantity is obtained by proportional distribution at a predetermined time.

Further, according to the correction method of the shift amount of the reference value with time of the present invention, the initial reference position used for aligning the workpiece is determined using the calibration means, and at the same time, the time when the initial reference position is determined is recorded. A predetermined time or a predetermined quantity of workpieces,
Aligning with the reference position as a reference, recording the alignment time of each workpiece, determining the latest reference position again using the calibration means, and simultaneously determining the latest reference position A step of recording time, a difference Δn between the initial reference position and the latest reference position is obtained, an elapsed time between the determination of the difference Δn and the reference positions, and the individual alignment times are used. And estimating the individual shift amounts at the time of alignment of the individual workpieces from the initial reference position, and setting the individual shift amounts as alignment correction values for the individual workpieces. Features.

Further, the present invention provides a method for correcting a shift value of a reference value with time, wherein each of the shift amounts from the alignment reference position at the time of alignment of each of the workpieces, the difference Δn with respect to an elapsed time. It is characterized in that it is obtained by proportional distribution by alignment time.

According to the present invention, in the method of correcting a reference value shift with time, the work is a head unit in which a plurality of droplet discharge heads are attached to a single carriage, and the calibration means An alignment mask having a pattern formed on the position and the position of each droplet discharge head mounted on the carriage, and a recognition means for performing image recognition, and a reference position necessary for aligning the workpiece is: The position of the carriage patterned on the alignment mask and the position of each droplet discharge head are determined by recognizing images by the recognition means, and the alignment of the carriage and the droplet discharge head constituting the workpiece is The position of the carriage recognized by the recognition means and the droplet discharge head Location is and performing by moving the droplet discharge head and the carriage to match the initial reference position.

According to the present invention, as described above, the difference Δn between the initial physical quantity reference value and the latest physical quantity reference value, the elapsed time between the determination of both physical quantity reference values, and the time when the individual physical quantities are determined. Since the amount of shift from the original physical quantity reference value when estimating the physical quantity of each workpiece was estimated and used as the physical quantity determination correction value, almost accurate error data was obtained as error data for the physical quantity of the workpiece. It is done. Accordingly, it is possible to evaluate the quality of the work whose physical quantity is determined with high accuracy.

According to the present invention, since the shift amount is estimated by proportionally distributing the difference Δn with the time determined for each physical quantity with respect to the elapsed time, the calculation can be easily performed.

According to the present invention, when the head unit is assembled by aligning the carriage and each droplet discharge head, substantially accurate error data of the alignment between the carriage and each droplet discharge head can be obtained. Therefore, it is possible to evaluate the quality of the aligned head unit with high accuracy.

Hereinafter, an embodiment in which the present invention is applied to a head unit assembling apparatus in which a plurality of inkjet heads (droplet ejection heads) are incorporated in a carriage will be described in detail with reference to the drawings. Inkjet heads (droplet ejection heads) of inkjet printers can eject minute ink droplets (droplets) with high precision in the form of dots. By using a resin or the like, application to the manufacturing field of various parts is expected. In addition, in such applied technology, it is assumed that there is a great influence on the durability of the droplet discharge head, such as a highly viscous discharge target liquid, and a head unit in which a plurality of droplet discharge heads are accurately incorporated in the carriage is installed as needed. It is necessary to enable supply.

The head unit assembling apparatus is provided in a color filter manufacturing apparatus (hereinafter referred to as a “drawing apparatus”) incorporated in a flat display such as a liquid crystal display device, for example, so that the head unit can be supplied as needed. In this drawing apparatus, R.D. G. A plurality of droplet discharge heads for discharging the filter material B as droplets are provided, and the head unit assembly apparatus assembles the head unit by accurately incorporating the plurality of droplet discharge heads into the carriage, and draws this. The device can be appropriately supplied.

The assembly procedure of the head unit in this case is as follows. First, each droplet discharge head is individually assembled in a positioning state on the head holding member, temporarily mounted on a single carriage, and then each droplet discharge head is positioned with respect to the carriage. After that, it is temporarily fixed and finally fixed. The assembly of the droplet discharge head to the head holding member, the temporary mounting to the carriage and the main fixing are performed manually as an external process, while the plurality of droplet discharge heads are positioned and temporarily fixed to the carriage. Work is performed with this assembling apparatus. The present invention is used when positioning a droplet discharge head on this carriage.

First, the head unit handled by the assembling apparatus, and the droplet discharge head, the head holding member, and the carriage, which are constituent elements thereof, will be described. In addition to this explanation,
Regarding the relationship between the head unit and the above drawing apparatus, the method of assembling the droplet discharge head to the head holding member using a jig, and the alignment mask constituting the calibration means of the present invention and serving as a positioning reference for the head unit explain. Thereafter, the head unit assembly apparatus will be described in detail.

6, 7 and 8 are structural diagrams of the head unit. As shown in the figure, the head unit 1 includes a carriage 2, a plurality (12) of droplet discharge heads 3 mounted on the carriage 2, and individual droplet discharge heads 3 for attaching to the carriage 2. A plurality of (12) head holding members 4 are provided. The twelve droplet discharge heads 3 are divided into six left and right halves and are inclined at a predetermined angle with respect to the main scanning direction. In addition, each of the six droplet discharge heads 3 is disposed so as to be displaced from each other with respect to the sub-scanning direction, and all the discharge nozzles 57 (described later) of the twelve droplet discharge heads 3 are arranged in the sub-scanning direction. It is continuous (partially duplicated). That is, in this head arrangement, six droplet discharge heads 3 arranged in the same direction on the carriage 2 are arranged in two rows, and the droplet discharge heads 3 are 180 mutually between each head row. ° Rotated arrangement. However, this arrangement pattern is an example. For example, adjacent droplet discharge heads 3 in each head row are arranged at an angle of 90 ° (adjacent heads are in a “C” shape), or between head rows. Droplet ejection head 3
Can be arranged at an angle of 90 ° (the heads between the rows are in a “C” shape). In any case, the dots formed by all the discharge nozzles 57 of the twelve droplet discharge heads 3 need only be continuous in the sub-scanning direction. In addition, if the droplet discharge head 3 is a dedicated component for various substrates, it is not necessary to tilt the droplet discharge head 3 and set it in a staggered or stepped manner. Furthermore, as long as a nozzle row (dot row) of a predetermined length can be configured,
This may be composed of a single droplet ejection head 3 or a plurality of droplet ejection heads 3. That is, the number of droplet discharge heads 3 and the number of rows, and the arrangement pattern are arbitrary.

The carriage 2 includes a substantially rectangular main body plate 11 with a part cut away, and a main body plate 11.
A pair of left and right reference pins 12, 12 provided at an intermediate position in the long side direction, a pair of left and right support members 13, 13 attached to both long side portions of the body plate 11, and provided at the end of each support member 13. And a pair of left and right handles 14. The left and right handles 14, 14 serve as parts for holding the head unit 1 when the assembled head unit 1 is placed on the drawing apparatus B, for example. The left and right support members 13 and 13 serve as parts for fixing the carriage 2 to a set portion of the assembly apparatus A and the drawing apparatus B (both will be described later in detail).

Further, the carriage 2 is positioned above the bisected droplet discharge head group 3S, and a pair of left and right pipe connection assemblies 15 and 15 and a pair of left and right wiring connection assemblies 16 connected to the droplet discharge head 3 are provided. , 16 are provided. Each pipe connection assembly 15
Are connected by piping to the filter material supply system of the drawing apparatus B, and each wiring connection assembly 1 is similarly connected.
6 is wired to the control system of the drawing apparatus B. In FIG. 6, one (left side) pipe connection assembly 15 is omitted.

The main body plate 11 is made of a thick plate such as stainless steel, and has a pair of mounting openings 18 and 18 for mounting six droplet discharge heads 3 on the left and right sides, and reduces the weight at an appropriate position. A plurality of apertures 19 are formed. Each mounting opening 18 is formed by a continuous series of opening portions 18a to which six droplet discharge heads 3 are attached, and six droplet discharge heads (
Following the arrangement of the droplet discharge head groups 3S) 3, the axis thereof is slightly inclined with respect to the axis of the main body plate 11.

Each support member 13 is formed of a thick stainless plate or the like, and is formed with two fixing holes (fool holes) 21 and 21 and two bolt holes 22 and 22 for fixing the same, and these fixing holes 21. , 21 and the bolt hole 22, a pin hole 2 into which a positioning pin is inserted
3 is formed. Although details will be described later, when the head unit 1 is set in the assembling apparatus A, the head unit 1 is positioned using the pin holes 23 and screwed and fixed using the two fixing holes 21 and 21. When the unit 1 is set, the pin hole 23
And is fixed with screws using two bolt holes 22 and 22.

The pair of left and right reference pins 12 and 12 serve as a reference for positioning (position recognition) the carriage 2 in the X-axis, Y-axis, and θ-axis directions on the premise of image recognition. It is attached to protrude. As shown in FIG. 9, each reference pin 12 includes a cylindrical pin body 25 and a concave, specifically hole-shaped reference mark 26 formed at the center of the tip surface of the pin body 25. Yes. The pin body 25 includes a base press-fit portion 27 for press-fitting into the carriage 2, a body portion 28 connected to the base press-fit portion 27, and a mark forming portion 29 formed to protrude from the tip of the body portion 28. Reference mark 2 on the tip end surface 29a of 29
6 is formed.

The tip surface 29a of the mark forming portion 29 is mirror-finished, and a small hole that becomes the reference mark 26 is drilled at the center position of the tip surface 29a. The small hole (reference mark) 26 has a diameter of about 0.3 mm, for example, and communicates with the axial hole 30 formed in the axial center portion from the base press-fitting portion 27 to the trunk portion 28. In this case, the reference pin 12 is formed by drilling the small hole 26 and then heat-treating (ion nitriding), and mirror-finishing the tip surface 29a of the mark forming portion 29. An example of the mirror finish is a lapping finish in which fine abrasive grains are interposed between the polishing tool and the tip surface 29a, but is not limited thereto.

As described above, since the front end surface 29a is white and the small hole reference mark 26 can be imaged by the recognition camera in a simple process, the alignment accuracy of the carriage 2 can be improved. Although the reference pin 12 has been described as having a cylindrical cross section, it may be oval or polygonal. Further, the reference mark 26 of the small hole is not limited to the small hole, but may be a concave shape having a groove capable of obtaining sufficient contrast, and the planar shape of the concave is also limited to a circular shape. is not.

Although details will be described later, the recognition camera (recognizing means) 353 constituting the calibration means of the present invention mounted on the assembling apparatus A has a front end surface 29 of the reference pin 12 on which the reference mark 26 is formed.
Image recognition (pattern recognition) is performed by capturing a within the field of view. Therefore, the recognition camera 353
In the pattern recognition, the mirror-finished tip surface 29a is recognized as a light color, and the concave reference mark 26 formed substantially at the center of the tip surface 29a is recognized as a dark color, and the reference mark 26 has sufficient contrast. Image recognition. Therefore, the reference mark 26 can be recognized with high accuracy, and recognition errors can be reliably prevented.

The reference pin 12 thus formed is press-fitted so as to be driven into a mounting hole formed in the carriage (main body plate 11) 2 with its tip end surface 29a facing downward.
The reference pin 12 press-fitted into the carriage 2 is a droplet discharge head 3 protruding from the carriage 2.
It protrudes from the back surface of the main body plate 11 so that it may become substantially the same height. That is, the tip end surface 29a serving as the image recognition surface of the reference pin 12 and the nozzle formation surface (see FIG. 11) 52 serving as the image recognition surface of the droplet discharge head 3 are positioned in substantially the same plane. Yes.

As a result, the recognition camera 353 causes each droplet discharge head 3 to follow the reference pins 12 and 12.
When detecting the discharge nozzle 57, the focus position is changed (the recognition camera 353 is moved up and down).
Therefore, it is possible to effectively prevent the recognition camera 353 from interfering with other components or the like when the recognition camera 353 for image recognition is relatively moved. The pair of reference pins 12 and 12 are preferably provided at a substantially intermediate position in the long side direction of the main body plate 11,
As long as they are separated from each other, they may be provided at other positions.

As shown in FIGS. 6, 7 and 8, the left and right handles 14, 14 are heavy (7k
g)) For holding the head unit 1 by hand, each handle 14 is formed in an "L" shape by a handle body 32 serving as a grip portion and an arm portion 33 extending perpendicularly from the lower end of the handle body 32. Has been. The handle main body 32 has an upper end portion that is a non-slip large diameter portion 34.
It has become. The outer peripheral surface of the handle main body 32 is knurled for slipping. In the present embodiment, knurled knurling is employed (see FIGS. 7 and 8), but streaks may be used.

The arm portion 33 extends horizontally, and is screwed so that the tip portion thereof is seated on the support member 13 of the carriage 2. That is, each handle 14 is detachably attached to the carriage 2. As described above, the left and right handles 14, 14 are provided so as to stand up at a position protruding from the end in the long side direction of the carriage (main body plate 11) 2, that is, a position away from the droplet discharge head 3. Yes.

For this reason, when the carriage (head unit 1) 2 is lifted by holding both the handles 14, 14, the carriage 2 is lifted while maintaining a substantially horizontal posture due to the balance of force. Further, there is no problem that the hand holding the handle 14 touches the droplet discharge head 3 during transportation work. Although details will be described later, this handle 14
This is particularly useful for setting the head unit 1 to the drawing device B as well as transporting the head unit 1 (details are described later).

Each pipe connection assembly 15 is disposed on the upper side of each droplet discharge head group 3S, and includes a pair of spacers 36 and 36 erected at both ends in the long side direction of the main body plate 11, and a pair of spacers 36, The pressing plate 37 is provided between 36 and six sets of piping adapters 38 mounted on the pressing plate 37. The six sets of pipe adapters 38 are each fixed to the holding plate 37 so that the head side connection portion at the lower end slightly protrudes.

Although details will be described later, the droplet discharge heads 3 are so-called two-units, and the six sets of pipe adapters 38 are connected to the droplet discharge heads 3 via the two-line pipe connection members 17 respectively. That is, while the pipe connection member 17 is fitted and connected to each droplet discharge head 3, the holding plate 37 on which six sets of pipe adapters 38 are mounted is screwed to both spacers 36, 36.
A pair of pipe adapters 38 is connected to the droplet discharge head 3 via the pipe connection member 17. The inflow side of each pipe adapter 38 is connected to the filter material supply system with a single touch when set in the drawing apparatus B (details will be described later).

Similarly, each wiring connection assembly 16 includes three bent support members 40, 40, 40 erected on the left and right ends of the carriage 2, and a connector base 4 fixed to the upper end of the bent support member 40.
1 and four head relay boards 42 with wiring connectors 43 attached on the connector base 41. The four head relay substrates 42 are connected to two head substrates 47 of each droplet discharge head 3 to be described later via flexible flat cables (not shown). Each head relay substrate 42 is connected by wiring with a wiring plug of its control system cable when set in the drawing apparatus B (details will be described later).

As shown only in FIG. 7, the head unit 1 is further provided with a relay board cover 24 that covers both the wiring connection assemblies 16. The relay board cover 24 is composed of a pair of side covers 24a that cover the upper part from the side surface of each wiring connection assembly 16, and an upper surface cover 24b that is passed between the pair of side surface covers 24a. ,
The head unit 1 is attached after being set in the drawing apparatus B. Although details will be described later, when the head unit 1 is set in the assembling apparatus A, unlike the case where it is set in the drawing apparatus B, the relay board cover 24 does not have both assemblies 15 and 16 assembled. To do.

Next, the droplet discharge head 3 will be described with reference to FIGS. The droplet discharge head 3 is a so-called double-unit, which includes a liquid introduction unit 45 having two connection needles 46,
Two head substrates 47 connected to the side of the liquid introduction part 45, two pump parts 48 connected downward to the liquid introduction part 45, and a nozzle forming plate 49 connected to the pump part 48 are provided.
The pipe connection member 17 is connected to the liquid introduction part 45, and the flexible flat cable is connected to the head substrate 47. On the other hand, the pump portion 48 and the nozzle forming plate 49 constitute a square head body 50 that protrudes toward the back side of the carriage 2. The nozzle forming surface 52 of the nozzle forming plate 49 has two nozzle rows 53.
, 53 are formed (see FIG. 11).

As shown in FIGS. 11 and 12, the pump section 48 includes pressure chambers 55 and piezoelectric elements 56 corresponding to the number of nozzles, and each pressure chamber 55 communicates with a corresponding discharge nozzle 57. Further, the base side of the pump unit 48, that is, the base side of the head main body 50 is formed in a square flange shape to receive the liquid introduction unit 45. A pair of screw holes (female screws) 59, 59 for a small screw to be fixed are formed. The pair of screw holes 59, 59 are located at both long side portions and are disposed so as to be point symmetric with respect to the center of the nozzle forming surface 52. Although details will be described later, the droplet discharge head 3 is fixed to the head holding member 4 by two small screws 73 and 73 that pass through the head holding member 4 and are screwed into the flange portion 58 (see FIG. 14). .

The nozzle forming plate 49 is formed of a stainless steel plate or the like, and the discharge side end face (
It is adhered to the droplet discharge surface. More specifically, as schematically shown in FIG. 11 and FIG. 12A, the pump portion 48 includes a mechanism portion 48a that accommodates the piezoelectric element 56 and a resin film 48b, and a nozzle forming plate. 49 and a silicon cavity 48c joined to the mechanism 48a. That is, the nozzle forming plate 49 is bonded to the silicon cavity 48c, and in this state, is bonded to the bonding surface 48d of the mechanism portion 48a via the resin film 48b to constitute the pressure chamber 55 described above. Therefore, the head body 5
In consideration of the assembly method at 0, the above-mentioned resin film 48b, silicon cavity 48
c and the nozzle forming plate (including a plated layer 49a described later) 49 constitute a pressure chamber assembly 60 with respect to the mechanism portion 48a of the pump portion 48. The joint surface 48d of the mechanism portion 48a is formed in a rectangular shape, while the pressure chamber assembly 60 including the nozzle forming plate 49 is formed in a somewhat smaller similar shape. , And are joined so as to be substantially concentric with the joining surface 48d.

For this reason, a step portion 61 is formed as a clearance for bonding over the four circumferences between the four circumferences of the pressure chamber assembly 60 and the four peripheral portions of the joint surface 48d of the mechanism portion 48a.
A resin 62 is molded on the substrate. That is, the step portion 61 constituted by the end edge (peripheral portion) of the joint surface 48d and the end surface (side surface portion) of the pressure chamber assembly 60 is molded with the resin 62 so as to fill it. Accordingly, the lower end of the head main body 50 has a form in which the four circumferences are chamfered by the resin 62.

Although details will be described later, the molding with the resin 62 prevents the head body 50 from being held by the wiping sheet 131 during wiping. In this case, although the droplet discharge head 3 is held by the carriage 2 with a slight inclination in the horizontal plane, the head main body 50
On the other hand, the wiping sheet 131 performs a wiping operation from the X-axis direction (see FIG. 22). Therefore, the resin 62 of the mold over the above four circumferences may be provided only on the long side portion on the side where wiping is started at the minimum or only on both long side portions. The same applies to the chamfering process described later. As shown in FIG. 12B, the protector function protects the discharge nozzle 57 on the resin 62 by molding the resin 62 so as to protrude somewhat forward from the nozzle forming plate 49 (t dimension shown). It is also possible to have Further, as shown in FIG. 12C, the joint surface 48d of the mechanism portion 48a and the pressure chamber assembly 60 have the same shape, and the edge of the pressure chamber assembly 60 is chamfered in place of the resin 62 mold. You may make it do.

On the other hand, the nozzle forming plate 49 is provided with two nozzle rows 53 and 53 arranged in parallel to each other, and each nozzle row 53 is arranged in a regular pitch with 180 pieces (shown schematically in the drawing). ) Discharge nozzle 57. That is, on the nozzle forming surface 52 of the head main body 50, two nozzle rows 53 and 53 are arranged symmetrically with respect to the center line. The nozzle ports 63 of the respective discharge nozzles 57 are opened at the back of the circular recess portion 64 in which the water-repellent (liquid-repellent) plating layer 49a is formed.

Note that reference numerals 65 and 65 in FIG. 11 are two nozzle reference marks for recognizing the position of the droplet discharge head 3. As will be described later, in this embodiment, the position of the droplet discharge head 3 is recognized by image recognition (pattern recognition) of the two outermost discharge nozzles 57a and 57a in one of the nozzle rows 53. . However, the form of the meniscus formed in the discharge nozzle (nozzle port 63) 57 may not be constant depending on the discharge target liquid (FIG. 11).
(Refer to the virtual line in (b)), there is a risk of being unrecognizable (NG) in pattern recognition.

Accordingly, in this example, two nozzle reference marks 65, 65 are formed in the vicinity of the two outermost discharge nozzles 57a, 57a. That is, on the nozzle forming surface 52, the position where the two discharge nozzles 57a, 57a are moved in parallel, more precisely, the nozzle row 5
Two nozzle reference marks 65, 65 are formed by laser etching or the like at positions corresponding to both discharge nozzles 57a, 57a when 3 is moved in parallel (not necessarily in a direction orthogonal to the nozzle row 53). Yes. The positions of the two nozzle reference marks 65, 65 are guaranteed with respect to the two discharge nozzles 57a, 57a. When the image recognition in the two discharge nozzles 57a, 57a is unstable, the two nozzle reference marks 65, 65 is used for image recognition. The two nozzle reference marks 65, 65 are two discharge nozzles.
(Strictly speaking, any two discharge nozzles 57, 57 that are separated from each other can be used) Also good.

The droplet discharge head 3 configured as described above has the head main body 50 projecting from the mounting opening 18 formed in the carriage 2 to the back side of the carriage 2 and being applied to the edge of the mounting opening 18. Are fixed with screws at the flange portion 58 described above. Further, the head holding member 4 is temporarily fixed to the carriage 2 by adhesion, and is then permanently fixed using a mechanical fixing means.

Next, the head holding member 4 will be described with reference to FIGS. 13 and 14. The head holding member 4 is a metal fitting for stably attaching the droplet discharge head 3 to the carriage 2 and is formed in a substantially rectangular flat plate shape made of stainless steel or the like. The head holding member 4 is formed with a square insertion opening 71 through which the head main body 50 of the droplet discharge head 3 is inserted. In this case, the head holding member 4 is set on the rear surface side of the carriage 2 so as to straddle the mounting opening (opening portion 18a) 18 at both ends in the long side direction. The head body 50 is set on the front side of the carriage 2 so as to pass through the insertion opening 71 (see FIG. 10).

Around the insertion opening 71 of the head holding member 4, two screw holes 59 of the flange portion 58 are provided.
, 59, two through holes 72, 72 and two machine screws 73, 73, and two protruding position restricting pins 74, 74 are disposed. The two through holes 72 and 72 are formed in two boss portions 75 and 75 that protrude to the mounting opening 18 side, respectively. In this case, each boss 75
Is constituted by a cylindrical collar press-fitted into the head holding member 4. These two bosses 75
, 75 and the two protruding position restricting pins 74, 74 are arranged at point-symmetrical positions with respect to the center of the insertion opening 71, and the boss portions 75, 75 and the protruding position restricting pins 74, 74 are the head. The carriage 2 of the droplet discharge head 3 is brought into contact with the flange portion 58 of the main body 50.
The discharge dimension from is controlled.

In addition, on the center line of the insertion opening 71, two engagement holes 76,
76 is formed. The two engagement holes 76 and 76 are portions where an assembly jig C of the droplet discharge head 3 described later is mounted, and at the same time, the engagement pins 3 for position correction in the assembly apparatus A.
43 and 343 are also engaged portions. In this case, the mounting jig C and the engaging pin 343 are mounted.
The two engagement holes 76 are formed in a circular shape and the other is formed in an oval shape that is long in the center line direction.

Further, on the center line of the insertion opening 71, two adhesive injection holes 77 and 77 are formed at both ends of the head holding member 4 at symmetrical positions with the insertion opening 71 interposed therebetween. Each adhesive injection hole 77 is a long hole extending in the transverse direction of the head holding member 4, and the end of the long hole on the carriage 2 side is chamfered (see FIG. 13). Two adhesive injection holes 77 each
, 77 are formed at both end portions of the head holding member 4 for bonding the head holding member 4 to the carriage 2, and the adhesive injected from the adhesive injection holes 77 is By the capillary phenomenon, it spreads and is applied to the interface portion between the carriage 2 and the adhesion portions 78 and 78.

In this case, the adhesive injection hole 77a (77b) formed on the outside (inside) of one end and the adhesive injection hole 77a (77b) formed on the inside (outside) of the other end are respectively paired. It has become. Although the details will be described later, the assembling apparatus A has two adhesive injection nozzles 387 and 387, and the two adhesive injection nozzles 387 and 387 form one pair of two adhesive injection holes 77a. , 77a are simultaneously inserted to inject an adhesive, and after moving in the direction of the center line, the adhesive is injected by being simultaneously inserted into the other two non-adhesive injection holes 77b, 77b.

Reference numerals 79 and 79 in the drawing are a pair of fastening holes used when the head holding member 4 is temporarily mounted on the carriage 2 (details will be described later). The pair of fastening holes 79 and 79 are respectively It is formed in the vicinity of the adhesive injection holes 77 and 77 at a point-symmetrical position with respect to the center of the insertion opening 71. The pair of fastening holes 79, 79 are formed in the opening portion 18a of the carriage 2.
A pair of temporary fastening screw holes 20, 20 corresponding to the above are formed (see FIG. 16).

By the way, with respect to the carriage 2 that is positioned via the pair of reference pins 12, 12, each droplet discharge head 3 is based on the nozzle row (discharge nozzle 57) 53, which is the output end, of the X axis and Y axis. And positioning (position recognition) in the θ-axis direction. More specifically, since the positional accuracy of the two nozzle rows 53 and 53 is guaranteed at the manufacturing stage, the two discharge nozzles 57a and 57a located at the outermost end of any one of the nozzle rows 53 are used. This is recognized as a positioning reference. Also, the positional accuracy of the four sides of the tip of the droplet discharge head 3 in the head main body 50 (strictly speaking, the four sides of the tip over the several millimeter width of the pump unit 48) is guaranteed at the manufacturing stage.

On the other hand, the droplet discharge head 3 is fixed to the carriage 2 via the head holding member 4. Therefore, in the present embodiment, the assembly jig C is used to position the droplet discharge head 3 on the head holding member 4 with reference to the four sides of the tip of the head body 50, and after fixing with screws, the above 2 The droplet discharge head 3 with the head holding member 4 is positioned and temporarily fixed with reference to the two discharge nozzles 57a and 57a. That is, the droplet discharge head 3 is temporarily temporarily positioned on the head holding member 4 by manual operation using the assembling jig C, and the subsequent assembly apparatus A
After the image recognition (recognizing the discharge nozzles 57a and 57a), the main positioning is performed.

In the assembling apparatus A, the two discharge nozzles 5 are used in order to speed up the position recognition.
7a and 57a are simultaneously recognized by two fixedly provided recognition cameras 353 and 353, that is, the two recognition cameras 353 and 353 are simultaneously captured in the field of view. For this reason, the temporary positioning of the droplet discharge head 3 using the assembling jig C is performed at the stage of the main positioning based on the set position data by using the two recognition cameras 353 and 353 with the two discharge nozzles 57a. , 57a so as not to deviate from the field of view. The field of view (recognition area / camera area) of the recognition camera 353 is, for example, 0.8 m.
m × 0.6 mm.

Here, the assembly jig C of the droplet discharge head 3 will be described with reference to FIGS. 14 and 15, and the droplet discharge head 3 is assembled to the head holding member 4 using the assembly jig C. The assembly method will be described. As shown in FIG. 15, the assembling jig C includes a jig main body 81 for positioning the head main body 50 of the droplet discharge head 3 and a pair of mountings for mounting the jig main body 81 on the head holding member 4 in a positioned state. It consists of pins 82 and 82.

The jig main body 81 has a vertical side portion 84 and a pair of horizontal side portions 85 extending at right angles from both ends of the vertical side portion 84.
, 85 and are integrally formed in a substantially “C” shape. On the other hand, the pair of mounting pins 82 and 82 protrude from the back side of the lateral sides 85 and 85, respectively.
Is fitted into the engagement holes 76, 76 of the head holding member 4, so that the jig main body 81 is attached to the head holding member 4.

A substantially “L” -shaped positioning portion 86 is formed in a portion extending from the inside of the vertical side portion 84 to the inside of one horizontal side portion 85, and one long side and a short side of the head main body 50 are formed in the positioning portion 86. The droplet discharge head 3 is positioned on the head holding member 4 by contacting the sides. The positioning portion 86 is formed thin with the front side being flush with the other portions, and the corner portion 86a is formed in a semicircular recess. Further, the jig body 81 is attached to the head holding member 4.
The thickness is designed so that the surface thereof and the nozzle forming surface 52 of the droplet discharge head 3 are substantially flush with each other (same level).

As a result, the head body 50 has a leading end in the protruding direction at the positioning portion 86 of the assembling jig C.
Is positioned so as to abut against the surface. That is, at the manufacturing stage, two adjacent sides among the four sides of the front end portion of the head main body 50 whose positional accuracy is guaranteed with respect to the nozzle row 53 are abutted against the positioning portion 86 of the assembly jig C, so that the liquid The droplet discharge head 3 is positioned on the head holding member 4.

On the other hand, the pair of mounting pins 82 and 82 are disposed so as to match the center line of the head main body 50 that abuts against the positioning portion 86. More specifically, the long side portion 86 of the positioning portion 86.
b is formed in parallel with a straight line connecting the pair of mounting pins 82 and 82, and the separation dimension thereof is managed according to the position of the long side of the head main body 50, and 1/2 of the short side of the head main body 50. It is formed to the dimension. Further, the short side portion 86c of the positioning portion 86 is formed at right angles to the long side portion 86b, and the distance from the mounting pin 82 located on the short side portion 86c side matches the short side position of the head body 50. It is managed.

As a result, the assembly jig C can position the droplet discharge head 3 without causing any particular trouble even if it is mounted on the head holding member 4 in a state rotated 180 ° from the state of FIG. it can. That is, the assembling jig C has a so-called right-handed / left-handed structure, although its planar shape is not symmetrical.

Next, a method for assembling the droplet discharge head 3 to the head holding member 4 using the above assembly jig C will be described with reference to FIGS. This assembling work is performed manually as an outer process of the assembling apparatus A. First, the carriage (strictly speaking, the main body plate 11) 2
The four support legs 88, 88, 88, 88 are screwed to the peripheral edge of the front side. Next, the carriage 2 is turned upside down, and the carriage 2 is set in a floating state by the support legs 88. Although not shown in the figure, it is preferable to attach the pair of support members 13 and 13 and the pair of reference pins 12 and 12 to the carriage 2 in this state.

Next, the droplet discharge head 3 with the head body 50 facing upward is inserted into the mounting opening 18 from the lower side of the carriage 2. Here, the insertion opening 7 of the head holding member 4 from above the carriage 2.
The head holding member 4 is set on the carriage 2 so that 1 is aligned with and fitted into the head main body 50. When the head holding member 4 is set, the assembly jig C is mounted on the head holding member 4 from above, and the two sides of the head main body 50 facing each other are pressed against the positioning portion 86 of the head holding member 4. Note that a plurality of assembling jigs C may be prepared, and the work may be started after these are mounted on the head holding member 4 in advance.

Subsequently, while maintaining the above-described pressing state, the two small screws 73 and 73 from above are screwed into the flange portion 58 of the droplet discharge head 3 through the head holding member 4 to discharge the droplet. The head 3 is fixed to the head holding member 4. Next, as means for preventing the fields of view of the two recognition cameras 353 and 353 from being removed from the two discharge nozzles 75a and 75a, the screw holes 20 and 20 for temporary fastening of the carriage 2 from the pair of fastening holes 79 and 79 are provided. And fixing screws 89,
89 is screwed in a temporarily tightened state (see FIG. 14).

As a result, the position of the droplet discharge head 3 with respect to the carriage 2 can be aligned within the range of the dimension of the fixing screw 89 and the fastening hole 79, and the two recognition cameras 353 and 35 can be aligned.
The field of view 3 does not deviate from the two discharge nozzles 75a and 75a. In this way, by repeating the positioning and fixing of the droplet discharge head 3 to the head holding member 4 in order, the 12 droplet discharge heads 3 are individually assembled to the head holding unit 4. Finally, the assembly jig C is pulled out from the head holding member 4 and the four support legs 88 are removed to complete the operation.

As described above, the 12 droplet discharge heads 3 are assembled to the 12 head holding units 4 with the carriage 2 interposed therebetween. In this state, the 12 droplet discharge heads 3 are fixed to the carriage 2. It is not suspended and is in a suspended state. That is, the twelve droplet discharge heads 3 with the head holding unit 4 are temporarily attached to the carriage 2 so as to be minutely movable within the dimension crossing range of the fixing screw 89 and the fastening hole 79. The fixing screw 89 is a waste screw and is removed after the head holding portion 4 is bonded (temporarily fixed) to the carriage 2 in the assembling apparatus A. In other words, in the embodiment, the main fixing directly by screws to the carriage 2 of the head holding unit 4 is not performed (the pressing fixing is performed by another member).

Then, the head unit 1 in which the 12 droplet discharge heads 3 with the head holding member 4 are temporarily mounted on the carriage 2 is introduced into the assembling apparatus A and set in the upside down posture. The head unit 1 introduced into the assembling apparatus A is obtained by incorporating the pair of support members 13 and 13 and the reference pins 12 and 12 into the main component, and the head unit 1 introduced into the drawing apparatus B is In addition to this, the handle 14 and both assemblies 15, 16
Etc. are incorporated.

Here, the drawing apparatus B will be briefly described, and a method of setting the head unit 1 for mounting the head unit 1 on the drawing apparatus B using a pair of handles 14 and 14 will be described. Further, the wiping device of the drawing device B will be briefly described in relation to the structure of the head main body 50 of the droplet discharge head 3.

FIG. 18 is a conceptual diagram schematically showing the drawing apparatus B. As shown in the drawing, the drawing apparatus B is mounted with a head unit 1 and moves the head unit 1 in the Y-axis direction and the θ-axis direction. 1
01, a substrate moving unit 103 that moves the substrate 102 such as a color filter in the X-axis direction, facing the head moving unit 101, and a maintenance unit 104 that maintains the droplet discharge head 3 of the head unit 1. The head moving unit 101 moves the head unit 1 mounted thereon to
The substrate moving unit 103 is moved between the unit introducing unit 105 and the maintenance unit 104.

When the head unit 1 is introduced and set, the head moving unit 101 is replaced by the unit introducing unit 1.
The temporary placement table 106 faces the unit introduction part 105. The head unit 1 is set so as to be sent to the head moving unit 101 after being temporarily placed on the temporary placement table 106 and connected with piping and wiring. In the preparatory process for initial positioning of the head unit 1, the head unit 1 is finely moved (angle correction) in the θ-axis direction. In the manufacturing process for discharging the filter material, the substrate 102 is moved in the X-axis direction. Further, the head unit 1 moves in the Y-axis direction, and main scanning and sub-scanning of the droplet discharge head 3 are performed.

The head moving unit 101 includes a main carriage 111 that supports the head unit 1 so as to be suspended, a θ table 112 that moves the main carriage 111 in the θ-axis direction, and θ
And a Y table 113 that moves the head unit 1 in the Y-axis direction via the table 112. In addition, the substrate moving unit 103 includes a substrate set table 115 that sets the substrate 102 so as to suck it, and an X table 116 that moves the substrate in the X-axis direction via the substrate set table 115.

In this case, the X table 116 is driven by a combination of an air slider and a linear motor, and the Y table 113 is driven by a combination of a ball screw and a servo motor (both not shown). The board recognition camera 117 is attached to the main carriage 111 (see FIG. 20),
The head recognition cameras 118 are mounted on the substrate set table 115, respectively. Therefore, the pair of reference pins 12 and 12 provided on the carriage 2 of the head unit 1 are recognized by the cooperation of the head recognition camera 118 and the X table 116 that moves the head recognition camera 118 in the X-axis direction.

Here, with reference to FIG. 56, the pair of reference pins 12 and 12 by the head recognition camera 118.
The recognition operation will be described. First, the X table 116 and the Y table 113 are appropriately driven based on the design data to move the head recognition camera 118 and the carriage (head unit 1), and one reference pin 12 is within the field of view of the head recognition camera 118. Into. If one of the reference pins 12 is recognized by the head recognition camera 118, then the X table 11
6 is driven, the head recognition camera 118 is moved in the X-axis direction (main scanning direction), and the other reference pin 12 is taken into the field of view of the head recognition camera 118 and recognized.

Then, based on the recognition result of the pair of reference pins 12 and 12 by the head recognition camera 118, the X table 116, the Y table 113, and the θ table 112 are appropriately driven to correct the position of the carriage (head unit 1). . Note that after the position correction, the above recognition operation is performed again for confirmation, and a series of recognition operations is completed.

Thereafter, in the actual droplet discharge operation, first, the X table 116 is driven to reciprocate the substrate 102 in the main scanning direction, and the plurality of droplet discharge heads 3 are driven. Droplet discharge is performed. Next, the Y table 113 is driven, the carriage (head unit 1) 2 is moved by one pitch in the sub-scanning direction, the substrate 102 is reciprocated in the main scanning direction, and the droplet discharge head 3 is driven again. Is called. By repeating this several times, droplet discharge is performed from end to end (entire area) of the substrate 102.

As described above, since the movement of the head recognition camera 118 in the image recognition of the pair of reference pins 12 and 12 is performed by the X table 116, the Y table 1 using a ball screw is used.
Unlike 13 or the like, it is possible to prevent the movement accuracy from affecting the recognition accuracy. In addition, the X-axis direction, which is the moving direction of the X table 116, matches the main scanning direction, and the accuracy of droplet discharge (the accuracy of the landing point) can be increased due to the structure.

In this example, the substrate 102 which is the discharge target is moved in the main scanning direction with respect to the head unit (carriage 2) 1, but the carriage (head unit 1)
) 2 may be moved in the main scanning direction. In addition, a case where the pair of reference pins 12 and 12 are provided at both ends in the long side direction of the carriage 2 is also conceivable. 12 and 12 are recognized.

19 and 20 are external views of the main carriage 111. FIG. Main carriage 1
11 is a pair of left and right base plates 121 on which the head unit 1 is seated; an arch member 122 that supports the base plate 121 so as to be suspended; Temporary placement angles 106a and 106a, and a stopper plate 123 provided at the other end of the pace plate 121.
A pair of the substrate recognition cameras 117 is provided outside the stopper plate 121.

The base plate 121 is formed with a square opening 124 into which the main body plate 11 of the head unit 1 is loosely fitted, and left and right opening edges 125 of the base plate 121 constituting the square opening 124 are supported by the head unit 1. Two bolt holes 22 formed in the member 13
, 22 and the pin hole 23, two through holes 126, 126 and a positioning pin 127 are provided. In this case, the width of the rectangular opening 124 and the width of the main body plate 11 are substantially matched, and the head unit 1 set from the side is guided so that the left and right of the main body plate 11 are guided to the left and right of the rectangular opening 124. Inserted.

Each temporary placement angle 106 a has a sufficient thickness (height) and is fixed so as to be placed on the end of the base plate 121 with a base portion bent in an “L” shape on the outside. In addition, the distance between the temporary placement angles 106a and 106a is such that both support members 13 of the head unit 1
It corresponds to 13 separation dimensions. Therefore, the head unit 1 has both support members 13.
13 are seated on the temporary placement angles 106a and 106a, and the temporary placement angles 106a and 106a guide the feeding to the base plate 121.
In this state, the head main body 50 of each droplet discharge head 3 is sufficiently lifted from the base plate 121, and contact (interference) with the base plate 121 is prevented.

As shown in the image diagram of FIG. 21, when the head unit 1 is set on the base plate 121 of the main carriage 111, the head unit 1 that is first carried by both the handles 14 and 14 is moved to the temporary placement angle 106a, It is placed on 106a (temporary placement). Here, although not particularly illustrated, the tube of the filter material supply system of the drawing apparatus B disposed on the arch member 122 is connected to the piping connection assembly 15 of the head unit 1 and the control system cable is connected to the wiring connection assembly 16. Are connected by wiring ((a) in the figure).

When the connection work is completed, the handles 14 and 14 are gripped again, and both temporary placing angles 106a
, 106a as a guide, the head unit 1 is pushed forward, and further tilted so as to lower its tip (FIG. 5B). When the head unit 1 is tilted, the front end portion of the main body plate 11 is inserted into the square opening 124, and the front ends of both support members 13, 13 land on both opening edge portions 125, 125 of the square opening 124. Both supporting members 13 and 13 are open edge portions 125 and 125.
2, the support members 13, 13 are lifted from the temporary placement angles 106 a, 106 a, and this time, the head unit 1 is slid on the opening edge 125 around the ends of the support members 13, 13. While pushing further towards the back.

When the front end of the head unit 1 abuts against the stopper plate 123, the rear part of the head unit 1 is slowly lowered, and both opening edge portions 1 are inserted into the pin holes 23 of both support members 13 and 13.
The head unit 1 is seated on the base plate 121 so that the positioning pins 127 of 25 and 125 are fitted. Here, the base plate 121 is penetrated from the lower side of the base plate 121, and the four fixing screws 128 are screwed to the support members 13 and 13, thereby completing the operation (FIG. 3C).

As described above, in the unit introduction unit 105, the head unit 1 is temporarily placed and necessary piping and wiring connections are made in this state. Can be set appropriately in a narrow space. In addition, since the head unit 1 is set while being slid on the base plate 121 that is one step lower than the temporary placement angle 106a, the head unit 1 is attached to the main carriage 1.
11 can be set so as to be soft-landed, and the heavy head unit 1 can be set smoothly without impact.

On the other hand, the maintenance unit 104 of the drawing apparatus B is provided with a wiping device so as to be attached to the capping device and the cleaning device. As shown in FIG. 22, the wiping device 108 includes a wiping unit 132 including a wiping sheet 131 and a moving mechanism 133 that moves the wiping unit 132 forward and backward toward the head unit 1. For the head unit 1 introduced into the maintenance unit 104 by the Y table 113,
The moving mechanism 133 causes the wiping unit 132 to move forward and backward in the X-axis direction (main scanning direction).

The wiping unit 133 includes a feeding reel 135 in which the wiping sheet 131 is wound in a roll shape, a winding reel 136 that winds up the wiping sheet 131 that is fed out from the feeding reel 135, and a wiping sheet between the feeding reel 135 and the winding reel 136. And a wiping roller 137 over which 131 is wound. A guide roller 1 also serving as a rotational speed detection shaft is provided between the feeding reel 135 and the wiping roller 137.
In the vicinity of the wiping roller 137, a cleaning liquid supply head 139 is provided.

The supply reel 135 is braked and rotated by a torque limiter provided thereon, and the take-up reel 136 is driven and rotated by a motor provided thereon. The wiping sheet 131 fed out from the feeding reel 135 is routed through the guide roller 138 and supplied with the cleaning liquid from the cleaning liquid supply head 139, and then circulates around the wiping roller 137 and is wound around the take-up reel 136. .

The wiping roller 137 is a free rotating roller, and is composed of a rubber roller having elasticity or flexibility. The wiping roller 137 during wiping acts to press the wiping sheet 131 against the head body 50 of each droplet discharge head 3 from below. At the time of wiping, the wiping roller 137 is rotated by the wiping sheet 131 that travels by receiving the rotation of the take-up reel 136, and is moved in the X-axis direction as a whole by the moving mechanism 133. Thereby, the wiping sheet 1
31 sequentially contacts the lower surface of the head knit, that is, the head main body 50 of the twelve droplet discharge heads 3. In other words, the wiping sheet 131 travels in the opposite direction with respect to the relative movement direction of the head main body 50, and the nozzle forming surface 52 of each head main body 50 is wiped off.

A wiping roller 137 is provided on the wiping sheet 131 that is in sliding contact with the head body 50.
The cleaning liquid, that is, the solvent of the filter material or the like is supplied from the cleaning liquid supply head 139 immediately before reaching the position. As a result, the filter material adhering to the nozzle forming surface 52 of each head body 50 is wiped by the wiping sheet 131 impregnated with the cleaning liquid via the wiping roller 137.
It is wiped clean. Further, as described above, since the lower end portion of the head main body 50 is chamfered by the resin 62 molded thereon, the head main body 50 is not held by the wiping sheet 131 during the wiping.

Next, the alignment mask D will be described with reference to FIGS. In this assembling apparatus A, it is necessary to always supply a head unit 1 having a certain level of assembling accuracy regardless of the number of assembled head units 1. Therefore, an alignment mask D is provided in which the reference positions of the carriage 2 and the twelve droplet discharge heads 3 are marked. That is, the alignment mask D is used as a prototype (original) of the component position, and the head unit 1 as a duplicate is used.
Are assembled by the assembling apparatus A. As a result, precision effects such as wrinkles and changes with time of each assembling apparatus A with respect to the head unit 1 are eliminated.

The alignment mask D includes a master plate 161 in which a mask pattern is formed on the reference position of the carriage 2 and the reference position of each droplet discharge head 3, and a plate holder 162 that holds the master plate 161 from below. As described above, each droplet discharge head 3 is disposed at a predetermined angle (an angle of 40 ° to 60 °) with respect to the main scanning direction. Therefore, the master plate 161 and the plate holder 162 are formed according to this inclination angle.

More specifically, the master plate 161 corresponds to the head body 50 of the droplet discharge head 3 mounted at an inclination, and is formed in a square shape with two sides parallel to the long side and two sides parallel to the short side. This prevents unnecessary parts from being generated. Further, the master plate 161 is made of thick transparent quartz glass so as not to be distorted as a prototype.

On the surface of the master plate 161, five sets of five head reference marks 164, 164, 164, 164, 164 representing the reference position of each droplet discharge head 3 are formed as one set, and a total of 12 sets of 6 sets are formed on both sides. ing. Further, outside of the 12 sets of head reference marks 164,
A pair of carriage reference marks 165 and 165 representing the reference position of the carriage 2 are formed. Further, a subject image 166 for adjusting the pixel resolution of the recognition camera 353 is formed in the vicinity of the head reference mark 164 located at the end.

Each of the five head reference marks 164 includes a total of four discharge nozzles 57, 57, 57 located at the center position of the nozzle forming surface 52 in the droplet discharge head 3 and the outermost ends of the two nozzle rows 53, 53. The positions 57 and 57 are displayed. As shown in FIG. 23A, each head reference mark 164 is formed by drawing a hollow cross inside a circular line and drawing a diagonal line inside the circle excluding the cross. Therefore, this is recognized by the recognition camera 353 (image capture).
Then, a bright cross is recognized inside the dark circular portion.

Similarly to the above, each carriage reference mark 165 is also formed by drawing a hollow cross inside the circular line and by drawing a diagonal line inside the circle excluding the cross. In addition, the subject image 166
Is formed by a large number of vertical and horizontal lines drawn accurately in a grid pattern. A head reference mark 164 representing the center position of the nozzle forming surface 52 is 4 representing the positions of the four discharge nozzles 57.
Since it can be calculated from one head reference mark 164, it may be omitted. The pattern formed on the alignment mask D is formed by forming one surface of an opaque film typified by a metal such as Cr and patterning the film using semiconductor technology.

As shown in FIGS. 24 and 25, the plate holder 162 includes a substantially square master support plate 168 formed slightly larger than the master plate 161, and the master support plate 16.
Resin four leg blocks 169, 169, 169, 169 attached to the four corners of the back surface, a plurality of urethane stoppers 170 for positioning the master plate 161 provided on the surface of the master support plate 168 vertically and horizontally, a master A plurality of support pins 171 that support the plate 161 in a floating state on the master support plate 168, and a plurality of pressing blocks 172 that are provided corresponding to the support pins 171 and press the master plate 168 from above.

Each of the plurality of urethane stoppers 170 is abutted against the four sides of the master plate 161. In addition, a plurality of support pins 171 are disposed at each corner of the master plate 161 and are attached to the master support plate 168 so that the height can be adjusted. That is, each support pin 171 has the structure of an adjustment bolt, and the master plate 1
The surface of 61, that is, the level of the mark forming surface 161a can be adjusted. The plurality of holding blocks 172 correspond to the support pins 171, respectively.
The master plate 161 is sandwiched between the two so as to hold it.

The alignment mask D configured in this way is fixed to a set table 231 of the assembly apparatus A described later. For this reason, two fixing holes 173 and 173 and pin holes 174 disposed between the two fixing holes 173 and 173 are formed on the left and right edges of the master support plate 168. The alignment mask D and the head unit 1 are exchanged and set on the set table 231 of the assembly apparatus A.

Next, the assembling apparatus A and assembling method of the droplet discharge head 3 will be described. The assembling apparatus A uses the above-described head unit 1 temporarily mounted with 12 droplet ejection heads 3 on the carriage 2 as an assembly target, and positions each droplet ejection head 3 on the carriage 2 of the head unit 1 with high accuracy. Bonding (temporary fixing). In this assembling apparatus A, the head unit 1 on which the droplet discharge head 3 is temporarily fixed is set in the drawing apparatus B through a cleaning process and a part incorporation process such as the handle 14 described above.

As shown in the external views of FIGS. 26 to 30, the assembling apparatus A has a transparent safety cover 202 on the gantry 201, an air supply device 203 and the like are incorporated in the gantry 201, and The main component device 205 is accommodated and configured so as to be placed on 204. The frame 201 includes four casters 206 and six support legs 20 with adjusting bolts.
7 is provided. An opening / closing door 208 for introducing the head unit 1 is provided on the front surface of the safety cover 202, and a warning lamp 209 is erected on the upper surface thereof.

The main component device 205 mounts the head unit 1 and corrects the position of the unit moving device 211 that moves the head unit 1 in the X, Y, and θ directions in the horizontal plane, and each droplet discharge head 3 temporarily mounted on the carriage 2. A head correction device 212 to be performed, and each droplet discharge head 3 on the carriage 2
A temporary fixing device 213 for adhering to each other, a recognition device (recognizing means) 214 for recognizing the position of the carriage 2 and each droplet discharge head 3 prior to the position correction of the droplet discharge head 3, the unit moving device 211, and head correction And a control device (see FIG. 55) 215 that performs overall control of the device 212, the temporary fixing device 213, and the recognition device 214.

In the assembling apparatus A, the alignment mask D is introduced into the unit moving device 211 in advance, and the reference marks 164 and 165 of the alignment mask D are image-recognized by the recognition device 214, and the carriage 2 and the droplet discharge heads 3 are recognized. The reference position data is stored, and the position correction (alignment) of the carriage 2 and each droplet discharge head 3 is performed based on the reference position data (master data). Note that the alignment mask D is periodically introduced based on the number of assembly and the operating time of the same head unit 1 from the beginning when the new head unit 1 is introduced and assembled. Of course, at this time, the reference position data is reset as described below.

On the other hand, the head unit 1 is set on the upper surface of the unit moving device 211 with the head body 50 of each droplet discharge head 3 facing upward.
14 starts from the position recognition of the carriage 2 by 14. When the position of the carriage 2 is recognized, the recognition data and the reference position data are compared, and the position of the carriage 2 is corrected by the unit moving device 211 based on the comparison result. Next, the position of the droplet discharge head 3 is recognized by the recognition device 214, and the head correction device 2 is based on the recognition result (comparison result).
12, the position of the droplet discharge head 3 is corrected.

Subsequently, the head holding member 4 is maintained by the temporary fixing device 213 while maintaining this position correction state.
The droplet discharge head 3 is bonded to the carriage 2 via the. At that time, the head correction device 212 holds the droplet discharge head (head holding member 4) 3 so as not to move until the adhesive is cured. Then, the process from the position recognition of the droplet discharge heads 3 to the bonding is repeated for the number of droplet discharge heads 3, and the temporary fixing of all the droplet discharge heads 3 is completed.

As shown in FIGS. 26 and 31, the unit moving device 211 is placed on a plate-like machine base 204 supported horizontally by three adjustment bolts 217 with a large occupied area. The unit moving device 211 includes a set table 231 for setting the head unit 1 in an inverted state, a θ table 232 for supporting the set table 231 from the lower side, and an XY table 233 for supporting the θ table 232 from the lower side. Have. Head unit 1
Is set to be inclined in accordance with the inclination of the droplet discharge head 3 mounted together with the set table 231. For this reason, the direction corresponding to the main scanning direction of the droplet discharge head 3 is the X-axis direction, and the sub-scanning direction is the Y-axis direction.

As shown in FIG. 32, the set table 231 includes a rectangular base plate 235 in which a plurality of circular holes 236 are formed, and a pair of belt-like blocks 237 and 237 fixed on both sides of the base plate 235. On the upper surface of each strip block 237, positioning pins 23 are provided.
8 is erected and two screw holes 239 and 239 are formed. That is, the head unit 1 is positioned at two positions on the left and right with respect to the set table 231 and fixed with screws at a total of four positions. Further, four through holes 240 and the like for fixing the set table 231 to the θ table 232 are formed in the central portion of the base plate 235.

In this way, the head unit 1 is fixed to the θ table 232 via the set table 231, and the alignment mask D is similarly connected to the θ table 2 via the set table 231.
32 is fixed. In this case, the head unit 1 and the alignment mask D include the nozzle formation surface 52 of each droplet discharge head 3 of the head unit 1 fixed to the θ table 232 and the mark formation surface (of the alignment mask D fixed to the θ table 232 ( The master plate surface 161a is designed to be located in the same horizontal plane.

Similarly, the weight of the head unit 1 and the weight of the alignment mask D including the plate holder 162 are designed to be substantially the same weight. Thereby, the position recognition operation of the alignment mask D and the position recognition operation of the head unit 1 can be performed under exactly the same conditions. The set table 231 is a dedicated component for the head unit 1, and when the head unit 1 is changed, the set table 231 is changed accordingly.

Next, the θ table 232 will be described with reference to FIGS. 33, 34, and 35.
The θ table 232 includes a rotation operation unit 242 that slightly rotates (micro rotation) the head unit 1 via the set table 231 and an advance / retreat drive unit 243 that drives the rotation operation unit 242. The rotation operation part 242 is a table body 2 to which the set table 231 is fixed.
45, a connecting arm 246 extending from the table main body 245 toward the advance / retreat driving unit 243, a roller ring 247 that rotatably supports the table main body 245, and a support base 248 that supports the roller ring 247. In this case, the set table 231 is the table body 2
45 through two positioning pins 250 and 250 and four screw holes 251,
Screwed to the upper surface of the table body 245 in a positioned state.

The advance / retreat drive unit 243 includes a θ table motor (servo motor) 253 constituting a power source,
A ball screw 256 coupled to the main shaft 254 of the θ table motor 253 via a coupling 255, a female screw block 257 into which the ball screw 256 is screwed, and a female screw block 257
Is slidably supported in the axial direction (in the X-axis direction) of the ball screw 256.
And the front end of the connecting arm 246 is connected to the arm receiver 260.
A vertical shaft member 262 that pivotally supports the arm receiver 260 via a bearing 261;
A sub-slider 263 for supporting the vertical shaft member 262 slidably in the Y-axis direction with respect to the female screw block 257 is provided.

The θ table motor 253 is configured to be capable of rotating in the forward and reverse directions. When the θ table motor 253 rotates in the forward and reverse directions, the female screw block 257 is guided by the main slider 258 by the ball screw 256 and moves forward and backward in the X-axis direction. When the female screw block 257 advances and retracts, the auxiliary slider 263 and the vertical shaft member 262 supported by the female screw block 257 also advance and retract in the X-axis direction. Further, the vertical shaft member 262
When the head moves forward and backward, the connecting arm 246 and the table main body 245 rotate about the axis of the table main body 245 through the arm receiver 260 pivotally attached thereto. That is, the table main body 245 rotates slightly forward and backward in the horizontal plane (moves forward and backward in the θ direction).

In addition, the distance between the centers of the table main body 245 and the vertical shaft member 262 changes with this rotation. This change in the distance is caused by the vertical shaft member 262 being appropriately moved in the Y-axis direction via the sub slider 263. It is absorbed by a minute movement. The moving end position of the female screw block 257, that is, the table main body 2 is defined by the light shielding plate 265 protruding from the female screw block 257 and the three photo interrupters 266 that the light shielding plate 265 faces as the female screw block 257 advances and retreats.
The rotation range (angle) of 45 is regulated (prevention of overrun).

The advancing / retreating drive unit 243 is supported by a support plate 267 provided below the main slider 258, and this support plate 267 is fixed to the support base 248 of the rotation operation unit 242.
The support base 248 is placed on the XY table 233.

Next, the XY table 233 will be described with reference to FIG. 31, FIG. 36, and FIG. The X / Y table 233 is a support block 270 that supports the θ table 232 from below.
An X-axis table 271 that slidably supports the support block 270 in the X-axis direction,
And a Y-axis table 272 that slidably supports the axis table 271 in the Y-axis direction. The support block 270 has screw holes 274 at four locations, and the θ table 232 is fixed to the support block 270 via the screw holes 274 at the four locations.

The X-axis table 271 includes an X-axis air slider 276, an X-axis linear motor 277,
The X-axis linear scale 278 is provided along with the axis air slider 276. Similarly, the Y-axis table 272 includes a Y-axis air slider 279, a Y-axis linear motor 280,
A Y-axis linear scale 281 provided along with the Y-axis air slider 279 is configured. Reference numerals 282 and 283 in the figure denote an X-axis cable bear (registered trademark) and a Y-axis cable bear, respectively. Reference numerals 284 and 284 denote amplifiers for both linear motors 277 and 280.

The X axis linear motor 277 and the Y axis linear motor 280 are appropriately controlled and driven to move the θ table 232 in the X axis direction and the Y axis direction. That is, the head unit (or alignment mask D) 1 set on the set table 231 is in a horizontal plane,
The θ table 232 moves in the θ axis direction, and the X · Y table 233 moves in the X axis direction and the Y axis direction.

Next, the head correction device 212 will be described. The head correction device 212 is the recognition device 2.
14, based on the position recognition of the droplet discharge head 3 by 14, the droplet discharge head 3 is slightly moved in the X-axis, Y-axis, and θ-axis directions via the head holding member 4 to position (position) the droplet discharge head 3. Correction). At the same time, the head correction device 212 functions in cooperation with the temporary fixing device 213 to press the head holding member 4 against the carriage 2 until the adhesive solidifies.

As shown in FIGS. 28 and 38, the head correction device 212 includes a correction device stand 301 attached to the back side of the machine base 204 and the correction X / Y table 30 mounted thereon.
2, a correction θ table 303 supported by the correction X / Y table 302, and an arm unit 304 supported by the correction θ table 303. In this case, the correction θ table 303 has exactly the same structure as the θ table 232 of the unit moving device 211, and the description thereof is omitted here. In the θ table 232, the forward / backward drive unit 2
43 is arranged on the left side, but in the correction θ table 303, it is arranged on the right side (see FIG. 28).

As shown in FIG. 38, the correction device stand 301 includes a base plate 307 on which the correction X / Y table 302 is placed, and three sets of leg units 3 that support the base plate 307.
08, 308, and 308. The three sets of leg units 308 are arranged at three locations, the left part, the right part, and the central rear part, respectively, and a pair of support columns 309 and 309 and a pair of support columns 3 are provided.
The upper plate 310 and the lower plate 311 are fixed to the upper and lower sides of 09 and 309.

In this case, the head unit 1 moved by the unit moving device 211 faces the lower space of the correction device stand 301, and the arm unit 304 protruding from the correction device stand 301 faces the head unit 1 from above (head). Engaging with the holding member 4). Then, the movement of the head unit 1 and the position correction of the carriage 2 are performed by the unit moving device 211, and the position correction of each droplet head 3 is performed by the head correction device 212.
Is done. Therefore, after any one droplet discharge head 3 is temporarily fixed, the unit moving device 211 moves the head unit 1 so that the next droplet discharge head 3 faces the head correction device 212.

As shown in FIGS. 38 to 41, the correction X / Y table 302 is placed in the center of the correction device stand 301 and supports the correction θ table 302.
4 and a correction X-axis table 31 that supports the support block 314 in a slidable manner in the X-axis direction.
5 and a correction Y-axis table 316 that supports the correction X-axis table 315 slidably in the Y-axis direction. The support block 314 has screw holes 318 at four locations, and the correction θ table 303 is fixed to the support block 314 via the screw holes 318 at the four locations.

The correction X-axis table 315 includes an X-axis air slider 320 and an X-axis linear motor 321.
And an X-axis linear scale 322 provided together with the X-axis air slider 320. Similarly, the correction Y-axis table 316 includes a Y-axis air slider 323, a Y-axis linear motor 324, and a Y-axis linear scale 325 provided along with the Y-axis air slider 323. In the drawing, reference numerals 326 and 327 are an X-axis cable bear and a Y-axis cable bear, respectively, and reference numerals 328 and 328 are amplifiers of both linear motors 321 and 324, respectively.

As shown in FIGS. 42, 43, and 44, the arm unit 304 includes a pair of engagement arms 331 and 331 that engage with the pair of engagement holes 76 and 76 of the head holding member 4, and a pair of engagement arms. It includes a bracket 332 that supports 331 and 331, an arm lifting mechanism 333 that lifts and lowers the bracket 332, and a support base 334 that supports the arm lifting mechanism 333. The support base 334 includes a fixed plate 336 fixed to the correction θ table 303 and a fixed plate 33.
A pair of L-shaped arms 337 and 337 extending forward from 6 and a pair of L-shaped arms 337 and 33
7 and a vertical plate 338 fixed to the front end of FIG. 7, and extends in an inverted “L” shape toward the front.

The arm elevating mechanism 333 is an elevating slider 340 that supports the bracket 332 so as to be raised and lowered.
And an air cylinder 34 that is fixed to the lower portion of the vertical plate 338 and moves the lift slider 340 up and down.
1. The air cylinder 341 is connected to the air supply device 203 described above, and moves the bracket 332 up and down with the lift slider 340 as a guide by switching the air valve or the like. The bracket 332 is formed in an “L” shape, and has a bifurcated tip. Then, the engagement arms 331 and 331 are attached downward to the forked portion, respectively.

As shown in FIG. 45, each engagement arm 331 includes an engagement pin 343 inserted into the engagement hole 76 of the head holding member 4, a pin holder 344 that holds the engagement pin 343 movably up and down, and a pin holder 344. And a coil spring 345 that urges the engaging pin 343 downward. The upper end portion of the pin holder 344 is fixed so as to be fitted to the bracket 332 from below. The distal end portion of the engaging pin 343 is formed in a tapered shape, and the tapered portion 347 is formed such that the proximal end side has a large diameter and the distal end side has a small diameter with respect to the engaging hole 76 of the head holding member 4. As a result, the engagement pin 343 is engaged with the engagement hole 76 without rattling.

In the initial state, both engagement arms 331 and 331 are moved to the rising end position by the air cylinder 341, and after moving the head unit 1 by the unit moving device 211,
When both the engagement arms 331 and 331 are lowered by the air cylinder 341, the pair of engagement pins 343 and 343 engage with the engagement holes 76 and 76 of the desired head holding member 4. The air cylinder 341 is timer-controlled by the control device 215, and the head holding member 4 after position correction is pressed against the carriage 2 as it is until the adhesive applied by the temporary fixing device 213 is solidified. Yes.

That is, the air cylinder 341 in which both the engagement arms 331 and 331 are lowered is subjected to the position correction of the head holding member 4 and the application of the adhesive (details will be described later), and then the adhesive coagulation time (predetermined adhesion) When the time to reach the strength elapses, both the engagement arms 331 and 331 are raised to their original positions. In this embodiment, the engaging pin 343 is urged by the coil spring 345. However, the coil spring 345 is omitted, and the engaging pin 343 and the pin holder 344 are integrated into a simple structure. Good.

In the above configuration, when both the engaging arms 331 and 331 of the arm unit 304 are lowered and engaged with the head holding member 4, the correction θ table 303 and the correction X / Y table 30.
2 drives to position the droplet discharge head 3 through the head holding member 4. This positioning state is maintained until the adhesive is solidified. That is, the arm unit 304
These engagement arms 331 and 331 press the head holding member 4 toward the carriage 2 in a positioned state, and the temporary fixing device (adhesion) 213 faces the head holding member 4.

Next, the recognition device 214 will be described. As shown in FIGS. 29 and 46, the recognition device 214 is fixed to the correction device stand 301 so as to straddle the front of the correction X / Y table 302, and fixed to the front surface of the camera stand 351. Camera position adjustment unit 352 and a pair of recognition cameras attached to the camera position adjustment unit 352 (
CCD camera) 353 and 353. In this case, the pair of recognition cameras 353
, 353 are fixedly provided to the head unit (alignment mask D) 1 to be recognized.

The camera stand 351 has a pair of left and right leg piece members 355, 3 extending forward in an inverted “L” shape.
55 and a horizontally long front plate 356 passed between the pair of leg piece members 355 and 355. The pair of recognition cameras 353 and 353 fixed to the front plate 356 via the camera position adjustment unit 352 protrudes somewhat higher than the pair of engagement arms 331 and 331 of the head correction device 212 and somewhat forward. (See FIG. 30) so that interference with the engagement arm 331 is prevented.

As shown in FIGS. 46 to 49, the camera position adjusting unit 352 is provided on the front plate 3.
56, a Z-axis adjustment plate 358 attached to 56, a microstage 359 attached to the lower end of the Z-axis adjustment plate 358, and a left camera holder 36 for holding a left recognition camera 353a.
0 and a right camera holder 361 for holding the right recognition camera 353b. The Z-axis adjustment plate 358 has a pair of guide rails 362 and 362 extending vertically between the front plate 356 and an adjustment bolt 363 that abuts against the upper end of the front plate 356. By the forward and reverse rotation of the adjusting bolt 363, the vertical positions of the recognition cameras 353 and 353 can be adjusted via the Z-axis adjusting plate 358.

The microstage 359 is connected to the right recognition camera 353b via the right camera holder 361.
Are configured with an X-axis stage 365 that supports the X-axis stage 365 and a Y-axis stage 366 that supports the X-axis stage 365 and is fixed to the lower end of the Z-axis adjustment plate 358. X-axis stage 36
5 is configured such that the right recognition camera 353b can be moved minutely in the X-axis direction, and the position of the right recognition camera 353b in the front-rear direction can be adjusted. Similarly, the Y-axis stage 366 is configured to be able to adjust the position in the left-right direction of the right recognition camera 353b.

On the other hand, the left camera holder 360 is fixed to the lower end of the Z-axis adjustment plate 358.
Therefore, the position of the right recognition camera 353b is adjusted by the microstage 359 with respect to the left recognition camera 353a fixedly provided via the left camera holder 360. As described above, the two ejection heads 5 are formed by the left and right recognition cameras 353a and 353b.
In order to simultaneously recognize the positions of 7a and 57a, particularly when handling a new droplet discharge head 3,
The distance between the left and right recognition cameras 353a and 353b by the microstage 359 in advance,
That is, the distance between the visual fields is adjusted. Reference numeral 367 in the figure denotes a camera cover that integrally covers the camera position adjustment unit 352 and the recognition cameras 353 and 353.

In the recognition device 214 configured as described above, the two reference marks (reference pins 12 and 12) 26 and 26 of the carriage 2 are formed by the cooperation of one recognition camera 353 and the X-axis table 271 of the unit moving mechanism 211. The position is recognized. That is, image recognition of one reference pin 12 is performed by one recognition camera 353, and then the carriage 2 moves in the X-axis direction to perform image recognition of the other reference pin 12. Based on the recognition result, the position of the carriage (head unit 1) 2 is corrected by the unit moving device 211, and the position is recognized again for confirmation.

The pair of recognition cameras 353 and 353 simultaneously recognizes the positions of the two discharge nozzles 57a and 57a serving as the reference of each droplet discharge head 3. That is, the corresponding droplet discharge head 3 is moved directly below the pair of recognition cameras 353 and 353, and the two discharge heads 57a,
57a is simultaneously recognized. In this state, the head correction device 212 faces the head holding member 4, the position of the droplet discharge head 3 is corrected, and the temporary fixing device 213 is bonded. The marks 164 and 165 on the alignment mask D are recognized in the same manner as described above.

Next, the temporary fixing device 213 will be described. As shown in FIGS. 27 and 50, a common stand 219 extending in the front-rear direction so as to straddle the correction device stand 301 is provided on the right side of the machine base 204, and the temporary fixing device 213 is It is disposed at the front of the shared stand 219. The temporary fixing device 213 includes a square support plate 372 supported on a common stand 219 by four stays 371, an air table 373 fixed to the lower surface of the square support plate 372, and an adhesive application fixed to the tip of the air table 373. A device 374 and an adhesive tray 375 facing the adhesive applicator 374 moved to the home position from below are provided. The adhesive tray 375 is fixed to the shared stand 219, and the adhesive application device 3
The adhesive hanging from 74 is received.

As shown in FIGS. 50 to 54, the air table 373 includes a rectangular support plate 372.
Y-axis air table 377 attached to the front end, sub-Y-axis air table 378 attached to the front end of Y-axis air table 377, X-axis air table 379 attached to the front end of sub-Y-axis air table 378, and X-axis The Z-axis air table 380 is attached to the tip of the air table 379. And these Y axis air tables 377,
Sub Y-axis air table 378, X-axis air table 379 and Z-axis air table 3
80 is an air cylinder 377a, 3 connected to the air supply device 203 described above.
78a, 379a, 380a and sliders 377b, 378b, 379b, 380b.

The adhesive application device 374 includes a vertical support plate 38 fixed to the Z-axis air table 380.
2 and a pair of left and right horizontal support blocks 383 projecting forward from the lower part of the vertical support plate 382.
383 and a pair of dispenser units 384 attached to each horizontal support block 383
384 and a dispenser controller 385 supported by the common stand 219. The pair of dispenser units 384 and 384 includes the pair of engaging arms 3.
31 and 331 and a pair of recognition cameras 353 and 353 are arranged so as to face each other from the front.

Each dispenser unit 384 includes a dispenser 388 having an adhesive injection nozzle 387 attached to the tip thereof, and a cartridge-type syringe 38 for supplying the dispenser 388 with an adhesive.
9 and a dispenser holder 390 for holding a dispenser 388 and a syringe 389. The dispenser holder 390 is attached to the front end portion of the horizontal support block 383 so that the angle can be adjusted. In this apparatus, the adhesive injection nozzle 387 is adjusted to be inclined by about 45 degrees with respect to the horizontal. Each horizontal support block 383 has a vertical support plate 38.
2 is fixed so that its position can be adjusted in the front-rear and left-right directions.

As described above, the adhesive is simultaneously injected (applied) into one of the two adhesive injection holes 77a and 77a that form a pair of the head holding member 4 using the two adhesive injection nozzles 387 and 387. At the same time, after both adhesive injection nozzles 387 and 387 move in the Y-axis direction, they are simultaneously injected (coated) into the other two non-adhesive injection holes 77b and 77b in the pair. Accordingly, the distance between the two adhesive injection nozzles 387 and 387 corresponds to the distance between the adhesive injection holes 77a (77b) and 77a (77b) forming a pair in the head holding member 4. Also,
Each adhesive injection nozzle 387 having a predetermined inclination angle is inserted into the adhesive injection hole 77 which is a long hole, and injects the adhesive so as to be sprayed on the inner peripheral surface thereof.

Incidentally, the head correction device 212 holds the head holding member 4 immovably by pressing the head holding member 4 against the carriage 2 in a state where the positioning operation is completed. On the other hand, the X-axis air table 379 and the Y-axis air table 377 are driven, and the two adhesive injection nozzles 387 and 387 are moved to the two adhesive injection holes 77a and 77a of the head holding member 4.
Move to the top of. Here, the Z-axis air table 380 is driven, and the two adhesive injection nozzles 387 and 387 are simultaneously inserted into the two adhesive injection holes 77a and 77a.

Next, a predetermined amount (from the two adhesive injection nozzles 387 and 387) by a syringe 389.
Adhesive adjusted by the dispenser controller 385 is injected. Subsequently, the Z-axis air table 380 raises the two adhesive injection nozzles 387 and 387 and drives the sub Y-axis air table 378 to set the two adhesive injection nozzles 387 and 387 to the other. The adhesive is moved directly above the two adhesive injection holes 77b and 77b. In this case, since the distance between the two pairs of adhesive injection holes 77a (77b) and 77a (77b) in the head holding member 4 is constant, the Y-axis air table 377 is stopped here, Only the sub Y-axis air table 378 is driven.

Next, after again raising the adhesive injection nozzles 387 and 387, the temporary fixing device 213 is stopped to wait for the adhesive coagulation time. When the coagulation time has elapsed, the head correction device 212 disengages the head holding member 4 and the temporary fixing (positioning and bonding) operation of any one droplet discharge head 3 is completed. The positioning and bonding operation of the droplet discharge head 3 by the cooperation of the head correction device 212 and the temporary fixing device 213 is repeated 12 times, whereby the temporary fixing of the droplet discharge head 3 is completed. The correction device 212 and the temporary fixing device 213 return to the home position.

Here, with reference to FIG. 55, the control device 215 will be described and the control device 2 will be described.
15, a series of assembling procedures of the head unit 1 will be described. As shown in the block diagram of FIG. 6, the control system in the control device 215 includes an input unit 402 for inputting design position data and the like of the carriage 2 and the droplet discharge head 3 by the operation panel 401, a unit moving device 211, and the like. A driving unit 403 having various drivers or the like for driving the component apparatus, and the recognition camera 3
53, and a control unit 405 that performs overall control of each component device of the assembly apparatus A.

The drive unit 403 is a moving driver 4 that drives and controls each motor of the unit moving device 211.
07, a correction driver 408 for driving and controlling each motor of the head correction device 212, an air driver 409 for driving and controlling each air cylinder of the air table 373 in the temporary fixing device 213, and a dispenser unit 384 in the temporary fixing device 213. A dispenser controller 385 for controlling

The control unit 405 includes a CPU 411, a ROM 412, a RAM 413, and a P-CON 414.
These are connected to each other via a bus 415. ROM 412 contains
In addition to a control program that stores a control program to be processed by the CPU 411, it has a control data area for storing various control data. The RAM 413 has various register groups as well as a position data area for storing position data input from the outside, master position data obtained by the recognition camera 353 from the alignment mask D, and is used as a work area for control processing. Is done.

The P-CON 414 supplements the function of the CPU 411 and incorporates a logic circuit and a timer 416 for handling interface signals with peripheral circuits. For this reason, P-
The CON 414 is connected to the operation panel 401 and takes various commands from the input unit 402 into the bus 415 as they are or after being processed. The P-CON 414 is linked with the CPU 411 and outputs the data and control signals output from the CPU 411 and the like to the bus 415 as they are or after processing them.

Then, with the above configuration, the CPU 411 inputs various detection signals, various commands, various data, etc. via the P-CON 414 according to the control program in the ROM 412, and R
Various data in the AM 413 is processed, and a control signal is output to the drive unit 403 via the P-CON 414. As a result, the entire assembling apparatus A such as the unit moving device 211, the head correcting device 212, and the temporary fixing device 213 is controlled.

For example, the master position data of the alignment mask D obtained from the recognition camera 353 and the unit position data of the head unit 1 obtained from the recognition camera 353 are stored in the RAM 413, and the master position data and the unit according to the control program in the ROM 412. The position data is compared, and the unit moving device 211, the head correction device 212, and the like are controlled based on the comparison result.

Here, a method of assembling the head unit 1 by the assembling apparatus A will be described step by step. In the assembling apparatus A, the alignment mask D is first introduced before the head unit 1 is introduced. When the alignment mask D is set on the set table 231, the unit moving device 211 is driven and one carriage reference mark 1 of the alignment mask D is driven.
65 is made to face one recognition camera 353 and the position of one carriage reference mark 165 is recognized. Next, the X-axis table 271 of the unit moving device 211 is driven, the other carriage reference mark 165 faces the recognition camera 353, and the position of the other carriage reference mark 165 is recognized.

Next, the unit moving device 211 is driven, and the head reference mark 164 located at the end of the alignment mask D is simultaneously exposed to the pair of recognition cameras 353 and 353, so that the two head reference marks 164 and 164 are simultaneously recognized. To do. This is repeated in order to recognize the positions of 12 sets of head reference marks 164 corresponding to the 12 droplet discharge heads 3. As a result, the initial reference position necessary for the alignment of the workpiece (droplet discharge head 3 and carriage 2) is the calibration means (alignment mask D and recognition device 214 (recognition camera 353).
, 353)). At the same time, the time (T1 in FIG. 3) for determining the initial reference position is recorded.

When the position recognition of the alignment mask D is completed in this way, the alignment mask D is returned to the home position, and the head unit 1 is placed on the set table 231. Here, the head unit 1 is moved in exactly the same procedure as described above. First, the position of the pair of reference pins 12 and 12 of the carriage 2 is recognized, and the carriage (head unit 1) is detected by the unit moving device 211 based on the recognition result. ) Correct position 2. Next, in the same procedure as described above, the head main body (head holding member 4) 50 of the first droplet discharge head 3 is made to face the pair of engaging arms 331 of the head correction device 212, and the head holding member 4 is The engagement arm 331 is engaged.
Here, the position of the two discharge nozzles 57a and 57a, which are the position reference of the head main body 50, is recognized by the pair of recognition cameras 353 and 353.

Next, the head correction device 212 is driven, and the droplet discharge head 3 is positioned via the head holding member 4 based on the recognition result. And temporarily fixing device 2 with this positioning state
13 is driven, the pair of adhesive injection nozzles 387 and 387 are made to face the head holding member 4,
Inject adhesive. The adhesive is injected by sub Y-axis air cylinder 37 of temporary fixing device 213.
8 is performed twice with the movement of the adhesive injection nozzle 387. When the injection of the adhesive is completed, the hardening of the adhesive is awaited by timer control, and the engagement of the head correction device 212 with the head holding member 4 is released.

In this way, positioning and temporary fixing of the first droplet discharge head 3 are completed, and this operation is repeated from the second to the twelfth droplet discharge head 3. This completes the alignment of each droplet discharge head 3 that is a workpiece. In addition, the alignment time (t1 in FIG. 3) in which the position of the first droplet discharge head 3 determined from any of the first to twelfth droplet discharge heads 3 is determined is recorded as a representative. Keep it.

Finally, the unit moving device 211, the head correcting device 212, and the temporary fixing device 2
13 is returned to the home position, and the assembled head unit 1 is removed from the set table 231. Thereafter, the head unit 1 undergoes cleaning of the droplet discharge head 3, and
The components such as the handle 14 and the assemblies 15 and 16 are incorporated into the drawing apparatus B and carried into the drawing apparatus B.

Similarly, the next head unit 1 is mounted on the set table 231, the assembling apparatus A is driven in the same procedure, and the first to twelfth droplet discharge heads 3 are attached to the carriage 2. At this time, the alignment time (t2 in FIG. 3) in which the position of the second droplet discharge head 3 previously determined is similarly recorded as a representative. The above operation is repeated a predetermined number of times to assemble a plurality of head units 1.

Then, instead of the head unit 1, the alignment mask D is introduced again, and in the same manner as described above, the recognition camera 353 recognizes the positions of the carriage reference marks (reference positions) 165 of the alignment mask D and the head reference marks (reference positions). Position) 164 is recognized, and at the same time, the time (T2 in FIG. 3) at which these reference positions (latest reference positions) are determined is recorded. There is a difference in the measured value between the latest reference position determined at this time and the initial reference position determined last time due to a change over time due to heating of the recognition camera 353 or the like.

Then, a difference Δ1 (see FIG. 3) between the initial reference position and the latest reference position is obtained, and this difference Δ1, the elapsed time (T2−T1) between the times T1 and T2 at which the two reference positions are determined, Are used to estimate the shift amount from the initial reference position at the time of alignment of each of the head units 1 and record this as an alignment correction value.

Thus, when the position recognition of the alignment mask D is completed again, the alignment mask D is returned to the home position, a new head unit 1 is placed on the set table 231, and the latest reference position is used as a reference. Similarly, the carriage 2 and each droplet discharge head 3 are aligned and assembled.

If the alignment correction value is obtained as described above, the shift amount (position shift amount) of each droplet discharge head 3 with respect to, for example, the carriage 2 of each head unit 1 can be estimated as the alignment correction value. This data can be used as high-quality quality evaluation data for each head unit 1.

In this apparatus, the droplet discharge head 3 is bonded to the carriage 2 via the head holding member 4 so that the bonded portion is a metal-metal bond.
A structure that adheres to the carriage 2 may be used.

Here, an example of the phenomenon that the alignment position shifts with time is shown in FIGS.
Will be described. FIG. 4 is a schematic diagram showing a process of recognizing the position of the droplet discharge head 3 with respect to the carriage 2 by a pair of recognition cameras 353. FIG. 5 is an enlarged view of a portion D in FIG. That is, first, as shown in FIG. 4A, the position of one reference pin 12 of the carriage 2 is recognized using the left recognition camera 353 of the pair of recognition cameras 353.
Note that the rectangles of the recognition cameras 353 and 353 shown in the figure indicate camera areas B1 and B2. Next, as shown in FIG. 4B, the carriage 2 is relatively moved, and the position of the other reference pin 12 of the carriage 2 is recognized using the same left recognition camera 353. Based on the recognition result, the position of the carriage 2 is corrected by the unit moving device 211. Next, as described above, the position of each droplet discharge head 3 is recognized and positioned using the recognition camera 353. For example, the position of the upper right droplet discharge head 3 shown in FIG. Camera 3
When the position is recognized at 53, as shown in FIG. 4C, the carriage 2 is relatively moved so that the recognition cameras 353 and 353 are opposed to the two discharge nozzles 57a and 57a of the droplet discharge head 3, respectively. At this time, as shown in FIG. 5, if the camera areas B1 and B2 of the recognition cameras 353 are at the positions indicated by the solid lines, the two discharge nozzles 57a and 57a in the two camera areas B1 and B2 are both at the center. Therefore, alignment is performed so that the center of the droplet discharge nozzle 3 comes to the center point Z1. On the other hand, when the interval between the two recognition cameras 353 is shifted over time due to heating or the like, and the discharge nozzle 57a is positioned at the center with respect to the camera area B1 of the left recognition camera 353, the right recognition camera. The camera area B3 of 353 is shifted to the position indicated by the two-dot chain line. The displacement amount of the discharge nozzle 57a recognized in the right camera area 353 in the camera area B3 is the same as the displacement amount of the discharge nozzle 57a recognized in the left camera area B1 in the camera area 353. Since the droplet discharge head 3 is aligned so that the intermediate position between the two discharge nozzles 57a and 57a is the point Z1 at the beginning, the alignment is performed so that the point becomes the point Z2 over time. As a result, alignment is eventually performed at a position shifted by an error L with respect to the initially aligned position.

The head unit assembling apparatus used in this embodiment and the head unit 1 assembled thereby are not limited to the above-described drawing apparatus B, but also various flat display manufacturing methods, various electronic devices, and optical device manufacturing methods. The present invention can also be applied.

Moreover, in the said embodiment, although the head unit 1 was used as a workpiece | work, another various apparatus, a member, etc. may be sufficient as a workpiece | work. The alignment reference value may be not only the reference position but also a reference temperature, reference humidity, reference flow rate, reference mass, reference viscosity, or the like. In the above-described embodiment, the shift amount is determined by the time-dependent change (difference Δ1) in the alignment reference value as the elapsed time (T2−T1).
However, the shift amount may be obtained on the assumption that the change with time is a predetermined curved change instead.

It is a figure which shows the measurement data form at the time of the conventional workpiece alignment. It is a figure which shows the measurement data form at the time of ideal workpiece alignment. It is a figure which shows the measurement data form at the time of the workpiece | work alignment of this invention. 6 is a schematic diagram showing a step of recognizing the position of the droplet discharge head 3 with respect to the carriage 2 by a pair of recognition cameras 353. FIG. It is an enlarged view of the part D of FIG.4 (c). It is a top view of a head unit. It is a front view of a head unit. It is a side view of a head unit. It is a structural diagram of a reference pin. It is sectional drawing around a droplet discharge head. It is a perspective view showing a droplet discharge head typically. It is an expanded sectional view of a droplet discharge head. FIG. 6 is a structural diagram of a head holding member. It is an expansion perspective view which shows the assembly method of the head unit using an assembly jig. It is a structural diagram of an assembling jig. It is a top view which shows the assembly method of the head unit using an assembly jig. It is a front view which shows the assembly method of the head unit using an assembly jig. It is a schematic diagram of a drawing apparatus. It is a perspective view of the main carriage in a drawing apparatus. It is a top view of the main carriage in a drawing apparatus. It is explanatory drawing which shows the setting method of a head unit. It is a schematic diagram of the wiping apparatus in a drawing apparatus. It is a structure figure of the master plate in an alignment mask. It is a top view of an alignment mask. It is a front view of an alignment mask. It is the whole perspective view seen from the front side of an assembling apparatus. It is the whole perspective view seen from the back side of an assembling apparatus. It is a whole top view of an assembling apparatus. It is the whole assembly apparatus front view. It is the whole side view seen from the left side of an assembling apparatus. It is a perspective view around an XY table in a unit moving device. It is a structure figure of the set table in a unit moving device. It is a top view of the θ table in the unit moving device. It is a cutting | disconnection side view of the (theta) table in a unit moving apparatus. It is a front view of the θ table in the unit moving device. It is a top view around an XY table in a unit moving device. It is a front view around the XY table in the unit moving device. FIG. 5 is a perspective view around a correction XY table in the head correction device. FIG. 6 is a plan view around a correction XY table in the head correction device. FIG. 6 is a front view around a correction XY table in the head correction device. FIG. 6 is a side view around a correction XY table in the head correction device. It is a perspective view of the arm unit in a head correction device. It is a front view of the arm unit in a head correction device. It is a side view of the arm unit in a head correction device. It is sectional drawing of the engagement arm of an arm unit. It is a perspective view of a recognition device. It is a top view of a recognition device. It is a front view of a recognition device. It is a side view of a recognition device. It is the whole temporary fixing device perspective view. It is a top view of a temporary fixing apparatus. It is a front view of a temporary fixing device. It is a side view of a temporary fixing device. It is a perspective view of an adhesive agent coating apparatus. It is a block diagram of a control apparatus. It is a schematic diagram showing a carriage recognition operation in the drawing apparatus.

Explanation of symbols

A assembly apparatus B drawing apparatus C assembly jig D alignment mask (calibration means)
1 Head unit (work)
2 Carriage (work)
3 Droplet discharge head (work)
4 Head holding member (work)
11 Body plate 12 Reference pin 25 Pin body 26 Reference mark (small hole)
29a End surface 50 Head body 52 Nozzle formation surface 53 Nozzle row 57 Discharge nozzle 57a Discharge nozzle (outermost end)
65 Nozzle reference mark 164 Head reference mark 165 Carriage reference mark 211 Unit movement device 212 Head correction device 213 Temporary fixing device 214 Recognition device (recognition means, calibration means, alignment means)
215 Control device 353 Recognition camera (recognition means, calibration means, alignment means)

Claims (6)

A step of determining an initial physical quantity reference value used to determine a physical quantity to be given to a workpiece using a calibration means and recording a time at which the initial physical quantity reference value is determined;
A step of determining a physical quantity based on the physical quantity reference value for a predetermined period or a predetermined quantity of the work, and recording a time for determining the physical quantity of each of the workpieces;
Re-determining the latest physical quantity reference value using the calibration means, and simultaneously recording the time when the latest physical quantity reference value was determined;
A difference Δn between the initial physical quantity reference value and the latest physical quantity reference value is obtained, and an elapsed time between the determination of the difference Δn and both physical quantity reference values, and a time determined for each physical quantity,
Estimating the individual shift amounts when determining the physical quantities of the individual workpieces from the initial physical quantity reference value, and setting the individual shift amounts as physical quantity determination correction values for the individual workpieces;
A method for correcting a shift amount of a reference value with time, characterized by comprising: 2. The method of correcting a reference value change with time according to claim 1, wherein the physical quantity reference value is a reference position, a reference temperature, a reference humidity, a reference flow rate, a reference weight, or a reference viscosity. Each shift amount from the physical quantity reference value at the time of determining the physical quantity of each of the workpieces is obtained by proportionally allocating the difference Δn with the time determined for each physical quantity with respect to the elapsed time. The method for correcting a shift amount of a reference value with time according to claim 1 or 2. Determining the initial reference position used to align the workpiece using calibration means and simultaneously recording the time at which the initial reference position was determined;
A step of performing a single wafer alignment for a predetermined time or a predetermined quantity, with reference to the reference position, and recording the alignment time of each of the workpieces;
Determining the latest reference position again using the calibration means, and simultaneously determining the latest reference position and recording the time;
A difference Δn between the initial reference position and the latest reference position is obtained, and the initial reference position is determined using the difference Δn and the elapsed time between the determination of both reference positions and the individual alignment times. From which the individual shift amounts at the time of alignment of the individual workpieces are estimated, and the individual shift amounts are used as alignment correction values for the individual workpieces,
A method for correcting a shift amount of a reference value with time, characterized by comprising: The individual shift amounts from the alignment reference position at the time of alignment of the individual workpieces are obtained by proportionally allocating the difference Δn by the individual alignment time with respect to the elapsed time. A method for correcting a shift amount with time of the reference value described. The workpiece is a head unit in which a plurality of droplet discharge heads are attached to a single carriage,
The calibration unit includes an alignment mask in which the position of the carriage and the position of each droplet discharge head mounted on the carriage are patterned, and a recognition unit that performs image recognition.
The reference position necessary for aligning the workpiece is determined by recognizing the position of the carriage formed on the alignment mask and the position of each droplet discharge head by the recognition unit.
The carriage constituting the workpiece and the droplet discharge head are aligned with each other so that the position of the carriage recognized by the recognition means and the position of the droplet discharge head coincide with the initial reference position. 6. The method for correcting a shift value of a reference value with time according to claim 4, wherein the correction is performed by moving a droplet discharge head.

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