TWI441689B - Coating device and its coating position correction method - Google Patents

Description

Coating device and coating position correction method thereof

The present invention relates to a coating apparatus for manufacturing a flat panel such as a liquid crystal panel, and more particularly to a gantry having a coating head that is movable, and moving the coating head in the X and Y directions while moving from the coating head. A coating device such as an adhesive is applied to the substrate, and a coating device for drawing a specific slurry pattern on the substrate and a coating position correction method thereof are drawn.

In the field of a flat panel such as an LCD (Liquid Crystal Display) panel, in order to achieve the production efficiency of the panel, a plurality of panel substrates can be obtained from one glass substrate, and the size of the glass substrate is increased. Therefore, in order to produce such a flat panel, a coating apparatus for applying a slurry such as an adhesive to a glass substrate is also increased in size. In such a coating apparatus, a gantry provided with a plurality of coating heads can simultaneously form the same slurry pattern on the same glass substrate by coating the slurry while moving the coating heads along the same trajectory at the same time. .

As a conventional example of such a coating apparatus, a substrate holding portion for holding a substrate is provided on a gantry, and a gantry that can reciprocate in one direction (X-axis direction) is provided across the substrate. The gantry is arranged in a longitudinal direction (Y direction) and a plurality of coating heads movable in the direction, the coating heads moving in the longitudinal direction of the gantry (Y-axis direction), by means of individual gantry In the direction of the longitudinal direction (X-axis direction), the coating head moves along the same trajectory while discharging the slurry, and a technique of drawing a plurality of identical sizing patterns on the same substrate (for example, refer to Patent Document 1).

Further, as another conventional example, although two gantry provided with a plurality of coating heads are provided, one gantry is fixed, and the other gantry can be moved, and by moving the gantry, it is possible to Two gantry are provided at a specific interval. In this state, the substrate is moved in two directions, and by applying a slurry from the coating head of each gantry, a plurality of coating devices of the same slurry pattern can be simultaneously drawn on the substrate. It is proposed (for example, refer to Patent Document 2).

Further, in the coating device described in Patent Document 2, the coating head provided in the gantry is also provided with means for moving the nozzle in a direction (Y-axis direction) parallel to the moving direction of the gantry, on the substrate. When there is a deviation in the θ-axis direction, the coating head is displaced (position adjusted) in the Y-axis direction by the respective coating heads to compensate for the deviation in the θ-axis direction of the substrate.

Further, as another conventional example, a plurality of head units (coating heads) are provided in the frame (gantry) so that the nozzles of the head units can be moved in three directions of XYZ, and the frame is fixed by the substrate. A slurry applicator that draws a plurality of slurry patterns in the XY-axis direction on the plane is proposed (for example, refer to Patent Document 3).

In the technique described in Patent Document 3, the X-axis direction is the longitudinal direction of the frame, the Y-axis direction is the direction perpendicular to the longitudinal direction of the chassis, and the Z-axis direction is the height direction of the nozzle with respect to the substrate. When the head unit is replaced, the position of the nozzle of the new head unit replaced by the head unit is corrected by moving the nozzle in the XY axis direction with respect to the replaced new head unit.

As a method of correcting the positional deviation of the replacement nozzle, a measuring means is provided at a specific position of the table on which the substrate is placed, and one of the plurality of nozzles is used as a reference nozzle, and the measuring means is used. Moving to a specific position, detecting a positional deviation between the measuring means and the reference nozzle, determining a correction position of the measuring means, moving the measuring means to the correcting position, and moving to a specific position corresponding to the replacement nozzle, By detecting the positional deviation of the specific position and the replacement nozzle, the correction position of the replacement nozzle is obtained, whereby the positional deviation of the replacement nozzle can be corrected without performing the operation of applying the slurry to the dummy substrate.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2002-346452

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-225606

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2005-7393

In order to manufacture an LCD panel or the like, a plurality of coating heads provided in a plurality of gantry are used to simultaneously draw a plurality of identical slurry patterns on a large-sized same substrate, and the substrate is divided into a plurality of panels and the like. On each of the substrates on which the slurry pattern is drawn, the slurry patterns need to be each determined to be drawn on the substrate at a determined position. For this reason, it is necessary to set the correct positional relationship between the plurality of coating heads of the same gantry. Even in the coating heads set between different gantry, it is often necessary to set the correct positional relationship, and the gantry is also Need to be in the correct position relationship often. Therefore, in the case where the position of the nozzle of each coating head is monitored and a positional deviation occurs, it needs to be corrected. In particular, in the case where the slurry contained in the injection tube (slurry storage tube) of the coating head is used up and replaced with a new coating head, there is a possibility that a positional deviation occurs in the nozzle, and therefore, the nozzle needs to be made. Position adjustment.

On the other hand, in the above-mentioned Patent Document 1, it is disclosed that a plurality of gantry provided with a plurality of coating heads are used to fix a substrate, and by moving the gantry and the movement of the coating head to the gantry, a plurality of the same are simultaneously drawn on the substrate. The technique of the slurry pattern is not described in the adjustment of the positional deviation of the nozzles of the respective coating heads, and the adjustment of the positional deviation between the gantry is not described.

Further, the technique described in Patent Document 2 is provided with means for adjusting the direction of the longitudinal direction of the vertical gantry by applying the coating head provided on the gantry to the parallel substrate surface, and adjusting the position of the coating head, but it is possible to adjust the position of the coating head. Such position adjustment is performed by correcting the deviation of the substrate in the θ-axis direction by the arrangement of the coating heads, and is based on the detection result of the positional deviation of the positioning marks provided on the substrate.

However, in order to use the coating device, a plurality of coating heads in the gantry device, replacement of the coating head, and the like may cause a positional deviation in the coating head, and the arrangement of the coating head may be adjusted in accordance with the variation in the θ-axis direction of the substrate. In the method described in 2, the positional deviation between such coating heads is not considered.

Further, in the invention described in Patent Document 2, one of the gantry is fixed, and the other gantry can be moved, and by moving the gantry, the positional relationship between the other gantry and the fixed gantry is set. Regarding the adjustment of the positional deviation between these gantry, it has not been considered.

In the case where a plurality of coating patterns are provided on the same substrate by using a plurality of coating heads provided in a plurality of gantry, as in the technique described in Patent Document 1, the two gantry can be moved, and these two settings are set. The positional relationship of the gantry gates is extremely difficult in order to make the positional relationship of the gantry to the substrate a predetermined relationship.

Further, in the technique described in Patent Document 3, when the head unit is replaced, the position of the replacement nozzle is corrected by moving the nozzle (replacement nozzle) in the XY-axis direction with respect to the replaced new head unit. Therefore, there is provided a measuring means that can be moved, and the measuring means moves to the position of the replacement nozzle, and the positional deviation of the replacement nozzle is detected from the moving distance of the measuring means, and the means for measuring or moving the means and the movement processing are required. Wait.

Further, in the technique described in Patent Document 3, only one gantry (rack) is used, and the gantry is fixed, which causes an adjustment problem of the positional relationship between the gantry.

It is an object of the present invention to provide a solution to such a problem by using a plurality of gantry moving during the drawing of a slurry pattern to correct the deviation of the positional relationship of the gantry or the positional deviation between the coating heads of the gantry. Coating device, and coating position correction method thereof.

In order to achieve the above object, the present invention provides a coating apparatus in which a plurality of gantrys movable in a first direction are provided on a gantry, and each gantry is provided with a second direction along a length direction of the gantry. The plurality of moving coating heads are moved in the first direction by the gantry and the second direction of the coating head to the gantry, and the coating head moves in the first and second directions, and the facing faces are placed. The slurry is applied to the substrate of the substrate mounting table of the gantry, and each coating head draws a slurry pattern on the substrate. The coating head has a camera, and the gantry is disposed on the gantry at each of the substrate mounting platforms. A glass substrate for proofing of the coating head is provided, and a reference position mark for alignment of a plurality of gantry is provided, and the slurry is applied to the glass substrate for proofing by a plurality of coating heads of the same gantry, and the slurry is drawn The agent is marked with a slurry mark drawn on a glass substrate for proofing by a camera to detect a drawing position of the slurry mark, and detects a positional deviation between a plurality of coating heads of the gantry a first means for performing alignment of the plurality of coating heads in response to the detected positional deviation; and moving the plurality of gantry doors in the first direction until the reference position on the substrate mounting table is marked to the camera The position at which the gantry is moved to the position of the reference position mark is detected, and the positional deviation in the first direction from the predetermined standby position for drawing the slurry pattern is detected for each gantry, and the positional deviation detected is detected. The second means of aligning the standby position with respect to each gantry.

Further, according to the coating apparatus of the present invention, the reference position mark is an adsorption hole for holding the substrate in the vicinity of the center portion of the substrate stage.

Further, according to the coating apparatus of the present invention, the coating head can be moved in the first direction in which the gantry moves, and the alignment in the first direction can be performed.

Further, according to the coating apparatus of the present invention, one of the plurality of coating heads provided in the gantry is used as a reference coating head for each gantry, and the reference coating head is fixed in position in the first direction, and coating other than the reference coating head is provided. The head can be moved in the first direction, and the coating head other than the reference coating head can be aligned with the reference coating head in the first direction.

In order to achieve the above object, the present invention provides a coating position correction method for a coating apparatus, wherein the gantry is provided with a plurality of gantry movable in the first direction, and each gantry is provided with a length along the length of the gantry The plurality of coating heads that move in the two directions move in the first direction by the gantry and the movement of the coating head in the second direction of the gantry, and the coating head moves in the first and second directions, and faces the loaded The slurry is applied to the substrate disposed on the substrate mounting table of the gantry, and each coating head draws a slurry pattern on the substrate. The glazing is provided with a glass substrate for proofing on the substrate mounting table for proofing. On the glass substrate, a plurality of coating heads disposed on the corresponding gantry are used to mark the slurry mark, and the positions of the plurality of coating heads are detected by ingesting the respective slurry marks drawn by the camera, thereby detecting the position of the plurality of coating heads. The deviation is based on the detected positional deviation, and the alignment of the plurality of coating heads is performed, and the reference position mark is provided on the substrate mounting table to move the plurality of gantry to each of the reference positions. In the recorded position, the positional deviation in the first direction from the predetermined standby position of the position of the reference position mark by the gantry is detected for each of the plurality of gantry, and the plurality of gantry pairs are located based on the detected positional deviation. Standby position.

Further, according to the coating position correction method of the coating apparatus of the present invention, the reference position mark is provided in the adsorption hole for holding the substrate in the vicinity of the center portion of the substrate stage.

Further, according to the coating position correction method of the coating apparatus of the present invention, the coating head can be moved in the first direction in which the gantry moves, and the alignment in the first direction can be performed.

Further, according to the coating position correction method of the coating apparatus of the present invention, one of the plurality of coating heads provided in the gantry is used as a reference coating head for each gantry, and the reference coating head is fixed in position in the first direction, and a reference is provided. The coating head other than the coating head can be moved in the first direction, and the coating head other than the reference coating head can be aligned with the reference coating head in the first direction.

According to the present invention, the glass substrate for proofing is provided only on the substrate mounting table, and the glass substrate for proofing is coated with a slurry mark by a plurality of coating heads provided on the gantry, and the positional deviation between the coating heads can be detected, which can be short. The positional deviation between the coating heads of each gantry is accurately detected in the time to be corrected, and the positional deviation of each gantry is detected based on the position reference mark provided on the substrate mounting table, and the gantry can be accurately detected in a short time. Since the positional deviation between the two is corrected and the positional deviation is corrected, the positional relationship between the coating heads of all the gantry can be accurately set in a short time, and the coating accuracy of the slurry pattern of the substrate can be greatly improved.

Hereinafter, embodiments of the present invention will be described based on the drawings.

1 is a perspective view showing an embodiment of a coating apparatus according to the present invention, wherein 1 is a gantry, 1a is a front surface, 1b is an upper surface, 1c is a right side surface, 1d is a left side surface, 1e is a rear surface, and 1e is a back surface, and 2a and 2b are Linear slide, 3R, 3L for gantry, 4Ra, 4Rb, 4La, 4Lb for linear drive mechanism, 5Ra~5Rc, 5La~5Lc for coating head, 6 for injection tube (slurry container), 7 for CCD camera, 8 In the substrate mounting table, 9 is a reference position mark, and 10a and 10b are glass substrates for proofing.

In the same figure, the direction parallel to the front surface 1a and the back surface 1e of the gantry 1 is referred to as the X-axis direction, and the direction parallel to the right side surface 1c and the left side surface 1d of the gantry 1 is set to the Y-axis direction, which is perpendicular to the gantry 1. The direction of the upper surface 1b is the Z-axis direction, and the upper surface 1b of the gantry 1 is provided along the front side 1a side thereof, and the linear slide rail 2a is disposed in the X-axis direction, and the side along the back surface 1e side is in the X-axis direction. Set the linear slide 2b. These linear slides 2a, 2b extend from the right side surface 1c to the left side surface 1d.

A linear drive mechanism 4Ra is disposed on the linear slide 2a, and a linear drive mechanism 4Rb is disposed on the linear slide 2b. One end of the gantry 3R is placed on the linear drive mechanism 4Ra, and the other end of the gantry 3R is placed on the linear drive. The mechanism 4Rb is provided with a gantry 3R so as to span between the linear slides 2a and 2b. The linear drive mechanisms 4Ra, 4Rb constitute a linear motor (X-axis linear motor) together with the linear slides 2a, 2b, respectively, and are moved along the linear slides 2a, 2b by the linear drive mechanisms 4Ra, 4Rb, and the gantry 3R can be on the X-axis. Move in direction. In this case, the gantry 3R is parallel to the right side surface 1c of the gantry 1 (i.e., parallel to the Y-axis direction) by any such movement in the X-axis direction, and thus, the linear drive mechanisms 4Ra, 4Rb are often positioned. control.

Similarly, a linear drive mechanism 4La is provided on the linear slide 2a, and a linear drive mechanism 4Lb is provided on the linear slide 2b. One end of the gantry 3L is placed on the linear drive mechanism 4La, and the other end of the gantry 3L is placed. A gantry 3L is provided in a manner that the linear drive mechanism 4Lb has spanned between the linear slides 2a, 2b. The linear drive mechanisms 4La, 4Lb constitute a linear motor (X-axis linear motor) together with the linear slides 2a, 2b, respectively, and are moved along the linear slides 2a, 2b by the linear drive mechanisms 4La, 4Lb, and the gantry 3L can be on the X-axis. Move in direction. In this case, the gantry 3L is parallel with the left side surface 1d of the gantry 1 (i.e., parallel to the Y-axis direction) by any such movement in the X-axis direction, and thus, the linear drive mechanisms 4La, 4Lb are often positioned. control.

Therefore, the gantry 3R and the gantry 3L are often controlled to be parallel to each other in the Y-axis direction.

On the surface of the gantry 3R facing the gantry 3L side, a plurality of (here, three) coating heads 5Ra, 5Rb, 5Rc are arranged in the longitudinal direction of the gantry 3R (Y-axis direction), and can be moved along the gantry 3R In the same manner, in the face of the gantry 3R facing the gantry 3L side, the same number (here, three) of the coating heads 5La, 5Lb, and 5Lc of the gantry 3R are arranged in the longitudinal direction of the gantry 3L (Y axis). Direction) and can be set to move along the gantry 3L.

Here, when the coating head 5La provided in the gantry 3L is viewed, the injection tube 6 in which the slurry applied to the substrate (not shown) is accommodated or the slurry coated by the coating head 5La is taken up. The CCD camera 7 is further provided, and is not shown, but is provided with a nozzle for discharging the slurry from the injection tube 6 onto the substrate or a sensor for measuring the distance between the nozzle and the substrate, so that the nozzle is Z-axis drive mechanism that moves in the vertical direction (Z-axis direction). This Z-axis drive mechanism, together with the nozzle, also moves the syringe or CCD camera and sensor in the Z-axis direction. Further, this CCD camera system moves together with the coating head 5La.

Although the description is omitted, the other coating heads 5Ra to 5Rc, 5Lb, and 5Lc have the above-described structure similarly to the coating head 5La.

On the upper surface 1b of the gantry 1, a substrate (not shown) is placed on the substrate stage 8 placed between the linear slides 2a, 2b. Although not shown, the substrate mounting table 8 is provided with a substrate adsorption means for fixing the mounted substrate to the substrate mounting table 8, and also for adjusting the X and Y axis directions of the mounted substrate. The position is used in the XY-axis direction position adjustment means not shown, or the θ-axis direction correction table which is not shown in the θ-axis direction of the mounted substrate is corrected.

Fig. 2 is a perspective view showing a specific example of the substrate mounting table 8 in Fig. 1, wherein 8a is the upper surface, 8b is the left side surface, 8c is the right side surface, 11a and 11b are connecting members, and 12a and 12b are groove portions. The same reference numerals are given to the parts corresponding to the first drawing.

In the same figure, on the upper surface 8a of the substrate stage 8, the proofing glass substrates 10a and 10b are provided on the side of the left side surface 8b and the side of the right side surface 8c facing the X-axis direction, respectively. The glass substrates 10a and 10b for proofing are parallel to each other in the Y-axis direction, and one end of the glass substrates 10a and 10b for proofing is connected by the connecting member 11a, and the other end is connected by the connecting member 11a. The members 11b are joined.

Further, on the upper surface 8a of the substrate stage 8, the left side surface 8c is traversed from the right side surface 8b, and two groove portions 12a and 12b are provided at intervals of the interval between the two connecting members 11a and 11b. These grooves 12a and 12b have the same shape and size of the cross section and the cross-sectional shape and size of the connecting members 11a and 11b.

The glass substrates 10a and 10b for proofing to which the connecting members 11a and 11b are joined are fitted into the groove portion 12a, and the connecting member 11b is fitted into the groove portion 12a, thereby being attached to the upper surface 8a of the substrate mounting table 8. In this case, the glass substrate 10a for proofing is positioned along the side of the left side surface 8b of the upper surface 8a, and the glass substrate 10b for proofing is positioned along the side of the right side surface 8c of the upper surface 8a, and the connecting member 11a is positioned. 11b is individually embedded in the grooves 12a and 12b.

The proofing glass substrate 10a is used to detect a positional deviation in the XY-axis direction of the coating heads 5La to 5Lc provided in the gantry 3L of Fig. 1 . In this case, one of the coating heads 5La to 5Lc is used as a basic coating head (hereinafter, the coating head 5La is set as a reference coating head on the gantry 3L side), and the coating heads 5Lb and 5Lc are detected for the reference coating head 5La. Positional deviation in the XY axis direction. The positional deviation is detected by applying the slurry to the proofing glass substrate 10a by the coating heads 5La to 5Lc, and drawing a specific slurry mark (for example, a cross mark) to be disposed on the CCD camera 7 of the reference coating head 5La. (Fig. 1) Ingesting the slurry marks, by detecting the center position of the slurry marks, the detection positions of the center positions are regarded as the positions of the coating heads 5La to 5Lc (more specifically, the nozzles of the nozzles) At the detection position of the agent, the positional deviation of the coating heads 5Lb and 5Lc in the XY-axis direction of the reference coating head 5La can be detected.

The proofing glass substrate 10b is used to detect a positional deviation in the XY-axis direction of the coating heads 5Ra to 5Rc provided in the gantry 3R of Fig. 1 . In this case, as in the above, one of the coating heads 5Ra to 5Rc is used as a reference coating head (hereinafter, the coating head 5Ra is set as a reference coating head on the gantry 3R side), and the coating head 5Ra is applied. 5Rc marks the slurry mark on the glass substrate 10b for proofing, and the CCD camera of the reference coating head 5Ra picks up the slurry marks, and detects the center position of the slurry marks, and detects the coating heads 5Rb, 5Rc in the same manner as described above. The positional deviation of the reference coating head 5Ra in the XY-axis direction is determined.

Based on the above-described detection results of the positional deviation, the positional deviation in the XY-axis direction of the coating heads 5La to 5Lc of the gantry 3L (that is, the positional deviation of the coating heads 5Lb and 5Lc from the reference coating head 5La) is corrected, and coating is performed thereon. The slurry discharge ports of the nozzles of the heads 5La to 5Lc are arranged at a predetermined interval along the Y-axis direction. Similarly, the coating heads 5Ra to 5Rc of the gantry 3R are also corrected by the positional deviation in the XY-axis direction, and the slurry discharge ports of the nozzles of the coating heads 5Ra to 5Rc are specified along the Y-axis direction. The state in which the intervals are arranged.

A reference position mark 9 is provided at a center position of the upper surface 8a of the substrate stage 8. This reference position mark 9 detects the positional deviation between the two gantry 3L and 3R. In order to correct the positional deviation, the gantry 3L and 3R may be independently moved in the X-axis direction. To correct the positional deviation, the gantry 3L is moved from the current position to the right direction (X-axis direction) in the first figure. The reference coating head 5La is moved in the Y-axis direction, and the CCD camera 7 provided in the reference coating head 5La picks up the reference position mark 9. Then, the reference position mark 9 is taken and the center position thereof is obtained. The difference between the position of the reference coating head 5La before the movement and the X-axis direction of the detection position of the reference position mark 9 is the position of the gantry 3L with respect to the reference position mark 9 (distance to the gantry 3L), and the distance set in advance. Poor, the positional deviation of the gantry 3L in the X-axis direction can be detected.

Similarly, with respect to the gantry 3R, the positional deviation of the gantry 3R in the X-axis direction can be detected by using the CCD camera provided on the reference coating head 5Ra. Then, using the positional deviation amount detected as described above, the positional deviation in the X-axis direction of the gantry 3L, 3R is corrected, and the gantry 3L, 3R is positioned at a symmetrical position with respect to the reference position mark 9 (i.e., at the reference position). The mark 9 is a center and a position equidistant from each other on the opposite side, and this position is a predetermined distance from the reference position mark 9 to the above, and the interval between the gantry 3L and 3R serves as a coating head for the gantry 3L. The slurry pattern drawn by 5La to 5Lc is a predetermined distance from the interval in the X-axis direction of the slurry pattern drawn by the coating heads 5Ra to 5Rc of the gantry 3R.

Further, although not shown in the second drawing, a plurality of adsorption holes that are supplied with a negative pressure from a vacuum pump (not shown) are provided on the upper surface 8a of the substrate stage 8, thereby being as described above. The substrate (not shown) placed thereon is adsorbed to the upper surface 8a and fixed without causing a positional deviation.

Here, the reference mark 9 as the substrate mounting table 8 may be provided particularly on the substrate mounting table 8, or may be an adsorption hole at the center of the substrate mounting table 8 in the adsorption hole.

The substrate is placed between the proofing glass substrates 10a and 10b on the upper surface 8a of the substrate stage 8. On the substrate, position marks are provided at specific positions such as the corners of the four corners. As described above, the CCD of the specific coating head (for example, the coating heads 5La, 5Lc, 5Ra, 5Rc) which is corrected for the positional deviation is as described above. When the camera 7 is photographed, the center position is detected, and the positional deviation in the XY-axis direction or the θ-axis direction is detected, and the XYθ-axis direction of the substrate stage 8 is adjusted by the positional deviation detected thereby. Position, the sides of the substrate are parallel to the XY axis direction, and the center positions of the gantry 3L, 3R after the substrate is corrected for the position are set to be the position of the gantry 3L, 3R before the adjustment of the reference position mark 9 with respect to the position. The same location.

Further, the connecting members 11a and 11b can be removed from the grooves 12a and 12b, and the glass substrates 10a and 10b for proofing used for position adjustment and the new glass substrates 10a and 10b for proofing can be used by removing them. replace.

Fig. 3 is a side view showing a specific example of the coating head in Fig. 1 (indicating a partial cross section), 3 is a gantry (general name of gantry 3L, 3R), and 5 is a coating head (coating head 5La~5Lc, The general name of 5Ra~5Rc), 13 is the coating head mounting table, 14 is the Z-axis table supporting part, 14a is the connecting part, 15 is the Z-axis table, 16a~16c is the linear rail mechanism part, 17 is the drive coil, 18 is a linear slide rail, 19a, 19b are linear balls, 20 is a motor mounting portion, 21 is an X-axis drive motor, 22 is a shaft, 23 is a bearing, 24 is a cam, 25 is a through hole, and 26 is a Z-axis drive motor. 27 is a Z-axis driving unit, 28 is an up-and-down moving table, 29 is an optical range finder, 30 is a nozzle, 31 is a substrate, and the same reference numerals are given to portions corresponding to those in FIG. 1 .

In the same figure, the gantry 3 is provided with a coating head mounting table 13 having an L-shaped cross section so as to cover a part of the upper surface and a part of the side surface of the coating head 5. On the lower surface side of the planar portion of the coating head mounting table 13, a driving coil 17 is provided on the linear slide rail 18 extending in the longitudinal direction (Y-axis direction) of the upper surface of the gantry 3, and further, the driving coil 17 is sandwiched The drive coil 17 is provided with a specific number of linear guide mechanism portions 16a and 16b. Here, one linear guide mechanism portions 16a and 16b are provided on both sides of the drive coil 17, but two or more numbers are provided. These linear rail mechanism portions 16a and 16b are individually provided with wheels, and these wheels are in a state of being loaded on the upper surface of the gantry 3.

Further, on the side of the gantry 3 of the vertical portion of the coating head mounting table 13, a linear rail mechanism portion 16c having the same structure as the linear rail mechanism portions 16a, 16b is provided, and the wheel bottom of the linear rail mechanism portion 16c is attached to the surface. The coating head of the gantry 3 is mounted on the side of the table 13.

As described above, the coating head mounting table 13 is mounted to be movable in the Y-axis direction along the gantry 3 via the linear rail mechanism portions 16a to 16c. Further, the linear slide rail 18 of the gantry 3 and the drive coil 17 disposed opposite to the coating head mounting table 13 constitute a linear motor for moving the coating head 5 in the Y-axis direction along the longitudinal direction of the gantry 3. (Y-axis linear motor), the coating head mounting table 13 is moved along the gantry 3 in the Y-axis direction by driving the drive coil 17.

The coating head mounting table 13 is provided with a Z-axis table support portion 14 having an inverted Z-shaped cross-sectional shape on the drawing. The planar portion on the upper side of the Z-axis table support portion 14 is attached to the planar portion of the coating head mounting table 13, and the vertical portion of the Z-axis table support portion 14 is attached to the coating head mounting work. The vertical portion of the table 13 is attached to the lower end portion of the vertical portion of the vertical portion of the Z-axis table support portion 14.

On the upper side of the Z-axis table support portion 14, a Z-axis table 15 having an inverted Z-shaped cross-sectional shape on the same surface is provided. A plurality of balls (linear balls) 19a linearly arranged are disposed on the lower surface side of the upper planar portion of the Z-axis table 15, and the upper planar portion is sandwiched by the linear ball 19a and is disposed on the Z-axis table support. The upper planar portion of the portion 14 is provided with the same linear ball 19b on the lower surface side of the lower planar portion of the Z-axis table 15, and the lower planar portion is disposed to sandwich the linear ball 19b. The lower planar portion of the Z-axis table support portion 14. The vertical portion of the Z-axis table 15 and the vertical portion of the Z-axis table support portion 14 are disposed at a certain interval.

With the above configuration, the Z-axis table 15 can be configured to move in the X-axis direction with respect to the gantry 3 along the Z-axis table support portion 14.

In addition, the movement of the Z-axis table 15 in the X-axis direction is used to correct the positional deviation of the coating head 5 in the X-axis direction, and the position adjustment amount in the X-axis direction for correction is in mm units. To this end, the above-described intervals of the vertical portions are provided such that the vertical portion of the Z-axis table support portion 14 and the vertical portion of the Z-axis table 15 are not in conflict with such positional adjustment.

The motor mounting portion 20 is provided in the Z-axis table support portion 14 via the connecting portion 14a, and the X-axis driving motor 21 is provided in the motor mounting portion 20. Thereby, the X-axis drive motor 21 is placed on the upper side of the Z-axis table 15, and the downward rotation axis of the X-axis drive motor 21 is coupled to the upper plane provided through the Z-axis table 15. The through hole 25 of the shape portion, and the bearing 24 provided on the side surface of the lower planar portion of the Z-axis table support portion 14 and the bearing (not shown) provided in the motor mounting portion 20 described above are rotatably supported Axis 22. Further, the shaft 22 is provided with a cam 24 that can abut against the side surface at a position facing the side surface of the lower planar portion of the Z-axis table 15, and is activated by the X-axis drive motor 21, and the shaft 22 is rotated. This cam 24 rotates, and the Z-axis table 15 moves in the X-axis direction with respect to the Z-axis table support portion 14 due to the displacement amount. Further, the through hole 25 is a hole having a diameter that is different from the movement of the Z-axis table 15 in the X-axis direction, and the shaft 22 is not in contact with the wall surface of the through hole 25 (in addition, the Z-axis table 15 is further provided). The range of movement in the X-axis direction is a few mm).

The coating head 5 is attached to the vertical surface portion of the Z-axis table 15, and the coating head 5 is moved in the X-axis direction by the movement of the Z-axis table 15 in the X-axis direction.

In addition, the X-axis drive motor 21 is not provided in the reference coating heads 5La and 5Ra on the gantry 3L and 3R sides, so that the gantry 3L and 3R cannot be moved in the X-axis direction. Therefore, the Z-axis table 15 is fixed to the Z-axis table support portion 14 in the reference coating heads 5La and 5Ra, and the coating head 5 is attached to the Z-axis table 15 . However, the structure described below is also the same for the reference coating heads 5La and 5Ra.

The coating head 5 includes a Z-axis drive motor 26, and includes a Z-axis drive unit 27 to which the coating head 5 is attached to a vertical surface portion of the Z-axis table 15, and is attached to the Z-axis drive unit 27 by The drive of the Z-axis drive motor 26 moves the upper and lower stages 28 in the up-and-down direction, that is, in the Z-axis direction, and is provided with an injection tube 6 and a CCD camera 7 and optical which can be moved up and down together with the vertical movement table 28. The configuration of the range finder 29 and the like.

The injection tube 6 is provided with a nozzle 30 that is placed on the substrate 31 placed on the substrate stage 8 (Fig. 1) from the upper side, and is introduced into the injection tube 6 by introducing compressed gas (nitrogen gas, air, or the like) from the outside. The slurry contained in the syringe 6 is discharged from the slurry discharge port at the tip end of the nozzle 30.

Further, the optical range finder 29 is an interval measuring device that constitutes a distance (interval) for measuring the discharge port from the slurry of the nozzle 30 to the surface of the substrate 31, and based on the measurement result of the interval of the optical distance measuring device 29, the Z-axis drive When the motor 26 is started, the vertical movement table 28 is moved up and down, and the interval between the slurry discharge port of the nozzle 30 and the surface of the substrate 31 is set to a predetermined interval.

After the installation as described above, the coating head 5 is attached to the gantry 3, and by operating the drive coil 17, the linear motor operates to cause the coating head 5 (more specifically, the nozzle 30) to face the longitudinal direction of the gantry 3 (Y-axis direction). By moving the X-axis drive motor 21, the coating head 5 (more specifically, the nozzle 30) can be moved in the X-axis direction perpendicular to the longitudinal direction of the gantry 3, and the Z-axis drive motor 26 can be operated. The nozzle 30 of the coating head 5 is moved in the vertical direction (Z-axis direction).

Usually, when the coating apparatus is in an initial state in which the coating apparatus is assembled, or when maintenance of the injection tube 6 including the nozzle 30 is performed, the position of the nozzle 30 is changed by a predetermined position (this is called the coating head 5). For the purpose of this, as described in FIG. 1, it is necessary to adjust the positional deviation of each of the coating heads 5, and by providing the coating head 5 to the Z-axis table 15 moving in the X-axis direction with respect to the gantry 3, the coating head can be adjusted. Positional deviation of the X-axis direction of 5.

All of the coating heads 5La to 5Lc and 5Ra to 5Rc have the above-described structure (however, the reference coating heads 5La and 5Ra do not include the X-axis driving motor 21), whereby the coating heads 5Lb and 5Lc can be individually adjusted for the reference coating head 5La. The positional deviation in the X-axis direction, and the positional deviation of the coating heads 5Rb and 5Rc in the X-axis direction of the reference coating head 5Ra can be such that the nozzles 30 of the coating heads 5La to 5Lc and 5Ra to 5Rc are arranged in a line in the Y-axis direction.

Fig. 4 is a block diagram showing a specific example of a control system for controlling the operations of the respective portions of Figs. 1 and 3, 32 is a main control unit, 32a is a microcomputer, 32b is an external interface, and 32c is a motor controller. 32d is an X-axis driver, 32e is a Y-axis driver, 32f is a XX-axis driver, 33 is a sub-control unit, 33a is a microcomputer, 33b is an external interface, 33c is a motor controller, 33d is a Z-axis driver, and 33e is an X-axis. The driver, 34 is a keyboard, 35 is a display device, 36 is an external memory device, 37 is an image processing device, 38 is an image monitor, 39 is an X-axis linear motor, and 40 is a Y-axis linear motor, corresponding to the previously appearing surface The same portions are denoted by the same reference numerals, and the repeated description is omitted.

In the same figure, in this embodiment, the main control unit 32 and the sub-control unit 33 are provided, and these operations are interlocked. The main control unit 32 is a drive control: an X-axis linear motor 39 for moving the gantry 3L and 3R in the X-axis direction, and coating heads 5La to 5Lc and 5Ra to 5Rc provided to the gantry 3L and 3R along the gantry 3L. The Y-axis linear motor 40 that moves in the Y-axis direction in the longitudinal direction of the 3R, and the nozzles 30 shown in FIG. 3 in which the coating heads 5Lb, 5Lc, 5Rb, and 5Rc other than the reference coating heads 5La and 5Ra are moved in the X-axis direction ( Hereinafter, this is referred to as an X-axis drive motor 21 that moves the coating head in the X-axis direction. Here, the X-axis linear motor 39 is shown in Fig. 1, and the gantry 3L is a linear drive mechanism 4La formed by the linear slide 2a and the drive coil, and a linear drive mechanism formed by the linear slide 2b and the drive coil. 4Lb, regarding the gantry 3R, is a linear drive mechanism 4Ra formed by the linear slide 2a and the drive coil, and a linear drive mechanism 4Rb formed by the linear slide 2b and the drive coil. The Y-axis linear motor 40 is a linear motor formed by a drive coil 17 of each of the coating heads 5La to 5Lc and 5Ra to 5Rc and a linear slide rail 18 in the third drawing. The sub-control unit 33 drives and controls the Z-axis drive motor 26 that moves the nozzles 30 shown in FIG. 3 of the respective coating heads 5La to 5Lc and 5Ra to 5Rc in the Z-axis direction.

The main control unit 32 is provided with a microcomputer 32a, an external interface 32b, and a motor controller 32c. The microcomputer 32a is provided with a ROM for storing a main calculation unit or a processing program for slurry coating and a storage main unit. The processing result of the calculation unit or the RAM of the input data from the external interface 32b or the motor controller 32c, the input/output unit for exchanging data with the external interface 32b or the motor controller 32c, and the like.

The keyboard 34 or the display device 35 for correcting data, programs, and the like stored in the above-described memory is connected to the microcomputer 32a via the external interface 32b. In the display device 35, data or a program stored in the memory of the microcomputer 32a can be displayed, and the data corrected from the keyboard 34 can be input. Further, the drawing material of the slurry pattern or the like can be input from the keyboard 34, and the input data is displayed by the display device 35 and stored in the external memory device 36.

Further, the image processing device 37 that processes the image data from the external memory device 36 or the CCD camera 7 and processes the image data of the image monitor 38 is also connected to the microcomputer 32a via the external interface 32b. The CCD camera 7 picks up the image data obtained by the slurry mark on the proofing glass substrates 10a and 10b, the reference position mark 9 (first drawing and second drawing) of the substrate mounting table 8, and the position mark on the substrate 31. After being processed by the image monitor 38, the image processing device 37 is also supplied to the microcomputer 32a via the external interface 32b. In the microcomputer 32a, the processing result is supplied to the motor controller 32c as control data, whereby the positional deviation of the gantry 3L and 3R in the X-axis direction or the X and Y axes of the coating heads 5La to 5Lc and 5Ra to 5Rc are performed. The positional deviation of the direction (that is, the correction of the respective portions of the coating heads 5Lb, 5Lc, 5Rb, and 5Rc with respect to the positional deviation of the reference coating heads 5La and 5Ra in the X and Y-axis directions).

The motor controller 32c drives the X-axis driver 32d or the Y-axis driver 32e or the X-X axis driver 32f. In the case of correcting the positional deviation of the gantry 3L and 3R in the X-axis direction, the CCD camera 7 of the reference coating heads 5La and 5Ra picks up the image obtained by the reference position mark 9 (Fig. 1 and Fig. 2) of the substrate mounting table 8. The data is processed by the image processing device 37 and supplied to the microcomputer 32a, where it is processed and supplied to the motor controller 32c. Based on the image data to be processed, the motor controller 32c controls the X-axis driver 32d, and by controlling the driving of the X-axis linear motor 39, the positional deviation in the X-axis direction of the gantry 3L, 3R is adjusted. In addition, when the positional deviation of the coating heads 5Lb, 5Lc, 5Rb, and 5Rc in the Y-axis direction of the reference coating heads 5La and 5Ra is corrected, the CCD camera 7 of the reference coating heads 5La and 5Ra is taken up and formed on the glass substrate 10a for proofing. The image data of the slurry mark on the 10b is processed by the image processing device 37 and supplied to the microcomputer 32a, where it is processed and supplied to the motor controller 32c. Based on the processed image data, the motor controller 32c controls the Y-axis driver 32e to control the Y-axis linear motor 40, and the coating heads 5Lb, 5Lc, 5Rb, and 5Rc are oriented in the Y-axis direction of the reference coating heads 5La and 5Ra. The positional deviation is adjusted. Further, when the positional deviation of the coating heads 5Lb, 5Lc, 5Rb, and 5Rc in the X-axis direction of the reference coating heads 5La and 5Ra is corrected, the slurry marks formed on the glass substrates 10a and 10b for proofing are taken as described above. The image data processed by the image processing device 37 and the microcomputer 32a is supplied to the motor controller 32c, and the motor controller 32c controls the XX axis driver 32f based on the processed image data by controlling the coating head 5Lb. The X-axis drive motor 21 of 5Lc, 5Rb, and 5Rc adjusts the positional deviation of the coating heads 5Lb, 5Lc, 5Rb, and 5Rc in the X-axis direction of the reference coating heads 5La and 5Ra.

In the case where the substrate 31 is placed on the substrate mounting table 8, the position adjustment of the substrate 31 in the XYθ-axis direction is performed under the control of the microcomputer 32a as described above. Here, the means for this is omitted.

Further, when the slurry pattern is drawn on the substrate, the microcomputer 32a takes in the drawing material of the slurry pattern stored in the external memory device 36, processes the drawing material, and supplies it to the motor controller 32c. Based on the drawing data, the motor controller 32c drives the X-axis driver 32d and the Y-axis driver 32e, controls the X-axis linear motor 39, and causes the gantry 3L, 3R to control the Y-axis linear motor 40 to apply the coating heads 5La to 5Lc, 5Ra. ~5Rc, the desired slurry pattern is depicted on the substrate.

In addition, at this time, the compressed gas introduced into the injection tube 6 of the coating heads 5La to 5Lc and 5Ra to 5Rc is controlled by the air pressure control system, and the discharge control of the slurry from the nozzle 30 is performed, and this point is omitted.

The sub-control unit 33 moves the coating heads 5La to 5Lc and 5Ra to 5Rc up and down (Z-axis direction), and drives and controls the Z-axis driving motor 26 so that the height of the front end of the nozzle 30 of the coating head 5 and the surface of the substrate 31 is predetermined. the height of. The microcomputer 33a of the sub-control unit 33 is connected to the external interface 32b of the main control unit 32 via the external interface 33b via the external interface 33b, whereby the sub-control unit 33 operates together with the main control unit 32. Further, the microcomputer 33a is connected to the optical range finder 29 via the external interface 33b, and is connected to the motor controller 33c that controls the Z-axis driver 33d of the Z-axis drive motor 26 that drives the coating heads 5La to 5Lc, 5Ra to 5Rc.

When the positional deviation of the coating heads 5La to 5Lc and 5Ra to 5Rc in the X-axis direction is corrected as described above, the CCD camera 7 of the reference coating heads 5La and 5Ra is used to obtain the coating heads 5La to 5Lc and 5Ra to 5Rc. On the other hand, the image data formed on the glass substrates 10a and 10b for proofing is supplied to the motor controller 32c by the image processing device 37 and the image data processed by the microcomputer 32a of the main control unit 32. Based on the supplied image data, the motor controller 32c controls the XX axis driver 32f, drives and controls the X-axis drive motor 21, and corrects the coating heads 5Lb, 5Lc, 5Rb, and 5Rc in the X-axis direction of the reference coating heads 5La and 5Ra. Positional deviation.

Further, when the slurry pattern is drawn on the substrate 31 placed on the substrate stage 8, the distance between the nozzles 30 of the coating heads 5La to 5Lc, 5Ra to 5Rc and the surface of the substrate 31 detected by the optical distance meter 29 is used. The data is supplied to the microcomputer 33a via the external interface 33b, where it is processed and supplied to the motor controller 33c. Based on the supplied data, the motor controller 33c controls the Z-axis driver 33d, drives and controls the Z-axis drive motor 26, and moves the coating heads 5La to 5Lc, 5Ra to 5Rc in the Z-axis direction, and the nozzles 30 and 31 are placed. The interval between the surfaces is controlled to a prescribed interval.

Further, although the linear motor 39, 40 or the drive motors 26, 21 are individually provided with an encoder for detecting the amount of movement or rotation, these are omitted.

In this manner, the positional deviation in the XY-axis direction of the coating heads 5La to 5Lc and 5Ra to 5Rc or the X-axis of the gantry 3L, 3R can be controlled by the control system formed by the main control unit 32 and the sub-control unit 33. Correction of the positional deviation of the direction, etc.

Fig. 5 is a flow chart showing a specific example of one of the steps of correcting (aligning) the positional deviation of the gantry 3L, 3R and the coating heads 5La to 5Lc and 5Ra to 5Rc in Fig. 1 . Hereinafter, this step will be described with reference to Figs. 1 to 4 . In addition, in the fifth drawing, the "coating head 5" is a general term for all of the coating heads 5La to 5Lc and 5Ra to 5Rc, the "application head 5L" is a general term for the coating heads 5La to 5Lc, and the "application head 5R" is a coating head. The general name of 5Ra~5Rc.

In the fifth embodiment, when the gantry 3L and 3R are in the accommodated state, the application heads 5La to 5Lc are located on the opposite side of the substrate stage 8 from the sample glass substrate 10a of the substrate mounting table 8 (the nozzle 30). That is, the nozzle 30 is positioned so as to be displaced from the glass substrate 10a for proofing (the position is referred to as the storage position of the gantry 3L), and the coating heads 5Ra to 5Rc are similarly mounted on the nozzle 30 at the substrate. The glass substrate 10b for proofing of the table 8 is positioned further on the opposite side of the substrate stage 8 (that is, the position where the nozzle 30 is located away from the glass substrate 10b for proofing) (this position is referred to as the storage position of the gantry 3R). ). When the gantry 3L and 3R are in the stored state, the glass substrates 10a and 10b for proofing can be attached and detached by the substrate mounting table 8.

In this accommodation state, the X-axis linear motor 39 is driven, and the gantry 3L moves only in the direction (i.e., the X-axis direction) of the substrate mounting table 8 by a predetermined distance determined in advance, and the nozzles of the respective coating heads 5La to 5Lc are moved. 30 is moved right above the proofing glass substrate 10a, and the coating heads 5La to 5Lc are positioned at this position (this position is referred to as a tentative standby position of the gantry 3L). Similarly, the nozzle 30 of each of the coating heads 5Ra to 5Rc is moved right above the proofing glass substrate 10b by the specific distance determined by the gantry 3R toward the substrate stage 8 (i.e., the X-axis direction). The head 5Ra~5Rc is positioned at this position (this position is referred to as the tentative standby position of the gantry 3L). The data of this waiting machine location is stored in the memory of the microcomputer 32a.

Then, in the individual coating heads 5La to 5Lc and 5Ra to 5Rc, the Z-axis drive motor 26 is driven based on the measurement result of the optical range finder 29, and the nozzles 30 of the coating heads 5La to 5Lc are applied to the glass substrate for proofing. The height of 10a is set to a specific height with the heights of the nozzles 30 of the coating heads 5Ra to 5Rc to the height of the glass substrate 10b for proofing being completely equal. Thereafter, the Y-axis linear motor 40 of the gantry 3L, 3R and the coating heads 5La to 5Lc and 5Ra to 5Rc are driven, and the coating heads 5La to 5Lc and 5Ra to 5Rc are moved in the XY-axis direction. At the same time, the compressed gas is sent to the injection tube 6, and the slurry is discharged from the discharge port of the individual nozzles 30. Thereby, the coating heads 5La to 5Lc on the side of each gantry 3L are drawn on the glass substrate 10a for proofing on the side of the substrate mounting table 8, and the center position can be detected, for example, a cross-shaped slurry mark, for each The coating heads 5Ra to 5Rc on the gantry 3R side draw a slurry mark of the same shape on the other side of the substrate mounting table 8 on the proofing glass substrate 10b (step 100).

Next, the gantry 3L returns to the tentative standby position described above, and is disposed on one of the coating heads 5La to 5Lc on the gantry 3L side, for example, the CCD camera 7 of the reference coating head 5La, and the ingested by the reference coating head 5La is drawn on the proofing The image data is processed by the image processing device 37, and the image data is detected by the image processing device 37. The position of the center point is used as the data of the L-head reference center point position via the external interface 32b. It is supplied to the microcomputer 32a and stored in the memory. Similarly, the gantry 3R returns to the tentative standby position described above, and is disposed on one of the coating heads 5Ra to 5Rc on the gantry 3R side, for example, the CCD camera 7 of the reference coating head 5Ra, and the ingestion is drawn by the reference coating head 5Ra. The image data on the glass substrate 10b for proofing is marked, and the image data is processed by the image processing device 37, and the center point position is detected. The data of the center point position is used as the reference data of the R side head reference center point position through the external interface. 32b is supplied to the microcomputer 32a and stored in the memory (step 101).

Next, on the gantry 3L side, the coating heads 5Lb and 5Lc other than the reference coating head 5La move along the gantry 3L to the opposite side of the reference coating head 5La, and reach the end of the gantry 3L, and the reference coating head 5La is along the gantry 3L. The CCD camera 7 provided in the reference coating head 5La sequentially picks up the individual slurry marks drawn on the proofing glass substrate 10a by the coating heads 5Lb and 5Lc, and the image data is used as the image processing device 37. After the processing, the center point positions of the reference coating heads 5La of the reference coating head 5La have been determined to be positional errors in the X-axis direction of the reference head 5La of each of the coating heads 5La and 5Lc. an amount of position error amount ΔY _L ΔX _L and Y-axis direction, the position error amount of these X-axis direction of ΔX _L and the Y-axis direction of the position error amount ΔY _L is supplied via the external data interface 32b to the microcomputer 32a, is stored The memory stored in it. Similarly, on the gantry 3R side, the coating heads 5Rb and 5Rc other than the reference coating head 5Ra move along the gantry 3R to the opposite side of the reference coating head 5Ra, and reach the end of the gantry 3R by the reference coating head 5Ra along the gantry. In the 3R movement, the CCD camera 7 provided in the reference coating head 5Ra sequentially picks up the individual slurry marks drawn on the proofing glass substrate 10b by the coating heads 5Rb and 5Rc, and the image data is used as the image processing device. In the processing of 37, the position of the center point of each of the coating heads 5Rb and 5Rc is determined in the X-axis direction of the R-side reference center position of the reference coating head 5Ra that has been obtained and saved. The amount of error ΔX _R and the position error amount ΔY _R in the Y-axis direction, the position error amount ΔX _R in the X-axis direction, and the position error amount ΔY _{R in} the Y-axis direction are supplied to the microcomputer 32a via the external interface 32b. The memory stored therein is stored (step 102).

In the above, the positional deviation of the coating heads 5Lb and 5Lc of the gantry 3L in the X-axis direction of the reference coating head 5La and the positional deviation in the Y-axis direction, and the coating heads 5Rb and 5Rc of the gantry 3R are in the X-axis direction of the reference coating head 5Ra. The positional deviation of the positional deviation and the positional deviation in the Y-axis direction are individually detected, and the detection results are stored in the memory of the microcomputer 32a.

Next, the reference coating head 5La is moved in the Y-axis direction, and the gantry 3L is individually moved in the X-axis direction, so that the nozzle 30 of the reference coating head 5La and the center of the slurry mark drawn by the reference coating head 5La on the glass substrate 10a for proofing are provided. The position of the point is the same, and the position of the L-head reference center is set, and the position of the gantry 3L (tentative standby position) at this time is set as the reference position of the gantry 3L. Similarly, the reference coating head 5Ra is moved in the Y-axis direction, and the gantry 3R is individually moved in the X-axis direction, so that the nozzle 30 of the reference coating head 5Ra and the slurry coated with the reference coating head 5Ra on the glass substrate 10b for proofing are marked. The center point position is the same, and is set to the R side head reference center position, and the position (tentative standby position) of the gantry 3R at this time is set as the reference position of the gantry 3R.

Then, the gantry 3L is moved from the reference position in the X-axis direction (that is, the direction of the reference position mark 9 of the substrate stage 8), and the reference coating head 5La is moved from the L-side reference center position in the Y-axis direction to become the energy. The CCD camera 7 of the coating head 5La picks up the state of the reference position mark 9 by this reference. The image data taken by the CCD camera 7 is supplied to the image processing device 37 for processing, and the result of the processing is supplied to the microcomputer 32a. In the microcomputer 32a, when the image data of the reference position mark 9 is detected as a result of the processing, the moving distance from the tentative standby position to the gantry 3L of the reference position mark 9 is calculated, and the moving distance is determined in advance. The set moving distance (the distance from the standby position of the gantry 3L waiting to the X-axis direction of the reference position mark 9 for the drawing of the slurry pattern to the substrate) is calculated as the X-axis from the set moving distance of the gantry 3L. The amount of positional deviation in the direction is stored in the memory of the microcomputer 32a (step 103).

Further, the range of the captured image of the CCD camera 7 is in the range centered on the nozzle 30. When the reference position mark 9 exists in the captured image range, the positional relationship between the reference position mark 9 and the nozzle 301 can be obtained. . Therefore, when the CCD camera 7 picks up the state of the reference position mark 9, the distance between the reference position mark 9 and the nozzle 301 in the X-axis direction is obtained, and this is corrected as the corrected distance, and the correction is made by the tentative standby position. The moving distance of the reference coating head 5La in the X-axis direction from the reference coating head 5La to the X-axis direction of the reference position mark 9 can be obtained from the tentative standby position of the gantry 3L to the reference position mark. The moving distance of the X-axis direction of 9.

In the above, the authentic gantry 3R is also the same, and by using the reference coating head 5Ra, the moving distance of the tentative standby position of the gantry 3R to the reference position mark 9 can be calculated, and further the set moving distance (by the slurry pattern for the substrate) The amount of positional deviation in the X-axis direction from the standby position of the gantry 3R standby to the distance in the X-axis direction of the reference position mark 9 can be calculated and stored in the memory of the microcomputer 32a (step 104).

As described above, the distance in the X-axis direction from the tentative standby position to the standby position waiting for the slurry pattern drawing for each of the gantry 3L and 3R can be obtained as the amount of positional deviation in the X-axis direction.

Then, the coating heads 5Lb and 5Lc are obtained based on the positional error amount ΔX _{L in} the X-axis direction of the coating heads 5Lb and 5Lc of the gantry 3L obtained in the step 102 and the positional error amount ΔY _{L in the} Y-axis direction. Similarly, the position error amount ΔX _{R in} the X-axis direction of the coating heads 5Rb and 5Rc of the gantry 3R and the position error amount ΔY in the Y-axis direction in the X-axis direction and the Y-axis direction obtained in the step 102 are similar. Based on _R , positional data of the coating heads 5Rb and 5Rc in the X-axis direction and the Y-axis direction are obtained (step 105).

Then, based on the obtained position data, the position of the coating heads 5Lb and 5Lc in the X-axis direction of the reference coating head 5La is set in the gantry 3L, and the position in the Y-axis direction (the interval between the coating heads 5La to 5Lc) is set. ). Thereby, on the gantry 3L, the coating heads 5La to 5Lc are arranged at a specific interval in the Y-axis direction, and the nozzles 30 are arranged on a line along the X-axis. In the same manner, in the gantry 3R, the positions of the coating heads 5Rb and 5Rc in the X-axis direction of the reference coating head 5Ra are set, and the position in the Y-axis direction is set (the coating heads 5Ra to 5Rc). Interval). Thereby, on the gantry 3R, the coating heads 5Ra to 5Rc are arranged at a specific interval in the Y-axis direction, and the nozzles 30 are arranged on a line along the X-axis (step 106).

Further, the gantry 3L and 3R are returned to the tentative standby position described above, and the position of the gantry 3L is adjusted from the tentative standby position based on the positional deviation amount in the X-axis direction of the set moving distance of the gantry 3L obtained in step 103. . Thereby, the gantry 3L is set to the above-described standby position. Similarly, regarding the gantry 3R, the position of the gantry 3R is adjusted from the tentative standby position based on the amount of positional deviation in the X-axis direction of the set moving distance of the gantry 3R obtained in step 104. Thereby, the gantry 3R is set to the above-described standby position (step 107).

In this way, the reference positions 9 of the gantry 3L and 3R on the substrate mounting table 8 are opposite to each other, and are placed at a predetermined position separated by the reference position mark by the position setting, and at the same time, in the gantry 3L, The coating heads 5La to 5Lc are arranged at a predetermined interval along the X-axis, and in the gantry 3R, the coating heads 5Ra to 5Rc are arranged at a predetermined interval along the X-axis.

In this state, the substrate 31 is placed on the substrate mounting table 8, and the substrate 31 is placed on the substrate mounting table 8. When the deviation in the XYθ axis direction is adjusted, the gantry 3L and 3R move in the X-axis direction. The drawing operation start position of the slurry pattern is set, and the initial setting of the slurry discharge pressure or the height of the nozzle 30 with respect to the substrate 31 is performed for each of the coating heads 5La to 5Lc and 5Ra to 5Rc, and then each coating head is used. 5La to 5Lc and 5Ra to 5Rc perform a specific slurry pattern drawing on the substrate 31.

As described above, in this embodiment, the alignment adjustment of the coating head (nozzle) (which is aligned on one line along the X-axis) is performed using the proofing glass substrates 10a and 10b provided on the substrate stage 8. The alignment adjustment of the gantry 3L and 3R is performed using the reference position mark 9 set in advance on the substrate stage 8, and it is not necessary to mount the dummy glass substrate on the substrate stage 8 for such adjustment.

In addition, in the finishing of the positional deviation between the coating heads of the gantry, one of the coating heads is used as a reference coating head, and the positional deviation of the other coating heads against the reference coating head is corrected, and the alignment can be performed in a short time. This kind of alignment.

Further, in the respective coating heads, the nozzle, the injection tube, the CCD camera, and the like can be moved in the X-axis direction in the moving direction of the gantry, and the positioning of the coating head can be performed more accurately.

As described above, in this embodiment, the correction between the nozzles of the coating head or the correction between the gantry can be performed in a simple and short time, and the correction error can also be reduced.

Further, in the above embodiment, the above-described reference coating head is not provided with a moving mechanism in the X-axis direction, and the X-axis direction is fixed, so that the number of parts can be reduced.

1. . . shelf

1a. . . front

1b. . . Above

1c. . . Right side

1d. . . Left side

1e. . . back

2a, 2b. . . Linear slide

3, 3R, 3L. . . Longmen

4Ra, 4Rb, 4La, 4Lb. . . Linear drive mechanism

5, 5Ra~5Rc, 5La~5Lc. . . Coating head

6. . . Syringe tube (slurry container)

7. . . CCD camera

8. . . Substrate mounting table

9. . . Reference position marker

10a, 10b. . . Glass substrate for proofing

11a, 11b. . . Connecting member

12a, 12b. . . Ditch

13. . . Coating head mounting workbench

14. . . Z-axis table support

14a. . . Connection

15. . . Z-axis table

16a~16c. . . Linear guide mechanism

17. . . Drive coil

18. . . Linear slide

19a, 19b. . . Linear ball

20. . . Motor mounting

twenty one. . . X-axis drive motor

twenty two. . . axis

twenty three. . . Bearing

twenty four. . . Cam

25. . . Through hole

26. . . Z-axis drive motor

27. . . Z-axis drive unit

28. . . Move the table up and down

29. . . Optical range finder

30. . . nozzle

31. . . Substrate

32. . . Main control department

33. . . Deputy control department

Fig. 1 is a perspective view showing an embodiment of a coating apparatus according to the present invention.

Fig. 2 is a perspective view showing a specific example of the substrate mounting table 8 in Fig. 1 .

Fig. 3 is a side view showing a specific example of the coating head in Fig. 1.

Fig. 4 is a block configuration diagram showing a specific example of a control system for controlling the operations of the respective units of Figs. 1 and 3.

Fig. 5 is a flow chart showing a specific example of the order of correction (alignment) of the positional deviation between the gantry and the coating head in Fig. 1.

1. . . shelf

1a. . . front

1b. . . Above

1c. . . Right side

1d. . . Left side

1e. . . back

2a, 2b. . . Linear slide

3R, 3L. . . Longmen

4Ra, 4Rb, 4La, 4Lb. . . Linear drive mechanism

5Ra~5Rc, 5La~5Lc. . . Coating head

6. . . Syringe tube (slurry container)

7. . . CCD camera

8. . . Substrate mounting table

9. . . Reference position marker

10a, 10b. . . Glass substrate for proofing

Claims (8)

A coating device is provided on a gantry with a plurality of gantry movable in a first direction, and each of the gantry is provided with a plurality of coating heads movable in a second direction along a length direction of the gantry The coating head moves in the first and second directions by the movement of the gantry in the first direction and the movement of the coating head in the second direction of the gantry, and the facing is placed in the setting. Applying a slurry on the substrate of the substrate mounting table of the gantry, each of the coating heads drawing a slurry pattern on the substrate, wherein the coating heads each have a camera, and the gantry is mounted on the substrate mounting table. a plurality of glass substrates for proofing of the coating head disposed on the gantry, and a plurality of reference position marks for alignment of the gantry are provided, and the slurry is coated by a plurality of the coating heads of the same gantry In the glass substrate for proofing, a slurry mark is drawn, and the drawing mark of the slurry mark is detected by taking the slurry mark drawn on the glass substrate for proofing by the camera, and detecting In the gantry a plurality of first deviations between the coating heads, a first means for aligning the plurality of coating heads with respect to the detected positional deviation; and moving the plurality of the gantry toward the first direction Until the reference position mark on the substrate mounting table is marked to the position picked up by the camera, the moving distance of each gantry to the position of the reference position mark is detected, and each of the gantry detections is predetermined by the slurry pattern drawing. The positional deviation in the first direction from the standby position is determined by the positional deviation detected The gantry performs the second means of aligning the standby position. The coating device according to the first aspect of the invention, wherein the reference position mark is an adsorption hole for holding a substrate in the vicinity of a central portion of the substrate stage. The coating device according to claim 1 or 2, wherein the coating head is movable in the first direction in which the gantry moves, and the alignment in the first direction can be performed. The coating apparatus according to claim 3, wherein each of the plurality of coating heads provided in the gantry is a coating head, and the reference coating head is the first The direction is fixed, and the coating head other than the reference coating head is movable in the first direction, and the coating head other than the reference coating head is capable of aligning the first direction with respect to the reference coating head. A coating position correction method for a coating device is provided with a plurality of gantry movable in a first direction on a gantry, and each of the gantry is provided with a plurality of gantry movable in a second direction along a longitudinal direction of the gantry The coating head moves in the first direction by the movement of the gantry, and the movement of the gantry in the second direction by the coating head, the coating head moves in the first and second directions, and faces the loaded Applying a slurry on a substrate disposed on the substrate mounting table of the gantry, each of the coating heads drawing a slurry pattern on the substrate, wherein each of the gantry is provided with a proofing glass on the substrate mounting table Substrate, On the glass substrate for proofing, a plurality of the coating heads disposed on the corresponding gantry are marked with a slurry mark, and the position is detected by taking the respective slurry marks drawn by the camera, thereby detecting the position. a plurality of positional deviations between the coating heads, and a plurality of alignments of the coating heads are performed based on the detected positional deviations, and a reference position mark is provided on the substrate mounting table to move the plurality of the gantry to each The position of the reference position mark detects a positional deviation in the first direction from a predetermined standby position of the position of the reference position mark by the plurality of the gantry, and the detected position deviation is The reference is such that a plurality of the gantry pairs are located at the standby position. The coating position correction method of the coating apparatus according to the fifth aspect of the invention, wherein the reference position mark is an adsorption hole for holding a substrate in the vicinity of a central portion of the substrate stage. The coating position correction method of the coating apparatus according to the fifth or sixth aspect of the invention, wherein the coating head is movable in the first direction in which the gantry movement is performed, and the alignment in the first direction can be performed. The coating position correction method of the coating apparatus according to claim 7, wherein each of the plurality of coating heads provided in the gantry is a coating head, and the reference coating head is used for each of the gantry The first head is fixed in position, and the coating head other than the reference coating head is movable in the first direction, and the coating head other than the reference coating head is coated on the reference The head can perform the alignment of the first direction described above.