JP2009281902A - Tool and method for calibrating laser measuring device, and drawing device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a calibration tool for a laser measuring device, a calibration method for a laser measuring device and a drawing device, can calibrate a laser measuring device with improved accuracy by considering environmental conditions in measuring. <P>SOLUTION: A calibration tool 35 for a laser measuring device 34 measures a work-gap between an inspection sheet S set horizontally and a nozzle surface 17 of a functional liquid droplet discharging head 3 facing the inspection sheet S parallel from upside and performing drawing on the inspection sheet S. The tool provided in association with the height position of the work-gap includes a first dummy nozzle surface 121 used as a first measuring surface for calibration, and a second dummy nozzle surface 122 used as a second measuring surface for calibration. The first dummy nozzle surface 121 and the second dummy nozzle surface 122 are arranged parallel to each other and at a step of a calibration reference dimension d that is above the work-gap. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a calibration jig for a laser measuring apparatus that measures a work gap between a horizontally set work and a nozzle surface of an inkjet head that performs drawing on the work, a calibration method for the laser measuring apparatus, and a drawing apparatus. Is.

As a calibration jig (standard reflector) of a conventional laser measuring apparatus, one that calibrates a measurement error caused by the color or gloss of the surface of an object to be measured is known (see Patent Document 1). This calibration jig has a reference color and a reference gloss on the surface. In the measurement of a laser measuring device using this, first, a calibration jig is provided on the surface of the object to be measured, and the distance to the calibration jig is set. The distance B is measured. Next, the calibration jig is removed and the separation distance S to the object to be measured is measured. Then, the value obtained by adding the thickness d of the calibration jig to the separation distance B is compared with the separation distance S, and if the separation distance S is large, the laser measuring device is calibrated accordingly, and the color and gloss The measurement error that occurs is corrected. On the other hand, the internal scale of the laser measuring device is set (calibrated) by measuring a reference distance at the time of factory shipment.
JP 2004-333398 A

By the way, in the laser measuring device, in addition to the physical conditions such as the color and gloss of the surface of the object to be measured as described above, the actual measurement distance depends on the environmental conditions such as the temperature and humidity of the optical path that cause the wavelength shift of the laser beam. It is known that an error will occur. In addition, depending on the operating environment of the laser measuring device, its own heat generation affects the above environmental conditions.
However, in the laser measuring apparatus as described above, even if calibration can be performed in consideration of the former physical conditions, calibration in consideration of the latter environmental conditions cannot be performed. However, environmental conditions can be taken into account by measuring the reference distance and calibrating the internal scale at the actual measurement site. However, strictly speaking, if the reference distance and the measured distance are significantly different, there is a high possibility that the environmental conditions on the optical path of the laser light will be different. As a result, the above-mentioned calibration jig calibrates the laser measuring device with high accuracy. There is a problem that cannot be done.

  It is an object of the present invention to provide a calibration jig for a laser measuring apparatus, a calibration method for the laser measuring apparatus, and a drawing apparatus capable of accurately calibrating the laser measuring apparatus by taking into consideration environmental conditions at the time of measurement. It is said.

  The calibration jig of the laser measuring apparatus of the present invention is a laser measurement that measures a work gap between a horizontally set work and a nozzle surface of an inkjet head that faces the work in parallel from above and draws on the work. In the calibration jig of the apparatus, which is arranged in accordance with the height position of the work gap, a first dummy nozzle surface serving as a first measurement surface for calibration and a second for calibration A second dummy nozzle surface serving as a measurement surface is provided, and the first dummy nozzle surface and the second dummy nozzle surface are arranged in parallel to each other with a step having a calibration reference dimension exceeding the work gap. It is characterized by that.

  A calibration method for a laser measurement apparatus according to the present invention is a calibration method for a laser measurement apparatus that is performed using the calibration jig for the laser measurement apparatus described above, with the horizontal movement of the laser measurement apparatus relative to the calibration jig. A distance measuring step of measuring the first distance to the first dummy nozzle surface and measuring the second distance to the second dummy nozzle surface, and the difference between the measured first distance and the second distance A dummy distance calculating step for calculating a certain inter-dummy dimension, and a scale calibration step for calibrating the internal scale of the laser measuring device so that the calculated inter-dummy dimension is the same as the calibration reference dimension. And

  According to these configurations, since the calibration jig is arranged in accordance with the height position of the work gap, the first measurement distance is the work gap measurement distance and the calibration jig measurement distance by the laser measuring device. The measurement distance to the dummy nozzle surface and the second dummy nozzle surface is not extremely different from each other, and the environmental conditions based on the measurement distance at the time of actual measurement and the calibration can be substantially matched. In addition, since the calibration reference dimension exceeds the work gap, the internal scale of the laser measuring device is calibrated before and after the distance to the nozzle surface, and the internal scale for measuring the work gap is highly accurate. Can be calibrated. Needless to say, the workpiece gap is measured by measuring the nozzle surface on the movement adjustment side of the workpiece gap and inputting the height data of the workpiece surface to the laser measuring device.

  In this case, it is preferable that the first dummy nozzle surface and the second dummy nozzle surface are respectively subjected to the same surface treatment as the nozzle surface of the inkjet head.

  In this case, a first dummy plate having a first dummy nozzle surface, a second dummy plate having a second dummy nozzle surface, and a plate holder for holding the first dummy plate and the second dummy plate are provided. The first dummy plate and the second dummy plate are preferably composed of a head plate that forms a nozzle surface of the inkjet head.

  According to these configurations, the form of the measurement surface of the calibration jig and the form of the nozzle surface of the inkjet head that is the measurement target of the work gap can be made the same. For this reason, physical conditions such as the color and gloss of the measurement surface can be matched between the actual measurement and the calibration measurement, and the internal scale of the laser measuring apparatus can be calibrated with high accuracy.

  In this case, the first dummy plate is pressed and held on the plate holder, the first pressing plate having a through opening for measurement, and the second dummy plate is pressed and held on the plate holder, and the through opening for measurement is used. It is preferable to further include a second pressing plate that has formed.

  According to this configuration, it is possible to correct warping and bending of the first dummy plate and the second dummy plate, and it is possible to maintain the calibration reference dimension with high accuracy.

  The drawing apparatus of the present invention includes a calibration jig for the laser measuring apparatus described above, an inkjet head for drawing on the work, a work table for setting the work horizontally, and a movement for moving the work through the work table. And the laser measuring apparatus is mounted on the moving means, and the calibration jig is fixedly arranged on the movement locus of the laser measuring apparatus by the moving means.

  According to this configuration, the laser measuring device can easily face the calibration jig or the inkjet head by the moving means. Therefore, the work gap can be accurately measured immediately after the calibration of the laser measuring apparatus, so that the working efficiency can be improved and the drawing quality can be improved.

  Hereinafter, a discharge inspection apparatus equipped with a calibration jig of a laser measurement apparatus according to the present embodiment will be described with reference to the accompanying drawings. This ejection inspection apparatus ejects a functional liquid (ink) from a functional liquid droplet ejection head (inkjet head), and inspects the impact performance by recognizing the landing dots, and in this case, the functional liquid droplet ejection head The inspection discharge is performed on the inspection sheet (work) with a work gap in actual drawing. Here, prior to the description of the discharge inspection apparatus, a head unit equipped with a plurality of functional liquid droplet discharge heads to be inspected will be described.

  As shown in FIG. 1, the head unit 1 includes a carriage 2 and 12 (plural) functional liquid droplet ejection heads 3 mounted on the carriage 2. The twelve functional liquid droplet ejection heads 3 are divided into left and right (Y-axis direction) by six with respect to the carriage 2, and each head group has an R, G, and B color arrangement and a staircase arrangement. They are arranged in the same arrangement pattern.

  The carriage 2 is provided with a main body plate 5 in which twelve mounting openings 4 for attaching twelve functional liquid droplet ejection heads 3 are formed, and protrudes from the lower surface of the main body plate 5 to position the head unit 1. A pair of reference pins 6 (see FIG. 8) serving as a reference, a pair of left and right plate support members 7 attached to both short sides of the main body plate 5, and an upper end portion of the pair of plate support members 7 are spanned. And a head mounting plate 8 that is mounted on the first main carriage 41 (see FIG. 3) of the discharge inspection apparatus 21 that performs the above operation. In this case, the twelve functional liquid droplet ejection heads 3 fixed to the carriage 2 through the mounting openings 4 are aligned in the X-axis direction and the Y-axis direction with reference to the pair of reference pins 6 and the nozzles thereof The surface 17 is incorporated so as to be located in the same plane. Further, the tips (detection ends) of the pair of reference pins 6 are arranged so as to be located in the same plane as the nozzle surface 17 of the functional liquid droplet ejection head 3. The work gap (paper gap) is configured by the gap between the nozzle surface 17 of the head unit 1 in actual drawing and the surface of the inspection sheet S that is a drawing target.

  On the main body plate 5, a pair of left and right pipe connection assemblies 9 with pressure regulating valves connected to the functional liquid droplet ejection head 3 are provided. Each of the pipe connection assemblies 9 is a functional liquid supply unit 29 of the discharge inspection device 21. (Both are shown in FIG. 3 and FIG. 4). Further, a wiring connection assembly (not shown) with an intermediate substrate connected to the functional liquid droplet ejection head 3 is provided inside the head mounting plate 8, and each wiring connection assembly is controlled by a discharge inspection apparatus 21 described later. Wired to a computer (not shown).

  As shown in FIG. 2, the functional liquid droplet ejection head 3 is a so-called double functional liquid droplet ejection head 3, and is connected to the functional liquid introduction unit 11 having the two connection needles 14 and the functional liquid introduction unit 11. Two head substrates 12 and a head main body 13 that discharges the functional liquid are provided below the head substrate 12 (see FIG. 2A).

  The functional liquid introduction part 11 has a pair of connection needles 14 and receives the supply of the functional liquid from the functional liquid supply unit 29 (see FIGS. 3 and 4) via the pipe connection assembly 9 described above. ing. The head main body 13 includes a double pump unit 15 composed of piezoelectric elements and a nozzle plate (head plate) 16 in which a plurality of discharge nozzles 19 are formed. The nozzle surface 17 of the nozzle plate 16 is subjected to water repellent treatment by eutectoid plating or coating. In addition, a large number (a plurality) of discharge nozzles 19 formed on the nozzle surface 17 constitute two nozzle rows 18 arranged in parallel with each other and displaced by a half nozzle pitch. The row 18 includes 180 discharge nozzles 19 arranged at an equal pitch (see FIG. 2B).

  The head substrate 12 is provided with two connectors 20, and each connector 20 is connected to the above-described wiring connection assembly (control computer) via a flexible flat cable (not shown). The drive waveform output from the control computer is applied to each pump unit 15 (piezoelectric element) via each connector 20, so that the functional liquid is discharged from each discharge nozzle 19.

  Next, the discharge inspection apparatus 21 will be described with reference to FIGS. 3 and 4. The discharge inspection device 21 is widely disposed on the machine base 22, the stone surface plate 23 provided on the machine base 22, and the entire area on the stone surface plate 23, and is a drawing for inspecting the discharge performance of the functional liquid droplet discharge head 3. An inspection device 24, a maintenance unit 25 for maintaining / recovering the function of the functional liquid droplet ejection head 3, a material supply device 26 for supplying the head unit 1 to the drawing inspection device 24, a maintenance unit 25 and a material supply device 26 And a common pedestal 27 for supporting the whole, and the whole is accommodated in a chamber device (not shown). The discharge inspection apparatus 21 is connected to a control computer that performs overall control of the entire apparatus, and the control computer is disposed outside the chamber apparatus.

  The discharge inspection device 21 mounts the head unit 1 supplied by the material supply device 26 on the drawing inspection device 24 and maintains the functions of the plurality of functional liquid droplet discharge heads 3 of the mounted head unit 1 by the maintenance unit 25. The inspection discharge is performed while aiming at the inspection, and the landing position of the discharged functional liquid and the flight bending are inspected. Prior to this inspection, the drawing inspection device 24 measures the work gap of the head unit 1 supplied by the material supply device 26, and the head unit 1 is the same as the actual drawing with respect to the inspection sheet S described later. Adjustment is made so as to be a work gap (details will be described later).

  As shown in FIGS. 3 and 4, the drawing inspection device 24 is placed on the stone surface plate 23 and installed across the Y-axis table 31 and the Y-axis table 31 that constitutes the movement axis in the Y-axis direction. And an X-axis table 32 constituting a moving axis in the X-axis direction. The drawing inspection apparatus 24 includes a camera unit 33 mounted on the X-axis table 32 together with the head unit 1, an alignment mask M and an inspection sheet S mounted side by side on the Y-axis table 31 in the Y-axis direction (see FIG. 5). ), Mounted on the side of the Y-axis table 31, and attached to a laser measuring device 34 that measures the above-described work gap using the interference of the wavelength of the laser beam, and a column 43 of the X-axis table 32 described later, A calibration jig 35 for calibrating the laser measuring device 34 and a head recognition camera 36 mounted on the stone surface plate 23 are provided below the Y-axis table 31.

  In the drawing inspection apparatus 24, a region where the X-axis table 32 and the Y-axis table 31 intersect is a processing area. In this processing area, the laser measuring device 34 is calibrated and the work gap is measured and adjusted. The functional liquid is inspected and discharged by the plurality of functional liquid droplet ejection heads 3 of the head unit 1 and the inspection is performed.

  The X-axis table 32 has an X-axis linear motor that scans a pair of travel rails, and includes a first main carriage 41 that mounts the head unit 1, a second main carriage 42 that mounts a camera unit 33, Are individually slid in the X-axis direction. Further, the X-axis table 32 is supported by four columns 43 erected on the stone surface plate 23, and extends to a position facing the maintenance unit 25 across the Y-axis table 31. Then, the calibration jig 35 is fixed downward on the column 43 located at the left back of the four columns 43 shown in FIG. 3 so as to project on the Y-axis table 31.

  The first main carriage 41 is configured by incorporating a Z-axis table 45 (see FIG. 3) and a θ table into a carriage frame 44 spanned between a pair of travel rails. Below the θ table, the head unit 1 is detachably held in a posture in which the main scanning direction is directed to the X-axis direction. The work gap is adjusted by moving the head unit 1 up and down via the Z-axis table 45. Similarly, the second main carriage 42 has a second carriage frame 46 spanned between a pair of travel rails, and a pair of mask recognition cameras 47 constituting the camera unit 33 are attached to the second carriage frame 46. It is supported so as to be separated in the Y-axis direction (see FIGS. 7 and 8).

  As shown in FIG. 5, the Y axis table 31 includes a lower Y axis table 51 and an upper Y axis table 52 disposed on the lower Y axis table 51. The lower Y-axis table 51 is used when the alignment mask M and the inspection sheet S are finely moved for inspection, and is used when the laser measurement device 34 is finely moved for calibration. On the other hand, the upper Y-axis table 52 is mainly used when the alignment mask M and the inspection sheet S are largely moved.

  The lower Y-axis table 51 is provided on the pair of left and right table bases 53 directly supported on the stone surface plate 23 so as to extend in the Y-axis direction, and the pair of table bases 53 and extends in the Y-axis direction. A first guide rail, a Y-axis linear motor 55 provided on one table base 53, and a first slider 56 slidably moved on the first guide rail 54 by the Y-axis linear motor 55. ing. A laser measurement device 34 is provided on the side of the calibration slider 35 side of the first slider 56, and the laser measurement device 34 is moved by moving the first slider 56. The calibration jig 35 provided on the locus is allowed to face from below. Further, on the stone surface plate 23 of the pair of table bases 53, a pair of under cameras 57 constituting the head recognition camera 36 are fixed upward so as to be located in the center and separated from each other in the Y-axis direction. .

  The upper Y-axis table 52 is provided on the first slider 56 and extends in the Y-axis direction, and a Y-axis rodless cylinder 62 provided outside the pair of second guide rails 61. And a plate-like second slider 63 that is slidably moved on the second guide rail 61 by a Y-axis rodless cylinder 62. On the second slider 63, an alignment table 64 holding an alignment mask M on which various reference marks are formed, and two inspections constituting the landing surface of the functional liquid ejected by the functional liquid droplet ejection head 3 A suction table 65 for sucking and fixing the sheet S is disposed adjacent to the Y-axis direction.

  In this case, the alignment table 64 and the suction table 65 are arranged so that the surface of the alignment mask M and the surface of the inspection sheet S are located in the same plane (the same plane). The surface of the inspection sheet S sucked and fixed by the suction table 65 is positioned with high accuracy, and the height data is input to the control computer together with the installation height of the laser measuring device 34. ing. Therefore, the measurement of the work gap by the laser measuring device 34 is performed by measuring the nozzle surface 17 of the functional liquid droplet ejection head 3 and processing the measurement result by the control computer. Reference numerals 66, 66, 66 in the drawing are three peep holes 66 for the pair of under cameras 57, 57 formed in the second slider 63.

  As shown in FIG. 6, the alignment mask M is formed in a plate shape with transparent quartz glass, and a pair of left and right mask recognition reference marks Ma serving as calibration standards for the two mask recognition cameras 47 and two under cameras 57. A pair of upper and lower under camera reference marks Mb serving as a calibration reference, and a mask pattern Mp including a plurality of discharge reference marks Mc serving as a reference for landing positions for inspecting the functional liquid discharged from the head unit 1. Have. The mask pattern Mp is formed in the same manner as the landing pattern Cp corresponding to the expected landing position where the functional liquid discharged by the twelve functional liquid droplet discharging heads 3 mounted on the head unit 1 should land.

  Here, with reference to FIG. 7 thru | or FIG. 8, the inspection method of the discharge performance using the discharge inspection apparatus 21 is demonstrated easily. Although details will be described later, the height of the functional liquid droplet ejection head 3 (head unit 1) is adjusted with respect to the inspection sheet S to be a work gap in actual drawing prior to this inspection. First, the alignment mask M and the mask recognition camera 47 are moved so that the mask recognition camera 47 and the under camera 57 overlap the mask recognition reference mark Ma and the under camera reference mark Mb of the alignment mask M, respectively. Next, the mask recognition reference mark Ma and the under camera reference mark Mb are respectively image-recognized by the two mask recognition cameras 47 and the pair of under cameras 57, and the respective cameras 47 and 57 are calibrated (FIG. 7A). )reference).

  Subsequently, while moving the mask recognition camera 47 and the alignment mask M, the mask recognition camera 47 images the mask pattern Mp of the alignment mask M (see FIG. 7B). When the alignment mask M is image-recognized, the head unit 1 is moved onto the inspection sheet S and the pair of reference pins 6 of the head unit 1 are image-recognized by the pair of under cameras 57 and 57. Then, alignment of the head unit 1 is performed on the data or partially physically (see FIG. 8C). Thereafter, the functional liquid is inspected and discharged onto the inspection sheet S from the ejection nozzle 19 of the all-function liquid droplet ejection head 3.

  After inspection ejection, instead of the head unit 1, the camera unit 33 is moved onto the inspection sheet S, and the position of the landing pattern Cp of the inspection sheet S is recognized by the mask recognition camera 47 with the same recognition pattern as the mask pattern Mp ( (Refer FIG.8 (d)). Finally, the control computer compares the mask pattern Mp and the landing pattern Cp, and performs a discharge inspection (performance evaluation) of the discharge nozzle 19 (not shown).

  Next, a work gap measurement method and adjustment method performed by the laser measuring device 34 prior to the ejection inspection will be briefly described. This measuring method and adjusting method are performed after the internal scale of a laser measuring device 34 to be described later is calibrated. The head unit 1 supplied from the material supply device 26 to the drawing inspection device 24 is set on the first main carriage 41 so that its work gap is sufficiently larger than the actual drawing work gap in design. This prevents the nozzle surface 17 of the head unit 1 from interfering with other components before the height measurement. From this state, with the movement of the head unit 1, the laser measurement device 34 is moved directly below the head unit 1 to measure the height of the functional liquid droplet ejection head 3.

  Specifically, the nozzle plate 16 of each functional liquid droplet ejection head 3 in the head unit 1 set to be larger than the work gap at the time of actual drawing (actually, a height of about 1.45 mm from the inspection sheet S). Measure the height of each of the central part and four corners in total (pre-height measurement). Thereby, the inclination of the pitching direction and the yawing direction of each functional liquid droplet ejection head 3 mounted on the head unit 1 is detected, and an abnormal height is detected. Next, with respect to the head unit 1 in which no abnormality is detected, the functional liquid droplet ejection head 3 at the lowest position in the pre-height measurement is set to the height of the actual drawing work gap (in practice, from the inspection sheet S). 0.3mm) to adjust. Then, the heights of the five central portions and four corners of the nozzle plate 16 are measured for each of the 12 functional liquid droplet ejection heads 3 (post height measurement), and final confirmation is performed.

  Here, with reference to FIG. 9 and FIG. 10, the laser measuring device 34 for measuring the work gap and the calibration jig 35 for calibrating the internal scale of the laser measuring device 34 will be described in detail.

  The laser measuring device 34 is a so-called interferometer that divides the light emitted from the light source, passes through different optical paths, and then superimposes again, captures the interference fringes generated by the optical path difference, analyzes this, and measures the distance. is there. The laser measuring device 34 is provided on the side of the first slider 56 via a laser fixing plate, and irradiates the calibration jig 35 fixed downward with laser light from below. The work gap, more specifically, the height of the nozzle surface 17 is measured.

  The calibration jig 35 is fixed to the front end portion of the mounting plate 81 formed in an L shape in front view, the ZY adjustment mechanism 82 disposed at the end portion of the mounting plate 81, and the ZY adjustment mechanism 82, as described above. A calibration jig main body 83 that calibrates the internal scale of the laser measuring device 34, and the column 43 is arranged on the support plate 43 via the mounting plate 81 so as to be positioned on the movement trajectory of the laser measuring device 34 in the Y-axis direction. It is screwed to the side.

  The mounting plate 81 includes a fixing portion 84 formed in a substantially square plate shape, and a jig support portion that extends from a part of the fixing portion 84 and to which the calibration jig main body 83 is attached via the ZY adjustment mechanism 82. 85 and are integrally formed. At the four corners of the fixing portion 84, hexagon socket head cap screws 86 for screwing the mounting plate 81 to the column 43 are provided. In addition, a Z-axis slide guide 87 (for example, an LM guide) for guiding a Z-axis slide plate 101 (described later) in the Z-axis direction is provided on the surface of the jig support portion 85.

  The ZY adjustment mechanism 82 slightly moves the calibration jig body 83 in the Z-axis direction and positions it, and the Z-axis adjustment mechanism 91 moves the calibration jig body 83 in the Y-axis direction and positions it. And is composed of.

  The Z-axis adjusting mechanism 91 is attached to a Z-axis slide plate 101 having a T-shaped cross section provided on the jig support portion 85 and a Z-axis bracket 102 extending from the jig support portion 85. And a Z-axis micro head 103 that moves the head up and down in the Z-axis direction. The Z-axis slide plate 101 is configured to be slidable in the Z-axis direction via the Z-axis slide guide 87 while bringing one surface into contact with one side surface of the mounting plate 81. On the Z-axis slide plate 101, a Y-axis slide guide 104 (for example, an LM guide) for guiding a slide of a Y-axis slide plate 111 described later is provided.

  The Y-axis adjusting mechanism 92 is attached to a Y-axis slide plate 111 having a substantially T-shaped cross section provided on the Z-axis slide plate 101 and a Y-axis bracket 112 extending from the Z-axis slide plate 101. And a Y-axis microhead 113 that moves forward and backward in the Y-axis direction. The Y-axis slide plate 111 has a rib portion 114 that extends greatly in the X-axis direction, and a calibration jig body 83 provided downward at the tip of the Y-axis slide plate 111 can be slid freely via the Y-axis slide guide 104. I support it. In this case, the calibration jig body 83 is positioned near the height (work gap) at which the head unit 1 discharges the functional liquid onto the inspection sheet S by the Z-axis adjustment mechanism 91 and the Y-axis adjustment mechanism 92, and The laser measuring device 34 is positioned with high accuracy at the position where the laser measuring device 34 faces. In addition, the code | symbol 141 in a figure is a set screw which fixes the ZY adjustment mechanism 82 after position adjustment to the attachment board 81. FIG.

  The calibration jig body 83 includes a first dummy plate 123 that constitutes a first dummy nozzle surface 121 serving as a first measurement surface for calibrating the internal scale of the laser measuring device 34, and a second measurement surface serving as a second measurement surface. The second dummy plate 124 that constitutes the two dummy nozzle surfaces 122 and the plate holder 125 that supports the dummy plates 123 and 124 with a stepped portion having a calibration reference dimension d exceeding the work gap.

  The first dummy plate 123 is composed of two first plates 126, 126, and a rectangular nozzle plate 16 constituting the nozzle surface 17 of the functional liquid droplet ejection head 3 is used for each first plate 126. It has been. In this case, one of the first plates 126 is one having the above-mentioned eutectoid plating on its surface, and the other first plate 126 is one having the above-mentioned coating on its surface. It is used. In other words, the functional liquid droplet ejection head 3 to be inspected (measured) is selectively used according to the form of surface treatment of the nozzle plate 16.

  Similarly, the second dummy plate 124 includes two second plates 127 and 127, and each second plate 127 has a rectangular nozzle plate that forms the nozzle surface 17 of the functional liquid droplet ejection head 3. 16 is used. Also in this case, one second plate 127 having the surface coated with the above eutectoid plating is used, and the other second plate 127 having the surface coated with the above coating. Is used. As a result, the internal scale of the laser measuring device 34 is calibrated under the same physical conditions as when the actual height of the head unit 1 is adjusted.

  The calibration jig body 83 includes two first pressing plates 128 that collectively hold the two first plates 126 against the plate holder 125 and two second plates 127 that are attached to the plate holder 125. And a second pressing plate 129 that presses and holds them collectively. Each of the first pressing plate 128 and the second pressing plate 129 is formed with two window-shaped through openings 130 for measurement by the laser measuring device 34. Both pressing plates 128 and 129 are screwed to the plate holder 125 so that the dummy plates 123 and 124 are parallel (horizontally) to the inspection sheet S, respectively. As a result, the calibration reference dimension d can be maintained with high accuracy, and the internal scale can be calibrated more accurately.

  Next, a method for calibrating the internal scale of the laser measuring device 34 using the calibration tool 45 will be described. After positioning the calibration jig body 83 at the height of the work gap by the ZY adjustment mechanism 82, the first dummy plate 123 is passed through the through opening 130 in a state where the laser measuring device 34 faces directly below the first dummy nozzle surface 121. First distance (first distance) is measured. Then, the laser measuring device 34 is finely moved directly below the second dummy plate 124 to measure the second distance (second distance) from the through opening 130 to the second dummy nozzle surface 122 (distance measuring step). .

  Next, the dummy distance is calculated by dividing the second distance (first distance) from the first distance (second distance) (dummy distance calculation step). Finally, the internal scale of the laser measuring device 34 is calibrated so that the dummy dimension is the same as the calibration reference dimension d described above (scale calibration step). The calibration reference dimension d in the embodiment is 1.0 mm (work gap is 0.3 mm).

  According to the above configuration, the calibration jig body 83 is disposed so as to be positioned in the vicinity of the height (work gap) at which the head unit 1 discharges the functional liquid onto the inspection sheet S. The distance and the measurement distance of the calibration jig 35 are not extremely different from each other, and the environmental conditions based on the measurement distance at the time of actual measurement and the calibration can be substantially matched. Moreover, since the calibration reference dimension d is a dimension that exceeds the work gap, the internal scale for measuring the work gap can be calibrated with high accuracy.

  Next, a droplet discharge device (drawing device) 150 on which the calibration jig 35 of the laser measuring device 34 is mounted will be described with reference to FIG. The droplet discharge device 150 is incorporated in a flat panel display production line. For example, the droplet discharge device 150 uses the above-described function droplet discharge head 3 into which a special ink or a functional liquid that is a light-emitting resin liquid is introduced. A light emitting layer to be each pixel of the EL device, a filter element of a color filter, and the like are formed.

  The droplet discharge device 150 is disposed on an X-axis support base 152 supported by a stone surface plate, extends in the main scanning direction (X-axis direction), and moves the substrate (workpiece) K in the X-axis direction. And a pair of Y-axis support bases 155 spanned across the X-axis table 153 via a plurality of support columns 154 and extend in the sub-scanning direction (Y-axis direction). The Y-axis table 156 and the ten carriage units 157 on which the above-described functional liquid droplet ejection heads 3 are mounted. The ten carriage units 157 are suspended from the Y-axis table 156 so as to be movable. ing. Further, the droplet discharge device 150 includes a chamber 159 that accommodates these devices in an atmosphere in which temperature and humidity are controlled, a functional liquid supply unit 158 that supplies the functional liquid to the functional droplet discharge head 3, and a device. And a control device (not shown) for overall control. By discharging the functional liquid droplet ejection head 3 in synchronization with the driving of the X-axis table 153 and the Y-axis table 156, the functional liquids of R, G, and B colors supplied from the functional liquid supply unit 158 are ejected, A predetermined drawing pattern is drawn on the substrate K.

  The droplet discharge device 150 includes a maintenance device 161 (a flushing unit 162, a suction unit 163, a wiping unit 164, and a discharge performance inspection unit 165), and a laser measurement device 34 that measures a work gap between the functional droplet discharge heads 3. And a calibration jig 35 for calibrating the internal scale of the laser measuring device 34 is provided. In the droplet discharge device 150 of the embodiment, after the height adjustment of the functional droplet discharge head 3 is performed by the laser measuring device 34, the carriage unit 157 is placed in a drawing area where the X-axis table 153 and the Y-axis table 156 intersect. Then, drawing on the substrate K is performed, and the carriage unit 157 is exposed to the maintenance area where the Y-axis table 156 and the maintenance device 161 intersect, and the function of the functional liquid droplet ejection head 3 is maintained / recovered.

  The X-axis table 153 sucks and sets the substrate K, and has a set table having a mechanism that can be corrected in the θ-axis direction, an X-axis first slider that slidably supports the set table in the X-axis direction, and the flushing described above. An X-axis second slider 171 that slidably supports the unit 162 and the stage unit in the X-axis direction, and extends in the X-axis direction, and moves the X-axis first slider and the X-axis second slider 171 in the X-axis direction. A pair of left and right X-axis linear motors (both not shown) and the above-described laser measuring device 34 are provided on the X-axis second slider 171.

  The Y-axis table 156 includes 10 bridge plates each having 10 carriage units 157 suspended therein, 10 sets of Y-axis sliders that support the 10 bridge plates by both ends, and a pair of Y-axis support bases 155. And a pair of Y-axis linear motors (both not shown) for moving the bridge plate in the Y-axis direction. Further, the calibration jig 35 is fixedly provided on the movement locus of the laser measuring device 34 of the Y-axis table 156. Further, the Y-axis table 156 causes the functional liquid droplet ejection head 3 to face the maintenance device 161 in addition to sub-scanning the functional liquid droplet ejection head 3 during drawing via each carriage unit 157. The ten carriage units 157 are configured to be individually movable in the Y-axis direction.

  The ten carriage units 157 suspended from the Y-axis table 156 have the same configuration, and each carriage unit 157 supports the head unit 1 and the head unit 1 in a θ-rotatable manner. A rotation mechanism, and a suspension member with a lifting mechanism for supporting the head unit 1 on the Y-axis table 156 via a θ rotation mechanism. In addition, each carriage unit 157 is provided with a sub tank unit 173 containing three sub tanks connected to the above three sets of tank units 172 above the carriage unit 157, and each functional liquid droplet is utilized from the sub tank using natural water head. A functional liquid is supplied to the ejection head 3.

  The droplet discharge device 150 configured as described above uses the functional droplet discharge head 3 whose height is adjusted to the work gap by the laser measuring device 34, and appropriately adjusts the function droplet discharge head 3 by the maintenance device 161. A maintenance process is performed, and a drawing process is performed on the substrate K by the droplet discharge device 150. In other words, the droplet discharge device 150 moves the substrate K forward in the X-axis direction by the X-axis table 153 and selectively drives the functional droplet discharge head 3 in synchronization with this, so that the functional liquid for the substrate K is Main scanning is performed. After the head unit 1 is sub-scanned in the Y-axis direction by the Y-axis table 156, the substrate K is moved back in the X-axis direction, and the functional liquid droplet ejection head 3 is selectively driven in synchronization with this. Thus, the main scanning is performed again. By repeating the main scanning accompanying the reciprocating motion of the substrate K and the sub-scanning of the head unit 1 a plurality of times, predetermined drawing is performed on the substrate K.

It is an external appearance perspective view of a head unit. It is an external appearance perspective view of a functional droplet discharge head. It is an external appearance perspective view of a drawing inspection apparatus. It is a side view of a drawing inspection apparatus. It is an external appearance perspective view of a Y-axis table. It is a top view of an alignment mask. It is explanatory drawing (1) which shows the procedure of the inspection method of discharge performance. It is explanatory drawing (2) which shows the procedure of the inspection method of discharge performance. It is explanatory drawing when calibrating the internal scale of a laser measuring device with a calibration jig. It is an external appearance perspective view of a calibration jig. It is a perspective view of a droplet discharge device.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 3 ... Functional droplet discharge head 16 ... Nozzle plate 17 ... Nozzle surface 34 ... Laser measuring device 35 ... Calibration jig 65 ... Suction table 121 ... 1st dummy nozzle surface 122 ... 2nd dummy nozzle surface 123 ... 1st dummy plate 124 ... 2nd dummy plate 125 ... Plate holder 128 ... 1st press plate 129 ... 2nd press plate 156 ... Y-axis table d ... Calibration standard dimension S ... Inspection sheet

Claims (6)

A calibration jig for a laser measuring device for measuring a work gap between a work set horizontally and a nozzle face of an inkjet head that faces the work in parallel from above and performs drawing on the work, In what is arranged according to the height position of the work gap,
A first dummy nozzle surface serving as a first measurement surface for calibration and a second dummy nozzle surface serving as a second measurement surface for calibration;
The calibration of the laser measuring apparatus, wherein the first dummy nozzle surface and the second dummy nozzle surface are arranged in parallel with each other and with a step having a calibration reference dimension exceeding the work gap. jig.   2. The laser treatment apparatus calibration treatment according to claim 1, wherein the first dummy nozzle surface and the second dummy nozzle surface are each subjected to the same surface treatment as the nozzle surface of the inkjet head. Ingredients. A first dummy plate on which the first dummy nozzle surface is formed;
A second dummy plate on which the second dummy nozzle surface is formed;
A plate holder for holding the first dummy plate and the second dummy plate,
2. The calibration jig for a laser measuring apparatus according to claim 1, wherein the first dummy plate and the second dummy plate are formed of a head plate that forms a nozzle surface of an inkjet head. A first pressing plate that presses and holds the first dummy plate on the plate holder and has a through opening for measurement;
The calibration of the laser measuring device according to claim 3, further comprising: a second pressing plate that presses and holds the second dummy plate on the plate holder and has a through opening for measurement. jig. A method for calibrating a laser measuring device performed using the calibration jig for a laser measuring device according to any one of claims 1 to 4,
A first distance to the first dummy nozzle surface is measured and a second distance to the second dummy nozzle surface is measured with a relative horizontal movement of the laser measuring device with respect to the calibration jig. A distance measurement process;
An inter-dummy distance calculating step for calculating an inter-dummy dimension which is a difference between the measured first distance and the second distance;
And a scale calibration step of calibrating an internal scale of the laser measuring apparatus so that the calculated inter-dummy dimension is the same as the calibration reference dimension. A calibration jig for a laser measuring device according to any one of claims 1 to 4,
The inkjet head for drawing on the workpiece;
A work table for setting the work horizontally;
Moving means for moving the work via the work table,
The laser measuring device is mounted on the moving means,
The drawing apparatus, wherein the calibration jig is fixedly arranged on a movement locus of the laser measuring device by the moving means.

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