JP2009279531A - Drawing inspection device, and drawing inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a drawing inspection apparatus which carries out ejection performance inspection of a functional liquid droplet ejection head using an alignment mask in a short period of time and with accuracy. <P>SOLUTION: The drawing inspection device for inspecting ejection performance of the functional liquid droplet ejection head 3 by ejecting from the functional liquid ejection head 3 and depositing comprises the alignment mask having a deposition mark which is a standard position of functional liquid droplets, an inspection sheet S which is transparent, is disposed lapping over on the upper face of the alignment mask, and on which the functional liquid droplets ejected for inspection are deposited; a head control means which has the functional liquid droplet ejection head 3 approach on the inspection sheet S, and brings the sheet in line with the deposition mark to eject and deposit functional liquid on the inspection sheet S; an image recognition means recognizing in bulk the deposition mark in the lapped state together with a deposited dot D ejected and deposited onto the inspection sheet S; an ejection performance evaluation means evaluating the ejection performance of the functional liquid ejection head 3 based on a recognition result by the image recognition means. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a drawing inspection apparatus and a drawing inspection method for inspecting the ejection performance of a functional liquid droplet ejection head by ejecting and landing a functional liquid from an ink jet type functional liquid droplet ejection head.

Conventionally, as this type of drawing inspection apparatus (landing position inspection apparatus), the ejection performance of a plurality of functional liquid droplet ejection heads is collectively examined in units of a head unit in which a plurality of functional liquid droplet ejection heads are mounted on a carriage. There is a known one (see Patent Document 1). The drawing inspection apparatus includes a main carriage on which a head unit including a plurality of functional liquid droplet ejection heads is detachably mounted, a head moving system that moves the plurality of functional liquid droplet ejection heads via the main carriage, and a head Alignment unit for unit alignment, two drawing observation cameras for imaging the landing results discharged from the functional droplet discharge head onto the inspection substrate, and the reference position and reference landing position of multiple functional droplet discharge heads An alignment mask having a plurality of marks and a control device for controlling each component device. In this drawing inspection apparatus, first, an alignment mask is attached to the main carriage, and the reference position and reference landing position of the alignment mask are recognized by the alignment camera. Next, the head unit is incorporated in the main carriage instead of the alignment mask, and the head unit is aligned by the alignment camera. Thereafter, the inspection liquid (solvent of the functional liquid) is discharged from all the discharge nozzles of the functional liquid droplet discharge head onto the inspection substrate, and the landing result is recognized by the drawing observation camera. Then, by comparing the landing result and the reference landing position, the assembly accuracy of the functional liquid droplet ejection head, the ejection failure, and the like are determined.
JP 2007-152255 A

  In such a conventional drawing inspection apparatus, it is necessary to remove the alignment mask from the main carriage and attach a head unit (functional liquid droplet ejection head) after recognizing the reference landing position of the alignment mask. It took time. Moreover, in addition to imaging all the landing results of all the discharge nozzles on the inspection board using a camera, it is necessary to perform position recognition of the reference landing position and position recognition of the landing result as separate steps. In terms of inspection, it took time.

  It is an object of the present invention to provide a drawing inspection apparatus and a drawing inspection method capable of performing a discharge performance inspection of a functional liquid droplet discharge head performed using an alignment mask in a short time and with high accuracy.

  A drawing inspection apparatus of the present invention is a drawing inspection apparatus that inspects the discharge performance of a functional liquid droplet ejection head by ejecting and landing a functional liquid from an ink jet type functional liquid droplet ejection head. An alignment mask that is marked with a landing mark that serves as a reference landing position for the functional liquid droplets, and a transparent inspection sheet that is disposed on the upper surface of the alignment mask and on which the functional liquid droplets that are ejected from the functional liquid droplet ejection head land. , The functional liquid droplet ejecting head is exposed to the inspection sheet, and the head control means for ejecting and landing the functional liquid on the inspection sheet in accordance with the landing mark, and the overlapping landing mark and the inspection sheet are ejected and landed. And image recognition means for collectively recognizing the positions of the landing dots.

  In this case, it is preferable to further include an ejection performance evaluation unit that evaluates the ejection performance of the functional liquid droplet ejection head based on the recognition result by the image recognition unit.

  According to these configurations, since the inspection discharge is performed in accordance with the landing mark (reference landing position), the landing mark and the landing dot (actual landing position) inherently overlap each other. For this reason, the position recognition process can be performed collectively, and it is not necessary to recognize the positions of the landing marks and the landing dots separately. As a result, the inspection is not complicated, and the discharge inspection time for the functional droplet discharge head can be shortened. In addition, since the landing dot to be compared is superimposed on the landing mark, it is possible to directly compare the landing mark and the landing dot, and whether or not there is a shift in the landing position easily and accurately. The position can be recognized.

  On the other hand, the image recognition means is further calibrated and further provided with a head recognition means for recognizing the position of the functional liquid droplet ejection head in order to align the functional liquid droplet ejection head facing the inspection sheet. preferable.

  According to this configuration, the positional relationship between the image recognition unit and the head recognition unit is accurately set, and the functional liquid droplet ejection head can be positioned at the set position. For this reason, the position of the landing mark of the alignment mask and the discharge nozzle of the functional liquid droplet discharge head can be accurately aligned, and the accuracy of the discharge inspection can be increased.

  In this case, it is preferable that the alignment mask is provided with a head calibration mark for calibrating the head recognition means at a position where the position of the functional liquid droplet ejection head is recognized.

  According to this configuration, the position recognition of the functional liquid droplet ejection head and the alignment mask by the head recognition unit can be performed without moving the head recognition unit. Thereby, the positional relationship among the functional liquid droplet ejection head, the alignment mask, and the head recognition unit can be accurately grasped in the same area, and the alignment of the functional liquid droplet ejection head and the calibration of the head recognition unit can be performed in a short time. And can be done easily. When the depth of field is deep, the position recognition of the functional liquid droplet ejection head and the alignment mask can be performed simultaneously.

  In addition, it is preferable that the apparatus further includes a sheet supply unit having a supply reel for feeding the inspection sheet onto the alignment mask and a take-up reel for winding the inspection sheet on the alignment mask.

  According to this configuration, a new inspection sheet can be set on the alignment mask by winding up the used inspection sheet after completion of the discharge inspection. Therefore, it is possible to easily perform the work for removing the inspection sheet, and it is also possible to easily automate the sheet supply.

  Similarly, it further comprises a mask table on which the alignment mask is positioned and set, and a sheet suction means for sucking the inspection sheet onto the alignment mask. The sheet suction means includes a plurality of suction holes formed in the alignment mask, It is preferable to have a suction channel that is formed in the mask table and communicates with the plurality of suction holes, and a vacuum suction means that communicates with the suction channel.

  According to this configuration, the inspection sheet can be prevented from being displaced and lifted by fixing the inspection sheet on the alignment mask. For this reason, the space | interval (work gap) between a test | inspection sheet and the nozzle surface of a functional droplet discharge head can be maintained appropriately, and test | inspection discharge can be performed appropriately.

  Further, in this case, the sheet adsorbing means is provided in the suction air flow path and the compressed air supply means for floating the inspection sheet through a plurality of suction holes, and the flow path is switched between the vacuum suction means and the compressed air supply means. It is preferable to further include a flow path switching means.

  According to this configuration, when the inspection sheet is wound, the inspection sheet can be lifted from the alignment mask, and the inspection sheet can be smoothly wound. Further, it is possible to effectively prevent damage to the alignment mask surface due to contact between the inspection sheet and the alignment mask.

  The drawing inspection method of the present invention includes an alignment mask marked with a landing mark serving as a reference landing position of a functional liquid droplet by an ink jet type functional liquid droplet ejection head, and an upper surface of the alignment mask. A drawing inspection method for inspecting the ejection performance of the functional liquid droplet ejection head by ejecting and landing the functional liquid from the functional liquid droplet ejection head using a transparent inspection sheet on which the functional liquid droplets inspected and ejected from the head land In addition, an inspection discharge process for discharging and landing a functional liquid on the inspection sheet in accordance with the landing mark by the functional liquid droplet discharge head, and a landing dot that is overlapped and discharged and landed on the inspection sheet A recognition process for recognizing the position of the liquid droplets collectively, and an inspection process for evaluating the discharge performance of the functional liquid droplet discharge head based on the recognition result of the position recognition The features.

  According to this method, since the inspection discharge is performed in accordance with the landing mark, the landing mark and the landing dot are overlapped. As a result, the positions of the landing marks and the landing dots can be recognized collectively and a direct comparison can be made, so that the discharge inspection can be performed easily and accurately in a short time.

  Hereinafter, a discharge inspection apparatus equipped with a drawing inspection apparatus according to the present embodiment will be described with reference to the accompanying drawings. This discharge inspection apparatus inspects the discharge performance of a functional liquid droplet discharge head (discharge nozzle) using a functional liquid before being mounted on a drawing apparatus for manufacturing a color filter or the like. Specifically, in a state where a plurality of functional liquid droplet ejection heads are incorporated in the sub-carriage, the functional liquid is inspected and ejected from each functional liquid droplet ejection head, and the ejection performance such as the landing position and the flight curve is inspected. First, prior to the description of the drawing inspection apparatus, the head unit to be inspected will be described.

  As shown in FIG. 1, the head unit 1 includes a carriage 2 and twelve functional liquid droplet ejection heads 3 mounted on the carriage 2. The twelve functional liquid droplet ejection heads 3 are divided into left and right (Y-axis direction) six by six with respect to the carriage 2, and each head group composed of the six functional liquid droplet ejection heads 3 has R · G · They are arranged in the same arrangement pattern in the B color scheme and the step-like arrangement.

  The carriage 2 includes a main body plate 5 in which twelve mounting openings 4 for mounting twelve functional liquid droplet ejection heads 3 are formed, and a pair of reference pins P (see FIG. 7) projecting from the lower surface of the main body plate 5. (See (b)), a pair of left and right plate support members 6 attached to both short side portions of the main body plate 5, and the upper ends of the pair of plate support members 6, and a first of the discharge inspection apparatus 31 described later. And a head attachment plate 7 attached to the main carriage 43 (see FIG. 3 for all). The twelve functional liquid droplet ejection heads 3 are assembled to the main body plate 5 in an aligned state with the pair of reference pins P as a reference. Further, the tips of the pair of reference pins P are formed so as to be located on the same plane as the nozzle surface 17 of the functional liquid droplet ejection head 3.

  A pair of left and right pipe connection assemblies 8 with pressure regulating valves connected to the functional liquid droplet ejection head 3 are provided on the main body plate 5, and each of the pipe connection assemblies 8 supplies a functional liquid to the discharge inspection device 31. A pipe 45 is connected to the unit 45 (see FIG. 3). Further, a wiring connection assembly (not shown) with an intermediate substrate connected to the functional liquid droplet ejection head 3 is provided inside the head mounting plate 7, and each wiring connection assembly is controlled by a discharge inspection apparatus 31 described later. Wired to a computer (not shown).

  As shown in FIG. 2, the functional liquid droplet ejection head 3 is a so-called double ink jet head, which is a functional liquid introduction part 11 having two connection needles 14, and a double head connected to the functional liquid introduction part 11. A substrate 12 and a head main body 13 that discharges the functional liquid are provided below the head substrate 12 (see FIG. 2A).

  The functional liquid introduction part 11 has a pair of connecting needles 14 and is supplied with the functional liquid from the functional liquid supply unit 45 (see FIG. 3) via the pipe connection assembly 8 described above. The head main body 13 includes a double pump unit 15 composed of a piezoelectric element or the like, and a nozzle plate 16 having a nozzle surface 17 on which a plurality of discharge nozzles 19 are formed. A large number (a plurality) of discharge nozzles 19 formed on the nozzle surface 17 of the nozzle plate 16 are arranged in two rows (A row and B row) arranged in parallel with each other and shifted by a half nozzle pitch. 18 and each nozzle row 18 is composed of 180 discharge nozzles 19 arranged at an equal pitch (see FIG. 2B). Of the 180 discharge nozzles 19, 10 discharge nozzles 19 at the end of each row are dummy nozzles that are not used in actual drawing, and the discharge nozzles 19 sandwiched between the dummy nozzles are effective nozzles.

  The head substrate 12 is provided with two connectors 20, and each connector 20 is connected to the above-described wiring connection assembly (control computer) via a flexible flat cable (not shown). The drive waveform output from the control computer is applied to each pump unit 15 (piezoelectric element) via each connector 20, so that the functional liquid is discharged from each discharge nozzle 19.

  Next, with reference to FIG. 3 and FIG. 4, a discharge inspection apparatus 31 that inspects the discharge performance of the functional liquid droplet discharge head 3 (discharge nozzle 19) in units of one head unit will be described. The discharge inspection apparatus 31 includes a machine base 32, a stone surface plate 33 provided on the machine base 32, a drawing inspection apparatus 34 mounted on the entire surface of the stone surface plate 33 and mounted with the head unit 1, and a function. A maintenance unit (flushing device, wiping device and suction device) 35 for maintaining / recovering the function of the droplet discharge head 3, a material supply device 36 for supplying the head unit 1 to the drawing inspection device 34, a maintenance unit 35, and A common frame 37 that supports the material supply device 36, and is housed in a chamber device (not shown). The discharge inspection apparatus 31 is connected to a control computer that performs overall control of the entire apparatus, and the control computer is arranged outside the chamber apparatus. The discharge inspection device 31 mounts the head unit 1 supplied by the material supply device 36 on the drawing inspection device 34 and also performs a maintenance unit to perform discharge inspection of the mounted head unit 1 (functional droplet discharge head 3). The functional liquid is inspected and ejected while maintaining and recovering the function of the functional liquid droplet ejection head 3 by 35, and the landing position, the flight bend, etc. of the inspected and ejected functional liquid are examined.

  As shown in FIGS. 3 and 4, the drawing inspection device 34 is placed on the stone surface plate 33 and installed across the Y-axis table 41 and the Y-axis table 41 that constitutes the movement axis in the Y-axis direction. , An X-axis table 42 that constitutes a moving axis in the X-axis direction, a first main carriage 43 that slidably moves on the X-axis table 42 and that detachably mounts the head unit 1, and an X-axis table 42 Mounted on the second main carriage 46 slidably moving on the camera unit 44 having the two imaging cameras 93 and 93, and disposed on the lower side of the Y-axis table 41, the two under cameras 65, And a head recognition camera 55 (see FIG. 4). The head unit 1 is mounted on the X-axis table 42 in a posture in which the Y-axis direction is the main scanning direction.

  The drawing inspection apparatus 34 is mounted on the first main carriage 43 and mounted on the functional liquid supply unit 45 that supplies the functional liquid to the head unit 1 and the Y-axis table 41, and various reference marks are formed. The alignment mask M (see FIG. 4) and a transparent inspection sheet S (see FIG. 4) disposed on the alignment mask M are provided. In this drawing inspection apparatus 34, a region where the X-axis table 42 and the Y-axis table 41 intersect is a processing area. In this processing area, the camera unit 44 and the head recognition camera 55 are calibrated and functional droplets are used. The functional liquid is inspected and discharged by the ejection head 3 to perform the inspection (details will be described later).

  The X-axis table 42 has an X-axis linear motor that scans a pair of travel rails, and includes a first main carriage 43 that mounts the head unit 1, a second main carriage 46 that mounts a camera unit 44, Are individually slid in the X-axis direction. Further, the X-axis table 42 is supported by four pillars erected on the stone surface plate 33 and extends to a position facing the maintenance unit 35 across the Y-axis table 41. Thereby, the head unit 1 mounted on the first main carriage 43 is appropriately moved between the maintenance area located immediately above the maintenance unit 35 and the processing area, and the camera mounted on the second main carriage 46. The unit 44 is appropriately moved between the processing area and the standby area located on the opposite side of the maintenance area across the processing area.

  The first main carriage 43 is configured by incorporating a Z-axis table 95 and a θ table into a carriage frame 94 spanned between a pair of travel rails, and the head unit 1 is detachable under the θ table. keeping. Similarly, the second main carriage 46 is configured by incorporating a bracket into a second carriage frame 96 spanned between a pair of travel rails, and the camera unit 44 is detachably held below the bracket. is doing.

  The camera unit 44 includes two imaging cameras 93 and 93 and a camera support frame 97 that integrally holds these cameras downward (see FIG. 7). The camera support frame 97 is formed in a rectangular shape, and is held horizontally by the second carriage frame 96 via the bracket. The two imaging cameras 93 and 93 are held at both ends of the camera support frame 97 so as to be aligned in the X-axis direction. (See FIG. 7). The imaging cameras 93 and 93 can be finely adjusted in the X, Y, and Z axis directions by a fine adjustment mechanism (not shown) such as a microhead. Although not shown in particular, the illumination at the time of imaging by the imaging camera 93 employs epi-illumination.

  As shown in FIG. 4, the Y-axis table 41 includes a lower Y-axis table 53 and an upper Y-axis table 54 disposed on the lower Y-axis table 53. The lower Y-axis table 53 is mainly used when the alignment mask M and the inspection sheet S are slightly moved, and the upper Y-axis table 54 is mainly used when the alignment mask M and the inspection sheet S are largely moved. Used for replacement and maintenance.

  The lower Y-axis table 53 is provided on the pair of left and right table bases 61 that are directly supported on the stone surface plate 33 so as to extend in the Y-axis direction, and the pair of table bases 61 that extend in the Y-axis direction. A first guide rail 62; a Y-axis linear motor 63 provided on one table base 61; and a first slider 64 slidably moved on the first guide rail 62 by the Y-axis linear motor 63. ing. The head recognition camera 55 (two under cameras 65 and 65) is arranged on the stone surface plate 33 between the pair of table bases 61 so as to be arranged in the Y-axis direction.

  The two under cameras 65, 65 constituting the head recognition camera 55 are positions where the pair of reference pins P in the head unit 1 facing the top right of the inspection sheet S for inspection ejection can be simultaneously taken into their respective fields of view. It is fixed upward. In this case, the head recognition camera 55 (the two under cameras 65 and 65) is calibrated by the alignment mask M, and the pair of reference pins is used for the alignment of the head unit 1 prior to the inspection discharge. Recognize the position of P. Each under camera 65 has a shallow depth of field, and is moved up and down between a lowered imaging position when imaging the alignment mask M and an elevated imaging position when imaging the reference pin P. A lifting mechanism is incorporated. In addition, when using a camera with a deep depth of field, an elevating mechanism is unnecessary.

  The upper Y-axis table 54 is provided on the first slider 64 and includes a pair of second guide rails 71 extending in the Y-axis direction, and a Y-axis rodless cylinder 72 provided outside the pair of second guide rails 71. And a plate-like second slider 73 that is slidably moved on the second guide rail 71 by the Y-axis rodless cylinder 72.

  On the second slider 73, a mask table 74 holding an alignment mask M on which various reference marks are formed is disposed. On the second slider 73, a sheet supply device 87 for supplying the inspection sheet S onto the alignment mask M is disposed so as to be supported on both sides of the mask table 74. The first slider 64, the second slider 73, and the mask table 74 have a pair of camera holes 66 for imaging (position recognition) the alignment mask 46 and the head unit 1 at positions where the pair of under cameras 65 face. Is formed.

  As shown in FIG. 5, the alignment mask M is formed in a plate shape with transparent quartz glass, and a pair of upper and lower under camera reference marks Ma serving as a calibration reference for the two under cameras 65 and 65, and two A pair of left and right imaging camera reference marks Mb that serve as calibration standards for the imaging cameras 93 and 93, and a plurality of ejection reference marks Mc that serve as references for landing positions for inspecting the functional liquid ejected from the head unit 1. Have. The under camera reference mark Ma also serves as a reference mark for the alignment mask M and coincides with the reference pin P of the head unit 1. The ejection reference mark Mc is a position at which the landing dot D should land when the 12 functional liquid droplet ejection heads 3 mounted on the carriage 2 eject functional liquid (actually, the total ejection in the head unit 1). (Position of nozzle 19). In the alignment mask M, a plurality of suction holes Ha are formed at equal pitches in the XY axis directions at positions where the inspection sheet S is sucked and fixed onto the alignment mask M by a vacuum suction device 84 described later (FIG. 6). reference).

  As shown in FIG. 6, the mask table 74 is formed to be slightly larger than the alignment mask M, and the alignment mask M is set in a centered state in the center. The mask table 74 includes a mask table body 82 having a pair of air chambers 81 therein, a suction plate 83 disposed immediately above each air chamber 81, and a vacuum suction device that sucks air inside each air chamber 81. 84 and a compressed air supply device 85 for supplying compressed air into each air chamber 81. Each air chamber 81 is connected to the vacuum suction device 84 and the compressed air supply device 85 by an air tube 88 with a flow path switching valve 86 interposed therebetween. In FIG. 6, the setting mechanism for setting the alignment mask M on the mask table 74 in a positioned state is omitted.

  A plurality of communication holes Hc communicating with the air chambers 81 are formed on the surface of the suction plate 83, and a pair of left and right suction grooves Hb are formed so as to include the plurality of communication holes Hc. The pair of left and right suction grooves Hb communicate with a plurality of suction holes Ha formed in the alignment mask M and distributed in a matrix. That is, the mask table 74 sucks and holds the inspection sheet S through the pair of left and right suction grooves Hb of the suction plate 83 and the plurality of suction holes Ha of the alignment mask M. Note that the number of the suction holes Ha and the communication holes Hc and the form of the suction grooves Hb are arbitrary, and these are schematically shown in FIG.

  On the other hand, the sheet supply device 87 for supplying the inspection sheet S onto the alignment mask M winds up the feeding reel 87a that feeds the wound inspection sheet S and the inspection sheet S that is fed from the feeding reel 87a onto the alignment mask M. A take-up reel 87b and a motor (not shown) for driving the take-up reel 87b are provided. The supply reel 87a and the take-up reel 87b (both refer to FIG. 4) are arranged along the Y-axis direction on both ends of the mask table 74 in the X-axis direction. When the inspection sheet S is taken up by the take-up reel 87b, the feeding reel 87a is fed out with a tension (back tension) applied to the inspection sheet S by a braking mechanism (not shown) incorporated therein. It has become.

  In winding (feeding out) the inspection sheet S by the sheet supply device 87, the flow path switching valve 86 is switched from the vacuum suction device 84 side to the compressed air supply device 85 side to supply compressed air. Then, the inspection sheet S slightly floats from the surface of the alignment mask M, and the inspection sheet S is smoothly wound without contacting the alignment mask M. Thereby, damage to the surface of the alignment mask M due to contact between the inspection sheet S and the alignment mask M can be effectively prevented. In this way, a new portion of the inspection sheet S is supplied to the surface of the alignment mask M. Here, the flow path switching valve 86 is switched from the compressed air supply device 85 side to the vacuum suction device 84 side, and the inspection sheet S is adsorbed and fixed to the surface of the alignment mask M. Thereby, it is possible to prevent the displacement and lifting of the inspection sheet S, and the head unit 1 that has moved directly above the inspection sheet S for inspection discharge has the nozzle surface 17 of each functional liquid droplet discharge head 3 thereof. It is possible to maintain the same work gap (sheet gap) as when drawing with a drawing apparatus outside the figure.

  In order to suppress wasteful consumption of the inspection sheet S, a plurality of sets of ejection patterns Da, which are the landing results of the head unit 1, are discharged while being displaced, and the tact feed of the inspection sheet S is performed. It may be. In such a case, a plurality of sets of ejection reference marks Mc are also formed on the alignment mask M so as to be misaligned.

  Next, with reference to FIGS. 7 to 9, a discharge performance inspection method using the discharge inspection apparatus 31 will be described. This discharge inspection method is to inspect the discharge landing positions and flight bends of the twelve functional liquid droplet discharge heads 3, a calibration process for calibrating the camera unit 44 and the head recognition camera 55, and a transparent inspection. An inspection and discharge step of inspecting and discharging the functional liquid at a position (scheduled landing position) where the landing dot D should land on the sheet S; a recognition step of simultaneously recognizing the position of the landing dot D and the discharge reference mark Mc of the alignment mask M; And an inspection process for evaluating the ejection performance of the plurality of ejection nozzles 19 by analyzing the acquired image data of the landing dots D and the ejection reference marks Mc.

  As shown in FIG. 7A, in the calibration process, the two imaging cameras 93 and 93 and the two under cameras 65 and 65 are calibrated. In this calibration, the camera unit 44 is moved immediately above the alignment mask M (processing area), and each imaging camera 93 recognizes the position of the pair of imaging camera reference marks Mb on the alignment mask M. At the same time, the position of the pair of under camera reference marks Ma is recognized using each under camera 65 at the lowered imaging position. With these position recognitions, calibration on the data of the pair of imaging cameras 93 and the pair of under cameras 65 is performed.

  As shown in FIG. 7B, in the inspection / ejection process, first, the first main carriage 43 on which the head unit 1 is mounted is processed by the X-axis table 42 instead of the camera unit 44 for which the calibration has been completed. Let it face the area. Next, the two under cameras 65 and 65 are raised to the raised imaging position, and the position of the pair of reference pins P of the head unit 1 is recognized. Based on the recognition result, the head unit 1 is aligned by the cooperation of the X-axis table 42 and the θ table of the first main carriage 43. By this alignment, the position at which the landing dot D in the functional liquid droplet discharge head 3 should land (the position of the discharge nozzle 19) can be matched with the discharge reference mark Mc of the alignment mask M to perform inspection discharge. When the alignment is completed, the functional liquid is inspected and ejected from all the ejection nozzles 19 of the all-function liquid droplet ejection head 3 (only the effective nozzles described above may be inspected and ejected). The landing dots D that have landed on the inspection sheet S on the alignment mask M essentially match the ejection reference marks Mc. That is, the landing dot D to be compared overlaps the ejection reference mark Mc. This inspection discharge is performed by one shot or a plurality of shots at each discharge nozzle 19.

  Next, as shown in FIG. 7C, in the recognition process, the X-axis table 42 replaces the first main carriage 43 with the camera unit 44 (two imaging cameras 93 and 93) again in the processing area. Let us face you. Each of the imaging cameras 93 images the landing dot D on the inspection sheet S, and simultaneously images the ejection reference mark Mc of the alignment mask M through the transparent inspection sheet S. Specifically, as shown in FIG. 8, the X-axis table 42 and the lower Y-axis table 53 are appropriately driven. First, the upper nozzle row (A row) of the functional liquid droplet ejection head 3 positioned on the lower side in the drawing. The ejection reference mark Mc (landing dot D) corresponding to 18 is moved from the left side to the right side in the drawing to pick up an image (actually, the landing dot D is in units of 8). After moving all the way to the right side in the drawing, it moves to the lower side in the drawing, and the ejection reference mark Mc (landing dot D) corresponding to the lower nozzle row (B row) 18 is moved from the right side to the left side in the drawing and imaged. This time, a plurality of ejection reference marks Mc (landing dots D) positioned on the upper side are imaged. By repeating this six times, the landing dots D of all the ejection nozzles 19 and all the ejection reference marks Mc of the alignment mask M are imaged by the two imaging cameras 93 and 93. The captured image data of the landing dot D and the ejection reference mark Mc are stored in the control computer. Thus, since the inspection sheet S is transparent, not only the landing dots D on the inspection sheet S but also the ejection reference marks Mc below the same are imaged simultaneously by one recognition operation. Further, since the inspection sheet S is transparent, the boundary of the landing dot D and the ejection reference mark Mc can be clearly recognized even under incident illumination.

  In the subsequent inspection process, the discharge inspection (performance evaluation) of the discharge nozzle 19 is performed by performing image analysis on the image data of the landing dots D and the discharge reference marks Mc simultaneously captured and stored in the control computer. Specifically, as shown in FIG. 9, in the image data of the landing dot D and the discharge reference mark Mc taken simultaneously, the landing dot D and the discharge reference mark Mc match (see FIG. 9A). ), It is determined that the discharge nozzle 19 that has discharged the functional liquid normally discharges to the expected landing position. On the other hand, when the discharged functional liquid is out of the discharge reference mark Mc (see FIG. 9B), it is determined that the flight is bent, and when the landing dot D is small or not circular (FIG. 9C ))), It is determined as defective ejection, and when there is no landing dot D, it is determined as non-ejection. In FIG. 9, the ejection reference mark Mc is displayed as a circle that is slightly larger than the landing dot D for easy determination.

  According to the above configuration, since the inspection discharge is performed in accordance with the discharge reference mark Mc, the landing dot D to be compared overlaps the discharge reference mark Mc. As a result, the position recognition processing of the ejection reference mark Mc and the landing dot D can be performed simultaneously and the ejection time for the functional liquid droplet ejection head 3 is not complicated, and the inspection time can be shortened. Further, since the ejection reference mark Mc and the landing dot D overlap, a direct comparison is possible, and the presence / absence of the landing position shift can be easily and accurately recognized.

It is an external appearance perspective view of a head unit. It is a front and back external perspective view of a functional liquid droplet ejection head. It is an external appearance perspective view of a discharge inspection apparatus. It is the top view and side view which showed the Y-axis table typically. It is a top view of an alignment mask. It is an external appearance perspective view of an alignment mask and a mask table. It is the top view and side view which show the procedure of the calibration of each camera, and the alignment of a head unit. It is explanatory drawing which shows the imaging procedure of a discharge reference mark and a landing dot. It is explanatory drawing which shows the imaging result of a landing dot.

Explanation of symbols

  1: head unit, 3: functional liquid droplet ejection head, 34: drawing inspection device, 44: camera unit, 65: under camera, 84: vacuum suction device, 85: compressed air supply device, 86: flow path switching valve, 87 : Sheet supply device, 87a: Feeding reel, 87b: Take-up reel, 93: Imaging camera, D: Landing dot, M: Alignment mask, Ma: Under camera reference mark, Mb: Imaging camera reference mark, Mc: Discharge reference mark , S: Inspection sheet

Claims (8)

A drawing inspection apparatus for inspecting the ejection performance of the functional liquid droplet ejection head by ejecting and landing a functional liquid from an inkjet functional liquid droplet ejection head,
An alignment mask marked with a landing mark to be a reference landing position of a functional liquid droplet by the functional liquid droplet ejection head;
A transparent inspection sheet that is disposed on the upper surface of the alignment mask and on which the functional droplets ejected from the functional droplet ejection head land;
Head control means for causing the functional liquid droplet ejection head to face the inspection sheet and ejecting / landing the functional liquid on the inspection sheet in accordance with the landing mark;
A drawing inspection apparatus comprising: an image recognizing unit that collectively recognizes the landing marks and the landing dots discharged and landed on the inspection sheet in an overlapped state.   The drawing inspection apparatus according to claim 1, further comprising: a discharge performance evaluation unit that evaluates a discharge performance of the functional liquid droplet discharge head based on a recognition result by the image recognition unit.   The apparatus further comprises head recognition means that is calibrated with respect to the image recognition means and recognizes the position of the functional liquid droplet ejection head in order to align the functional liquid droplet ejection head facing the inspection sheet. The drawing inspection apparatus according to claim 1 or 2.   The drawing inspection apparatus according to claim 3, wherein the alignment mask is provided with a head calibration mark for calibrating the head recognition unit at a position where the functional liquid droplet ejection head is position-recognized. .   5. The sheet supply unit according to claim 1, further comprising: a feeding reel that feeds the inspection sheet onto the alignment mask; and a take-up reel that winds the inspection sheet on the alignment mask. The drawing inspection apparatus according to any one of the above. A mask table on which the alignment mask is positioned and set;
A sheet adsorbing means for adsorbing the inspection sheet on the alignment mask;
The sheet suction means includes a plurality of suction holes formed in the alignment mask;
A suction channel formed in the mask table and communicating with the plurality of suction holes;
The drawing inspection apparatus according to claim 1, further comprising a vacuum suction unit connected to the suction channel. The sheet suction means includes compressed air supply means for causing the inspection sheet to air through the plurality of suction holes;
The drawing inspection apparatus according to claim 6, further comprising: a channel switching unit that is interposed in the suction channel and switches the channel between the vacuum suction unit and the compressed air supply unit. . An alignment mask marked with a landing mark serving as a reference landing position of a functional liquid droplet by an ink jet type functional liquid droplet ejection head and an upper surface of the alignment mask are arranged to be inspected and ejected from the functional liquid droplet ejection head Using a transparent inspection sheet on which functional droplets land,
A drawing inspection method for inspecting the ejection performance of the functional liquid droplet ejection head by ejecting and landing a functional liquid from the functional liquid droplet ejection head,
An inspection and discharge step of discharging and landing a functional liquid on the inspection sheet in accordance with the landing mark by the functional liquid droplet discharge head;
A recognition step for collectively recognizing the position of the landing mark and the landing dots discharged and landed on the inspection sheet in an overlapped state;
A drawing inspection method comprising: an inspection step of evaluating discharge performance of the functional liquid droplet discharge head based on a recognition result of the position recognition.

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