JP2008034231A5 - - Google Patents

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Publication number
JP2008034231A5
JP2008034231A5 JP2006206210A JP2006206210A JP2008034231A5 JP 2008034231 A5 JP2008034231 A5 JP 2008034231A5 JP 2006206210 A JP2006206210 A JP 2006206210A JP 2006206210 A JP2006206210 A JP 2006206210A JP 2008034231 A5 JP2008034231 A5 JP 2008034231A5
Authority
JP
Japan
Prior art keywords
frame
electron microscope
gantry housing
alignment means
positioning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006206210A
Other languages
English (en)
Japanese (ja)
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JP2008034231A (ja
JP4855170B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006206210A priority Critical patent/JP4855170B2/ja
Priority claimed from JP2006206210A external-priority patent/JP4855170B2/ja
Publication of JP2008034231A publication Critical patent/JP2008034231A/ja
Publication of JP2008034231A5 publication Critical patent/JP2008034231A5/ja
Application granted granted Critical
Publication of JP4855170B2 publication Critical patent/JP4855170B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006206210A 2006-07-28 2006-07-28 電子顕微鏡装置 Expired - Fee Related JP4855170B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006206210A JP4855170B2 (ja) 2006-07-28 2006-07-28 電子顕微鏡装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006206210A JP4855170B2 (ja) 2006-07-28 2006-07-28 電子顕微鏡装置

Publications (3)

Publication Number Publication Date
JP2008034231A JP2008034231A (ja) 2008-02-14
JP2008034231A5 true JP2008034231A5 (https=) 2009-09-10
JP4855170B2 JP4855170B2 (ja) 2012-01-18

Family

ID=39123432

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006206210A Expired - Fee Related JP4855170B2 (ja) 2006-07-28 2006-07-28 電子顕微鏡装置

Country Status (1)

Country Link
JP (1) JP4855170B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0790217B2 (ja) * 1991-05-20 1995-10-04 チュラルテック株式会社 浄水器
JP5372787B2 (ja) * 2010-01-14 2013-12-18 株式会社日立ハイテクノロジーズ 電子顕微鏡
KR101914231B1 (ko) * 2012-05-30 2018-11-02 삼성디스플레이 주식회사 주사 전자 현미경을 이용한 검사 시스템
JP6118169B2 (ja) * 2013-04-25 2017-04-19 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP6353646B2 (ja) * 2013-11-07 2018-07-04 株式会社日立ハイテクノロジーズ 荷電粒子線装置及び当該装置を用いた試料の観察方法
JP6535811B2 (ja) * 2016-04-13 2019-06-26 株式会社日立ハイテクノロジーズ 荷電粒子線装置
JP7834121B2 (ja) * 2024-02-07 2026-03-23 日本電子株式会社 荷電粒子線装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6383756A (ja) * 1986-09-29 1988-04-14 Matsushita Electric Ind Co Ltd 現像装置
JPH08184529A (ja) * 1995-01-04 1996-07-16 Rohm Co Ltd 光半導体の発光検査装置
JP3652795B2 (ja) * 1996-07-05 2005-05-25 三菱重工業株式会社 電子ビーム真空容器
JP4184462B2 (ja) * 1997-11-21 2008-11-19 株式会社日立製作所 電子顕微鏡装置
JP4598255B2 (ja) * 2000-10-06 2010-12-15 オリンパス株式会社 クリーンカバー
JP2006079870A (ja) * 2004-09-08 2006-03-23 Hitachi High-Technologies Corp 荷電粒子線装置

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