JP2008020235A5 - - Google Patents

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Publication number
JP2008020235A5
JP2008020235A5 JP2006190256A JP2006190256A JP2008020235A5 JP 2008020235 A5 JP2008020235 A5 JP 2008020235A5 JP 2006190256 A JP2006190256 A JP 2006190256A JP 2006190256 A JP2006190256 A JP 2006190256A JP 2008020235 A5 JP2008020235 A5 JP 2008020235A5
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JP
Japan
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image information
reduced image
defect
reduced
inspection apparatus
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JP2006190256A
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English (en)
Japanese (ja)
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JP2008020235A (ja
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Priority to JP2006190256A priority Critical patent/JP2008020235A/ja
Priority claimed from JP2006190256A external-priority patent/JP2008020235A/ja
Publication of JP2008020235A publication Critical patent/JP2008020235A/ja
Publication of JP2008020235A5 publication Critical patent/JP2008020235A5/ja
Pending legal-status Critical Current

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JP2006190256A 2006-07-11 2006-07-11 欠陥検査装置及び欠陥検査方法 Pending JP2008020235A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006190256A JP2008020235A (ja) 2006-07-11 2006-07-11 欠陥検査装置及び欠陥検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006190256A JP2008020235A (ja) 2006-07-11 2006-07-11 欠陥検査装置及び欠陥検査方法

Publications (2)

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JP2008020235A JP2008020235A (ja) 2008-01-31
JP2008020235A5 true JP2008020235A5 (enExample) 2009-08-27

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ID=39076294

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JP2006190256A Pending JP2008020235A (ja) 2006-07-11 2006-07-11 欠陥検査装置及び欠陥検査方法

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JP (1) JP2008020235A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012169423A1 (ja) * 2011-06-07 2012-12-13 シャープ株式会社 パターン検査装置およびパターン検査方法
JP2015059855A (ja) * 2013-09-19 2015-03-30 セントラル硝子株式会社 欠陥検査方法及び欠陥検査装置
WO2016092783A1 (en) * 2014-12-12 2016-06-16 Canon Kabushiki Kaisha Information processing apparatus, method for processing information, discriminator generating apparatus, method for generating discriminator, and program
JP2016115331A (ja) * 2014-12-12 2016-06-23 キヤノン株式会社 識別器生成装置、識別器生成方法、良否判定装置、良否判定方法、プログラム
JP6591348B2 (ja) * 2016-06-03 2019-10-16 株式会社ニューフレアテクノロジー 検査方法
US10685432B2 (en) 2017-01-18 2020-06-16 Ricoh Company, Ltd. Information processing apparatus configured to determine whether an abnormality is present based on an integrated score, information processing method and recording medium
JP7332941B2 (ja) * 2019-06-06 2023-08-24 日本電信電話株式会社 画像処理装置、変換装置、画像処理方法、変換方法、及びプログラム
US12039716B2 (en) 2019-08-23 2024-07-16 Hitachi High-Tech Corporation Defect inspection method and defect inspection device
CN113688828B (zh) * 2021-07-23 2023-09-29 山东云海国创云计算装备产业创新中心有限公司 一种坏元识别方法及相关装置
CN118096753B (zh) * 2024-04-26 2024-08-06 陕西正鑫工程材料股份有限公司 基于图像处理的梯护笼成型组装缺陷识别方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0486956A (ja) * 1990-07-31 1992-03-19 Nippon Seiko Kk パターン検査装置
JP3415943B2 (ja) * 1994-09-29 2003-06-09 オリンパス光学工業株式会社 欠陥種別判定装置及びプロセス管理システム
JPH10160632A (ja) * 1996-10-04 1998-06-19 Advantest Corp 画像処理方法
JP3606430B2 (ja) * 1998-04-14 2005-01-05 松下電器産業株式会社 画像整合性判定装置
JP2006258713A (ja) * 2005-03-18 2006-09-28 Seiko Epson Corp シミ欠陥検出方法及び装置

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