JP2008014650A - 表面欠陥検査装置 - Google Patents

表面欠陥検査装置 Download PDF

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Publication number
JP2008014650A
JP2008014650A JP2006183157A JP2006183157A JP2008014650A JP 2008014650 A JP2008014650 A JP 2008014650A JP 2006183157 A JP2006183157 A JP 2006183157A JP 2006183157 A JP2006183157 A JP 2006183157A JP 2008014650 A JP2008014650 A JP 2008014650A
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JP
Japan
Prior art keywords
inspection
unit
control
surface defect
light
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Pending
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JP2006183157A
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English (en)
Japanese (ja)
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JP2008014650A5 (enrdf_load_stackoverflow
Inventor
Takehiro Takahashi
武博 高橋
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Olympus Corp
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Olympus Corp
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Application filed by Olympus Corp filed Critical Olympus Corp
Priority to JP2006183157A priority Critical patent/JP2008014650A/ja
Publication of JP2008014650A publication Critical patent/JP2008014650A/ja
Publication of JP2008014650A5 publication Critical patent/JP2008014650A5/ja
Pending legal-status Critical Current

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  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Closed-Circuit Television Systems (AREA)
JP2006183157A 2006-07-03 2006-07-03 表面欠陥検査装置 Pending JP2008014650A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006183157A JP2008014650A (ja) 2006-07-03 2006-07-03 表面欠陥検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006183157A JP2008014650A (ja) 2006-07-03 2006-07-03 表面欠陥検査装置

Publications (2)

Publication Number Publication Date
JP2008014650A true JP2008014650A (ja) 2008-01-24
JP2008014650A5 JP2008014650A5 (enrdf_load_stackoverflow) 2009-08-20

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Family Applications (1)

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JP2006183157A Pending JP2008014650A (ja) 2006-07-03 2006-07-03 表面欠陥検査装置

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JP (1) JP2008014650A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148876A1 (en) * 2008-05-29 2009-12-10 Kla-Tencor Corporation Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
KR101010497B1 (ko) * 2008-05-21 2011-01-21 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 시스템, 검사 장치 및 검사 방법
US9766187B2 (en) 2014-08-27 2017-09-19 Kla-Tencor Corp. Repeater detection
US9766186B2 (en) 2014-08-27 2017-09-19 Kla-Tencor Corp. Array mode repeater detection

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002027305A1 (fr) * 2000-09-26 2002-04-04 Olympus Optical Co., Ltd. Dispositif de detection de defauts
JP2003007786A (ja) * 2001-06-20 2003-01-10 Hitachi Ltd 半導体基板の検査方法およびその装置
JP2005077109A (ja) * 2003-08-29 2005-03-24 Olympus Corp 欠陥検査装置
JP2006170907A (ja) * 2004-12-17 2006-06-29 Hitachi High-Technologies Corp パターン検査装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002027305A1 (fr) * 2000-09-26 2002-04-04 Olympus Optical Co., Ltd. Dispositif de detection de defauts
JP2003007786A (ja) * 2001-06-20 2003-01-10 Hitachi Ltd 半導体基板の検査方法およびその装置
JP2005077109A (ja) * 2003-08-29 2005-03-24 Olympus Corp 欠陥検査装置
JP2006170907A (ja) * 2004-12-17 2006-06-29 Hitachi High-Technologies Corp パターン検査装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101010497B1 (ko) * 2008-05-21 2011-01-21 다이니폰 스크린 세이조우 가부시키가이샤 기판 처리 시스템, 검사 장치 및 검사 방법
WO2009148876A1 (en) * 2008-05-29 2009-12-10 Kla-Tencor Corporation Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
US8000922B2 (en) 2008-05-29 2011-08-16 Kla-Tencor Corp. Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm
US9766187B2 (en) 2014-08-27 2017-09-19 Kla-Tencor Corp. Repeater detection
US9766186B2 (en) 2014-08-27 2017-09-19 Kla-Tencor Corp. Array mode repeater detection

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