JP2008014650A5 - - Google Patents
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- Publication number
- JP2008014650A5 JP2008014650A5 JP2006183157A JP2006183157A JP2008014650A5 JP 2008014650 A5 JP2008014650 A5 JP 2008014650A5 JP 2006183157 A JP2006183157 A JP 2006183157A JP 2006183157 A JP2006183157 A JP 2006183157A JP 2008014650 A5 JP2008014650 A5 JP 2008014650A5
- Authority
- JP
- Japan
- Prior art keywords
- unit
- control parameter
- illumination
- inspection apparatus
- surface defect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 claims 19
- 238000005286 illumination Methods 0.000 claims 16
- 230000007547 defect Effects 0.000 claims 14
- 238000003384 imaging method Methods 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 2
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006183157A JP2008014650A (ja) | 2006-07-03 | 2006-07-03 | 表面欠陥検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006183157A JP2008014650A (ja) | 2006-07-03 | 2006-07-03 | 表面欠陥検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008014650A JP2008014650A (ja) | 2008-01-24 |
JP2008014650A5 true JP2008014650A5 (enrdf_load_stackoverflow) | 2009-08-20 |
Family
ID=39071823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006183157A Pending JP2008014650A (ja) | 2006-07-03 | 2006-07-03 | 表面欠陥検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2008014650A (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009281835A (ja) * | 2008-05-21 | 2009-12-03 | Dainippon Screen Mfg Co Ltd | 基板処理システム、検査装置および検査方法 |
US8000922B2 (en) | 2008-05-29 | 2011-08-16 | Kla-Tencor Corp. | Methods and systems for generating information to be used for selecting values for one or more parameters of a detection algorithm |
US9766187B2 (en) | 2014-08-27 | 2017-09-19 | Kla-Tencor Corp. | Repeater detection |
US9766186B2 (en) | 2014-08-27 | 2017-09-19 | Kla-Tencor Corp. | Array mode repeater detection |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI285738B (en) * | 2000-09-26 | 2007-08-21 | Olympus Corp | Defect detecting apparatus and computer readable medium |
JP3698075B2 (ja) * | 2001-06-20 | 2005-09-21 | 株式会社日立製作所 | 半導体基板の検査方法およびその装置 |
JP2005077109A (ja) * | 2003-08-29 | 2005-03-24 | Olympus Corp | 欠陥検査装置 |
JP4413767B2 (ja) * | 2004-12-17 | 2010-02-10 | 株式会社日立ハイテクノロジーズ | パターン検査装置 |
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2006
- 2006-07-03 JP JP2006183157A patent/JP2008014650A/ja active Pending