JP6706664B2 - 部品の粉末床式付加製造過程を監視する方法及びシステム - Google Patents
部品の粉末床式付加製造過程を監視する方法及びシステム Download PDFInfo
- Publication number
- JP6706664B2 JP6706664B2 JP2018500370A JP2018500370A JP6706664B2 JP 6706664 B2 JP6706664 B2 JP 6706664B2 JP 2018500370 A JP2018500370 A JP 2018500370A JP 2018500370 A JP2018500370 A JP 2018500370A JP 6706664 B2 JP6706664 B2 JP 6706664B2
- Authority
- JP
- Japan
- Prior art keywords
- powder bed
- image sensor
- light source
- powder
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000843 powder Substances 0.000 title claims description 135
- 238000000034 method Methods 0.000 title claims description 55
- 238000004519 manufacturing process Methods 0.000 title claims description 25
- 238000012544 monitoring process Methods 0.000 title claims description 15
- 239000000654 additive Substances 0.000 title claims description 9
- 230000000996 additive effect Effects 0.000 title claims description 9
- 238000005286 illumination Methods 0.000 claims description 29
- 230000003287 optical effect Effects 0.000 claims description 28
- 230000005855 radiation Effects 0.000 claims description 14
- 238000001228 spectrum Methods 0.000 claims description 10
- 238000012545 processing Methods 0.000 claims description 9
- 238000011156 evaluation Methods 0.000 claims description 8
- 239000002245 particle Substances 0.000 claims description 8
- 238000009499 grossing Methods 0.000 claims description 4
- 238000011282 treatment Methods 0.000 claims description 2
- 238000012360 testing method Methods 0.000 claims 1
- 230000007547 defect Effects 0.000 description 22
- 238000002844 melting Methods 0.000 description 5
- 230000008018 melting Effects 0.000 description 5
- 238000010894 electron beam technology Methods 0.000 description 4
- 238000001514 detection method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000110 selective laser sintering Methods 0.000 description 2
- 230000005457 Black-body radiation Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000001010 compromised effect Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 238000000275 quality assurance Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/30—Auxiliary operations or equipment
- B29C64/386—Data acquisition or data processing for additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
- B29C64/141—Processes of additive manufacturing using only solid materials
- B29C64/153—Processes of additive manufacturing using only solid materials using layers of powder being selectively joined, e.g. by selective laser sintering or melting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y10/00—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y50/00—Data acquisition or data processing for additive manufacturing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/85—Investigating moving fluids or granular solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Powder Metallurgy (AREA)
Description
本発明は、粉末床で部品を製造する粉末床式付加製造の過程を監視する方法に関する。さらに、本発明は、処理室内に配置される粉末床用容器装置を備えた粉末床式付加製造システムに関する。
13 容器装置
14 粉末床
16 部品
19 ドクターブレード
21 表面(粉末床の)
30 光学監視ユニット
31 イメージセンサ
32 光学ユニット
34 光源
Claims (14)
- 粉末床(14)で部品(16)を製造する粉末床式付加製造の過程を監視する方法であって、
イメージセンサ(31)を使用し、少なくとも1つの光源(34)によって斜め上方の少なくとも1つの方向から前記粉末床(14)の表面(21)を照明すると共に、光学ユニット(32)を用いて前記イメージセンサ(31)で前記粉末床(14)の表面(21)を撮像し、
前記イメージセンサ(31)により得た画像を評価して前記粉末床(14)の表面(21)を監視する、ことを含み、
前記粉末床(14)を滑らかにするためのドクターブレード(19)の移動方向(25)に対する前記イメージセンサ(31)の画素アレイのアライメントを、前記光学ユニット(32)の光軸を中心として30°〜60°の角度だけ回転させてある、方法。 - 前記イメージセンサ(31)を前記粉末床に対し垂直方向の上方に配置し、前記光学ユニット(32)の光軸を前記粉末床(14)の表面(21)と直交させる、請求項1に記載の方法。
- 前記イメージセンサ(31)の解像度は、使用する粉末の少なくとも10個の粒子が、該イメージセンサ(31)により得られる粉末床の画像の1画素で描写されるように選択される、請求項1又は2に記載の方法。
- 前記光源(34)は、前記粉末床(14)の表面(21)に直交する視点方向で見た照明方向(35)が、前記粉末床(14)を滑らかにするためのドクターブレード(19)の移動方向(25)から外れるように配置してある、請求項1〜3のいずれか1項に記載の方法。
- 前記光源(34)の前記照明方向(35)が、前記ドクターブレード(19)の移動方向(25)に対して80°〜100°の角度である、請求項4に記載の方法。
- 多数の前記光源(34)によって、前記粉末床(14)の表面(21)に直交する視点方向で見て互いに異なる多数の照明方向(35)から照明を行う、請求項1〜5のいずれか1項に記載の方法。
- 1つ又は多数の前記光源(34,34a,34b,34c,34d,34e,34f,34g)が、加熱された前記粉末床(14)及び現在製造されている前記部品(16)の熱放射の波長スペクトルとは異なる波長スペクトルの光を放射する、請求項1〜6のいずれか1項に記載の方法。
- 前記1つの光源(34)が単色光を放射するか、又は、前記多数の光源(34a,34b,34c,34d,34e,34f,34g)がそれぞれ異なる波長の単色光を放射する、請求項7に記載の方法。
- 前記イメージセンサ(31)が、加熱された前記粉末床(14)及び現在製造されている前記部品(16)の熱放射のスペクトルに対して鈍感であるか、又は、
前記光学ユニット(32)に、加熱された前記粉末床(14)及び現在製造されている前記部品(16)の熱放射のスペクトルに対するフィルタ(38)を提供してある、請求項7又は8に記載の方法。 - 前記粉末床(14)の表面(21)を前記少なくとも1の光源(34)で照明する前に、当該粉末床(14)の表面(21)を、前記光学ユニット(32)を使用して前記イメージセンサ(31)で撮像し、
この後に、前記少なくとも1の光源(34)によって斜め上方の少なくとも1つの方向から前記粉末床(14)の表面(21)を照明し、当該粉末床(14)の表面(21)を、前記光学ユニット(32)を使用して前記イメージセンサ(31)で撮像し、
そして、評価に際し、照明してない前記表面(21)の画像を照明してある前記表面(21)の画像から差し引く、請求項7又は8に記載の方法。 - 溝(36)が前記粉末床(14)において認識された場合に製造を中断するべく、溝(36)の存在に関して前記粉末床(14)を検査するために実行される、請求項1〜10のいずれか1項に記載の方法。
- 現在製造されている前記部品(16)の層がある前記粉末床(14)の領域に、認識された溝(36)がある場合だけ製造を中断する、請求項11に記載の方法。
- 現在製造されている前記部品(16)の表面の凹凸も検査するために実行される、請求項1〜12のいずれか1項に記載の方法。
- 部品の粉末床式付加製造を行うシステムであって、
処理室(12)に配置された、粉末床(14)用の容器装置(13)と、
前記容器装置(13)に向けられたイメージセンサ(31)及び光学ユニット(32)を含む光学監視ユニット(30)と、
前記処理室(12)の前記容器装置(13)に対し斜め上方に配置され、前記容器装置(13)を直接照明するために使用される、少なくとも1つの光源(34)とを備え、
請求項1〜13のいずれか1項に記載の方法を実行する、システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015212837.7A DE102015212837A1 (de) | 2015-07-09 | 2015-07-09 | Verfahren zur Überwachung eines Prozesses zur pulverbettbasierten additiven Herstellung eines Bauteils und Anlage, die für ein solches Verfahren geeignet ist |
DE102015212837.7 | 2015-07-09 | ||
PCT/EP2016/065660 WO2017005675A1 (de) | 2015-07-09 | 2016-07-04 | Verfahren zur überwachung eines prozesses zur pulverbettbasierten additiven herstellung eines bauteils und solche anlage |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018521883A JP2018521883A (ja) | 2018-08-09 |
JP6706664B2 true JP6706664B2 (ja) | 2020-06-10 |
Family
ID=56511547
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018500370A Expired - Fee Related JP6706664B2 (ja) | 2015-07-09 | 2016-07-04 | 部品の粉末床式付加製造過程を監視する方法及びシステム |
Country Status (6)
Country | Link |
---|---|
US (1) | US20180200957A1 (ja) |
EP (1) | EP3295156A1 (ja) |
JP (1) | JP6706664B2 (ja) |
CN (1) | CN108283008A (ja) |
DE (1) | DE102015212837A1 (ja) |
WO (1) | WO2017005675A1 (ja) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102013217422A1 (de) * | 2013-09-02 | 2015-03-05 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät und Verfahren zur Vermessung und mindestens teilweisen Erzeugung eines Werkstücks |
WO2017075244A1 (en) * | 2015-10-30 | 2017-05-04 | Seurat Technologies, Inc. | Additive manufacturing system and method |
CN106312062B (zh) | 2016-08-02 | 2018-09-25 | 西安铂力特增材技术股份有限公司 | 一种检验铺粉质量的方法及增材制造设备 |
GB2559579B (en) * | 2017-02-08 | 2021-08-11 | Reliance Prec Limited | Method of and apparatus for additive layer manufacture |
CN107402220B (zh) * | 2017-07-01 | 2019-07-19 | 华中科技大学 | 一种激光选区熔化成形铺粉质量视觉在线检测方法及系统 |
EP3437839B1 (en) * | 2017-08-04 | 2023-09-27 | Concept Laser GmbH | Apparatus for manufacturing three-dimensional objects |
WO2019078813A1 (en) * | 2017-10-16 | 2019-04-25 | Hewlett-Packard Development Company, L.P. | 3D PRINTER |
CN109910299B (zh) * | 2017-12-13 | 2021-06-04 | 广东科达洁能股份有限公司 | 3d打印机的铺粉状态检测方法和装置 |
DE102018201255A1 (de) * | 2018-01-29 | 2019-08-01 | MTU Aero Engines AG | Schichtbauverfahren und Schichtbauvorrichtung zum additiven Herstellen zumindest eines Bauteilbereichs eines Bauteils |
WO2019206903A1 (en) | 2018-04-23 | 2019-10-31 | Carl Zeiss Industrial Metrology, Llc | Method and arrangement for producing a workpiece by using adaptive closed-loop control of additive manufacturing techniques |
CN108788153A (zh) * | 2018-08-27 | 2018-11-13 | 西安空天能源动力智能制造研究院有限公司 | 一种激光选区熔化加工过程实时质量监控装置及方法 |
DE102018218991A1 (de) * | 2018-11-07 | 2020-05-07 | Trumpf Laser Und Systemtechnik Gmbh | Verfahren zum Betreiben einer Fertigungseinrichtung und Fertigungseinrichtung zum additiven Fertigen eines Bauteils aus einem Pulvermaterial |
GB2578869A (en) * | 2018-11-09 | 2020-06-03 | Airbus Operations Ltd | Detection of contaminant in additive manufacturing |
CN113365798A (zh) * | 2018-12-20 | 2021-09-07 | 捷普有限公司 | 用于增材制造的热过滤的设备、系统和方法 |
GB2584820B (en) * | 2019-05-15 | 2024-01-24 | Lpw Technology Ltd | Method and apparatus for analysing metal powder |
US11666988B2 (en) * | 2019-07-22 | 2023-06-06 | Hamilton Sundstrand Corporation | Additive manufacturing machine condensate monitoring |
US11338519B2 (en) * | 2019-07-26 | 2022-05-24 | Arcam Ab | Devices, systems, and methods for monitoring a powder layer in additive manufacturing processes |
US11541457B2 (en) | 2019-07-26 | 2023-01-03 | Arcam Ab | Devices, systems, and methods for monitoring a powder layer in additive manufacturing processes |
DE102019134987B4 (de) * | 2019-12-18 | 2022-05-25 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zur additiven Herstellung eines Werkstücks |
DE102019009301B4 (de) | 2019-12-18 | 2023-10-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Verfahren und Vorrichtung zur additiven Herstellung eines Werkstücks |
CN111168992A (zh) * | 2020-01-04 | 2020-05-19 | 西安交通大学 | 一种热塑性含能材料的高效精准3d打印成型装置及其打印方法 |
KR102328891B1 (ko) * | 2020-05-28 | 2021-11-22 | 헵시바주식회사 | 3d 프린터의 불량 검출 방법 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6912415B2 (en) * | 2001-04-09 | 2005-06-28 | Mayo Foundation For Medical Education And Research | Method for acquiring MRI data from a large field of view using continuous table motion |
US6992771B2 (en) * | 2001-11-28 | 2006-01-31 | Battelle Memorial Institute | Systems and techniques for detecting the presence of foreign material |
DE10310385B4 (de) * | 2003-03-07 | 2006-09-21 | Daimlerchrysler Ag | Verfahren zur Herstellung von dreidimensionalen Körpern mittels pulverbasierter schichtaufbauender Verfahren |
US7206125B2 (en) * | 2003-11-10 | 2007-04-17 | Therma-Wave, Inc. | Infrared blocking filter for broadband Optical metrology |
US7039485B2 (en) * | 2004-03-12 | 2006-05-02 | The Boeing Company | Systems and methods enabling automated return to and/or repair of defects with a material placement machine |
US6930278B1 (en) * | 2004-08-13 | 2005-08-16 | 3D Systems, Inc. | Continuous calibration of a non-contact thermal sensor for laser sintering |
EP2006804A1 (en) | 2007-06-22 | 2008-12-24 | Siemens Aktiengesellschaft | Method for optical inspection of a matt surface and apparatus for applying this method |
DE102007056984A1 (de) * | 2007-11-27 | 2009-05-28 | Eos Gmbh Electro Optical Systems | Verfahren zum Herstellen eines dreidimensionalen Objekts mittels Lasersintern |
JP4719284B2 (ja) * | 2008-10-10 | 2011-07-06 | トヨタ自動車株式会社 | 表面検査装置 |
DE102011009624A1 (de) * | 2011-01-28 | 2012-08-02 | Mtu Aero Engines Gmbh | Verfahren und Vorrichtung zur Prozessüberwachung |
US20140255666A1 (en) * | 2013-03-06 | 2014-09-11 | University Of Louisville Research Foundation, Inc. | Powder Bed Fusion Systems, Apparatus, and Processes for Multi-Material Part Production |
US9751262B2 (en) * | 2013-06-28 | 2017-09-05 | General Electric Company | Systems and methods for creating compensated digital representations for use in additive manufacturing processes |
DE102013214320A1 (de) * | 2013-07-22 | 2015-01-22 | Eos Gmbh Electro Optical Systems | Vorrichtung und Verfahren zum schichtweisen Herstellen eines dreidimensionalen Objekts |
US9855698B2 (en) * | 2013-08-07 | 2018-01-02 | Massachusetts Institute Of Technology | Automatic process control of additive manufacturing device |
US10434572B2 (en) * | 2013-12-19 | 2019-10-08 | Arcam Ab | Method for additive manufacturing |
CN103962560B (zh) * | 2014-05-20 | 2016-05-25 | 上海交通大学 | 一种熔锻复合的金属增材制造装置 |
DE202014009351U1 (de) * | 2014-11-24 | 2014-12-02 | Ifu Diagnostic Systems Gmbh | Optische Prozesskontrolle von Laserschmelzprozessen mittels Kameras |
US9612210B2 (en) * | 2015-06-25 | 2017-04-04 | The Boeing Company | Systems and methods for automatically inspecting wire segments |
-
2015
- 2015-07-09 DE DE102015212837.7A patent/DE102015212837A1/de not_active Withdrawn
-
2016
- 2016-07-04 WO PCT/EP2016/065660 patent/WO2017005675A1/de active Application Filing
- 2016-07-04 CN CN201680040197.9A patent/CN108283008A/zh active Pending
- 2016-07-04 US US15/742,667 patent/US20180200957A1/en not_active Abandoned
- 2016-07-04 JP JP2018500370A patent/JP6706664B2/ja not_active Expired - Fee Related
- 2016-07-04 EP EP16741886.2A patent/EP3295156A1/de not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JP2018521883A (ja) | 2018-08-09 |
EP3295156A1 (de) | 2018-03-21 |
WO2017005675A1 (de) | 2017-01-12 |
US20180200957A1 (en) | 2018-07-19 |
CN108283008A (zh) | 2018-07-13 |
DE102015212837A1 (de) | 2017-01-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6706664B2 (ja) | 部品の粉末床式付加製造過程を監視する方法及びシステム | |
US11105754B2 (en) | Multi-parameter inspection apparatus for monitoring of manufacturing parts | |
JP3560694B2 (ja) | レンズ検査のシステムと方法 | |
JP4879881B2 (ja) | 反射性および蛍光性の画像を利用した電気回路を検査するためのシステムおよび方法 | |
JP6560220B2 (ja) | 表面欠陥の検出のための検査システムを点検する方法及び装置 | |
EP3756859A1 (en) | System for manufacturing additive manufactured object and method for manufacturing additive manufactured object | |
CN110231352B (zh) | 图像检查装置、图像检查方法以及图像检查记录介质 | |
US20210356408A1 (en) | Multi-Parameter Inspection Apparatus for Monitoring of Manufacturing Parts | |
JP2007256119A (ja) | 検査装置、積層装置、及び検査方法 | |
JP2009115512A (ja) | 物品検査方法 | |
KR100928792B1 (ko) | 슬래브 표면의 흠 검출 장치 | |
KR101203210B1 (ko) | 결함 검사장치 | |
JP7119034B2 (ja) | 表面検査方法、表面検査装置、および表面検査システム | |
JP2021058927A (ja) | レーザ溶接品質検査の方法及びレーザ溶接品質検査装置 | |
JP2008064715A (ja) | 欠陥検査装置および欠陥検査方法 | |
JP7063839B2 (ja) | 検査方法、及び検査システム | |
JPH11326225A (ja) | 管状部材の検査方法およびその装置 | |
JP4015436B2 (ja) | 金めっき欠陥検査装置 | |
JP5978002B2 (ja) | 検査方法及び外観検査装置 | |
JP2009222683A (ja) | 表面検査方法および装置 | |
JP5302600B2 (ja) | 樹脂成型品のバリ検出装置 | |
JP2005300884A (ja) | マスク検査装置およびマスク検査方法 | |
JP2009047517A (ja) | 検査装置 | |
TWI629467B (zh) | 晶圓檢查方法及晶圓檢查裝置 | |
JP2000205846A (ja) | 塗装ムラ検査装置および方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180412 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180412 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190226 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190524 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20191015 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191219 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200421 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200518 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6706664 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |