JP2008004284A5 - - Google Patents

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Publication number
JP2008004284A5
JP2008004284A5 JP2006170042A JP2006170042A JP2008004284A5 JP 2008004284 A5 JP2008004284 A5 JP 2008004284A5 JP 2006170042 A JP2006170042 A JP 2006170042A JP 2006170042 A JP2006170042 A JP 2006170042A JP 2008004284 A5 JP2008004284 A5 JP 2008004284A5
Authority
JP
Japan
Prior art keywords
light
incident
emitted
optical axis
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006170042A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008004284A (ja
JP4717731B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006170042A priority Critical patent/JP4717731B2/ja
Priority claimed from JP2006170042A external-priority patent/JP4717731B2/ja
Priority to US11/764,555 priority patent/US7965917B2/en
Publication of JP2008004284A publication Critical patent/JP2008004284A/ja
Publication of JP2008004284A5 publication Critical patent/JP2008004284A5/ja
Application granted granted Critical
Publication of JP4717731B2 publication Critical patent/JP4717731B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2006170042A 2006-06-20 2006-06-20 照明装置及びそれを用いた物体表面検査装置 Expired - Fee Related JP4717731B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006170042A JP4717731B2 (ja) 2006-06-20 2006-06-20 照明装置及びそれを用いた物体表面検査装置
US11/764,555 US7965917B2 (en) 2006-06-20 2007-06-18 Illuminating apparatus and surface inspection system using illuminating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006170042A JP4717731B2 (ja) 2006-06-20 2006-06-20 照明装置及びそれを用いた物体表面検査装置

Publications (3)

Publication Number Publication Date
JP2008004284A JP2008004284A (ja) 2008-01-10
JP2008004284A5 true JP2008004284A5 (https=) 2009-07-30
JP4717731B2 JP4717731B2 (ja) 2011-07-06

Family

ID=38861658

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006170042A Expired - Fee Related JP4717731B2 (ja) 2006-06-20 2006-06-20 照明装置及びそれを用いた物体表面検査装置

Country Status (2)

Country Link
US (1) US7965917B2 (https=)
JP (1) JP4717731B2 (https=)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5245545B2 (ja) * 2008-05-30 2013-07-24 東芝ライテック株式会社 光源装置および照明器具
US8586911B2 (en) 2008-10-21 2013-11-19 Bayer Healthcare Llc Optical readhead and method of using the same
JP5388543B2 (ja) * 2008-11-05 2014-01-15 キヤノン株式会社 外観検査装置
WO2013014046A1 (en) * 2011-07-25 2013-01-31 Osram Ag A light source, for example for lighting surfaces
US10030846B2 (en) 2012-02-14 2018-07-24 Svv Technology Innovations, Inc. Face-lit waveguide illumination systems
KR102761900B1 (ko) * 2023-01-31 2025-02-05 주식회사 크레셈 Plp 패널 표면 검사장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023903A (en) * 1975-08-11 1977-05-17 Bell & Howell Company Light composer for providing even field illumination and diffuse light
JPH04138438A (ja) 1990-09-29 1992-05-12 Canon Inc 照明装置
JP3437309B2 (ja) 1995-02-23 2003-08-18 キヤノン株式会社 撮影用照明装置
US5813743A (en) 1995-03-27 1998-09-29 Fuji Photo Film Co., Ltd. Lighting unit
JP3685516B2 (ja) 1995-03-27 2005-08-17 富士写真フイルム株式会社 照明装置
JP3686329B2 (ja) * 2000-08-22 2005-08-24 シーシーエス株式会社 表面検査用照明装置及び表面検査装置
JP3774621B2 (ja) * 2000-09-01 2006-05-17 キヤノン株式会社 照明装置および撮影装置
JP2002310626A (ja) * 2001-04-18 2002-10-23 Omron Corp 照明装置
US20040151008A1 (en) * 2003-02-03 2004-08-05 Artsyukhovich Alexander N. Variable spot size illuminators with enhanced homogeneity and parfocality
JP4280527B2 (ja) * 2003-03-28 2009-06-17 キヤノン株式会社 照明装置

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