JP2007531311A5 - - Google Patents

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Publication number
JP2007531311A5
JP2007531311A5 JP2007506187A JP2007506187A JP2007531311A5 JP 2007531311 A5 JP2007531311 A5 JP 2007531311A5 JP 2007506187 A JP2007506187 A JP 2007506187A JP 2007506187 A JP2007506187 A JP 2007506187A JP 2007531311 A5 JP2007531311 A5 JP 2007531311A5
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JP
Japan
Prior art keywords
gas discharge
laser
pulse
repetition rate
electrode pairs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007506187A
Other languages
English (en)
Japanese (ja)
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JP2007531311A (ja
Filing date
Publication date
Priority claimed from US10/815,386 external-priority patent/US7006547B2/en
Application filed filed Critical
Publication of JP2007531311A publication Critical patent/JP2007531311A/ja
Publication of JP2007531311A5 publication Critical patent/JP2007531311A5/ja
Pending legal-status Critical Current

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JP2007506187A 2004-03-31 2005-03-03 超高繰返し数狭帯域ガス放電レーザシステム Pending JP2007531311A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/815,386 US7006547B2 (en) 2004-03-31 2004-03-31 Very high repetition rate narrow band gas discharge laser system
PCT/US2005/007064 WO2005104312A2 (en) 2004-03-31 2005-03-03 Very high repetition rate narrow band gas discharge laser system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2014027965A Division JP6040184B2 (ja) 2004-03-31 2014-02-17 超高繰返し数狭帯域ガス放電レーザシステム

Publications (2)

Publication Number Publication Date
JP2007531311A JP2007531311A (ja) 2007-11-01
JP2007531311A5 true JP2007531311A5 (https=) 2008-04-10

Family

ID=35060496

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2007506187A Pending JP2007531311A (ja) 2004-03-31 2005-03-03 超高繰返し数狭帯域ガス放電レーザシステム
JP2014027965A Expired - Fee Related JP6040184B2 (ja) 2004-03-31 2014-02-17 超高繰返し数狭帯域ガス放電レーザシステム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2014027965A Expired - Fee Related JP6040184B2 (ja) 2004-03-31 2014-02-17 超高繰返し数狭帯域ガス放電レーザシステム

Country Status (7)

Country Link
US (2) US7006547B2 (https=)
EP (1) EP1741168B1 (https=)
JP (2) JP2007531311A (https=)
KR (1) KR101189525B1 (https=)
DE (1) DE602005027831D1 (https=)
TW (1) TWI256184B (https=)
WO (1) WO2005104312A2 (https=)

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JP5454842B2 (ja) * 2008-06-30 2014-03-26 ギガフォトン株式会社 高繰返し高出力エキシマレーザー装置
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US9762023B2 (en) * 2015-12-21 2017-09-12 Cymer, Llc Online calibration for repetition rate dependent performance variables
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