JP2007513498A5 - - Google Patents

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Publication number
JP2007513498A5
JP2007513498A5 JP2006538863A JP2006538863A JP2007513498A5 JP 2007513498 A5 JP2007513498 A5 JP 2007513498A5 JP 2006538863 A JP2006538863 A JP 2006538863A JP 2006538863 A JP2006538863 A JP 2006538863A JP 2007513498 A5 JP2007513498 A5 JP 2007513498A5
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JP
Japan
Prior art keywords
field effect
effect device
compound
tasin
tan
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006538863A
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English (en)
Japanese (ja)
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JP2007513498A (ja
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Publication date
Priority claimed from US10/712,575 external-priority patent/US20050104142A1/en
Application filed filed Critical
Publication of JP2007513498A publication Critical patent/JP2007513498A/ja
Publication of JP2007513498A5 publication Critical patent/JP2007513498A5/ja
Pending legal-status Critical Current

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JP2006538863A 2003-11-13 2004-11-11 ＦＥＴゲート電極用のＣＶＤタンタル化合物（ＴａおよびＮを含む化合物の化学的気相堆積方法および半導体電界効果デバイス） Pending JP2007513498A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/712,575 US20050104142A1 (en) 2003-11-13 2003-11-13 CVD tantalum compounds for FET get electrodes
PCT/EP2004/052927 WO2005047561A1 (en) 2003-11-13 2004-11-11 Cvd tantalum compounds for fet gate electrodes

Publications (2)

Publication Number Publication Date
JP2007513498A JP2007513498A (ja) 2007-05-24
JP2007513498A5 true JP2007513498A5 (https=) 2007-11-29

Family

ID=34573575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006538863A Pending JP2007513498A (ja) 2003-11-13 2004-11-11 ＦＥＴゲート電極用のＣＶＤタンタル化合物（ＴａおよびＮを含む化合物の化学的気相堆積方法および半導体電界効果デバイス）

Country Status (8)

Country Link
US (2) US20050104142A1 (https=)
EP (1) EP1699945A1 (https=)
JP (1) JP2007513498A (https=)
KR (1) KR20060112659A (https=)
CN (1) CN1902337A (https=)
IL (1) IL175594A0 (https=)
TW (1) TW200516167A (https=)
WO (1) WO2005047561A1 (https=)

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