JP2007510954A5 - - Google Patents

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Publication number
JP2007510954A5
JP2007510954A5 JP2006538296A JP2006538296A JP2007510954A5 JP 2007510954 A5 JP2007510954 A5 JP 2007510954A5 JP 2006538296 A JP2006538296 A JP 2006538296A JP 2006538296 A JP2006538296 A JP 2006538296A JP 2007510954 A5 JP2007510954 A5 JP 2007510954A5
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JP
Japan
Prior art keywords
micromirror
layer
forming
micromirrors
array element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006538296A
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English (en)
Japanese (ja)
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JP2007510954A (ja
JP4586146B2 (ja
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Publication date
Priority claimed from US10/698,620 external-priority patent/US20050094241A1/en
Application filed filed Critical
Publication of JP2007510954A publication Critical patent/JP2007510954A/ja
Publication of JP2007510954A5 publication Critical patent/JP2007510954A5/ja
Application granted granted Critical
Publication of JP4586146B2 publication Critical patent/JP4586146B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006538296A 2003-11-01 2004-10-29 電気力学的マイクロミラー素子およびその製造方法 Expired - Fee Related JP4586146B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/698,620 US20050094241A1 (en) 2003-11-01 2003-11-01 Electromechanical micromirror devices and methods of manufacturing the same
PCT/US2004/035974 WO2005046206A2 (en) 2003-11-01 2004-10-29 Electromechanical micromirror devices and methods of manufacturing the same

Publications (3)

Publication Number Publication Date
JP2007510954A JP2007510954A (ja) 2007-04-26
JP2007510954A5 true JP2007510954A5 (https=) 2008-01-10
JP4586146B2 JP4586146B2 (ja) 2010-11-24

Family

ID=34550697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006538296A Expired - Fee Related JP4586146B2 (ja) 2003-11-01 2004-10-29 電気力学的マイクロミラー素子およびその製造方法

Country Status (3)

Country Link
US (3) US20050094241A1 (https=)
JP (1) JP4586146B2 (https=)
WO (1) WO2005046206A2 (https=)

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Publication number Priority date Publication date Assignee Title
US7643195B2 (en) * 2003-11-01 2010-01-05 Silicon Quest Kabushiki-Kaisha Mirror device
US7777959B2 (en) * 2004-05-27 2010-08-17 Angstrom, Inc. Micromirror array lens with fixed focal length
US7864394B1 (en) * 2005-08-31 2011-01-04 The United States Of America As Represented By The Secretary Of The Navy Dynamically variable metamaterial lens and method
US7691400B2 (en) * 2006-05-05 2010-04-06 Medtronic Vascular, Inc. Medical device having coating with zeolite drug reservoirs
US7652813B2 (en) * 2006-08-30 2010-01-26 Silicon Quest Kabushiki-Kaisha Mirror device
US8023172B2 (en) * 2006-08-30 2011-09-20 Silicon Quest Kabushiki-Kaisha Mirror device
US7863752B2 (en) * 2009-02-25 2011-01-04 Capella Photonics, Inc. MEMS device with integrated via and spacer
US8040590B2 (en) * 2009-10-29 2011-10-18 Qualcomm Mems Technologies, Inc. Interferometric modulation devices having triangular subpixels
WO2011134515A1 (en) 2010-04-28 2011-11-03 Lemoptix Sa Micro-projection device with anti-speckle imaging mode
US8654435B2 (en) * 2010-10-06 2014-02-18 Fusao Ishii Microwindow device
EP2447755B1 (en) 2010-10-26 2019-05-01 Lumentum Operations LLC A pivotable MEMS device
WO2014168658A1 (en) * 2013-04-09 2014-10-16 Fusao Ishii Mirror device with flat and smooth mirror surface without protrusion or dip
US9429760B2 (en) * 2014-10-07 2016-08-30 Christie Digital Systems Usa, Inc. Spatial color mixing in a cascade imaging system
WO2019226958A1 (en) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capacitive sensor
CN112771428A (zh) * 2018-09-29 2021-05-07 依格耐特有限公司 具有垂直铰链的mems显示装置
CN111491144B (zh) * 2019-01-28 2023-04-07 深圳光峰科技股份有限公司 显示方法、显示系统及计算机存储介质
US11668925B2 (en) * 2020-03-25 2023-06-06 Compertum Microsystems Inc. MEMS micro-mirror device with stopper and method of making same

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US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US4592628A (en) * 1981-07-01 1986-06-03 International Business Machines Mirror array light valve
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5216537A (en) * 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
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US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US7183618B2 (en) * 2004-08-14 2007-02-27 Fusao Ishii Hinge for micro-mirror devices

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