JP4586146B2 - 電気力学的マイクロミラー素子およびその製造方法 - Google Patents

電気力学的マイクロミラー素子およびその製造方法 Download PDF

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JP4586146B2
JP4586146B2 JP2006538296A JP2006538296A JP4586146B2 JP 4586146 B2 JP4586146 B2 JP 4586146B2 JP 2006538296 A JP2006538296 A JP 2006538296A JP 2006538296 A JP2006538296 A JP 2006538296A JP 4586146 B2 JP4586146 B2 JP 4586146B2
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Prior art keywords
micromirror
layer
micromirrors
forming
mirror
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JP2007510954A (ja
JP2007510954A5 (https=
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フサオ イシイ
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Mechanical Optical Scanning Systems (AREA)
JP2006538296A 2003-11-01 2004-10-29 電気力学的マイクロミラー素子およびその製造方法 Expired - Fee Related JP4586146B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/698,620 US20050094241A1 (en) 2003-11-01 2003-11-01 Electromechanical micromirror devices and methods of manufacturing the same
PCT/US2004/035974 WO2005046206A2 (en) 2003-11-01 2004-10-29 Electromechanical micromirror devices and methods of manufacturing the same

Publications (3)

Publication Number Publication Date
JP2007510954A JP2007510954A (ja) 2007-04-26
JP2007510954A5 JP2007510954A5 (https=) 2008-01-10
JP4586146B2 true JP4586146B2 (ja) 2010-11-24

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JP2006538296A Expired - Fee Related JP4586146B2 (ja) 2003-11-01 2004-10-29 電気力学的マイクロミラー素子およびその製造方法

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US (3) US20050094241A1 (https=)
JP (1) JP4586146B2 (https=)
WO (1) WO2005046206A2 (https=)

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US7643195B2 (en) * 2003-11-01 2010-01-05 Silicon Quest Kabushiki-Kaisha Mirror device
US7777959B2 (en) * 2004-05-27 2010-08-17 Angstrom, Inc. Micromirror array lens with fixed focal length
US7864394B1 (en) * 2005-08-31 2011-01-04 The United States Of America As Represented By The Secretary Of The Navy Dynamically variable metamaterial lens and method
US7691400B2 (en) * 2006-05-05 2010-04-06 Medtronic Vascular, Inc. Medical device having coating with zeolite drug reservoirs
US7652813B2 (en) * 2006-08-30 2010-01-26 Silicon Quest Kabushiki-Kaisha Mirror device
US8023172B2 (en) * 2006-08-30 2011-09-20 Silicon Quest Kabushiki-Kaisha Mirror device
US7863752B2 (en) * 2009-02-25 2011-01-04 Capella Photonics, Inc. MEMS device with integrated via and spacer
US8040590B2 (en) * 2009-10-29 2011-10-18 Qualcomm Mems Technologies, Inc. Interferometric modulation devices having triangular subpixels
WO2011134515A1 (en) 2010-04-28 2011-11-03 Lemoptix Sa Micro-projection device with anti-speckle imaging mode
US8654435B2 (en) * 2010-10-06 2014-02-18 Fusao Ishii Microwindow device
EP2447755B1 (en) 2010-10-26 2019-05-01 Lumentum Operations LLC A pivotable MEMS device
WO2014168658A1 (en) * 2013-04-09 2014-10-16 Fusao Ishii Mirror device with flat and smooth mirror surface without protrusion or dip
US9429760B2 (en) * 2014-10-07 2016-08-30 Christie Digital Systems Usa, Inc. Spatial color mixing in a cascade imaging system
WO2019226958A1 (en) 2018-05-24 2019-11-28 The Research Foundation For The State University Of New York Capacitive sensor
CN112771428A (zh) * 2018-09-29 2021-05-07 依格耐特有限公司 具有垂直铰链的mems显示装置
CN111491144B (zh) * 2019-01-28 2023-04-07 深圳光峰科技股份有限公司 显示方法、显示系统及计算机存储介质
US11668925B2 (en) * 2020-03-25 2023-06-06 Compertum Microsystems Inc. MEMS micro-mirror device with stopper and method of making same

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US4229782A (en) * 1977-12-20 1980-10-21 Mcgraw-Edison Company High efficiency lighting units with beam cut-off angle
US4317611A (en) * 1980-05-19 1982-03-02 International Business Machines Corporation Optical ray deflection apparatus
US4592628A (en) * 1981-07-01 1986-06-03 International Business Machines Mirror array light valve
US5061049A (en) * 1984-08-31 1991-10-29 Texas Instruments Incorporated Spatial light modulator and method
US4662746A (en) * 1985-10-30 1987-05-05 Texas Instruments Incorporated Spatial light modulator and method
US5216537A (en) * 1990-06-29 1993-06-01 Texas Instruments Incorporated Architecture and process for integrating DMD with control circuit substrates
US5583688A (en) * 1993-12-21 1996-12-10 Texas Instruments Incorporated Multi-level digital micromirror device
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
US6046840A (en) * 1995-06-19 2000-04-04 Reflectivity, Inc. Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US5835256A (en) * 1995-06-19 1998-11-10 Reflectivity, Inc. Reflective spatial light modulator with encapsulated micro-mechanical elements
KR100243190B1 (ko) * 1996-06-10 2000-02-01 윤종용 가동미러장치 및 그 제조방법
WO2000017695A1 (en) * 1998-09-24 2000-03-30 Reflectivity, Inc. A double substrate reflective spatial light modulator with self-limiting micro-mechanical elements
US6323834B1 (en) * 1998-10-08 2001-11-27 International Business Machines Corporation Micromechanical displays and fabrication method
US6266178B1 (en) * 1998-12-28 2001-07-24 Texas Instruments Incorporated Guardring DRAM cell
US6935023B2 (en) * 2000-03-08 2005-08-30 Hewlett-Packard Development Company, L.P. Method of forming electrical connection for fluid ejection device
US6639713B2 (en) * 2000-04-25 2003-10-28 Umachines, Inc. Silicon micromachined optical device
US6867897B2 (en) * 2003-01-29 2005-03-15 Reflectivity, Inc Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US6873450B2 (en) * 2000-08-11 2005-03-29 Reflectivity, Inc Micromirrors with mechanisms for enhancing coupling of the micromirrors with electrostatic fields
US6576496B1 (en) * 2000-08-21 2003-06-10 Micron Technology, Inc. Method and apparatus for encapsulating a multi-chip substrate array
JP4360582B2 (ja) * 2000-10-31 2009-11-11 京セラ株式会社 デジタルマイクロミラーデバイス収納用パッケージ
FR2820833B1 (fr) * 2001-02-15 2004-05-28 Teem Photonics Micro-miroir optique a pivot, matrice de tels micro-miroirs et procede de realisation dudit micro-miroir
US6922499B2 (en) * 2001-07-24 2005-07-26 Lucent Technologies Inc. MEMS driver circuit arrangement
US6838302B2 (en) * 2002-01-11 2005-01-04 Reflectivity, Inc Method for adjusting a micro-mechanical device
JP2004130507A (ja) * 2002-09-19 2004-04-30 Nippon Telegr & Teleph Corp <Ntt> 電子部品装置
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US7183618B2 (en) * 2004-08-14 2007-02-27 Fusao Ishii Hinge for micro-mirror devices

Also Published As

Publication number Publication date
US20080180778A1 (en) 2008-07-31
JP2007510954A (ja) 2007-04-26
WO2005046206A3 (en) 2006-05-18
US20050094241A1 (en) 2005-05-05
WO2005046206A2 (en) 2005-05-19
US7746538B2 (en) 2010-06-29
US7375872B2 (en) 2008-05-20
US20060018005A1 (en) 2006-01-26

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