ATE343149T1 - Optischer schalter - Google Patents

Optischer schalter

Info

Publication number
ATE343149T1
ATE343149T1 AT03010479T AT03010479T ATE343149T1 AT E343149 T1 ATE343149 T1 AT E343149T1 AT 03010479 T AT03010479 T AT 03010479T AT 03010479 T AT03010479 T AT 03010479T AT E343149 T1 ATE343149 T1 AT E343149T1
Authority
AT
Austria
Prior art keywords
electrode
single crystal
crystal silicon
silicon layer
fixed electrode
Prior art date
Application number
AT03010479T
Other languages
English (en)
Inventor
Yoshichika Kato
Original Assignee
Japan Aviation Electron
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Aviation Electron filed Critical Japan Aviation Electron
Application granted granted Critical
Publication of ATE343149T1 publication Critical patent/ATE343149T1/de

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0002—Arrangements for avoiding sticking of the flexible or moving parts
    • B81B3/001—Structures having a reduced contact area, e.g. with bumps or with a textured surface
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Laser Surgery Devices (AREA)
  • Push-Button Switches (AREA)
AT03010479T 2002-05-10 2003-05-09 Optischer schalter ATE343149T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002135574A JP3639978B2 (ja) 2002-05-10 2002-05-10 光スイッチ

Publications (1)

Publication Number Publication Date
ATE343149T1 true ATE343149T1 (de) 2006-11-15

Family

ID=29244230

Family Applications (1)

Application Number Title Priority Date Filing Date
AT03010479T ATE343149T1 (de) 2002-05-10 2003-05-09 Optischer schalter

Country Status (7)

Country Link
US (1) US6999650B2 (de)
EP (1) EP1361469B1 (de)
JP (1) JP3639978B2 (de)
KR (1) KR100485421B1 (de)
CN (1) CN1210597C (de)
AT (1) ATE343149T1 (de)
DE (1) DE60309097T2 (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005107180A (ja) * 2003-09-30 2005-04-21 Japan Aviation Electronics Industry Ltd 微小光デバイスおよびその作製方法
JP4559273B2 (ja) * 2005-03-30 2010-10-06 シチズンファインテックミヨタ株式会社 アクチュエータの製造方法
US8077752B2 (en) * 2008-01-10 2011-12-13 Sony Corporation Vertical cavity surface emitting laser
JP4582237B2 (ja) 2008-01-10 2010-11-17 ソニー株式会社 面発光型半導体レーザ
KR100888076B1 (ko) * 2008-05-02 2009-03-11 이화여자대학교 산학협력단 자가 정렬 전극을 이용한 마이크로미러 제작 방법
JP5226488B2 (ja) * 2008-12-05 2013-07-03 浜松ホトニクス株式会社 光素子モジュールの製造方法
NO333724B1 (no) * 2009-08-14 2013-09-02 Sintef En mikromekanisk rekke med optisk reflekterende overflater
US8757897B2 (en) * 2012-01-10 2014-06-24 Invensas Corporation Optical interposer
KR20150034829A (ko) * 2013-08-30 2015-04-06 주식회사 엔씰텍 플렉시블 정보 표시 소자 제조용 지지 기판, 이의 제조 방법, 이를 이용하여 제조된 플렉시블 정보 표시 소자 및 이의 제조방법
KR102353030B1 (ko) 2014-01-27 2022-01-19 코닝 인코포레이티드 얇은 시트와 캐리어의 제어된 결합을 위한 물품 및 방법
CN103779114B (zh) * 2014-02-10 2015-07-29 北京市农林科学院 电磁式光路转换开关
SG11201608442TA (en) 2014-04-09 2016-11-29 Corning Inc Device modified substrate article and methods for making
KR102573207B1 (ko) 2015-05-19 2023-08-31 코닝 인코포레이티드 시트와 캐리어의 결합을 위한 물품 및 방법
CN117534339A (zh) 2015-06-26 2024-02-09 康宁股份有限公司 包含板材和载体的方法和制品
FR3051973B1 (fr) 2016-05-24 2018-10-19 X-Fab France Procede de formation de transistors pdsoi et fdsoi sur un meme substrat
TW201825623A (zh) 2016-08-30 2018-07-16 美商康寧公司 用於片材接合的矽氧烷電漿聚合物
TWI821867B (zh) 2016-08-31 2023-11-11 美商康寧公司 具以可控制式黏結的薄片之製品及製作其之方法
WO2019036710A1 (en) 2017-08-18 2019-02-21 Corning Incorporated TEMPORARY BINDING USING POLYCATIONIC POLYMERS
JP7431160B2 (ja) 2017-12-15 2024-02-14 コーニング インコーポレイテッド 基板を処理するための方法および結合されたシートを含む物品を製造するための方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10256563A (ja) 1997-03-07 1998-09-25 Toyota Motor Corp 状態量検知センサ
CA2299832C (en) 1999-03-04 2002-11-12 Japan Aviation Electronics Industry Limited Optical switch and method of making the same
JP3577693B2 (ja) 2000-03-14 2004-10-13 日本航空電子工業株式会社 微小可動デバイスおよびその製造方法
JP2002082292A (ja) 2000-09-06 2002-03-22 Japan Aviation Electronics Industry Ltd 光スイッチ
JP3557525B2 (ja) 2001-03-29 2004-08-25 日本航空電子工業株式会社 微小可動デバイス
JP3668935B2 (ja) 2001-07-27 2005-07-06 日本航空電子工業株式会社 静電駆動デバイス
KR100630617B1 (ko) 2001-08-10 2006-10-02 닛뽄 고쿠 덴시 고교 가부시키가이샤 광 스위치 및 그 제조방법

Also Published As

Publication number Publication date
JP2003329946A (ja) 2003-11-19
EP1361469A1 (de) 2003-11-12
DE60309097D1 (de) 2006-11-30
KR20030087970A (ko) 2003-11-15
US20030210853A1 (en) 2003-11-13
CN1210597C (zh) 2005-07-13
US6999650B2 (en) 2006-02-14
KR100485421B1 (ko) 2005-04-27
CN1456912A (zh) 2003-11-19
DE60309097T2 (de) 2007-03-08
EP1361469B1 (de) 2006-10-18
JP3639978B2 (ja) 2005-04-20

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