JP2007502530A - 歪み解放バンプ設計による半導体装置 - Google Patents
歪み解放バンプ設計による半導体装置 Download PDFInfo
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Abstract
Description
上記のニーズは、下層にあるパッシベーション層からの剥離、即ち層剥離が可能であり、CTE差による応力を軽減するため屈曲可能であり、電気的不具合を生じることなく、屈曲に耐え得る厚さの再分配導電体を有するバンプ半導体装置を提供して達成されることが認められた。以下に、そのような再分配導電体について詳細に説明する。
Claims (40)
- コンタクトパッドを上部に有する半導体基板と、
前記コンタクトパッドに電気的に接続されるベース部を有し、かつ横方向延在部を有する再分配導電体と、
前記横方向延在部と前記基板との間に配置されるパッシベーション層とを備え、
前記横方向延在部によって、前記パッシベーション層との弱い結合が形成される装置。 - 請求項1記載の装置において、
前記横方向延在部は渦巻形状をなす装置。 - 請求項1記載の装置において、
前記横方向延在部は、バンプコンタクトまで延びると共に、前記ベース部から前記バンプコンタクトに至る途中で少なくとも2回、その方向が変更される装置。 - 請求項1記載の装置において、
前記横方向延在部は、バンプコンタクトまで延びると共に、前記ベース部から前記バンプコンタクトに至る途中で少なくとも3回、その方向が変更される装置。 - 請求項1記載の装置において、
前記横方向延在部は略蛇行形状をなす装置。 - 請求項1記載の装置において、
前記横方向延在部は、約115°〜約155°の範囲の角度で組み合わされた複数の直線部から構成される装置。 - 請求項1記載の装置において、
前記横方向延在部は、約125°〜約145°の範囲の角度で組み合わされた複数の直線部から構成される装置。 - 請求項1記載の装置において、
前記横方向延在部は、その中心を通り、かつ同横方向延在部と直交する軸に沿って測定した場合、少なくとも約3μmの平均最小厚さを有している装置。 - 請求項1記載の装置において、
前記横方向延在部は、その中心を通り、かつ同横方向延在部と直交する軸に沿って測定した場合、約8μm〜約16μmの範囲の平均最小厚さを有している装置。 - 請求項1記載の装置において、
前記ベース部と反対側の再分配導電体の末端付近に形成され、同再分配導電体と電気的に接続されるハンダバンプを更に備える装置。 - 請求項1記載の装置において、
前記再分配導電体に電気的に接続されるバンプコンタクト、及び前記バンプコンタクトと接触するPCB基板を更に備える装置。 - 請求項11記載の装置において、
前記PCB基板は、空間部によって前記再分配導電体から分離されている装置。 - 請求項1記載の装置において、
前記横方向延在部と前記パッシベーション層との間に配置される解放層を更に備える装置。 - 請求項13記載の装置において、
前記解放層はTiWからなる装置。 - コンタクトパッドを有する半導体基板と、
パッシベーション層と、
前記コンタクトパッドに電気的に接続されるベース部及び前記パッシベーション層上に延びる横方向延在部を有する再分配導電体と、
前記パッシベーション層と前記横方向延在部との間に配置される解放層と
を備える装置。 - 請求項15記載の装置において、
前記解放層はTiWからなる装置。 - 請求項16記載の装置において、
前記再分配導電体は銅からなる装置。 - 請求項15記載の装置において、
前記ベース部と反対側の前記再分配導電体の末端付近に形成され、同再分配導電体に電気的に接続されるハンダバンプを更に備える装置。 - 請求項18記載の装置において、
前記再分配導電体には、前記ハンダバンプに隣接してハンダマスクが設けられている装置。 - 請求項18記載の装置において、
前記ハンダバンプと接触する実装基板を更に備え、前記実装基板は、空間部によって前記再分配導電体から分離されている装置。 - 請求項15記載の装置において、
前記横方向延在部は、その中心を通り、かつ同横方向延在部と直交する軸に沿って測定した場合、少なくとも約3μmの平均最小厚さを有している装置。 - 請求項15記載の装置において、
前記横方向延在部は、その中心を通り、かつ同横方向延在部と直交する軸に沿って測定した場合、約8μm〜約16μmの範囲の平均最小厚さを有している装置。 - 半導体装置の製造方法において、
コンタクトパッドを有する半導体基板を提供するステップと、
前記基板上にパッシベーション層を形成し、前記コンタクトパッドの少なくとも一部が露出するように前記パッシベーション層をパターニングするステップと、
前記コンタクトパッドに電気的に接続されるベース部を有し、前記パッシベーション層上に延びる渦巻状の横方向延在部を有する再分配導電体を形成するステップとを備え、
前記横方向延在部によって、前記パッシベーション層との弱い結合が形成される方法。 - 請求項23記載の方法において、
前記パッシベーション層上に解放層を形成するステップを更に備える方法。 - 請求項24記載の方法において、
前記解放層は、前記再分配導電体と前記パッシベーション層との間に配置される方法。 - 請求項24記載の方法において、
前記解放層はTiWからなる方法。 - 請求項23記載の方法において、
前記パッシベーション層上に金属層を成膜するステップと、
前記金属層上にフォトレジスト層を成膜し、前記金属層の一部が露出するようにパターニングするステップと、
前記金属層の露出部を再分配導電体材料により電気メッキするステップとによって前記再分配導電体を形成する方法。 - 請求項27記載の方法において、
前記横方向延在部の中心を通り、かつ同横方向延在部に直交する軸に沿って測定した場合、少なくとも約3μmの最小厚さを有するように、再分配導電体材料が電気メッキされる方法。 - 半導体装置の製造方法において、
コンタクトパッドを有する半導体基板を提供するステップと、
前記基板上にパッシベーション層を成膜し、前記コンタクトパッドの少なくとも一部を露出させるように前記パッシベーション層をパターニングするステップと、
前記パッシベーション層上に金属層を成膜するステップと、
前記金属層上にフォトレジスト層を成膜し、前記コンタクトパッドに隣接する前記金属層の少なくとも一部が露出するように前記フォトレジスト層をパターニングするステップと、
前記再分配導電体が前記コンタクトパッドに電気的に接続されるベース部及び横方向延在部を有するように、同再分配導電体によって前記金属層の前記露出部を電気メッキするステップと
を備える方法。 - 請求項29記載の方法において、
前記再分配導電体は、前記横方向延在部の中心を通り、かつ同横方向延在部に直交する軸に沿って測定した場合、少なくとも約3μmの平均最小厚さを有している方法。 - 請求項29記載の方法において、
前記フォトレジスト層は、前記横方向延在部が渦巻形状をなすようにパターニングされる方法。 - 請求項29記載の方法において、
前記金属層によって、前記パッシベーション層との弱い結合が形成されるようにした方法。 - 請求項29記載の方法において、
前記フォトレジスト層は、前記横方向延在部が略蛇行形状をなすようにパターニングされる方法。 - 請求項29記載の方法において、
前記横方向延在部は、その中心を通り、かつ同横方向延在部に直交する軸に沿って測定した場合、約8μm〜約16μmの範囲の平均最小厚さを有している方法。 - 請求項29記載の方法において、
前記ベース部と反対側の前記再分配導電体の末端付近において、同再分配導電体に電気的に接続されるハンダバンプを形成するステップを更に備える方法。 - 請求項29記載の方法において、
前記横方向延在部は、ハンダ接合部に接続されると共に、前記第1のパッシベーション層から層間剥離して、前記ハンダ接合部に作用する応力を低減するように構成されている方法。 - 請求項29記載の方法において、
前記横方向延在部は、ハンダ接合部に接続されると共に前記パッシベーション層と前記金属層の間の結合を十分に弱くすることによって、十分な応力が前記ハンダ接合部に作用したときに前記パッシベーション層から分離するようにした方法。 - 請求項29記載の方法において、
前記再分配導電体は銅からなり、前記金属層はTiWの第1の層及び銅の第2の層からなり、前記パッシベーション層はポリイミドからなる方法。 - 請求項29記載の方法において、
前記再分配導電体上にデウェッティング剤を部分的に成膜するステップを更に備える方法。 - 請求項39記載の方法において、
前記金属層及び前記デウェッティング剤はいずれもTiWからなる方法。
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US10/631,102 US6790759B1 (en) | 2003-07-31 | 2003-07-31 | Semiconductor device with strain relieving bump design |
PCT/US2004/022433 WO2005013319A2 (en) | 2003-07-31 | 2004-07-13 | Semiconductor device with strain relieving bump design |
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