JP2007500364A5 - - Google Patents

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Publication number
JP2007500364A5
JP2007500364A5 JP2006533728A JP2006533728A JP2007500364A5 JP 2007500364 A5 JP2007500364 A5 JP 2007500364A5 JP 2006533728 A JP2006533728 A JP 2006533728A JP 2006533728 A JP2006533728 A JP 2006533728A JP 2007500364 A5 JP2007500364 A5 JP 2007500364A5
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JP
Japan
Prior art keywords
trace gas
test line
vacuum pump
gas
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006533728A
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English (en)
Japanese (ja)
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JP2007500364A (ja
JP4431145B2 (ja
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Application filed filed Critical
Priority claimed from PCT/US2004/018615 external-priority patent/WO2004111599A1/en
Publication of JP2007500364A publication Critical patent/JP2007500364A/ja
Publication of JP2007500364A5 publication Critical patent/JP2007500364A5/ja
Application granted granted Critical
Publication of JP4431145B2 publication Critical patent/JP4431145B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006533728A 2003-06-11 2004-06-10 大規模漏れテスト方法および装置 Expired - Fee Related JP4431145B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47757803P 2003-06-11 2003-06-11
PCT/US2004/018615 WO2004111599A1 (en) 2003-06-11 2004-06-10 Method and apparatus for large leak testing

Publications (3)

Publication Number Publication Date
JP2007500364A JP2007500364A (ja) 2007-01-11
JP2007500364A5 true JP2007500364A5 (https=) 2007-07-19
JP4431145B2 JP4431145B2 (ja) 2010-03-10

Family

ID=33551731

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006533728A Expired - Fee Related JP4431145B2 (ja) 2003-06-11 2004-06-10 大規模漏れテスト方法および装置

Country Status (6)

Country Link
US (1) US7204127B2 (https=)
EP (1) EP1631807B1 (https=)
JP (1) JP4431145B2 (https=)
CN (1) CN100529705C (https=)
DE (1) DE602004010257T2 (https=)
WO (1) WO2004111599A1 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1631806B1 (en) * 2003-06-11 2011-04-20 Agilent Technologies, Inc. Methods and apparatus for detection of large leaks in sealed articles
US7892084B2 (en) * 2003-09-12 2011-02-22 Video Gaming Technologies System and method for simulating the outcome of an electronic game as a keno game
US7500381B2 (en) * 2006-08-31 2009-03-10 Varian, Inc. Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
US20080202210A1 (en) * 2007-02-28 2008-08-28 Varian, Inc. Test gas leak detection using a composite membrane
US7497110B2 (en) * 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
JP4941275B2 (ja) * 2007-12-20 2012-05-30 富士通株式会社 防水試験装置、防水試験方法および防水試験プログラム
CN101614564B (zh) * 2009-07-28 2011-02-09 上海市建筑科学研究院(集团)有限公司 一种室内高大空间自然通风量测试装置及方法
CN103069261B (zh) * 2010-07-05 2016-02-10 国立大学法人山口大学 漏泄检查装置及漏泄检查方法
US8453493B2 (en) 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
US9038441B2 (en) * 2012-01-20 2015-05-26 TLI Enterprises, Inc. High speed helium leak detection system and method
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass
CN107367359B (zh) * 2017-07-31 2019-04-19 哈尔滨电机厂有限责任公司 大型汽轮发电机真空衰减试验检测分析装置
CN109323815A (zh) * 2017-07-31 2019-02-12 深圳市远望工业自动化设备有限公司 具有气体回收机构的质谱检漏设备及质谱检漏方法
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
CN116430916B (zh) * 2023-06-08 2023-09-29 北京科技大学 基于渗透法精确控制小腔体气体压强集成装置及测试方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1648648C3 (de) * 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
FR2604522B1 (fr) 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
EP0283543B1 (de) * 1987-03-27 1991-12-11 Leybold Aktiengesellschaft Lecksuchgerät und Betriebsverfahren dazu
FR2666410B1 (fr) * 1990-09-05 1993-10-08 Alcatel Cit Detecteur de fuite haut flux a trois filtres moleculaires.
US5625141A (en) * 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
FR2734633B1 (fr) * 1995-05-24 1997-06-20 Cit Alcatel Installation pour detecter la presence d'helium dans un circuit de fluide
FR2761776B1 (fr) * 1997-04-03 1999-07-23 Alsthom Cge Alcatel Detecteur de fuite a gaz traceur

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