CN100529705C - 用于大泄漏测试的方法和装置 - Google Patents

用于大泄漏测试的方法和装置 Download PDF

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Publication number
CN100529705C
CN100529705C CNB2004800016447A CN200480001644A CN100529705C CN 100529705 C CN100529705 C CN 100529705C CN B2004800016447 A CNB2004800016447 A CN B2004800016447A CN 200480001644 A CN200480001644 A CN 200480001644A CN 100529705 C CN100529705 C CN 100529705C
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CN
China
Prior art keywords
tracer gas
permeable member
vacuum pump
test line
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CNB2004800016447A
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English (en)
Chinese (zh)
Other versions
CN1720433A (zh
Inventor
查尔斯·伯金斯
彼得·N·帕伦斯蒂恩
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Agilent Technologies Inc
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Varian Inc
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Publication date
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Publication of CN1720433A publication Critical patent/CN1720433A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
CNB2004800016447A 2003-06-11 2004-06-10 用于大泄漏测试的方法和装置 Expired - Fee Related CN100529705C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US47757803P 2003-06-11 2003-06-11
US60/477,578 2003-06-11

Publications (2)

Publication Number Publication Date
CN1720433A CN1720433A (zh) 2006-01-11
CN100529705C true CN100529705C (zh) 2009-08-19

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ID=33551731

Family Applications (1)

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CNB2004800016447A Expired - Fee Related CN100529705C (zh) 2003-06-11 2004-06-10 用于大泄漏测试的方法和装置

Country Status (6)

Country Link
US (1) US7204127B2 (https=)
EP (1) EP1631807B1 (https=)
JP (1) JP4431145B2 (https=)
CN (1) CN100529705C (https=)
DE (1) DE602004010257T2 (https=)
WO (1) WO2004111599A1 (https=)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1631806B1 (en) * 2003-06-11 2011-04-20 Agilent Technologies, Inc. Methods and apparatus for detection of large leaks in sealed articles
US7892084B2 (en) * 2003-09-12 2011-02-22 Video Gaming Technologies System and method for simulating the outcome of an electronic game as a keno game
US7500381B2 (en) * 2006-08-31 2009-03-10 Varian, Inc. Systems and methods for trace gas leak detection of large leaks at relatively high test pressures
US20080202210A1 (en) * 2007-02-28 2008-08-28 Varian, Inc. Test gas leak detection using a composite membrane
US7497110B2 (en) * 2007-02-28 2009-03-03 Varian, Inc. Methods and apparatus for test gas leak detection
JP4941275B2 (ja) * 2007-12-20 2012-05-30 富士通株式会社 防水試験装置、防水試験方法および防水試験プログラム
CN101614564B (zh) * 2009-07-28 2011-02-09 上海市建筑科学研究院(集团)有限公司 一种室内高大空间自然通风量测试装置及方法
CN103069261B (zh) * 2010-07-05 2016-02-10 国立大学法人山口大学 漏泄检查装置及漏泄检查方法
US8453493B2 (en) 2010-11-02 2013-06-04 Agilent Technologies, Inc. Trace gas sensing apparatus and methods for leak detection
US9038441B2 (en) * 2012-01-20 2015-05-26 TLI Enterprises, Inc. High speed helium leak detection system and method
DE102013218506A1 (de) * 2013-09-16 2015-03-19 Inficon Gmbh Schnüffellecksucher mit mehrstufiger Membranpumpe
DE102013219464A1 (de) * 2013-09-26 2015-03-26 Inficon Gmbh Evakuierung einer Folienkammer
DE102015222213A1 (de) * 2015-11-11 2017-05-11 Inficon Gmbh Druckmessung am Prüfgaseinlass
CN107367359B (zh) * 2017-07-31 2019-04-19 哈尔滨电机厂有限责任公司 大型汽轮发电机真空衰减试验检测分析装置
CN109323815A (zh) * 2017-07-31 2019-02-12 深圳市远望工业自动化设备有限公司 具有气体回收机构的质谱检漏设备及质谱检漏方法
FR3070489B1 (fr) * 2017-08-29 2020-10-23 Pfeiffer Vacuum Detecteur de fuites et procede de detection de fuites pour le controle de l'etancheite d'objets a tester
FR3072774B1 (fr) * 2017-10-19 2019-11-15 Pfeiffer Vacuum Detecteur de fuites pour le controle de l'etancheite d'un objet a tester
CN116430916B (zh) * 2023-06-08 2023-09-29 北京科技大学 基于渗透法精确控制小腔体气体压强集成装置及测试方法

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520176A (en) * 1967-04-12 1970-07-14 Pfeiffer Vakuumtechnik System for detection of leaks in vessels
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US4773256A (en) * 1986-09-26 1988-09-27 Alcatel Cit Installation for detecting a leak of tracer gas, and a method of use
US4779449A (en) * 1987-03-27 1988-10-25 Leybold-Heraeus Gmbh Leak detector and leak detection method
US5193380A (en) * 1990-09-05 1993-03-16 Alcatel Cit High flow-rate leak detector having three molecular filters
US5625141A (en) * 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US5661229A (en) * 1993-08-05 1997-08-26 Leybold Aktiengesellschaft Test gas detector, preferably for leak detectors, and process for operating a test gas detector of this kind
US5728929A (en) * 1995-05-24 1998-03-17 Alcatel Cit Installation for detecting the presence of helium in a fluid circuit
US6014892A (en) * 1997-04-03 2000-01-18 Alcatel Tracer gas leak detector

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3520176A (en) * 1967-04-12 1970-07-14 Pfeiffer Vakuumtechnik System for detection of leaks in vessels
US3591827A (en) * 1967-11-29 1971-07-06 Andar Iti Inc Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor
US3690151A (en) * 1968-07-25 1972-09-12 Norton Co Leak detector
US4773256A (en) * 1986-09-26 1988-09-27 Alcatel Cit Installation for detecting a leak of tracer gas, and a method of use
US4779449A (en) * 1987-03-27 1988-10-25 Leybold-Heraeus Gmbh Leak detector and leak detection method
US5193380A (en) * 1990-09-05 1993-03-16 Alcatel Cit High flow-rate leak detector having three molecular filters
US5625141A (en) * 1993-06-29 1997-04-29 Varian Associates, Inc. Sealed parts leak testing method and apparatus for helium spectrometer leak detection
US5661229A (en) * 1993-08-05 1997-08-26 Leybold Aktiengesellschaft Test gas detector, preferably for leak detectors, and process for operating a test gas detector of this kind
US5728929A (en) * 1995-05-24 1998-03-17 Alcatel Cit Installation for detecting the presence of helium in a fluid circuit
US6014892A (en) * 1997-04-03 2000-01-18 Alcatel Tracer gas leak detector

Also Published As

Publication number Publication date
EP1631807B1 (en) 2007-11-21
US20050199042A1 (en) 2005-09-15
US7204127B2 (en) 2007-04-17
JP2007500364A (ja) 2007-01-11
JP4431145B2 (ja) 2010-03-10
CN1720433A (zh) 2006-01-11
DE602004010257D1 (de) 2008-01-03
DE602004010257T2 (de) 2008-10-02
WO2004111599A1 (en) 2004-12-23
EP1631807A1 (en) 2006-03-08

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