CN1720432B - 用于密封物品中大泄漏检测的方法和装置 - Google Patents
用于密封物品中大泄漏检测的方法和装置 Download PDFInfo
- Publication number
- CN1720432B CN1720432B CN200480001643.2A CN200480001643A CN1720432B CN 1720432 B CN1720432 B CN 1720432B CN 200480001643 A CN200480001643 A CN 200480001643A CN 1720432 B CN1720432 B CN 1720432B
- Authority
- CN
- China
- Prior art keywords
- room
- tracer gas
- valve
- leak
- see
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
- G01M3/229—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators removably mounted in a test cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims (13)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US47752803P | 2003-06-11 | 2003-06-11 | |
US60/477,528 | 2003-06-11 | ||
PCT/US2004/018413 WO2004111598A1 (en) | 2003-06-11 | 2004-06-09 | Methods and apparatus for detection of large leaks in sealed articles |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1720432A CN1720432A (zh) | 2006-01-11 |
CN1720432B true CN1720432B (zh) | 2010-09-29 |
Family
ID=33551725
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN200480001643.2A Expired - Fee Related CN1720432B (zh) | 2003-06-11 | 2004-06-09 | 用于密封物品中大泄漏检测的方法和装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7320243B2 (zh) |
EP (1) | EP1631806B1 (zh) |
JP (1) | JP4431144B2 (zh) |
CN (1) | CN1720432B (zh) |
AT (1) | ATE506609T1 (zh) |
DE (1) | DE602004032333D1 (zh) |
WO (1) | WO2004111598A1 (zh) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7299681B2 (en) * | 2004-09-27 | 2007-11-27 | Idc, Llc | Method and system for detecting leak in electronic devices |
DE102005021909A1 (de) * | 2005-05-12 | 2006-11-16 | Inficon Gmbh | Schnüffellecksucher mit Quarzfenstersensor |
JP4475224B2 (ja) * | 2005-11-15 | 2010-06-09 | 株式会社デンソー | 気密漏れ検査装置 |
CN100592078C (zh) * | 2006-10-23 | 2010-02-24 | 福建赛特新材料有限公司 | 用于真空绝热板的阻隔薄膜漏率检测方法 |
US7707871B2 (en) * | 2007-09-24 | 2010-05-04 | Raytheon Company | Leak detection system with controlled differential pressure |
DE102009004363B4 (de) * | 2009-01-08 | 2022-08-25 | Inficon Gmbh | Leckdetektionsverfahren |
US8448498B1 (en) | 2010-08-27 | 2013-05-28 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Hermetic seal leak detection apparatus |
CN102564709A (zh) * | 2010-12-10 | 2012-07-11 | 中国航空工业集团公司第六三一研究所 | 一种密封结构零件的检漏方法 |
CN102226733B (zh) * | 2011-03-26 | 2014-04-30 | 常州亿晶光电科技有限公司 | 一种太阳能电池组件封装用硅胶的密封性能检测装置 |
US8975573B2 (en) | 2013-03-11 | 2015-03-10 | 1St Detect Corporation | Systems and methods for calibrating mass spectrometers |
US9097609B1 (en) * | 2013-04-30 | 2015-08-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Hermetic seal leak detection apparatus with variable size test chamber |
CN103278295B (zh) * | 2013-05-03 | 2017-07-04 | 北京市科通电子继电器总厂有限公司 | 一种多次压氦和预充氦压氦的氦质谱细检漏方法 |
CN103335795B (zh) * | 2013-07-02 | 2016-05-04 | 中国科学院光电研究院 | 真空密封件分压漏率测量系统及其测量方法 |
CN103411740B (zh) * | 2013-07-18 | 2016-05-11 | 北京市科通电子继电器总厂有限公司 | 一种积累氦质谱粗漏细漏组合检测元器件密封性的方法 |
CN103592086A (zh) * | 2013-09-23 | 2014-02-19 | 上海卫星装备研究所 | 航天器热管漏率检测装置及检测方法 |
CN103674448B (zh) * | 2013-11-08 | 2017-03-29 | 北京卫星环境工程研究所 | 压力控制系统与航天器密封舱连接处漏率检测装置及方法 |
CN104374534B (zh) * | 2014-11-14 | 2017-08-11 | 苏州市冯氏钣金有限公司 | 用于法兰组件的密封性检验装置 |
CN104729809A (zh) * | 2015-03-13 | 2015-06-24 | 安徽皖仪科技股份有限公司 | 一种加速器的氦质谱检漏方法 |
CN104931200A (zh) * | 2015-06-16 | 2015-09-23 | 广州超音速自动化科技股份有限公司 | 蒸发器检测流水线 |
CN106482913A (zh) * | 2015-08-31 | 2017-03-08 | 北京卫星环境工程研究所 | 基于氦气分离膜的压力产品总漏率测试方法 |
CN105092164A (zh) * | 2015-09-08 | 2015-11-25 | 深圳供电局有限公司 | 一种密封圈气密性检测方法及装置 |
CN107655635A (zh) * | 2017-09-20 | 2018-02-02 | 牛皓同 | 一种防水检测方法和防水可靠性检测方法 |
CN107941431A (zh) * | 2017-11-15 | 2018-04-20 | 丰川泽精工机械无锡有限公司 | 气体泄漏检测方法 |
CN107764487A (zh) * | 2017-11-15 | 2018-03-06 | 丰川泽精工机械无锡有限公司 | 气体泄漏检测装置 |
KR102016944B1 (ko) * | 2018-04-24 | 2019-09-03 | 한국에너지기술연구원 | 고압반응기의 기체 누설량 측정장치 및 측정방법 |
CN108981561B (zh) * | 2018-08-02 | 2020-11-03 | 河北盛世天昕电子科技有限公司 | 一种漏气孔确定方法、真空电机及其吸附物品检测方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0352371A2 (en) * | 1988-07-27 | 1990-01-31 | VARIAN S.p.A. | Detector for helium leaks |
US5325708A (en) * | 1992-05-14 | 1994-07-05 | Varian S.P.A. | Detector for helium leaks |
EP0632258A2 (en) * | 1993-06-29 | 1995-01-04 | Varian Associates, Inc. | Methods and apparatus for detection of large leaks |
US5661229A (en) * | 1993-08-05 | 1997-08-26 | Leybold Aktiengesellschaft | Test gas detector, preferably for leak detectors, and process for operating a test gas detector of this kind |
CN1187781A (zh) * | 1995-06-10 | 1998-07-15 | 莱博尔德真空技术有限责任公司 | 具有选择性作用的穿透面的气滤及制造此穿透面的方法 |
US6014892A (en) * | 1997-04-03 | 2000-01-18 | Alcatel | Tracer gas leak detector |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1302826B (zh) * | 1962-07-16 | Ges Fuer Kernforschung Mbh | ||
US3591827A (en) * | 1967-11-29 | 1971-07-06 | Andar Iti Inc | Ion-pumped mass spectrometer leak detector apparatus and method and ion pump therefor |
EP0365042A1 (de) * | 1987-03-31 | 1990-04-25 | FINN-AQUA SANTASALO-SOHLBERG GmbH | Verfahren zur Lecküberwachung von fluidführenden Leitungssystemen bei Gefriertrocknungseinrichtungen und für die Durchführung dieses Verfahrens geeignete Gefriertrocknungseinrichtung |
DE602004010257T2 (de) * | 2003-06-11 | 2008-10-02 | Varian, Inc., Palo Alto | Verfahren und vorrichtung zum erfassen von grossen leckagen |
-
2004
- 2004-06-09 JP JP2006533666A patent/JP4431144B2/ja not_active Expired - Fee Related
- 2004-06-09 AT AT04754880T patent/ATE506609T1/de not_active IP Right Cessation
- 2004-06-09 CN CN200480001643.2A patent/CN1720432B/zh not_active Expired - Fee Related
- 2004-06-09 WO PCT/US2004/018413 patent/WO2004111598A1/en active Application Filing
- 2004-06-09 US US10/524,244 patent/US7320243B2/en not_active Expired - Lifetime
- 2004-06-09 EP EP04754880A patent/EP1631806B1/en not_active Expired - Lifetime
- 2004-06-09 DE DE602004032333T patent/DE602004032333D1/de not_active Expired - Lifetime
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0352371A2 (en) * | 1988-07-27 | 1990-01-31 | VARIAN S.p.A. | Detector for helium leaks |
US5325708A (en) * | 1992-05-14 | 1994-07-05 | Varian S.P.A. | Detector for helium leaks |
EP0632258A2 (en) * | 1993-06-29 | 1995-01-04 | Varian Associates, Inc. | Methods and apparatus for detection of large leaks |
US5661229A (en) * | 1993-08-05 | 1997-08-26 | Leybold Aktiengesellschaft | Test gas detector, preferably for leak detectors, and process for operating a test gas detector of this kind |
CN1187781A (zh) * | 1995-06-10 | 1998-07-15 | 莱博尔德真空技术有限责任公司 | 具有选择性作用的穿透面的气滤及制造此穿透面的方法 |
US6014892A (en) * | 1997-04-03 | 2000-01-18 | Alcatel | Tracer gas leak detector |
Non-Patent Citations (1)
Title |
---|
EP 0632258 A2,说明书第3栏第15行至第5栏第18行、说明书附图1. |
Also Published As
Publication number | Publication date |
---|---|
US20060156795A1 (en) | 2006-07-20 |
ATE506609T1 (de) | 2011-05-15 |
JP4431144B2 (ja) | 2010-03-10 |
CN1720432A (zh) | 2006-01-11 |
DE602004032333D1 (de) | 2011-06-01 |
EP1631806A1 (en) | 2006-03-08 |
EP1631806B1 (en) | 2011-04-20 |
US7320243B2 (en) | 2008-01-22 |
WO2004111598A1 (en) | 2004-12-23 |
JP2007501947A (ja) | 2007-02-01 |
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Owner name: ANJELEN SCI. + TECH. INC. Free format text: FORMER OWNER: VARIAN INC. Effective date: 20110307 |
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Effective date of registration: 20110307 Address after: California, USA Patentee after: Anjelen Sci. & Tech. Inc. Address before: California, USA Patentee before: Varian Inc. |
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