JP2007332407A - 光学薄膜用蒸着材料 - Google Patents

光学薄膜用蒸着材料 Download PDF

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Publication number
JP2007332407A
JP2007332407A JP2006163423A JP2006163423A JP2007332407A JP 2007332407 A JP2007332407 A JP 2007332407A JP 2006163423 A JP2006163423 A JP 2006163423A JP 2006163423 A JP2006163423 A JP 2006163423A JP 2007332407 A JP2007332407 A JP 2007332407A
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JP
Japan
Prior art keywords
powder
oxide
vapor deposition
mgo
tungsten oxide
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2006163423A
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English (en)
Japanese (ja)
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JP2007332407A5 (https=
Inventor
Tokiko Hashimoto
時子 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Optron Inc
Original Assignee
Canon Optron Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Optron Inc filed Critical Canon Optron Inc
Priority to JP2006163423A priority Critical patent/JP2007332407A/ja
Publication of JP2007332407A publication Critical patent/JP2007332407A/ja
Publication of JP2007332407A5 publication Critical patent/JP2007332407A5/ja
Pending legal-status Critical Current

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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Physical Vapour Deposition (AREA)
  • Photovoltaic Devices (AREA)
JP2006163423A 2006-06-13 2006-06-13 光学薄膜用蒸着材料 Pending JP2007332407A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006163423A JP2007332407A (ja) 2006-06-13 2006-06-13 光学薄膜用蒸着材料

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006163423A JP2007332407A (ja) 2006-06-13 2006-06-13 光学薄膜用蒸着材料

Publications (2)

Publication Number Publication Date
JP2007332407A true JP2007332407A (ja) 2007-12-27
JP2007332407A5 JP2007332407A5 (https=) 2008-07-10

Family

ID=38932159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006163423A Pending JP2007332407A (ja) 2006-06-13 2006-06-13 光学薄膜用蒸着材料

Country Status (1)

Country Link
JP (1) JP2007332407A (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006219357A (ja) * 2005-02-14 2006-08-24 Sumitomo Metal Mining Co Ltd 酸化物焼結体、スパッタリングターゲットおよび透明導電性薄膜

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006219357A (ja) * 2005-02-14 2006-08-24 Sumitomo Metal Mining Co Ltd 酸化物焼結体、スパッタリングターゲットおよび透明導電性薄膜

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