JP2007323390A - 固体撮像装置 - Google Patents
固体撮像装置 Download PDFInfo
- Publication number
- JP2007323390A JP2007323390A JP2006153183A JP2006153183A JP2007323390A JP 2007323390 A JP2007323390 A JP 2007323390A JP 2006153183 A JP2006153183 A JP 2006153183A JP 2006153183 A JP2006153183 A JP 2006153183A JP 2007323390 A JP2007323390 A JP 2007323390A
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- 238000003384 imaging method Methods 0.000 title claims abstract description 88
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 239000004065 semiconductor Substances 0.000 claims abstract description 55
- 230000000903 blocking effect Effects 0.000 claims abstract description 50
- 238000009792 diffusion process Methods 0.000 claims abstract description 18
- 238000006243 chemical reaction Methods 0.000 claims abstract description 7
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 18
- 239000012535 impurity Substances 0.000 description 10
- 230000001681 protective effect Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000002829 reductive effect Effects 0.000 description 4
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000001151 other effect Effects 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1462—Coatings
- H01L27/14623—Optical shielding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/1464—Back illuminated imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
- H01L27/14601—Structural or functional details thereof
- H01L27/14625—Optical elements or arrangements associated with the device
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Image Input (AREA)
Abstract
【解決手段】固体撮像装置1は、半導体基板10、受光部20、および遮断膜30を備えている。この固体撮像装置1は、裏面入射型であり、半導体基板10の裏面S1に入射した光を光電変換することにより被撮像体を撮像する。受光部20は、上記光電変換により生じた信号電荷を受ける。半導体基板10中の受光部20が設けられた領域D1と裏面S1との間には、遮断膜30が設けられている。この遮断膜30は、上記信号電荷の拡散を遮る。
【選択図】図1
Description
図1は、本発明による固体撮像装置の第1実施形態を示す断面図である。固体撮像装置1は、半導体基板10、受光部20、および遮断膜30を備えている。本実施形態において半導体基板10は、P型シリコン基板である。この固体撮像装置1は、裏面入射型であり、半導体基板10の裏面S1に入射した光を光電変換することにより被撮像体を撮像する。
図3は、本発明による固体撮像装置の第2実施形態を示す断面図である。固体撮像装置2は、半導体基板10、受光部20、および遮断膜30を備えている。固体撮像装置2においては、遮断膜30の構成が図1の固体撮像装置1と相違する。固体撮像装置2のその他の構成は、固体撮像装置1と同様である。
図4は、本発明による固体撮像装置の第3実施形態を示す断面図である。固体撮像装置3は、半導体基板10、受光部20、および遮断膜30を備えている。固体撮像装置3においては、遮断膜30の構成が図1の固体撮像装置1と相違する。固体撮像装置3のその他の構成は、固体撮像装置1と同様である。
図5は、本発明による固体撮像装置の第4実施形態を示す断面図である。固体撮像装置4は、半導体基板10、受光部20、および遮断膜30を備えている。固体撮像装置4においては、遮断膜30の構成が図1の固体撮像装置1と相違する。固体撮像装置4のその他の構成は、固体撮像装置1と同様である。
2 固体撮像装置
3 固体撮像装置
4 固体撮像装置
10 半導体基板
10a 半導体基板
12 P型シリコン基板
14 P型エピタキシャル層
20 受光部
30 遮断膜
32 P+型不純物拡散層
40 MOSFET
42 N型不純物拡散層
43 ゲート絶縁膜
44 ゲート電極
50 配線層
52 配線
60 保護膜
90 指
92 指紋
D1 受光部が設けられた領域
L1 光源からの光
L2 透過光
S1 裏面
Claims (6)
- 半導体基板の裏面に入射した光を光電変換することにより被撮像体を撮像する固体撮像装置であって、
前記半導体基板中に設けられ、前記光電変換により生じた信号電荷を受ける受光部と、
前記半導体基板中の前記受光部が設けられた領域と前記裏面との間に設けられ、前記信号電荷の拡散を遮る遮断膜と、
を備えることを特徴とする固体撮像装置。 - 請求項1に記載の固体撮像装置において、
所定の間隔を空けて設けられた複数の前記受光部を備え、
前記遮断膜は、平面視で、当該複数の受光部間の前記間隔に位置する固体撮像装置。 - 請求項1または2に記載の固体撮像装置において、
前記遮断膜は、絶縁膜である固体撮像装置。 - 請求項1乃至3いずれかに記載の固体撮像装置において、
前記遮断膜は、前記裏面から前記半導体基板の内部に向かって延在している固体撮像装置。 - 請求項1乃至4いずれかに記載の固体撮像装置において、
前記遮断膜は、前記半導体基板の前記裏面と反対側の面である上面から当該半導体基板の内部に向かって延在している固体撮像装置。 - 請求項4または5に記載の固体撮像装置において、
前記遮断膜は、前記半導体基板を貫通している固体撮像装置。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006153183A JP5006581B2 (ja) | 2006-06-01 | 2006-06-01 | 固体撮像装置 |
US11/747,419 US7564113B2 (en) | 2006-06-01 | 2007-05-11 | Solid state imaging device |
CNA200710108833XA CN101083273A (zh) | 2006-06-01 | 2007-05-31 | 固态成像装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006153183A JP5006581B2 (ja) | 2006-06-01 | 2006-06-01 | 固体撮像装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011108645A Division JP2011171764A (ja) | 2011-05-13 | 2011-05-13 | 固体撮像装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007323390A true JP2007323390A (ja) | 2007-12-13 |
JP5006581B2 JP5006581B2 (ja) | 2012-08-22 |
Family
ID=38789085
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006153183A Expired - Fee Related JP5006581B2 (ja) | 2006-06-01 | 2006-06-01 | 固体撮像装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7564113B2 (ja) |
JP (1) | JP5006581B2 (ja) |
CN (1) | CN101083273A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013030803A (ja) * | 2012-10-22 | 2013-02-07 | Toshiba Corp | 固体撮像装置 |
US8823847B2 (en) | 2008-02-28 | 2014-09-02 | Kabushiki Kaisha Toshiba | Solid-state imaging device and manufacturing method thereof |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102350605B1 (ko) | 2017-04-17 | 2022-01-14 | 삼성전자주식회사 | 이미지 센서 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6369265A (ja) * | 1986-09-10 | 1988-03-29 | Nec Corp | 固体撮像素子 |
JPH0325972A (ja) * | 1989-06-23 | 1991-02-04 | Hitachi Ltd | 半導体記憶装置とその製造方法 |
JPH06216362A (ja) * | 1993-01-18 | 1994-08-05 | Matsushita Electron Corp | 固体撮像装置 |
JP2002217158A (ja) * | 2001-01-15 | 2002-08-02 | Hitachi Ltd | 半導体装置の製造方法 |
JP2006128392A (ja) * | 2004-10-28 | 2006-05-18 | Sony Corp | 固体撮像素子とその製造方法、並びに半導体装置とその製造方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4941029A (en) * | 1985-02-27 | 1990-07-10 | Westinghouse Electric Corp. | High resistance optical shield for visible sensors |
JP3457551B2 (ja) | 1998-11-09 | 2003-10-20 | 株式会社東芝 | 固体撮像装置 |
JP3150126B2 (ja) | 1999-02-03 | 2001-03-26 | 静岡日本電気株式会社 | 指紋入力装置 |
US6171885B1 (en) * | 1999-10-12 | 2001-01-09 | Taiwan Semiconductor Manufacturing Company | High efficiency color filter process for semiconductor array imaging devices |
JP3530466B2 (ja) | 2000-07-17 | 2004-05-24 | Necエレクトロニクス株式会社 | 固体撮像装置 |
GB0216075D0 (en) * | 2002-07-11 | 2002-08-21 | Qinetiq Ltd | Photodetector circuits |
JP4123446B2 (ja) | 2005-08-03 | 2008-07-23 | ソニー株式会社 | 固体撮像素子の製造方法 |
JP4992446B2 (ja) * | 2006-02-24 | 2012-08-08 | ソニー株式会社 | 固体撮像装置及びその製造方法、並びにカメラ |
-
2006
- 2006-06-01 JP JP2006153183A patent/JP5006581B2/ja not_active Expired - Fee Related
-
2007
- 2007-05-11 US US11/747,419 patent/US7564113B2/en not_active Expired - Fee Related
- 2007-05-31 CN CNA200710108833XA patent/CN101083273A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6369265A (ja) * | 1986-09-10 | 1988-03-29 | Nec Corp | 固体撮像素子 |
JPH0325972A (ja) * | 1989-06-23 | 1991-02-04 | Hitachi Ltd | 半導体記憶装置とその製造方法 |
JPH06216362A (ja) * | 1993-01-18 | 1994-08-05 | Matsushita Electron Corp | 固体撮像装置 |
JP2002217158A (ja) * | 2001-01-15 | 2002-08-02 | Hitachi Ltd | 半導体装置の製造方法 |
JP2006128392A (ja) * | 2004-10-28 | 2006-05-18 | Sony Corp | 固体撮像素子とその製造方法、並びに半導体装置とその製造方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8823847B2 (en) | 2008-02-28 | 2014-09-02 | Kabushiki Kaisha Toshiba | Solid-state imaging device and manufacturing method thereof |
JP2013030803A (ja) * | 2012-10-22 | 2013-02-07 | Toshiba Corp | 固体撮像装置 |
Also Published As
Publication number | Publication date |
---|---|
JP5006581B2 (ja) | 2012-08-22 |
US7564113B2 (en) | 2009-07-21 |
US20070278543A1 (en) | 2007-12-06 |
CN101083273A (zh) | 2007-12-05 |
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