JP2007322424A - Automatic optical inspection apparatus, system, and method - Google Patents

Automatic optical inspection apparatus, system, and method Download PDF

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JP2007322424A
JP2007322424A JP2007140455A JP2007140455A JP2007322424A JP 2007322424 A JP2007322424 A JP 2007322424A JP 2007140455 A JP2007140455 A JP 2007140455A JP 2007140455 A JP2007140455 A JP 2007140455A JP 2007322424 A JP2007322424 A JP 2007322424A
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unit
circuit board
automatic optical
printed circuit
inspection object
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JP5127301B2 (en
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Heigen Nin
炳 鉉 任
Genko Sai
鉉 鎬 崔
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AJUHITEK Inc
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AJUHITEK Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
    • G01M5/0033—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings by determining damage, crack or wear
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
    • G01N2021/8893—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques providing a video image and a processed signal for helping visual decision

Abstract

<P>PROBLEM TO BE SOLVED: To provide an automatic optical inspection system and its inspection method for automatically inspecting, using an optical method, the appearance of an object to be inspected of a film or tape form where a flexible print circuit board unit is formed continuously. <P>SOLUTION: The automatic optical inspection apparatus for optically inspecting a print circuit board comprises a photographing unit for photographing the print circuit board, a lighting unit for irradiating a photographing area of the print circuit board with light, and a support unit for supporting the photographing area of the print circuit board. The support unit has a transmission section that comes into contact with the photographing area of the print circuit board and transmits the light from the lighting unit. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、自動光学検査装置、自動光学検査システム及び自動光学検査方法に関し、さらに詳細には、フレキシブルプリント回路基板ユニットが連続的に形成されたフィルム又はテープ形態の検査対象物の外観を、光学的な方式を利用して自動検査する自動光学検査装置、自動光学検査システム及び自動光学検査方法に関する。   The present invention relates to an automatic optical inspection apparatus, an automatic optical inspection system, and an automatic optical inspection method. More specifically, the present invention relates to the appearance of an inspection object in the form of a film or tape on which a flexible printed circuit board unit is continuously formed. The present invention relates to an automatic optical inspection apparatus, an automatic optical inspection system, and an automatic optical inspection method that automatically inspect using a conventional method.

従来のフィルム又はテープ形態の印刷回路基板の光学検査において、連続してフィルムを搬送させ、かつ焦点がよく合うイメージは安定した検査を実施するための必須な要素である。しかし、最近では、このようなフィルム又はテープ形態の基板が徐々に微細化することにしたがって、イメージセンサの高解像度は必須不可欠な要素になっている。しかし、このような高解像度のイメージセンサにより安定したイメージを得るために用いられるレンズは、視野が狭くなることにしたがって、焦点深度の範囲が徐々に狭くなり、かつフィルム又はテープ形態のプリント回路基板も薄くなるため、連続した搬送においてフィルム又はテープ形態のプリント回路基板の歪みによって焦点がずれる原因になっている。   In a conventional optical inspection of a printed circuit board in the form of a film or a tape, an image in which the film is continuously conveyed and is in focus is an essential element for performing a stable inspection. Recently, however, the high resolution of an image sensor has become an indispensable element as the substrate in the form of a film or tape is gradually miniaturized. However, the lens used for obtaining a stable image by such a high-resolution image sensor has a depth of focus gradually narrowing as the field of view narrows, and a printed circuit board in the form of a film or tape Since the thickness of the printed circuit board is reduced, the film is defocused due to distortion of the printed circuit board in the form of a film or a tape during continuous conveyance.

本発明は、上述の問題を解決するためになされたもので、その目的は、安定した焦点を有するイメージを得ることができる自動光学検査装置、自動光学検査システム及び自動光学検査方法を提供することにある。   The present invention has been made to solve the above-described problems, and an object thereof is to provide an automatic optical inspection apparatus, an automatic optical inspection system, and an automatic optical inspection method capable of obtaining an image having a stable focus. It is in.

また、本発明の他の目的は、安定したフィルム平坦度を提供できる自動光学検査装置、自動光学検査システム及び自動光学検査方法を提供することにある。   Another object of the present invention is to provide an automatic optical inspection apparatus, an automatic optical inspection system, and an automatic optical inspection method that can provide stable film flatness.

上記の目的を達成するための本発明の一実施形態によれば、プリント回路基板を光学的に検査する自動光学検査装置において、プリント回路基板を撮影する撮影ユニットと、プリント回路基板の撮影領域に光を照射する照明ユニットと、プリント回路基板の撮影領域を支持する支持ユニットと、を備え、支持ユニットは、プリント回路基板の撮影領域と接触され、照明ユニットの光が透過される透過部を有する。   According to an embodiment of the present invention for achieving the above object, in an automatic optical inspection apparatus for optically inspecting a printed circuit board, an imaging unit for imaging the printed circuit board and an imaging area of the printed circuit board An illumination unit that emits light; and a support unit that supports an imaging region of the printed circuit board. The support unit includes a transmission unit that is in contact with the imaging region of the printed circuit board and transmits the light of the illumination unit. .

本発明の望ましい実施形態においては、支持ユニットの透過部は、照明ユニットとプリント回路基板の撮影領域との間の光経路上に位置する。   In a preferred embodiment of the present invention, the transmissive part of the support unit is located on the light path between the illumination unit and the imaging area of the printed circuit board.

本発明の望ましい実施形態においては、支持ユニットの透過部は、プリント回路基板の撮影領域の下面を支えつつ、プリント回路基板の移送によって回転されるローラ形状である。   In a preferred embodiment of the present invention, the transmissive part of the support unit has a roller shape that is rotated by the transfer of the printed circuit board while supporting the lower surface of the imaging area of the printed circuit board.

本発明の望ましい実施形態においては、自動光学検査装置は、撮影ユニットと、照明ユニットと、及び支持ユニットとを、プリント回路基板の搬送方向又は、プリント回路基板の搬送方向と垂直な方向に前後移動させる移動ユニットをさらに備える。   In a preferred embodiment of the present invention, the automatic optical inspection apparatus moves the imaging unit, the illumination unit, and the support unit back and forth in the printed circuit board transport direction or in a direction perpendicular to the printed circuit board transport direction. The mobile unit is further provided.

本発明の望ましい実施形態においては、支持ユニットの透過部は、プリント回路基板の撮影領域を支持するように凸面を有する。   In a preferred embodiment of the present invention, the transmission part of the support unit has a convex surface so as to support the imaging area of the printed circuit board.

本発明の望ましい実施形態においては、支持ユニットの透過部は、内部空間を有するローラ状からなり、照明ユニットは、透過部の内部空間に配置される。   In a preferred embodiment of the present invention, the transmission part of the support unit is formed in a roller shape having an internal space, and the illumination unit is disposed in the internal space of the transmission part.

上記の目的を達成するための本発明の一実施形態によれば、フレキシブルプリント回路基板ユニットが連続的に形成された検査対象物の自動光学検査システムにおいて、検査対象物が送出される巻出部と、巻出部から送出される検査対象物の表面を撮影する撮影部材と、検査を終えた検査対象物が巻き取られる巻取部と、を備え、撮影部材は、検査対象物の歪みが発生しないように、検査対象物の撮影領域を支持する支持ユニットと、支持ユニットを介して検査対象物の撮影領域に光を照射する照明ユニットと、照明ユニットの光が照射される検査対象物の撮影領域を撮影するカメラと、を備える。   According to one embodiment of the present invention for achieving the above object, in an automatic optical inspection system for an inspection object in which a flexible printed circuit board unit is continuously formed, an unwinding unit to which the inspection object is sent out And an imaging member that images the surface of the inspection object that is sent out from the unwinding unit, and a winding unit that winds up the inspection object that has been inspected, and the imaging member has a distortion of the inspection object. A support unit that supports the imaging area of the inspection object, a lighting unit that irradiates light to the imaging area of the inspection object via the support unit, and an inspection object that is irradiated with light from the illumination unit And a camera for photographing the photographing region.

本発明の望ましい実施形態においては、支持ユニットは、検査対象物の撮影領域と接触され、照明ユニットの光が透過される透過部を有する。   In a preferred embodiment of the present invention, the support unit has a transmission part that is in contact with the imaging region of the inspection object and through which the light of the illumination unit is transmitted.

本発明の望ましい実施形態においては、支持ユニットの透過部は、検査対象物の移送によって回転されるローラ形状である。   In a preferred embodiment of the present invention, the transmission part of the support unit has a roller shape that is rotated by the transfer of the inspection object.

本発明の望ましい実施形態においては、支持ユニットの透過部は、検査対象物の撮影領域を支持するように凸面を有する。   In desirable embodiment of this invention, the permeation | transmission part of a support unit has a convex surface so that the imaging region of a test subject may be supported.

本発明の望ましい実施形態においては、支持ユニットの透過部は、プリント回路基板の移送によって回転されるローラ状からなり、透過部は、内部に照明ユニットが配置される内部空間を有する。   In a preferred embodiment of the present invention, the transmissive part of the support unit has a roller shape that is rotated by the transfer of the printed circuit board, and the transmissive part has an internal space in which the illumination unit is disposed.

本発明の望ましい実施形態においては、フレキシブルプリント回路基板ユニットが連続的に形成された検査対象物を光学的な方式を利用して自動検査する方法において、支持ユニットが検査対象物の撮影領域を支持した状態で、照明ユニットの透過された光が検査対象物の撮影領域に照射され、検査対象物の撮影領域の上部に位置したカメラが検査対象物の撮影領域を撮影し、照明ユニットの透過される光は、支持ユニットを透過して検査対象物の撮影領域に照射される。   In a preferred embodiment of the present invention, in a method for automatically inspecting an inspection object on which a flexible printed circuit board unit is continuously formed using an optical method, a support unit supports an imaging region of the inspection object. In this state, the light transmitted through the illumination unit is irradiated onto the imaging area of the inspection object, and a camera positioned above the imaging area of the inspection object captures the imaging area of the inspection object and is transmitted through the illumination unit. The light passing through the support unit is irradiated onto the imaging region of the inspection object.

本発明の自動光学検査システムによれば、検査対象物の撮影領域に対する屈曲、曲げ、伸びによる歪み現象の防止ができる。本発明の自動光学検査システムは、安定した焦点を有する透過イメージを得ることができる。本発明の自動光学検査システムは、検査対象物に対してより高い検査品質を得ることができる。   According to the automatic optical inspection system of the present invention, it is possible to prevent a distortion phenomenon due to bending, bending, and elongation of the inspection object with respect to the imaging region. The automatic optical inspection system of the present invention can obtain a transmission image having a stable focus. The automatic optical inspection system of the present invention can obtain higher inspection quality for an inspection object.

本発明の実施形態は、様々な形態に変形されることができ、本発明の範囲は、以下に説明する実施形態によって限定されるわけではない。本発明の実施形態は、当業者に本発明をより完全に説明するために提供されるものである。したがって、図面における要素の形状などは、より明確な説明を強調するために誇張されることがある。   Embodiments of the present invention can be modified in various forms, and the scope of the present invention is not limited by the embodiments described below. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Accordingly, element shapes and the like in the drawings may be exaggerated to emphasize a clearer description.

本発明の実施形態を、図１乃至図１１に基づいて詳細に説明する。また、図面において同じ機能を果たす構成要素に対しては、同一の参照番号を付ける。   An embodiment of the present invention will be described in detail with reference to FIGS. 1 to 11. In the drawings, the same reference numerals are given to components having the same function.

図１は、本発明の実施形態に係る自動光学検査システム１００の主要構成を示す図である。図２及び図３は、ビジョン検査部１１０の撮影部材１２０を説明するための図である。   FIG. 1 is a diagram showing a main configuration of an automatic optical inspection system 100 according to an embodiment of the present invention. 2 and 3 are diagrams for explaining the photographing member 120 of the vision inspection unit 110. FIG.

図１乃至図３に示すように、本発明の実施形態に係る自動光学検査システム１００は、フレキシブルプリント回路基板ユニットが連続的に形成されたフィルム（ｆｉｌｍ）及びテープ（ｔａｐｅ）タイプなどの検査対象物１０をラインスキャンカメラなどを利用して自動検査するシステムである。   As shown in FIGS. 1 to 3, an automatic optical inspection system 100 according to an embodiment of the present invention is an inspection target such as a film or tape type in which flexible printed circuit board units are continuously formed. In this system, the object 10 is automatically inspected using a line scan camera or the like.

図１に表示された「→」符号は、検査対象物１０の移動経路を示したものである。   The “→” symbol displayed in FIG. 1 indicates the movement path of the inspection object 10.

図１に示すように、自動光学検査システム１００は、巻出部（ｆｅｅｄ ｒｏｌｌｅｒ、ｌｏａｄｅｒ）１０２、ビジョン検査部１１０、巻取部（ｗｉｎｄｉｎｇ ｒｏｌｌｅｒ、ｕｎｌｏａｄｅｒ）１０６で構成される。   As shown in FIG. 1, the automatic optical inspection system 100 includes a feed roller (loader) 102, a vision inspection unit 110, and a winding roller (unloader) 106.

巻出部１０２には、検査対象物１０がリール１０４に巻かれており、巻出部１０２から送出された検査対象物１０は、案内ローラ１０５を経てビジョン検査部１１０に供給される。検査対象物１０は、ビジョン検査部１１０を通過した後に巻取部１０６のリール１０８に巻かれる。   The inspection object 10 is wound around the reel 104 at the unwinding section 102, and the inspection object 10 sent from the unwinding section 102 is supplied to the vision inspection section 110 through the guide roller 105. The inspection object 10 is wound around the reel 108 of the winding unit 106 after passing through the vision inspection unit 110.

図１乃至図３に示すように、ビジョン検査部１１０は、検査対象物１０の検査領域（又は撮像領域）を撮影する撮影部材１２０と映像処理部１４０とを備える。ここで、検査対象物１０の撮影領域とは、最小限撮影部材１２０により撮影される領域を含み、かつ、支持ユニット１３０に接触される領域を含む。   As shown in FIGS. 1 to 3, the vision inspection unit 110 includes an imaging member 120 that captures an inspection area (or imaging area) of the inspection object 10 and an image processing unit 140. Here, the imaging area of the inspection object 10 includes a minimum area that is imaged by the imaging member 120 and an area that is in contact with the support unit 130.

まず、映像処理部１４０は、典型的なコンピュータシステムが備えられて、自動光学検査による諸動作を制御処理する。映像処理部１４０は、撮影ユニットから映像データを受けて検査対象物が良好であるか不良であるかを判別する。   First, the image processing unit 140 is provided with a typical computer system, and controls and processes various operations by automatic optical inspection. The video processing unit 140 receives video data from the imaging unit and determines whether the inspection object is good or bad.

撮影部材１２０は、撮影ユニット１２２と、照明ユニット１２４と、支持ユニット１３０とを備える。撮影ユニット１２２は、ＣＣＤラインセンサのようなイメージセンサとレンズ（図示せず）とを有するＣＣＤカメラであって、検査対象物１０の表面（パターン等）を撮影して、検査対象物１０に対した映像データを獲得する。このように獲得された映像データは、映像処理部１４０に供給される。例えば、撮影ユニット１２２は、エリアカメラが用いられることができ、ビジョン検査部１１０には、以後の検査対象物１０の検査条件及びユーザの要求事項に応じて撮影部材１２０をさらに設けることができる。   The photographing member 120 includes a photographing unit 122, a lighting unit 124, and a support unit 130. The photographing unit 122 is a CCD camera having an image sensor such as a CCD line sensor and a lens (not shown). The photographing unit 122 photographs the surface (pattern or the like) of the inspection object 10 and applies it to the inspection object 10. Acquired video data. The video data acquired in this way is supplied to the video processing unit 140. For example, an area camera can be used as the imaging unit 122, and the vision inspection unit 110 can further include an imaging member 120 according to the inspection conditions of the inspection object 10 and user requirements.

照明ユニット１２４は、支持ユニット１３０の下（検査対象物１０の撮影領域の下）に配置される。この照明ユニット１２４は、検査対象物１０の撮影領域に対する映像データを獲得するための光を出力する。照明ユニット１２４の光源１２４ａには、線形配列した複数の発光ダイオード、線形チューブ蛍光ランプ、ハロゲンランプ及びメタルハライドランプなどが用いられることができ、このような光源の上部には、光の均一度を上げるための拡散板１２４ｂが設けられることができる。   The illumination unit 124 is disposed below the support unit 130 (under the imaging region of the inspection object 10). The illumination unit 124 outputs light for acquiring video data for the imaging region of the inspection object 10. As the light source 124a of the illumination unit 124, a plurality of linearly arranged light emitting diodes, a linear tube fluorescent lamp, a halogen lamp, a metal halide lamp, and the like can be used. The light uniformity is increased above the light source. A diffusion plate 124b may be provided.

例えば、図９に示すように、照明ユニット１２４は、検査しようとする項目の特性又は光の照射特性などによって、支持ユニット１３０の側面、反射光を供給するための撮影領域の上部に配置されることができる。図９のように、照明ユニット１２４は、検査対象物１０に反射光を供給するために、検査対象物１０の上部に配置されることができる。   For example, as shown in FIG. 9, the illumination unit 124 is arranged on the side surface of the support unit 130 or the upper part of the imaging region for supplying reflected light depending on the characteristics of the item to be inspected or the light irradiation characteristics. be able to. As shown in FIG. 9, the illumination unit 124 may be disposed on the inspection object 10 in order to supply reflected light to the inspection object 10.

本発明において最も重要な構成要素である支持ユニット１３０は、図３に示すように、検査対象物１０の撮影領域が屈曲、曲げ、伸びによる歪み現象を最小化するためのものであって、検査対象物１０の撮影領域と直接的に接触され、照明ユニット１２４の光が透過されるローラ形状の透過部１３２と、透過部１３２の両端を回転可能に支持する支持軸１３４と、を備える。透過部１３２は、検査対象物１０の撮影領域の下面を支え、検査対象物１０の移送によって回転される。符号１３１は、ベアリングである。図３に示すように、支持ユニット１３０の透過部１３２は、照明ユニット１２４と検査対象物１０の撮影領域との間の光経路上に位置し、照明ユニット１２４から光が拡散する成分を集める機能も果たす。例えば、支持ユニット１３０の透過部１３２は、アクリル樹脂、ポリカーボネート樹脂、非晶性ポリオレフィン樹脂などの半透明／透明樹脂、ガラスなどの無機透明材料又はそれらの複合体が用いられることができるがこれらに限定されるわけではない。   As shown in FIG. 3, the support unit 130, which is the most important component in the present invention, is for minimizing a distortion phenomenon caused by bending, bending, and stretching of the imaging region of the inspection object 10, and A roller-shaped transmission part 132 that is in direct contact with the imaging region of the object 10 and through which the light of the illumination unit 124 is transmitted, and a support shaft 134 that rotatably supports both ends of the transmission part 132 are provided. The transmission part 132 supports the lower surface of the imaging region of the inspection object 10 and is rotated by the transfer of the inspection object 10. Reference numeral 131 denotes a bearing. As shown in FIG. 3, the transmission unit 132 of the support unit 130 is located on the light path between the illumination unit 124 and the imaging region of the inspection object 10 and collects components from which light diffuses from the illumination unit 124. Also fulfills. For example, the transmission unit 132 of the support unit 130 may be made of a translucent / transparent resin such as an acrylic resin, a polycarbonate resin, or an amorphous polyolefin resin, an inorganic transparent material such as glass, or a composite thereof. It is not limited.

このように、本発明の実施形態に係る自動光学検査装置１００は、検査対象物１０の撮影領域が支持ユニット１３０の透過部１３２により支持され、照明ユニット１２４の光が支持ユニットの透過部１３２を介して検査対象物１０の撮影領域に照射されるのにその構造的な特徴がある。このような構造的な特徴によれば、検査対象物１０の撮影領域に対する屈曲、曲げ、伸びによる歪み現象が防止されて、安定した焦点を有する透過イメージを得ることができる。しかしながら、図１１のように、検査対象物１０の撮影領域がローラ２０により直接支持されないとき、検査対象物１０が移送される過程で検査対象物１０に屈曲現象が発生することがある。このような検査対象物１０の屈曲現象は、焦点が安定的に結ばれる範囲（焦点深度）を外れるようになって、不安定な焦点を有するイメージを得るようになる。   As described above, in the automatic optical inspection apparatus 100 according to the embodiment of the present invention, the imaging region of the inspection object 10 is supported by the transmission unit 132 of the support unit 130, and the light of the illumination unit 124 passes through the transmission unit 132 of the support unit. The imaging region of the inspection object 10 is irradiated through the structure. According to such a structural feature, a distortion phenomenon due to bending, bending, and elongation of the inspection object 10 with respect to the imaging region is prevented, and a transmission image having a stable focus can be obtained. However, when the imaging region of the inspection object 10 is not directly supported by the roller 20 as shown in FIG. 11, a bending phenomenon may occur in the inspection object 10 in the process of transferring the inspection object 10. Such a bending phenomenon of the inspection object 10 comes out of the range (depth of focus) where the focus is stably formed, and an image having an unstable focus is obtained.

図４及び図５は、本発明に係る自動光学検査システム１００において、照明ユニット１２４が支持ユニット１３０ａの内部に設けられた撮影部材１２０ａを示す図である。   4 and 5 are diagrams showing the imaging member 120a in which the illumination unit 124 is provided inside the support unit 130a in the automatic optical inspection system 100 according to the present invention.

図４及び図５に示すように、支持ユニット１３０ａは、内部空間１３６を有するローラ形状の透過部１３２ａを有し、その透過部１３２ａの内部空間１３６には、照明ユニット１２４が設けられる。このように、図４及び図５に示す撮影部材１２０ａは、支持ユニット１３０ａの透過部１３２ａが照明ユニット１２４に設けられることができる十分な内部空間１３６を有するのにその構造的な特徴がある。このような構造的な特徴によれば、照明ユニット１２４の光が検査対象物１０の撮影領域まで到達する時間及び距離を短縮させることができ、かつ、照明ユニット１２４の光が通過する透過部１３２ａの厚さを著しく減らすことができるため、光の損失を減らし、光の強度を調節できる。   As shown in FIGS. 4 and 5, the support unit 130a has a roller-shaped transmission part 132a having an internal space 136, and an illumination unit 124 is provided in the internal space 136 of the transmission part 132a. As described above, the photographing member 120a shown in FIGS. 4 and 5 has a structural feature in that the transmission unit 132a of the support unit 130a has a sufficient internal space 136 in which the illumination unit 124 can be provided. According to such a structural feature, the time and distance for the light of the illumination unit 124 to reach the imaging region of the inspection object 10 can be shortened, and the transmission unit 132a through which the light of the illumination unit 124 passes. Can be significantly reduced, thereby reducing light loss and adjusting light intensity.

図６は、本発明に係る自動光学検査システムにおいて、３個の照明ユニットが支持ユニットの内部に設けられた撮影部材を示す図である。   FIG. 6 is a diagram showing an imaging member in which three illumination units are provided inside a support unit in the automatic optical inspection system according to the present invention.

図６に示すように、撮影部材１２０ｂは、支持ユニット１３０ｂの透過部１３２ｂが前で示した透過部１３２ａ、１３２に比べて相対的に大きな直径と内部空間を有し、透過部１３２ｂの内部空間１３６には、３個の照明ユニット１２４が配置され、その透過部１３２ｂの外部には、３個の撮影ユニット１２２が配置される。このように、支持ユニット１３０ｂの透過部１３２ｂは、内部に複数の照明ユニット１２４が設けられることができる。   As shown in FIG. 6, in the photographing member 120b, the transmission part 132b of the support unit 130b has a relatively large diameter and internal space compared to the transmission parts 132a and 132 shown above, and the internal space of the transmission part 132b. Three illumination units 124 are arranged in 136, and three photographing units 122 are arranged outside the transmission part 132b. As described above, the transmission unit 132b of the support unit 130b may include a plurality of illumination units 124 therein.

例えば、支持ユニット１３０の透過部１３２は、ローラ形態以外に多様な形態にも製作されることができる。図７には、平板形態の支持ユニット１３０ｃを有する撮影部材１２０ｃが示されている。図７に示すように、撮影部材１２０ｃの支持ユニット１３０ｃは、検査対象物１０の撮影領域を支持するように、凸面１３７を有する平板形態の透過部１３２ｃを有する。   For example, the transmission part 132 of the support unit 130 can be manufactured in various forms other than the roller form. FIG. 7 shows a photographing member 120c having a flat plate-like support unit 130c. As shown in FIG. 7, the support unit 130 c of the imaging member 120 c includes a flat plate-shaped transmission portion 132 c having a convex surface 137 so as to support the imaging area of the inspection object 10.

上述のように、本発明の実施形態に係る自動光学検査システム１００は、フレキシブルプリント回路基板ユニットが連続的に形成されたフィルム又はテープ形態だけでなく、個別的なフレキシブルプリント回路基板ユニット１２を検査することができる。   As described above, the automatic optical inspection system 100 according to the embodiment of the present invention inspects individual flexible printed circuit board units 12 as well as a film or tape form in which flexible printed circuit board units are continuously formed. can do.

図８に示すように、フレキシブルプリント回路基板ユニット１２が積層される支持ユニット１３０ｄと、支持ユニット１３０ｄの下部から光を照射する照明ユニット１２４と、支持ユニット１３０ｄの上部から撮影する撮影ユニット１２２とを備える。ここで、支持ユニット１３０ｄは、プリント回路基板ユニット１２の撮影領域を支持し、光が透過され得るように、透明な透過部１３２ｄを有することができる。   As shown in FIG. 8, a support unit 130d on which the flexible printed circuit board unit 12 is stacked, an illumination unit 124 that emits light from the lower part of the support unit 130d, and a photographing unit 122 that takes an image from the upper part of the support unit 130d. Prepare. Here, the support unit 130d can have a transparent transmission part 132d so as to support the imaging region of the printed circuit board unit 12 and allow light to pass therethrough.

本発明の自動光学検査システム１００において、検査対象物１０は、連続的に移動せず、一定の距離Ｌだけ移動した後に停止する一歩一歩（Ｓｔｅｐ ｂｙ Ｓｔｅｐ）で移動され得る。この場合、ビジョン検査部１１０では、検査対象物１０が一時的に停止している時間の間に検査対象物１０に対して撮影作業が行われることができる。これについての説明は、図１０を参照しつつ詳細に説明する。   In the automatic optical inspection system 100 of the present invention, the inspection object 10 does not move continuously, but can be moved step by step (Step by Step) after moving by a certain distance L. In this case, the vision inspection unit 110 can perform an imaging operation on the inspection object 10 during the time when the inspection object 10 is temporarily stopped. This will be described in detail with reference to FIG.

図１０に示すように、撮像部材１２０は、検査対象物の撮影領域を支持する支持ユニット１３０と、撮影ユニット１２２と、検査対象物１０の撮影領域に光を照射する照明ユニット１２４と、これらをＬ距離だけ同時に移動させるための移動部１２８と、を備える。   As shown in FIG. 10, the imaging member 120 includes a support unit 130 that supports the imaging area of the inspection object, an imaging unit 122, an illumination unit 124 that irradiates light to the imaging area of the inspection object 10, and these. And a moving unit 128 for simultaneously moving the distance L.

撮像部材１２０の支持ユニット１３０、撮影ユニット１２２、照明ユニット１２４は、移動ユニット１２８により前後の方向（フレキシブルプリント回路基板ユニットの長さ方向、図面において矢印で表示された左右方向）へ共に移動する。ここで、移動ユニット１２８は、油圧を利用したシリンダー方式またはモータ、ボールスクリュー、移送ナットを利用した多様な方式が用いられることができる。例えば、撮像部材の支持ユニット１３０、撮影ユニット１２２、照明ユニット１２４は、移動ユニット１２８により左右の方向へも移動することができる。このような構造を有する撮影部材１２０は、撮影ユニット１２２、照明ユニット１２４、そして支持ユニット１３０がＬ距離だけ後進移動及び前進移動しつつ、少なくとも１回撮像する。   The support unit 130, the imaging unit 122, and the illumination unit 124 of the imaging member 120 are moved together by the moving unit 128 in the front-rear direction (the length direction of the flexible printed circuit board unit, the left-right direction indicated by arrows in the drawing). Here, the moving unit 128 may be a cylinder method using hydraulic pressure or various methods using a motor, a ball screw, and a transfer nut. For example, the imaging member support unit 130, the imaging unit 122, and the illumination unit 124 can be moved in the left and right directions by the moving unit 128. The imaging member 120 having such a structure captures an image at least once while the imaging unit 122, the illumination unit 124, and the support unit 130 move backward and forward by an L distance.

上述した本発明の好ましい実施形態は、例示の目的のために開示されたものであり、本発明の属する技術の分野における通常の知識を有する者であれば、本発明の技術的思想を逸脱しない範囲内で、様々な置換、変形、及び変更が可能であり、このような置換、変更などは、特許請求の範囲に属するものである。   The above-described preferred embodiments of the present invention are disclosed for the purpose of illustration, and those having ordinary knowledge in the technical field to which the present invention belongs do not depart from the technical idea of the present invention. Various substitutions, modifications, and alterations are possible within the scope, and such substitutions, alterations, and the like belong to the scope of the claims.

本発明の実施形態に係る自動光学検査システムの主要構成を示す図である。It is a figure showing the main composition of the automatic optical inspection system concerning the embodiment of the present invention. ビジョン検査部の撮影部材を説明するための図である。It is a figure for demonstrating the imaging member of a vision test | inspection part. ビジョン検査部の撮影部材を説明するための図である。It is a figure for demonstrating the imaging member of a vision test | inspection part. 本発明に係る自動光学検査システムにおいて、照明ユニットが支持ユニットの内部に設けられた撮影部材を示す図である。In the automatic optical inspection system which concerns on this invention, it is a figure which shows the imaging | photography member in which the illumination unit was provided in the inside of the support unit. 本発明に係る自動光学検査システムにおいて、照明ユニットが支持ユニットの内部に設けられた撮影部材を示す図である。In the automatic optical inspection system which concerns on this invention, it is a figure which shows the imaging | photography member in which the illumination unit was provided in the inside of the support unit. 本発明に係る自動光学検査システムにおいて、３個の照明ユニットが支持ユニットの内部に設けられた撮影部材を示す図である。In the automatic optical inspection system which concerns on this invention, it is a figure which shows the imaging | photography member in which three illumination units were provided in the inside of the support unit. 本発明に係る自動光学検査システムにおいて、平板形態の支持ユニットを有する撮影部材を示す図である。In the automatic optical inspection system which concerns on this invention, it is a figure which shows the imaging | photography member which has a flat plate form support unit. 本発明においてプリント回路基板ユニットを個別的に撮影できる撮影部材を示す図である。It is a figure which shows the imaging member which can image | photograph a printed circuit board unit individually in this invention. 本発明に係る自動光学検査システムにおいて、検査対象物に反射光を供給する撮影部材を示す図である。In an automatic optical inspection system concerning the present invention, it is a figure showing an imaging member which supplies reflected light to a test subject. 本発明に係る自動光学検査システムにおいて、移動可能な撮影部材を示す図である。It is a figure which shows the imaging | photography member which can move in the automatic optical inspection system which concerns on this invention. 検査対象物が移送される過程で発生する屈曲現象を説明するための図である。It is a figure for demonstrating the bending phenomenon which generate | occur | produces in the process in which a test target object is transferred.

符号の説明Explanation of symbols

１０ 検査対象物
１００ 自動光学検査システム
１０２ 巻出部
１０４ リール
１０５ 案内ローラ
１０６ 巻取部
１０８ リール
１１０ ビジョン検査部
１２０ 撮影部材
１２２ 撮影ユニット
１２４ 照明ユニット
１２４ａ 光源
１２４ｂ 拡散板
１３０ 支持ユニット
１４０ 映像処理部 DESCRIPTION OF SYMBOLS 10 Inspection object 100 Automatic optical inspection system 102 Unwinding part 104 Reel 105 Guide roller 106 Winding part 108 Reel 110 Vision inspection part 120 Imaging member 122 Imaging unit 124 Illumination unit 124a Light source 124b Diffuser 130 Support unit 140 Image processing part

Claims (12)

プリント回路基板を光学的に検査する自動光学検査装置において、
前記プリント回路基板を撮影する撮影ユニットと、
前記プリント回路基板の撮影領域に光を照射する照明ユニットと、
前記プリント回路基板の撮影領域を支持する支持ユニットと、を備え、
前記支持ユニットは、前記プリント回路基板の撮影領域と接触し、
前記照明ユニットの光が透過される透過部を有することを特徴とする自動光学検査装置。 In an automatic optical inspection device that optically inspects printed circuit boards,
A photographing unit for photographing the printed circuit board;
An illumination unit that irradiates light to the imaging region of the printed circuit board;
A support unit for supporting a photographing area of the printed circuit board,
The support unit is in contact with the imaging area of the printed circuit board;
An automatic optical inspection apparatus comprising a transmission part through which light of the illumination unit is transmitted. 前記支持ユニットの透過部は、前記照明ユニットと前記プリント回路基板の撮影領域との間の光経路上に位置することを特徴とする請求項１に記載の自動光学検査装置。   The automatic optical inspection apparatus according to claim 1, wherein the transmission unit of the support unit is located on an optical path between the illumination unit and an imaging region of the printed circuit board. 前記支持ユニットの透過部は、前記プリント回路基板の撮影領域の下面を支えつつ、前記プリント回路基板の移送によって回転されるローラ形状であることを特徴とする請求項１に記載の自動光学検査装置。   2. The automatic optical inspection apparatus according to claim 1, wherein the transmissive portion of the support unit has a roller shape that is rotated by the transfer of the printed circuit board while supporting a lower surface of an imaging region of the printed circuit board. . 前記自動光学検査装置は、前記撮影ユニットと、前記照明ユニットと、及び前記支持ユニットとを、前記プリント回路基板の搬送方向又は、前記プリント回路基板の搬送方向と垂直な方向に前後移動させる移動ユニットと、をさらに備えることを特徴とする請求項１又は請求項３に記載の自動光学検査装置。   The automatic optical inspection apparatus is a moving unit that moves the imaging unit, the illumination unit, and the support unit back and forth in the transport direction of the printed circuit board or in a direction perpendicular to the transport direction of the printed circuit board. The automatic optical inspection apparatus according to claim 1, further comprising: 前記支持ユニットの透過部は、前記プリント回路基板の撮影領域を支持するように凸面を有することを特徴とする請求項１または請求項３に記載の自動光学検査装置。   The automatic optical inspection apparatus according to claim 1, wherein the transmissive portion of the support unit has a convex surface so as to support an imaging region of the printed circuit board. 前記支持ユニットの透過部は、内部空間を有するローラからなり、前記照明ユニットは、前記透過部の内部空間に設置されることを特徴とする請求項１又は請求項３に記載の自動光学検査装置。   4. The automatic optical inspection apparatus according to claim 1, wherein the transmission unit of the support unit includes a roller having an internal space, and the illumination unit is installed in the internal space of the transmission unit. 5. . フレキシブルプリント回路基板ユニットが連続的に形成された検査対象物の自動光学検査システムにおいて、
前記検査対象物が送出される巻出部と、
前記巻出部から送出される前記検査対象物の表面を撮影する撮影部材と、
検査を終えた前記検査対象物が巻き取られる巻取部と、を備え、
前記撮影部材は、前記検査対象物の歪みが発生しないように、前記検査対象物の撮影領域を支持する支持ユニットと、
前記支持ユニットを介して前記検査対象物の撮影領域に光を照射する照明ユニットと、
前記照明ユニットの光が照射される前記検査対象物の撮影領域を撮影するカメラと、
を備えることを特徴とする自動光学検査システム。 In an automatic optical inspection system for inspection objects in which flexible printed circuit board units are continuously formed,
An unwinding section through which the inspection object is delivered;
An imaging member for imaging the surface of the inspection object delivered from the unwinding unit;
A winding unit on which the inspection object that has been inspected is wound,
The imaging member is a support unit that supports an imaging area of the inspection object so that distortion of the inspection object does not occur,
An illumination unit that irradiates light to the imaging region of the inspection object via the support unit;
A camera that captures an imaging region of the inspection object irradiated with light from the illumination unit;
An automatic optical inspection system comprising: 前記支持ユニットは、前記検査対象物の撮影領域と接触され、前記照明ユニットの光が透過される透過部を有することを特徴とする請求項７に記載の自動光学検査システム。   The automatic optical inspection system according to claim 7, wherein the support unit includes a transmission unit that is in contact with an imaging region of the inspection object and through which the light of the illumination unit is transmitted. 前記支持ユニットの透過部は、前記検査対象物の移送によって回転されるローラ形状であることを特徴とする請求項８に記載の自動光学検査システム。   The automatic optical inspection system according to claim 8, wherein the transmission unit of the support unit has a roller shape rotated by the transfer of the inspection object. 前記支持ユニットの透過部は、前記検査対象物の撮影領域を支持するように凸面を有することを特徴とする請求項８に記載の自動光学検査システム。   The automatic optical inspection system according to claim 8, wherein the transmission unit of the support unit has a convex surface so as to support an imaging region of the inspection object. 前記支持ユニットの透過部は、前記プリント回路基板の移送によって回転されるローラからなり、前記透過部は、内部に前記照明ユニットが設置される内部空間を有することを特徴とする請求項８に記載の自動光学検査システム。   The transmission unit of the support unit includes a roller rotated by the transfer of the printed circuit board, and the transmission unit has an internal space in which the illumination unit is installed. Automatic optical inspection system. フレキシブルプリント回路基板ユニットが連続的に形成された検査対象物を光学的な方式を利用して自動検査する方法において、
支持ユニットが検査対象物の撮影領域を支持した状態で、照明ユニットに透過された光が前記検査対象物の撮影領域に照射され、検査対象物の撮影領域の上部に位置したカメラが検査対象物の撮影領域を撮影し、
前記照明ユニットの透過される光は、前記支持ユニットを透過して前記検査対象物の撮影領域に照射されることを特徴とする自動光学検査方法。 In a method of automatically inspecting an inspection object on which a flexible printed circuit board unit is continuously formed using an optical method,
With the support unit supporting the imaging area of the inspection object, the light transmitted through the illumination unit is irradiated to the imaging area of the inspection object, and a camera positioned above the imaging area of the inspection object is the inspection object Shoot the shooting area of
The automatic optical inspection method according to claim 1, wherein the light transmitted through the illumination unit is transmitted through the support unit and applied to the imaging region of the inspection object.
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