JP2006105816A - Article inspecting device and article inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an article inspecting device and an article inspection method capable of finishing inspection of an article accurately, in a short time. <P>SOLUTION: A CSP tape 16 on a guide surface 56A is irradiated linearly from the surface side, with a red light beam by the first reflection illumination device 82, and with a green light beam by the second reflection illumination device 84, and is irradiated linearly from the back side with a blue light beam by a transmission illuminating device 86. Red reflected light, green reflected light and blue transmitted light are inputted into a CCD line sensor 66. The first computer 68 performs image processing, based on image data in each color from the CCD line sensor 66 and detects a defect of the CSP tape 16. When detecting using the reflected light, since two kinds of light (red, green) having different irradiation angles and wavelengths are used, the defect detection accuracy is improved, as compared with the case of using a light having one kind of irradiation angle. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an article inspection apparatus and an article inspection method, and more particularly, to an article inspection apparatus and an article inspection method suitable for inspecting the quality of a pattern or the like formed on a tape member surface.

  2. Description of the Related Art Conventionally, a CSP tape inspection apparatus that inspects the appearance of a CSP (Chip size package) tape, which is a tape-like substrate on which a semiconductor chip is mounted, is known (see, for example, Patent Document 1).

  In the CSP tape, a light-transmitting resist base pattern and a light non-transparent metal pattern are formed on a light-transmitting polyimide base tape. This CSP tape inspection apparatus irradiates light on the CSP tape. Thus, the quality of the metal pattern formed on the CSP tape is inspected.

  When inspecting the quality of the metal pattern, light was irradiated from below the CSP tape, and the transmitted light was photographed with a camera.

On the other hand, dust, resist defects, and the like attached to the surface of the CSP tape are inspected by irradiating light from above the CSP tape.
JP 2000-182061 A

  When irradiating light from above, as shown in FIG. 5, when shooting with the camera 108 by irradiating reflected illumination light from the direction of the predetermined angle θ0 to the CSP tape 100 from the direction of the predetermined angle θ0, one angle is taken. In some cases, it is impossible to accurately detect both the presence of dust and the defect of the resist with the reflected illumination light.

  For this reason, as shown in FIG. 6, a high-angle illuminating device 104 that irradiates reflected illumination light at an angle θ1 and a low-angle reflective illuminator 106 that irradiates reflected illumination light at an angle θ2 are provided. After the first inspection using only the reflected illumination light, it is conceivable to perform the second inspection using only the reflected illumination light at the angle θ2, but there is a problem that the inspection takes time.

  The present invention has been made to solve the above problems, and an object of the present invention is to provide an article inspection apparatus and an article inspection method that can finish inspection of an article with high accuracy in a short time.

  The article inspection apparatus according to claim 1, wherein a plurality of illumination devices that simultaneously irradiate the inspection article with light beams having different wavelengths from different angles, and the inspection article illuminated by the plurality of illumination devices are photographed. And a defect detection unit that inspects the defect of the inspection article based on image data for each wavelength from the imaging unit.

  Next, the operation of the article inspection apparatus according to claim 1 will be described.

  Reflected light (mixed light) irradiated from a plurality of illumination devices and reflected from the inspection article is incident on the imaging means, but the wavelength (color) is different for each illumination. Images can be separated for different lighting devices.

  The (image) data output from the imaging unit is input to the defect detection unit, and the defect detection unit inspects the defect of the inspection article based on the image for each wavelength (that is, for each irradiation angle).

  For example, even in a defect that is easy to find with reflected light, there are a defect that is easier to find when irradiated at a low angle, and a defect that is easier to find when irradiated at a high angle. Since a plurality of light beams are simultaneously irradiated and photographed, defect detection accuracy is improved.

  Further, in the present invention, since the inspection article is simultaneously irradiated with a plurality of light beams having different irradiation angles and wavelengths, the inspection can be completed in a short time.

  In addition, what wavelength should be used for each lighting device may be appropriately selected according to the inspection article so that the inspection accuracy is improved.

  According to a second aspect of the present invention, in the article inspection apparatus according to the first aspect, the illumination device is disposed on one side of the inspection article and has different wavelengths from different angles with respect to the inspection article. A plurality of reflection illumination devices that simultaneously irradiate a light beam and a light beam that is disposed on the other side of the inspection article and has a wavelength different from that of the reflection illumination device and that can be transmitted through the inspection article. And a transmissive illumination device for irradiation.

  Next, the operation of the article inspection apparatus according to claim 2 will be described.

  Light that has been irradiated from a plurality of reflective illumination devices and reflected by the inspection article and light that has been emitted from the transmission illumination device and transmitted through the inspection article are input to the imaging unit.

  Since the light irradiated from each illumination device has a different wavelength (color), the image by reflected light and the image by transmitted light can be separated.

  Therefore, it is possible to simultaneously detect a defect that is easily found with transmitted light and a defect that is easily found with reflected light.

  According to a third aspect of the present invention, in the article inspection apparatus according to the second aspect, the transmission illumination device irradiates a light beam of any one color of red, green, and blue, and the plurality of reflected illuminations The apparatus is characterized by irradiating a beam of a color different from that of the transmission illumination apparatus.

  Next, the operation of the article inspection apparatus according to claim 3 will be described.

  By setting the illumination light to red, green, and blue, when a color camera is used as the photographing means, data of each color, that is, data for each illumination can be easily obtained from the RGB output of the camera.

  The article inspection method according to claim 4, wherein the inspection article is simultaneously irradiated with light beams having different wavelengths from mutually different angles, and the inspection article irradiated with the light beam is photographed by photographing means, and each wavelength is photographed. The inspection article is inspected for defects on the basis of image data for each.

  Next, an article inspection method according to claim 4 will be described.

  Light that is irradiated from a plurality of illumination devices and reflected by an inspection article is input to the imaging unit.

  Here, the reflected light reflected by the inspection article is incident on the imaging means, but since the wavelength (color) is different for each illumination, the image can be separated for each illumination having a different irradiation angle.

  The (image) data output from the imaging unit is input to the defect detection unit, and the defect detection unit inspects the defect of the inspection article based on the image for each wavelength (that is, for each irradiation angle).

  For example, even in a defect that is easy to find with reflected light, there are a defect that is easier to find when irradiated at a low angle, and a defect that is easier to find when irradiated at a high angle. Since a plurality of light beams are simultaneously irradiated and photographed, defect detection accuracy is improved.

  Further, in the present invention, since the inspection article is simultaneously irradiated with a plurality of light beams having different irradiation angles and wavelengths, the inspection can be completed in a short time.

  In addition, what wavelength should be used for each lighting device may be appropriately selected according to the inspection article so that the inspection accuracy is improved.

  As described above, according to the article inspection apparatus and the article inspection method of the present invention, there is an excellent effect that the inspection of an article can be completed with high accuracy in a short time.

  Hereinafter, an inspection apparatus 10 according to an embodiment of the present invention will be described with reference to the drawings.

As shown in FIG. 1, the inspection apparatus 10 of this embodiment includes an unwinding unit 12, a winding unit 14, and the like.
(Unwinding unit)
The unwinding unit 12 winds together the CSP tape 16 on which a large number of package patterns are repeatedly formed and the spacer tape 18, and holds the CSP roll 20 formed in a roll shape together with the unwinding reel shaft 22 and the CSP tape 16. An unwinding-side spacer shaft 24 that winds and holds the pulled-out spacer tape 18 is provided.

  A guide 26 for changing the transport direction of the CSP tape 16 is disposed on the delivery side of the CSP roll 20.

In the CSP tape 16 of this embodiment, a metal pattern such as a copper foil is formed by etching on the surface of a synthetic resin base tape that transmits light, and an insulating resist pattern is further formed thereon. Is.
(Winding unit)
The winding unit 14 includes a winding-side spacer shaft 28 that holds the spacer tape 18 formed in a roll shape, and a winding-side reel shaft 30 that winds the spacer tape 18 and the inspected CSP tape 16 together. ing.

  A guide 32 for changing the transport direction of the CSP tape 16 is disposed on the tape winding side of the winding side reel shaft 30.

Between the unwinding unit 12 and the winding unit 14, a short dancer 34, a first feed roller 36, a first presser roller 38, a second presser roller 40, a second presser roller 40 that form a transport path for the CSP tape 16 are provided. Two feed rollers 42, a long dancer 44, a guide 46, a guide 48, a guide 50, a guide 52, and a short dancer 54 are arranged in this order.
(Scanner unit)
The first feed roller 36 and the second feed roller 42 are horizontally disposed with a space therebetween, and a table 56 is disposed between the first feed roller 36 and the second feed roller 42. ing.

  As shown in FIG. 2, the upper surface of the table 56 is a guide surface 56A, and is curved in a convex shape upward.

  The top portion of the guide surface 56 </ b> A is located above a virtual surface connecting the upper end of the first feed roller 36 and the upper end of the second feed roller 42.

  The table 56 has a hollow structure, and compressed air from the compressor is supplied to the inside through a pipe (not shown).

  The table 56 has a large number of pores 62 communicating with the internal space and the guide surface 56A in the tape transport direction and the tape width direction, and air is ejected from the pores 62 to the outside of the guide surface 56A. A thin air layer is formed between the CSP tape 16 and the guide surface 56A.

  The first presser roller 38 and the second presser roller 40 are driven rollers that freely rotate, and abut against the upper surface of the CSP tape 16 to limit the upward movement of the CSP tape 16.

  The guide 26, the short dancer 34, the long dancer 44, the guide 46, the guide 48, the guide 50, the guide 52, and the short dancer 54 are also formed with innumerable pores for ejecting air. An air layer is formed between the two.

  As shown in FIG. 2, above the table 56, a first reflective illumination device (line light source) 82 that illuminates the surface of the CSP tape 16, a second reflective illumination device (line light source) 84, and a lens 64 are provided. An image reading unit including a color CCD line sensor 66 is disposed, and a transmission illumination device (line light source) 86 for illuminating the back surface of the CSP tape 16 is disposed in the table 56.

  The first reflective illumination device 82, the second reflective illumination device 84, and the transmission illumination device 86 are composed of a plurality of LEDs 88 arranged along the width direction of the CSP tape 16 (front and back direction in FIG. 2), and the LEDs 88. And a light guide plate 90 that irradiates the irradiated light beam toward the CSP tape 16 in a line.

  Here, the LED 88 of the first reflective illumination device 82 emits a red (R) light beam, and the LED 88 of the second reflective illumination device 84 emits a blue (G) light beam. The LED 88 emits a green (G) light beam.

  The CCD line sensor 66 is disposed immediately above the center of the table 56 in the tape conveyance direction, and the first reflective illumination device 82 and the second reflective illumination device are respectively provided on both sides of the CCD line sensor 66 in the tape conveyance direction. 84 is arranged.

  Here, the angle θ1 of the light beam of the first reflective illumination device 82 with respect to the horizontal direction is set larger than the angle θ2 of the light beam of the second reflective illumination device 84.

  Further, the light beam of each lighting device is irradiated toward one point when viewed from the side in the tape transport direction.

  As a result, a red light beam and a green light beam are superimposed on the surface (upper surface) of the CSP tape 16 and irradiated in a line shape in the tape width direction, and a red light beam and A blue light beam is irradiated in a line shape in the tape width direction at a position opposite to the irradiation position of the green light beam.

  In the CCD line sensor 66, pixels (RGB) are arranged in the width direction of the CSP tape 16 (direction orthogonal to the transport direction).

  The CSP tape 16 is stretched between a first feed roller 36 and a second feed roller 42, and the first feed roller 36 and the second feed roller 42 rotate to feed in a constant direction in one direction. Then, the circuit pattern and the like formed on the tape is photographed by the image reading unit when passing over the table 56.

  The image data for each color is sent from the CCD line sensor 66 to the first computer 68 for image processing (see FIG. 1), and the captured image of the CSP tape 16 is displayed on the monitor 69. It has become.

The first computer 68 captures image data for each color from the CCD line sensor 66 and performs image processing to detect defects such as patterns.
(Marking unit)
As shown in FIG. 1, between the guide 48 and the guide 50, a marking unit 80 that places a marking at a predetermined position of the package pattern detected as having a defect is arranged.
(Function)
Next, the operation of the inspection apparatus 10 of this embodiment will be described.

  The CSP tape 16 drawn from the CSP roll is conveyed in a non-contact state in a curved state on the guide surface 56A of the table 56 by the first feed roller 36 and the second feed roller 42.

  The CSP tape 16 on the guide surface 56A is irradiated with a red light beam and a green light beam in a line shape from the front surface side, and a blue light beam is irradiated in a line shape from the back surface side, and the red reflected light, Green reflected light and blue transmitted light are input to the CCD line sensor 66.

  Red data is output from the R output of the CCD line sensor 66, green data is output from the G output, and blue data is output from the G output, and is input to the first computer 68 for image processing.

  An image of the CSP tape 16 taken by the CCD line sensor 66 is displayed in color on the monitor 69, and the first computer 68 performs image processing based on the image data for each color from the CCD line sensor 66, and the CSP. A defect of the tape 16 is detected.

  For example, a through hole or a metal pattern defect (disconnection, short circuit, etc.) can be determined from an image of transmitted light (red).

  On the other hand, when detecting a defect in the resist pattern (resist pattern pattern defect, thickness unevenness (detectable as density unevenness), etc.), the resist pattern transmits light, and thus is detected using reflected light.

  In addition, since there are dust that transmits light and dust that does not transmit light, dust is detected using both transmitted light and reflected light.

  In this embodiment, when detecting with reflected light, two types of light (red and green) having different irradiation angles and wavelengths are used. Detection accuracy is improved.

  When a defect is detected, the marking unit 80 performs marking at a predetermined location corresponding to the defective pattern.

On the monitor 69, the image of the CSP tape 16 illuminated with each light beam (ie, mixed light) of the first reflection illumination device 82, the second reflection illumination device 84, and the transmission illumination device 86 is displayed in color. However, image processing may be performed and displayed on the monitor 69 as if illuminated with white light.
[Other Embodiments]
In the above embodiment, two reflective illumination devices having different wavelengths and light beam irradiation angles, that is, the first reflective illumination device 82 and the second reflective illumination device 84 are used. As shown, a third reflective illumination device 92 having a wavelength and a light beam irradiation angle different from those of the first reflective illumination device 82 and the second reflective illumination device 84 may be further added.

  Further, as shown in FIG. 4, instead of the first reflective illumination device 82, the CSP tape 16 is irradiated with a light beam at a right angle, that is, the light beam is irradiated along the optical axis of the CCD line sensor 66. An epi-illumination device 94 may be provided. In the coaxial epi-illumination device 94, reference numeral 96 denotes a half mirror.

  In addition, the wavelength (color) of light allocated to each illumination is not restricted to the thing of the said embodiment.

  In the above embodiment, the CSP tape 16 is irradiated with visible light. However, the CSP tape 16 may be irradiated with light other than visible light such as infrared rays and ultraviolet rays. In this case, a camera capable of detecting infrared rays and ultraviolet rays is used.

  In the above embodiment, the CCD line sensor 66 is used for photographing the CSP tape 16, but an area sensor may be used. In this case, the CSP tape 16 is photographed in a flat shape without being bent.

  Moreover, in the said embodiment, although LED of the illuminating device was used, you may use another light source.

  Moreover, although the apparatus which detects the defect of CSP tape was demonstrated in the said embodiment, this invention is applicable not only to a CSP tape but to the apparatus which detects the defect of other articles | goods, such as a printed circuit board and a film.

It is a whole block diagram of an inspection apparatus. It is a side view of an image reading unit. It is a side view of the image reading part which concerns on other embodiment. It is a side view of the image reading part which concerns on other embodiment. It is a side view of the image reading part which concerns on a prior art example. It is a side view of the image reading part which concerns on another prior art example.

Explanation of symbols

10 Inspection equipment (article inspection equipment)
16 Tape 66 CCD line sensor 68 First computer (defect detection means)
69 Monitor 82 First reflective illumination device 84 Second reflective illumination device 86 Transmitted illumination device 92 Third reflective illumination device 94 Coaxial epi-illumination device

Claims (4)

A plurality of illumination devices that simultaneously irradiate the inspection article with light beams of different wavelengths from different angles;
Imaging means for imaging the inspection article illuminated by the plurality of illumination devices;
Defect detection means for inspecting defects of the inspection article based on image data for each wavelength from the imaging means;
An article inspection apparatus comprising: The illumination device is disposed on one side of the inspection article, and a plurality of reflective illumination devices that simultaneously irradiate the inspection article with light beams having different wavelengths from different angles, and the other side of the inspection article And a transmission illumination device that irradiates the inspection article with a light beam having a wavelength different from that of the reflection illumination device and capable of transmitting the inspection article. Item inspection device. The transmitted illumination device irradiates a light beam of any one color of red, green and blue,
The plurality of reflective illumination devices irradiate a beam having a color different from that of the transmission illumination device.
The article inspection apparatus according to claim 2. Simultaneously irradiate the inspection article with light beams of different wavelengths from different angles,
A method for inspecting an article, wherein the inspection article irradiated with the light beam is photographed by a photographing means and a defect of the inspection article is inspected based on image data for each wavelength.

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