JP2010175558A - Inspection device - Google Patents

Inspection device Download PDF

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JP2010175558A
JP2010175558A JP2010084854A JP2010084854A JP2010175558A JP 2010175558 A JP2010175558 A JP 2010175558A JP 2010084854 A JP2010084854 A JP 2010084854A JP 2010084854 A JP2010084854 A JP 2010084854A JP 2010175558 A JP2010175558 A JP 2010175558A
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irradiation
unit
inspection
light
image
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Fumihiro Ogawa
文弘 小川
Shinya Matsuda
晋也 松田
Akihisa Kato
秋久 加藤
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Daiichi Jitsugyo Viswill Co Ltd
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Daiichi Jitsugyo Viswill Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection device for efficiently and accurately determining the quality of an inspecting object. <P>SOLUTION: This inspection device includes an irradiation section 2 for radiating light for inspection to the inspecting object conveyed by a conveying means, an image taking section 3 for taking an image of the inspecting object irradiated with the light for inspection of the irradiation section 2, and a determination processing section 4 for determining the quality of the inspecting object based on the image taken by the image taking section 3. The irradiation section 2 includes a blue irradiating means 5 for radiating blue light, and a red irradiating means 6 for radiating red light. The image taking section 3 includes a color image taking section for taking a color image of the inspecting object irradiated by two kinds of irradiating means of different colors. The light for inspection from the blue irradiating means 5 radiates the outer surface of the inspecting object. The blue irradiating means 5 and the red irradiating means 6 are arranged so that the light for inspection from the red irradiating means 6 comes into the inspecting object. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、搬送手段にて搬送されてくる多数のチップ型コンデンサやチップ型発光ダイオード等の主として電子部品からなる検査対象物の外観及び内部の検査を順次行うための検査装置に関する。   The present invention relates to an inspection apparatus for sequentially inspecting the appearance and the inside of an inspection object mainly composed of electronic components such as a large number of chip capacitors and chip light emitting diodes conveyed by a conveying means.

上記検査装置としては、例えばベルトコンベアなどの搬送装置により搬送されてくるチップ型コンデンサの上端面に青色の光を上方から照射し、該チップ型コンデンサの横側面に赤色の光を横側方から前記青色光と同時に照射するように照射部を配置し、その照射部の真上に配置したモノクロカメラにて2種類の色の光が照射されているチップ型コンデンサを1枚の画像として取り込み、その取り込んだ画像を制御部にて処理することによりチップ型コンデンサの良否を判定するようにしている。   As the inspection device, for example, blue light is irradiated from the upper side to the upper end surface of a chip capacitor conveyed by a conveying device such as a belt conveyor, and red light is irradiated from the lateral side to the lateral side surface of the chip capacitor. An irradiation unit is arranged to irradiate simultaneously with the blue light, and a chip capacitor irradiated with two kinds of light is captured as a single image by a monochrome camera arranged immediately above the irradiation unit, The quality of the chip capacitor is determined by processing the captured image in the control unit.

前記構成では1台のモノクロカメラで2種類の色の光が照射されたチップ型コンデンサを1枚の画像として取り込むことができるため、それぞれの色が照射された2枚の画像を取り込む場合に比べて、取込時間の短縮化を図ることができる利点がある。   In the above configuration, a chip type capacitor irradiated with light of two kinds of colors can be captured as a single image by a single monochrome camera, so that compared to capturing two images irradiated with each color. Thus, there is an advantage that the capture time can be shortened.

ところで、2種類の色の光を照射しているのは、チップ型コンデンサの外観表面に発生するキズやクラック(割れ目)あるいは欠け等の画像上での特徴を青色光にて強調し、チップ型コンデンサの内部クラックや電極の浮き上がり等の画像上での特徴を赤色光にて強調するためである。しかし、2種類の色を同時に照射している状態で、モノクロカメラにより撮像した場合に、一方の色で強調された欠陥の画像上の特徴が、他方の色により弱められてしまう場合があり、不良欠陥を検出できない場合があった。   By the way, the light of two kinds of colors is radiated by highlighting the features on the image such as scratches, cracks or chips generated on the external surface of the chip capacitor with blue light, and the chip type This is because the feature on the image such as the internal crack of the capacitor or the lifting of the electrode is emphasized with red light. However, when the image is picked up by a monochrome camera while irradiating two types of colors at the same time, the feature on the image of the defect emphasized by one color may be weakened by the other color. In some cases, defective defects could not be detected.

そこで、搬送手段にて搬送されてくる検査対象物の画像を取り込むモノクロCCDカメラと、このカメラの光軸に対して青色発光ダイオードの光軸及び赤色発光ダイオードの光軸を傾けた状態、具体的には青色発光ダイオードの光軸とカメラの光軸との傾斜角度が赤色発光ダイオードの光軸とカメラの光軸との傾斜角度よりも小さくなるように、2種類の発光ダイオードを配置し、検査対象物がカメラの撮像領域内の所定位置に搬送されてきたときに、例えば青色発光ダイオードを点灯させて検査対象物を撮像してから、該青色発光ダイオードを消灯させるとともに赤色発光ダイオードを点灯させて前記検査対象物を再度撮像し、それら色毎に撮像された2枚の撮像された画像にて検査対象物の良否を判定することにより、前述の不都合を解消できるようにしている(例えば、特許文献1参照)。   Therefore, a monochrome CCD camera that captures an image of the inspection object conveyed by the conveying means, a state where the optical axis of the blue light emitting diode and the optical axis of the red light emitting diode are inclined with respect to the optical axis of the camera, specifically Two types of light emitting diodes are arranged and inspected so that the tilt angle between the optical axis of the blue light emitting diode and the optical axis of the camera is smaller than the tilt angle between the optical axis of the red light emitting diode and the optical axis of the camera. When the object is transported to a predetermined position in the imaging area of the camera, for example, the blue light emitting diode is turned on to image the inspection object, and then the blue light emitting diode is turned off and the red light emitting diode is turned on. The above-mentioned inconvenience is solved by re-imaging the inspection object and determining pass / fail of the inspection object based on the two captured images captured for each color. It is possible manner (e.g., see Patent Document 1).

特開2007−64801号公報(図1〜図3参照)Japanese Unexamined Patent Publication No. 2007-64801 (see FIGS. 1 to 3)

上記特許文献1の構成では、2種類の色にてそれぞれ照射される検査対象物の画像を2回取り込まなければならないため、1回で取り込む場合に比べて取込時間が多くかかるものであり、効率よく検査を行うことができないものであった。又、検査対象物が搬送されていることから、画像を2回取り込む場合、その2回の取込時の検査対象物の位置が異なってしまう結果、対象物の撮像方向が異なる画像になってしまい、減算など2枚の画像間で演算処理を行うのに適した画像が得られなかった。   In the configuration of the above-mentioned Patent Document 1, since it is necessary to capture the image of the inspection object irradiated with two kinds of colors twice, it takes a lot of time to capture compared to the case where the image is captured once. The inspection could not be performed efficiently. In addition, since the inspection object is conveyed, when the image is captured twice, the position of the inspection object at the time of the two captures is different, resulting in an image in which the imaging direction of the object is different. Therefore, an image suitable for performing arithmetic processing between two images such as subtraction cannot be obtained.

本発明が前述の状況に鑑み、解決しようとするところは、検査対象物の良否の判定を効率よく、しかも高精度にて行える検査装置を提供することを課題とする。   In view of the above-described situation, an object of the present invention is to provide an inspection apparatus that can efficiently and accurately determine the quality of an inspection object.

本発明に係る検査装置は、前述の課題解決のために、搬送手段にて搬送されてきた電子部品等の検査対象物に検査用光を照射する照射部と、該照射部の検査用光が照射された検査対象物の画像を取り込むための画像取込部と、画像取込部にて取り込んだ画像に基づいて検査対象物の良否を判定する判定処理部とを備えた検査装置であって、前記照射部が、青色の光を照射する青色照射手段と、赤色の光を照射する赤色照射手段とを備え、前記画像取込部が、前記色の異なる複数の照射手段にて照射されている前記検査対象物のカラー画像を取り込むためのカラー画像取込部から構成し、前記判定処理部が、該カラー画像取込部で取り込んだ画像を各色毎に分解した画像に基づいて、検査対象物の良否を判定するように構成されたことを特徴とする。   In order to solve the above-described problems, the inspection apparatus according to the present invention includes an irradiation unit that irradiates inspection light onto an inspection target such as an electronic component that has been transported by a transport unit, and inspection light from the irradiation unit. An inspection apparatus including an image capturing unit for capturing an image of an irradiated inspection object, and a determination processing unit that determines the quality of the inspection object based on the image captured by the image capturing unit. The irradiation unit includes a blue irradiation unit that emits blue light and a red irradiation unit that emits red light, and the image capturing unit is irradiated by a plurality of irradiation units having different colors. A color image capturing unit for capturing a color image of the inspection object, and the determination processing unit is based on an image obtained by separating the image captured by the color image capturing unit for each color. It is configured to judge the quality of things. That.

上記のようにカラー画像取込部から画像取込部を構成することにより、色の異なる複数の照射手段にて照射されている前記検査対象物のカラー画像を1回で取り込むことができる。そして、取り込まれた複数のカラー画像は、色毎に分けて複数の画像にすることができ、検査手段により、青色照射手段にて照射された検査対象物の画像に基づいて該検査対象物の表層面の検査を行うとともに、前記赤色照射手段にて照射された検査対象物の画像に基づいて該検査対象物の内層部の検査を行うことができる。ここでいう表層面とは、カメラ側から見たときの検査対象物の撮像対象表面を示し、内層部とは照射した光が検査対象物の内部で拡散され、その拡散光がカメラ側で撮像できる表層面からのある一定深さの領域を示し、表面に近い層状の領域を指すことになる。   By configuring the image capturing unit from the color image capturing unit as described above, it is possible to capture a color image of the inspection object irradiated by a plurality of irradiation means having different colors at a time. The captured plurality of color images can be divided into colors to form a plurality of images, and the inspection means can detect the inspection object based on the image of the inspection object irradiated by the blue irradiation means. While inspecting the surface layer surface, it is possible to inspect the inner layer portion of the inspection object based on the image of the inspection object irradiated by the red irradiation means. The surface layer here refers to the imaging target surface of the inspection object when viewed from the camera side, and the inner layer portion diffuses the irradiated light inside the inspection object, and the diffused light is imaged on the camera side. This indicates a region having a certain depth from the surface layer that can be formed, and indicates a layered region close to the surface.

また、本発明に係る検査装置においては、前記青色照射手段及び赤色照射手段のうちの少なくとも赤色照射手段を、それの照射軸が検査対象物に向ける前記カラー画像取込部の光軸に対して傾くように配置し、該赤色照射手段の照射軸と該光軸との傾斜角度を前記青色照射手段の照射軸と該光軸との傾斜角度よりも大きく設定してもよい。   Further, in the inspection apparatus according to the present invention, at least the red irradiation unit of the blue irradiation unit and the red irradiation unit is arranged with respect to the optical axis of the color image capturing unit whose irradiation axis is directed toward the inspection object. It may be arranged so as to be inclined, and the inclination angle between the irradiation axis of the red irradiation means and the optical axis may be set larger than the inclination angle between the irradiation axis of the blue irradiation means and the optical axis.

尚、本発明に係る検査装置においては、前記青色照射手段及び赤色照射手段に加えて、緑色の光を照射する緑色照射手段を備えてもよい。斯かる構成によれば、検査対象物の外形ラインをシャープに撮像することができるから、2種類の色では見つけられなかった検査対象物の外周縁(特に角など)のクラック(割れ目)や欠けを有効に検出することができる。又、緑色照射手段の照射軸と前記カラー画像取込部の光軸との傾斜角度を、前記赤色照射手段の照射軸と該光軸との傾斜角度よりも小さく、かつ、前記青色照射手段の照射軸と該光軸との傾斜角度よりも大きく設定するだけで、検査対象物に最適な状態で照射することができ、検査を精度良く行うことができる。   The inspection apparatus according to the present invention may include a green irradiation unit that emits green light in addition to the blue irradiation unit and the red irradiation unit. According to such a configuration, since the outline line of the inspection object can be sharply imaged, cracks (breaks) or chippings on the outer periphery (particularly corners) of the inspection object that could not be found with the two types of colors. Can be detected effectively. The inclination angle between the irradiation axis of the green irradiation means and the optical axis of the color image capturing unit is smaller than the inclination angle between the irradiation axis of the red irradiation means and the optical axis, and the blue irradiation means By simply setting the tilt angle larger than the tilt angle between the irradiation axis and the optical axis, it is possible to irradiate the inspection object in an optimum state, and the inspection can be performed with high accuracy.

また、本発明に係る検査装置においては、前記青色照射手段、前記緑色照射手段、前記赤色照射手段のそれぞれを、多数の発光ダイオードから構成してもよい。斯かる構成によれば、照射手段の小型化を図れるだけでなく、玉切れ等のない耐久面及び消費電力の面のいずれにおいても有利になる。又、上端中心部に前記カラー画像取込部の画像取込用の開口を備えた上端側ほど内側に位置する湾曲面を備えた支持部材の内面に、それの下側から順に前記赤色照射手段の発光ダイオード、前記緑色照射手段のダイオード、前記青色照射手段のダイオードが位置し、かつ、前記カラー画像取込部の光軸に対して円環状に並ぶように、該ダイオードを配置することによって、各発光ダイオードの角度を支持部材の湾曲面に合わせることができ、製造面において有利になる。   In the inspection apparatus according to the present invention, each of the blue irradiation unit, the green irradiation unit, and the red irradiation unit may be configured by a number of light emitting diodes. According to such a configuration, not only the irradiation unit can be reduced in size but also advantageous in terms of both durability and power consumption without running out of balls. In addition, on the inner surface of the support member provided with a curved surface located on the inner side toward the upper end side provided with an image capturing opening of the color image capturing unit at the center of the upper end, the red irradiation means in order from the lower side By arranging the diodes so that the light emitting diodes, the green irradiation unit diodes, the blue irradiation unit diodes are positioned, and are arranged in an annular shape with respect to the optical axis of the color image capturing unit, The angle of each light emitting diode can be adjusted to the curved surface of the support member, which is advantageous in terms of manufacturing.

画像取込部をカラー画像取込部から構成することによって、色の異なる複数の照射手段にて照射されている前記検査対象物のカラー画像を1回で取り込むことができるから、複数回取り込む場合に比べて、取込時間を短縮することができ、表層面の検査と内層部の検査とを搬送速度を遅くすることなく、効率よく行うことができる。しかも、色毎に分けた画像は、同一の位置にある検査対象物を撮像したものであることから、色毎の画像はその撮像方向が同一であり、減算など複数の画像間で演算を行うのに適した画像を得ることができる。その結果、欠陥の特徴のみを強調することができ、精度のよい検査を行うことができる。   By configuring the image capturing unit from a color image capturing unit, it is possible to capture a color image of the inspection object irradiated by a plurality of irradiating means having different colors at a time. As compared with the above, the take-in time can be shortened, and the inspection of the surface layer surface and the inspection of the inner layer portion can be performed efficiently without slowing the conveying speed. Moreover, since the images divided for each color are obtained by imaging the inspection object at the same position, the images for each color have the same imaging direction, and calculation is performed between a plurality of images such as subtraction. An image suitable for the above can be obtained. As a result, only the feature of the defect can be emphasized, and an accurate inspection can be performed.

前記青色照射手段及び赤色照射手段のうちの少なくとも赤色照射手段を、それの照射軸が検査対象物に向ける前記カラー画像取込部の光軸に対して傾くように配置し、該赤色照射手段の照射軸と該光軸との傾斜角度を前記青色照射手段の照射軸と該光軸との傾斜角度よりも大きく設定するだけで、検査対象物に最適な状態で照射することができ、検査を精度良く行うことができる。   At least the red irradiation means of the blue irradiation means and the red irradiation means is arranged so that its irradiation axis is inclined with respect to the optical axis of the color image capturing unit directed toward the inspection object, By simply setting the inclination angle between the irradiation axis and the optical axis to be larger than the inclination angle between the irradiation axis of the blue irradiation means and the optical axis, it is possible to irradiate the inspection object in an optimum state and perform the inspection. It can be performed with high accuracy.

(a)は検査装置の縦断側面図、(b)は検査装置の平面図である。(A) is a vertical side view of the inspection apparatus, and (b) is a plan view of the inspection apparatus. (a),(b),(c)はチップ型コンデンサの各種の欠陥例を示す説明図である。(A), (b), (c) is explanatory drawing which shows the example of various defects of a chip-type capacitor | condenser. 他の検査装置の一部を示す縦断面図である。It is a longitudinal cross-sectional view which shows a part of other test | inspection apparatus.

図1及び図2に、本発明の検査装置を示している。この検査装置は、例えば検査対象物の一例であるチップ型コンデンサCを矢印方向に搬送する搬送手段としてのベルトコンベア1と、このベルトコンベア1により搬送されてきたチップ型コンデンサCに上方から照射する照射部2と、該照射部2の検査用光が照射された検査対象物の画像を取り込むための画像取込部としてのカラーCCDカメラ3(カラー画像取込部)と、このカラーCCDカメラ3にて取り込んだ画像に基づいてチップ型コンデンサCの良否を判定する判定処理部4とを備えている。前記検査対象物としては、チップ型コンデンサCの他、チップ型発光ダイオードやチップ型インダクタの誘電体や内部電極を備えた電子部品を検査することができるが、表層面の検査と内層部の検査の必要なものであれば、電子部品以外のものであってもよい。前記判定処理部4にて不良品と判定された場合には、その不良品を不良品回収部(図示せず)に回収し、良品と判定された場合には、その良品を良品回収部(図示せず)に回収するように制御部Sに判定処理部4からの判定結果を出力して、制御部Sにて不良品回収部(図示せず)又は良品回収部(図示せず)を作動させるように構成している。   1 and 2 show an inspection apparatus of the present invention. This inspection apparatus irradiates, for example, a belt conveyor 1 as a conveying means for conveying a chip capacitor C, which is an example of an inspection object, in the direction of the arrow, and a chip capacitor C conveyed by the belt conveyor 1 from above. Irradiation unit 2, color CCD camera 3 (color image capture unit) as an image capture unit for capturing an image of the inspection object irradiated with the inspection light from the irradiation unit 2, and this color CCD camera 3 And a determination processing unit 4 that determines whether the chip capacitor C is good or bad based on the image captured in step (1). As the inspection object, in addition to the chip capacitor C, it is possible to inspect electronic components including chip type light emitting diodes or chip type dielectrics and internal electrodes, but surface layer inspection and inner layer inspection As long as it is necessary, it may be other than electronic components. If the determination processing unit 4 determines that the product is defective, the defective product is collected in a defective product collection unit (not shown). If the product is determined to be good, the good product is collected. The determination result from the determination processing unit 4 is output to the control unit S so as to collect the defective product collection unit (not shown) or the non-defective product collection unit (not shown). It is configured to operate.

前記搬送手段としてベルトコンベア1から構成しているが、縦軸芯周りで回転自在なターンテーブル等から構成することもできるし、その他の各種搬送装置であってもよい。又、ここでは、上方からチップ型コンデンサCの良否を検出する場合を示しているが、左右両横側、底面側、前側、後側のいずれの方向からもチップ型コンデンサCの良否を検出してもよく、検出する方向は自由に変更可能である。   Although the belt conveyor 1 is used as the transport means, the belt conveyor 1 may be a turntable that can rotate around the vertical axis, or may be other various transport devices. Here, the case where the quality of the chip capacitor C is detected from above is shown, but the quality of the chip capacitor C is detected from any of the left, right, bottom side, front side, front side, and rear side. The direction of detection can be freely changed.

前記照射部2が、青色の光を照射する青色照射手段5と、緑色の光を照射する緑色照射手段6と、赤色の光を照射する赤色照射手段7とを備え、前記青色照射手段5、前記緑色照射手段6、前記赤色照射手段7のそれぞれが、多数の発光ダイオードからなり、上端中心部に前記カラーCCDカメラ3の画像取込用の開口8Aを備え、下端からほぼ真っ直ぐに上方まで伸びる縦向きの下側内面8Uと、この下側内面8Uの上端から上端まで上端側ほど内側に位置する上側湾曲面8Wとを備えた平面視円形の支持部材8の上側湾曲面8Wに、それの下側から順に前記赤色照射手段の発光ダイオード7、前記緑色照射手段のダイオード6、前記青色照射手段のダイオード5が位置し、かつ、前記カラーCCDカメラ3の光軸Xに対して円環状に並ぶように、該ダイオード7,6,5を配置することによって、ダイオード7,6,5からチップ型コンデンサCまでの照射距離が大きく異なることがないようにしているが、図3に示すように下端が開放された縦長状の支持部材9の内面9Hに、発光ダイオード7,6,5を上下方向ほぼ同一位置に位置するように取り付けてもよく、発光ダイオードの取付位置は自由に変更可能である。尚、前記支持部材9の上端中央位置に画像取込用の開口9Aを形成している。又、照射手段としては、発光ダイオードの他、カラー蛍光ランプを用いてもよいし、又蛍光ランプや白熱ランプ等の各種白色ランプにカラーフィルターを用いて各種の色を出力するようにしてもよい。   The irradiation unit 2 includes a blue irradiation unit 5 that emits blue light, a green irradiation unit 6 that emits green light, and a red irradiation unit 7 that emits red light. Each of the green illuminating means 6 and the red radiating means 7 is composed of a large number of light emitting diodes, and has an opening 8A for capturing an image of the color CCD camera 3 at the center of the upper end, and extends almost straight upward from the lower end. The upper curved surface 8W of the circular support member 8 having a vertically-facing lower inner surface 8U and an upper curved surface 8W positioned inward from the upper end to the upper end of the lower inner surface 8U on the upper end side thereof, The light emitting diode 7 of the red irradiation unit, the diode 6 of the green irradiation unit, and the diode 5 of the blue irradiation unit are located in order from the lower side, and are arranged in an annular shape with respect to the optical axis X of the color CCD camera 3. Thus, by arranging the diodes 7, 6 and 5, the irradiation distance from the diodes 7, 6 and 5 to the chip capacitor C is not greatly different, but the lower end is not as shown in FIG. The light emitting diodes 7, 6 and 5 may be attached to the inner surface 9H of the opened vertically long support member 9 so as to be located at substantially the same position in the vertical direction, and the attachment position of the light emitting diodes can be freely changed. An opening 9A for image capture is formed at the center of the upper end of the support member 9. In addition to the light-emitting diode, a color fluorescent lamp may be used as the irradiation means, or various colors may be output using a color filter to various white lamps such as a fluorescent lamp and an incandescent lamp. .

前記青色照射手段5及び緑色照射手段6並びに赤色照射手段7を、それの照射軸Y1が検査対象物に向ける前記カラーCCDカメラ3の光軸Xに対して傾くように配置することによって、前記青色照射手段5からの検査用光がチップ型コンデンサCの表面を照射するとともに、緑色照射手段6からの検査用光がチップ型コンデンサCの外形を照射し、前記赤色照射手段7からの検査用光がチップ型コンデンサCの内部に入り込むようにしている。そして、前記カラーCCDカメラ3にて取り込んだ画像のうち、前記青色照射手段にて照射された検査対象物の画像に基づいて該検査対象物の表層面(撮像対象表面)の検査を行うとともに、前記赤色照射手段にて照射された検査対象物の画像に基づいて該検査対象物の内層部(カメラ側で撮像できる表層面からある一定深さの領域)の検査を行うようにしている。   The blue illuminating means 5, the green illuminating means 6 and the red illuminating means 7 are arranged so that the illuminating axis Y1 thereof is inclined with respect to the optical axis X of the color CCD camera 3 directed toward the inspection object. The inspection light from the irradiation means 5 irradiates the surface of the chip capacitor C, and the inspection light from the green irradiation means 6 irradiates the outer shape of the chip capacitor C, and the inspection light from the red irradiation means 7. Enters the inside of the chip capacitor C. And among the images captured by the color CCD camera 3, based on the image of the inspection object irradiated by the blue irradiation means, the surface layer surface (imaging target surface) of the inspection object is inspected, Based on the image of the inspection object irradiated by the red irradiation means, the inner layer portion of the inspection object (a region having a certain depth from the surface layer surface that can be imaged on the camera side) is inspected.

図1(a)に示すように、前記緑色照射手段6の照射軸Y2と前記カラー画像取込部3の光軸Xとの傾斜角度θ2 を、前記赤色照射手段7の照射軸Y3と該光軸Xとの傾斜角度θ3 よりも小さく、かつ、前記青色照射手段5の照射軸Y1と該光軸Xとの傾斜角度θ1 よりも大きく設定している。具体的には、前記青色照射手段5の照射軸Y1と前記カラー画像取込部3の光軸Xとの傾斜角度θ1 を例えば30度にしているが、0度から30度の範囲内であればどの角度に設定してもよい。又、前記緑色照射手段6の照射軸Y2と前記カラー画像取込部3の光軸Xとの傾斜角度θ2 を45度にしているが、30度から60度の範囲内であればどの角度に設定してもよい。又、前記赤色照射手段7の照射軸Y3と前記カラー画像取込部3の光軸Xとの傾斜角度θ3 を60度にしているが、50度から90度の範囲内であればどの角度に設定してもよい。尚、傾斜角度θ3 を50度から60度の間に設定する場合には、傾斜角度θ2 を傾斜角度θ3 よりも小さい角度に設定することになる。 As shown in FIG. 1A, the inclination angle θ 2 between the irradiation axis Y2 of the green irradiation unit 6 and the optical axis X of the color image capturing unit 3 is set as the irradiation axis Y3 of the red irradiation unit 7 and the optical axis X. It is set smaller than the inclination angle θ 3 with respect to the optical axis X and larger than the inclination angle θ 1 between the irradiation axis Y 1 of the blue irradiation means 5 and the optical axis X. Specifically, the inclination angle θ 1 between the irradiation axis Y1 of the blue irradiation means 5 and the optical axis X of the color image capturing unit 3 is set to 30 degrees, for example, but within a range of 0 to 30 degrees. Any angle can be set. In addition, the inclination angle θ 2 between the irradiation axis Y2 of the green irradiation means 6 and the optical axis X of the color image capturing section 3 is set to 45 degrees, but any angle is within the range of 30 degrees to 60 degrees. It may be set to. Further, the inclination angle θ 3 between the irradiation axis Y3 of the red irradiation means 7 and the optical axis X of the color image capturing section 3 is set to 60 degrees, but any angle is within the range of 50 degrees to 90 degrees. It may be set to. When the inclination angle θ 3 is set between 50 degrees and 60 degrees, the inclination angle θ 2 is set to an angle smaller than the inclination angle θ 3 .

前記のように青色照射手段5の照射軸Y1と前記カラー画像取込部3の光軸Xとの傾斜角度θ1 を0度から30度にすることによって、チップ型コンデンサCの上端面に対してできる限り直角又は直角に近い角度にて照射することができ、図2(b)に示すように、チップ型コンデンサCの上端面のキズやクラックK2を確実に検出することができるようにしている。又、緑色照射手段6の照射軸Y2と前記カラー画像取込部3の光軸Xとの傾斜角度θ2 を30度から60度にすることによって、チップ型コンデンサCの上端の外周縁に斜め上方から下方に向かって照射することができ、図2(c)に示すように、チップ型コンデンサCの外周縁のキズやクラックあるいは欠けK3を確実に検出することができるようにしている。又、赤色照射手段7の照射軸Y3と前記カラー画像取込部3の光軸Xとの傾斜角度θ3 を50度から90度にすることによって、チップ型コンデンサCの横側方に近い傾斜角度から照射することができ、チップ型コンデンサCの内部に照射光を入り込ませることができ、図2(a)に示すように、積層された誘電体間に発生する内部クラックK1や内部電極の浮き上がりを確実に検出することができるようにしている。 As described above, the inclination angle θ 1 between the irradiation axis Y 1 of the blue irradiation means 5 and the optical axis X of the color image capturing unit 3 is changed from 0 degrees to 30 degrees, so that the upper end surface of the chip capacitor C is changed. As shown in FIG. 2 (b), it is possible to reliably detect scratches and cracks K2 on the upper end surface of the chip type capacitor C. Yes. Further, the inclination angle θ 2 between the irradiation axis Y2 of the green irradiation means 6 and the optical axis X of the color image capturing unit 3 is changed from 30 degrees to 60 degrees so that the outer periphery of the chip capacitor C is inclined to the outer periphery. Irradiation can be performed from the upper side to the lower side, and as shown in FIG. 2C, scratches, cracks, or chips K3 on the outer peripheral edge of the chip capacitor C can be reliably detected. Further, the inclination angle θ 3 between the irradiation axis Y3 of the red irradiation means 7 and the optical axis X of the color image capturing section 3 is changed from 50 degrees to 90 degrees, so that the inclination close to the lateral side of the chip capacitor C is obtained. Irradiation can be performed from an angle, and irradiation light can enter inside the chip capacitor C. As shown in FIG. 2A, internal cracks K1 generated between the laminated dielectrics and internal electrodes The lift can be reliably detected.

図1(a),(b)に示すように、前記照射部2のチップ型コンデンサCの搬送方向(矢印方向)手前側に、チップ型コンデンサCを検出するための光電型のセンサ10を備えており、光電型のセンサ10にてチップ型コンデンサCを検出すると、それから設定時間経過後において照射部2の真下にチップ型コンデンサCが位置すると想定して、照射部2を設定時間経過後に作動させてチップ型コンデンサCに照射光を照射するとともに、カラーCCDカメラ3にて照射されているチップ型コンデンサCの画像を撮像するようにしている。前記光電型センサ10は、発光部10Aと受光部10Bとをチップ型コンデンサCの通過経路に対して直交する搬送幅方向両側に配置して、チップ型コンデンサCが発光部10Aからの光を受光部10Bに到達することを遮ることにより、チップ型コンデンサCの通過を検出できるようにしている。   As shown in FIGS. 1A and 1B, a photoelectric sensor 10 for detecting the chip capacitor C is provided on the front side of the irradiation unit 2 in the conveyance direction (arrow direction) of the chip capacitor C. When the chip-type capacitor C is detected by the photoelectric sensor 10, it is assumed that the chip-type capacitor C is located immediately below the irradiation unit 2 after the set time has elapsed, and the irradiation unit 2 is operated after the set time has elapsed. The chip capacitor C is irradiated with irradiation light, and an image of the chip capacitor C irradiated by the color CCD camera 3 is taken. In the photoelectric sensor 10, the light emitting unit 10A and the light receiving unit 10B are arranged on both sides in the transport width direction orthogonal to the passage path of the chip capacitor C, and the chip capacitor C receives light from the light emitting unit 10A. The passage of the chip capacitor C can be detected by blocking the arrival at the part 10B.

前記カラーCCDカメラ3にて撮像したチップ型コンデンサCの画像は、前記3つの色毎の画像に分解された後、それら各画像を予め記憶されている画像データと比較することにより、各画像の良否を判定し、例えば1つでも不良の画像が存在することにより、チップ型コンデンサCを不良であると前記制御部Sにて判定するようにしているが、3つの画像のうちの特定の2つの画像が不良である場合にのみ、チップ型コンデンサCを不良であると判定するようにしてもよく、前記判定基準は自由に変更することができる。   The image of the chip-type capacitor C picked up by the color CCD camera 3 is decomposed into the images for each of the three colors, and then each image is compared with pre-stored image data. Whether the chip capacitor C is defective or not is determined by the control unit S by determining whether there is at least one defective image, for example. Only when one image is defective, the chip capacitor C may be determined to be defective, and the determination criteria can be freely changed.

前記カラー画像取込部として、カラーCCDカメラ3を用いる他、カラーCMOSカメラ等であってもよい。   In addition to using the color CCD camera 3 as the color image capturing unit, a color CMOS camera or the like may be used.

1…ベルトコンベア、2…照射部、3…カメラ、4…判定処理部、5…青色照射手段、6…緑色照射手段、7…赤色照射手段、5,6,7…発光ダイオード、8…支持部材、8A…開口、8W…湾曲面、9…支持部材、10…光電型センサ、C…チップ型コンデンサ、X…光軸、Y1,Y2,Y3…照射軸   DESCRIPTION OF SYMBOLS 1 ... Belt conveyor, 2 ... Irradiation part, 3 ... Camera, 4 ... Determination processing part, 5 ... Blue irradiation means, 6 ... Green irradiation means, 7 ... Red irradiation means, 5, 6, 7 ... Light emitting diode, 8 ... Support Member: 8A: Opening, 8W: Curved surface, 9: Supporting member, 10: Photoelectric sensor, C: Chip type capacitor, X: Optical axis, Y1, Y2, Y3: Irradiation axis

Claims (2)

搬送手段にて搬送されてきた電子部品等の検査対象物に検査用光を照射する照射部と、該照射部の検査用光が照射された検査対象物の画像を取り込むための画像取込部と、画像取込部にて取り込んだ画像に基づいて検査対象物の良否を判定する判定処理部とを備えた検査装置であって、
前記照射部が、青色の光を照射する青色照射手段と、赤色の光を照射する赤色照射手段とを備え、
前記画像取込部が、前記色の異なる複数の照射手段にて照射されている前記検査対象物のカラー画像を取り込むためのカラー画像取込部から構成し、
前記判定処理部が、該カラー画像取込部で取り込んだ画像を各色毎に分解した画像に基づいて、検査対象物の良否を判定するように構成されたことを特徴とする検査装置。
An irradiation unit for irradiating the inspection object such as an electronic component conveyed by the conveying unit with the inspection light, and an image capturing unit for capturing an image of the inspection object irradiated with the inspection light of the irradiation unit And an inspection apparatus including a determination processing unit that determines the quality of the inspection object based on the image captured by the image capturing unit,
The irradiation unit includes a blue irradiation unit that emits blue light and a red irradiation unit that emits red light,
The image capturing unit is composed of a color image capturing unit for capturing a color image of the inspection object irradiated by a plurality of irradiation means having different colors,
An inspection apparatus, wherein the determination processing unit is configured to determine pass / fail of an inspection object based on an image obtained by separating the image captured by the color image capturing unit for each color.
前記青色照射手段及び赤色照射手段のうちの少なくとも赤色照射手段を、それの照射軸が検査対象物に向ける前記カラー画像取込部の光軸に対して傾くように配置し、該赤色照射手段の照射軸と該光軸との傾斜角度を前記青色照射手段の照射軸と該光軸との傾斜角度よりも大きく設定したことを特徴とする請求項1に記載の検査装置。   At least the red irradiation means of the blue irradiation means and the red irradiation means is arranged so that its irradiation axis is inclined with respect to the optical axis of the color image capturing unit directed toward the inspection object, 2. The inspection apparatus according to claim 1, wherein an inclination angle between the irradiation axis and the optical axis is set larger than an inclination angle between the irradiation axis of the blue irradiation means and the optical axis.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210082789A (en) * 2019-12-26 2021-07-06 윈텍 주식회사 Optical system for microchip inspection and method of microchip inspection method using it
KR20220113902A (en) * 2015-10-22 2022-08-17 (주)테크윙 Photographing device for checking goods

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0330812B2 (en) * 1982-02-08 1991-05-01 Matsushita Electric Ind Co Ltd
JPH0431974A (en) * 1990-05-29 1992-02-04 Omron Corp Defect inspecting device for rectangular member
JPH04166711A (en) * 1990-10-30 1992-06-12 Omron Corp Surface-state observing apparatus
JPH04294204A (en) * 1991-03-25 1992-10-19 Hitachi Ltd Apparatus for extracting defect in object surface
JP2001049175A (en) * 1999-06-01 2001-02-20 Jsr Corp Film-forming composition, formation of film and low- density film
JP2001133411A (en) * 1999-11-05 2001-05-18 Kubota Corp Nondestructive inside inspection apparatus for egg
JP2004251662A (en) * 2003-02-18 2004-09-09 Shibuya Kogyo Co Ltd Method and apparatus for article inspection
JP2005127989A (en) * 2003-10-03 2005-05-19 Olympus Corp Flaw detector and flaw detecting program
JP2006105816A (en) * 2004-10-06 2006-04-20 Kokusai Gijutsu Kaihatsu Co Ltd Article inspecting device and article inspection method
JP2007064801A (en) * 2005-08-31 2007-03-15 Daiichi Jitsugyo Viswill Co Ltd Lighting system and appearance inspection device equipped with it

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0330812B2 (en) * 1982-02-08 1991-05-01 Matsushita Electric Ind Co Ltd
JPH0431974A (en) * 1990-05-29 1992-02-04 Omron Corp Defect inspecting device for rectangular member
JPH04166711A (en) * 1990-10-30 1992-06-12 Omron Corp Surface-state observing apparatus
JPH04294204A (en) * 1991-03-25 1992-10-19 Hitachi Ltd Apparatus for extracting defect in object surface
JP2001049175A (en) * 1999-06-01 2001-02-20 Jsr Corp Film-forming composition, formation of film and low- density film
JP2001133411A (en) * 1999-11-05 2001-05-18 Kubota Corp Nondestructive inside inspection apparatus for egg
JP2004251662A (en) * 2003-02-18 2004-09-09 Shibuya Kogyo Co Ltd Method and apparatus for article inspection
JP2005127989A (en) * 2003-10-03 2005-05-19 Olympus Corp Flaw detector and flaw detecting program
JP2006105816A (en) * 2004-10-06 2006-04-20 Kokusai Gijutsu Kaihatsu Co Ltd Article inspecting device and article inspection method
JP2007064801A (en) * 2005-08-31 2007-03-15 Daiichi Jitsugyo Viswill Co Ltd Lighting system and appearance inspection device equipped with it

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220113902A (en) * 2015-10-22 2022-08-17 (주)테크윙 Photographing device for checking goods
KR102620125B1 (en) * 2015-10-22 2024-01-03 (주)테크윙 Photographing device for checking goods
KR20210082789A (en) * 2019-12-26 2021-07-06 윈텍 주식회사 Optical system for microchip inspection and method of microchip inspection method using it
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