KR20220113902A - Photographing device for checking goods - Google Patents

Abstract

The present invention relates to a photographing device used to check goods. The photographing device according to the present invention comprises: a camera for photographing an inspection portion on one surface of an inspection object in a state positioned in a direction perpendicular to one surface of the inspection object to be inspected; a vertical light coupled to the camera, capable of moving with the camera, and emitting light at an irradiation angle perpendicular to the one surface; and at least one oblique light which is coupled to the camera and can move together with the camera, and emits light at an irradiation angle within a range of an angle greater than 0 degrees but less than 90 degrees with respect to the one surface. According to the present invention, the light can be emitted to the inspection portion at different irradiation angles, such that the inspection of the goods can be accurately performed.

Description

A photographic device for inspecting goods {PHOTOGRAPHING DEVICE FOR CHECKING GOODS}

The present invention relates to an imaging device that can be used to inspect whether a product is defective.

A semiconductor device test handler (hereinafter referred to as a 'handler') is an equipment that electrically connects semiconductor devices manufactured through a predetermined manufacturing process to a tester and classifies semiconductor devices according to test results.

A handler for supporting a test of a semiconductor device is disclosed through various patent documents such as Korean Patent Laid-Open No. 10-2002-0053406 or 10-2012-0027248.

The handler has a plurality of accessories necessary for electrically connecting the semiconductor devices to the tester and classifying the semiconductor devices according to the test result. And among the accessories, there are accessories that need to be replaced according to a change in the standard of the semiconductor device to be tested. For example, the handler has a test tray on which semiconductor elements are loaded and a match plate for pressing the semiconductor elements loaded on the test tray toward the tester. Since the test tray and the match plate are in direct contact with the semiconductor device, they are components that need to be replaced according to the change in the specifications of the semiconductor device.

However, when a defect exists or occurs in the functions or specifications of the test tray and the match plate, an operation failure of the handler or a failure in electrical contact between the semiconductor device and the tester occurs.

Therefore, when manufacturing a handler or replacing a test tray and a match plate according to a change in the specifications of a semiconductor device, it is necessary to first inspect the test tray and the match plate for defects. Of course, it is necessary to inspect the accessories even when the handler is installed, even if not in the case of replacing the accessories. For example, in the case of an accessory producer, quality inspection of the accessories to be delivered should be conducted before delivery to the customer. You may need to install it in your post handler.

In addition, when using the handler, it is necessary to perform regular or irregular safety inspections at regular or irregular intervals. At this time, the items to be inspected include scratches, cracks, poor condition or malfunction of detailed parts, whether proper assembly, whether or not the parts are bent, thickness and width, detailed structures, configurations and shapes within the accessories, and their angles or heights. location and number. Scratches, cracks, and poor condition of detailed parts reduce the product's marketability and reliability, and malfunction of detailed parts, improper assembly, bending, and defects in thickness and width may cause defects in electrical contact between the semiconductor device and the tester. have. Also, defects in bending, thickness, and width cause defects in the proper operation of the handler.

The test tray has a plurality of inserts in which semiconductor devices can be loaded, as referenced in Korean Patent Laid-Open Publication No. 10-2008-0040654 and the like. Since the body of the insert is injection molded, it may have defects that can be confirmed with the naked eye, such as injection defects or cracks. In addition, the test tray has a latch that is restored by a spring to fix the semiconductor device, and the fixing function of the latch may be defective. In addition, there may be defects in the frame specifications (thickness or width, etc.) of the test tray during production, or the test tray may be bent as it is used repeatedly for a long time.

The match plate is installed on the mounting plate in a state in which the pusher is elastically supported by a spring, as referenced in Korean Patent Application Laid-Open No. 10-2014-0127389 or the like. Such a match plate may have not only a defect that can be confirmed by the naked eye, but also a defect in the function of the spring elastically supporting the pusher (the degree of elasticity). Similarly, there may be defects in the specifications (thickness, width, etc.) of the match plate during production, or the match plate may be bent after being used repeatedly for a long time.

Conventionally, the inspection of the test tray and the inspection of the match plate were performed with the naked eye, and defective functions were also made by hand.

However, in the case of the naked eye, the quality of the inspection may vary depending on the professionalism of the operator or the current condition (fatigue or visual acuity, etc.). Therefore, it is difficult to perform uniformly good inspection work on accessories, which causes the reliability of inspection to be lowered. In addition, since the accuracy of inspection quality is not guaranteed even for manual inspection of functions, the reliability of inspection is further deteriorated.

In particular, since both the test tray and match plate are in the form of a plate, it can cause movement jamming due to bending, poor thickness and width, poor matching between the two, poor pressing distance, and poor connection between the semiconductor device and the tester. , thickness and width are also important inspection items. However, it is very difficult to visually check the bending, thickness, width, and strength of the test tray and match plate.

Of course, inspection equipment for the appearance of the test tray, inspection equipment for the function of the test tray, inspection equipment for the appearance of the match plate, and inspection equipment for the function of the match plate may be considered. However, it is not preferable to provide several separate inspection equipment because of the burden of additional cost and the deterioration of space utilization.

In general, since the test tray and match plate have a matching relationship, they are both plate-shaped and have approximately the same area. Therefore, it is possible to propose an inspection equipment that allows one inspection equipment to inspect both the test tray and the match plate by the same procedure. However, if the movement of the test tray and the movement of the match plate are the same in the inspection equipment, the following problems arise from the difference in weight and number between them.

First, the number of test trays and the number of match plates applied to one handler are different because dozens of test trays are circulated in the handler, and the match plates are fixedly installed only in the test position. Therefore, taking the match plate in the same way as the movement flow of the test tray may result in a waste of time.

Second, the match plate is relatively heavier than the test tray. Therefore, if the strength of all parts affected by the weight of the match plate and test tray is designed based on the test tray, all parts cannot withstand the weight of the match plate. However, if the strength of all parts is designed based on the match plate, the production cost of the inspection equipment will rise significantly.

Third, test trays and match plates have different specifications and characteristics for each handler. In some cases, the company that operates the handler or the company that produces it and the company that produces or supplies the appropriate accessories operates it with several types of accessories even in small quantities. Therefore, separately providing inspection equipment suitable for each incurs a huge cost.

Fourth, the test tray or match plate needs to have a different irradiation angle depending on where the parts to be inspected are, so it may be difficult to perform an accurate inspection with lighting having an irradiation angle based on any one part.

The present invention is to provide a technology capable of photographing an article while changing the irradiation angle of the light while being able to move together because the camera and the light are mutually coupled.

A photographing apparatus for inspecting an article according to the present invention for achieving the above object includes: a camera for photographing an inspection portion on one surface of the inspection object in a state located in a direction perpendicular to one surface of the inspection object to be inspected; a vertical illumination coupled to the camera and capable of moving together with the camera, irradiating light at an irradiation angle perpendicular to the one surface; and at least one inclined light coupled to the camera and capable of moving together with the camera, irradiating light at an irradiating angle within the range of angles greater than 0 degrees and less than 90 degrees with respect to the one surface; Including, the vertical illumination and the at least one or more inclined illumination are independently controlled by a control device.

A plurality of oblique lights are provided, and the plurality of oblique lights irradiate light to the one surface at different angles.

The vertical illumination includes a plurality of light sources, and at least one of the plurality of light sources irradiates light of a color different from that of the other light sources.

The oblique illumination includes a plurality of light sources, and at least one of the plurality of light sources irradiates light of a color different from that of the other light sources.

The intensity of the light irradiated to the plurality of light sources may be adjusted by the control device.

The oblique illumination has a plurality of light sources, and the plurality of light sources are arranged in a circle shape on an imaginary surface parallel to the one surface.

According to the present invention, there are the following effects.

First, since it is possible to photograph while changing the irradiation angle without changing the arrangement structure of the light sources in the lighting, the accuracy of the defect inspection on the article is increased.

Second, since the color of the irradiated light can be adjusted in various ways, the accuracy of the inspection is further increased.

Third, the design of equipment is easy because the vertical lighting and at least one or more inclined lights can be moved integrally while being coupled to the camera while securing the shooting angle of the camera.

1 is a conceptual front view showing the structure of an inspection equipment to which a photographing machine according to an embodiment of the present invention is applied.
FIG. 2 is a conceptual side view showing the structure of the inspection equipment of FIG. 1 .
FIG. 3 is a conceptual plan view showing the structure of the inspection equipment of FIG. 1 .
4 is a perspective view of a support device applied to the inspection equipment of FIG. 1 .
FIG. 5 is a partially exploded view of the support device of FIG. 4 .
6 is a reference view for explaining the operation of the support device of FIG.
FIG. 7 is a reference view for explaining a supporter applied to the support device of FIG. 4 .
FIG. 8 is an excerpt of a supporter applied to the support device of FIG. 4 .
9 is a perspective view of a storage device applied to the inspection equipment of FIG.
It is a partial exploded view of the storage device of FIG.
FIG. 11 is a reference view for explaining the operation of the ice moving machine applied to the storage device of FIG. 9 .
12 is an excerpted plan view of the forward/backward device applied to the inspection equipment of FIG. 1 .
It is a reference diagram for explaining the operation of the forward/backward device of FIG. 12 of FIG. 13 .
14 is a perspective view of a transfer device applied to the inspection equipment of FIG. 1 .
15 is a bottom perspective view of a gripper applied to the transfer device of FIG. 14 .
16 is a reference view for explaining a gripper applied to the transfer device of FIG. 14 .
17 is a reference diagram for explaining the operation of the transfer device of FIG. 14 .
18 shows a state in which the transfer device of FIG. 14 adjusts the height of the gripper.
19 shows a state in which the transfer device of FIG. 14 can hold the test tray.
20 shows a state in which the transfer device of FIG. 14 takes out the test tray from the storage device.
21 shows a state in which the transfer device of FIG. 14 can supply the test tray to the support device.
22 shows a state in which the transfer device of FIG. 14 supplies the test tray to the support device.
23 shows a state in which the transfer device of FIG. 14 rotates the test tray 180 degrees.
24 is an excerpt of an inspection device applied to the inspection equipment of FIG. 1 .
25 is a schematic cut-away view of a camera according to an embodiment of the present invention applied to the inspection apparatus of FIG.
FIG. 26 is a conceptual structural diagram of the camera of FIG. 25 .
27 is a schematic structural diagram of a pressure gauge applied to the inspection device of FIG. 24 .
28 is a perspective view of a moving device applied to the inspection equipment of FIG. 1 .
29 is a side cross-sectional view of the pedestal applied to the inspection equipment of FIG.
30 is a perspective view of an opening/closing door applied to the inspection equipment of FIG. 1 .
FIG. 31 is a perspective view viewed from another angle with respect to the opening/closing door of FIG. 30 .
FIG. 32 is a reference view for explaining the function of the alignment bar applied to the opening/closing door of FIG. 30 .
33 is a schematic view of a fixture provided in a case applied to the inspection equipment of FIG.

Hereinafter, preferred embodiments according to the present invention will be described. For reference, overlapping descriptions are omitted or compressed as much as possible for the sake of brevity.

On the other hand, the test tray and match plate, which are inspection objects that are inspected by inspection equipment (100, hereinafter abbreviated as 'inspection equipment') that inspect accessories for handlers, electrically connect the semiconductor element to the tester when testing the semiconductor element. It is an accessory provided in the handler. The test tray is an accessory for loading a plurality of semiconductor devices, and the match plate is an accessory for pressing the semiconductor devices loaded on the test tray toward the tester. Therefore, in this description, when the test tray and the match plate are collectively referred to as an accessory.

<Overview of the overall configuration>

1 to 3 are conceptual structural diagrams of an inspection equipment 100 (hereinafter abbreviated as 'inspection equipment'), in which Fig. 1 is a front view, Fig. 2 is a side view, and Fig. 3 is a plan view.

1 to 3 , the inspection equipment 100 includes a support device 110 , a storage device 121 , a forward/backward device 122 , a transfer device 130 , an inspection device 140 , and a moving device 150 . ), a control device 160 , a pedestal 170 , a case 180 and an opening/closing door 190 . For reference, since the support device 110, the storage device 121, the forward/backward device 122, and the opening/closing door 190 are symmetrically provided as a pair of left and right, the support device 110 and the storage device on the left side (121), for the description of the forward/backward device 122 and the opening/closing door 190, the description of the support device 110, the storage device 121, the forward/backward device 122, and the opening/closing door 190 on the right side substitute

The support device 110 supports the accessory in the inspection position TP, and is installed on the installation plate IP.

The storage device 121 is provided below the support device 110 and can accommodate the test trays.

The forward and backward device 122 moves the storage device 121 forward and backward in the forward and backward directions.

The transfer device 130 moves the test tray in the storage device 120 to the support device 110 or moves the test tray supported by the support device 110 to the storage device 120 .

The inspection device 140 is provided to perform an inspection on the accessory in the inspection position (TP) in a state supported by the support device (110).

The moving device 150 is installed on the mounting plate, and moves the inspection device 140 in the horizontal direction, in the left-right direction or in the front-rear direction.

The control device 160 controls each configuration that needs to be controlled, and determines a result of the inspection by the inspection device 140 .

The pedestal 170 is installed on the installation plate IP, and supports pressing members of various standards that can be applied to the inspection device 140 . The pedestal 170 may include a sensor capable of confirming the presence or absence of the pressing members according to the detachment of the pressing members of various standards.

The case 180 accommodates the support device 110 , the storage device 121 , the forward/backward device 122 , the transfer device 130 , the inspection device 140 , the moving device 150 , and the pedestal 170 therein. do. This case 180 has a first exposure window (EW ₁ ) for exposing the support device 110 to the front and a second exposure window (EW ₂ ) for exposing the storage device 121 to the front. Therefore, the manager supplies the test tray to the storage device 121 through the second exposure window EW ₂ according to his/her own selection and judgment, and supports the test tray in the storage device 121 by the transfer device 130 . It may be moved to 110 , or the accessory may be directly supplied to the support device 110 through the first exposure window EW ₁ .

The opening/closing door 191 opens and closes the second exposure window EW ₂ , and aligns the test tray accommodated in the storage device 121 by closing the second exposure window EW ₂ .

Subsequently, each configuration of the above inspection equipment 100 will be described in more detail.

<Description of the support device>

The support device 110 supports the accessory in the inspection position TP. To this end, the support device 110 is a pair of mounting brackets (111a, 111b), a pair of support bars (112a, 112b) installed on the mounting plate (IP) as in the excerpt of FIG. 4 and some exploded views of FIG. 5 . , a pair of roller assemblies 113a and 113b, elevators 114-1 to 114-4, and a spacer 115 and a supporter 116.

A pair of support bars 112a and 112b are installed on the pair of mounting tables 111a and 111b. In particular, the first roller assembly 113b and the elevators 114-1 and 114-2 on the left side are also installed on the first mounting table 111a on the left side. The pair of mounting brackets (111a, 111b) is provided with a stopper (ST) at each rear end for determining the position of the rear end of the accessory. And among the pair of mounting tables 111a and 111b, the first mounting base 111a on the left is provided to be movable in the left-right direction, and the second mounting table 111b on the right side is fixed to the mounting plate IP.

A pair of support bars (112a, 112b) are installed separately on a pair of installation tables (111a, 111b), respectively, and support the accessories in the inspection position (TP). The pair of support bars 112a and 112b have guide protrusions GP and through holes TH.

The guide protrusions GP guide the accessories to be placed on the support bars 112a and 112b while being placed in an appropriate position. To this end, the guide projections (GP) guide the appropriate position of the accessory placed from the upper side to the lower side by having a shape that increases in width toward the lower side.

The through holes TH are formed between the guide protrusions GP, and provide a passage through which the roller R of the roller assemblies 113a and 113b to be described later can ascend and descend.

The pair of roller assemblies 113a and 113b has a plurality of rollers R protruding upward. Here, a plurality of rollers (R) is rotated with a horizontal line (HL) in the left and right direction as a rotation axis. The pair of roller assemblies 113a and 113b are respectively provided to be liftable.

The elevators (114-1 to 114-4) are provided as cylinders, and lift the pair of roller assemblies (113a, 113b). Here, the left two elevators 114-1 and 114-2 and the first roller assembly 113a are coupled by placing a coupling member JE, and the right two elevators 114-3 and 114-4 and the first roller assembly 113a are coupled to each other. The two roller assemblies 113b are directly coupled. If the roller assemblies (113a, 113b) are raised by the elevators (114-1 to 114-4), the upper ends of the rollers (R) are the support bars (112a, 112b) as shown in Fig. 6 (a), which is a side view. When the roller assemblies (113a, 113b) are lowered by the elevators (114-1 to 114-4), the upper ends of the rollers (R) are support bars (112a, 112b) as shown in (b) of FIG. ) at least equal to or below the top of the Therefore, in the state of Figure 6 (a), the accessory (SP) is in a state spaced apart from the support bars (112a, 112b) by a predetermined interval (L) in the vertical direction, and in the state of Figure 6 (b), the accessory (SP) is supported It is placed on the bars 112a and 112b.

The spacing adjuster 115 moves the first mounting base 111a in the left and right directions. Therefore, when the gap adjuster 115 operates, the first support bar 112a and the first roller assembly 113a installed on the first mounting table 111a also move in the left and right directions. Since the spacing between the pair of support bars 112a, 112b and the spacing between the pair of roller assemblies 113a, 113b are adjusted by the spacing adjuster 115, accessories (SP) having left and right widths of various standards inspection becomes possible.

On the other hand, as in FIG. 7 , when the pusher PS of the match plate MP is pressed downward, the support 116 is a pusher that is pressed downward among points in the frame FM of the match plate MP. Support both front and rear points (P ₁ , P ₂ ) with (PS) in between. To this end, the supporter 116 includes a moving plate 116a, a first mover 116b, a coupling plate 116c, and a pair of front and rear support plates 116d-1 and 116d-2 as referenced in the excerpt of FIG. ), front and rear elevators 116e-1 to 116e-4, and a second mover 116f. Furthermore, the supporter 116 in this embodiment further includes an illuminator 116g for illuminating light from the lower side to the upper side of the accessory SP.

The moving plate 116a includes a coupling plate 116c, a pair of front and rear support plates 116d-1 and 116d-2, front and rear elevators 116e-1 to 116e-4, a second mover 116f, and an illuminator. (116g) is installed in combination. The moving plate 116a is provided to be movable in the left and right directions by the first mover 116b.

The first mover 116b moves the moving plate 116a in the left and right direction. Accordingly, the coupling plate 116c coupled to the moving plate 116a by the first mover 116b, a pair of front and rear support plates 116d-1 and 116d-2, and front and rear elevating members 116e-1 to 116e-4 ), the second mover 116f and the illuminator 116g may be moved in the left and right directions.

A pair of front and rear support plates 116d-1 and 116d-2, front and rear elevation sources 116e-1 to 116e-4, and an illuminator 116g are coupled to the coupling plate 116c. The coupling plate 116c is provided to be movable in the front-rear direction by the second mover 116f.

A pair of front and rear support plates 116d-1 and 116d-2 provided with the illuminator 116g interposed therebetween are both points P ₁ , P ₂ of the pusher PS that is pressed by force F as in FIG. 7 . ) to support the frame (FM) of the match plate (MP). Therefore, even when the pusher PF is pressed, there is no concern that a defect in the bending of the match plate MP occurs, and the elastic force of the spring S that elastically supports the pusher PS can be accurately detected.

The front and rear elevating members 116e-1 to 116e-4 raise and lower the support plates 116d-1 and 116d-2, respectively. That is, when the support plates 116d-1 and 116d-2 need to support the frame FM of the match plate MP, the elevators 116e-1 to 116e-4 operate to operate the support plates 116d- 1 and 116d-2) are raised so that the support plates 116d-1 and 116d-2 can support the frame FM of the match plate MP as shown in FIG. For reference, in the case of testing the most distal side of the match plate MP, there are cases where it is okay to support only one side, and there are cases where only one spring S for elastically supporting the pusher PS is provided. Accordingly, only one of the front and rear elevators 116e-1 and 116e-2 or 116e-3 and 116e-4 of the front and rear elevators 116e-1 to 116e-4 is provided, or Only one side of the elevators 116e-1 to 116e-4 may be controlled to operate.

The second mover 116f is a pair of front and rear support plates 116d-1 and 116d-2, front and rear elevation sources 116e-1 to 116e-4, and an illuminator ( 116g) in the front-rear direction. That is, since the coupling plate 116c can be moved in the front and rear and left and right directions according to the operation of the first mover 116b and the second mover 116f, a pair of front and rear support plates ( 116d-1, 116d-2) and an illuminator 116g may be located. Of course, the coupling plate 116c moves in conjunction with the movement of the inspection device 140 so as to be positioned vertically below the inspection device 140 when the inspection operation is performed.

The illuminator 116g is used when the inspection by the lighting provided in the inspection device 140 may be incomplete, and is provided to illuminate the light from the lower side to the upper side of the accessory SP. The illuminator 116g may be provided as a backlight unit, and moves forward and backward and left and right along with the coupling plate 116c.

For reference, since the support plates 116d-1 and 116d-2 and the illuminator 116g are coupled to each other by the first mover 116b and the second mover 116f to move in the front-rear and left-right directions, the support plate 116d -1 and 116d-2) and the illuminator 116g may be positioned below the inspection device 140 and corresponding to each other. Therefore, without needing the support plates 116d-1 and 116d-2 and the illuminator 116g corresponding to the entire planar area of the accessory SP, the structure is driven in association with the inspection device 140 to fit the inspection site efficiently. have And with this structure, the advantage of space utilization and efficiency increase can be obtained.

Next, the operation of the above support device 110 will be described.

The gap adjuster 115 moves the first mounting base 111 in the left and right directions according to the standard specification information for the pre-inputted accessory SP, thereby forming the left and right spacing between the pair of support bars 112a and 112b and the pair of rollers. Adjust the left and right spacing between the assemblies (113a, 113b). And the elevators (114-1 to 114-4) operate to raise the pair of roller assemblies (113a, 113b) as shown in Fig. 6 (a). In a state in which the pair of roller assemblies 113a and 113b are elevated, the accessory SP may be supplied to the support device 110 by the transfer device 130 after passing through the storage device 121 according to the selection of the manager. , may be directly supplied to the support device 110 through the first exposure window EW ₁ by the manager. At this time, since the accessory SP is first placed on the rollers R of the roller assemblies 113a and 113b in the process of supplying the accessory SP to the support device 110, the transfer device 130 or the manager's Hands are prevented from interfering with the support bars (112a, 112b). In addition, when the accessory SP is directly supplied to the support device 110 by the manager through the first exposure window EW ₁ , the rollers R provided in the pair of roller assemblies 113a and 113b By this, movement friction that may occur when the accessory SP is moved backward is minimized.

And, when the sensor (not shown) confirms that the accessory SP is in an appropriate position by the rear end of the accessory SP in contact with the stopper ST, the elevators 114-1 to 114-4 are a pair By lowering the roller assemblies 113a and 113b of FIG. 6 (b), both ends of the accessory SP are placed on a pair of support bars 112a and 112b. Of course, even when the accessory SP is collected by the support device 110 , the pair of roller assemblies 13a and 113b elevate and lower to assist the collection operation of the accessory SP.

On the other hand, when the inspection of the accessory SP at the inspection position TP by the inspection device 140 is made, the supporter 116 moves the coupling plate 116c while operating the illuminator 116g upward. Shine the light, or the elevator (116e-1 to 116e-4) is operated to support the frame (FM) of the match plate (MP) with the support plates (116d-1, 116d-2).

<Description of storage device>

The storage device 121 is provided to stack and accommodate a plurality of test trays in the vertical direction. To this end, the storage device has a pair of supporters 121a and 121b, a side mover 121c and an ice mover 121d facing each other as shown in the excerpt of FIG. 9 .

Each of the pair of supports 121a and 121b has a plurality of laminated plates 121a-1 and 121b-1 spaced apart from each other at regular intervals in the vertical direction. Here, the laminated plates 121a-1 and 121b-1 are provided with protrusions PP for floating both ends of the test tray TT in the space.

The test tray TT is accommodated in the storage device 121 in a state in which the left and right sides are placed on the protruding portions PP of the laminated plates 121a-1 and 121b-1 facing each other.

And, the first support 121a on the left of the pair of supports 121a and 121b is coupled to the base plate BP so as to be movable in the left-right direction.

The lateral mover 121c is installed on the base plate BP, and by moving the first supporter 121a in the left and right direction, the distance between the pair of supporters 121a and 121b in the left and right directions is narrowed or widened. Accordingly, test trays TT having various standard left and right widths may be appropriately accommodated in the storage device 121 .

On the other hand, the moving machine 121d moves the test tray TT accommodated in the storage device 121 to the rear that the transfer device 130 can grip by the manager or the storage device by the transfer device 130 . The test tray TT returned to step 121 is moved forward. To this end, the moving machine 131d is coupled to the first support 121a, and as shown in some exploded views of FIG. 10 , a plurality of first pushers 121a-1, a first moving plate 121a-2, and a first The reciprocator (121a-3), the plurality of second pushers (121a-4), the second moving plate (121a-5), the second reciprocator (121a-6), the coupling frame (121a-7) and the forward and backward ( 121a-8).

The plurality of first push rods 121a-1 push the test tray TT accommodated in the storage device 121 by the administrator to the rear that the transfer device 130 can grip within the storage device 121 to move it. used for

A plurality of first push rods 121a-1 are coupled to the first moving plate 121a-2 at equal intervals in the vertical direction. The first moving plate 121a-2 is movably coupled to the coupling frame 121a-7 in the left and right directions.

The first reciprocating device 121a-3 may reciprocate the first moving plate 121a-2 in the left and right directions. Therefore, in the state in which the first moving plate 121a-2 is moved to the right as referenced in FIG. 11 (a), which is a schematic plan view according to the operation of the first reciprocator 121a-3, the test tray TT can be pushed backward, and in a state in which the first moving plate 121a-2 is moved to the left, it can be moved in the front-rear direction without interference with the test tray TT as shown in FIG. can

The plurality of second push bars 121a - 4 are used to move the test tray TT returned to the storage device 121 by the transfer device 130 forward so that the manager can conveniently collect it. For reference, except for the uppermost one of the plurality of second push rods 121a-4 in FIG. 10, the other lower ones are covered by the coupling frame 121a-7.

A plurality of second push rods 121a-4 are coupled to the second moving plate 121a-5 at equal intervals in the vertical direction. The second moving plate 121a-5 is provided to be spaced apart from the rear of the first moving plate 121a-2 by a predetermined interval, and is movably coupled to the coupling frame 121a-7 in the left and right direction.

The second reciprocating device 121a-6 may reciprocate the second moving plate 121a-5 in the left and right directions. Similarly, in a state in which the second moving plate 121a-5 is moved to the right by the second reciprocator 121a-6, the test tray TT can be pushed forward, and the second moving plate 121a- 5) can be moved in the forward and backward directions without interference with the test tray TT in a state where it is moved to the left.

The coupling frame (121a-7) is provided to be movable in the front-rear direction. Ultimately, such a coupling frame includes a plurality of first pushers (121a-1), a first moving plate (121a-2), a first reciprocator (121a-3), a plurality of second pushers (121a-4), and a second The moving plate 121a-5 and the second reciprocator 121a-6 are coupled. Therefore, when the coupling frame (121a-7) moves in the front-rear direction, a plurality of first push rods (121a-1), a first moving plate (121a-2), a first reciprocator (121a-3), a plurality of second The pusher 121a-4, the second moving plate 121a-5, and the second reciprocating machine 121a-6 also move in the front-rear direction.

The forward/backward mover (121a-8) moves the coupling frame (121a-7) in the front-rear direction. Of course, the first pusher 121a-1, which has advanced to the right by the operation of the forward/retractor 121a-8, moves the test tray TT by pushing it backward, or the second pusher 121a-4 moves the test tray. Push (TT) forward to move it.

<Description of the forward/reverse device>

The forward/backward device 122 moves the receiving device 121 coupled to the base plate BP forward and backward in the forward and backward directions by moving the base plate BP forward and backward in the forward and backward directions as shown in the excerpted plan view of FIG. 12 . As shown in FIG. 13 , when the storage device 121 is moved forward as close as possible to the second exposure window EW ₂ by the forward/backward device 122 , the manager places the test tray TT into the storage device 121 . It is possible to conveniently perform the operation of storing or collecting the test tray TT from the storage device 121 .

<Description of the transfer device>

14 , the transfer device 130 includes a gripper 131 , a rotating machine 132 , an elevator 133 , a forward/backward mover 134 , and a left/right mover 135 .

The gripper 131 grips or releases the test tray TT. To this end, the gripper 131 includes a rotating plate 131a, a pair of gripping levers 131b-1 and 131b-2, a driving source 131c, the first contact members CP ₁ and the second as shown in FIG. Including contact members (CP ₂ ).

A pair of grip levers 131b-1 and 131b-2 and a driving source 131c are installed on the rotating plate 131a. This rotating plate (131a) is installed to be rotated forward and reverse 180 degrees by the rotating machine (132).

The pair of gripping levers 131b-1 and 131b-2 has gripping grooves GS ₁ , GS ₂ and preventing grooves PS ₁ and PS ₂ , respectively.

The gripping grooves GS ₁ , GS ₂ are formed to grip the test tray TT, and for this purpose, the gripping groove GS ₁ of the first gripping lever 131b-1 and the second gripping lever 131b-2 are formed. The gripping grooves (GS ₂ ) of the are open in mutually facing directions.

The prevention grooves (PS ₁ , PS ₂ ) are in the form of dents in the left and right directions, and a pair of gripping levers 131b-1 and 131b-2 as in FIG. 16 supplies the test tray TT to the support device 110 or When the test tray TT is retrieved from the support device 110 , the pair of gripping levers 131b-1 and 131b-2 are prevented from interfering with the guide protrusions GP of the support device 110 .

The driving source 131c moves the second grip lever 131b-2 of the pair of grip levers 131b-1 and 131b-2 in the left and right directions to form a pair of grip levers 131b-1 and 131b-2. Adjust the spacing between By the operation of the driving source 131c, the pair of gripping levers 131b-1 and 131b-2 can grip or release the test tray TT, and the pair of gripping levers 131b-1 and 131b The interval between -2) can also be adjusted. In the case where only the second gripper lever 131b-2 is moved as in the present embodiment, the operation of the left and right mover 135, which will be described later, is somewhat required when the gripper 131 grips or releases the test tray TT. can Of course, depending on the implementation, both the grip levers 131b-1 and 131b-2 may be implemented to be movable.

The first contact members CP ₁ are provided in a state of being inserted into the gripping groove GS ₁ of the fixed first gripping lever 131b-1. These first contact members (CP ₁ ) are provided with a material such as soft rubber, such as silicone or urethane, which is elastically expandable and contractible, and has some adhesiveness. The first contact member CP1 may be fixedly provided so as not to flow to the first gripping lever 131b-1.

The second contact members CP ₂ are provided in a state of being inserted into the gripping groove GS ₂ of the second gripping lever 131b-2 capable of moving left and right. This second contact member (CP ₂ ) is provided with a hard material without elastic contraction and expansion and no adhesiveness. For example, the second contact members (CP ₂ ) may be made of a hard material such as M/C nylon (M/C NYLON).

As described above, the reason for differentiating the material of the first contact member (CP ₁ ) and the material of the second contact member (CP ₂ ) is based on the first gripping lever (131b-1) fixed immovably to the rotating plate (131a). This is to keep the test tray TT aligned. That is, when the second gripping lever 131b-2 moves in a direction away from the first gripping lever 131b-1 to release the grip of the gripped test tray TT, the test tray TT becomes the first contact member. (CP ₁ ) Since it is in an adhesive state, the test tray TT is prevented from moving together in response to the movement of the second contact member CP ₂ . Accordingly, the test tray TT is maintained in a properly aligned state with respect to the first gripping lever 1312b-1 fixed to the rotating plate 131a.

In addition, the second contact member CP ₂ may be provided to be able to flow more or less in the direction toward the test tray TT on the second gripping lever 131b - 2 . In this case, a structure in which one end of an elastic member (not shown) such as a spring is supported by the second gripping lever 131b-2 and the other end is connected to the second contact member CP ₂ may be considered. In this example, when the accessory (SP) is gripped with both gripping levers (131b-1, 131b-2), the gripping force is increased even with a small force, and the specification of the accessory (SP) is slightly different depending on the manufacturing tolerance. It is possible to prevent failure of gripping or damage to the accessory SP due to a strong gripping force by appropriately responding to the

For reference, when there are elastic members (springs) on both sides of the grip levers 131b-1 and 131b-2, there may be a problem of tilting due to a difference in the elastic force of the elastic members (springs). Therefore, an elastic member (spring) is implemented only on the second gripping lever 131b-2 to prevent such a problem from occurring. And by doing so, the side of the first gripping lever (131b-1) without the elastic member (spring) becomes the reference plane, so that it is possible to seat in a state aligned with the correct contact and the correct position of the accessory (SP) during gripping and gripping release, that is, , The reason for implementing the second contact member (CP ₂ ) as a hard material and non-adhesive material is that proper alignment of the accessory (SP) is taken into account when gripping and releasing the accessory (SP).

The rotator 132 is provided to rotate a pair of gripping levers 131b-1 and 131b-2 forward and reverse 180 degrees by rotating the rotating plate 131a forward and reverse 180 degrees. The reason for providing such a rotator 132 is that it is necessary to inspect both the upper surface side and the lower surface side of the test tray TT or the match plate MP. Therefore, if it is necessary to inspect the edge of the test tray (TT) or the match plate (MP), it is also necessary to provide the rotating machine 132 so as to rotate the rotating plate 131a forward and reverse by -90 degrees, 90 degrees and 180 degrees. Also, since the degree of deflection according to the weight is different as the gripper 131 rotates, it is preferable that the reference height be on the same surface, so both contact members CP ₂₁ , CP ₂ of the gripper 131 . are different materials, but also different in composition.

The elevator 133 elevates the gripper 131 coupled to the rotator 132 by elevating the rotator 132 .

The forward/backward mover 134 moves the elevator 133 in the front-rear direction, thereby ultimately moving the rotating machine 132 and the gripper 131 coupled to the elevator 133 in the front-rear direction. Of course, a pair of grip levers 131b-1 and 131b-2 are tested in the storage device 121 or the support device 110 by the front and rear movement of the gripper 131 according to the operation of the forward/backward mover 134 . It advances to a position where the tray TT can be gripped or to a position where the test tray TT can be supplied to the storage device 121 or the support device 110 . Of course, the forward/backward mover 134 moves the gripper 131 backward after the pair of gripping levers 131b-1 and 131b-2 grips or releases the test tray TT.

The left and right mover 135 moves the gripper 131, the rotator 132, and the elevator 133 ultimately coupled to the front and back mover 134 by moving the front and rear mover 134 in the left and right directions in the left and right directions. Accordingly, the transfer device 130 may perform a moving operation for both the storage devices 121 on the left and right sides provided in pairs and the test trays TT in the support devices 110 on the left and right sides.

Next, the operation of the transfer device 130 will be described with reference to the schematic diagrams of FIGS. 17 to 24 .

First, in the state of FIG. 17 , the elevator 133 operates to position the gripper 131 at a height capable of gripping the test tray TT that needs to be moved loaded on the storage device 121 as shown in FIG. 18 .

In the state of FIG. 18, when the forward/backward mover 134 operates to advance the gripper 131, as shown in FIG. 19, a pair of gripping levers 131b-1 and 131b-2 may grip the test tray TT. become possible. Of course, the gap between the grip levers 131b-1 and 131b-2 of the gripper 131 is widened.

In the state of FIG. 19 , after the driving source 131c operates to grip the test tray TT, the forward/backward mover 134 operates to move the gripper 131 backward as in FIG. 20 .

When the state of FIG. 20 is reached, the elevator 133 operates to raise the gripper 131 so that the gripper 131 can supply the test tray TT to the support device 110 as shown in FIG. 21 . do.

In the state of FIG. 21, the forward/backward mover 134 operates to advance the gripper 131 to the state of FIG. 22, and then the elevator 133 lowers the gripper 131 slightly so that the test tray TT is It is to be placed on the rollers (R) of the roller assemblies (113a, 113b). Then, the gripper 131 releases the grip of the test tray TT, and after the elevator 133 slightly raises the gripper 131 , the forward/backward mover 134 operates to move the gripper 131 backward. Of course, when the test tray (TT) is placed on the rollers (R), the roller assemblies (113a, 113b) are lowered as described above so that the test tray (TT) is placed on the support bars (112a, 112b). At this time, the test tray TT may be implemented to be placed in an appropriate position of the support device 110 by the transfer device 130 , but the test tray TT placed on the support device 110 by the transfer device 130 . A separate aligner may be further provided for aligning the rear end of the to contact the stopper ST. For reference, in terms of control, the forward/backward mover 134 advances the gripper 131 to position the test tray TT on the upper side of the support device 110 and then raises the roller assemblies 113a and 113b to raise the test tray. After the (TT) is placed on the rollers (R) of the roller assemblies (113a, 113b), the test tray (TT) is placed on the support bars (112a, 112b) by lowering the roller assemblies (113a, 113b). may be

On the other hand, when the inspection of the upper surface of the test tray TT is completed, the forward/backward mover 134 and the gripper 131 operate to collect the test tray TT from the support device 110, and then, as shown in FIG. Similarly, the rotator 132 operates to rotate the test tray TT by 180 degrees. And the transfer device 130 re-supply the test tray TT rotated by 180 degrees to the support device 110 . Accordingly, the inspection device 140 inspects the lower surface of the test tray TT placed in a state in which the lower surface faces upward by 180 degree rotation.

Afterwards, the test tray TT on which both the upper and lower surfaces are inspected is recovered from the support device 110 by the transfer device 130, rotated 180 degrees to return to the original state, and then the storage device 121. move to And the transfer device 130 moves the test tray TT, which is the next inspection object, from the storage device 121 to the support device 110 .

<Description of inspection device>

The inspection device 140 is provided to inspect the appearance, function, and standard of the accessory. To this end, the inspection device 140 includes a photographing device 141, a first elevator 142, a pair of distance meters 143, a pair of pressure meters 144, a pair of lifting and lowering, as shown in the excerpt of FIG. It includes a frame 145 , a pair of second elevators 146 and a moving plate 147 .

The photographing device 141 is provided to photograph the inspection portion on one surface of the accessory SP, which is an inspection target article to be inspected. To this end, the camera 141 is coupled to the moving plate 147 so as to be lifted and lowered, and as in the schematic cut-away view of FIG. 25 and the conceptual structural diagram of FIG. 26 , the camera 141a, the first light 1241b, and the first It includes a second light 141c, a third light 141d, and a fourth light 141e.

The camera 141a is provided to photograph a plane for the accessory SP in the vertical downward direction in a state located in the upper direction perpendicular to the upper surface of the accessory.

The first light 141b is provided as a vertical light for irradiating light at an irradiation angle perpendicular to the plane of the accessory SP, and is coupled to the camera. To this end, the first illumination 141b includes the first light sources F ₁ and the reflective glass RM.

The first light sources F ₁ irradiate light in a horizontal direction.

The reflective glass RM bends the path of the light irradiated in the horizontal direction by the first light source F ₁ downward by 90 degrees so that the light is vertically irradiated to the upper surface of the accessory SP. The reflective glass RM is provided to secure a viewing angle of the camera 141a. To this end, the reflective glass RM may be provided as a half mirror. Of course, the reflective glass RM may be applied as a total reflection mirror so that the illumination light can be totally reflected, and a slit hole may be formed in the reflective glass RM so that the incident light incident to the camera from the accessory (subject to be inspected) passes. That is, the reflective glass is preferably provided in any form as long as the lighting can irradiate the accessory (subject to be inspected) without obstructing the viewing angle of the camera.

The second illumination (141c), the third illumination (141d) and the fourth illumination (141e) are irradiated with light by a plurality of light sources (F ₂ , F ₃ , F ₄ ) provided in the form of a hat on the inner surface, It is coupled to the camera (141a). Due to this, a plurality of light sources (F ₂ , F ₃ , F ₄ ) irradiate light at an angle greater than 0 degrees and smaller than 90 degrees on the plane of the accessory SP. For example, the second light source (F ₂ ) of the second light source (141c) is irradiated to have an angle of 70 degrees with respect to the plane of the accessory (SP), and the third light source (F ₃ ) of the third light source (141d) is irradiated to have an angle of 60 degrees with respect to the plane of the accessory SP, and the fourth light source F ₄ of the fourth lighting 141e is implemented to irradiate to have an angle of 50 degrees with respect to the plane of the accessory SP can be The reason for illuminating the light with a certain inclination angle with respect to the plane of the accessory (SP) is that the parts constituting the accessory (SP) protrude upward or have grooves formed so that the inspection is performed by the light by the first lighting (141b). This is because there may be areas that are difficult to access. Therefore, depending on the structure of the accessory (SP), the second lighting (141c) to the fourth lighting (141e), the fifth or sixth lighting for irradiating light to the plane of the accessory (SP) at a larger or smaller angle You may need more. That is, in addition to the first illumination 141b for irradiating light vertically on the plane of the object, the camera 140 applied to the inspection equipment 100 according to the present invention emits light at an angle greater than 0 degrees and less than 90 degrees on the plane of the object. It has at least one oblique illumination that irradiates it. In this embodiment, the second light source (F ₂ ), the third light source (F ₃ ), and the fourth light source (F ₄ ) are provided as oblique lighting for irradiating light in a direction inclined to the plane of the accessory (SP).

On the other hand, the first light source (F ₁ ) for irradiating the accessory (SP) in a vertical direction and the second light source (F ₂ ) that can irradiate light of various angles to the accessory, the third light source (F ₃ ) and The fourth light sources (F ₄ ) have light emitting diodes each individually irradiating red light, blue light, green light, and white light. Accordingly, at least one light may be selectively irradiated or a desired type of light may be combined and irradiated. In addition, by irradiating light with various angles, colors and intensities by adjusting the light intensity, any defect of the accessory (SP), which has been difficult to see before, can be inspected more clearly. The reason that the color of the irradiated light can be adjusted in this way is that there are defects that are more clearly revealed in a specific color depending on the defects of the accessory SP. That is, the reliability of the inspection can be improved by irradiating light with a color optimized for detecting defects by controlling the color of the irradiated light according to the type of defect to be inspected. Here, the light of the optimized color can be set by checking the type of light clearly revealed in the defects of each accessory (SP) before inspection, and for the accessory (SP) where repeated inspection is performed, the optimized light type , it can be recycled during inspection.

As above, the first illumination 141b, the second illumination 141c, the third illumination 141d and the fourth illumination 141e are each independently controlled by the control device 160 to select the irradiation angle of the light. In order to irradiate light of various colors, the first light source (F ₁ ), the second light source (F ₂ ), the third light source (F ₃ ), and the light intensity of the fourth light source (F ₄ ) It can be individually controlled by the controller 160 .

For reference, in order to irradiate light without impairing the viewing angle of the camera 141a, a plurality of light sources F ₂ of the second illumination 141c are circles on an imaginary surface IF parallel to the plane of the accessory SP. (RG) is placed in the form. Similarly, the light sources (F ₂ / F ₃ ) of the third light ( 141d ) and the fourth light ( 141e ) have different installation heights and are arranged in the same shape as the first light sources ( F ₁ ).

The first elevator 142 is coupled to the moving plate 147 and lifts the photographing device 141 . Of course, the inspection is performed in a state in which the photographing device 141 is lowered by the first elevator 142 .

A pair of rangefinders 143 are coupled to the photographing device 141 with the mutual photographing device 141 interposed therebetween, and are provided to measure the distance between the planes of the accessory SP. For example, the range finder 143 may detect the distance between the range finder 143 and the plane of the accessory (SP) by detecting the return wave after emitting a radio wave to the plane of the accessory (SP). The distance between the distance measurer 143 and the accessory SP sensed by the distance measurer 143 may be utilized to calculate various results. For example, the thickness in the vertical direction of the accessory SP, the bending of the accessory SP, and the width in the left and right and front and rear directions of the accessory SP can be obtained by the value sensed by the rangefinder 143. have. That is, since the height of the lower surface of the accessory (SP) and the height of the distance measurer 143 are determined, if you know the distance between the distance measurer 143 and the plane of the accessory (SP), you can know the thickness in the vertical direction of the accessory (SP) . In addition, when the distance between the distance meter 143 and the plane of the accessory (SP) is sensed at a plurality of points while moving the range finder 143 in the horizontal direction, it is possible to know whether the accessory (SP) is bent and the width of the accessory (SP). can

A pair of pressure gauges 144 are coupled to the moving plate 147 to be lifted and lowered, and a photographing device 141 is used to sense the elastic force of the spring S that elastically supports the pusher PS of the match plate MP. provided to be spaced apart from each other. At this time, the pressure gauge 144 on the left of the pair of pressure gauges 144 is used to inspect the match plate MP supported by the support device 110 on the left, and the pressure gauge 144 on the right is It is used to inspect the match plate MP supported by the support device 110 on the right side. Each of the pair of pressure gauges 144 includes a pressing member 144a, a pair of gripping members 144b and an operating source 144c as shown in the schematic structural diagram of FIG. 27 .

The pressing member 144a is provided to press the pusher PS downward, and may be detached by being gripped or released by a pair of gripping members 144b. The pressing member 144a has a pressing end 144a-1, an insertion end 144a-2, and a connecting end 144a-3.

The pressing end (144a-1) is a part that presses the pusher (PS) by contacting the lower end of the pusher (PS) with the upper end of the pusher (PS) when descending by the second elevator (146).

The insertion end (144a-2) has a standardized form as a portion to be gripped or released by the pair of gripping members (144b). That is, depending on the shape of the pusher PS, the pressing end 144a-1 of the pressing members 144a may have various shapes, but the insertion end 144a-2 is standardized so that the pressing end 144a-1 of the pressing end 144a-1 is standardized. All pressing members 144a may be held by a pair of holding members 144b even if the shapes are different.

The connecting end (144a-3) is a narrow portion connecting the pressing end (144a-1) and the insertion end (144a-2).

The pair of gripping members 144b grip or release the gripping members 144a. To this end, the pair of gripping members 144b move in the left and right directions that are closer to or farther away from each other by the operation source 144c, so that the distance between the pair of gripping members 144b may be narrowed or widened. In addition, each of the pair of gripping members 144b has gripping grooves GS that are opened in a mutually facing direction on the surfaces facing each other. Of course, the gripping groove GS is standardized in a shape corresponding to the standardized shape of the insertion end. Therefore, when the insertion end 144a-2 is inserted into the insertion groove GS while the distance between both gripping members 144b is narrowed by the operation of the operation source 144c, the pressing member 144a is a pair of gripping members 144b. ), and when the gap between the both holding members 144b is widened, the holding of the pressing member 144a by the pair of holding members 144b is released.

The operation source 144c is provided to move the pair of gripping members 144b toward or away from each other. According to the operation of the operation source 144c, the pair of gripping members 144b grip the pressing member 144a or release the gripping. Of course, depending on the implementation, the operation source 144c may be implemented to move only the gripping member 144b on either side.

The second elevator 146 is coupled to the moving plate 147, and when the pair of gripping members 144b is lowered by elevating the pair of gripping members 144b, the pressing member 144a is a pusher (PS). to press downwards. Of course, when the pressing member 144a presses the pusher PS downward in this way, the supporting plates 116d-1 and 116d-2 support the frame FM of the match plate MP as described above.

The moving plate 147 is moved in the front and rear and left and right directions by a moving device 150 to be described later. The moving plate 150 includes a photographing device 141 , a first elevator 142 , a pair of distance meters 143 , a pair of pressure meters 144 , and a pair of second elevators 145 are coupled. . Therefore, according to the movement of the moving plate 150, the camera 141, the first elevator 142, a pair of distance meters 143, a pair of pressure meters 144, and a pair of second elevators 145 are will move together

<Description of the mobile device>

The moving device 150 is provided to move the inspection device 140 in the front-back direction and the left-right direction. To this end, the moving device is installed on the installation plate IP as shown in FIG. 28 , and includes a left/right mover 151 and a forward/backward mover 152 .

The left-right mover 151 moves the inspection device 140 including the moving plate 150 in the left-right direction.

The forward/backward mover 152 moves the inspection device 140 coupled to the left/right mover 151 in the front/rear direction by moving the left/right mover 151 in the front/rear direction.

Therefore, by moving the inspection device 140 by the operation of the left-right mover 151 and the forward/backward mover 152, the inspection device 140 moves between the inspection points divided in the entire area of the accessory SP while performing the inspection. can do.

<Description of the pedestal>

The pedestal 170 is installed on the mounting plate IP, and the pressing end 144a-1 supports various types of pressing members 144a formed in different sizes. For this purpose, the support 170 has several support grooves SS into which the lower ends of the pressing ends 144a-1 in each of the various types of pressing members 144a are respectively inserted as shown in the side cross-sectional view of FIG. There, the support grooves (SS) are formed in a shape corresponding to the shape of the pressing end (144a-1) in each of the pressing members (144a).

Therefore, when the standard of the pusher (PS) is changed, the left and right mover 151 and the forward/backward mover 152 operate to move and stop the pressure measuring device 144 as necessary above the pedestal 170, and in response to this, the operating source (144c) and the second elevator 146 are operated to put the existing pressing member 144a to which the pressure gauge 144 is already mounted on the pedestal 170, and then a new pressing member 144a is mounted. Accordingly, the pressure gauge 144 can perform an inspection on the match plate MP having the pusher PS of which the standard has been changed.

<Description of the case>

The case 180 accommodates the above-described components therein, and has an upper first exposure window EW ₁ and a lower second exposure window EW ₂ as described above with reference to FIGS. 1 to 3 . .

The manager may supply the test tray TT to the storage device 121 through the second exposure window EW ₂ , but use the test tray TT to the support device 110 through the first exposure window EW ₁ . It can also be supplied directly.

For example, in a special case, if it is necessary to inspect only one or two test trays (TT), supplying the test tray (TT) through the second exposure window (EW ₂ ) causes the operation of the transfer device 130 to follow. It takes more time than processing time. In this case, when the test tray TT is directly supplied to the support device 110 through the first exposure window EW ₁ , the time required for the inspection operation can be reduced.

On the other hand, the match plate MP is considerably heavier than the test tray TT, and two are generally provided in one handler. If the match plate MP is configured to be supplied to the storage device 121 through the second exposure window EW ₂ , the match plate MP is supported by the support device 110 like the storage device 121 or the transfer device 130 . ) should increase the durability and strength of the components used in the process of supplying them. In addition, the cost of production increases and the time required for inspection increases. Therefore, by supplying the heavy and small number of match plates MP to the support device 110 directly through the first exposure window EW ₁ , it is possible to lower the production cost and reduce the time required for the inspection work.

<Description of the opening and closing door> ,

The opening/closing door 190 is provided to open and close the second exposure window EW ₂ .

One side of the opening/closing door 190 is hinged to the case 180 . The opening/closing door 190 has a fixing protrusion 191, a sensing object 192 and a handle 193 on its outer surface as shown in FIG. 30, and a vertical alignment bar on its inner surface as shown in FIG. (194) is provided.

The fixing protrusion 191 is provided to be fixed to the case 180 side when the opening/closing door 190 is opened and has a constricted middle end.

The sensing object 192 is provided to check whether the opening/closing door 190 is properly opened.

The alignment bar 194 is provided to align the test tray TT supplied to the storage device 121 by the administrator. As shown in the schematic diagram of FIG. 32 , the alignment bar 194 pushes the front end of the test tray TT supplied to the storage device 121 rearward when the opening/closing door 190 closes the second exposure window EW ₂ . The test tray TT is moved to a position where the test tray TT can be moved rearward by the moving machine 121d. To this end, the alignment bar 194 is provided to protrude inward.

On the other hand, in correspondence with the fixing protrusion 191 and the sensing object 192 , the case 180 is provided with a fixing unit 181 and a detector 181 as shown in FIG. 30 .

As shown in the schematic diagram of FIG. 33 , the fixture 181 includes a housing 181a, a pair of fixing balls 181b and a pair of elastic members 181c.

The housing 181a has an insertion groove ISS into which the fixing protrusion 181 is inserted, and accommodates the fixing ball 181b and the elastic member 181c.

The pair of fixing balls 181b are elastically supported by the elastic member 181c to slightly protrude toward the insertion groove ISS, thereby elastically pressing the fixing protrusion 191 inserted into the insertion groove ISS from the side.

The pair of elastic members 181c elastically press the pair of fixing balls 181b toward the insertion groove ISS.

The detector 182 detects the sensing target 191 to confirm whether the opening/closing door 190 is properly opened.

Accordingly, when the opening/closing door 190 is opened, the opening/closing door 190 may be fixed in an open state because the fixing protrusion 191 is elastically pressed by the fixing ball 181b while being inserted into the insertion groove ISS.

In addition, in a state in which the fixing protrusion 191 is properly fixed by the fixing ball 181b, the sensor 182 detects the sensing target 1921 to confirm that the opening/closing door 190 is properly opened.

If the detector 182 does not detect the sensing target 192 even though the opening/closing door 190 is opened, it means that the opening/closing door 190 has been improperly opened, so the control device 160 sends a malfunction signal. generate

For reference, even when the opening/closing door 190 is closed, it may be desirable to add a configuration capable of detecting the closed state of the opening/closing door 190 .

Next, the overall operation of the inspection equipment 100 as described above will be schematically described.

1. Settings

(a) The manager sets the standard after inputting the specification for the accessory (SP) using an input device (not shown).

(b) The manager sets the inspection part, the irradiation angle, and the color of the light by using the input device while operating the inspection device 140 in a trial operation.

For example, if you want to inspect whether the latch part, guide hole, or seating groove of the insert in the test tray TT is defective, the latch part is the first inspection part, the guide hole is the second inspection part, and the seating groove is the third part. Set as inspection part.

In addition, the manager sets the optimal light irradiation angle and light color for each inspection part. Here, the setting of the irradiation angle of light may be made by selecting any one of the first to fourth lights 141b to 141e most appropriate for checking whether a specific inspection part is defective. Therefore, when the specific inspection part is to be inspected, the selected specific lights 141b/141c/141d/141e are activated. And the manager sets the color of the light to be irradiated by the specific light. _At this time, the setting for the color _{of the} light is _the light source ( For example, a red light source among a plurality of F ₁ light sources of the first illumination), a light source irradiating blue light (eg, a blue light source among a plurality of F ₁ light sources of the first illumination), A light source irradiating green light (eg, a green light source among a plurality of F ₁ light sources of the first illumination) and a light source irradiating a white light (eg, among a plurality of F ₁ light sources of the first illumination) It can be achieved by adjusting the intensity of the white light source).

For reference, the setting of the irradiation angle and the color of the light is an optimized state in which the administrator can most clearly determine whether there is a defect by looking at the image of the inspection part seen through the screen of the display device (not shown) during the test operation. This can be done while checking.

When the above settings are made, the inspection is performed by the administrator inputting the inspection start command. That is, while the inspection device 140 moves in the horizontal direction from above the accessory SP, the inspection is performed while photographing the entire area on the plane of the accessory SP. At this time, the irradiation angle and the color of light are adjusted as set for the inspection part to be inspected as described above.

2. First exposure window (EW) _One ) when supplying accessories (SP) through

When the number of accessories SP to be inspected is small, the manager directly supplies the accessories SP to the support device 110 through the first exposure window EW ₁ , and then operates the inspection equipment 100 . Accordingly, the control device 160 controls the moving device 150 and the inspection device 140 to perform the primary inspection of the accessory (SP).

And when the inspection on one side of the accessory (SP) is finished, the manager rotates the accessory (SP) by 180 degrees, and then operates the inspection equipment 400 to perform a secondary inspection on the accessory (SP) . Here, when the accessory SP is the test tray TT, it may be implemented to rotate the test tray TT by 180 degrees by the transfer device 130 .

After the second inspection of the accessory (SP) is finished, the manager collects the accessory (SP) through the first exposure window (EW ₁ ).

3. Second exposure window (EW) ₂ ) when supplying a test tray (TT) through

The manager first operates the inspection equipment 100 after opening and fixing the opening/closing door 190 . At this time, when the opening/closing door 190 is improperly opened, the inspection equipment 100 is not operated.

When the opening/closing door 190 is properly opened, the forward/backward device 122 moves the storage device 121 forward so that the operator can conveniently supply the test tray TT.

When the storage device 121 is moved forward, the manager supplies the test trays TT to the storage device 121 .

When all the test trays TT are supplied to the storage device 121 , the manager closes the opening/closing door 190 . At this time, since the alignment bar 194 of the opening/closing door 190 pushes the front end of the test tray TT rearward, the test tray TT is moved to a position where it can be moved rearward by the ice moving machine 121d. are sorted by

The manager operates the inspection equipment 100 secondarily. If the configuration for confirming the closing of the opening/closing door 190 is provided, the inspection equipment 100 is operated secondarily only when the opening/closing door 190 is properly closed. According to the secondary operation, the ice moving machine 121d operates to move the test trays TT rearward, and on the other hand, the forward/backward device 122 operates to move the storage device 121 rearward. Accordingly, the test tray TT accommodated in the storage device 121 is moved to a position where it can be gripped by the transfer device 130 .

The above moving machine 121d, the forward/backward device 122 and the alignment bar 194 may all be omitted or optionally one or more may be configured according to the intention of the designer. And the above devices may be coordinated with each other for more efficient operation.

Then, the transfer device 130 operates to move the test tray TT in the storage device 121 to the support device 110 above the storage device 121 , and the inspection device 140 and the moving device 150 . ) operates to inspect the upper surface of the test tray (TT).

When the inspection of the upper surface of the test tray TT is finished, the transfer device 130 operates to rotate the test tray TT by 180 degrees, and then re-supply the test tray TT to the support device 110 . Accordingly, the inspection device 140 inspects the lower surface of the test tray TT facing upward.

After the inspection of the lower surface of the test tray TT is finished, the transfer device 130 operates to rotate the test tray TT by 180 degrees to return it to its original state, and then move it to the storage device 121 .

In addition, the transfer device 130 continuously performs inspection of the other test trays TT by supplying the other test trays TT to the support device 110 .

On the other hand, when the inspection of all the test trays TT in the storage device 121 is finished, and all the test trays TT for which the inspection is completed are accommodated in the storage device 121 , the manager can open and close the door 190 . and then operate the inspection equipment 100 tertiarily. Accordingly, the ice machine 121d operates to move the test tray TT forward, and the forward/backward device 122 operates to move the storage device 121 forward so as to be adjacent to the second exposure window EW ₂ . do. In this way, the manager collects the test tray TT in the storage device 121 in a state that the test tray TT and the storage device 121 are moved forward.

As described above, the detailed description of the present invention has been made by the embodiments with reference to the accompanying drawings, but since the above-described embodiments have only been described with preferred examples of the present invention, the present invention is limited to the above-described embodiments only. It should not be construed as being limited, and the scope of the present invention should be understood as the following claims and their equivalents.

141 : camera
141a : camera
141b; first light
F ₁ : first light source RM : reflective glass
141c: second light
F ₂ : second light source
141d: third light
F ₃ : third light source
141e: fourth light
F ₄ : fourth light source

Claims (8)

A camera for photographing an inspection object in a vertically downward state in a state vertically upward to the upper surface of the inspection object to be inspected;
a vertical illumination coupled to the camera, capable of moving together with the camera, and irradiating light at an irradiation angle perpendicular to the upper surface of the object to be inspected; and
a plurality of oblique lights coupled to the camera and capable of moving together with the camera, irradiating light at an irradiation angle within a range of greater than 0 degrees and less than 90 degrees with respect to the upper surface of the object to be inspected; including,
The plurality of oblique lights have different irradiation angles,
The vertical lighting and the plurality of inclined lighting are each independently controlled by a control device
A camera for inspection of goods. The method of claim 1,
The vertical illumination has a plurality of light sources,
At least one of the plurality of light sources irradiates light of a color different from that of the other light sources.
A camera for inspection of goods. The method of claim 1,
Each of the plurality of inclined lights has a plurality of light sources,
The plurality of light sources are arranged in the form of a circle on a virtual surface parallel to the upper surface of the object to be inspected.
At least one of the plurality of light sources irradiates light of a color different from that of the other light sources.
A camera for inspection of goods. The method of claim 1,
An illuminator for irradiating light from the lower side to the upper side of the object to be inspected; further comprising
A camera for inspection of goods. 5. The method of claim 4,
a pair of support plates provided to be able to move up and down with the illuminator interposed therebetween, and to support the frame in which the object to be inspected is installed at both sides of the object when it rises; and
elevating members for elevating the pair of support plates; further comprising
A camera for inspection of goods. 5. The method of claim 4,
a mover capable of positioning the illuminator below the object to be inspected by moving the illuminator in a horizontal direction; further comprising,
The vertical light and the plurality of inclined lights are provided to be movable in the horizontal direction,
The movement of the illuminator by the mover is linked to the vertical lighting and a plurality of inclined lighting
A camera for inspection of goods. 5. The method of claim 4,
The illuminator is provided as a backlight unit, and is used when the inspection by the vertical illumination and the plurality of inclined illumination is incomplete.
A camera for inspection of goods. 8. The method of claim 7,
The inspection object is a test tray on which semiconductor elements are loaded or a match plate for pressing semiconductor elements loaded on the test tray toward the tester.
A camera for inspection of goods.

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