KR102126358B1 - jig apparatus for inspection - Google Patents

Abstract

The present invention provides a jig device for inspection which can increase inspection precision and inspection reliability which includes: a compatible base portion disposed in a front portion and selectively arranged opposite to a lower portion of a supply unit which reciprocates along a width direction so as to sequentially supply a plurality of inspection objects provided with flat plates having a square cross section standardized according to sizes thereof, wherein a plurality of alignment holes are formed vertically through the central portion of the compatible base portion at a position where an outer edge of each inspection object is seated and a plurality of vacuum suction holes are formed vertically through the compatible base portion while being spaced apart from the alignment holes such that a lower surface of an edge of each inspection object supplied by the supply unit is selectively seated thereon through vacuum adsorption; an inspection photographing unit disposed in a rear portion spaced from the supply unit in a front-rear direction, selectively arranged opposite to an upper portion of the compatible base portion, and including an inspection camera to photograph the inspection object fixed onto the upper surface of the compatible base portion through vacuum adsorption; a transfer unit disposed along the front-rear direction below the compatible base portion such that the compatible base portion is rolled in the front-rear direction to be selectively and oppositely disposed under one of the supply unit and the inspection photographing, wherein the transfer unit is rail-connected to the compatible base portion; and a control unit for receiving an inspection object image for the inspection object photographed by the inspection photographing unit, comparing and inspecting a matching rate between the inspection object image and a pre-stored master image, and controlling the driving of the supply unit and the transfer unit.

Description

Jig apparatus for inspection

The present invention relates to an inspection jig device, and more particularly, to an inspection jig device for improving inspection precision and inspection reliability.

In general, a jig device for inspecting an object to be inspected is used in a semiconductor inspection process manufactured including a polyimide (PI) thin film.

Here, a test object provided as a polyimide thin film is provided with a plurality of coils, and each of the coils is spaced apart from each other along the longitudinal and transverse directions. At this time, a plurality of holes are formed through each of the coils.

In addition, in the conventional jig device, while the rim of the inspected object is seated on the table, it is pressed and pressed by a separately provided gripper, and at the same time, the inspection of the inspected object is performed as the table moves in the front-rear direction and passes through the lower portion of the inspection device. .

At this time, in the conventional jig device, the inspection was carried out in a state that is simply locked and pressed by the gripper without a means for firmly fixing the object to be inspected.

However, the conventional jig device has a serious problem in that a plurality of scratches are generated on the surface of an object to be inspected because the table is moved back and forth several times and there is no means for firmly fixing the object to be inspected.

To solve this, the table may be provided with a clamping means for clamping the outer rim of the inspected object. However, there is a serious problem in that a part of the upper surface of the object to be inspected is shielded from the inspection device by the clamping means to generate an inspection exclusion area.

Moreover, when clamping and pressing the outer rim of the test object seated on the table by the clamping means, there was a serious problem in that the entire test object was slightly lifted off from the seating surface of the table. There was a problem that could not be maintained horizontally.

Korean Utility Model No. 20-0460791

In order to solve the above problems, the present invention is to solve the problem of providing an inspection jig device for improving inspection precision and inspection reliability.

In order to solve the above problems, the present invention is disposed on the front portion and the flat plate of the square cross section is standardized for different sizes and selectively provided at the lower portion of the supply unit that is reciprocated along the width direction to sequentially supply a plurality of inspected objects. Arranged to face each other, a plurality of alignment holes are formed in the vertical direction at the position where the outer rim of each inspected object is seated in the center, and the lower surface of the rim of each inspected object supplied by the supply unit is selectively seated to be vacuum adsorbed. A compatible base part spaced apart from the alignment hole and having a plurality of vacuum suction holes penetrating vertically; An inspection image including an inspection camera which is disposed on the rear part spaced apart from the supply part in the front-rear direction and is selectively opposed to the upper part of the compatible base part and is vacuum-suctioned on an upper surface of the compatible base part to capture the fixed test object. part; A transfer part disposed along the front-rear direction in the lower part of the compatible base part to be rail-connected to the compatible base part so that the compatible base part is clouded in the front-rear direction and selectively disposed opposite to any one of the supply part and the inspection imaging part; And a control unit receiving and receiving an inspection target image for the inspected object imaged by the inspection imaging unit, comparing and inspecting a matching rate between the inspection target image and a pre-stored master image, and driving and controlling the supply unit and the transport unit. Provide a jig device.

Through the above solution, the present invention provides the following effects.

First, the lower edge of the object under test is vacuum-adsorbed to the vacuum suction hole of the compatible base, and at the same time, the entire upper surface is simultaneously and evenly pressed down by the flat light-transmitting glass of transparent material provided over the area of the compatible base. Even when the top surface of the object is completely exposed, the flatness is uniformly maintained even when reciprocating multiple times in the front-rear direction, so that inspection precision and inspection reliability can be remarkably improved.

Second, the transparent glass is provided with a reflectance of a predetermined range so that the light emitted from the reflective lighting unit is reflected by the transparent glass's transparent glass and the amount of incident light reaching the inspection camera is adjusted to a predetermined value or less, thereby minimizing scattering due to the media characteristics. Therefore, the sharpness of the image to be inspected obtained for the inspected object can be significantly improved.

Third, when one of the test objects of various sizes is seated on the upper surface of the compatible base part, one side is hung on the reference catching part that is elevated and exposed to the upper side of the reference alignment hole, and the pressurized moving engagement part is elevating and exposed to the upper side of the plurality of opposing alignment holes. Since the other side is press-aligned, each inspection target image can be obtained uniformly even when a large number of sequential tests are performed on a plurality of objects.

Fourth, a plurality of opposing alignment holes are spaced apart from the reference alignment holes at intervals corresponding to the width of each inspected object so that the inspected objects of various sizes are compatible with one compatible base part, and the lower surfaces on both sides of the width direction of each inspected object are the first. Since the vacuum suction hole and the plurality of second vacuum suction holes are disposed opposite to each other, compatibility may be significantly improved.

1 is an exemplary view showing an object to be disposed on a jig device for inspection according to a preferred embodiment of the present invention.
Figure 2 is a usage example showing a jig device for inspection according to an embodiment of the present invention.
Figure 3 is a perspective view showing a supply unit in the jig apparatus for inspection according to an embodiment of the present invention.
Figure 4 is a cross-sectional view of the compatible base portion and the glass cover portion from the side in a jig apparatus for inspection according to an embodiment of the present invention.
5 and 6 is a top view showing the state of use of the compatible base portion and the glass cover portion in the jig apparatus for inspection according to an embodiment of the present invention.
7 is a graph showing the reflectance according to the wavelength of the transparent glass in the jig apparatus for inspection according to an embodiment of the present invention.
8 is a perspective view showing a suction rotation unit in a jig apparatus for inspection according to an embodiment of the present invention.
9 is a block diagram showing a jig device for inspection according to an embodiment of the present invention.

Hereinafter, a jig apparatus for inspection according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is an exemplary view showing an inspected object disposed in an inspection jig device according to a preferred embodiment of the present invention.

Here, a plurality of coils 1a are provided in the inspected object 1 provided as a polyimide thin film, and each of the coils 1a is spaced apart from each other along the longitudinal and transverse directions. At this time, a plurality of holes 1b are formed through each of the coils 1a. Such an inspected object 1 is applied to a thin film PI product, and can be manufactured including copper foil and an epoxy insulating material, and classified into QUAD (1A in FIG. 5), 9BAR (1B in FIG. 5) according to each size. Can. For example, a QUAD (1A in FIG. 5) product may be provided with a width of 192.5 mm±1 mm, a length of 231 mm or 241 mm, a height of 0.1 to 1.0 mm, and a weight of 1,000 g or less, and a 9BAR (FIG. 5 1B) product has a width of 117 mm±. 1mm, length 145.5mm±1mm, height 0.1~1.0mm, weight 1,000g or less can be provided.

On the other hand, Figure 2 is an exemplary view showing a jig device for inspection according to an embodiment of the present invention, Figure 3 is a perspective view showing a supply unit in an inspection jig device according to an embodiment of the present invention, Figure 4 is A cross-sectional view of a compatible base portion and a glass cover portion in a side view in a jig apparatus for inspection according to an embodiment of the present invention, and FIGS. 5 and 6 show a compatible base portion in a jig apparatus for inspection according to an embodiment of the present invention. Top view showing the state of use of the glass cover portion, Figure 7 is a graph showing the reflectance according to the wavelength of the light transmitting glass in the inspection jig apparatus according to an embodiment of the present invention, Figure 8 is an embodiment of the present invention It is a perspective view showing a suction rotation unit in the inspection jig device according to, Figure 9 is a block diagram showing a jig device for inspection according to an embodiment of the present invention.

2 to 9, the jig apparatus 100 for inspection according to an embodiment of the present invention includes a supply unit 10, a compatible base unit 20, an inspection imaging unit 30, a transport unit 40, And includes a control unit 50.

Here, the jig device 100 for inspection is a device provided to support and fix the inspected object 1 to be inspected. At this time, it is preferable to understand that the inspected object 1 is used as a concept encompassing QUAD(1A) and 9BAR(1B) applied to a thin film PI product. As described above, since inspection can be performed on the inspected object 1 provided in various sizes and types through one inspection jig device 100, compatibility may be significantly improved.

Meanwhile, referring to FIGS. 2 to 3, the supply unit 10 is provided to sequentially supply a plurality of the inspected objects 1 to the compatible base unit 20. At this time, it is preferable that the supply part 10 is disposed on the front part of the jig device 100 for inspection and selectively reciprocated along the width direction.

Here, the supply unit 10 is a supply transfer means and a storage unit provided to be reciprocated in the width direction between the storage unit and the compatible base unit 20 in which a plurality of the inspected objects 1 are stacked and arranged, and the storage unit And a lifting means provided with a cylinder or the like to selectively elevate when placed opposite to the upper portion of the compatible base portion 20, and suction fixing means provided to adsorb the upper surface of the edge of the inspected object 1 This is preferred. The supply unit 10 is preferably controlled by the control unit 50.

In detail, the control unit 50 transmits a first supply control signal to the elevating means so that the supply unit 10 descends from the upper portion of the storage unit, and second to the suction fixing means so that the inspected object 1 is adsorbed. The supply control signal can be transmitted. Subsequently, the control unit 50 may transmit a third supply control signal to the elevating means so that the supply unit 10 is raised.

In addition, the control unit 50 is moved so as to be moved in the width direction in the state where the test object 1 is adsorbed to the supply unit 10 so that the supply unit 10 is disposed opposite to the upper portion of the compatible base unit 20. The fourth supply control signal can be transmitted to the supply transfer means. At this time, a state in which the inspected object 1 is fixed to the supply part 10 by the suction fixing means is maintained.

In addition, the control unit 50 transmits a fifth supply control signal to the elevating means so that the supply unit 10 descends from the upper portion of the compatible base unit 20, and the inspected object 1 is the supply unit 10 ), the sixth supply control signal can be transmitted to the suction fixing means so as to be released from suction and seated on the upper portion of the compatible base portion 20. Subsequently, the control unit 50 transmits a seventh supply control signal to the elevating means so that the supply unit 10 is raised, and the supply unit 10 is moved in the width direction so as to be disposed opposite to the upper portion of the storage unit. The eighth supply control signal can be transmitted to the transfer means.

A plurality of such supply parts 10 are provided so that each supply part 10 is moved in the width direction reciprocating motion and vertically moving up and down within a different width reciprocating section, and the test object 1 is plural through the above-described supplying process. When the predetermined time elapses after supplying to any one of the provided compatible base parts 20, the inspected object 1, which has been inspected, is discharged from the compatible base part 20 or the suction rotating part 70 to be described later. It can be controlled to discharge to the negative.

Accordingly, since the inspected object 1 is sequentially and automatically supplied from the storage unit to the compatible base unit 20 through the supply unit 10, the production speed is improved, productivity and economy are improved, and the process is automated. Work convenience can be significantly improved.

On the other hand, referring to Figures 4 to 6, the compatible base portion 20 is disposed on the front portion of the jig apparatus 100 for inspection, is selectively moved to the rear by the transfer unit 40, the inspection imaging It is preferable that it is selectively opposed to the lower portion of the portion (30). In addition, the compatible base portion 20 is preferably disposed opposite to the lower portion of the supply portion 10 that is reciprocated in the width direction.

In addition, it is preferable that a plurality of alignment holes 21 are formed to penetrate through the vertical direction at the center of the compatible base portion 20 at a position where the outer rim of each inspected object 1 is seated.

In detail, the alignment hole 21 is preferably disposed on one side in the width direction of the compatible base part 20 and includes a reference alignment hole 21a extending in the front-rear direction and penetrating in the vertical direction. At this time, the reference alignment hole 21a is preferably set so that the length in the front-rear direction exceeds the width.

Here, the jig apparatus 100 for inspection is disposed below the reference alignment hole 21a, and is selectively lifted so that one side in the width direction of each of the inspected objects 1 is caught, and the upper side of the reference alignment hole 21a. It is preferable to further include a reference catching portion 22 exposed as. At this time, it is preferable that the reference catching part 22 is controlled by the control part 50.

In addition, the reference engaging portion 22 is provided with a cross-section of the outer surface contour corresponding to the inner surface contour of the reference alignment hole 21a, but extends in the vertical direction, and provided so that the reference engaging portion 22 is driven upward and downward. However, it is preferable that power is connected to the first lifting and aligning means controlled by the control unit 50. The first lifting and aligning means may be provided as a motor, but is not limited thereto.

On the other hand, the alignment holes 21 are disposed on the other side of the compatible base portion 20, but are spaced apart from each other by a distance corresponding to the width of each inspected object 1 from the reference alignment holes 21a and the compatible base It is preferable to include a plurality of opposing alignment holes 21b and 21c extending in the width direction of the portion 20 and penetrating in the vertical direction. At this time, it is preferable that the length of each of the opposing alignment holes 21b and 21c is set to be less than the width.

Here, the opposing alignment holes 21b and 21c include first opposing alignment holes 21b which are disposed on the other outer periphery of the compatible base portion 20 and are spaced apart from each other at intervals in the front-rear direction. desirable.

In addition, the opposing alignment holes 21b and 21c are arranged between the reference alignment hole 21a and the first opposing alignment hole 21b, but are formed in a plurality of positions, and the second opposing alignment spaced apart from each other at an interval between the front and rear directions. It is preferred to include the balls 21c. At this time, in the exemplary embodiment of the present invention, the case where the first opposing alignment hole 21b and the second opposing alignment hole 21c are respectively formed in three places is illustrated and described.

In detail, the interval between the first counter-alignment hole 21b disposed on the front side of the compatible base portion 20 and the first counter-alignment hole 21b disposed on the rear side is QUAD ( It is preferably set to correspond to the length in the front-rear direction of 1A). In addition, the widthwise inner end of each of the first facing alignment holes 21b is disposed to be selectively opposed to the lower portion of the QUAD 1A among the inspected objects 1, and the widthwise outer end thereof is the inspected object 1 It is preferable that it is set to be disposed to a position exposed to the outside from the outer rim of the QUAD 1A.

In addition, the interval between the second counter-alignment hole 21c disposed on the front side of the compatible base portion 20 and the second counter-alignment hole 21c disposed on the rear side is 9BAR (of the inspected object 1). It is preferably set to correspond to the length in the front-rear direction of 1B). In addition, the widthwise inner end of each of the second opposing alignment holes 21c is arranged to be selectively opposed to the lower portion of 9BAR (1B) of the inspected object 1, and the widthwise outer end is the inspected object 1 It is preferable to be set to be disposed to a position exposed to the outside from the outer border of the 9BAR (1B).

Here, the jig apparatus 100 for inspection is disposed below each of the counter-alignment holes 21b and 21c, and is selectively elevated and exposed to the upper side of each of the counter-alignment holes 21b and 21c, and then the each test object It is preferable to further include the pressing movement catching portions 23a and 23b which are moved in one direction of the compatible base portion 20 to press the other side in the width direction of (1). At this time, it is preferable that the pressing movement catching parts 23a and 23b are controlled by the control part 50.

In addition, the pressing movement catching portion (23a, 23b) is a plurality of first pressing movement catching portion (23a) disposed under each of the first opposing alignment holes (21b), and each of the second opposing alignment holes (21c) It is preferable to include a plurality of second pressing movement catching portion (23b) disposed in the lower portion. At this time, in the embodiment of the present invention, each of the first pressing movement catching part 23a and each of the second pressing movement catching parts 23b are provided with three examples, respectively.

Then, each of the pressing movement catching portions 23a, 23b has a width less than the width of each of the opposing alignment holes 21b, 21c so as to be selectively moved along the width direction of each of the opposing alignment holes 21b, 21c. It is provided in a cross-section but extends in the up-down direction, and is provided so that the press-moving and moving parts 23a and 23b are driven upward and downward, and is preferably connected to the second lifting and aligning means controlled by the control unit 50. The second lifting and aligning means may be provided as a motor, but is not limited thereto.

In addition, each of the pressing movement catching portions 23a and 23b may be formed with hooks extending from the top to one side in the width direction of the compatible base portion 20, respectively. Moreover, the jig device for inspection 100 may further include an object inspection sensor (not shown) for determining the type and size of the object 1 to be seated on the upper surface of the compatible base 20. .

Accordingly, when the object to be inspected is seated on the upper surface of the compatible base part 20 by the supply part 10, the control part 50 elevates and controls the reference catching part 22 while discriminating the object to be inspected. Elevated control of any one set of the first pressing movement engaging portion 23a and the second pressing movement engaging portion 23b corresponding to the type and size of the inspected object 1 determined by a sensor (not shown) can do.

At this time, any one of the first pressing movement catching portion 23a and the second pressing movement catching portion 23b is provided with each of the opposing alignment holes 21b and 21c from outside the outer rim of the inspected object 1 After being exposed to the upper side of the can be pressed to the outer rim of the inspected object (1) as it is moved to one side in the width direction of the compatible base (20).

That is, one side in the width direction of the inspected object 1 is caught by the reference catching part 22 and at the same time, the other side in the width direction of the inspected object 1 is the first pressing movement catching part 23a and the second pressing force. It may be pressurized by any one set of the movement catching portion (23b).

Through this, in the state that the inspected object 1 is accurately aligned between any one set of the reference engaging portion 22 and the first pressing moving engaging portion 23a and the second pressing moving engaging portion 23b. Inspection can be performed. At this time, any one set of the reference engagement portion 22, the first pressing movement engaging portion 23a, and the second pressing movement engaging portion 23b exposed to the upper side is aligned with the inspected object 1 It is preferable that the control so as to descend to the lower side of each of the alignment holes (21). Then, the lower surface of the aligned inspection object 1 is vacuum adsorbed and the upper surface is pressed downward by the translucent glass 61 to be described later. Detailed description will be described later.

Therefore, when the inspected object 1 is seated on the upper surface of the compatible base portion 20, the reference catching portion 22 is elevated and exposed to the upper side of the reference alignment hole 21a on one side of the compatible base portion 20. One side is hung, and the pressurization movement is lifted and exposed upwardly from the reference alignment holes 21a to a plurality of opposing alignment holes 21b and 21c spaced apart at intervals corresponding to the width of each inspected object 1 Compatibility is improved because the other side is pressed and aligned in the width direction to the parts 23a, 23b, and even when sequentially inspecting a large number of objects to be inspected, each inspection target image is obtained uniformly, significantly improving inspection efficiency and inspection reliability. Can be.

On the other hand, referring to Figures 5 to 6, the alignment base (20) so that the rim of each of the inspected objects (1) supplied by the supply unit 10 is selectively seated on the compatible base portion 20 to be vacuum adsorbed ( 21) is spaced apart and it is preferable that a plurality of vacuum suction holes 24 are formed through in the vertical direction.

In detail, the vacuum suction hole 24 is located at a position spaced adjacent to the other side in the width direction of the compatible base portion 20 from the reference alignment hole 21a so as to face one lower surface in the width direction of the inspected object 1. It is preferable to include a first vacuum suction hole 24a formed through a plurality of places in the vertical direction along the front-rear direction. At this time, it is preferable that one lower surface in the width direction of the inspected object 1 is selectively opposed to the first vacuum suction hole 24a.

Here, the first vacuum suction hole 24a is spaced apart from each other in the zigzag shape of the'W' along the front-rear direction to the compatible base portion 20, and is formed through each in the vertical direction, but the lower portions are preferably in communication with each other. . In addition, the entire length of the first vacuum suction hole 24a is preferably set to correspond to the length of the front and rear directions of the QUAD 1A among the inspected objects 1.

In addition, the vacuum suction hole 24 is spaced adjacent to one side in the width direction of the compatible base portion 20 from each of the opposite alignment holes 21b and 21c so as to face the lower surface in the width direction of the inspected object 1 It is preferable to include the second vacuum suction holes 24b and 24c which are formed through a plurality of places in the vertical direction along the front-rear direction at the position. Here, the second vacuum suction holes (24b, 24c) are spaced apart from each other in the zigzag form of'W' along the front-rear direction to the compatible base portion 20, and are formed through each in the vertical direction, but each lower part is in communication with each other. desirable.

In addition, the interval between the first vacuum suction hole 24a and the second vacuum suction hole 24b, 24c is preferably set to be less than the width of each inspected object 1. At this time, one side in the width direction of the inspected object 1 is selectively opposite to the first vacuum suction hole 24a, and the other side in the width direction of the inspected object 1 is the second vacuum suction hole 24b ,24c).

Here, any one set of the second vacuum suction holes 24b and 24c is arranged in a front-rear direction at a position spaced apart from each of the first counter-alignment holes 21b to one side in the width direction of the compatible base portion 20. Accordingly, it is formed through a plurality of places in the vertical direction, and corresponds to the length in the front-rear direction of the QUAD 1A among the inspected objects 1 so that the other side of the width direction of the QUAD 1A among the inspected objects 1 is selectively opposed. It is preferred that the overall length is set.

In addition, the other set of the second vacuum suction holes 24b, 24c is arranged in the front-rear direction at a position spaced apart from each of the second counter-alignment holes 21c to one side in the width direction of the compatible base portion 20. Accordingly, it is formed through a plurality of places in the vertical direction, and corresponds to the lengths in the front-rear direction of 9BAR (1B) of the test object (1) so that the lower surface of the other side of the 9BAR (1B) of the test object (1) is selectively opposite. It is preferred that the overall length is set.

Through this, as the lower surfaces of both sides of the width direction of the inspected object 1 seated on the upper surface of the compatible base portion 20 are simultaneously vacuum adsorbed to each of the vacuum suction holes 24, the inspected object 1 is substantially In this way, inspection can be performed in a state that is aligned in parallel with the compatible base portion 20, thereby improving inspection precision.

In addition, a vacuum adsorption flow path (not shown) communicating with each of the vacuum suction holes 24 so as to vacuum adsorb the inspected object 1 is preferably communicated along the front-rear direction inside the compatible base portion 20. . At this time, the inlet end of the vacuum suction passage (not shown) may be in communication with each of the vacuum suction holes 24.

In addition, the inspection jig apparatus 100 further includes a vacuum adsorption means (not shown) controlled by the control unit 50 to provide a vacuum adsorption force by being connected to a discharge end of the vacuum adsorption flow path (not shown). Preferably. At this time, the vacuum adsorption means (not shown) is preferably connected to the control circuit 50 is controlled. The vacuum suction means (not shown) may be provided as a vacuum suction pump, but is not limited thereto.

Here, a connection flow path (not shown) in the form of a pipe is connected to the discharge end of the vacuum suction flow path (not shown), wherein the connection flow path (not shown) is the discharge end of the vacuum suction flow path (not shown) and the vacuum suction means It is preferably provided to mediate the connection between (not shown).

Through this, when the vacuum suction means (not shown) is driven by the control unit 50, a flow direction of air is generated from the inlet end of each vacuum suction channel (not shown) to the discharge end side. Accordingly, the lower surfaces of both edges in the width direction of the inspected object 1 may be vacuum-suctioned and fixed to the vacuum suction hole 24.

On the other hand, referring to Figures 4 to 6, the inspection jig device 100 is a glass cover portion that is selectively disposed between the upper portion of the compatible base portion 20 and the lower portion of the inspection imaging unit 30 ( 60).

Here, the glass cover portion 60 is selectively disposed between the upper portion of the compatible base portion 20 and the lower portion of the inspection imaging unit 30, the entire upper surface of the test object 1 is uniformly uniform at the same time It is preferable that the upper and lower surfaces include a light-transmitting glass 61 provided as a flat plate so as to selectively and simultaneously contact the entire surface of the inspected object 1 by pressing downward.

In addition, the transparent glass 61 is reflected by the light emitted from the reflective lighting unit 32 provided in the inspection imaging unit 30, the amount of incident light reaching the inspection camera 31 of the inspection imaging unit 30 It is preferably provided with a transparent material having a reflectance in a preset range so as to be adjusted below a preset value.

At this time, the inspection camera 31 and the reflective lighting unit 32 are selectively disposed opposite to the upper portion of the translucent glass 61, and the inspected object 1 disposed on the upper surface of the compatible base unit 20 is It may be selectively opposed to the lower portion of the transparent glass (61).

That is, after the light emitted from the reflective lighting unit 32 is transmitted to the transparent glass 61 and reaches the object 1 to be reflected, the reflected light is transmitted again to the transparent glass 61 It may be incident on the inspection camera 31.

On the other hand, referring to Figure 7, the transparent glass 61 is the light emitted from the reflective lighting unit 32 does not reach the object to be inspected (1) is reflected from the transparent glass 61, the inspection camera 31 It is preferably provided with a transparent material having a reflectance in a predetermined range so that the amount of incident light reaching) is adjusted to a predetermined value or less.

Here, it is most preferable that the transparent glass 61 is coated with an anti-reflective glass material having a lower reflectivity than an ordinary glass material so as to have the above-described reflectivity, or is integrally manufactured and provided.

At this time, the reflectance of the transmissive glass 61 may be set to a range of 0.03% to 0.50% at a wavelength of 435 nm to 655 nm, most preferably a range of 0.25% to 0.30% at a wavelength of 435 nm to 655 nm. .

Here, when the reflectance of the translucent glass exceeds 0.50%, the light emitted from the reflective illumination unit 32 is scattered by a medium when the translucent glass is transmitted, and thus the inspection target image obtained by the inspection imaging unit 30 May be distorted. On the other hand, if the reflectance of the translucent glass is less than 0.03%, the manufacturing cost of the translucent glass is rapidly increased, and there is a possibility that the economic efficiency is significantly lowered.

Therefore, the reflectance of the transmissive glass 61 is set to a range of 0.03% to 0.50% at a wavelength of 435 nm to 655 nm, most preferably set to a range of 0.25% to 0.30%, and at the same time improving the economic efficiency and the inspection imaging unit 30 The accuracy and reliability of the image to be inspected can be significantly improved.

Through this, the light emitted from the reflective illumination unit 32 provided in the inspection imaging unit 30 is reflected from the transparent glass 61 and the amount of incident light reaching the inspection camera 31 is adjusted to a predetermined value or less. As possible, since the transparent glass 61 is provided with a transparent material having a reflectance in a predetermined range, scattering due to a medium characteristic is minimized, so that the sharpness of the inspection target image obtained with respect to the inspected object 1 can be remarkably improved.

Meanwhile, referring to FIGS. 4 to 6, the glass cover part 60 preferably includes the translucent glass 61, the outer frame 62, the driving rail part 63, and the pressure lifting means 64. Do.

In detail, the transparent glass 61 is provided above the area of the compatible base portion 20, is moved in the front-rear direction to cover the upper portion of the compatible base portion 20 to the upper portion of the compatible base portion 20 It is preferred to be opposingly arranged. At this time, when the transparent glass 61 is disposed opposite to the upper portion of the compatible base portion 20, it is preferable that the outer edge of the compatible base portion 20 is disposed inside the outer edge of the transparent glass 61.

Further, the outer frame 62 is disposed surrounding the outer rim of the translucent glass 61, but is preferably provided with a diameter exceeding the diameters of the forward and backward directions and the width direction of the compatible base portion 20, respectively. At this time, the outer frame 62 is preferably provided with a non-transparent material such as synthetic resin or metal.

In addition, the drive rail portion 63 is connected to the outer side in the width direction of the outer frame 62, the translucent glass 61 is the upper portion of the compatible base portion 20 and the front outer side of the compatible base portion 20 It is preferable that it is controlled by the control unit 50 to move the cloud back and forth in either direction. At this time, it is preferable that the drive rail portion 63 is driven and controlled independently of the transfer portion 40.

Through this, after the test object 1 is seated on the upper surface of the compatible base portion 20 by the supply unit 10, the transparent glass 61 is compatible with the front from the front outside of the compatible base portion 20. It may be moved backward to the upper portion of the base portion 20. In addition, after the inspection of the inspected object 1 is performed, the translucent glass 61 may be moved forward from the upper portion of the compatible base portion 20 to the front outside of the compatible base portion 20.

And, the pressure lifting means 64 is connected to the lower portion of the outer frame 62, and when the translucent glass 61 is placed opposite to the upper portion of the compatible base portion 20, the entire upper surface of the inspected object 1 It is preferable that the controller 50 is selectively lowered to be in contact with the surface. At this time, the pressure lifting means 64 may include a hydraulic cylinder or a pneumatic cylinder disposed in the vertical direction under the outer frame 62, but is not limited thereto.

Here, the pressure lifting means 64 may further include a pressure regulator (not shown) provided to measure the pressing force when the transparent glass 61 presses the object 1 downward. At this time, the pressure regulator (not shown) may be provided as a pressure sensing sensor disposed under the light-transmitting glass 61 or the outer frame 62, but is not limited to the configuration that can measure the pressing force. . Accordingly, the pressure applied to the control unit 50 by the pressure regulator (not shown) to measure the pressure through which the translucent glass 61 presses the inspected object 1 is not damaged. The pressure lifting means 64 may be controlled to be maintained in a set range.

Therefore, the outer rim of the lower surface of the inspected object 1 is vacuum-adsorbed to the vacuum suction hole 24 of the compatible base portion 20, and the entire upper surface of the inspected object 1 is made of a transparent light-transmitting glass 61. It is simultaneously and uniformly pressed down the surface contact. Therefore, even when the inspection is performed while the upper surface of the inspected object 1 is completely exposed to the inspected imaging part 30, the inspected object 1 is moved even when it is moved back and forth multiple times by the transfer part 40 for inspection. By providing a synergistic effect in which the flatness of the substrate is substantially parallel and uniformly fixed to the compatible base portion 20, inspection precision and inspection reliability can be significantly improved.

At this time, the jig apparatus 100 for inspection may further include a movable plate portion in which the compatible base portion 20 is disposed on the rear upper portion and the translucent glass 61 is selectively opposed to the upper portion. At this time, the movable plate portion is connected to the compatible base portion 20 on the rear upper portion, the lower portion is rail-connected to the transfer portion 40, the compatible base portion 20 and the glass cover portion 60 is the transfer portion It is preferably provided to be moved in the front-rear direction at the same time by (40).

On the other hand, the transfer unit 40, the compatible base portion 20 and the glass cover portion 60 is moved to the cloud at the same time in the front-rear direction to the lower portion of any one of the supply unit 10 and the inspection imaging unit 30 It is preferably disposed in the front-rear direction on the lower portion of the compatible base portion 20 so as to be selectively opposed, but is preferably connected to the rail of the compatible base portion 20.

Here, it is preferable that the transfer part 40 is provided along the front-rear direction in the lower part of the compatible base part 20, but includes a rail part 41 that is rail-connected to the compatible base part 20. At this time, the rail portion 41 may be disposed along the front-rear direction of the compatible base portion 20 on both lower sides in the width direction of the compatible base portion 20. At this time, the rail portion 41 is provided with a predetermined length in the front-rear direction, but the front end portion of the rail portion 41 is the inspection object 1 by the supply portion 10, the upper portion of the compatible base portion 20 It is arranged at a position corresponding to the supply unit 10 to be transported, and the rear end portion of the rail unit 41 is arranged to face the lower portion of the inspection imaging unit 30 so that the compatible base unit 20 is opposite to the inspection imaging unit ( 30). In addition, the transfer part 40 may further include a rail guide part provided along the front-rear direction at the bottom of the compatible base part 20 to be rail-connected to the compatible base part 20.

In addition, the transfer part 40 includes a drive motor 42 that is power-connected to the compatible base part 20 so that the compatible base part 20 selectively moves in the front-rear direction along the rail part 41. This is preferred. At this time, the driving motor 42 may be power connected to one side in the width direction of the compatible base portion 20. In addition, the drive motor 42 is preferably connected to the control circuit 50 is controlled.

On the other hand, the inspection imaging unit 30 is disposed on the rear portion of the inspection jig device 100 spaced apart from the supply unit 10 in the front-rear direction, the compatible base unit 20 and the glass cover unit 60 ) Is disposed at the same time selectively opposing, the lower surface is vacuum adsorbed on the vacuum suction hole 24 of the compatible base part 20, and the upper surface is uniformly on the transparent glass 61 of the glass cover part 60. It is preferably provided to image the inspected object 1 pressed downward.

At this time, the compatible base portion 20 and the glass cover portion 60 in a state in which the inspected object 1 is fixed are moved by the transfer portion 40 under the inspection imaging portion 30 to face each other. When the lower portion of the inspection imaging section 30 is preferably aligned opposite to the upper portion of the test object (1).

Here, the inspection imaging unit 30 is provided to be selectively disposed on the upper portion of the compatible base unit 20 and the glass cover unit 60, the inspection camera 31 for imaging the object 1 And, it is preferable to include a reflective lighting unit 32 for providing reflective lighting to the inspection camera (31). At this time, the reflective lighting portion 32 is preferably disposed opposite to the upper portion of the compatible base portion (20). In addition, the reflective lighting unit 32 may be disposed in a form surrounding the outer surface of the inspection camera 31, but the arrangement relationship is not limited thereto.

Further, the inspection camera 31 may be provided as a small high-precision inspection camera having a high resolution in the range of 2.4 to 2.6 μm/px and a focus range within ±30 μm. In addition, it is preferable that the inspection camera 31 and the reflective lighting unit 32 are respectively connected to and fixed to a frame provided in the inspection jig device 100.

At this time, under the inspection camera 31 and the reflective lighting unit 32, the test object in a fixed state between the compatible base unit 20 and the glass cover unit 60 transferred by the transfer unit 40 The objects 1 may be arranged to face each other along the vertical direction.

In addition, the reflective lighting unit 32 is preferably provided to provide illumination to the inspected object 1 to the inspection camera 31 during inspection. At this time, the reflective lighting unit 32 is preferably provided over a predetermined light emitting area to provide uniform illumination to the entire inspection target image for the inspected object (1) obtained through the inspection camera (31).

Here, the inspection camera 31 and the reflective lighting unit 32 are provided separately and in the front-rear direction and width from the top of the inspected object 1 by horizontal moving means (not shown) controlled by the control unit 50. It is sequentially reciprocated a plurality of times along the direction, and it is possible to obtain an inspection target image for the inspected object 1. Alternatively, in the state where the inspected object 1 is fixed between the compatible base portion 20 and the glass cover portion 60, the compatible base portion 20 and the glass cover portion 60 are the transfer portion ( 40) is simultaneously reciprocated multiple times in the fore-and-aft direction at the same time, and the inspection may be performed while passing the lower portion of the inspection imaging unit 30 at a constant speed.

Here, the control unit 50 is preferably circuit-connected to the inspection imaging unit 30 to control the driving of the inspection camera 31 and the reflective lighting unit 32. In addition, the control unit 50 is provided to receive the inspection target images captured by the inspection camera 31 of the inspection imaging unit 30, and compare and inspect the matching rate between the inspection target image and the pre-stored master image. This is preferred.

At this time, the inspection target image may include respective image data for reflection inspection and transmission inspection for the inspected object 1. In addition, a communication means (not shown) that mediates a wired or wireless communication connection so as to transmit the inspection target image from the inspection camera 31 to the control unit 50 and is communicatively connected to the control unit 50 may be further provided. . At this time, the control unit 50 may be provided as a control and calculation means, such as a microcomputer.

In addition, it is preferable that the control unit 50 is pre-stored and provided with a master image for an ideal object 1. At this time, the control method of the control unit 50 is as follows. First, the inspection target image of the object 1 photographed through the inspection imaging unit 30 is transmitted to the control unit 50. Subsequently, the controller 50 compares and inspects the matching rate between the inspection target image and the master image.

For example, the matching rate is a data indicating numerically the degree of coincidence between read intervals and the like when the inspected object 1 is the inspected object 1 and is compared and judged in units of pixels, and is generated and stored in the control unit 50 Can. In addition, the master image may include a plurality of master image data for comparison matching with each image data for reflection inspection and transmission inspection.

Moreover, the jig apparatus 100 for inspection may further include a monitor unit (not shown) for visually indicating whether the inspected object 1 is defective according to a calculation result of the control unit 50. Here, when the matching rate is less than a predetermined value, the control unit 50 determines that it is defective and transmits a defective signal to the monitor unit (not shown). In addition, when the matching rate is equal to or greater than a preset value, the control unit 50 may determine that it is a good product and transmit a good product signal to the monitor unit (not shown).

Accordingly, the control unit 50 compares and judges the inspection target image and the master image for the inspected object 1, thereby inspecting the state of the coil 1a of the inspected object 1 and each coil ( 1a) It is possible to detect defects by automatically inspecting the interval maintenance status, etc., thereby improving the reliability of the product.

On the other hand, referring to Figure 2, the compatible base unit 20, the inspection imaging unit 30, the transfer unit 40 and the glass cover unit 60 is set to be provided with a plurality, each set in the width direction They can be spaced apart.

And, referring to Figure 8, the inspection jig device 100 is disposed on the front portion of the inspection jig device 100, provided with a plurality of each of the compatible base spaced apart at a widthwise interval 20 It is preferable to further include the suction rotating portion 70 disposed between. At this time, the suction rotation part 70 is rotated by rotating the inspected object 1 so that the upper and lower surfaces of the inspected object 1 seated on the upper surface of the compatible base part 20 are respectively inverted. It is preferable that the driving is controlled by 50).

In detail, it is preferable that the suction rotation part 70 includes a seating plate part 70a in which the object 1 is selectively seated on an upper surface. In addition, the seating plate portion 70a is preferably formed with a plurality of suction rotation alignment holes 71 penetrating in the vertical direction at a position where the outer rim of each inspected object 1 is seated in the central portion.

In detail, the alignment hole 71 for suction rotation is preferably disposed on one side in the width direction of the seating plate portion 70a and includes a reference alignment hole 71a for suction rotation that extends in the front-rear direction and penetrates in the vertical direction. Do. At this time, the reference alignment hole 71a for the suction rotation is preferably set so that the length in the front-rear direction exceeds the width.

Here, the jig device for inspection 100 is disposed below the reference alignment hole 71a for suction rotation, and is selectively lifted so that one side in the width direction of each of the inspected objects 1 is engaged, and the reference alignment for suction rotation It is preferable to further include a reference catching part 72 for suction rotation exposed to the upper side of the ball 71a. At this time, it is preferable that the reference catching part 72 for suction rotation is controlled by the control part 50.

In addition, the reference rotation part 72 for the suction rotation is provided as a cross-section of the outer surface contour corresponding to the inner surface outline of the reference alignment hole 71a for the suction rotation, and extends in the vertical direction, and the reference rotation for the suction rotation is at the bottom. It is preferable that the unit 72 is provided to be driven up and down, but is connected to a third lifting and aligning means controlled by the control unit 50. The third lifting and aligning means may be provided as a motor, but is not limited thereto.

On the other hand, the alignment hole 71 for the suction rotation is disposed on the other side of the seating plate portion (70a), but spaced apart at intervals corresponding to the width of each inspected object (1) from the reference alignment hole (71a) for the suction rotation It is preferably disposed and extends in the width direction of the seating plate portion 70a and includes a plurality of counter-alignment holes 71b, 71c for penetrating suction formed vertically. At this time, it is preferable that the lengths of the front and rear directions of each of the opposing alignment holes 71b and 71c for the suction rotation are set to be less than the width.

Here, the opposite alignment holes (71b, 71c) for the suction rotation includes a third opposite alignment hole (71b) is disposed on the other side of the seating plate portion (70a) is formed in a plurality of spaced apart spaced apart from each other in the front-rear direction Preferably.

In addition, the opposite alignment holes 71b and 71c for the suction rotation are disposed between the reference alignment holes 71a for the suction rotation and the third opposite alignment holes 71b, and are formed in a plurality of places to be spaced apart from each other in the front-rear direction. It is preferable to include the fourth facing alignment hole 71c to be arranged.

At this time, in the embodiment of the present invention, the case where the third opposing alignment hole 71b and the fourth opposing alignment hole 71c are respectively formed in three places is illustrated and described.

In detail, the distance between the third opposing alignment hole 71b disposed on the front side of the seating plate portion 70a and the third opposing alignment hole 71b disposed on the rear side is QUAD (1A) of the inspected object 1 ) Is set to correspond to the length in the front-rear direction. In addition, the widthwise inner end of each of the third opposing alignment holes 71b is disposed to be selectively opposed to the lower portion of the QUAD 1A among the inspected objects 1, and the widthwise outer end thereof is the inspected object 1 It is preferable that it is set to be disposed to a position exposed to the outside from the outer rim of the QUAD 1A.

In addition, the interval between the fourth opposing alignment hole 71c disposed on the front side of the seating plate portion 70a and the fourth opposing alignment hole 71c disposed on the rear side is 9BAR (1B) of the inspected object 1 ) Is set to correspond to the length in the front-rear direction. In addition, the widthwise inner end of each of the fourth opposing alignment holes 71c is arranged to be selectively opposed to the lower portion of 9BAR (1B) of the inspected object 1, and the widthwise outer end is the inspected object 1 It is preferable to be set to be disposed to a position exposed to the outside from the outer border of the 9BAR (1B).

Here, the jig apparatus 100 for inspection is disposed below each of the counter alignment holes 71b and 71c for suction rotation, and is selectively lifted and exposed to the upper side of each of the counter alignment holes 71b and 71c for suction rotation. It is preferable to further include a pressurization movement catching portion 73a, 73b for suction rotation that is moved in one direction of the seating plate portion 70a so as to press the other side in the width direction of each of the inspected objects 1 after being. At this time, it is preferable that the pressurization movement catching portions 73a and 73b for the suction rotation are controlled by the control unit 50.

In addition, the pressurized movement catching portions 73a, 73b for suction rotation are provided with a plurality of third pressing movement catching portions 73a disposed under each of the third opposing alignment holes 71b, and each of the fourth opposing alignment portions. It is preferable to include a plurality of fourth pressing movement catching portions 73b disposed under the balls 71c. At this time, in the embodiment of the present invention, each of the third pressing movement catching portion 73a and each of the fourth pressing movement catching portion 73b are illustrated and described as an example.

In addition, each of the suction rotation rotating pressing portions (73a, 73b) is each of the suction rotation counter alignment holes (71b, so as to be selectively moved along the width direction of each of the suction rotation counter alignment holes (71b, 71c)) 71c) is provided in a cross-section having a width less than the width but extends in the up-down direction, and is provided so that the pressure-moving movement moving parts 73a, 73b for suction rotation are lowered and driven, and controlled by the control unit 50 4 It is desirable to connect the power to the lifting and aligning means. The fourth lifting and aligning means may be provided as a motor, but is not limited thereto.

In addition, each of the pressurized movement catching portions 73a, 73b for suction rotation may be formed with hooks for suction rotation extending from the top to one side in the width direction of the seating plate portion 70a. Moreover, the inspection jig device 100 further includes a suction rotation object inspection sensor (not shown) for determining the type and size of the inspection object 1 seated on the upper surface of the seating plate portion 70a. Can.

Accordingly, when the object to be inspected is seated on the upper surface of the seating plate portion 70a by the supply unit 10, the control unit 50 raises and controls the reference catching portion 72 for the suction rotation, and simultaneously the suction Corresponding to the type and size of the inspected object 1, which is determined by the rotational inspection object discrimination sensor (not shown), any of the third pressurization movement catching section 73a and the fourth pressurization movement catching section 73b Up to one set can be controlled.

At this time, any one set of the third pressing movement catching portion 73a and the fourth pressing movement catching portion 73b is opposite to each of the suction rotation holes 71b from the outside of the outer rim of the inspected object 1 After being exposed to the upper side of ,71c), as it moves to one side in the width direction of the seating plate portion 70a, it is possible to press the outer edge of the object 1.

That is, one side in the width direction of the inspected object 1 is caught by the reference catching part 72 for suction rotation, and at the same time, the other side in the width direction of the inspected object 1 is the third pressing movement catching part 73a and the It may be pressed by any one set of the fourth pressing movement engaging portion (73b).

On the other hand, the seating plate portion 70a is spaced apart from the alignment hole 71 for suction rotation so that the lower surface of each of the inspected objects 1 supplied by the supplying portion 10 is selectively seated and vacuum-suctioned. It is preferable that the vacuum suction hole 74 for suction rotation is formed through the vertical direction.

In detail, the vacuum suction hole 74 for suction rotation is adjacent to the other side in the width direction of the seating plate portion 70a from the reference alignment hole 71a for suction rotation so as to face one lower surface in the width direction of the inspected object 1. It is preferable to include a third vacuum suction hole 74a which is formed through a plurality of places in the vertical direction along the front-rear direction at a spaced apart position. At this time, it is preferable that one lower surface in the width direction of the inspected object 1 is selectively opposed to the third vacuum suction hole 74a.

Here, the third vacuum suction hole 74a is spaced apart from each other in the zigzag shape of the'W' along the front-rear direction to the seating plate portion 70a, and is formed through each in the vertical direction, but preferably, the lower portions communicate with each other. In addition, the total length of the third vacuum suction hole 74a is preferably set to correspond to the length in the front-rear direction of the QUAD 1A among the inspected objects 1.

In addition, the vacuum suction hole 74 for the suction rotation is in the width direction of the seating plate portion 70a from the opposite alignment holes 71b and 71c for the suction rotation so as to face the other lower surface in the width direction of the inspected object 1. It is preferable to include the fourth vacuum suction holes 74b and 74c formed through a plurality of places in the vertical direction along the front-rear direction at positions spaced adjacent to one side. Here, the fourth vacuum suction holes (74b, 74c) are spaced apart from each other in the zigzag form of the'W' along the front-rear direction to the seating plate portion (70a) and are formed through each in the vertical direction, but each lower portion is preferably in communication Do. At this time, it is preferable that the lower surface of the other side in the width direction of the inspected object 1 is selectively opposed to the fourth vacuum suction holes 74b and 74c.

Here, any one set of the fourth vacuum suction holes 74b and 74c along the front-rear direction at a position spaced apart from each of the third opposing alignment holes 71b to one side in the width direction of the seat plate portion 70a. It is formed through a plurality of places in the vertical direction, and corresponds to the length in the front-rear direction of the QUAD 1A among the inspected objects 1 so that the other side of the width direction of the QUAD 1A among the inspected objects 1 is selectively opposed. It is preferred that the length is set.

In addition, another set of the fourth vacuum suction holes 74b and 74c along the front-rear direction at positions spaced apart from each of the fourth opposing alignment holes 71c to one side in the width direction of the seating plate portion 70a. It is formed through a plurality of places in the vertical direction, and corresponds to the length in the front-rear direction of 9BAR (1B) of the test object (1) so that the other side of the width direction of the 9BAR (1B) of the test object (1) is selectively opposite. It is preferred that the length is set.

Through this, as the lower surface of both sides of the width direction of the inspected object 1 seated on the upper surface of the seating plate portion 70a is simultaneously vacuum adsorbed to the vacuum suction holes 74 for each suction rotation, the inspected object 1 The inspection can be performed in a state substantially aligned with the seating plate portion 70a, so that inspection precision can be improved.

In addition, a vacuum suction flow path (not shown) for suction rotation communicating with each vacuum suction hole 74 for suction rotation in the interior of the seating plate portion 70a to vacuum adsorb the inspected object 1 along the front-rear direction. It is desirable to communicate. At this time, an inlet end of the vacuum suction flow path (not shown) for the suction rotation may be in communication with each vacuum suction hole 74 for the suction rotation.

In addition, the inspection jig device 100 is connected to the discharge end of the vacuum suction flow path (not shown) for the suction rotation vacuum suction means for suction rotation controlled by the control unit 50 to provide a vacuum suction force ( It is preferred to further include). At this time, the vacuum suction means for suction rotation (not shown) is preferably connected to the control circuit 50 is controlled. The suction suction vacuum suction means (not shown) may be provided as a vacuum suction pump, but is not limited thereto.

Here, a connection path 76 for suction rotation in the form of a pipe is connected to the discharge end of the vacuum suction flow path (not shown) for the suction rotation, and the connection flow path 76 for the suction rotation is the vacuum suction path for the suction rotation ( It is preferably provided to mediate the connection between the discharge end of the not shown) and the vacuum suction means (not shown) for the suction rotation.

Through this, when the vacuum suction means (not shown) for the suction rotation is driven by the control unit 50, the flow direction of air is generated from the inlet end of each vacuum suction flow path (not shown) for the suction rotation to the discharge end side. . Accordingly, the lower surfaces of both edges in the width direction of the inspected object 1 may be vacuum-suctioned and fixed to the vacuum suction hole 74 for suction rotation. At this time, it is preferable to understand that each configuration of the above-mentioned suction rotation part 70 corresponds substantially to each configuration of the above-described compatible base part 20.

In addition, the suction rotation part 70 is vacuum-adsorbed to the upper surface of the seating plate part 70a and the lower surface of the inspected object 1 is fixed to the suction ring for the suction rotation, and the seating plate part 70a is It is preferable to include rotation means 75 that is rotationally driven by the control unit 50 to face downward.

In addition, the jig device for inspection 100 is disposed on the lower side of the seating plate portion 70a disposed to face downward, is selectively opposed, is selectively reciprocated along the width direction, selectively along the vertical direction It is preferable to further include a support portion 77 which is driven up and down and controlled by the control unit 50. At this time, the support portion 77 includes an alignment hole (not shown) corresponding to the alignment hole 71 for suction rotation, and a reference engagement portion for support corresponding to the reference rotation part 72 for suction rotation ( (Not shown), and a counter alignment hole (not shown) for the support corresponding to the opposite alignment holes 71b and 71c for the suction rotation, and a pressure for support corresponding to the pressure movement catching parts 73a and 73b for the suction rotation A moving suction part (not shown) and a vacuum suction hole (not shown) for a support corresponding to the suction suction vacuum hole 74 may be provided. At this time, since each configuration and sub-configuration of the support portion 77 are substantially the same as each configuration and operation of the suction rotation portion 70 described above, a detailed description will be omitted.

Then, the object to be inspected (1), which is inverted upside down by the suction rotation part (70) and seated and aligned on the support part (77), is transferred to the upper surface of the compatible base part (20) by the supply part (10). It can be controlled by the control unit 50.

Accordingly, by inverting the upper and lower surfaces of the inspected object 1 through the suction rotating part 70 and the supporting part 77, inspection for each can be sequentially performed, thereby improving the production speed by automating work efficiency. As it improves, economics can improve significantly.

As described above, in the jig apparatus 100 for inspection according to the present invention, the lower edge of the lower surface of the inspected object 1 is vacuum adsorbed on the vacuum suction hole 24 of the compatible base 20 and at the same time, the inspected object 1 The entire upper surface of the upper and lower surfaces is simultaneously and uniformly pressed downward by the transparent glass light-transmitting glass 61 provided with a flat plate. Therefore, even when the inspection is performed while the upper surface of the inspected object 1 is completely exposed to the inspected imaging part 30, the inspected object 1 is moved even when it is moved back and forth multiple times by the transfer part 40 for inspection. By providing a synergistic effect in which the flatness of the substrate is maintained substantially parallel and uniform to the compatible base portion 20, inspection precision and inspection reliability can be significantly improved.

In addition, the amount of incident light reaching the inspection camera 31 is adjusted so that the light emitted from the reflection illumination unit 32 provided in the inspection imaging unit 30 is reflected from the transparent glass 61 and is adjusted to a predetermined value or less. Since the transmissive glass 61 is made of a transparent material having a reflectance in a predetermined range, scattering due to a medium characteristic is minimized, and thus the sharpness of an inspection target image obtained with respect to the inspected object 1 can be remarkably improved.

In addition, a driving rail portion 63 for moving the front and rear clouds is connected to the outer frame 62 surrounding the outer rim of the translucent glass 61 provided above the area of the compatible base portion 20 and the translucent glass The pressure lifting means 64, which is driven downward so that 61 is in surface contact with the entire upper surface of the inspected object, is connected.

In addition, when the object to be inspected (1) is seated on the upper surface of the compatible base portion (20), the reference catching portion (22) elevated and exposed to the upper side of the reference alignment hole (21a) on one side of the compatible base portion (20) One side is hung, and the pressurization movement is lifted and exposed upwardly from the reference alignment holes 21a to a plurality of opposing alignment holes 21b and 21c spaced apart at intervals corresponding to the width of each inspected object 1 Compatibility is improved because the other side is pressed and aligned in the width direction to the parts 23a, 23b, and even when sequentially inspecting a large number of objects to be inspected, each inspection target image is obtained uniformly, significantly improving inspection efficiency and inspection reliability. Can be.

In addition, a plurality of counter-alignment holes 21b and 21c are wide from each of the reference alignment holes 21a so that the inspected objects 1 of various sizes are compatible with one compatible base part 20. Spaced apart from each other at intervals corresponding to each other, both sides of each of the inspected objects 1 in the width direction are disposed opposite to any one of the first vacuum suction hole 24a and the plurality of second vacuum suction holes 24b. Therefore, compatibility can be significantly improved.

At this time, the terms "include", "compose" or "prepare" as described above means that the corresponding component can be intrinsic unless otherwise stated, and other components are excluded. It should not be interpreted as being able to further include other components. All terms, including technical or scientific terms, have the same meaning as generally understood by a person skilled in the art to which the present invention belongs, unless otherwise defined. Commonly used terms, such as predefined terms, should be interpreted as being consistent with the contextual meaning of the related art, and are not to be interpreted as ideal or excessively formal meanings unless explicitly defined in the present invention.

As described above, the present invention is not limited to each of the above-described embodiments, and it is possible to be modified by a person skilled in the art to which the present invention pertains without departing from the scope of the claims of the present invention. The implementation of such modifications is within the scope of the present invention.

100: inspection jig device 10: supply unit
20: compatible base 21: alignment hole
22: reference engaging portion 23a, 23b: pressurized moving engaging portion
24: vacuum suction hole 30: inspection imaging unit
31: inspection camera 32: reflective lighting
40: transfer unit 50: control unit
60: glass cover portion 61: transparent glass
62: outer frame 63: drive rail portion
64: pressurized lifting means 70: suction rotating part

Claims (5)

It is disposed on the front portion and the flat plate of the square section is standardized for different sizes, and is selectively disposed opposite to the lower portion of the supply portion that is reciprocated along the width direction to sequentially supply a plurality of inspected objects. A plurality of alignment holes are formed through the vertical direction at a position where the outer rim is seated, and the lower surface of each of the inspected objects supplied by the supply unit is selectively seated and spaced apart from the alignment holes so that the plurality of vacuum suction holes are separated. A compatible base formed through the vertical direction;
An inspection image including an inspection camera which is disposed on the rear part spaced apart from the supply part in the front-rear direction and is selectively opposed to the upper part of the compatible base part and is vacuum-suctioned on an upper surface of the compatible base part to capture the fixed test object. part;
A transfer part disposed along the front-rear direction in the lower part of the compatible base part to be rail-connected to the compatible base part so that the compatible base part is clouded in the front-rear direction and selectively disposed opposite to any one of the supply part and the inspection imaging part; And
For inspection, including a control unit that receives and receives an inspection target image for the inspected object imaged by the inspection imaging unit and compares the matching rate between the inspection target image and a pre-stored master image, and drives and controls the supply unit and the transport unit. Jig device. According to claim 1,
Arranged opposingly between the upper portion of the compatible base portion and the lower portion of the inspection imaging portion, the upper and lower surfaces are provided with a flat plate so that the entire upper surface of the object to be inspected is uniformly downwardly pressed at the same time to selectively contact the upper surface of the object to be inspected. Further comprising a glass cover portion comprising a translucent glass,
The transparent glass is provided with a transparent material having a reflectance in a predetermined range so that the light emitted from the reflective lighting unit provided in the inspection imaging unit is reflected and the amount of incident light reaching the inspection camera is adjusted to a predetermined value or less. Jig device for inspection. According to claim 2,
The translucent glass is provided over an area of the compatible base, but is provided to be selectively moved back and forth to cover the upper portion of the compatible base,
The glass cover portion, the outer frame is disposed surrounding the outer rim of the translucent glass, the outer frame provided with a diameter that exceeds the diameter in the front-rear direction and the width direction of the compatible base, respectively,
A driving rail part connected to the outer side in the width direction of the outer frame and controlled by the control unit so that the translucent glass is moved back and forth in any direction from the upper part of the compatible base part and the front outer part of the compatible base part;
It is connected to the lower portion of the outer frame, and when the transparent glass is disposed opposite to the upper portion of the compatible base portion, it further comprises a pressurized elevating means selectively lowered and driven by the control unit so as to make surface contact with the entire upper surface of the inspected object. Jig device for inspection. According to claim 1,
The alignment holes are spaced apart at a distance corresponding to the width of each of the inspected objects from the reference alignment holes extending in the front-rear direction on one side of the compatible base portion and penetrating in the vertical direction, and from the reference alignment holes on the other side of the compatible base portion. It includes a plurality of counter-alignment holes extending in the width direction of the compatible base portion and penetrating in the vertical direction,
A reference catching part disposed below the reference alignment hole and selectively lifted so that one side in each width direction of the inspected object is caught and exposed to an upper side of the reference alignment hole;
It is disposed below the counter-alignment hole, but is selectively lifted and exposed to the upper side of each counter-alignment hole, and then the press-fitting movement part is moved in one direction of the compatible base part to press the other side in the width direction of each inspected object. Inspection jig device characterized in that it includes. The method of claim 4,
The vacuum suction hole is a first vacuum suction hole formed through a plurality of places in the vertical direction along the front-rear direction at a position spaced apart from the reference alignment hole to the other side in the width direction of the compatible base so as to face one lower surface in the width direction of the inspected object. and,
And a second vacuum suction hole formed through a plurality of places in the vertical direction along the front-rear direction at a position spaced apart from each of the counter-alignment holes to one side in the width direction of the compatible base so as to face the other side in the width direction of the inspected object,
The first vacuum suction hole and the second vacuum suction so that one lower surface in the width direction of the inspected object is selectively opposed to the first vacuum suction hole and the lower surface in the width direction is selectively opposite to the second vacuum suction hole. The interval between holes is set to less than the width of the inspected object jig device for inspection.

Images