KR101679205B1 - Device for detecting defect of device - Google Patents

Abstract

A device defect detection apparatus according to an embodiment of the present invention includes a first light source unit for simultaneously irradiating a first light source, a second light source, and a third light source of different wavelengths to the device at the front, side, and rear sides of the device, A color camera for capturing an image reflected by a light source irradiated from the first, second and third light sources to the device at the same time in a color image, and a color camera for capturing the color image into the first light source, the second light source, And a detector for detecting a defect of each of the first, second and third light sources by analyzing the image by image processing and separating the image into an image corresponding to each of the light source and the wavelength of the third light source.

Description

[0001] DEVICE FOR DETECTING DEFECT OF DEVICE [

The present invention relates to a device defect detection apparatus capable of simultaneously detecting different types of defects by simultaneously irradiating light sources of different colors on the front, side, and rear surfaces of a device for detecting defects .

2. Description of the Related Art Generally, in an organic light emitting diode (OLED) manufacturing process, when a foreign substance, an organic EL layer, and a TFT (Thin Film Transistor) layer are deposited on a surface, It causes a defect. In addition, when the organic light emitting diode device is miniaturized and a minute defect due to a foreign substance is present, this defect may cause insulation failure of the organic light emitting diode device or destruction of the insulating film and the like.

Therefore, it is the best way to improve the quality of the product by preventing the defect from detecting the foreign substance or defect in advance.

As a best method for preventing such defects and defects, a tester using a camera has been disclosed.

However, existing inspection equipment uses single-color illumination and monochrome cameras, making it difficult to distinguish between various types of defects and defects. In particular, the conventional inspection equipment has a drawback in that it is difficult to distinguish between a rolled pattern of a mask and a defective image. In addition, in the conventional illumination method using a single color, there is a problem that it is difficult to detect selective defects among various types of defects.

Therefore, there is a need for a device defect detection apparatus capable of detecting all types of defect types to be inspected.

Korean Registered Patent Publication No. 10-1026930 Korean Registered Patent Publication No. 10-1228298

It is therefore an object of the present invention to provide a device defect detection apparatus capable of simultaneously detecting different types of defects of a device.

According to an aspect of the present invention, there is provided a device defect detection apparatus for simultaneously detecting a first light source, a second light source, and a third light source of different wavelengths on a front surface, a side surface, A color camera for picking up an image reflected by a light source irradiated from the first, second and third light sources at the same time to a device as a color image; The first light source, the second light source, and the third light source, and analyzes the image by image processing to detect defects of the first light source unit, the second light source unit, and the third light source unit, .

According to another aspect of the present invention, there is provided a defect detection and setting method for a device, the method comprising: setting a characteristic of a defect detection target device; setting a light source of different wavelengths at the front, The method comprising the steps of: irradiating the device with light reflected from the device to a captured image through a color camera; acquiring and storing a defect detection rate through the captured image analysis; Acquiring and storing a defect detection rate therefrom, selecting the best light source intensity ratio by comparing the obtained defect detection rates, and setting the selected light source intensity ratio according to the device characteristics.

As described above, according to the device defect detection apparatus of the present invention, it is possible to minimize the inspection time by acquiring various defects of the device, which are detected by the illumination method and the color, through one image pick-up. Further, by using the illumination in the form of an intersection at the side of the device, it is possible to distinguish between the rolled pattern and various types of defects, so that erroneous detection can be reduced. In addition, the retroreflective sheet can be used to enhance the illumination efficiency, thereby increasing the discrimination power of the irregularities (stamping, pressing, rising, surface foreign matter, etc.) and improving the detection efficiency.

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing a schematic configuration of a device defect detection apparatus according to an embodiment of the present invention. Fig.
FIG. 2 is a view showing a first light source unit according to an embodiment of the present invention, and a defect image detected through the first light source unit. FIG.
3 is a view showing a second light portion and a retroreflective sheet according to an embodiment of the present invention, and a defect image detected through the second light portion.
4 is a view showing a third light portion and a retroreflective sheet according to an embodiment of the present invention, and a defect image detected through the third light portion.
5 is a view schematically showing a structure for applying a retroreflective sheet according to an embodiment of the present invention.
Fig. 6 is a diagram showing a comparison between before and after application of a retroreflective sheet. Fig.
FIG. 7 is a flowchart for explaining a device defect detection setting method according to an embodiment of the present invention; FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In the following description of the embodiments of the present invention, descriptions of techniques which are well known in the technical field of the present invention and are not directly related to the present invention will be omitted. In addition, detailed description of components having substantially the same configuration and function will be omitted.

For the same reason, some of the elements in the accompanying drawings are exaggerated, omitted, or schematically shown, and the size of each element does not entirely reflect the actual size. Accordingly, the present invention is not limited by the relative size or spacing depicted in the accompanying drawings.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a device defect detection apparatus according to the present invention will be described with reference to the drawings.

FIG. 1 is a diagram illustrating a schematic configuration of a device defect detection apparatus according to an embodiment of the present invention. FIG. 2 is a diagram illustrating a first light source unit according to an embodiment of the present invention, 3 is a view showing a second light source part and a retroreflective sheet according to an embodiment of the present invention, and a defect image detected through the second light source part and the retroreflective sheet according to an embodiment of the present invention, and FIG. 4 is a view showing a third light source part and a retroreflective sheet And FIG. 5 is a view schematically showing a structure for applying a retroreflective sheet according to an embodiment of the present invention, and FIG. 6 is a diagram comparing before and after application of a retroreflective sheet.

1, a device defect detection apparatus 100 according to an exemplary embodiment of the present invention includes a color camera 110, a lens 120, a first light source unit 130, a second light source unit 140, A reflective sheet 150, a retroreflective sheet 160, a detection unit 170, and a control unit 180.

As shown in FIG. 2, the first light source 130 irradiates a light source of a first color from a front surface of the device 200 to measure defects. The first light source unit 130 is a coaxial illumination collinear to the center line of the color camera 110 and the lens 120. The reflected light from the coaxial illumination device 200 is reflected by the lens 120 through the lens 120, And reaches the image sensor of the camera 110. The first light source 130 uses a blue color of the LED as the first color and a bright field light such as a bright field light that detects an etched surface of the device 200, field light).

The second light source 140 irradiates the light source of the second color on the side of the device 200 to measure defects. The light source of the second color is irradiated at an angle between 10 and 45 degrees with the plane of the device 200 when viewed from the side and is illuminated at a distance of 30 to 50 degrees with respect to the plane of the device 200, Angle. Therefore, in a structure having an angle of 10 to 45 degrees, foreign objects such as foreign objects, soot, dust, scratches, etc. on the surface of the device are detected. In the structure in which the angle of illumination is 30 to 50 degrees, Regardless of whether it is horizontal or vertical with respect to the scanning direction of the recording medium 110. Since the second light source unit 140 uses an intersection shape, it is possible to distinguish between the rolling pattern and various types of defects, so that erroneous detection can be minimized.

The second light source 140 uses the red color of the LED as the second color and detects the fine shots, fine scratches, rib bending, and water on the surface of the device 200 It is called "Dark light".

The third light source unit 150 irradiates the light source of the third color on the rear surface of the device 200. The light source of the third color irradiated from the third light source unit 150 can reach the image sensor of the color camera 110 through the hole of the device 200 through the lens 120 directly. The third light source unit 150 uses a greed color as the third color and uses a back light for detecting the boundary of the device 200 such as water, shape determination, ).

The color camera 110 captures an image reflected by the light source irradiated from the first light source unit 130, the second light source unit 140 and the third light source unit 150 simultaneously to the device 200 as a color image. That is, the light sources of blue, red, and green colors are simultaneously irradiated to the device 200 by the first light source unit 130, the second light source unit 140, and the third light source unit 150, The color camera 110 picks up a color image in one shot.

The detection unit 170 separates the color image acquired by the color camera 110 into an image corresponding to each of the first color, the second color and the third color, analyzes it through image processing And detects defects of the first light source unit, the second light source unit, and the third light source unit.

The image processing is a process of obtaining a histogram according to the gray level of each of the separated images corresponding to each of the first to third colors and comparing the histogram with the original information of the device 200, .

More specifically, the detection unit 170 detects a color image obtained from the color camera 110 on the front surface of the device 200 corresponding to the first light source unit 130, the second light source unit 140, and the third light source unit 150, And the rear image, and divides the image into the first color, the second color, and the third color. That is, the blue image, the red image, and the green image are separately separated. Then, each of the blue image, the red image, and the green image is gray-converted, and the gray-converted image is binarized. The binarization process refers to converting the brightness of each pixel in the image into black and white based on the reference value.

Thus, the detecting unit 170 can distinguish between rolled and surface foreign substances from the final binarized image, can ensure the foreign matter inspection function of the etching unit, and can analyze the pattern shape.

By combining the defective image detected after the image processing with the scan image as described above, it is possible to confirm which coordinate is defective. That is, the inspection result can be confirmed by the positional coordinates.

The device defect detection apparatus according to the embodiment of the present invention can detect a defect of a device through a light source of a single color in a conventional manner, It is possible to detect all the defects of the device which can be detected only by each of the defective pixels by one imaging.

The lens 120 enlarges or reduces the real image of the device 200 and transmits the enlarged or reduced image. The lens 120 collects the light reflected by the device 200 from the first light source unit 130, the second light source unit 140 and the third light source unit 150 and collects the collected light by the image sensor of the color camera 110.

The retroreflective sheet 160 is provided at a position corresponding to the square of the light irradiated from the first light source unit 130 to the device 200 and transmits the reflected light to the color camera 110. That is, the light irradiated from the first light source unit 130 to the device 200 is incident on the retroreflective sheet 160 located at the regular reflection angle, and then the light reflected by the device 200 is sent to the color camera 110 do. This improves the intensity of the image picked up by the color camera 110, thereby enhancing the discrimination power of the irregularities (stamping, pressing, rising, foreign substances on the surface, etc.).

The control unit 180 controls the first light source unit 130, the second light source unit 140 and the third light source unit 150 according to the characteristics of the defect detection target device 200 to detect the first color, the second color, You can change the intensity of the color. Here, the controller 180 may consider at least one of the surface material, the reflectivity, and the transmittance as the device characteristics. In addition, the control unit 180 may adjust the color of the light source, the angle of incidence, and the position of the light source irradiated from the first light source unit 130, the second light source unit 140, and the third light source unit 150.

Hereinafter, a device defect detection setting method according to an embodiment of the present invention will be described with reference to FIG.

First, in step S110, the control unit 180 sets the characteristics of the defect detection object device. The characteristics of the device may include at least one of surface material, reflectivity, and transmittance.

In step S120, the controller 180 simultaneously irradiates the light sources of different wavelengths to the device on the front, side, and rear sides of the device. That is, the first light source unit 130, the second light source unit 140, and the third light source unit 150 are controlled to cause the light sources of different wavelengths to be simultaneously irradiated to the devices. For example, the device's blue, red, and green light sources can be simultaneously illuminated on the device at the front, side, and back of the device, respectively.

In step S130, the control unit 180 inputs the light reflected from the device to the color camera, and acquires an image for the device through the image sensor.

In step S140, the controller 180 acquires the defect detection rate through the captured image analysis and stores it in the database.

In step S150, the control unit 180 changes the ratio different from the ratio of the intensities of the previously set light sources, and irradiates the light sources having the changed intensity ratio to the device in the same manner as described above. Thereafter, the reflected light is incident on the color camera in the same manner as described above, the captured image is acquired for the device through the image sensor, the defect detection rate is obtained through the captured image analysis, and the acquired defect detection rate is stored in the database.

In step S160, the controller 180 selects the highest defect detection rate among the defect detection rates according to the various intensity ratios obtained in steps S140 and S150, and selects the highest defect detection rate as the intensity ratio of the corresponding light sources as the intensity ratio of the best light sources .

In step S170, the controller 180 sets and stores the intensity ratios of the best light sources selected in step S160 by mapping the device characteristics set in step S110.

Also, when a defect is detected for a specific device, the control unit 180 can be applied to detect a defect of the device using the intensity ratio of the light sources set in advance by the above-described method.

In this case, the predetermined light sources may use a single light source unit, a combined light source unit, and a whole light source unit.

That is, when the light source is applied to the inspection object, the single illumination for applying and illuminating the light sources of the first light source unit, the second light source unit and the third light source unit, the joint light for combining the two light source units, It can be divided into whole lights to illuminate.

Wherein the single illumination is a single single illumination for applying and illuminating the first light source portion, a second single illumination for applying and illuminating the second light source portion, and a third single illumination for applying and illuminating the third light source portion, And a third joint illumination for simultaneously illuminating the second light source section and the third light source section, and the second joint light for simultaneously illuminating the entire light source section and the second light source section, Can illuminate both the first light source unit, the second light source unit, and the third light source unit.

        Wherein the single illumination is a single single illumination for applying and illuminating the first light source portion, a second single illumination for applying and illuminating the second light source portion, and a third single illumination for applying and illuminating the third light source portion, And a third joint illumination for simultaneously illuminating the second light source section and the third light source section, and the second joint light for simultaneously illuminating the entire light source section and the second light source section, May be an illumination that illuminates both the first light source unit, the second light source unit, and the third light source unit.

In this case, the method of determining the illumination for obtaining the optimal image can be determined by binarizing the acquired image, and since the level difference between adjacent pixels is well displayed at the time of image processing, it is possible to detect the shape and defects Of course.

      At this time, a value of the level difference between adjacent pixels is detected through the binarized image, and if the average value of the level difference is a predetermined value or more, the optimal image is determined.

The reason for this is that if the level difference between adjacent pixels is large, defects existing in the image or unnecessary shapes can be detected with good software.

The formula is described below.

 here

     i = 1 ... N + 1: Index value of the ith pixel

   N: means the Nth pixel,

   Z: average value of level difference between adjacent pixels in all pixels

: i 번째 픽셀의 광강도값,

: the light intensity value of the i-th pixel,

In the above equation, Z represents the average value of the level difference between adjacent pixels when binarized in the total pixel (N + 1). In this case, the level difference usually indicates a difference in light intensity.

At this time, when the obtained Z value is more than a predetermined value, it is quantitatively expressed that the difference in brightness due to binarization is distinct. Thus, optimal illumination for the device or the corresponding position can be determined through this process.

Also, the overall illumination may be an illumination for illuminating both the minimum light source unit, the intermediate angle light source unit, and the maximum light source unit.

As described above, according to the device defect detection apparatus of the present invention, it is possible to minimize the inspection time by acquiring various defects of the device, which are detected by the illumination method and the color, through one image pick-up. Further, by using the illumination in the form of an intersection at the side of the device, it is possible to distinguish between the rolled pattern and various types of defects, so that erroneous detection can be reduced. In addition, the retroreflective sheet can be used to enhance the illumination efficiency, thereby increasing the discrimination power of the irregularities (stamping, pressing, rising, surface foreign matter, etc.) and improving the detection efficiency.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. , And are not intended to limit the scope of the present invention. It will be apparent to those skilled in the art that other modifications based on the technical idea of the present invention may be practiced without departing from the invention as set forth herein.

100: Device defect detection device 110: Color camera
120: lens 130: first light source part
140: second light source part 150: third light source part
160: Retroreflective sheet 170: Detector
180: control unit 200:

Claims (14)

Irradiating the device with a light source having different wavelengths on the front, side and rear sides of the device, imaging the reflected image by the light source irradiated by the device into the color image, And analyzing the image through image processing to detect a defect for each light source,
A first light source part, a second light source part and a third light source part for simultaneously irradiating the device with a first light source, a second light source and a third light source having different wavelengths on the front, side and rear sides of the device;
A color camera that irradiates one or more light sources from the first light source unit, the second light source unit, and the third light source units to the device and images an image obtained by the light source irradiated to the device into a color image; And
Separating the color image into images corresponding to respective wavelengths of the first light source, the second light source, and the third light source, and analyzing the color image through image processing to generate the first light source portion, the second light source portion, And a detector for detecting a defect of each light source unit,
And a control unit for controlling intensity of the first light source, the second light source and the third light source by controlling the first light source unit, the second light source unit and the third light source unit according to the characteristics of the device,
The controller controls at least one of a color, an incident angle, and a position of a light source irradiated from the first, second, and third light sources,
The first light source is a bright field light that utilizes the blue color of the LED and detects an etched surface of the device, scratches,
The second light source is a dark light that uses a red color of an LED and detects fine marks, fine scratches, rib bending, and water on the surface of the device,
The third light source is a back light that utilizes the greed color of the LED and detects the boundary of the device, shape determination, crack and cut
A single illumination unit for illuminating the first light source unit, the second light source unit, and the third light source unit by applying only the respective light source units to the inspection object body; joint lights for combining and illuminating the two light source units; Lighting divided into lights,
Wherein the single illumination is a single single illumination for applying and illuminating the first light source portion, a second single illumination for applying and illuminating the second light source portion, and a third single illumination for applying and illuminating the third light source portion, And a third joint illumination for simultaneously illuminating the second light source section and the third light source section, and the second joint light for simultaneously illuminating the entire light source section and the second light source section, Is an illumination for illuminating both the first light source portion, the second light source portion and the third light source portion,
Wherein illuminating the inspection object body comprises illuminating the first single illumination, the second single illumination, the third single illumination, the first joint illumination, the second joint illumination, the third joint illumination, Wherein at least one of the lights in the entire illumination is applied to illuminate the device.
delete The method according to claim 1,
Wherein the control unit considers at least one of surface material, reflectivity, and transmittance as characteristics of the device.
delete delete delete delete The method according to claim 1,
Further comprising a retroreflective sheet provided at a position corresponding to a square of the angle of the light irradiated from the first light source unit to the device and for transmitting the reflected light to the color camera. The method according to claim 1,
Further comprising a lens for collecting the light reflected by the device from the first light source part, the second light source part, and the third light source part and collecting the reflected light to an image sensor of the color camera. The method according to claim 1,
The second light source unit is configured such that the light source is realized at an angle of 10 to 45 degrees with respect to the plane of the device when seen from the side and the light source is realized at a symmetric angle of 30 to 50 degrees with the plane of the device when viewed from the front side , Device defect detection device.














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