JP2007316022A - Mobile probe unit mechanism and electric inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a mobile probe unit mechanism 21 equipped with an adjustment function corresponding to different sizes of test subject plates and an electric inspection apparatus 1. <P>SOLUTION: Mobile probe unit 21 adjusts an opening 23 corresponding to different sizes of different kinds of liquid crystal panels 22 and adjusts the position of a probe needle. The mobile probe unit 21 is composed of a mobile frame mechanism 30 which adjusts the opening 23A by moving a frame plate corresponding to the different sizes of the different kinds of the liquid crystalline panels 22, and a contact unit 31 which supports the probe needle and is aligned and delivered to contact the terminal 22A of the liquid crystalline panel 22. The electric inspection apparatus 1 comprises the mobile probe unit 21. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a movable probe unit mechanism and an electrical inspection apparatus having an electrical connection mechanism for connecting an energization circuit and a display panel for electrical inspection of a display panel such as a liquid crystal display panel.

  One display panel inspection apparatus such as a liquid crystal display panel is provided with a plurality of contact units for inspection on an inspection stage on which a display panel to be inspected is arranged.

  The plurality of contact units supply power from the energization circuit to the display panel by contacting the electrodes corresponding to the display panel on the panel receiver of the inspection stage during inspection.

  Further, when the display panel is arranged on the panel receiver prior to the inspection and the display panel is taken out of the panel receiver after the inspection, each contact unit is retracted from the display panel arrangement area.

  Therefore, a large number of contact units do not hinder the arrangement and removal of the display panel from the panel receiver, and the display panel can be handled smoothly (Patent Document 1).

Conventionally, for display panels having different sizes, it has been necessary to install an inspection stage and a probe unit dedicated to the display panel. However, the opening is adjusted according to the size of the display panel having a different size. Thus, there is also an apparatus that eliminates the need to install a new dedicated inspection stage and probe unit (Patent Document 2).
JP 2002-350485 A JP 2002-91336 A

  In recent years, the display panel has been increased in size to 50 to 80 inches, and a display panel for TV is inspected at a backlight brightness of about 10,000 to 20,000 cd. The display panel thermally expands due to the heat of the backlight.

  However, since the probe unit is not significantly affected by heat, there is a problem that the pitch between the contacts and the electrode pitch of the display panel is shifted, and a good electrical inspection cannot be performed.

  The present invention has been made in view of such problems, and a movable probe unit mechanism that allows thermal expansion due to the heat of the backlight and can be easily aligned with a contact electrode such as a probe needle. And it aims at providing an electrical inspection apparatus.

  An electrical inspection apparatus according to the present invention is made to solve the above-described problem, and is a movable probe unit mechanism that adjusts the positions of a plurality of contacts in accordance with electrodes of an inspection object plate, and the inspection object One or more probe units are provided on one side of the support frame body of the probe block corresponding to the side where the electrode of the plate is arranged, and the probe unit is driven in the longitudinal direction of the alignment camera and the probe unit. And a probe block provided with a plurality of contacts.

  With the above configuration, the probe unit uses the alignment camera to copy the alignment mark of the inspection target plate, and moves the probe unit in the longitudinal direction of the probe unit with the drive mechanism, thereby making a plurality of contact of the probe block. The child is aligned with each electrode of the inspection object plate.

  The drive mechanism moves the contacts in a direction along one side of the inspection target plate so as to support the contacts and align with the electrodes of the inspection target plate. It is desirable to include a contact unit having one or more facing one side of the target plate.

  With the above configuration, the drive mechanism of the contact unit supports each contact and moves each contact in a direction along one side of the inspection target plate.

  The contact unit includes a probe unit that supports a large number of contacts, a distal-side moving block that supports the probe unit and brings the contacts into contact with terminals of the inspection target plate, and supports the distal-side moving block. Then, the base unit side moving block for bringing the contact of the probe unit into contact with each terminal of the inspection object plate and the positioning adjustment between the contact and the terminal by moving the probe unit in the left-right direction It is desirable that the apparatus is configured to include a position adjusting mechanism.

  With the above configuration, the position adjustment mechanism adjusts the positioning between the contact and the terminal, supports the distal-side moving block with the proximal-side moving block, and feeds the contact of the probe unit Contact each terminal of the board to be inspected.

  The probe unit includes a probe block that supports a plurality of contacts at the tip and contacts each terminal of the inspection target plate, and aligns the contact at the tip of the probe block to each terminal position of the inspection target plate. And an alignment camera that captures the alignment mark, and a probe base that integrally supports the probe block and the alignment camera.

  With the above configuration, the alignment mark is copied by the alignment camera and adjusted so that the amount of deviation between the alignment mark and the reference point is zero, and the contact is aligned with the terminal.

  The distal-side moving block includes a support plate that supports the probe unit, a distal-side connecting block that is connected to the proximal-side moving block and moves up and down, and is attached to the distal-side connecting block and is attached to the base-side moving block. A guide that is fitted to the end side moving block side and moves obliquely, a movement restricting roller that restricts the movement of the tip side moving block, and the tip side moving block that is attached to the tip side moving block upward. It is characterized by comprising an upper end-side spring receiver that supports an urging spring from its upper end.

  With the above configuration, the guide of the distal end side connecting block is fitted to the proximal end side moving block side and pushed by the proximal end side moving block, so that the movement is restricted by the movement restricting roller and the distal end side moving block is Is moved up and down.

  The base end side moving block includes a moving base plate that supports the whole, two rails arranged along a feeding direction of the moving base plate, and a moving plate that is supported by the rail so as to be slidable in the feeding direction. And a guide that is attached to the lower surface of the moving plate and fits to the rail to support the moving plate so as to be slidable, and moves in the front end side in cooperation with the front end side connecting block of the front end side moving block. A base end side connecting block that moves the block up and down, an inclined rail that is provided on an inclined contact surface of the base end side connecting block and guides the top side moving block to move up and down; and By contacting the lower plate spring receiver, which is provided at a position facing the upper end spring receiver and urges the tip side moving block upward from the lower side, and the moving plate side, A contact at the tip of the probe block moves to a position directly above the electrode of the inspection object plate, and is further lowered to come into contact with the electrode of the inspection object plate and overdrive, and both ends of the moving plate A contact part that regulates the amount of movement of the movable plate in cooperation with the second stopper by contacting the second stopper, and is connected to the movable plate to move the movable plate forward And a third stopper that regulates the amount of feeding of the movable plate to the inspection target plate by the feeding mechanism, and restricts the rising position of the tip side moving block by a spring. It is desirable.

  With the above configuration, the moving plate is moved forward by the feeding mechanism until the contact portion comes into contact with the second stopper, so that the contact at the tip of the probe block is directly above the terminal of the inspection target plate. It moves down and is further lowered to come into contact with the terminal of the inspection object plate and overdrive is applied.

  The position adjusting mechanism includes two rails arranged in parallel in the left-right direction, a guide that is slidably fitted to the rail and supports the movable base plate so as to be slidable in the left-right direction, and is supported by the guide. And a moving mechanism that moves the moving base plate in the left-right direction.

  With the above configuration, the moving mechanism can move the moving base plate supported by the guide in the left-right direction to align the contact with the terminal.

  It is desirable to provide a movable frame mechanism that adjusts the opening by moving four frame plates according to different dimensions of the inspection target plates of different varieties.

  With the above configuration, the movable frame mechanism moves the frame plate according to different dimensions of the inspection target plate of different varieties, and adjusts the opening to the size of the inspection target plate.

  In the electrical inspection apparatus for performing inspection by adjusting the opening and adjusting the position of the contact according to different dimensions of the inspection target plates of different varieties, it is preferable that each movable probe unit mechanism is provided.

  With the above configuration, when the inspection target plate is replaced with a different size, the opening is adjusted by the movable probe unit mechanism and the position of the contact is adjusted.

  As described above, according to the present invention, the following effects can be obtained.

  The probe unit uses the alignment camera to copy the alignment mark on the inspection target plate, and the drive mechanism moves the probe unit in the longitudinal direction of the probe unit to inspect a plurality of contacts of the probe block. Since it matches with each electrode of a board, the shift | offset | difference with respect to each contact of each electrode by the thermal expansion etc. of a test object board can be absorbed.

  Since the drive mechanism of the contact unit supports the contacts and moves the contacts in a direction along one side of the inspection target plate, displacement of each electrode due to thermal expansion of the inspection target plate In addition, it is possible to absorb the displacement of each electrode due to the exchange of the type of the inspection object plate and to align each contact with each electrode.

  With the contact unit supporting the contact, the contact is aligned and fed out so as to be aligned with the electrode of the inspection target plate, and the contact is brought into contact with the electrode. The position displacement of the electrode due to the above can be absorbed, and the product type replacement operation can be quickly performed on the inspection target plates having different dimensions.

  In particular, since the plurality of contact units arranged on the frame plate of the movable frame mechanism individually align the contacts with respect to a large inspection target plate, the displacement due to thermal expansion is easily absorbed. In addition, it is possible to quickly change the product type.

  Position adjustment of the contact between the contact and the terminal is performed by the position adjustment mechanism, and the distal end side moving block is supported and fed out by the base end side moving block, and the contact of the probe unit is placed on the inspection target plate. Since the terminals are brought into contact with each other, positioning of the contact and the terminal can be easily and quickly performed with respect to the inspection target plate having different dimensions.

  In order to align the contact with the terminal by copying the alignment mark with the alignment camera and adjusting the misalignment between the alignment mark and the reference point to be zero. Positioning can be performed easily and quickly.

  When the guide of the distal end side connecting block is fitted to the proximal end side moving block side and pushed by the proximal end side moving block, the movement is restricted by the movement restricting roller, and the distal end side moving block moves up and down. Therefore, by simply pushing the distal end side connecting block with the proximal end side moving block, the contacts can be extended to the terminal side and lowered to be brought into contact with each other.

  By moving the moving plate forward by the feeding mechanism until the abutting portion comes into contact with the second stopper, the contact at the tip of the probe block moves to just above the terminal of the inspection target plate, Further, it is lowered downward and comes into contact with the terminal of the inspection object plate, so that overdrive is applied. Therefore, it is not necessary to make fine adjustments to the inspection object plate of different dimensions, and the product change operation can be performed quickly.

  Since the moving mechanism can move the moving base plate supported by the guide in the left-right direction to align the contact with the terminal, it is easy to align the contact with the terminal. It can be carried out.

  Since the movable frame mechanism moves the frame plate according to different dimensions of the inspection target plate of different types, and adjusts the opening to the size of the inspection target plate, it is possible to quickly perform the type replacement operation. it can.

  In the electrical inspection apparatus, when replacing the inspection target plate with a different size, the opening can be adjusted by the movable probe unit mechanism and the position of the contact can be adjusted. .

  Hereinafter, an electrical inspection apparatus including a movable probe unit mechanism according to an embodiment of the present invention will be described with reference to the accompanying drawings. Here, a liquid crystal panel will be described as an example of the inspection target plate. Moreover, since the whole structure of the electrical inspection apparatus which performs lighting inspection is substantially the same as the conventional electrical inspection apparatus mentioned above, the same code | symbol is attached | subjected to the same part and the description is abbreviate | omitted. Then, the movable probe unit mechanism, which is a characteristic part of the present invention, will be mainly described.

  As shown in FIGS. 1 and 2, the movable probe unit mechanism 21 adjusts the opening 23A (see FIG. 3) of the work table base 23 according to the different dimensions of the liquid crystal panels 22 of different varieties, and also has a probe needle ( (Not shown) is a mechanism for adjusting the position. The movable probe unit mechanism 21 includes a base plate 24 fixed to the frame portion of the electrical inspection apparatus 1, a top base 26 supported on the base plate 24 via a support column 25, and the base plate 24 and the top base 26. Are mounted on a base composed of a backlight 27 provided between them and a work table base 23 supported by the top base 26.

  The movable probe unit mechanism 21 includes a movable frame mechanism 30 and a contact unit 31.

  The movable frame mechanism 30 has an X-axis upper side panel receiver 75, an X-axis lower side panel receiver 80, a Y-axis left side panel receiver 84, and a Y-axis right side panel receiver 90 as frame plates according to different dimensions of the liquid crystal panels 22 of different types. Is a mechanism for adjusting the opening 23A of the work table base 23. As shown in FIGS. 3 and 4, the work table base 23 is formed in a rectangular plate shape, and a rectangular opening 23 </ b> A is provided at the center position thereof. The movable frame mechanism 30 is provided so as to overlap the work table base 23, and the opening 30A (see FIG. 1) of the movable frame mechanism 30 covering the opening 23A of the work table base 23 is adjusted according to the size of the liquid crystal panel 22. It has become so.

  As shown in FIGS. 1 to 4, the movable frame mechanism 30 includes a Y-axis moving mechanism 33 and an X-axis moving mechanism 34.

  The Y-axis moving mechanism 33 is a mechanism for adjusting the opening 30A of the movable frame mechanism 30 in the Y-axis direction (vertical direction in FIG. 1). The Y-axis moving mechanism 33 includes a rail 36, a guide 37, an upper base plate 38, a lower base plate 39, and a Y-axis drive unit 40.

  Two rails 36 are provided on the worktable base 23. Specifically, the two rails 36 are arranged in parallel in the Y-axis direction on both sides in the X-axis direction (left-right direction in FIG. 1) across the opening 23A of the work table base 23.

  The guide 37 is fitted to each rail 36 and supported so as to be slidable in the Y-axis direction.

  The upper base plate 38 is supported by the guide 37 and attached so as to be slidable in the Y-axis direction. Similarly to the upper base plate 38, the lower base plate 39 is supported by the guide 37 and is slidably attached in the Y-axis direction. The upper base plate 38 and the lower base plate 39 are disposed on both sides of the opening 23 </ b> A of the work table base 23.

  The Y-axis drive unit 40 is a mechanism for moving the upper base plate 38 and the lower base plate 39 in the Y-axis direction. The Y-axis drive unit 40 is provided with two for the upper base plate 38 and the lower base plate 39. The Y-axis drive unit 40 is disposed on the work table base 23 in parallel with the rail 36. The Y-axis drive unit 40 includes a ball screw 42, a bearing 43, a moving nut 44, and a drive motor 45.

  The ball screw 42 is a bar member whose outer peripheral surface is threaded. The bearing 43 is a member for rotatably supporting the ball screw 42 at both ends thereof. The ball screw 42 is rotatably supported by the bearings 43 at both ends thereof and disposed in the Y-axis direction. The moving nut 44 is a member for moving the upper base plate 38 and the lower base plate 39 in the Y-axis direction. The moving nut 44 is screwed into the ball screw 42 while being fixed to the upper base plate 38 and the lower base plate 39, and is moved in the Y-axis direction by the rotation of the ball screw 42. The drive motor 45 is a motor for rotationally driving the ball screw 42. The drive motor 45 is connected to one end of the ball screw 42 while being fixed to the work table base 23 side.

  The X-axis moving mechanism 34 is a mechanism for adjusting the opening 30 </ b> A of the movable frame mechanism 30 in the X-axis direction. As shown in FIGS. 2, 3, and 5, the X-axis moving mechanism 34 includes an X-axis upper frame 48, an X-axis lower frame 49, a Y-axis right frame 50, and a Y-axis left frame 51. The X-axis lower side drive unit 52 and the X-axis upper side drive unit 53 are configured. The X-axis upper side frame part 48, the X-axis lower side frame part 49, the Y-axis right side frame part 50, and the Y-axis left side frame part 51 are provided so as to cover the opening 23A of the work table base 23.

  The X-axis upper side frame portion 48 is a rod-shaped member disposed in the X-axis direction. The X-axis upper side frame portion 48 is formed in a C-shaped cross section. Specifically, the X-axis upper side frame portion 48 is formed in a rectangular cylinder shape, and a slit 48A is provided over the entire length of the inner side surface (the lower left side surface in FIG. 5). A rail 54 (see FIG. 2) is provided on the upper side surface inside the X-axis upper frame portion 48 over the entire length thereof. Two guides 55 are provided at one end portion (right end portion in FIG. 5) of the X-axis upper side frame portion 48. One end of the X-axis upper frame portion 48 is enlarged in the Y-axis direction, and two guides 55 are arranged in series in the Y-axis direction. A rail 65 of a Y-axis right side frame portion 50, which will be described later, is fitted to the two guides 55, and the Y-axis right side frame portion 50 is supported by one end portion of the X-axis upper side frame portion 48 so as to be slidable in the Y-axis direction. ing.

  A rail 56 (see FIG. 2) is provided on the lower side surface of the X-axis upper side frame portion 48 over the entire length thereof, and is fitted to a guide 57 provided on the upper base plate 38. Thereby, the X-axis upper side frame portion 48 is supported so as to be slidable in the X-axis direction with respect to the upper base plate 38.

  The X-axis lower frame portion 49 is a rod-like member disposed in the X-axis direction in parallel with the X-axis upper frame portion 48. The X-axis lower side frame portion 49 is formed in a C-shaped cross section like the X-axis upper side frame portion 48. Specifically, the X-axis lower side frame portion 49 is formed in a rectangular cylinder shape, and is provided with a slit 49A over the entire inner length (upper right side in FIG. 4). A rail 60 is provided over the entire upper surface of the X-axis lower frame 49.

  The other end of the X-axis lower frame portion 49 is enlarged in the Y-axis direction, and two guides (not shown) are arranged in series in the Y-axis direction. A rail 61 of a Y-axis left side frame portion 51, which will be described later, is fitted to these two guides, and the Y-axis left side frame portion 51 is supported by the other end portion of the X-axis lower side frame portion 49 so as to be slidable in the Y-axis direction. ing. On the lower side surface of the X-axis lower frame portion 49, a rail 62 is provided over the entire length, and is fitted to a guide 63 provided on the lower base plate 39. Thus, the X-axis lower frame portion 49 is supported so as to be slidable in the X-axis direction with respect to the lower base plate 39.

  The Y-axis right side frame portion 50 is a rod-shaped member disposed in the Y-axis direction. The Y-axis right side frame portion 50 is formed in a substantially quadrangular cross section. Specifically, the Y-axis right side frame portion 50 is formed in a rectangular bar shape, and a rail groove 50A is provided over the entire length of the lower side thereof. A rail 65 is provided in the rail groove 50A over its entire length. The rail 65 is fitted to the two guides 55 of the X-axis upper frame portion 48, and the Y-axis right frame portion 50 is supported so as to be slidable in the Y-axis direction with respect to the X-axis upper frame portion 48.

  A locking portion 66 to the X-axis lower side frame portion 49 is provided at one end of the Y-axis right side frame portion 50 (the lower left side end in FIG. 5). The locking portion 66 includes a lower plate portion 67 extending from one end portion of the Y-axis right side frame portion 50 and a guide 68 provided on the upper side surface of the lower plate portion 67. The lower plate portion 67 is inserted into the inside of the slit 49A of the X-axis lower frame portion 49, and the guide 68 is fitted to the rail 60 inside the X-axis lower frame portion 49. Thereby, the Y-axis right side frame part 50 is supported by the X-axis lower side frame part 49 so as to be slidable in the X-axis direction in a state where movement in the Y-axis direction is restricted.

  The Y-axis left side frame portion 51 is a rod-like member disposed in the Y-axis direction, like the Y-axis right side frame portion 50. The Y-axis left side frame portion 51 is formed in a substantially quadrangular cross section, and a rail groove 51A is provided over the entire length of the lower side thereof. A rail 61 is provided in the rail groove 51A over its entire length. The rail 61 is fitted to two guides of the X-axis lower frame portion 49, and the Y-axis left frame portion 51 is supported so as to be slidable in the Y-axis direction.

  At the other end of the Y-axis left side frame portion 51, a locking portion (not shown) to the X-axis upper side frame portion 48 is provided. This locking portion is configured in the same manner as the locking portion 66 of the Y-axis right side frame portion 50. The locking portion supports the Y-axis left side frame portion 51 with respect to the X-axis upper side frame portion 48 so as to be slidable in the X-axis direction in a state where movement in the Y-axis direction is restricted.

  The X-axis lower side drive unit 52 is a device for moving the X-axis lower side frame portion 49 in the X-axis direction. The X-axis lower side drive unit 52 includes a ball screw 70, a bearing 71, a moving nut 72, and a drive motor 73.

  The ball screw 70 is a bar member whose outer peripheral surface is threaded. The ball screw 70 is provided on the lower base plate 39 in the X-axis direction. The bearing 71 is a member for rotatably supporting the ball screw 70 at both ends thereof. The moving nut 72 is a member for moving the X-axis lower frame portion 49 in the X-axis direction. The moving nut 72 is screwed into the ball screw 70 while being fixed to the X-axis lower frame portion 49, and is moved in the X-axis direction by the rotation of the ball screw 70. The drive motor 73 is a motor for rotationally driving the ball screw 70. The drive motor 73 is connected to one end of the ball screw 70 while being fixed to the bearing 71.

  The X-axis upper side drive unit 53 is a device for moving the X-axis upper side frame unit 48 in the X-axis direction. Similar to the X-axis lower side drive unit 52, the X-axis upper side drive unit 53 includes a ball screw, a bearing, a moving nut, and a drive motor (all not shown).

  An X-axis upper side panel receiver 75 is attached to the X-axis upper side frame portion 48. The X-axis upper side panel receiver 75 is a frame plate for receiving the liquid crystal panel 22 to be inspected and supporting the contact unit 31. The X-axis upper side panel receiver 75 includes a panel receiver 76 and a contact unit support part 77.

  The panel receiving portion 76 is a portion for supporting the liquid crystal panel 22 to be inspected. The panel receiving portion 76 is provided by raising the tip side (liquid crystal panel 22 side) portion of the X-axis upper side panel receiving portion 75. The panel receiving portion 76 is provided with panel pushers 78 for panel positioning at three positions.

  The contact unit support part 77 is a flat surface-like part for attaching the contact unit 31. The contact unit support portion 77 is formed on the base end side of the panel receiving portion 76.

  An X-axis lower side panel receiver 80 (see FIG. 1) is attached to the X-axis lower side frame portion 49. The X-axis lower side panel receiver 80 is a frame plate for receiving the liquid crystal panel 22 to be inspected. The X-axis lower side panel receiver 80 includes a panel receiver 81. The panel receiving portion 81 is provided with panel positioning pins 82 at three positions.

  A Y-axis left side panel receiver 84 is attached to the Y-axis left side frame portion 51. The Y-axis left side panel receiver 84 is a frame plate for receiving the liquid crystal panel 22 to be inspected and supporting the contact unit. The Y-axis left side panel receiver 84 is composed of a panel receiver 85 and a contact unit support 86.

  The panel receiving portion 85 is a frame plate for supporting the liquid crystal panel 22 to be inspected. This panel receiving portion 85 is provided by raising the tip side (liquid crystal panel 22 side) of the Y-axis left side panel receiving 84. Panel pushers 87 for positioning the panel are provided at three positions on the panel receiving portion.

  The contact unit support portion 86 is a flat surface portion for attaching the contact unit 31. The contact unit support portion 86 is formed on the base end side of the panel receiving portion 85.

  A Y-axis right side panel receiver 90 is attached to the Y-axis right side frame portion 50. The Y-axis right side panel receiver 90 is a frame plate for receiving the liquid crystal panel 22 to be inspected. The Y-axis right side panel receiver 90 includes a panel receiver 91. The panel receiving portion 91 is provided with panel positioning pins 92 at three positions.

  The contact unit 31 is a mechanism for supporting a probe needle (not shown) and aligning and bringing it into contact with a large number of electrodes (terminals) 22A of the liquid crystal panel 22. The contact unit 31 is integrally attached to each panel receiver of the movable frame mechanism 30. Thus, the work table base 23 and the probe unit 95 are configured as an integrated apparatus. As shown in FIGS. 6 to 8, the contact unit 31 includes a probe unit 95, a distal end side moving block 96, a proximal end side moving block 97, and a position adjusting mechanism 98.

  The probe unit 95 is a member for supporting a large number of probe needles and contacting the terminals 22 </ b> A of the liquid crystal panel 22. The probe unit 95 includes a probe base 100, a probe block 101, and an alignment camera 102.

  The probe base 100 is a plate material that integrally supports the probe block 101 and the alignment camera 102. The probe base 100 is attached to the distal end side moving block 96.

  The probe block 101 is a member for supporting a large number of probe needles (not shown) at the tip thereof and contacting the terminals 22A of the liquid crystal panel 22 respectively. The probe block 101 has an L-shaped side surface. The L-shaped probe block 101 is configured such that its proximal end is supported by the probe base 100 and its distal end extends downward (to the side of the mounted liquid crystal panel) from the probe base 100. As many probe blocks 101 as the number of terminals of the liquid crystal panel are attached. In the present embodiment, three probe blocks are attached to the probe base 100, but one, two, or four or more probe blocks 101 may be attached to the probe base 100. Each probe block 101 is attached to a set position of the probe base 100.

  The alignment camera 102 is a camera for copying an alignment mark 22B for aligning the probe needle at the tip of the probe block with the terminal position of the liquid crystal panel. The alignment camera 102 is attached to the set position of the probe base 100. As a result, the alignment camera 102 adjusts its position with respect to the alignment mark 22B (see FIG. 12) of the liquid crystal panel 22, so that each probe block 101 disposed at a set interval with respect to the alignment camera 102 is adjusted. The position can be adjusted to a position aligned with the terminals of the liquid crystal panel.

  At this time, the number of probe blocks 101 installed on the probe base 100 is set according to the installation interval of the probe blocks 101. This is because the amount of change due to thermal expansion of the liquid crystal panel 22 (the amount of movement of the terminal 22A) is proportional to the length (interval). As the size of the liquid crystal panel 22 increases, the amount of thermal expansion (the amount of movement of the terminal 22A) changes in proportion to the size. For example, in the case of a liquid crystal panel having the same thermal expansion coefficient, if the dimensions are doubled, the thermal expansion amount is also doubled. As shown in FIG. 13, when six probe blocks 101 are arranged and the number of probe blocks 101 is not changed, when the size of the liquid crystal panel is doubled, the interval between the probe blocks 101 is as follows. Doubled. Thereby, the interval between the probe block 101 adjacent to the alignment camera 102 and the farthest probe block 101 is also doubled.

  And since the probe base 100 is hardly influenced by heat, there is almost no thermal expansion, but the thermal expansion amount of the liquid crystal panel 22 is doubled. That is, when the probe needle of the probe block 101 adjacent to the alignment camera 102 and the corresponding terminal 22A are aligned, the probe block 101 farthest from the alignment camera 102 and the corresponding terminal 22A are greatly displaced. . This is because, on the probe block 101 side, the distance between the probe block 101 adjacent to the alignment camera 102 and the farthest probe block 101 hardly changes, while on the liquid crystal panel 22 side, This is because the amount of thermal expansion between the terminals 22A corresponding to each probe block 101 doubles as the size of the liquid crystal panel doubles.

  As a result, the probe needle and the terminal 22A may be completely displaced as indicated by point A in FIG. In this case, even if all the probe blocks 101 are shifted simultaneously with the probe base 100, it is impossible to align each probe needle with each terminal 22A.

  For this reason, not all of the probe blocks 101 are integrally attached as shown in FIG. 13, but three of them are attached separately as shown in FIG. That is, three probe blocks 101 are attached to one contact unit 31. Note that the amount of thermal expansion varies depending on the amount of heat generated by the backlight 27, the dimensions of the liquid crystal panel 22, and the like, so the number of probe blocks 101 disposed on the probe base 100 is 1, 2 or 2, depending on various conditions. In some cases, it may be set to four or more.

  When two contact units 31 are arranged, as shown in FIG. 14, two probe units 95 are arranged, and the alignment camera 102 of each probe unit 95 aligns each probe unit 95. The thermal expansion of the liquid crystal panel 22 is absorbed by aligning the probe needle of each probe block 101 with each terminal 22A.

  The distal-side moving block 96 is a member for supporting the probe unit 95 and bringing the probe needle into contact with each terminal 22 </ b> A of the liquid crystal panel 22. The front end side moving block 96 includes a support plate 105, a front end side connecting block 106, a guide 107, a movement restricting roller 108, and an upper end side spring receiver 109.

  The support plate 105 is a plate material for supporting the probe unit 95. The support plate 105 is formed in an L-shaped cross section, and a probe unit 95 is attached thereto. Specifically, the lower surface and the rear surface of the probe base 100 of the probe unit 95 are in direct contact with the support plate 105 having an L-shaped cross section, and the probe needle is positioned in two directions. That is, the probe needle is positioned in two directions, that is, the position of the probe needle in the feeding direction (right direction in FIG. 8) with respect to the support plate 105 and the position of the probe needle with respect to the support plate 105 in the vertical direction. As a result, the position adjustment mechanism 98 positions the probe unit 95 in the longitudinal direction (left-right direction in FIG. 11), thereby positioning the probe needle in the XYZ directions. Accordingly, the probe needle is accurately positioned and brought into contact with the terminal 22A of the liquid crystal panel 22 at the final position (the position in FIG. 10) where the distal end side moving block 96 is extended.

  The front end side connecting block 106 is connected to a base end side connecting block 119 of a base end side moving block 97 described later and moves up and down. Specifically, the distal end side connection block 106 is formed in a wedge shape and is integrally provided on the back surface (left side surface in FIG. 8) of the support plate 105, and the contact surface with the proximal end side connection block 119 is oblique. (The upper end in FIG. 8 is inclined rightward).

  The guide 107 is fitted to the inclined rail 120 of the base end side connection block 119 of the base end side moving block 97 to be described later and moves obliquely. The guide 107 is attached to the inclined surface of the distal end side connecting block 106, and is fitted to the inclined rail 120 of the proximal end side connecting block 119 to move obliquely, thereby moving the distal end side connecting block 106 up and down. ing.

  The movement restricting roller 108 is a roller for restricting the movement of the distal end side moving block 96. The movement restricting roller 108 is attached to the tip of the support column 111 disposed in the horizontal direction. The movement restricting roller 108 abuts on a third stopper 125 of a base end side moving block 97 to be described later, thereby restricting movement of the leading end side moving block 96 in the feeding direction and moving the leading end side moving block 96 in the vertical direction. Is acceptable. Further, the movement restricting roller 108 is set to come into contact with the third stopper 125 of the base end side moving block 97 so that the probe needle moves to just above the terminal 22A of the liquid crystal panel 22 and stops.

  The upper end side spring receiver 109 is a member that is attached to the distal end side moving block 96 and supports a spring 126 that urges the distal end side moving block 96 upward from the upper end thereof. By supporting the upper end portion of the spring 126 by the upper end side spring receiver 109, the front end side moving block 96 is urged upward by the urging force of the spring 126.

  The proximal-side moving block 97 is a mechanism for supporting and feeding the distal-side moving block 96 and bringing the probe needle at the distal end of the probe unit 95 into contact with the terminal 22 </ b> A of the liquid crystal panel 22. The base end side moving block 97 includes a moving base plate 115, a rail 116, a guide 117, a moving plate 118, a base end side connecting block 119, an inclined rail 120, a lower end side spring receiver 121, and a second end. The stopper 122, the contact portion 123, the feeding mechanism 124 (return cylinder), and a third stopper 125 are configured.

  The moving base plate 115 is a plate material for supporting the whole. The moving base plate 115 is supported by the position adjustment mechanism 98. Two rails 116 are arranged along the extending direction of the movable base plate 115. The guide 117 is attached to the lower surface of the moving plate 118. The guide 117 is slidably fitted to the rail 116 and supports the moving plate 118. The moving plate 118 is a plate material that is fed to the liquid crystal panel 22 side. The moving plate 118 has an L-shaped cross section, and a guide 117 is attached to the lower surface of the flat plate portion 118A. Accordingly, the moving plate 118 is supported so as to be slidable in the feeding direction via the guide 117 supported by the rail 116.

  The proximal end side connecting block 119 is a member for moving the distal end side moving block 96 up and down in cooperation with the distal end side connecting block 106 of the distal end side moving block 96. The base end side connection block 119 is provided at a position facing the front end side connection block 106 of the front end side moving block 96 in the vertical plate portion 118 </ b> B of the moving plate 118. The proximal end side connection block 119 is formed in a wedge shape and includes a contact surface inclined so as to be aligned with the contact surface of the front end side connection block 106.

  The inclined rail 120 is a rail for guiding the movement of the distal end side moving block 96 up and down. The inclined rail 120 is provided on the inclined contact surface of the proximal end side connecting block 119.

  The lower end side spring receiver 121 is a member for supporting the spring 126 that urges the distal end side moving block 96 upward from below. The lower end side spring receiver 121 is provided at a position facing the upper end side spring receiver 109 below the vertical plate portion 118B of the moving plate 118. Then, the lower end side spring receiver 121 supports the lower end portion of the spring 126, and biases the distal end side moving block 96 upward via the upper end side spring receiver 109 by an urging force to the spring 126. Yes.

  The second stopper 122 is a stopper for restricting the movement of the moving plate 118. The position of the second stopper 122 is brought into contact with the contact portion 123 of the moving plate 118 so that the probe needle at the tip of the probe block 101 moves to a position directly above the terminal 22A of the liquid crystal panel 22 and further descends downward. Then, it is set so that the terminal 22A of the liquid crystal panel 22 is brought into contact with the overdrive.

  The contact portion 123 is a member for regulating the movement of the moving plate 118 in cooperation with the second stopper 122. The contact portions 123 are provided at both end portions of the moving plate 118, respectively, and are in contact with the second stoppers 122, thereby restricting the moving amount of the moving plate 118 as described above.

  The feeding mechanism 124 is a mechanism for feeding the moving plate 118 forward. The feeding mechanism 124 is constituted by a return cylinder. The return cylinder is fixed to the moving base plate 115, the connecting rod of the return cylinder is connected to the moving plate 118, and the moving plate 118 is moved by the movement of the connecting rod from the return cylinder. It has become.

  The third stopper 125 is a member for restricting the amount of movement of the moving plate 118 toward the liquid crystal panel 22 and for restricting the ascending position of the distal end side moving block 96 by the spring 126. The third stopper 125 includes a restricting support portion 125A and a restricting roller portion 125B. The restricting strut portion 125 </ b> A is disposed in the vertical direction and is fixed to the moving base plate 115. When the movement restricting roller 108 comes into contact with the restricting support portion 125A, the amount of extension of the front end side moving block 96 toward the liquid crystal panel 22 is restricted, and the movement of the front end side moving block 96 in the vertical direction is allowed. The The restricting roller portion 125B is provided at the upper end portion of the restricting strut portion 125A and comes into contact with the support column 111 of the distal end side moving block 96. The restriction roller portion 125B is in contact with the support column 111, thereby restricting the upper limit of the distal end side moving block 96 pushed up by the spring 126.

  The position adjustment mechanism 98 is a drive mechanism for moving the probe unit 95 in the left-right direction (longitudinal direction of the probe unit along one side of the liquid crystal panel 22) via the moving base plate 115. The position adjusting mechanism 98 absorbs the displacement of each terminal 22 </ b> A due to the thermal expansion of the liquid crystal panel 22 and the difference in product type by adjusting the position of the probe unit 95. The position adjusting mechanism 98 includes a rail 131, a guide 132, and a moving mechanism 133. Two rails 131 are arranged on the panel receivers 75 and 84 in parallel in the left-right direction. The guide 132 is slidably fitted to the rail 131. The guide 132 is attached to the moving base plate 115 and supports the moving base plate 115 so as to be slidable in the left-right direction. The moving mechanism 133 is a mechanism for moving the moving base plate 115 in the left-right direction. The moving mechanism 133 includes a ball screw 135, a bearing 136, a moving nut 137, and a drive motor 138.

  The ball screw 135 is a bar material in which a thread is engraved on the outer peripheral surface. The bearing 136 is a member for rotatably supporting the ball screw 135 at both ends thereof. The moving nut 137 is a member for moving the moving base plate 115 in the left-right direction. The moving nut 137 is screwed into the ball screw 135 while being fixed to the moving base plate 115, and is moved in the left-right direction by the rotation of the ball screw 135. The drive motor 138 is a motor for driving the ball screw 135 to rotate. The drive motor 138 is connected to one end of the ball screw 135 while being fixed to the bearing 136.

  Each of the drive motors is connected to a control unit (not shown), and the drive amount is accurately controlled by the control unit. There are automatic control and manual control as control methods in this control unit. In the case of automatic control, the control amount of each drive motor is programmed in advance according to the type of the liquid crystal panel 22, and each drive motor is controlled by this program. In the case of manual control, the operator sequentially inputs the control amount of each drive motor according to the type of the liquid crystal panel 22, and each drive motor is controlled. In addition, the drive motor 138 of the position adjustment mechanism 98 is automatically controlled so as to be linked to the alignment camera 102 of the probe unit 95 so that the amount of deviation between the reference point of the alignment camera 102 and the alignment mark 22B of the liquid crystal panel 22 is zero. Or it is manually controlled.

[Operation]
The electrical inspection apparatus configured as described above operates as follows.

  When inspecting different types of liquid crystal panels 22, first, the movable frame mechanism 30 of the movable probe unit mechanism 21 is adjusted to the dimensions of the liquid crystal panel 22. In the movable frame mechanism 30, the Y-axis moving mechanism 33 and the X-axis moving mechanism 34 are operated to adjust the opening 30 </ b> A to the size of the liquid crystal panel 22.

  In the Y-axis moving mechanism 33, the drive motor 45 of the Y-axis drive unit 40 is operated, and the upper base plate 38 and the lower base plate 39 are set in the Y-axis direction by a set amount via the ball screw 42 and the moving nut 44. Moved. Thereby, the interval between the X-axis upper side panel receiver 75 and the X-axis lower side panel receiver 80 to which the upper base plate 38 and the lower base plate 39 are respectively attached is matched with the liquid crystal panel 22.

  At this time, the Y-axis left side panel receiver 84 is pushed toward the X-axis upper side panel receiver 75 and moves downward in the Y-axis direction, and allows the X-axis lower side panel receiver 80 to move upward in the Y-axis direction. That is, the Y-axis left side frame portion 51 that supports the Y-axis left side panel receiver 84 is pushed by the X-axis upper side frame portion 48 that supports the X-axis upper side panel receiver 75 and moves downward in the Y-axis direction. The panel receiver 84 is moved downward in the Y-axis direction. The X-axis lower frame 49 that supports the X-axis lower panel receiver 80 is supported so as to be slidable in the Y-axis direction with respect to the Y-axis left frame 51, so that the Y-axis left frame 51 is the X-axis upper frame. The Y-axis left side panel support 84 is moved downward in the Y-axis direction by being pushed by the portion 48 and moved downward in the Y-axis direction, and is supported by the Y-axis left-side frame portion 51 so as to be slidable in the Y-axis direction. The X-axis lower side panel receiver 80 is moved upward in the Y-axis direction by moving the lower-axis side frame portion 49 upward in the Y-axis direction.

  Similarly to the Y-axis left side panel receiver 84, the Y-axis right side panel receiver 90 is pushed toward the X-axis lower side panel receiver 80 and moves upward in the Y-axis direction. Allow downward movement.

  Thereby, the interval between the X-axis upper side panel receiver 75 and the X-axis lower side panel receiver 80 is matched with the dimension of the liquid crystal panel 22 in the Y-axis direction.

  Next, the drive motor 73 of the X-axis lower side drive unit 52 of the X-axis movement mechanism 34 is operated, and the X-axis lower side frame portion 49 is moved in the X-axis direction via the ball screw 70 and the moving nut 72. Thereby, the Y-axis left side frame part 51 is moved in the X-axis direction by being pulled by the X-axis lower side frame part 49. On the other hand, the Y-axis right side frame part 50 is moved in the direction opposite to the movement of the X-axis lower side frame part 49.

  A drive motor (not shown) of the X-axis upper side drive unit 53 of the X-axis moving mechanism 34 is operated, and the X-axis upper side frame unit 48 is moved in the X-axis direction via the ball screw and the moving nut. Thereby, the Y-axis right side frame part 50 is moved in the X-axis direction by being pulled by the X-axis upper side frame part 48. On the other hand, the Y-axis left side frame part 51 is moved in the direction opposite to the movement of the X-axis upper side frame part 48.

  Thereby, the Y-axis left side panel receiver 84 and the Y-axis right side panel receiver 90 are matched with the dimension of the liquid crystal panel 22 in the X-axis direction.

  In this state, the panel pusher 78 of the X-axis upper side panel receiver 75, the panel pusher 87 of the Y-axis left side panel receiver 84, the panel positioning pin 82 of the X-axis lower side panel receiver 80, and the panel positioning of the Y-axis right side panel receiver 90. With the pin 92, the liquid crystal panel 22 is aligned and supported at an accurate position.

  Next, the movable probe unit mechanism 21 aligns the probe needle with the terminal 22 </ b> A of the liquid crystal panel 22. In this case, the probe needle feed-out direction and the height direction are simultaneously aligned when the X-axis upper side panel receiver 75 and the Y-axis left side panel receiver 84 are aligned. That is, the liquid crystal panel 22 abuts against the panel pusher 78 of the X-axis upper side panel receiver 75 and the panel pusher 87 of the Y-axis left side panel receiver 84, so that there is an interval in the extending direction between the contact unit 31 and the liquid crystal panel 22. The set value is set, and the probe needle is aligned in the feeding direction. Further, the liquid crystal panel 22 is placed on the panel receiving portion 76 of the X-axis upper side panel receiver 75 and the panel receiving portion 85 of the Y-axis left side panel receiver 84, so that the contact unit 31 and the liquid crystal panel 22 are vertically moved. The interval in the direction becomes a set value, and the vertical alignment of the probe needle is performed.

  For this reason, in the contact unit 31, alignment is mainly performed in the left-right direction of the probe needle. Specifically, as shown in FIGS. 11 and 12, the alignment camera 102 of the probe unit 95 copies the alignment mark 22B of the liquid crystal panel 22, measures the amount of deviation from the reference point by image processing or the like, and the amount of deviation. The drive motor 138 is controlled so as to make zero. As a result, the ball screw 135 rotates by a set angle (an angle at which the shift amount becomes zero) to move the moving nut 137 by the set amount. As a result, the movable base plate 115 moves left and right by a set amount, and the probe needles of the probe block 101 are aligned with the terminals 22 </ b> A of the liquid crystal panel 22.

  The alignment of the probe needle of the contact unit 31 in the left-right direction is performed when the product type is changed, and also when the terminal 22A is displaced due to thermal expansion of the liquid crystal panel 22. It may be set so that the alignment camera 102 constantly monitors and fine adjustment is always performed under the control of the control unit. In particular, the liquid crystal panel 22 changes its dimensions due to thermal expansion immediately after installation and after being heated by the backlight 27. Therefore, the alignment camera 102 monitors the position of the probe needle constantly or periodically. By setting to finely adjust always or periodically, the influence of thermal expansion can be absorbed and each probe needle can be adjusted to an accurate position with respect to each terminal 22A. It may be adjusted in advance to a position that allows for thermal expansion.

  Next, an inspection is performed by bringing the probe needle into contact with the terminal 22A of the liquid crystal panel 22.

  In this case, first, from the retracted state of FIG. 8, the leading end side moving block 96 is fed out to the liquid crystal panel 22 side by the feeding mechanism 124 of the base end side moving block 97. Specifically, the moving plate 118 is pushed out by the feeding mechanism 124. As a result, as shown in FIG. 9, the moving plate 118 is pushed out until the movement restricting roller 108 of the distal end side moving block 96 comes into contact with the restricting support 125 </ b> A of the third stopper 125. The payout stops.

  Further, when the moving plate 118 is pushed out by the feeding mechanism 124, the guide 107 of the distal end side connecting block 106 fitted to the inclined rail 120 of the proximal end side connecting block 119 is pushed downward along the inclination, and the third stopper 125. Supported by the movement restricting roller 108 in contact with the restricting support 125A, the leading end side moving block 96 descends downward. The tip side moving block 96 descends until the contact portion 123 of the moving plate 118 contacts the second stopper 122, and the probe needle contacts the terminal 22A of the liquid crystal panel 22, and overdrive is applied.

  A lighting test is performed in this state.

  When the lighting test is completed, the above steps are reversed to return to the standby state.

[effect]
As described above, the probe unit 95 uses the alignment camera 102 to copy the alignment mark 22B of the liquid crystal panel 22, and moves the probe unit 95 in the left-right direction with reference to the alignment mark 22B. In order to align with each terminal 22A of 22, the displacement of each terminal 22A due to thermal expansion of the liquid crystal panel 22 and the displacement of each terminal 22A due to the exchange of the product type of the liquid crystal panel 22 are absorbed, and each probe needle is aligned with each terminal 22A. Can be made.

  Further, since the movable frame mechanism 30 can adjust the opening 23A of the work table base 23 according to different dimensions of the liquid crystal panels 22 of different types, the work table and the like are exchanged according to the liquid crystal panels 22 of different types. This eliminates the need for the liquid crystal panel 22 of different varieties, and enables quick response. As a result, the workability at the time of changing the product type of the liquid crystal panel 22 is greatly improved.

  Since the probe unit 95 has a block unit structure, it is not necessary to replace heavy objects, and the workability when changing the type of the liquid crystal panel 22 is greatly improved.

  It is not necessary to produce a large probe unit base for the large liquid crystal panel 22, and the running cost can be reduced.

  Even if the liquid crystal panel 22 becomes large, there is no need to make the probe unit, work table, etc. large, so there is no need to take into account load imbalance, and various rigidity such as frame rigidity and guide rigidity are designed to be low. Thus, the weight of the entire apparatus can be reduced and the manufacturing cost can be reduced.

  Further, since distortion due to load deviation or the like is reduced, reliability at the time of contact between the probe needle and the terminal can be improved.

  Since the probe needle of the probe block 101 can be accurately aligned with the terminal 22A of the liquid crystal panel 22 by the contact unit 31, even when the liquid crystal panel 22 expands due to the heat of the backlight, it can be easily aligned. can do.

  The movable frame mechanism 30 includes a Y-axis moving mechanism 33 that adjusts the opening 23A in the Y-axis direction and an X-axis moving mechanism 34 that adjusts the opening 23A in the X-axis direction. The Y-axis moving mechanism 33 adjusts the opening 23A in the Y-axis direction, and the X-axis moving mechanism 34 adjusts the opening 23A in the X-axis direction. As a result, the opening 23A can easily correspond to different dimensions of the liquid crystal panels 22 of different varieties.

  The Y-axis moving mechanism 33 includes a rail 36, a guide 37, an upper base plate 38, a lower base plate 39, and a Y-axis drive unit 40, and the rail 36 has the opening 23A. Two guides 37 are arranged in parallel in the Y-axis direction on both sides in the X-axis direction, and the guide 37 is fitted to each rail 36 and supported so as to be slidable in the Y-axis direction, and the upper base plate 38. Is supported by the guide 37 and is slidable in the Y-axis direction, and the lower base plate 39 is supported by the guide 37 and is slidable in the Y-axis direction, like the upper base plate 38. The Y-axis drive unit 40 is attached so as to move the upper base plate 38 and the lower base plate 39 in the Y-axis direction. With this configuration, the Y-axis drive unit 40 can move the guide 37. In The upper base plate 38 held and slidably attached in the Y-axis direction and the lower base plate 39 supported by the guide 37 and slidably attached in the Y-axis direction are moved in the Y-axis direction. As a result, the opening 23A is adjusted in the Y-axis direction.

  As a result, the Y-axis drive unit 40 supports the upper base plate 38 supported by the guide 37 and slidably mounted in the Y-axis direction, and is supported by the guide 37 and slidably mounted in the Y-axis direction. In order to adjust the Y-axis direction of the opening 23A by moving the lower base plate 39 in the Y-axis direction, the dimension of the Y-axis direction of the opening 23A is set to be different from that of the liquid crystal panel 22 of a different product type. Different dimensions can easily be accommodated.

  The X-axis moving mechanism 34 includes an X-axis upper frame 48, an X-axis lower frame 49, a Y-axis right frame 50, a Y-axis left frame 51, an X-axis lower drive unit 52, and an X-axis. The X-axis upper side frame portion 48 is disposed in the X-axis direction and is slidably supported in the X-axis direction, and the Y-axis right-side frame portion 50 is provided at one end thereof. The X-axis lower frame portion 49 is supported in a slidable manner in the X-axis direction in parallel with the X-axis upper frame portion 48 and is slidably supported in the X-axis direction. The Y-axis left side frame portion 51 is slidably supported at the end portion in the Y-axis direction, and the Y-axis right side frame portion 50 is disposed in the Y-axis direction and is arranged on the X-axis upper side frame portion 48 in the Y-axis direction. In a slidably supported state, Is supported by the X-axis lower frame portion 49 so as to be slidable in the X-axis direction, and the Y-axis left-side frame portion 51 is disposed in the Y-axis direction in the same manner as the Y-axis right-side frame portion 50. The other end is supported by the X-axis upper frame 48 so as to be slidable in the X-axis direction while being supported by the X-axis lower frame 49 so as to be slidable in the Y-axis direction. The X-axis lower-side frame portion 49 is moved in the X-axis direction, and the X-axis upper-side drive portion 53 moves the X-axis upper-side frame portion 48 in the X-axis direction, whereby the opening 23A in the X-axis direction is moved. Make adjustments.

  As a result, the dimension of the opening 23A in the X-axis direction can easily correspond to the different dimensions of the liquid crystal panels 22 of different varieties.

It is a top view which shows the movable probe unit mechanism of the electrical inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the movable probe unit mechanism of the electrical inspection apparatus which concerns on embodiment of this invention. It is a partially broken perspective view which shows the movable probe unit mechanism of the electrical inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the Y-axis moving mechanism of the electrical inspection apparatus which concerns on embodiment of this invention. It is a partially broken perspective view which shows the X-axis moving mechanism of the electrical inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the contact unit of the electrical inspection apparatus which concerns on embodiment of this invention. It is a partially broken perspective view which shows the contact unit of the electrical inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the contact unit of the retracted state of the electrical inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the contact unit of the extension state of the electrical inspection apparatus which concerns on embodiment of this invention. It is a side view which shows the contact unit of the contact state of the electrical inspection apparatus which concerns on embodiment of this invention. It is a top view which shows the contact unit of the contact state of the electrical inspection apparatus which concerns on embodiment of this invention. It is a schematic plan view which shows the positioning operation | movement of the contact unit of the electrical inspection apparatus which concerns on embodiment of this invention. It is a top view which shows the probe unit of the conventional electrical inspection apparatus. It is a top view which shows the probe unit of the electrical inspection apparatus which concerns on embodiment of this invention.

Explanation of symbols

1: electrical inspection device, 2: panel setting unit, 3: measurement unit, 21: movable probe unit mechanism, 22: liquid crystal panel, 23: worktable base, 23A: opening, 24: base plate, 25: support column, 26 : Top base, 27: Backlight, 30: Movable frame mechanism, 30A: Opening, 31: Contact unit, 33: Y axis moving mechanism, 34: X axis moving mechanism, 36: Rail, 37: Guide, 38: Upper base Plate: 39: Lower base plate, 40: Y-axis drive unit, 42: Ball screw, 43: Bearing, 44: Moving nut, 45: Drive motor, 48: X-axis upper frame, 48A: Slit, 49: X-axis Lower side frame part, 49A: slit, 50: Y-axis right side frame part, 50A: rail groove, 51: Y-axis left side frame part, 51A: rail groove, 52: X-axis lower side drive part, 53 X-axis upper side drive part, 54: rail, 55: guide, 56: rail, 60: rail, 61: rail, 62: rail, 63: guide, 65: rail, 66: locking part, 67: lower plate part, 68: guide, 70: ball screw, 71: bearing, 72: moving nut, 73: drive motor, 75: X-axis upper panel receiver, 76: panel receiver, 77: contact unit support, 78: panel pusher, 80: X-axis lower panel receiver, 81: panel receiver, 82: panel positioning pin, 84: Y-axis left panel receiver, 85: panel receiver, 86: contact unit support, 87: panel pusher, 90: Y-axis right panel 91: Panel receiving portion, 92: Panel positioning pin, 95: Probe unit, 96: Front end side moving block, 97: Base end side moving block, 8: Position adjustment mechanism, 100: Probe base, 101: Probe block, 102: Alignment camera, 105: Support plate, 106: Tip side connection block, 107: Guide, 108: Movement restriction roller, 109: Upper end side spring support, 111: support pillar, 115: moving base plate, 116: rail, 117: guide, 118: moving plate, 119: base end side connecting block, 120: inclined rail, 121: lower end side spring support, 122: second stopper, 123: Abutting part, 124: Feeding mechanism, 125: Third stopper, 125A: Restricting support part, 125B: Restricting roller part, 131: Rail, 132: Guide, 133: Moving mechanism, 135: Ball screw, 136: Bearing, 137: Moving nut, 138: Drive motor.

Claims (9)

A movable probe unit mechanism that adjusts the position of a plurality of contacts according to the electrodes of the inspection object plate,
One or more probe units are provided on one side of the support frame of the probe block corresponding to the side where the electrodes of the inspection target plate are arranged, and the probe unit is driven in the longitudinal direction of the alignment camera and the probe unit. A movable probe unit mechanism comprising: a drive mechanism for driving and a probe block provided with a plurality of contacts. In the movable probe unit mechanism according to claim 1,
The drive mechanism moves the contacts in a direction along one side of the inspection target plate so as to support the contacts and align with the electrodes of the inspection target plate. A movable probe unit mechanism comprising a contact unit having one or a plurality facing a side of a target plate. The movable probe unit mechanism according to claim 2,
The contact unit is
A probe unit for supporting a large number of contacts;
A tip-side moving block that supports the probe unit and brings the contact into contact with each electrode of the inspection object plate;
Supporting and extending the distal-side moving block, the proximal-side moving block for bringing the contact of the probe unit into contact with each electrode of the inspection object plate,
A movable probe unit mechanism comprising: a position adjustment mechanism that moves the probe unit in the left-right direction to adjust the positioning between the contact and the electrode. The movable probe unit mechanism according to claim 3,
The probe unit is
A probe block that supports a large number of contacts at the tip and contacts each electrode of the plate to be inspected;
An alignment camera for copying an alignment mark for aligning the contact at the tip of the probe block with each electrode position of the inspection object plate;
A movable probe unit mechanism comprising a probe base that integrally supports the probe block and the alignment camera. The movable probe unit mechanism according to claim 3,
The tip side moving block is:
A support plate for supporting the probe unit;
A distal end side connecting block that is connected to the base end side moving block side and moves up and down;
A guide that is attached to the distal end side connecting block side and is fitted to the proximal side moving block side and moves obliquely;
A movement restricting roller for restricting movement of the leading end side moving block;
A movable probe unit mechanism comprising an upper end side spring receiver attached to the distal end side moving block and supporting a spring for urging the distal end side moving block upward from its upper end. The movable probe unit mechanism according to claim 3,
The proximal-side moving block is
A moving base plate that supports the whole;
Two rails arranged along the feeding direction of the moving base plate;
A moving plate supported by the rail so as to be slidable in the feeding direction;
A guide attached to the lower surface of the moving plate and fitted to the rail to slidably support the moving plate;
A base end side connecting block that moves the tip side moving block up and down in cooperation with the tip side connecting block of the tip side moving block;
An inclined rail provided on the inclined contact surface of the base end side connecting block to guide the vertical movement of the distal end side moving block;
A lower end side spring receiver that supports a spring that is provided at a position facing the upper end side spring receiver of the moving plate and biases the distal end side moving block upward;
By contacting the moving plate side, the contact at the tip of the probe block moves to a position directly above the electrode of the inspection target plate, and is further lowered to come into contact with the electrode of the inspection target plate to cause overdrive. Such a second stopper;
Abutting portions that are provided at both ends of the movable plate, respectively, and abutment portions that regulate the amount of movement of the movable plate in cooperation with the second stopper by contacting the second stopper;
A feeding mechanism connected to the moving plate and feeding the moving plate forward;
A third stopper is provided that regulates the amount of feeding of the movable plate to the inspection target plate by the feeding mechanism and regulates the lifted position of the tip side moving block by a spring. Movable probe unit mechanism. The movable probe unit mechanism according to claim 3,
The position adjustment mechanism is
Two rails arranged in parallel in the left-right direction;
A guide that is slidably fitted to the rail and supports the movable base plate so as to be slidable in the left-right direction;
A movable probe unit mechanism comprising: a moving mechanism that moves the moving base plate supported by the guide in the left-right direction. The movable probe unit mechanism according to any one of claims 1 to 7,
A movable probe unit mechanism comprising a movable frame mechanism that adjusts the opening by moving four frame plates according to different dimensions of the inspection target plates of different varieties. In an electrical inspection device that performs inspection by adjusting the position of the contact and adjusting the opening according to the different dimensions of the inspection target plates of different types,
An electrical inspection apparatus comprising the movable probe unit mechanism according to claim 1.

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