JP2007278705A - Inner surface inspection device using slit light - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem, wherein the diameter of an inspected object is limited because the device is large and automatization is difficult, when the inner surface of a narrow tube or the like to be inspected is intended to be measured in conventional inspection devices. <P>SOLUTION: In this inner-surface inspection device using slit light, one end side of a tube body 1 is provided with a slit light source 2 and a camera 3, and the other end side is provided with a member 5 for slit light refraction for making the radiation direction of the slit light 4 refracted from the slit light source to the lateral direction of the tube body; and a member 7 for visual line refraction for making the direction of the visual line 6 of the camera refract in the lateral direction, thereby constituting the inside of the tube body as an optical path. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an inner surface inspection apparatus using slit light, and more particularly to an inner surface inspection apparatus suitable for inspecting an inner surface of an inspection object such as a thin tube or a small cylindrical part with slit light.

  As an apparatus for inspecting the inner surface of an inspection object such as a tube or a cylindrical part, for example, a thin tube to be inspected by irradiating illumination light in front of the distal end of the tube with an optical fiber passing through the inside of the thin tube There is known a so-called borescope (industrial endoscope) that illuminates the inner surface of the tube and inspects the inner surface with an eyepiece or a camera formed on the other end of the tube.

  As another inspection apparatus, Patent Document 1 discloses a slit light source on the tip side of a cylindrical case and a reflection that refracts the slit light in a lateral direction of the cylindrical case at a predetermined inclination angle and irradiates the inner surface of the inspection object. An inner surface inspection apparatus having a configuration in which a mirror is installed and a reflection mirror that refracts reflected light from the inner surface and enters the image sensor disposed on the other end side through the cylindrical case is described in the cylindrical case. Has been.

Further, as another inspection device, Patent Document 2 irradiates a slit light source disposed outside the inspection target by a slit light reflecting mirror that can be inserted into a cylinder to be inspected such as a cylinder block. Inspects the image of the measurement site irradiated from the relative crossing direction with the reflecting mirror for the imaging device that allows the measurement site irradiated with the slit light to be inserted into the inspection target. There has been proposed an inner surface inspection apparatus that performs projection based on image data that is projected onto an imaging device arranged outside a target, calculates a three-dimensional internal dimension, and determines pass / fail. In this apparatus, the slit light has the length direction corresponding to the circumferential direction of the cylinder as the inspection object.
Japanese Patent No. 2947670 JP 2004-20340 A

  In the borescope, the inner surface of the thin tube can be inspected, but the illumination light from the illumination light source becomes scattered light on the inner surface of the tube, so the uniformity of the brightness of the image obtained by the camera cannot be taken, Image processing cannot be performed automatically. Therefore, conventionally, an operator observes an image displayed on a monitor and inspects the image.

  As described above, in the borescope, since the worker determines the defective portion or the like only from the image displayed on the monitor, the determination is different among the workers, and the inspection accuracy is not stable. In addition, at present, inspection, measurement, and determination using a borescope must be relied on by skilled workers, and it is not configured as a device that can be handled by any worker.

  Further, in the apparatus of Patent Document 1, since the laser beam is irradiated on the inner surface of the inspection target tube for observation, scattered light is not generated, and therefore it is easy to determine a defective portion or the like from an image obtained by a camera. However, since the laser light source is installed at the tip of the cylindrical case that is inserted into the tube to be inspected, the outer diameter of the cylindrical case cannot be further reduced, and the diameter is smaller than that. The tubule cannot be inspected.

In the apparatus of Patent Document 2, an imaging apparatus reflecting mirror that refracts the line of sight and a slit light reflecting mirror that refracts slit light are arranged inside the measurement object, and the imaging apparatus and the slit light source are arranged outside the measurement object. The imaging device arranges the line of sight in the axial direction of the measurement target, and the slit light source directly irradiates the slit light reflecting mirror with the direction inclined appropriately from the axial direction as the irradiation direction. Therefore, if the aperture of the measurement object is wide or the position where each reflecting mirror is arranged is not close to the opening end, the slit light from the slit light source cannot be applied to the reflecting mirror for the slit light, and the diameter is small. A cylinder or the like cannot be inspected. In this inspection apparatus, since the length direction of the slit light corresponds to the circumferential direction of the cylindrical body, an accurate image cannot be obtained due to the influence of the depth of field.
The present invention aims to solve the above problems.

  In the present invention, in order to solve the above-described problems, a slit light source and a camera are arranged on one end side of the tube body, and the irradiation direction of the slit light from the slit light source is refracted in the lateral direction of the tube body on the other end side. A slit light refracting member and a line-of-sight refracting member that refracts the camera's line-of-sight direction in the lateral direction of the tube are arranged, and an inner surface inspection apparatus using slit light configured as an optical path in the tube is proposed.

  Further, in the present invention, in the above configuration, the optical path of the slit light from the one end side of the tubular body to the slit light refracting member and the optical path of the reflected light from the line-of-sight refracting member to the one end side of the tubular body are partitioned. Propose to be a configuration.

  In the present invention, it is proposed that the optical path of the partitioned slit light and the optical path of the reflected light are configured by providing a partition plate in the tube or by providing a tube for each path in the tube.

  Further, the present invention proposes an inner surface inspection apparatus using slit light in which the camera is disposed in the axial direction of the tube body and the slit light source is disposed in the lateral direction of the tube body through the refracting member. .

According to the present invention, in the above configuration, it is proposed that the slit light source is arranged in the axial direction of the tubular body, and the camera is arranged in the lateral direction of the tubular body via the refractive member.

  In the present invention, it is proposed that, in the above-described configuration, the irradiation direction of the slit light is refracted in a lateral direction orthogonal to the axial direction of the tube body, and the viewing direction of the camera is refracted in an oblique lateral direction.

  In the present invention, in the above-described configuration, it is proposed that the slit light has the length direction corresponding to the axial direction of the measurement target.

  Further, in the present invention, in the above configuration, the slit light source is configured so that the irradiation direction of the slit light can be rotated around the axis, whereby the length direction of the slit light refracted in the lateral direction of the tubular body is It is proposed that the structure can be changed between the axial direction of the body and the direction orthogonal to the axial direction.

  Further, the present invention proposes that in the above configuration, the tube body is configured to be rotatable around an axis together with the slit light source and the camera.

  In the present invention, the refracting member can be composed of a reflecting mirror or a prism.

  In the present invention, a tube body in which a slit light refracting member and a line-of-sight refracting member are arranged on the distal end side is inserted into a measuring object such as a thin tube, irradiated with slit light from a slit light source, and the irradiated part is a line-of-sight refracting member The inner surface of the measurement object can be inspected by refracting the line of sight through the image and taking an image with a camera.

  The tube to be inserted into the measuring object has a slit light refracting member and a line-of-sight refracting member arranged on the tip side, and the slit light source and camera necessary for the inspection are arranged on one end side of the tube. Since the optical path of the slit light from the one end side to the slit light refracting member and the optical path of the reflected light from the line-of-sight refracting member to the one end side of the tubular body are configured in the tubular body, the tubular body must be made thin. Therefore, the diameter of a thin tube or the like to be inspected can be reduced.

  When the optical path of the slit light and the optical path of the reflected light are close to each other or partly overlapped by making the pipe thin, the pipe should be partitioned by providing a partition plate or pipe. As a result, it is possible to prevent the influence of slit light on the field of view of the camera.

  In addition, the camera and the slit light source are arranged in the axial direction of the tube body, and the camera and the slit light source are relatively large by arranging the slit light source or the camera in the lateral direction of the tube body through the refractive member. In addition, even when the tube is very thin, the optical path between the slit light and the camera's line of sight can be reasonably configured within the tube over a long distance. The diameter can be reduced.

  In addition, the slit light is refracted in the lateral direction perpendicular to the axial direction of the tubular body and irradiated to the inner surface of the measurement object, and the camera is configured to refract the visual line direction obliquely in the lateral direction to image the inner surface of the measurement object. Accordingly, it is possible to perform a three-dimensional measurement process of the inner surface using a so-called light cutting method, and it is possible to accurately measure the height and depth information of the inner surface of the measurement target.

  In addition, in the configuration in which the length direction of the slit light is made to correspond to the axial direction of the measurement object, different from the configuration in which the length direction is related to the circumferential direction, an accurate inspection can be performed without being affected by the depth of field.

  In addition, the slit light source is configured so that the irradiation direction of the slit light can be rotated around the axis, and the length direction of the slit light refracted in the lateral direction of the tubular body is orthogonal to the axial direction of the tubular body. If the edge of a defect or the like to be inspected scatters when the direction coincides with the length direction of the slit light, the length of the slit light By changing the direction, scattering can be prevented and an accurate inspection without the influence can be performed.

  In addition, when the tube body is configured to be rotatable around the axis together with the slit light source and the camera, the entire inner circumference of the measurement object can be inspected without rotating the measurement target thin tube or the like around the axis. . This configuration is more effective when it is difficult to rotate around the axis to be measured.

  When the tube body is configured to be rotatable around the axis together with the slit light source and the camera, in general, a camera that is heavier and has more wires than the slit light source is arranged in the axial direction of the tube body. Such a configuration is more advantageous from the viewpoint of production and use.

Next, embodiments of the present invention will be described with reference to the accompanying drawings.
FIG. 1 is a perspective view schematically showing the configuration and operation of a first embodiment of an inspection apparatus using slit light according to the present invention. 2 to 5 are sectional views taken along line AA of FIG.

  Reference numeral 1 denotes a tubular body. A slit light source 2 and a camera 3 are arranged on one end side of the tubular body 1, and the irradiation direction of the slit light 4 from the slit light source 2 is refracted in the lateral direction of the tubular body 1 on the other end side. The slit light refracting member 5 and the line of sight refracting member 7 for refracting the sight line 6 direction of the camera 3 in the lateral direction of the tube body 1 are arranged, and the inside of the tube body 1 is configured as an optical path.

  As shown in FIG. 1, the camera 3 is disposed in the axial direction of the tube body 1, and the slit light source 2 is disposed in the lateral direction of the tube body 1, in this case, at a right angle through the branch tube body portion 8. . The slit light source 2 is configured to be rotatable around the axial direction of the branch tube portion 8 by the rotary stage 9 as indicated by an arrow in the figure, and the slit light 4 is transmitted in the axial direction of the tube 1 by the refraction member 11. It is configured to be refracted. The camera 3 is configured to be rotatable around the axial direction together with the tube body 1 by a rotary stage 10.

  In this embodiment, as shown in the drawing, the slit light refracting members 5 and 11 and the line-of-sight refracting member 7 are configured by mirrors, but can be configured by a prism as another embodiment.

  Here, the slit light refracting member 5 is arranged so that the irradiation direction of the slit light 4 is refracted in a lateral direction orthogonal to the axial direction of the tube 1, and the line-of-sight refracting member 7 is the line of sight 6 of the camera 3. Are refracted obliquely in the lateral direction. Thus, the arrangement of the respective refraction members 5 and 6 that refract the irradiation direction of the slit light 4 and the direction of the line of sight 6 of the camera 3 is appropriate.

  For example, in the configuration of FIGS. 1 and 6, the slit light refracting member 5 is disposed closer to the distal end side of the tubular body 1 than the line-of-sight refracting member 7, and the slit light refracting member 5 It arrange | positions so that it may refract in the horizontal direction of the side by which the member 7 is arrange | positioned, and the gaze refraction member 7 is also arrange | positioned so that a gaze may be refracted to the same side.

  On the other hand, in the configuration of FIG. 7, the line-of-sight refracting member 7 is disposed closer to the distal end side of the tube body 1 than the slit light refracting member 5, and the slit light refracting member 5 converts the slit light 4 into the line-of-sight refracting member. 7 is arranged so as to be refracted in the lateral direction on the side where the lens 7 is arranged, and the line-of-sight refracting member 7 is also arranged so as to refract the line of sight on the same side.

  Further, in the configuration of FIG. 8, the line-of-sight refracting member 7 is disposed closer to the distal end side of the tube body 1 than the slit light refracting member 5, and the slit light refracting member 5 converts the slit light 4 into the line-of-sight refracting member 7. Is arranged so as to be refracted in the lateral direction opposite to the side where the line is arranged, and the line-of-sight refracting member 7 is also arranged so as to refract the line of sight on the same side.

  In the configuration of FIG. 8, a pair of tube bodies 16 are provided in the tube body 1, and the optical path of the slit light 4 from one end side of the tube body 1 to the slit light refraction member 5 and the line-of-sight refraction member 7 The optical path of the reflected light 6 reaching the one end side of the tube body 1 is partitioned. With such a partitioned structure, it is possible to prevent the influence of slit light into the field of view of the camera.

  As shown in FIG. 8, the optical path of the divided slit light and the optical path of the reflected light are provided with a pair of tubes 16 in the tube 1 and a partition plate, or a tube for each path in the tube. Propose to construct by providing a body.

  In the above configuration, in the present invention, the tube 1 is inserted into the measuring object 12 such as a thin tube, the slit light 4 is irradiated from the slit light source 2, and the line of sight 6 is passed through the line-of-sight refracting member 7. By refracting and taking an image with the camera 3, the inner surface of the measurement object can be inspected.

  In this measurement, the tube body 1 to be inserted into the measuring object 12 is simply provided with the slit light refraction member 5 and the line-of-sight refraction member 7 on the distal end side. Since it arrange | positions at the one end side of the body 1, the pipe body 1 can be comprised thinly and, therefore, the diameter of the thin tube etc. of the test object 12 which can be test | inspected can be made small.

  In particular, as in this embodiment, the camera 3 is arranged in the axial direction of the tube 1 and the slit light source 2 is arranged in the lateral direction of the tube 1 via the refractive member 11 of the slit light 4. Even when the camera 3 and the slit light source 2 are relatively large and the tube 1 is very thin, the optical path between the slit light 4 and the line of sight 6 of the camera 3 is reasonably configured in the tube 1 over a long distance. In this respect, the diameter of the thin tube or the like of the inspection object 12 that can be inspected can be further reduced.

  In this embodiment, the slit light 4 is refracted in the lateral direction perpendicular to the axial direction of the tube body 1 to irradiate the inner surface of the measuring object 12, and the camera 3 is refracted in the oblique lateral direction for measurement. Since the inner surface of the object 2 is imaged, it is possible to perform a three-dimensional measurement process of the inner surface by using the light cutting method, and thus accurately measure the size, height and depth of the inner surface of the measurement object 12. be able to.

  Therefore, the size, height, and depth can be digitized by comparing the calibrated reference position with the currently captured image of the inner surface, and the measured data 12 can be obtained from the digitized data. It is possible to automatically determine whether the product is good or bad, and the number of workers required for the inspection can be reduced reasonably, and an accurate inspection can be performed without the need for skill. Cost can be reduced.

  FIGS. 9 to 11 show examples of images of the irradiation spot 13 of the slit light 4 imaged by the camera 3, and the horizontal direction in the figure corresponds to the axial direction of the thin tube or the like of the measuring object 12. The vertical direction corresponds to the height direction. That is, FIG. 9 is an image in the case where there is no uneven portion on the measurement object 12 at the irradiation point 13, FIG. 10 is an image in the case where the concave portion 14 shown in FIGS. 6 and 7 is present, and FIG. It is an image when it exists.

  In this embodiment, as shown in FIGS. 6 and 7, the length direction of the slit light 4 is made to correspond to the axial direction of a thin tube or the like as the measurement object 12. Accurate measurement can be performed without being affected by the depth of field.

  That is, FIGS. 12A and 12B show an inspection state when the length direction of the slit light 4 is made to correspond to the circumferential direction of a thin tube or the like as the measurement object 12, and in this case, irradiation is performed. As shown in FIGS. 13A and 13B, an accurate inspection cannot be performed due to the influence of the depth of field because the height difference h occurs on the inner surface of the measurement object 12 at the location 13. In addition, when the length direction of the slit light 4 is made to correspond to the axial direction of a thin tube or the like as the measurement object 12, the above-described height difference does not occur, so accurate measurement can be performed without being affected by the depth of field. Can be done.

  Further, in this embodiment, the slit light source 2 is configured such that the irradiation direction of the slit light 4 is rotatable around its axis, and the length direction of the slit light 4 refracted in the lateral direction of the tube 1 is determined. Since it is configured to be changeable between the axial direction of the tubular body 1 and the direction orthogonal to the axial direction, for example, as shown in FIG. In the edge 15, when the direction coincides with the length direction of the slit light and causes scattering, the length direction of the slit light is changed from (a) to (b) in the figure, thereby changing the edge 15 to the edge 15. The resulting scattering can be prevented and accurate measurement without the influence can be performed.

  For example, when inspection of the inspection object 12 by the slit light 4 is performed by taking an image of the irradiation site 13 with the camera 3 at every predetermined pitch, when the edge 15 does not correspond between the pitches, the measurement of the edge 15 is performed. Since this cannot be performed, precise setting is required to correspond to this, and even when this is performed, accurate measurement may not be performed due to scattering by the edge 15 as described above.

  On the other hand, in this embodiment, it is possible to accurately measure the edge 15 in any direction by changing the length direction of the slit light 4 as necessary.

  In addition, the change in the length direction of the slit light 4 can be changed alternately every 90 in the axial direction and the circumferential direction, and can be changed to an appropriate angle.

  In this embodiment, the slit light source 2 connected to the tubular body 1 and the branched tubular body portion 8 is driven via the camera 3 by driving the rotary stage 10 as shown in FIGS. By rotating integrally, it is possible to inspect the entire inner circumference of the measuring object 12 without rotating the measuring object 12 around the axis. Therefore, this configuration is more effective when it is difficult to rotate the measurement object 2 side around its axis.

  Contrary to the arrangement of this embodiment, the slit light source 2 is arranged in the axial direction of the tube 1, and the camera 3 is arranged in the lateral direction of the tube 1 via the refraction member 11. It is also possible. However, in general, the camera 3 is heavier than the slit light source 2 and has a large number of wires and the like. Therefore, the camera 3 is arranged in the axial direction of the tube 1 in the above embodiment. The configuration is more advantageous from the viewpoint of production and use.

  Since the inspection apparatus using the slit light according to the present invention is as described above, it is possible to inspect the inner surface of an inspection object such as a very small diameter thin tube and to measure a three-dimensional shape by a light cutting method. Therefore, it is possible to digitize the measurement result by using a processing means such as a computer and to automate the determination of whether the measurement target is good or bad based on the measurement result.

  Therefore, even an unskilled worker can easily handle and perform an accurate inspection, and the number of workers can be reduced, so that the cost can be reduced.

  From the above, the present invention has great industrial applicability.

It is a perspective view showing typically composition and operation of an inspection device concerning the present invention. It is sectional drawing of FIG. 1 which shows typically a structure and operation | movement of the test | inspection apparatus based on this invention. It is sectional drawing of FIG. 1 which shows typically the structure and operation | movement of an inspection apparatus which concern on this invention in another situation. It is sectional drawing of FIG. 1 which shows typically the structure and operation | movement of an inspection apparatus which concern on this invention in another situation. It is sectional drawing of FIG. 1 which shows typically the structure and operation | movement of an inspection apparatus which concern on this invention in another situation. It is explanatory drawing which shows typically the other structure and operation | movement of the test | inspection apparatus which concerns on this invention. It is principal part expansion explanatory drawing which shows typically the other structure and operation | movement of the test | inspection apparatus which concerns on this invention. It is principal part expansion explanatory drawing which shows typically the other structure and operation | movement of the test | inspection apparatus which concerns on this invention. It shows an example of an image to be measured taken by a camera. The other example of the image of the measuring object imaged with the camera is shown. The other example of the image of the measuring object imaged with the camera is shown. It is explanatory drawing which shows the test | inspection state at the time of making the length direction of slit light correspond to the circumferential direction of a pipe | tube. It is explanatory drawing which shows the test | inspection state at the time of making the length direction of slit light correspond to the axial direction of a pipe | tube. It is explanatory drawing which shows the test | inspection state which matched the length direction of slit light selectively with the axial direction and circumferential direction of a pipe | tube.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Tubular body 2 Slit light source 3 Camera 4 Slit light 5 Slit light refracting member 6 Line of sight 7 Gaze refracting member 8 Branch tube part 9, 10 Rotating stage 11 Slit light refracting member 12 Measurement object (capillary tube)
13 Irradiation point 14 Recess 15 Edge 16 Tube

Claims (12)

A slit light source and a camera are arranged on one end side of the tube body, and a slit light refracting member that refracts the irradiation direction of the slit light from the slit light source in the lateral direction of the tube body on the other end side, and the line-of-sight direction of the camera in the tube direction. An inner surface inspection apparatus using slit light, wherein a line-of-sight refracting member to be refracted in the lateral direction of the body is arranged and the inside of the tube is configured as an optical path. The optical path of slit light from one end side of the tubular body to the slit light refracting member and the optical path of reflected light from the line-of-sight refracting member to one end side of the tubular body are separated from each other. An inner surface inspection apparatus using the slit light according to 1. 3. The inner surface inspection apparatus using slit light according to claim 2, wherein an optical path of the partitioned slit light and an optical path of the reflected light are configured by providing a partition plate in the tubular body. The inner surface inspection apparatus using slit light according to claim 2, wherein an optical path for partitioned slit light and an optical path for reflected light are configured by providing a tube for each path in the pipe. The slit light according to any one of claims 1 to 4, wherein the camera is disposed in the axial direction of the tubular body, and a slit light source is disposed in the lateral direction of the tubular body via a refracting member. Used inner surface inspection device. The slit light according to any one of claims 1 to 4, wherein the slit light source is arranged in the axial direction of the tube body, and the camera is arranged in the lateral direction of the tube body via a refractive member. Used inner surface inspection device. 7. The slit light irradiation direction is refracted in a lateral direction orthogonal to the axial direction of the tube body, and the viewing direction of the camera is refracted in an oblique lateral direction. An inner surface inspection apparatus using the slit light described in 1. The inner surface inspection apparatus using the slit light according to any one of claims 1 to 7, wherein the slit light has a length direction corresponding to an axial direction of a measurement target. The slit light source is configured so that the irradiation direction of the slit light can be rotated around the axis, so that the length direction of the slit light refracted in the lateral direction of the tubular body is orthogonal to the axial direction of the tubular body The inner surface inspection apparatus using the slit light according to any one of claims 1 to 7, wherein the inner surface inspection apparatus can be changed between the first and second directions. The inner surface inspection apparatus using slit light according to any one of claims 1 to 9, wherein the tube body is configured to be rotatable around an axis together with a slit light source and a camera. The inner surface inspection apparatus according to claim 1, wherein the refracting member is a reflection mirror. The inner surface inspection apparatus according to claim 1, wherein the refraction member is a prism.

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