JP2011002439A - Inspection apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an inspection apparatus capable of easily performing visual inspection of a tubular through hole, an inner-periphery surface of an object to be inspected with a bottomed hole, and a peripheral object to be inspected.SOLUTION: The inspection apparatus includes: an irradiation means (4) of applying light to the tubular hole, the inner-periphery surface (2a) of the object (2) to be inspected with the bottomed hole, or the peripheral object to be inspected; a reflection diffusion means (6) of reflecting and diffusing the applied light to the inner-periphery surface (2a) or the periphery; and an imaging means (7) for imaging the inner-periphery surface or the periphery. The reflection diffusion means (6) is disposed in the front coaxially with a fish-eye lens or a wide-angle lens (9) of the imaging means (7), and the imaging means (7) performs inspection.

Description

The present invention relates to a through hole, an inner peripheral surface of a bottomed hole inspection object, and an apparatus for inspecting the surrounding inspection object.

Conventionally, inspection and measurement of an inner peripheral surface of a tubular inspection object are performed by inspecting the inner peripheral surface by an irradiation unit that irradiates ring light or convergent light over the entire inner peripheral surface and an imaging unit that images the inner peripheral surface. Measuring apparatuses that perform measurement are known.
Japanese Patent Laid-Open No. 5-149884 JP 7-33996

On the other hand, in the inspection of the inner peripheral surface of the inspection object in the tubular through hole, the inner peripheral surface is inspected from the outside based on oblique illumination and oblique imaging information without inserting the imaging means and the illumination means into the inspection object.
JP 2000-35322 A

On the other hand, for the inspection of the inner peripheral surface of the inspection object in the tubular through hole, the imaging means and the irradiation means are arranged coaxially, a conical mirror is arranged opposite to the imaging means and the irradiation means, and the inner peripheral surface mirror image of the cone portion Are inspected based on the imaging information.
JP-A-2004-205218

In Patent Document 1, since there is an irradiation unit arranged in front of the imaging unit, in the case of a bottomed hole, it is impossible to inspect and measure the inner peripheral surface on the back side of the irradiation unit. In addition, due to the structure, it is not easy to inspect and measure the inner peripheral surface of a small-diameter tube, and the inspection range is narrow.

In Patent Document 2, since there is an imaging means arranged in front of the irradiation means, in the case of a bottomed hole, it is impossible to inspect and measure the inner peripheral surface on the back side of the imaging means. In addition, due to the structure, it is not easy to inspect and measure the inner peripheral surface of the small-diameter tubular, and the inspection range is narrow.

In Patent Document 3, when the object to be inspected is a bottomed hole, since there is an irradiation means in front of the imaging means, it is impossible to inspect deeper than the irradiation means.

In Patent Document 4, the object to be inspected is an inspection means in a through hole. However, when a conical mirror is used, the inspection surface is reduced near the apex of the conical mirror, and it is difficult to obtain detailed surface information. .

The present invention provides an inspection apparatus and method that can easily perform an appearance inspection and a measurement inspection in a short time in a state of an inner peripheral surface or a peripheral state regardless of a through hole or a bottomed hole. With the goal.

The inspection apparatus of the present invention for solving the above object is, as a first aspect, an inspection apparatus for appearance inspection and measurement inspection of the inner peripheral surface 2a of the inspection object 2 as shown in FIG. Irradiating means 4 for irradiating light over the surface 2a or the periphery;
Reflecting / diffusing means 6 for reflecting and diffusing the light emitted by the irradiating means 4 to the inner peripheral surface 2a or the surroundings so as to be irradiated 4a from the central axis direction of the imaging means 7, and information on the inner peripheral surface or the surroundings An imaging means 7 for imaging R;
In an inspection apparatus for performing an appearance inspection and a measurement inspection of an object to be inspected based on imaging information obtained by the imaging means 7,
The reflection diffusing means 6 is arranged coaxially and forward of the fish-eye lens or the wide-angle lens 9 of the image pickup means 7.

As the second aspect of the present invention, as shown in FIG. 2, an inspection device for an appearance inspection and a measurement inspection of the inner peripheral surface 2a of the inspection object 2, or an inspection device for an appearance inspection and a measurement inspection of the surrounding inspection object. ,
Irradiating means 10 for irradiating light on the inner peripheral surface 2a or the periphery;
Reflection diffusing means 28 for reflecting and diffusing the light irradiated by the irradiating means 10 so that the inner peripheral surface 2a or the periphery is irradiated from the central axis direction of the imaging means 7,
An image pickup means 7 for picking up an inner peripheral surface or surrounding information R;
In an inspection apparatus for performing an appearance inspection and a measurement inspection of an object to be inspected based on imaging information by the imaging means 7,
An irradiating means 10 and a reflection diffusing means 28 are arranged in front of the fish-eye lens or the wide-angle lens 9 coaxially with the imaging means 7.

As the third aspect of the present invention, as shown in FIG. 3, an inspection device for the inner peripheral surface 2a of the object to be inspected 2 or the peripheral appearance inspection and measurement inspection, which covers the inner peripheral surface 2a or the periphery. Irradiating means 4 for irradiating light;
Reflection diffusing means for reflecting and diffusing the light irradiated by the irradiating means 4 so that the light is irradiated from the inner peripheral surface 2a or around the central axis direction of the image pickup means 7;
By irradiating the inside of the reflection diffusing means 14 with laser light collimated in parallel from the laser oscillation device 12 at the center of the flat end of the cone lens, the laser light is spread in a cone shape from the cone portion of the cone lens. Reflection light diffusing means 14 with a ring light forming device for forming and projecting the ring light L of
An image pickup means 7 for picking up the inner peripheral surface or the surrounding information R, La is provided,
In an inspection apparatus for performing an appearance inspection and a measurement inspection of an object to be inspected based on imaging information obtained by the imaging means 7,
The reflection diffusing unit 14 with the ring light forming device is arranged coaxially and forward of the fish-eye lens or the wide-angle lens 9 of the imaging unit 7.

As the fourth aspect of the present invention, as shown in FIG. 4, there is an inspection device for the inner peripheral surface 2a of the object to be inspected 2 or the peripheral appearance inspection and measurement inspection. Irradiating means 15 for irradiating
A laser oscillation device 17;
One or two sets of laser line generator lenses 16 are provided,
The laser line generator lens 16 is irradiated with a laser beam collimated in parallel from the laser oscillation device 17 to form a laser line Y spreading in a fan shape, and a swivel provided with a device for projecting onto the inner peripheral surface The arm measuring means 18 is
The swivel arm measuring means is arranged on a swiveling axis 22 having a fisheye lens or wide-angle lens 9 of the imaging means 7 as a rotation center axis 21.
The inner peripheral surface obtained by the irradiating means 15 or the surrounding information;
In an inspection apparatus for inspecting an object to be inspected based on information by an imaging means 7 that images information Ya obtained by the laser line Y,
A swivel arm measuring means 18 having a swivel center as a swivel center is arranged on the same axis as the fisheye lens or the wide-angle lens 9 of the image pickup means 7.

According to the present invention configured as described above, a fish-eye lens or a wide-angle lens is used as the image pickup means, and there is a reflection diffusion means for the light irradiated on the lens central axis, so that light is emitted from the center direction of the inner periphery. Therefore, a lot of optical information can be directly imaged by the imaging means.

Thereby, since the imaging means is not reduced imaging information when a conical mirror is used, it is possible to perform inspection with high accuracy.

By using a fish-eye lens or a wide-angle lens as the imaging means, it is possible to inspect a wide range with a deep focal depth at a time, and the inspection time is shortened.

By disposing the reflection / diffusion means for the irradiated light on the central axis of the fish-eye lens or wide-angle lens having a deep focal depth used for the image pickup means, even the bottomed hole can be inspected to the deepest part.

By using a fish-eye lens or a wide-angle lens with a deep focal depth used for the imaging means, a laser device or the like can be installed at the center of the lens, and a peripheral appearance inspection and a measurement inspection can be performed with a small device.

FIG. 1 is a cross-sectional view showing an outline of the inspection apparatus of the present invention. As shown in FIG. 1, the present apparatus is inserted into a device under test 2, and in this embodiment, the inner peripheral surface of the device under test can be inspected.

This inspection apparatus fixes the imaging means 7 with a main body shaft 5 incorporating the imaging means 7, a camera nut 8 connecting the imaging means 7, and a fixing nut 8 a that fixes the imaging nut 7, and the fixing nut 8 a attaches the lens holder 3. The lens unit 3 is configured by connecting and fixing the lens holder 3 with a fixing nut 3a.
The lens holder 3 includes a fish-eye lens or a wide-angle lens 9, and an irradiating means 4 is arranged on the outer periphery of the lens holder 3, and the light that is irradiated from the irradiating means 4 is reflected and diffused in front of the central axis of the fish-eye lens or wide-angle lens 9. The diffusion means 6 is fixed.

The imaging means 7 uses a digital camera, and the lens uses a fisheye lens or a wide-angle lens 9.

The reflection diffusing means 6 is arranged so that the light of the irradiation means 4 is reflected and diffused 4a from the fish-eye lens or the wide-angle lens 9 in the central axis direction, and can be inspected on the back side from the reflection diffusing means 6. It is.

FIG. 2 is a cross-sectional view of a mode used for inspecting a relatively small inner peripheral surface in this embodiment of the present invention.
The imaging unit and the lens unit in FIG. 1 have the same configuration, and the outer diameter of the apparatus is reduced by disposing and fixing the illumination unit 10 to the reflection diffusion unit 28 on the central axis of the fish-eye lens or wide-angle lens 9. It is possible to perform inspection by inserting into a small-diameter or small-diameter inspection object.

FIG. 3 is a cross-sectional view of an embodiment used for the inspection of the inner peripheral surface and the surrounding shape and dimensions of the present invention, or the front surface inspection perpendicular to the central axis.
The imaging unit, lens unit, and illumination unit in FIG. 1 have the same configuration, and a ring light forming device 11 is built in the reflection diffusing unit 14 disposed on the central axis of the fish-eye lens or wide-angle lens 9, and a linear ring is formed on the peripheral surface. By projecting the light L, it is possible to inspect the inner peripheral surface, inspect the surrounding shape and dimensions, and perform front surface inspection perpendicular to the central axis.

The ring light forming device 11 includes a laser oscillation device 12, a cone lens 13, and a cylindrical ring light forming device main body 11. One end of the cone lens 13 has a conical shape, and the other end forms a flat end surface.
The laser oscillator 12 is collimated inside and irradiated with parallel laser light from the center.
The laser light is irradiated from the center of the flat end surface of the cone lens 13 and is accommodated in the cylindrical ring light forming apparatus main body 11 so as to pass through the apex of the cone.

The cylindrical ring light forming device main body 11 is open on the cone lens side, and the cone portion of the cone lens protrudes. Laser light is irradiated from the laser oscillation device 12 onto the plane end surface of the cone lens 13, and linear ring light L spreading in a conical shape from the apex of the cone portion is projected.
The laser oscillating device 11 is unitized and disposed in the reflection diffusing unit, and the reflection diffusing unit 14 with a ring light forming device is used.

Since the ring light forming device 11 is configured by housing the laser oscillation device 12 and the cone lens 13 in a cylindrical body, the laser optical axis and the cone lens central axis can be easily aligned, and the unit can be easily formed. is there. By making the ring light forming device 11 into a unit, there is no need to make adjustments such as making the laser optical axis coincide with the cone lens central axis.

By fixing the reflection diffusing means 14 with the ring light forming device on the central axis of the fish-eye lens or the wide-angle lens 9, the ring light can be easily projected onto the inner peripheral surface or the front surface of the inspection object.
The ring light L projected from the reflection diffusing means 14 with the ring light forming device projects linear ring light onto the inner peripheral surface 2a of the inspection object 2 and is provided to the imaging means 7 as La information.

That is, the peripheral surface can be inspected by projecting the ring light L onto the peripheral surface and comparing the La information with the normal size and shape.

FIG. 4 is a cross-sectional view of the inner peripheral surface or the outer appearance of the present invention and a mode used for three-dimensional inspection.
This inspection apparatus incorporates the imaging means 7 in the main body shaft 21.
The imaging means 7 and the main body shaft 21 are fixed by a camera nut 8 and a fixing nut 8a.
The lens holder 3 is connected to the fixing nut 8a and is fixed by the fixing nut 3a to constitute an imaging unit, and a fisheye lens or a wide-angle lens 9 is disposed in the lens holder 3.

A turning shaft 22 having a rotation function with the main body shaft 21 as a central axis is disposed, and a turning drive pulley 23 is provided on the turning shaft. The turning is transmitted from the motor drive shaft 20 via the timing belt 19.

The turning shaft 22 is provided with a turning arm 18, an illuminating means 15, a laser oscillation device 17, and a laser line generator lens 16 are arranged, and is used as a turning arm measuring means 18 having an angle adjusting mechanism.

The angle adjusting mechanism of the swivel arm measuring means 18 accommodates a laser oscillation device 17 and a laser line generator lens 16 in a cylindrical hole. The laser line generator lens 16 is formed at an angle of two surfaces, one end of which has a cylindrical lens diameter as its apex, and the other end surface forms a flat end surface.
The laser oscillation device 17 and the laser line generator lens 16 are accommodated in an angle adjustment mechanism so that the central axis of the diameter of the laser line generator lens 16 and the irradiation axis of the laser beam coincide with each other and the laser beam is irradiated. Yes.
The laser light applied to the center of the top of the laser line generator lens 16 forms a laser line Y that is fanned from the flat end surface side of the laser line generator lens 16 and is projected.

FIG. 5 is a cross-sectional view of the angle adjustment mechanism AA. As shown in FIG. 5, two sets of the laser oscillation device 17 and the laser line generator lens 16 are arranged. The laser lines Y irradiated through the line generator lens 16 are projected toward the peripheral surface, and the laser line axes of each other are set to intersect at a certain angle.

The measurement is performed by turning the swivel arm measuring means 18 about the main body axis 21 or rotating the object to be measured. The laser oscillation device 17 and the laser line generator lens 16 are measured even on one set on one side. Is possible.
In the case of one set, since the laser line Y is set at a certain angle, when there is a large protrusion on the peripheral surface, the laser line is not projected on one side of the protrusion and the height information cannot be obtained.
When there are large protrusions on the peripheral surface, two sets of the laser oscillation device 17 and the line generator lens 16 are arranged, and the projected laser lines Y form an angle that intersects each other, and the laser lines are projected. Make up the part that is not done.
The calculation means for measuring the height of the protrusions on the peripheral surface and the distance is performed by a light cutting method or the like, but since the calculation means is conventionally known, a detailed description is omitted.

That is, the appearance inspection and the three-dimensional inspection of the surrounding surface can be performed by turning the swivel arm measuring means or rotating the inspection object.

It is a sectional side view which shows the outline | summary of the 1st aspect of an inspection apparatus. It is a sectional side view which shows the outline | summary of the 2nd aspect of an inspection apparatus. It is a sectional side view which shows the outline | summary of the 3rd aspect of an inspection apparatus. It is a sectional side view which shows the outline | summary of the 4th aspect of an inspection apparatus. It is sectional drawing on the AA line of FIG.

2: Inspected object 3: Lens holder 3a: Fixed nut 4: Illuminating means 5: Body shaft 6: Reflection diffusing means 7: Imaging means 8: Camera nut 8a: Fixed nut 9: Fisheye lens or wide-angle lens 10: Illuminating means 11: Ring light forming device 12: Laser oscillating device 13: Cone lens 14: Reflecting / diffusing means 15 with ring light forming device 15: Illuminating means 16: Laser line generator lens 17: Laser oscillating device 18: Turning arm measuring means 19: Timing belt 20: Motor drive shaft 21: Body shaft 22: Rotating shaft 23: Rotating drive pulley 28: Reflection diffusion means

Claims (5)

Irradiation means for irradiating light on the inner peripheral surface of the inspection object in the tubular through hole, the bottomed hole, or the surrounding inspection object;
Reflection diffusing means for reflecting and diffusing the light irradiated by the irradiating means over the inner peripheral surface or the periphery; and
An imaging means for imaging the inner peripheral surface or the surroundings;
In an inspection apparatus for performing an appearance inspection and a measurement inspection of an inner peripheral surface of an inspection object or a surrounding inspection object based on imaging information by the imaging means
An inspection apparatus in which the reflection diffusing unit is arranged in front of the fish-eye lens or the wide-angle lens coaxially with the imaging unit. Irradiation means for irradiating light on the inner peripheral surface of the inspection object in the tubular through hole, the bottomed hole, or the surrounding inspection object;
Imaging means for imaging an inner peripheral surface irradiated with light by the irradiation means;
Reflection diffusing means for reflecting and diffusing the light irradiated by the irradiating means over the inner peripheral surface or the surrounding inspection object;
In the inspection apparatus for performing the appearance inspection and the measurement inspection of the inner peripheral surface of the inspection object or the surrounding inspection object based on the imaging information by the imaging means,
An inspection apparatus in which the irradiation unit and the reflection / diffusion unit are arranged in front of a fish-eye lens or a wide-angle lens coaxial with the imaging unit. In the inspection apparatus according to claim 1, a laser oscillation device and a cone lens are provided inside the reflection diffusion means,
By irradiating the laser beam collimated in parallel from the laser oscillation device to the center of the bottom surface of the cone lens, the laser beam is spread in a cone shape from the cone portion of the cone lens, forming a linear ring light and surroundings. An inspection apparatus in which a reflection diffusing means with a ring light forming device having a device for projecting on a surface is arranged in front of a fish-eye lens or a wide-angle lens coaxial of an imaging means. An imaging means for imaging an inner peripheral surface of a tubular through hole, a bottomed hole inspection object, or a surrounding inspection object;
The fish-eye lens of the imaging means, or the swivel arm measuring means that rotates about the central axis of the wide-angle lens, includes a light irradiation means, a laser oscillation device for projecting fan-shaped line light, and a laser line generator lens. In inspection equipment,
An inspection apparatus provided with a swivel arm measuring means that rotates around a central axis of a fish-eye lens or a wide-angle lens of the imaging means. A measuring apparatus and an inspection apparatus in which an irradiating means, a reflecting / diffusing means, a reflecting means, a laser means, a sound wave means, a receiving means, a rotating or turning means are arranged on the same axis of a fisheye lens or a wide-angle lens.

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