TW201224443A - Device and method for detecting bubble in transparent tube - Google Patents

Device and method for detecting bubble in transparent tube Download PDF

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Publication number
TW201224443A
TW201224443A TW100125440A TW100125440A TW201224443A TW 201224443 A TW201224443 A TW 201224443A TW 100125440 A TW100125440 A TW 100125440A TW 100125440 A TW100125440 A TW 100125440A TW 201224443 A TW201224443 A TW 201224443A
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Taiwan
Prior art keywords
light
inspected
bubble
optical axis
transparent tube
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TW100125440A
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Chinese (zh)
Inventor
Tetsuji Takezawa
Ryuji Hiroki
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Nippon Electric Glass Co
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Publication of TW201224443A publication Critical patent/TW201224443A/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/89Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/958Inspecting transparent materials or objects, e.g. windscreens

Abstract

A device and a method for detecting a bubble in a transparent tube, capable of detecting a bubble in a transparent tube in a simpler and more accurate manner. A device (1) for detecting a bubble is provided with: a lighting device (10) for applying light (L) toward a substantially cylindrical object (50) to be tested which consists of a light transmissive material; and an image capturing device (20) which, in a view in the direction of the axis of the object (50) to be tested, captures an image of the object (50) from the direction which forms an obtuse angle relative to a portion of the optical axis of the lighting device (10), the portion being located on the upstream side of the light.

Description

201224443 六、發明說明: 【發明所屬之技術領域】 本發明是有關檢測存在於玻璃或樹脂等光穿透性的原 材料所成的大致圓筒狀被檢查物之氣泡的裝置及方法。 【先前技術】 玻璃管的製造步驟中,在玻璃內部有產生泡(氣泡) 的場合,此內部產生的氣泡是在延伸步驟中被延伸成薄的 條狀而殘存於玻璃內部,隨後將玻璃管加工製造各種零組 件(例如,液晶顯示器的背光)時,會導致種種問題的要 因。爲此,在玻璃管的製造中,必須以檢查步驟檢測出殘 存於玻璃內部之條狀氣泡的缺陷。 以往,以上條狀之氣泡的檢測,一般是以熟練人員的 目視檢查來進行。但是,目視檢查需要時間與勞力而會造 成生產性提升的阻礙。尤其,在液晶顯示器的背光用玻璃 管的檢查中,必須使用顯微鏡來檢查外徑2〜4mm程度的細 玻璃管,因此需要極大的時間與勞力。 並且,在透明玻璃基板內部產生的氣泡即使熟練人員 在正確的發現上仍屬困難,在微小氣泡的錯失致檢測失誤 或不視爲缺陷的瑕疵或污垢等氣泡的誤檢測發生的防止上 困難。 對此,提出一種將雷射光垂直照射於玻璃管,檢測藉 玻璃內部氣泡產生的散射光來檢測殘存氣泡的方法(例如 ,參閱專利文獻1 )。 -5- 201224443 [先前技術文獻] [專利文獻] [專利文獻1]日本特開平1 1 -6423 1號公報 【發明內容】 [發明所欲解決的課題] 但是,上述專利文獻1記載的氣泡檢測方法從雷射光 的使用來看僅能進行定點的檢測,在跨預定的檢查範圍進 行檢查時必須和玻璃管的旋轉一起朝著軸向掃描雷射光, 而有檢査時需要極爲多時間的問題。 並藉著光檢測器所檢測之光的波形來判定氣泡的存在 之玻璃內部的氣泡或瑕疵、污垢等所產生的散射光會被圓 筒狀玻璃管的內表面及外表面更進一步複雜地折射、反射 ,所以僅根據波形的不同來正確地區別檢測出僅因氣泡產 生的散射光時極困難,會有造成多數錯誤檢測的問題。 本發明有鑑於上述之實情,提供一種更爲簡便並可高 精度檢測透明管的氣泡的透明管之氣泡檢測裝置及氣泡檢 測方法。 [解決課題的手段] (1 )本發明的透明管之氣泡檢測裝置,其特徵爲, 具備:朝光穿透性的原材料所成的大致圓筒狀的被檢查物 照射光的照明裝置,及從上述被檢查物的軸向顯示的場合 -6 -[Technical Field] The present invention relates to an apparatus and method for detecting bubbles of a substantially cylindrical test object formed by a light-transmitting raw material such as glass or resin. [Prior Art] In the manufacturing step of the glass tube, when bubbles (bubbles) are generated inside the glass, the bubbles generated inside are extended into a thin strip in the extending step and remain inside the glass, and then the glass tube is subsequently placed. When manufacturing various components (for example, the backlight of a liquid crystal display), it causes various problems. For this reason, in the manufacture of a glass tube, it is necessary to detect defects of the strip-shaped bubbles remaining inside the glass by an inspection step. In the past, the detection of the above-mentioned strips of bubbles was generally carried out by visual inspection by a skilled person. However, visual inspections require time and labor and can cause obstacles to productivity. In particular, in the inspection of a glass tube for a backlight of a liquid crystal display, it is necessary to use a microscope to inspect a thin glass tube having an outer diameter of about 2 to 4 mm, so that it takes a lot of time and labor. Further, the bubble generated inside the transparent glass substrate is difficult even if the skilled person finds it correctly, and it is difficult to prevent the occurrence of erroneous detection of bubbles such as flaws or dirt which are not detected as errors in the microbubbles. On the other hand, a method of detecting the residual air bubbles by detecting the scattered light generated by the bubbles inside the glass by irradiating the laser light vertically to the glass tube is proposed (for example, see Patent Document 1). [Patent Document 1] [Patent Document 1] Japanese Unexamined Patent Publication No. Hei No. Hei No. Hei. The method can only perform fixed-point detection from the use of laser light, and it is necessary to scan the laser light in the axial direction together with the rotation of the glass tube when inspecting across a predetermined inspection range, and there is a problem that it takes a lot of time for inspection. The scattered light generated by bubbles or sputum, dirt, etc. inside the glass, which is determined by the waveform of the light detected by the photodetector, is further refracted by the inner and outer surfaces of the cylindrical glass tube. Since it is reflected, it is extremely difficult to accurately distinguish the scattered light generated only by the bubble based on the difference in the waveform, and there is a problem that most of the errors are detected. SUMMARY OF THE INVENTION The present invention has been made in view of the above circumstances, and provides a bubble detecting device and a bubble detecting method for a transparent tube which is simpler and more capable of detecting bubbles of a transparent tube. [Means for Solving the Problem] (1) The apparatus for detecting a bubble of a transparent tube according to the present invention, comprising: a illuminating device that illuminates a substantially cylindrical object to be inspected by a light-transmitting material, and From the axial display of the above-mentioned object to be inspected -6 -

S 201224443 ’從來自相對於上述照明裝置的光軸之上述光的上游側的 角度形成鈍角的方向進行上述被檢查物攝影的攝影裝置, 上述攝影裝置在從上述被檢查物的軸向顯示的場合,朝著 上述光的上游側偏移,配置使本身的光軸不與上述被檢查 物的軸心交叉。 (2 )本發明又如上述(1 )記載的透明管之氣泡檢測 裝置’其特徵爲:上述攝影裝置在從上述被檢查物的軸向 顯示的場合’配置使本身的光軸與上述照明裝置的光軸以 1 10至150度的角度交叉。 (3) 本發明又如上述(1)或(2)記載的透明管之 氣泡檢測裝置’其特徵爲:上述攝影裝置在從上述被檢查 物的軸向顯示的場合,在與本身的光軸正交的方向配置使 本身的光軸位於上述被檢査物的軸心到上述被檢查物的外 半徑的40至60%的距離。 (4) 本發明又如上述(1)至(3)的其中之—記載 的透明管之氣泡檢測裝置’其特徵爲:上述照明裝置構成 可照射縫隙光或定點光。 (5 )本發明又如上述(4 )記載的透明管之氣泡檢測 裝置’其特徵爲:從上述被檢查物的軸向顯示場合的上述 縫隙光或上述定點光的寬度是在上述被檢查物的外徑以下 〇 (6)本發明又如上述(1)至(5)的其中之一記載 的透明管之氣泡檢測裝置,其特徵爲:上述攝影裝置是以 上述被檢查物的軸向爲寬度方向所配置的行掃描攝影機。S 201224443 'the imaging device that performs the imaging of the object to be inspected from an angle from the upstream side of the light on the optical axis of the illumination device, and the imaging device is displayed from the axial direction of the object to be inspected The light is shifted toward the upstream side of the light, and is disposed such that its optical axis does not cross the axis of the object to be inspected. (2) The bubble detecting device for a transparent tube according to the above (1), wherein the image capturing device is configured to dispose its own optical axis and the lighting device when viewed from the axial direction of the object to be inspected The optical axes intersect at an angle of 1 10 to 150 degrees. (3) The bubble detecting device for a transparent tube according to the above (1) or (2), wherein the image capturing device is in the axial direction of the object to be inspected, and is in the optical axis of itself The orthogonal direction is arranged such that its optical axis is located at a distance of 40 to 60% of the axial center of the object to be inspected to the outer radius of the object to be inspected. (4) The bubble detecting device for a transparent tube according to any one of the above (1) to (3), wherein the illuminating device is configured to illuminate slit light or fixed-point light. (5) The bubble detecting device for a transparent tube according to the above (4), wherein the width of the slit light or the fixed point light when the axial direction of the inspection object is displayed is the object to be inspected (6) The bubble detecting device for a transparent tube according to any one of the above (1) to (5), wherein the photographing device is in the axial direction of the object to be inspected Line scan camera configured in the width direction.

201224443 (7)本發明的透明管之氣泡檢測方法,其特徵爲: 朝著光穿透性的原材料所成的大致圓筒狀的被檢查物照射 光,從上述被檢查物的軸向顯示的場合從相對於上述光的 光軸之上述光的上游側的角度是形成鈍角的方向,並且從 上述被檢查物的軸向顯示的場合從上述光的上游側偏移的 位置進行上述被檢查物的攝影,藉此檢測出起因於上述被 檢查物內之氣泡的折射光或反射光。 (8 )本發明又如上述(7 )記載的透明管之氣泡檢測 方法,其特徵爲:從上述被檢查物的軸向顯示的場合,由 相對於上述光的光軸的上述光的上游側的角度成110至150 度的方向進行上述被檢查物的攝影。 [發明效果] 根據本發明相關的透明管之氣泡檢測裝置及氣泡檢測 方法’可獲得更爲簡便並可高精度檢測透明管之氣泡的優 異效果。 【實施方式】 以下’參閱圖示針對本發明的實施形態的例詳細說明 〇 第1圖是表示本發明實施形態有關的氣泡檢測裝置1之 構成的槪略圖。如同圖表示,氣泡檢測裝置1,具備:照 明裝置10、攝影裝置20、旋轉裝置3 0及控制裝置40,檢測 存在於玻璃或樹脂等光穿透性的原材料所成之大致圓筒狀(2012) The method for detecting a bubble in a transparent tube according to the present invention is characterized in that the substantially cylindrical object to be inspected by the light-transmitting material is irradiated with light, and is displayed from the axial direction of the object to be inspected. In the case where the angle from the upstream side of the light with respect to the optical axis of the light is a direction in which an obtuse angle is formed, and when the object is displayed in the axial direction of the object to be inspected, the object to be inspected is displaced from the upstream side of the light. The photographing thereby detects the refracted light or the reflected light caused by the bubbles in the object to be inspected. (8) The method for detecting a bubble of a transparent tube according to the above (7), characterized in that, when the object is displayed in the axial direction, the upstream side of the light with respect to the optical axis of the light is used. The angle of the object is photographed in the direction of 110 to 150 degrees. [Effect of the Invention] According to the bubble detecting device for a transparent tube and the bubble detecting method of the present invention, it is possible to obtain an excellent effect of more easily and highly accurately detecting bubbles of a transparent tube. [Embodiment] The following is a detailed description of an embodiment of the present invention. Fig. 1 is a schematic diagram showing the configuration of a bubble detecting device 1 according to an embodiment of the present invention. As shown in the figure, the bubble detecting device 1 includes a lighting device 10, an image capturing device 20, a rotating device 30, and a control device 40, and detects a substantially cylindrical shape of a light-transmitting material such as glass or resin.

-8- S 201224443 的被檢查物50的管壁52內部的條狀氣泡60。 本實施形態的氣泡檢測裝置1是構成藉著照明裝置10 從上方進行以軸心50a爲水平面內的一方向而配置之被檢 查物50的照明,藉旋轉裝置30以軸心50a爲中心一邊旋轉 被檢査物50,並以攝影裝置20從鉛直下方進行被檢查物50 的攝影。此外,以下的說明是在水平面內以正交於被檢査 物50的軸心50a的方向爲X方向,鉛直方向爲Y方向,被檢 查物50的軸心50a方向爲Z方向" 照明裝置1 〇,具備:具有金屬鹵化物水銀燈的光源1 2 ;誘導光源12的光的光纖14:及將來自光纖14的光聚光後 的縫隙光L朝向被檢查物50照射的聚光透鏡16。聚光透鏡 16是藉著省略圖示的支架所支撐,配置從被檢查物50的斜 向上方照射縫隙光L。 又,聚光透鏡16是將縫隙光L的寬方向配置在Z方向 ,即與被檢查物50的軸心50a成平行。因此,聚光透鏡16 是形成跨軸心5〇a方向的預定範圍進行被檢查物5〇的照射 。此外,縫隙光L的寬度尤其不加以限定,只要可及於攝 影裝置20的攝影範圍(即檢查範圍)的寬度即可。因此, 在設定窄的檢查範圍的場合,聚光透鏡16可以是照射定點 光。 攝影裝置20再本實施形態是由行掃描攝影機(行感測 器)所構成,配置從垂直下方進行被檢查物50下側的攝影 。攝影裝置20是配置使攝影範圍的寬方向成爲z方向,可 跨軸心50 a方向的預定的檢查範圍進行被檢查物5〇的攝影 -9- 201224443 旋轉裝置30,具備··載放有被檢査物50的2個輥32, 及馬達等所構成的驅動裝置34。驅動裝置34被至少連接在 2個輥32的至少一方,藉著旋轉驅動輥32使被檢查物50以 軸心50a爲中心旋轉。即’本實施形態是藉著使被檢査物 50 —邊旋轉一·邊進行攝影裝置20的攝影’以跨全周圍進ίΤ 被檢查物50的攝影。 再者,旋轉裝置30也可以其他已知的手法來旋轉被檢 查物50。或者,不使被檢查物50旋轉,而是使照明裝置10 及攝影裝置20在被檢查物50的周圍旋轉。另外,除旋轉裝 置30之外,也可設置使被檢査物50在軸心50a方向移動的 移動裝置,跨被檢查物50的軸心50a方向的全長進行檢查 〇 控制裝置40是除CPU、ROM、RAM及硬碟等之外,並 具備顯示裝置及輸入裝置等的電腦。控制裝置4 0是與照明 裝置1〇、攝影裝置20及旋轉裝置30電連接,以控制該等裝 置的動作。又,控制裝置40是接收攝影裝置20攝影後的攝 影數據進行影像處理,進行是否已檢測出存在於被檢査物 50的管壁52內部之氣泡60的判定。 將攝影後的影像數據及判定結果儲存在硬碟等的儲存 手段並顯示於顯示裝置。並依需要送訊到外部的機器。此 外’也可以專用的裝置進行影像處理及氣泡檢測的判定。 第2圖是表示從z方向(軸心5〇a方向)顯示場合的聚 光透鏡16及攝影裝置2〇的配置圖。如同圖表示,攝影裝置-8- S 201224443 The stripe bubble 60 inside the tube wall 52 of the object 50 to be inspected. The bubble detecting device 1 of the present embodiment is configured to illuminate the object to be inspected 50 arranged in a direction in which the axis 50a is in the horizontal plane from above by the illuminating device 10. The rotating device 30 rotates around the axis 50a. The object 50 to be inspected is photographed by the photographing device 20 from the vertically lower side. In the following description, the direction orthogonal to the axial center 50a of the test object 50 in the horizontal plane is the X direction, the vertical direction is the Y direction, and the direction of the axial center 50a of the test object 50 is the Z direction " illumination device 1 In other words, the light source 12 having a metal halide mercury lamp; the optical fiber 14 that induces light from the light source 12: and the condensing lens 16 that illuminates the slit light L after the light from the optical fiber 14 is directed toward the inspection object 50. The condensing lens 16 is supported by a bracket (not shown), and is arranged to illuminate the slit light L obliquely upward from the inspection object 50. Further, the condenser lens 16 has the width direction of the slit light L arranged in the Z direction, that is, parallel to the axis 50a of the test object 50. Therefore, the condensing lens 16 is irradiated with the object 5 被 in a predetermined range in the direction of the axis 5a. Further, the width of the slit light L is not particularly limited as long as it is achievable with the width of the photographing range (i.e., the inspection range) of the photographing device 20. Therefore, in the case where a narrow inspection range is set, the condensing lens 16 may illuminate the fixed point light. In the present embodiment, the photographing apparatus 20 is constituted by a line scan camera (line sensor), and is arranged to perform photographing on the lower side of the object 50 from the vertical direction. The photographing device 20 is configured such that the wide direction of the photographing range is set to the z direction, and the photographed object 5 can be photographed in a predetermined inspection range in the direction of the axis 50a. The -9-201224443 rotating device 30 is provided with The two rollers 32 of the inspection object 50 and the drive device 34 constituted by a motor or the like. At least one of the two rollers 32 is connected to the driving device 34, and the inspection object 50 is rotated about the axis 50a by the rotation driving roller 32. In other words, in the present embodiment, the photographing device 20 is photographed by rotating the object to be inspected 50 to capture the object 50. Further, the rotating device 30 can also rotate the object to be inspected 50 by other known methods. Alternatively, the illumination device 10 and the imaging device 20 are rotated around the inspection object 50 without rotating the inspection object 50. Further, in addition to the rotating device 30, a moving device that moves the inspection object 50 in the direction of the axis 50a may be provided, and inspection is performed across the entire length of the axis 50a of the inspection object 50. The control device 40 is a CPU and a ROM. In addition to RAM, hard disk, etc., it also has a display device and an input device. The control device 40 is electrically connected to the illumination device 1A, the imaging device 20, and the rotation device 30 to control the operation of the devices. Further, the control device 40 determines whether or not the bubble data 60 existing in the tube wall 52 of the test object 50 has been detected by receiving the image data after the image capturing by the image capturing device 20 and performing image processing. The captured image data and the determination result are stored in a storage means such as a hard disk and displayed on the display device. And send it to an external machine as needed. In addition, it is also possible to perform image processing and bubble detection by a dedicated device. Fig. 2 is a view showing the arrangement of the condenser lens 16 and the imaging device 2A in the case of display in the z direction (axis 5a direction). As shown in the figure, the camera

S -10- 201224443 20是以本身的光軸20a爲Y方向(垂直方向)配置在被檢查 物50的下方。並且,本實施形態中,聚光透鏡16是在被檢 查物50的上方,配置使本身的光軸16a與攝影裝置20的光 軸20a交叉的角度0形成140度。換言之,攝影裝置20從Z 方向顯示的場合,配置使得從相對於聚光透鏡16 (即,縫 隙光L )的光軸163的縫隙光L上游側(聚光透鏡16側)的 角度0形成約140度的方向進行被檢查物50的攝影。 在此,從相對於聚光透鏡16的光軸16a的縫隙光L上游 側的角度0,更詳細而言,聚光透鏡16的光軸16a與攝影 裝置20的光軸20a的交點爲I的場合,較聚光透鏡16的光軸 16a的交點I更位於縫隙光L的上游側部份的角度。因此, 聚光透鏡16及攝影裝置2 0是配置使得較聚光透鏡16的光軸 16a的交點I更位於縫隙光L上游側的部份,及較攝影裝置 20的光軸20a的交點I更位於攝影裝置20側的部份所成的角 度0形成約140度。 如上述配置聚光透鏡16及攝影裝置20,進行被檢查物 5 0攝影的場合,可以明瞭的對比來捕捉存在於較周圍明亮 之輝點(輝線)的管壁52內部的氣泡60。具體而言,可一 邊避免穿透被檢查物5 0之後的縫隙光L1直接射入攝影裝置 20,一邊以藉著管壁52內部的氣泡60產生折射光的一部份 ,作爲沿著攝影裝置20的光軸20a的方向進行的檢測光L2 ,射入至攝影裝置2〇。亦即,檢測光L2是以較射入至攝影 裝置20的其他的光強的光來檢測。藉此,來自氣泡60的光 的檢測光L2可以明瞭對比將比周圍更亮的輝點或輝線顯像 -11 - 201224443 於影像中,所以可以高精度檢測出氣泡60。 再者,聚光透鏡16及攝影裝置20被省略圖示的支架所 支撐’該支架具備可調整聚光透鏡16或攝影裝置20的X、 Y、Z方向的位置,及方向(光軸16a、20a的方向)的調 整機構。 藉此調整機構,可調節從被檢查物50到聚光透鏡16爲 止的距離A,可適當調節照射於被檢査物50的縫隙光L的 光量。又,由於縫隙光L有若干擴散,調節距離A,即可 調節射入到被檢查物5 0的縫隙光L的寬度及厚度。 並且,調節從被檢查物50到攝影裝置20爲止的距離B ,可適當調節攝影裝置20的X方向及Y方向的攝影範圍, 及攝影之影像的亮度。 並藉此調整機構也可以調節攝影裝置20的光軸20a相 對於軸心50a的偏移量S1 (從與光軸20a正交方向的軸心 50a的距離),及聚光透鏡16的光軸16a相對於軸心50a的 偏移量S2(從與光軸16 a正交方向的軸心50a的距離)。藉 此攝影裝置20之偏移量S1及聚光透鏡16之偏移量S2的適當 調節,可降低穿透被檢查物50後的縫隙光L1與被檢査物周 圍產生的散射光等的影響,因此可進行更明瞭對比之影像 的攝影。 第3圖是表示以攝影裝置20攝影之影像70的例的槪略 圖。藉旋轉裝置30使得被檢查物50 —邊旋轉,並以攝影裝 置50進行被檢查物50的攝影,藉此如同圖表示’獲得橫向 爲Z方向(軸心50a方向)、縱向爲被檢查物50周圍方向的S -10- 201224443 20 is disposed below the inspection object 50 with its own optical axis 20a being in the Y direction (vertical direction). Further, in the present embodiment, the condensing lens 16 is disposed above the object to be inspected 50 so as to form an angle 0 at which the optical axis 16a of the imaging device 20 intersects with the optical axis 20a of the imaging device 20 at 140 degrees. In other words, when the photographing device 20 is displayed from the Z direction, it is disposed such that an angle 0 from the upstream side (the collecting lens 16 side) of the slit light L with respect to the optical axis 163 of the collecting lens 16 (that is, the slit light L) is formed. The inspection of the object 50 is performed in a direction of 140 degrees. Here, from the angle 0 on the upstream side of the slit light L with respect to the optical axis 16a of the collecting lens 16, in more detail, the intersection of the optical axis 16a of the collecting lens 16 and the optical axis 20a of the photographing device 20 is I. In this case, the intersection I of the optical axis 16a of the collecting lens 16 is located at an angle of the upstream side portion of the slit light L. Therefore, the condensing lens 16 and the photographing device 20 are disposed such that the intersection I of the optical axis 16a of the condensing lens 16 is located further on the upstream side of the slit light L, and the intersection I of the optical axis 20a of the photographing device 20 is more The angle 0 formed by the portion on the side of the photographing device 20 forms about 140 degrees. When the condensing lens 16 and the photographing device 20 are arranged as described above and the photographed object 50 is photographed, the bubbles 60 existing inside the tube wall 52 which is brighter than the surrounding bright spots (light lines) can be captured with a clear contrast. Specifically, it is possible to prevent a part of the refracted light from being generated by the bubble 60 inside the tube wall 52 while avoiding the slit light L1 after penetrating the object to be inspected 50 directly into the photographing device 20 as a photographic apparatus. The detection light L2 in the direction of the optical axis 20a of 20 is incident on the imaging device 2A. That is, the detection light L2 is detected by light of other light intensities that are incident on the photographing device 20. Thereby, the detection light L2 of the light from the bubble 60 can clearly reflect the bright spot or the bright line image -11 - 201224443 which is brighter than the surroundings, so that the bubble 60 can be detected with high precision. Further, the condensing lens 16 and the imaging device 20 are supported by a bracket (not shown). The holder includes a position, and a direction (the optical axis 16a, the X, Y, and Z directions of the condensing lens 16 or the imaging device 20 can be adjusted. Adjustment mechanism for the direction of 20a). By this adjustment mechanism, the distance A from the inspection object 50 to the condensing lens 16 can be adjusted, and the amount of light of the slit light L irradiated to the inspection object 50 can be appropriately adjusted. Further, since the slit light L is diffused a little, the width A and the thickness of the slit light L incident on the object to be inspected 50 can be adjusted by adjusting the distance A. Further, by adjusting the distance B from the inspection object 50 to the photographing device 20, the photographing range of the photographing device 20 in the X direction and the Y direction and the brightness of the photographed image can be appropriately adjusted. Thereby, the adjustment mechanism can also adjust the shift amount S1 of the optical axis 20a of the photographing device 20 with respect to the axial center 50a (the distance from the axial center 50a in the direction orthogonal to the optical axis 20a), and the optical axis of the collecting lens 16. The offset S2 of 16a with respect to the axis 50a (the distance from the axis 50a in the direction orthogonal to the optical axis 16a). By appropriately adjusting the shift amount S1 of the photographing device 20 and the shift amount S2 of the condensing lens 16, the influence of the slit light L1 penetrating the test object 50 and the scattered light generated around the object to be inspected can be reduced. Therefore, it is possible to perform photography with a more contrasting image. Fig. 3 is a schematic diagram showing an example of an image 70 photographed by the photographing device 20. The object to be inspected 50 is rotated by the rotating device 30, and the image of the object to be inspected 50 is photographed by the photographing device 50, whereby the image is obtained as 'the lateral direction is the Z direction (the direction of the axis 50a), and the longitudinal direction is the object to be inspected 50. Surrounding direction

-12- S 201224443 影像70。亦即,獲得以Z方向的預定檢查範圍使被檢查物 5 0的全周圍顯像的有如展開圖的影像7〇。 如上述,攝影裝置20是從相對於聚光透鏡16的光軸 16a的角度0爲約140度的方向進行被檢查物50的攝影,所 以影像70的大部份是形成顯現出被檢查物50爲較暗的區域 。但是,被檢査物50的管壁52內部存在有氣泡60的場合是 如同圖表示,顯現出此氣泡60所折射或反射的光一部份的 檢測光L2爲較周圍明亮的明亮區域72。本實施形態是如上 述以存在於被檢查物50的氣泡60爲影像顯現,因此可容易 以直覺來辨識氣泡60的有無。 該明亮區域72可考慮以對應氣泡60的尺寸顯現。因此 ,算出明亮區域72的橫向尺寸W及縱向尺寸Η,藉此判斷 明亮區域72是起因於氣泡60或因散射等其他的要因所致, 並可判斷是否視所檢測的氣泡60爲缺陷的大小。 具體而言,控制裝置40是在由攝影裝置20收訊的影像 70中,判定周圍是否有較預定的臨界値以上明亮的明亮區 域72。判定有較預定臨界値以上明亮的明亮區域72的場合 ,接著,導出該區域的橫向尺寸W及縱向尺寸Η,將橫向 尺寸W及縱向尺寸Η和預先設定的臨界値(最小値及最大 値)比較。並且,橫向尺寸W及縱向尺寸Η皆在預先設定 的範圍內的場合,判定在該被檢查物50存在有形成缺陷的 氣泡60。 較預定臨界値以上明亮的明亮區域72有複數個的場合 ,針對各個明亮區域72執行上述程序。藉此,可算出該被-12- S 201224443 Image 70. That is, an image 7 〇 like a developed image in which the predetermined inspection range in the Z direction is used to develop the entire periphery of the object 50 is obtained. As described above, the photographing device 20 performs the photographing of the inspection object 50 from the angle 0 with respect to the optical axis 16a of the collecting lens 16 of about 140 degrees. Therefore, most of the image 70 is formed to show the object to be inspected 50. It is a darker area. However, when the bubble 60 is present inside the tube wall 52 of the test object 50, as shown in the figure, the detection light L2 which shows a part of the light refracted or reflected by the bubble 60 is a bright area 72 which is brighter than the periphery. In the present embodiment, as described above, the air bubbles 60 existing in the test object 50 appear as images, so that the presence or absence of the air bubbles 60 can be easily recognized intuitively. This bright area 72 can be considered to appear in the size of the corresponding bubble 60. Therefore, the lateral dimension W and the longitudinal dimension 明亮 of the bright region 72 are calculated, thereby judging whether the bright region 72 is caused by the bubble 60 or other factors due to scattering, and whether or not the detected bubble 60 is defective. . Specifically, the control device 40 determines whether or not there is a bright region 72 that is brighter than a predetermined threshold or more in the image 70 received by the photographing device 20. When it is determined that there is a bright region 72 that is brighter than a predetermined threshold ,, then the lateral dimension W and the longitudinal dimension 该 of the region are derived, and the lateral dimension W and the longitudinal dimension Η and the preset threshold 値 (minimum 値 and maximum 値) are derived. Comparison. Further, when both the lateral dimension W and the longitudinal dimension 在 are within a predetermined range, it is determined that the bubble 60 forming the defect exists in the test object 50. When there are a plurality of bright areas 72 that are brighter than the predetermined threshold, the above-described program is executed for each bright area 72. By this, the quilt can be calculated

S -13- 201224443 檢查物50中存在有視爲缺陷的氣泡60的數量。 此外,也可導出明亮區域72的面積,將導出的面積與 臨界値比較藉此進行判定。或不根據僅使得被檢查物50 — 旋轉後的影像來判定有無形成缺陷的氣泡60,而是例如對 2〜3旋轉後的被檢查物50的影像進行攝影,根據周期性 存在於該影像中的明亮區域72來判定有無形成缺陷的氣泡 60 ° 接著,針對存在於被檢查物50的管壁52內部的氣泡60 之檢測原理說明如下。 第4圖是表示從Z方向顯示射入到被檢查物50的管壁52 內部的氣泡60的光Lb路徑之一例的場合的槪略圖。並且, 同圖中,表示被檢查物50的折射率爲1.5,氣泡60內部的 氣體的折射率爲1.0的場合的例。 存在於被檢査物50的管壁52內部的氣泡60爲垂直於軸 心50a的剖面形狀是形成大致圓形,並在內部封入有空氣 等的氣體。因此,如同圖表示,射入到存在於被檢查物50 的管壁52內部的氣泡60的光Lb是根據氣泡60內部與被檢查 物50的折射率的不同而在邊界面62曲折或反射,從原來進 行方向朝著擴散的方向變更其進路。 並且’本實施形態將上述的角度0設定爲約140度, 藉此從該等折射光及反射光之中,檢測出作爲檢測光L 2之 進行方向的變化率與光的強度良好平衡的圖的區域C中一 部份的折射光。具體而言,設被檢查物50的折射率爲1.5 ,氣泡60內部的折射率爲1.〇的場合,檢測從相對於光Lb 201224443 的原來進行方向的上游側(光源側)的角度α大約成 150〜170度左右的折射光作爲檢測光L2。 第5圖是表示從Ζ方向顯示穿透被檢查物50的縫隙光L 的路徑之一例的場合的槪略圖。並且,同圖是表示被檢查 物50的折射率爲1.5,空氣的折射率爲1.0的場合的例。如 同圖表示,從聚光透鏡16照射到被檢查物50的縫隙光L是 射入被檢查物50的外表面54進入到管壁52內部,並從內表 面5 6進入至內部空間58。此外,進入到內部空間58的縫隙 光L是再度從內表面56進入到管壁52內部,並從外表面54 射出至外部。 穿透被檢查物50的縫隙光L是在管壁52與空氣邊界面 的外表面54及內表面56曲折,各個邊界面的曲折角是隨著 從軸心50a遠離而變大。並且,通過軸心5〇a的光是在與外 表面54及內表面56正交的方向進行,所以不會曲折。又, 從軸心50a射入至離開預定位置距離以上位置的縫隙光L是 在進入管壁52內部之後以內表面56全反射,因此不會進入 內部空間58而是形成從外表面54射出的全反射光L3 * 本實施形態是將上述的角度0設定爲大約140度,檢 測從內部空間進入到管壁52內部的縫隙光L射入至氣泡 6〇時所產生折射光中的區域c之折射光的一部份作爲檢測 光L2 〇 具體而言’管壁52內部存在有氣泡60,如同圖表示, 從內部空間58進入到管壁52內部的縫隙光l一旦射入氣泡 60時’會產生折射光及反射光。並且,該等的折射光及反 -15- 201224443 射光之中,在區域c中以預定的角度(同圖表示的例中, α=約168度)曲折的折射光Lc在到達被檢查物50的外表面 54時更進一步曲折,使得從相對於聚光透鏡16的光軸16a 的上游側(光源側)的角度/3形成約140度的方向射出》 亦即,形成/9=0,根據氣泡60所產生折射光中的預 定的折射光Lc是沿著攝影裝置20的光軸20a的方向射出。 藉此,攝影裝置2〇可檢測出該折射光Lc較周圍的光強的檢 測光L2。 在此,同圖中的直線20b是在被檢查物50的外表面54 曲折朝著攝影裝置20的光軸2 0a方向射出的光之管壁52內 部的進行方向。因此,區域C中預定的折射光Lc是沿著直 線20b在管壁52內部進行,並在外表面54曲折沿著攝影裝 置20的光軸20a射出。換言之,在對應光軸20a的直線20b 上存在有氣泡60的場合,區域C中的其中之一折射光Lc會 沿著直線20b進行,在外表面54曲折而沿著光軸20a射出。 第6圖是表示從Z方向顯示射入至位於其他位置的氣泡 60之光路徑的一例的場合的槪略圖。被檢查物50爲大致圓 筒狀,對應內表面56及外表面54的位置使縫隙光L的射入 角變化,對此也改變折射角。但是,如同圖表示,在比通 過軸心50a的縫隙光L接近攝影裝置20側(圖的右側)從內 部空間58進入管壁52內部的縫隙光L是形成使射入氣泡60 所產生區域C中的其中之一(α爲大約150〜170度的範圍 )的折射光Lc從外表面54朝著攝影裝置20的光軸20a射出S -13- 201224443 The number of bubbles 60 regarded as defects exists in the inspection object 50. Further, the area of the bright area 72 can be derived, and the derived area can be compared with the critical value to determine. Alternatively, it is not determined whether or not the bubble 60 forming the defect is formed by the image of the object to be inspected 50. For example, the image of the object 50 after the rotation of 2 to 3 is imaged, and the image is periodically present in the image. The bright area 72 determines whether or not there is a bubble 60° which is defective. Next, the principle of detection of the bubble 60 existing inside the tube wall 52 of the test object 50 will be described below. Fig. 4 is a schematic diagram showing an example of a light Lb path of the bubble 60 incident on the inside of the tube wall 52 of the test object 50 from the Z direction. Further, in the same figure, an example in which the refractive index of the test object 50 is 1.5 and the refractive index of the gas inside the bubble 60 is 1.0 is shown. The bubble 60 existing inside the tube wall 52 of the test object 50 has a cross-sectional shape perpendicular to the axis 50a, and is formed into a substantially circular shape, and a gas such as air is sealed inside. Therefore, as shown in the figure, the light Lb incident on the bubble 60 existing inside the tube wall 52 of the test object 50 is bent or reflected at the boundary surface 62 in accordance with the difference in the refractive index between the inside of the bubble 60 and the test object 50, Change the way from the original direction to the direction of diffusion. In the present embodiment, the angle 0 described above is set to about 140 degrees, whereby a map in which the rate of change of the direction of detection of the detection light L 2 and the intensity of the light are well balanced is detected from the refracted light and the reflected light. A portion of the refracted light in region C. Specifically, when the refractive index of the test object 50 is 1.5 and the refractive index inside the bubble 60 is 1. ,, the angle α from the upstream side (light source side) with respect to the original direction of the light Lb 201224443 is detected. The refracted light of about 150 to 170 degrees is used as the detection light L2. Fig. 5 is a schematic diagram showing an example of a path in which the slit light L penetrating the test object 50 is displayed from the x direction. Further, the same figure shows an example in which the refractive index of the test object 50 is 1.5 and the refractive index of air is 1.0. As shown in the same figure, the slit light L irradiated from the condensing lens 16 to the inspection object 50 enters the inside of the pipe wall 52 from the outer surface 54 of the inspection object 50, and enters the internal space 58 from the inner surface 56. Further, the slit light L entering the internal space 58 is again entered from the inner surface 56 into the inside of the tube wall 52, and is emitted from the outer surface 54 to the outside. The slit light L penetrating the test object 50 is meandered at the outer surface 54 and the inner surface 56 of the pipe wall 52 and the air boundary surface, and the meander angle of each boundary surface becomes larger as it goes away from the axis 50a. Further, since the light passing through the axis 5a is formed in a direction orthogonal to the outer surface 54 and the inner surface 56, it does not meander. Further, the slit light L that is incident from the axis 50a to a position away from the predetermined position is totally reflected by the inner surface 56 after entering the inside of the pipe wall 52, so that it does not enter the internal space 58 but forms the entire emission from the outer surface 54. Reflected light L3 * In the present embodiment, the above-described angle 0 is set to about 140 degrees, and the refraction of the region c in the refracted light generated when the slit light L entering the inside of the tube wall 52 from the internal space enters the bubble 6 检测 is detected. A part of the light is used as the detection light L2. Specifically, the bubble 60 is present inside the tube wall 52. As shown in the figure, the slit light 1 entering the inside of the tube wall 52 from the internal space 58 is generated when it enters the bubble 60. Refracted light and reflected light. Further, among the refracted light and the -15-201224443 light, the refracted light Lc that is meandered at a predetermined angle (in the example shown in the figure, α = about 168 degrees) reaches the object to be inspected 50 in the region c. The outer surface 54 is further bent so that an angle /3 from the upstream side (light source side) of the optical axis 16a of the collecting lens 16 is formed in a direction of about 140 degrees, that is, /9=0 is formed, according to The predetermined refracted light Lc among the refracted lights generated by the bubble 60 is emitted in the direction of the optical axis 20a of the photographing device 20. Thereby, the photographing device 2 can detect the detection light L2 whose intensity of the refracted light Lc is higher than the surrounding light. Here, the straight line 20b in the same figure is a direction in which the inside of the tube wall 52 of the light emitted from the outer surface 54 of the inspection object 50 is bent toward the optical axis 20a of the photographing device 20. Therefore, the predetermined refracted light Lc in the region C is formed inside the tube wall 52 along the straight line 20b, and is bent at the outer surface 54 along the optical axis 20a of the photographing device 20. In other words, in the case where the bubble 60 is present on the straight line 20b corresponding to the optical axis 20a, one of the refracted lights Lc in the region C proceeds along the straight line 20b, and is bent at the outer surface 54 to be emitted along the optical axis 20a. Fig. 6 is a schematic diagram showing an example of a case where an optical path of the bubble 60 located at another position is displayed from the Z direction. The object to be inspected 50 has a substantially cylindrical shape, and the position of the inner surface 56 and the outer surface 54 changes the incident angle of the slit light L, and the angle of refraction is also changed. However, as shown in the figure, the slit light L entering the inside of the tube wall 52 from the internal space 58 on the side closer to the photographing device 20 (the right side of the drawing) than the slit light L passing through the axial center 50a is formed in the region C where the incident bubble 60 is generated. The refracted light Lc of one of them (α is in the range of about 150 to 170 degrees) is emitted from the outer surface 54 toward the optical axis 20a of the photographing device 20.

-16- S 201224443 亦即,本實施形態即使在X方向的任意位置配置攝影 裝置20,仍可檢測出氣泡60所產生的折射光Lc較周圍的光 強的檢測光L2。因此,可根據被檢查物50周圍的散射光與 外擾光的影響等適當設定攝影裝置20的X方向的位置,可 進一步提升檢測精度。 又,本實施形態中,氣泡60位在對應於設定之光軸 20a的直線20b上時,不依據氣泡60的管壁52內部之半徑方 向的位置,可以折射光Lc作爲檢測光L2進行檢測。因此, 以軸心50a爲中心使被檢査物50旋轉,藉此可跨管壁52內 部的半徑方向及周圍方向的全範圍毫不遺漏地進行氣泡檢 測。 另外,藉著位在對應設定之光軸20a的直線20b上以外 的氣泡60所產生的折射光或反射光不會成爲沿軸心50a的 檢測光L2,所以1個氣泡60不致進行重複檢測。又,外表 面54或內表面56的瑕疵或污染,起因於附著物等的折射光 或反射光也不致成爲沿軸心5 0a的檢測光L2,所以也不會 將該等瑕疵或污染等誤檢測爲氣泡60。 如上述,本實施形態是利用大致圓筒狀的被檢查物50 的外表面54及內表面56的曲折,以氣泡60產生的折射光之 中,最適合檢測的區域C中的折射光Lc作爲檢測光L2進行 檢測。藉此,可選擇性地以明瞭的對比顯現出存在於攝影 裝置20側的管壁52內部的氣泡60,可進行高精度的氣泡檢 測。 此外,角度0的値不僅限於約140度,也可對應所照 -17- 201224443 射縫隙光L的波長、對此之被檢査物50的折射率或穿透率 、縫隙光L的光量、被檢查物50周匱I的外擾光等的條件加 以適當設定。 根據本申請案的發明人等的實驗,被檢查物5 0爲玻璃 或樹脂等的折射率1 ·4~2左右的原材料的場合,爲檢測形 成更強之檢測光L2的區域C的折射光Lc來提升檢測精度’ 以角度0在110〜150度的範圍內爲佳,並以13 0〜150度的範 圍內更佳,尤其以135〜145度的範圍內最佳。因此’本實 施形態是設定角度0約140度。 並可以區域C以外的折射光或反射光作爲檢測光L2進 行檢測。根據構成被檢査物50的原材料的性質或氣泡60的 狀態等,檢測區域C以外的折射光或反射光的一方可提升 檢測精度。此時,將角度0適當設定在鈍角(大於90度小 於180度)的範圍內,藉此可以氣泡60產生的折射光或反 射光作爲充分強度的檢測光L2來進行檢測,可檢測出氣泡 60 ° 回到第5圖,攝影裝置20的配置位置及偏移量S1尤其 不加以限定,但如同圖表示,藉著穿透被檢查物5 0之後的 縫隙光L 1攝影的影像整體會變亮,爲了避免對比的不明瞭 ’攝影裝置2〇以朝向聚光透鏡16側(縫隙光L的上游側) 偏移配置爲佳。亦即,攝影裝置20從Z方向顯示的場合, 以朝向聚光透鏡16側(圖右側)偏移配置,使被檢查物50 的軸心50a與攝影裝置20的光軸不交叉爲佳。另外,爲避 開全反射光L3或其周圍散射光的影響,獲得適當的對比, -18 -In the present embodiment, even if the photographing device 20 is disposed at any position in the X direction, the detection light L2 of the refracted light Lc generated by the bubble 60 is detected. Therefore, the position of the imaging device 20 in the X direction can be appropriately set in accordance with the influence of the scattered light around the object 50 and the influence of the external disturbance light, and the detection accuracy can be further improved. Further, in the present embodiment, when the bubble 60 is positioned on the straight line 20b corresponding to the set optical axis 20a, the refracted light Lc can be detected as the detection light L2 without depending on the position in the radial direction of the inside of the tube wall 52 of the bubble 60. Therefore, the object to be inspected 50 is rotated about the axis 50a, whereby the bubble detection can be performed across the entire range of the radial direction and the peripheral direction of the inner portion of the pipe wall 52. Further, the refracted light or the reflected light generated by the bubble 60 other than the straight line 20b corresponding to the set optical axis 20a does not become the detection light L2 along the axis 50a, so that one bubble 60 is not repeatedly detected. Further, the flaws or contamination of the outer surface 54 or the inner surface 56, the refracted light or the reflected light caused by the attached matter or the like does not become the detection light L2 along the axis 50a, and therefore does not cause such defects or contamination. It is detected as bubble 60. As described above, in the present embodiment, the outer surface 54 and the inner surface 56 of the substantially cylindrical inspection object 50 are bent, and the refracted light Lc in the region C which is most suitable for detection among the refracted light generated by the bubble 60 is used as the refracted light Lc. The detection light L2 is detected. Thereby, the air bubbles 60 existing inside the tube wall 52 on the side of the photographing device 20 can be selectively expressed in a clear contrast, and high-precision bubble detection can be performed. Further, the 角度 of the angle 0 is not limited to about 140 degrees, and may correspond to the wavelength of the slit light L to which the -17-201224443 is irradiated, the refractive index or transmittance of the object 50 to be inspected, the amount of light of the slit light L, and the Conditions such as external disturbance light of the inspection object for 50 weeks are appropriately set. According to the experiment of the inventors of the present application, when the test object 50 is a material having a refractive index of about 1. 4 to 2 such as glass or resin, the refracted light of the region C in which the stronger detection light L2 is formed is detected. Lc is used to improve the detection accuracy'. The angle 0 is preferably in the range of 110 to 150 degrees, and is preferably in the range of 13 0 to 150 degrees, especially in the range of 135 to 145 degrees. Therefore, the present embodiment is to set the angle 0 to about 140 degrees. The refracted light or the reflected light outside the area C can be detected as the detection light L2. Depending on the nature of the material constituting the test object 50, the state of the bubble 60, and the like, one of the refracted light or the reflected light other than the detection area C can improve the detection accuracy. At this time, the angle 0 is appropriately set within an obtuse angle (greater than 90 degrees and less than 180 degrees), whereby the refracted light or the reflected light generated by the bubble 60 can be detected as the sufficient intensity of the detection light L2, and the bubble 60 can be detected. ° Returning to Fig. 5, the arrangement position and the offset amount S1 of the photographing device 20 are not particularly limited, but as shown in the figure, the image photographed by the slit light L1 after penetrating the object to be inspected 50 becomes bright as a whole. In order to avoid the ambiguity of the comparison, it is preferable that the photographing device 2 is disposed offset toward the side of the collecting lens 16 (the upstream side of the slit light L). In other words, when the imaging device 20 is displayed in the Z direction, it is preferably arranged so as to be offset toward the condensing lens 16 side (the right side of the drawing) so that the axis 50a of the inspection object 50 does not intersect the optical axis of the imaging device 20. In addition, in order to avoid the influence of the totally reflected light L3 or the scattered light around it, an appropriate contrast is obtained, -18 -

S 201224443 偏移量S1是以被檢查物50的外半徑R的40-60%的距離爲佳 〇 另外,射入到從Z方向顯示場合的被檢查物50之縫隙 光L的寬度(射入至被檢查物50之縫隙光L的厚度)Lt雖不 加以限定,但是以內表面56全反射的全反射光L3等不需要 的散射光會在被檢查物50周圍產生,爲了避免攝影的影像 對比變得不明瞭,以被檢查物50的外徑D以下爲佳,只要 是被檢查物50的外半徑R以下即可。 並將縫隙光L的厚度Lt設定在被檢查物50的外徑以下 或外半徑R以下的場合,設定偏移量S2使得從被檢查物50 的內部空間58進入管壁52內部的縫隙光L之中,具有充分 光量的部份通過對應攝影裝置2 0的光軸20 a的直線20b爲佳 。另外的場合,偏移量S2是以設定全反射光L3不產生的距 離爲佳。 如以上說明,本實施形態有關的氣泡檢測裝置1,具 備:朝著光穿透性的原材料所成的大致圓筒狀的被檢査物 50照射光(縫隙光L)的照明裝置10,及從被檢查物50的 軸向(軸心50a方向或Z方向)顯示的場合,從相對於照明 裝置10 (聚光透鏡16)的光軸16a的光(縫隙光L)的上游 側的角度0形成鈍角的方向進行被檢查物50攝影的攝影裝 置2 0。 如以上的構成,有效運用被檢查物50的外表面54及內 表面56的曲折,可以使起因於氣泡60的折射光或反射光在 進行被檢查物50攝影的影像中,明瞭地顯現出較周圍明亮 -19- 201224443 的輝點或輝線。尤其是從被檢查物50的內部空間58進入到 攝影裝置2 0側的管壁5 2內部的縫隙光L可選擇性顯現出射 入至氣泡6 0時所產生的折射光或反射光,可高精度檢測被 檢查物50內的氣泡60。 再者,被檢查物50的材質只要可穿透所照射光的至少 —部份即可,例如可進行著色等。 又,攝影裝置20從被檢查物50的軸向(Z方向)顯示 的場合,配置使本身的光軸20a與照明裝置1〇(聚光透鏡 16)的光軸16a以110至150度的角度交叉。如此一來,起 因於氣泡60的折射光之中,可以攝影裝置20捕捉檢測時最 適當區域C的折射光Lc爲強的檢測光L2,所以可高精度進 行被檢查物50內之氣泡60的檢測。 另外,攝影裝置20從被檢查物50的軸向(Z方向)顯 示的場合,朝著光(縫隙光L )的上游側(聚光透鏡1 6側 )偏移,配置使本身的光軸20a不與被檢查物50的軸心50a 交叉。如此一來,使得穿透被檢查物50後的縫隙光L1的影 響減少,可以明瞭的對比顯現出檢測光L2。 又,攝影裝置20從被檢查物50的軸向(Z方向)顯示 的場合,在正交於本身的光軸20a的方向,配置使本身的 光軸20a位在從被檢查物50的軸心50a至被檢查物50的外半 徑R的40至60%的距離。如此一來,降低全反射光L3與其 周圍散射光的影響,可獲得適當對比的影像。 並且,照明裝置1 〇是構成可照射縫隙光或定點光。藉 此,可一次性覆蓋被檢查物59軸向的檢查範圍’因此可縮S 201224443 The offset S1 is preferably a distance of 40-60% of the outer radius R of the inspection object 50, and is incident on the width of the slit light L of the inspection object 50 when it is displayed from the Z direction (injection) Although the thickness Lt of the slit light L to the inspection object 50 is not limited, unnecessary scattered light such as total reflection light L3 totally reflected by the inner surface 56 is generated around the object to be inspected 50, in order to avoid image contrast of photography. It is not clear, and it is preferable that the outer diameter D of the test object 50 is equal to or less than the outer radius R of the test object 50. When the thickness Lt of the slit light L is set to be equal to or smaller than the outer diameter of the test object 50 or equal to or smaller than the outer radius R, the offset amount S2 is set so that the slit light L entering the inside of the tube wall 52 from the internal space 58 of the test object 50 is set. Among them, the portion having a sufficient amount of light is preferably passed through the straight line 20b corresponding to the optical axis 20a of the photographing device 20. In other cases, the offset amount S2 is preferably a distance at which the total reflected light L3 is not generated. As described above, the bubble detecting device 1 according to the present embodiment includes the illuminating device 10 that illuminates the light (slit light L) of the substantially cylindrical object 50 formed by the light-transmitting material, and When the axial direction (axis 50a direction or Z direction) of the inspection object 50 is displayed, the angle 0 is formed from the upstream side of the light (slit light L) of the optical axis 16a of the illumination device 10 (concentrating lens 16). The photographing device 20 that images the object 50 is inspected in the direction of the obtuse angle. According to the above configuration, by effectively utilizing the meandering of the outer surface 54 and the inner surface 56 of the test object 50, the refracted light or the reflected light caused by the bubble 60 can be clearly displayed in the image in which the object 50 is imaged. Bright or bright lines around bright -19- 201224443. In particular, the slit light L from the internal space 58 of the test object 50 to the inside of the tube wall 52 of the photographing device 20 side selectively exhibits refracted light or reflected light which is generated when incident on the bubble 60. The bubble 60 in the inspection object 50 is detected with high precision. Further, the material of the test object 50 may be at least a part of the light to be irradiated, and for example, coloring or the like may be performed. Further, when the photographing device 20 is displayed from the axial direction (Z direction) of the test object 50, the optical axis 20a of the own illumination device 20a and the optical axis 16a of the illumination device 1 (the collecting lens 16) are disposed at an angle of 110 to 150 degrees. cross. In the refracted light of the bubble 60, the photographic device 20 can capture the refracted light Lc of the most appropriate region C at the time of detection, and the detection light L2 is strong. Therefore, the bubble 60 in the object 50 can be accurately performed. Detection. In addition, when the imaging device 20 is displayed in the axial direction (Z direction) of the test object 50, it is shifted toward the upstream side of the light (the slit light L) (on the side of the collecting lens 16), and the optical axis 20a itself is disposed. It does not cross the axis 50a of the inspection object 50. As a result, the influence of the slit light L1 after penetrating the object to be inspected 50 is reduced, and the detection light L2 can be visually recognized. When the imaging device 20 is displayed in the axial direction (Z direction) of the test object 50, the optical axis 20a of the own object is placed in the direction from the axis of the test object 50 in the direction orthogonal to the optical axis 20a of the test object 50. 50a to a distance of 40 to 60% of the outer radius R of the object to be inspected 50. In this way, the effect of the totally reflected light L3 and the scattered light around it is reduced, and an appropriately contrasted image can be obtained. Further, the illumination device 1 is configured to illuminate slit light or fixed-point light. By this, the inspection range of the axial direction of the inspection object 59 can be covered at one time.

-20- S 201224443 短檢查時間。 又從被檢查物50的軸向(Z方向)顯示的場合的縫隙 光或定點光的寬度Lt是形成被檢查物50的外徑D以下。如 此一來,可降低被檢查物50周圍之不必要散射光的產生, 可進行明瞭對比之影像的攝影。 另外,攝影裝置20是以被檢查物50的軸向(Z方向) 爲寬度方向所配置的行掃描攝影機。如此一來,可降低檢 測光L2以外的光的檢測,提高檢測精度。 又,本實施形態有關的氣泡檢測方法是朝著光穿透性 的原材料所成的大致圓筒狀的被檢査物50照射光(縫隙光 L),從被檢查物50的軸向(Z方向)顯示的場合,從來 自相對於光(縫隙光L)的光軸16a之光(縫隙光L)的上 游側的角度形成鈍角的方向進行被檢查物5〇的攝影,藉此 檢測出起因於被檢查物50內之氣泡60的折射光或反射光。 如上述,有效運用被檢查物50的外表面54及內表面56 的曲折,可以使起因於氣泡60的折射光或反射光在進行被 檢查物50攝影的影像中♦明瞭地顯現出較周圍明亮的輝點 或輝線。尤其是從被檢查物50的內部空間58進人到 置20側的管壁52內部的縫隙光L可選擇性顯現出射入至氣 泡60時所產生的折射光或反射光,可商精度檢測被檢查物^ 50內的氣泡60。 並且,從被檢查物50的軸向(Z方向)顯示的場合& 相對於光(縫隙光L )的光軸的光(縫隙光l )的± $ _ 的角度形成1 1〇製150度的方向進行被檢查物50的攝影。$口-20- S 201224443 Short check time. Further, the slit light or the width Lt of the spot light when the object 50 is displayed in the axial direction (Z direction) is equal to or smaller than the outer diameter D of the test object 50. As a result, the generation of unnecessary scattered light around the object 50 can be reduced, and the image of the contrasted image can be photographed. Further, the photographing device 20 is a line scan camera in which the axial direction (Z direction) of the inspection object 50 is arranged in the width direction. As a result, the detection of light other than the detection light L2 can be reduced, and the detection accuracy can be improved. In the bubble detecting method according to the present embodiment, the substantially cylindrical inspection object 50 formed by the light-transmitting material is irradiated with light (slit light L) from the axial direction of the inspection object 50 (Z direction). In the case of the display, the inspection of the object 5 is performed in a direction in which the angle from the upstream side of the light (the slit light L) of the optical axis 16a with respect to the light (the slit light L) forms an obtuse angle, thereby detecting the cause The refracted light or reflected light of the bubble 60 in the object 50 to be inspected. As described above, by effectively utilizing the meandering of the outer surface 54 and the inner surface 56 of the test object 50, the refracted light or the reflected light caused by the bubble 60 can be clearly brightened in the image in which the object 50 is imaged. Glow point or glow line. In particular, the slit light L which enters the inside of the tube wall 52 on the side of the object 20 from the internal space 58 of the object 50 to be inspected selectively exhibits refracted light or reflected light which is generated when incident on the bubble 60, and is highly accurate. The bubble 60 in the object to be inspected ^ 50. Further, in the case of being displayed from the axial direction (Z direction) of the test object 50, the angle of ± _ with respect to the optical axis of the light (slit light L) (the slit light l) is 1 1 150 150 degrees. The direction of the object 50 is photographed. $口

-21 - 201224443 此一來,可以攝影裝置20捕捉起因於氣泡60的折射光中最 適合檢測之區域C的折射光Lc以作爲強的檢測光L2,所以 可以高精度檢測出被檢查物50內的氣泡60。 又,從被檢查物50的軸向(Z方向)顯示的場合,從 朝著光(縫隙光L)的上游側偏移的位置進行被檢查物50 的攝影。如此一來,減少穿透被檢查物50後之縫隙光L1的 影響,可使檢測光L2以明瞭的對比顯現。 再者,本實施形態雖是表示攝影裝置2 0從下方進行被 檢查物50攝影的例,但是攝影裝置20也可以從上方或側方 進行被檢查物50的攝影。或採用區域照相機作爲攝影裝置 20 = 並且,照明裝置1 0除了金屬鹵化物水銀燈以外,也可 具備鈉蒸氣燈或氙氣燈、LED等其他的光源,根據被檢查 物5 0的原材料或尺寸等也可照射雷射光。 以上,針對本實施形態已作說明,但是本發明的透明 管之氣泡檢測裝置及氣泡檢測方法不僅限於上述的實施形 態,在不脫離本發明要旨的範圍內當可施以種種變更獲得 [產業上的可利用性] 本發明的透明管之氣泡檢測裝置及氣泡檢測方法可利 用於玻璃或樹脂等的透明原材料所成的管或各種物品檢查 的領域。-21 - 201224443 In this way, the photographing device 20 can capture the refracted light Lc of the region C which is most suitable for detection from the refracted light of the bubble 60 as the strong detection light L2, so that the inside of the test object 50 can be detected with high precision Bubbles 60. Further, when the object 50 is displayed in the axial direction (Z direction), the object 50 is imaged from a position shifted toward the upstream side of the light (slit light L). In this way, by reducing the influence of the slit light L1 after penetrating the object 50, the detection light L2 can be visualized with a clear contrast. In the present embodiment, the imaging device 20 performs imaging of the inspection object 50 from below. However, the imaging device 20 may perform imaging of the inspection object 50 from above or on the side. Or, the area camera is used as the imaging device 20 = In addition to the metal halide mercury lamp, the illumination device 10 may include a sodium vapor lamp, a xenon lamp, or another light source such as an LED, depending on the material or size of the object to be inspected 50. It can illuminate laser light. Though the present embodiment has been described above, the bubble detecting device and the bubble detecting method of the transparent tube of the present invention are not limited to the above-described embodiments, and various modifications can be made without departing from the scope of the present invention. UTILITY] The bubble detecting device and the bubble detecting method of the transparent tube of the present invention can be used in the field of inspection of tubes or various articles made of transparent materials such as glass or resin.

S -22- 201224443 【圖式簡單說明】 第1圖是表示本發明實施形態有關的氣泡檢測裝置的 構成的槪略圖。 第2圖是表示從z方向顯示的場合之聚光透鏡及攝影裝 置的配置圖。 第3圖是表示藉攝影裝置攝影之影像例的槪略圖。 第4圖是表示從Z方向顯示射入至被檢査物的管壁內部 的氣泡的光路徑之一例的場合的槪略圖。 第5圖是表示從z方向顯示穿透被檢查物的縫隙光之路 徑的一例的場合的槪略圖。 第6圖是表示從Z方向顯示射入至位於其他位置的氣泡 之光路徑的一例的場合的槪略圖。 【主要元件符號說明】 1 :氣泡檢測裝置 1 〇 :照明裝置 16 :聚光透鏡 16a:聚光透鏡(縫隙光)的光軸 20 :攝影裝置 2〇a:攝影裝置的光軸 5 0 :被檢查物 50a :被檢查物的軸心 D:被檢查物的外徑S -22-201224443 [Brief Description of the Drawings] Fig. 1 is a schematic diagram showing the configuration of a bubble detecting device according to an embodiment of the present invention. Fig. 2 is a layout view showing a condensing lens and a photographing apparatus in the case of being displayed from the z direction. Fig. 3 is a schematic diagram showing an example of an image photographed by a photographing device. Fig. 4 is a schematic diagram showing an example of an optical path of a bubble which is incident on the inside of a tube wall of an object to be inspected from the Z direction. Fig. 5 is a schematic diagram showing an example of a path of a slit light that penetrates an object to be inspected from the z direction. Fig. 6 is a schematic diagram showing an example of a case where an optical path of a bubble which is incident on another position is displayed from the Z direction. [Description of main component symbols] 1 : Bubble detecting device 1 〇: Illuminating device 16: Condenser lens 16a: Optical axis 20 of collecting lens (slit light): Photographing device 2〇a: Optical axis of the photographing device 50: Inspection object 50a: axis of the object to be inspected D: outer diameter of the object to be inspected

Lt :射入從Z方向顯示的場合的被檢查物之縫隙光[的 -23- 201224443 寬度 R :被檢查物的外半徑 0:聚光透鏡的光軸與攝影裝置的光軸交叉的角度 -24-Lt : slit light of the inspection object when it is displayed in the Z direction [-23 - 201224443 Width R: outer radius of the object to be inspected 0: angle of the optical axis of the condensing lens intersects with the optical axis of the photographic device - twenty four-

SS

Claims (1)

201224443 七、申請專利範圍: 1. 一種透明管之氣泡檢測裝置,其特徵爲,具備: 朝光穿透性的原材料所成的大致圓筒狀的被檢查物照 射光的照明裝置,及 從上述被檢查物的軸向顯示的場合,從來自相對於上 述照明裝置的光軸之上述光的上游側的角度形成鈍角的方 向進行上述被檢查物攝影的攝影裝置, 上述攝影裝置在從上述被檢查物的軸向顯示的場合, 配置成朝著上述光的上游側偏移,使本身的光軸不與上述 被檢查物的軸心交叉。 2 ·如申請專利範圍第1項記載的透明管之氣泡檢測裝 置’其中’上述攝影裝置在從上述被檢查物的軸向顯示的 場合’配置成使本身的光軸與上述照明裝置的光軸以n〇 至150度的角度交叉》 3.如申請專利範圍第1項或第2項記載的透明管之氣泡 檢測裝置’其中,上述攝影裝置在從上述被檢查物的軸向 顯示的場合’配置成在與本身的光軸正交的方向使本身的 光軸位於上述被檢查物的軸心到上述被檢查物的外半徑的 4 0至6 0 %的距離。 4 ·如申請專利範圍第1項至第3項中任一項記載的透明 管之氣泡檢測裝置,其中,上述照明裝置構成可照射縫隙 光或定點光。 5 ·如申請專利範圍第4項記載的透明管之氣泡檢測裝 置’其中’從上述被檢查物的軸向顯示的場合,上述縫隙 -25- 201224443 光或上述定點光的寬度是在上述被檢查物的外徑以下。 6 _如申請專利範圍第1項至第5項中任一項記載的透明 管之氣泡檢測裝置,其中,上述攝影裝置是以上述被檢查 物的軸向爲寬度方向所配置的行掃描攝影機。 7.—種透明管之氣泡檢測方法,其特徵爲:朝著光穿 透性的原材料所成的大致圓筒狀的被檢查物照射光, 從上述被檢查物的軸向顯示的場合,從相對於上述光 的光軸之上述光的上游側的角度是形成鈍角的方向,並且 從上述被檢查物的軸向顯示的場合,從上述光的上游側偏 移的位置進行上述被檢查物的攝影,藉此檢測出起因於上 述被檢查物內之氣泡的折射光或反射光。 8 ·如申請專利範圍第7項記載的透明管之氣泡檢測方 法,其中,從上述被檢查物的軸向顯示的場合,從相對於 上述光的光軸的上述光的上游側的角度成110至150度的方 向進彳了上述被檢查物的攝影。 -26- S201224443 VII. Patent application scope: 1. A bubble detecting device for a transparent tube, comprising: a lighting device that irradiates light to a substantially cylindrical object to be inspected by a light-transmitting material, and In the case of the axial display of the inspection object, the imaging device that performs the imaging of the object to be inspected in an obtuse angle from the angle of the upstream side of the light with respect to the optical axis of the illumination device, the imaging device is inspected from the above When the axial direction of the object is displayed, it is arranged to be shifted toward the upstream side of the light, so that the optical axis of the object does not cross the axis of the object to be inspected. 2. The bubble detecting device for a transparent tube according to the first aspect of the invention, wherein the image capturing device is disposed in the axial direction of the object to be inspected, such that the optical axis of the optical device and the optical axis of the lighting device are arranged A bubble detecting device for a transparent tube according to the first or second aspect of the invention, wherein the image capturing device is displayed in the axial direction of the object to be inspected. It is arranged such that its optical axis is located at a distance of 40 to 60% of the outer radius of the object to be inspected in the direction orthogonal to its own optical axis. The bubble detecting device for a transparent tube according to any one of claims 1 to 3, wherein the illuminating device is configured to illuminate slit light or fixed-point light. (5) In the case where the bubble detecting device of the transparent tube described in the fourth aspect of the invention is displayed in the axial direction of the object to be inspected, the width of the slit-25-201224443 or the fixed spot light is checked as described above. Below the outer diameter of the object. The bubble detecting device for a transparent tube according to any one of the first to fifth aspect, wherein the image forming apparatus is a line scanning camera in which the axial direction of the object to be inspected is in the width direction. 7. A method for detecting a bubble in a transparent tube, characterized in that, when a substantially cylindrical object to be inspected by a light-transmitting material is irradiated with light, and is displayed from the axial direction of the object to be inspected, The angle on the upstream side of the light with respect to the optical axis of the light is a direction in which an obtuse angle is formed, and when it is displayed in the axial direction of the object to be inspected, the object to be inspected is performed at a position shifted from the upstream side of the light. Photographing, thereby detecting refracted light or reflected light caused by the bubbles in the object to be inspected. The method for detecting a bubble of a transparent tube according to the seventh aspect of the invention, wherein the angle from the upstream side of the light with respect to the optical axis of the light is 110. The photograph of the above-mentioned object to be inspected was taken in the direction of 150 degrees. -26- S
TW100125440A 2010-07-20 2011-07-19 Device and method for detecting bubble in transparent tube TW201224443A (en)

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