JP2008076223A - Inspection method of cylindrical transparent body, and inspection apparatus used for it - Google Patents

Inspection method of cylindrical transparent body, and inspection apparatus used for it Download PDF

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JP2008076223A
JP2008076223A JP2006255593A JP2006255593A JP2008076223A JP 2008076223 A JP2008076223 A JP 2008076223A JP 2006255593 A JP2006255593 A JP 2006255593A JP 2006255593 A JP2006255593 A JP 2006255593A JP 2008076223 A JP2008076223 A JP 2008076223A
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transparent body
cylindrical transparent
inspection
inspection method
mask
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Yoshinobu Furuta
喜信 古田
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an inspection method capable of accurately detecting a defective part such as irregularity or an air bubble included in a side surface section of a cylindrical transparent body, and to provide an inspection method used for it. <P>SOLUTION: In this inspection method, the defective part 20 in the side surface is detected by illuminating the side surface of the cylindrical transparent body 5 from the downside and observing the transmitted light. The illumination is transmitted light through a mask 10 having a stripe pattern where a transparent part 10a and an opaque part 10b are arranged alternately. By arranging the stripe pattern and the center line of the cylindrical transparent body 5 substantially orthogonally, the outline of the defective part 20 is emphasized and detected. <P>COPYRIGHT: (C)2008,JPO&amp;INPIT

Description

本発明は、各種小型光源などの円筒状透明体の側面部に生じる凹凸や気泡などの欠陥部位を検出する検出方法とそれに用いる検出装置に関するものである。   The present invention relates to a detection method for detecting a defective portion such as irregularities and bubbles generated on a side surface of a cylindrical transparent body such as various small light sources, and a detection apparatus used therefor.

ガラスびんや、キセノンランプなど各種小型光源の封止に用いるガラス管は、その製造工程で、気泡などの混入や側面に微小な凹凸を生じることがある。このような場合、外観上の問題とともに、照射する光の照度にむらが生じるなど、光学特性にも影響するため、凹凸を検査し不良品として排除しなければならない。   Glass tubes used for sealing various small light sources, such as glass bottles and xenon lamps, may contain air bubbles and minute irregularities on the side surfaces during the manufacturing process. In such a case, the unevenness of the illuminance of the irradiating light is affected as well as the appearance problem, so that the unevenness must be inspected and rejected as a defective product.

側面に生じる微小な凹凸の検査方法として、従来は、ガラス管の中心軸で回動させ、その外側面に探針を接触させることで、凹凸を振れ量として検出する方法や、図８に示すように、ガラス管１の外側面に平行線２を投影し、その投影画像をカメラ３などで観察して、平行線２の間隔の異常箇所を凹凸４として検出するなどの方法が用いられていた。   As a method for inspecting the minute unevenness generated on the side surface, conventionally, a method of detecting the unevenness as a shake amount by rotating the glass tube around the central axis and bringing the probe into contact with the outer surface, as shown in FIG. As described above, a method is used in which parallel lines 2 are projected on the outer surface of the glass tube 1 and the projected image is observed with a camera 3 or the like to detect an abnormal portion of the interval between the parallel lines 2 as irregularities 4. It was.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献１が知られている。
特開２００１−４３４８号公報 As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP 2001-4348 A

探針を用いる方法は、探針の変位量に凹凸の検出分解能が左右され、また、ガラス管の中心軸に沿って回動させる必要があること、さらに図８に示す、平行線を外側面に投影する方法は、平行線の精度や、投影画像を得るためのカメラ３の設置精度など、検査物が小型、小径となるほど検出精度を高めることが困難となる課題があった。   In the method using the probe, the detection resolution of the unevenness depends on the amount of displacement of the probe, and it is necessary to rotate along the central axis of the glass tube. Further, the parallel lines shown in FIG. In the method of projecting onto the screen, there are problems such as the accuracy of parallel lines and the installation accuracy of the camera 3 for obtaining a projected image, which makes it difficult to increase the detection accuracy as the inspection object becomes smaller and smaller in diameter.

そこで、本発明は、小型、小径の円筒状透明体の側面を、高い検出精度で検査することを目的とする。   Therefore, an object of the present invention is to inspect the side surface of a small, small-diameter cylindrical transparent body with high detection accuracy.

上記目的を達成するために、本発明は、円筒状透明体の側面をその下方から照明して透過光を観察することで、前記側面の欠陥部位を検出する検査方法であって、前記照明は、透明部と不透明部とが交互に配列された縞模様を有するマスクを透過させた透過光であり、この縞模様と前記円筒状透明体の中心線とを略直交するように配置することで、欠陥部位の輪郭を強調させて検出するので、その結果、簡易な構成でかつ高い検出精度で円筒状透明体の側面に有する欠陥部位を検出できる。   In order to achieve the above object, the present invention is an inspection method for detecting a defect site on the side surface by illuminating the side surface of the cylindrical transparent body from below and observing the transmitted light. The transmitted light is transmitted through a mask having a striped pattern in which transparent portions and opaque portions are alternately arranged, and the striped pattern and the center line of the cylindrical transparent body are arranged so as to be substantially orthogonal to each other. Since the detection is performed with emphasis on the outline of the defective part, it is possible to detect the defective part on the side surface of the cylindrical transparent body with a simple configuration and high detection accuracy.

本発明に係る円筒状透明体の検査方法とそれに用いる検査装置は、透明部と不透明部とが交互に配列された、縞模様を有するマスクを透過した透過光を検査用の照明として用い、縞模様を、円筒状透明体の中心軸と直交するように配置する。そのため、縞模様を介した周期的な明暗部を有する照明のコントラストを利用して、欠陥部位の輪郭を強調させることができるので、高い検出精度で欠陥部位を検出することができる作用効果を奏するものである。   The inspection method for a cylindrical transparent body according to the present invention and the inspection apparatus used therefor use the transmitted light transmitted through a mask having a striped pattern in which transparent portions and opaque portions are alternately arranged as illumination for inspection. The pattern is arranged so as to be orthogonal to the central axis of the cylindrical transparent body. Therefore, the contour of the defective part can be emphasized using the contrast of the illumination having a periodic bright and dark part through the stripe pattern, so that there is an effect that the defective part can be detected with high detection accuracy. Is.

さらに、円筒状透明体を上下動させることで前記円筒状透明体のレンズ効果で、欠陥部位の輪郭をより強調させることができる作用効果も同時に奏するものである。   Furthermore, by moving the cylindrical transparent body up and down, the effect of further enhancing the outline of the defect site can be achieved with the lens effect of the cylindrical transparent body.

以下、本発明の詳細を、図を用いて説明する。   Hereinafter, the details of the present invention will be described with reference to the drawings.

図１は、本発明の検査方法および検査装置を用いて検査を行う、円筒状透明体の一例の正面図である。本実施例は、分光光度計やウエハ表面検査装置、ストロボなどの光源に用いるキセノンランプの例である。キセノンランプ５は、外部電極となるリード端子６と連結した内部電極７を、キセノンガスとともにガラス管８で気密封止した構造となっている。ガラス管８の形状は、円筒状であり、その長さは３０〜５０ｍｍ程度、直径Ａは５ｍｍ以下の小型、小径である。本実施例における検査方法、検査装置を用いることにより、このガラス管８の側面８ａの欠陥部位、例えば内包された気泡、凹凸部などを高い精度で検出するものである。   FIG. 1 is a front view of an example of a cylindrical transparent body that performs inspection using the inspection method and inspection apparatus of the present invention. This embodiment is an example of a xenon lamp used for a light source such as a spectrophotometer, a wafer surface inspection apparatus, or a strobe. The xenon lamp 5 has a structure in which an internal electrode 7 connected to a lead terminal 6 serving as an external electrode is hermetically sealed with a glass tube 8 together with xenon gas. The shape of the glass tube 8 is cylindrical, its length is about 30 to 50 mm, and the diameter A is a small and small diameter of 5 mm or less. By using the inspection method and the inspection apparatus in the present embodiment, a defective portion of the side surface 8a of the glass tube 8, for example, an encapsulated bubble or an uneven portion is detected with high accuracy.

次に図２を用いて本実施例における検査装置を説明する。図２は、検査装置の構成を説明する正面図である。   Next, the inspection apparatus in the present embodiment will be described with reference to FIG. FIG. 2 is a front view illustrating the configuration of the inspection apparatus.

本実施例における検査装置は、大きく三つから構成されている。下方から順に、一つ目は、照明用光源９と、透明部１０ａと不透明部１０ｂとを交互に配列した縞模様を有するマスク１０とからなる照明部１１である。二つ目は被検査体であるキセノンランプ５を把持部１２で保持しながら回動する保持部１３である。三つ目は撮像手段１４で撮像した画像を取り込み、画像処理回路１５で処理して欠陥部位をモニタ１６に表示する画像処理部１７である。   The inspection apparatus in the present embodiment is roughly composed of three. In order from the bottom, the first is an illuminating unit 11 including an illumination light source 9 and a mask 10 having a striped pattern in which transparent portions 10a and opaque portions 10b are alternately arranged. The second is a holding unit 13 that rotates while holding the xenon lamp 5 as an object to be inspected by the holding unit 12. The third is an image processing unit 17 that captures an image captured by the image capturing unit 14, processes the image by the image processing circuit 15, and displays a defective part on the monitor 16.

照明用光源９には、マスク１０の縞模様の回折散乱による明暗のコントラストの低下を防止するため、ＬＥＤなどの指向性の高い光源を用いる。指向性の低い光源を用いる場合、拡散板１８をマスク１０との間に設けることで、マスク１０を透過した平行光１９をキセノンランプ５に照射できるようにする。   The illumination light source 9 is a light source having high directivity such as an LED in order to prevent a decrease in contrast between light and dark due to diffraction and scattering of the striped pattern of the mask 10. When a light source with low directivity is used, the diffusion plate 18 is provided between the mask 10 and the parallel light 19 transmitted through the mask 10 can be irradiated to the xenon lamp 5.

ここで、本実施例におけるマスク１０の詳細を、図３を用いて説明する。図３はマスク１０の正面図、すなわち図２の検査装置における上方からマスク１０を見た状態を示している。マスク１０の少なくとも表面には、一定の幅を有する不透明部１０ｂと、透明部１０ａとが互いに平行にかつ交互に配列された縞模様１０ａ、１０ｂを形成している。このマスク１０を介して照明用光源９（図２）で下方より照明することにより、キセノンランプ５には、周期的な明暗部を有する指向性の高い照明がなされることになる。尚、マスク１０は、透光性の基板上に不透明部１０ｂを平行に複数配列して縞模様を作成してもよい。透明部１０ａ、不透明部１０ｂの幅や間隔などは、検出する欠陥部位の大きさに応じて適宜設計するものであるが、本実施例における直径５ｍｍ以下のキセノンランプ５を検査する際は、透明部１０ａ、不透明部１０ｂの幅を１〜２ｍｍとして等間隔に配列することで、０．５ｍｍ以下の欠陥部位を検出することができた。また、透明部１０ａおよび不透明部１０ｂの透過率は相対的に決定すればよく、透過率の差を概ね５０％以上とすることで良好な検出結果が得られた。   Here, details of the mask 10 in this embodiment will be described with reference to FIG. FIG. 3 is a front view of the mask 10, that is, a state in which the mask 10 is viewed from above in the inspection apparatus of FIG. At least the surface of the mask 10 is formed with striped patterns 10a and 10b in which opaque portions 10b having a certain width and transparent portions 10a are alternately arranged in parallel with each other. By illuminating from below with the illumination light source 9 (FIG. 2) through the mask 10, the xenon lamp 5 is illuminated with high directivity having periodic bright and dark portions. The mask 10 may be formed in a striped pattern by arranging a plurality of opaque portions 10b in parallel on a translucent substrate. The width and interval of the transparent portion 10a and the opaque portion 10b are designed as appropriate according to the size of the defect site to be detected. When inspecting the xenon lamp 5 having a diameter of 5 mm or less in this embodiment, the transparent portion 10a and the opaque portion 10b are transparent. By arranging the width of the portion 10a and the opaque portion 10b at equal intervals of 1 to 2 mm, it was possible to detect a defective portion of 0.5 mm or less. Further, the transmittance of the transparent portion 10a and the opaque portion 10b may be determined relatively, and a good detection result was obtained by setting the difference in transmittance to approximately 50% or more.

マスク１０を透過した周期的な明暗部を有する照明は、キセノンランプ５を透過して撮像手段１４に結像し、その画像を画像処理回路１５に転送されて保存される。画像処理回路１５では、画像データを微分処理、二値化処理などを行い、コントラストの差の大きい箇所を強調することで、キセノンランプ５の輪郭と欠陥部位をそれぞれ検出し、モニタ１６などに出力する。尚、取り込む画像としては、検査領域であるキセノンランプ５の輪郭を抽出するための画像と、この画像を基に検査領域内の欠陥部位を検出するための画像であり、検査精度を高めるため、複数取り込むものである。   Illumination having a periodic bright and dark part that has passed through the mask 10 passes through the xenon lamp 5 and forms an image on the imaging means 14, and the image is transferred to the image processing circuit 15 and stored. In the image processing circuit 15, image data is subjected to differentiation processing, binarization processing, and the like, by emphasizing a portion having a large contrast difference, the contour and defective portion of the xenon lamp 5 are detected and output to the monitor 16 or the like. To do. The image to be captured is an image for extracting the contour of the xenon lamp 5 that is an inspection area, and an image for detecting a defective part in the inspection area based on this image. In order to increase the inspection accuracy, Multiple captures.

マスク１０、キセノンランプ５、撮像手段１４は、撮像手段１４の光軸に沿って下方より順に配置されている。また、キセノンランプ５は、図２のごとく、その中心線Ｂ−ＢＢと光軸Ｃ−ＣＣとが直交するように配置される。さらに、検査装置の上方よりみたとき、図４に示すようにキセノンランプ５の中心線Ｂ−ＢＢとマスク１０の縞模様１０ａ、１０ｂとが必ず直交するように配置する。これは、キセノンランプ５のガラス管８によるレンズ効果で、マスク１０の縞模様１０ａ、１０ｂが拡幅されないようにするためである。さらにキセノンランプ５は、撮像手段の焦点位置付近に配置され、その下方に配置されたマスク１０は焦点位置から離れた位置に配置されている。したがって、撮像手段１４に取り込まれるマスク１０の画像（縞模様１０ａ、１０ｂ）は、図５に示すように、縞模様１０ａ、１０ｂの境界がぼやけた画像となる。この状態でキセノンランプ５の輪郭を抽出する画像を撮像し、その後、保持部１３を光軸Ｃ−ＣＣに沿って上下動させて撮像した画像と、さらに間欠的に保持部１３を回転させた後の画像とを順次取り込み、欠陥部位の境界におけるコントラストの差を、画像処理回路１５でさらに強調させることで欠陥部位を検出するものである。   The mask 10, the xenon lamp 5, and the imaging unit 14 are disposed in order from below along the optical axis of the imaging unit 14. Further, as shown in FIG. 2, the xenon lamp 5 is arranged so that the center line B-BB and the optical axis C-CC are orthogonal to each other. Further, when viewed from above the inspection apparatus, the center line B-BB of the xenon lamp 5 and the striped patterns 10a and 10b of the mask 10 are necessarily arranged orthogonally as shown in FIG. This is to prevent the stripe patterns 10a and 10b of the mask 10 from being widened by the lens effect of the glass tube 8 of the xenon lamp 5. Further, the xenon lamp 5 is disposed in the vicinity of the focal position of the imaging means, and the mask 10 disposed below the xenon lamp 5 is disposed at a position away from the focal position. Therefore, the images of the mask 10 (striped patterns 10a and 10b) captured by the imaging unit 14 are images in which the boundaries of the striped patterns 10a and 10b are blurred as shown in FIG. In this state, an image for extracting the contour of the xenon lamp 5 is taken, and then the image obtained by moving the holding unit 13 up and down along the optical axis C-CC and the holding unit 13 are rotated intermittently. Subsequent images are sequentially captured, and the image processing circuit 15 further emphasizes the difference in contrast at the boundary of the defective portion to detect the defective portion.

次に上述した検査装置を用いた検査方法について説明する。図６は、本発明における検査方法の一例を説明する正面図である。検査装置の詳細は、ここでは簡略化して説明する。   Next, an inspection method using the above-described inspection apparatus will be described. FIG. 6 is a front view for explaining an example of the inspection method according to the present invention. The details of the inspection apparatus will be described here in a simplified manner.

まず初めに、図６（ａ）に示すごとくキセノンランプ５を保持部１３(図２)に把持して、撮像手段１４の焦点位置付近に移動させる。そしてキセノンランプ５の下方より照明し、透過光による画像を撮像する。このとき撮像手段１４には、図７に示すように、境界がぼやけたマスク１０の縞模様１０ａ、１０ｂと、それらに直交するように配置されたキセノンランプ５の画像が撮像される。キセノンランプ５は円筒形状であるため、一方向にレンズ効果を有する一種のシリンドリカルレンズとして作用する。したがって、キセノンランプ５の中心線Ｂ−ＢＢに直交する方向にはレンズ効果を有するので、キセノンランプ５と、縞模様１０ａ、１０ｂの界面５ａ近傍でコントラストの差が大きくなる。このコントラストの差を後段の検出回路により強調することでキセノンランプ５の輪郭として抽出することで、検査範囲を決定することができる。   First, as shown in FIG. 6A, the xenon lamp 5 is held by the holding unit 13 (FIG. 2) and moved to the vicinity of the focal position of the imaging unit 14. And it illuminates from the lower part of the xenon lamp 5, and images the transmitted light. At this time, as shown in FIG. 7, the imaging unit 14 captures images of the striped patterns 10 a and 10 b of the mask 10 with blurred boundaries and the xenon lamp 5 arranged so as to be orthogonal thereto. Since the xenon lamp 5 has a cylindrical shape, it acts as a kind of cylindrical lens having a lens effect in one direction. Accordingly, since the lens effect is obtained in the direction orthogonal to the center line B-BB of the xenon lamp 5, the difference in contrast between the xenon lamp 5 and the vicinity of the interface 5a between the striped patterns 10a and 10b increases. The inspection range can be determined by extracting the contour of the xenon lamp 5 by emphasizing the difference in contrast with the detection circuit at the subsequent stage.

次に、図６(ｂ)に示すごとく、撮像手段１４およびマスク１０の位置を固定した状態で、キセノンランプ５のみを若干量上下動させることにより、キセノンランプ５の下方にある欠陥部位２０のコントラストを強調させる。この上下動させる移動量は、撮像手段１４の有効焦点距離、キセノンランプ５の直径Ａ、キセノンランプ５のガラス管８の屈折率などで決定する。キセノンランプ５のＤ−ＤＤ断面は、ガラス管８の厚みを有する円形形状となる。したがって、下方より照明される平行光は、ガラス管８の曲率と屈折率および封止されたキセノンガスの屈折率に対応した位置に結像することになる。この結像位置を撮像手段１４の焦点位置とすることで、欠陥部位２０のみのコントラストを強調させ、検出することが可能となる。尚、欠陥部位２０とは、キセノンランプ５のガラス管８に内包された気泡や、内外側面の表面などに存在する微小な凹凸などである。縞模様１０ａ、１０ｂを有するマスク１０を介して照明することにより、キセノンランプ８には周期的な明暗部を有する照明が行われる。上記の欠陥部位２０では、明部と暗部の照明の乱反射や、明部の照明の異常屈折により、欠陥部位２０の無い位置とは異なる位置に結像することとなる。したがって、欠陥部位２０の内部は、通常の周期的な明暗部と異なることで欠陥部位の界面でコントラストの差が強調されることとなる。この画像を後段の画像処理回路１５で処理することにより、欠陥部位２０の輪郭を強調させて、高い精度で検出することが可能となる。ここで重要なのは、検出時における欠陥部位２０の位置である。本実施例では、検出すべき欠陥部位２０がキセノンランプ５の下方（Ｄ−ＤＤ断面における下方の半円）に位置したときに検出するものである。こうすることで、欠陥部位２０で生じる照明の異常散乱、異常屈折による透過光を、ガラス管８の上方の半円で再度屈折させることができ、欠陥部位２０の界面におけるコントラストの差をさらに強調することができるものである。   Next, as shown in FIG. 6B, by moving the xenon lamp 5 slightly up and down while the positions of the imaging means 14 and the mask 10 are fixed, the defect portion 20 below the xenon lamp 5 is moved. Emphasize the contrast. The amount of movement to be moved up and down is determined by the effective focal length of the imaging means 14, the diameter A of the xenon lamp 5, the refractive index of the glass tube 8 of the xenon lamp 5, and the like. The cross section D-DD of the xenon lamp 5 has a circular shape having the thickness of the glass tube 8. Therefore, the parallel light illuminated from below forms an image at a position corresponding to the curvature and refractive index of the glass tube 8 and the refractive index of the sealed xenon gas. By making this imaging position the focal position of the imaging means 14, it is possible to enhance and detect the contrast of only the defective portion 20. The defective part 20 is a bubble encapsulated in the glass tube 8 of the xenon lamp 5 or minute irregularities present on the inner and outer surfaces. By illuminating through the mask 10 having the striped patterns 10a and 10b, the xenon lamp 8 is illuminated with periodic bright and dark portions. In the above-described defective portion 20, an image is formed at a position different from the position where there is no defective portion 20 due to irregular reflection of illumination of bright and dark portions and abnormal refraction of illumination of bright portions. Therefore, the inside of the defective part 20 is different from a normal periodic bright and dark part, and the difference in contrast is emphasized at the interface of the defective part. By processing this image by the image processing circuit 15 at the subsequent stage, it is possible to enhance the contour of the defective portion 20 and detect it with high accuracy. What is important here is the position of the defective portion 20 at the time of detection. In this embodiment, the detection is made when the defective portion 20 to be detected is located below the xenon lamp 5 (lower semicircle in the D-DD cross section). By doing so, the abnormal light scattering and abnormal refraction light generated at the defect site 20 can be refracted again by the semicircle above the glass tube 8, and the contrast difference at the interface of the defect site 20 is further emphasized. Is something that can be done.

最後に、図６(ｃ)に示すごとく、回動機構によりキセノンランプ５を一定角度で回動させた後、図６（ｂ）の動作を繰返し行う。この回動させる角度は、キセノンランプ５の直径Ａやガラス管８の屈折率などで決定するものである。マスク１０を介した平行光１９は、キセノンランプ５の下方よりその内部へ透過するが、ガラス管８表面の曲率と屈折率により平行光１９の入射角がいわゆる全反射角を超えると内部へ侵入できない。したがって、欠陥部位２０を検出できるキセノンランプ５の側面の円弧領域は、全反射角で決定されるため、この全反射角に応じた中心角を事前に設定して、回動機構の回動角度を決定するものである。そしてこの回動角度の累積が３６０度、すなわち全周を超えたときに検査を終了する。   Finally, as shown in FIG. 6C, after the xenon lamp 5 is rotated at a constant angle by the rotation mechanism, the operation of FIG. 6B is repeated. The rotation angle is determined by the diameter A of the xenon lamp 5, the refractive index of the glass tube 8, and the like. The parallel light 19 through the mask 10 is transmitted into the interior of the xenon lamp 5 from below, but enters the interior when the incident angle of the parallel light 19 exceeds the so-called total reflection angle due to the curvature and refractive index of the glass tube 8 surface. Can not. Therefore, since the arc region on the side surface of the xenon lamp 5 that can detect the defective portion 20 is determined by the total reflection angle, a central angle corresponding to the total reflection angle is set in advance, and the rotation angle of the rotation mechanism is set. Is to determine. The inspection is terminated when the cumulative rotation angle exceeds 360 degrees, that is, exceeds the entire circumference.

尚、図６(ｂ)に説明した上下動による欠陥部位２０の強調と、図６(ｃ)に示す回動機構による送りは交互に行うものである。   It should be noted that the emphasis of the defective portion 20 by the vertical movement described in FIG. 6B and the feeding by the rotation mechanism shown in FIG. 6C are alternately performed.

上述したように、本実施例は、透明部１０ａと不透明部１０ｂを有するマスク１０を介して照明することにより、被検査体である円筒状透明体５に周期的な明暗部を有する照明を行う。そして、凹凸や気泡などの欠陥部位で生じた明暗部を有する照明の乱反射、異常屈折を、円筒状透明体５のレンズ効果を利用して強調させ抽出することにより、高い精度で検査を行うことができるものである。   As described above, in the present embodiment, the cylindrical transparent body 5 that is the object to be inspected is illuminated with periodic bright and dark portions by illuminating through the mask 10 having the transparent portion 10a and the opaque portion 10b. . Then, the diffused reflection and extraordinary refraction of the illumination having a bright and dark part generated at the defect site such as irregularities and bubbles are inspected with high accuracy by enhancing and extracting using the lens effect of the cylindrical transparent body 5. It is something that can be done.

本実施例は、キセノンランプの検査例を説明したが、他の小型・小径のランプ類、ガラス棒、ガラス管、プラスチック管など円筒状、あるいは円柱状の透明体であれば適用可能である。   In this embodiment, an inspection example of a xenon lamp has been described. However, the present invention can be applied to any other small and small-diameter lamps, cylindrical or cylindrical transparent bodies such as glass rods, glass tubes, and plastic tubes.

また、本実施例は、コントラストの差を利用して欠陥部位を検出したが、補色関係にある縞模様と、カラーＣＣＤなどを用いることにより、明度や色度の差を利用して欠陥部位を検出することも可能である。   In this embodiment, the defect portion is detected using the difference in contrast. However, by using a stripe pattern having a complementary color relationship and a color CCD, the defect portion is detected using the difference in brightness and chromaticity. It is also possible to detect.

本発明に係る円筒状透明体の検査方法とそれに用いる検査装置は、透明部と不透明部とが交互に配列された、縞模様を有するマスクを透過した透過光を検査用の照明として用い、縞模様を、円筒状透明体の中心軸と直交するように配置する。そのため、欠陥部位を、縞模様の透明部、不透明部とのコントラストを利用してその輪郭を強調させることができるので、高い検出精度で欠陥部位を検出することができる作用効果を奏するものである。   The inspection method for a cylindrical transparent body according to the present invention and the inspection apparatus used therefor use the transmitted light transmitted through a mask having a striped pattern in which transparent portions and opaque portions are alternately arranged as illumination for inspection. The pattern is arranged so as to be orthogonal to the central axis of the cylindrical transparent body. Therefore, since the contour of the defective portion can be enhanced using the contrast between the transparent portion and the opaque portion of the striped pattern, there is an effect that the defective portion can be detected with high detection accuracy. .

さらに、円筒状透明体を上下動させることで前記円筒状透明体のレンズ効果で、欠陥部位の輪郭をより強調させることができる作用効果も同時に奏するものであり、円筒状透明体の側面部に生じる凹凸や気泡などの欠陥部位を検出する検出方法とそれに用いる検出装置に有用である。   Furthermore, by moving the cylindrical transparent body up and down, the lens effect of the cylindrical transparent body also has the effect of further enhancing the outline of the defective part, and at the side of the cylindrical transparent body The present invention is useful for a detection method for detecting a defect site such as irregularities and bubbles generated, and a detection apparatus used therefor.

本発明の検査方法および検査装置で検査を行う円筒状透明体の一例を説明する正面図The front view explaining an example of the cylindrical transparent body which test | inspects with the test | inspection method and test | inspection apparatus of this invention 本発明の一実施の形態における検査装置の構成を説明する正面図The front view explaining the structure of the inspection apparatus in one embodiment of this invention 同装置に用いるマスクの一例を説明する正面図Front view for explaining an example of a mask used in the apparatus 同装置における円筒状透明体とマスクの配置を説明する上面図Top view for explaining arrangement of cylindrical transparent body and mask in the same apparatus 同装置における検査時に取り込まれるマスクの画像を説明する図The figure explaining the image of the mask taken in at the time of inspection in the device (ａ)同装置における検査方法を説明する要部正面図、（ｂ）同装置における検査方法を説明する要部正面図、（ｃ）同装置における検査方法を説明する要部正面図(a) principal part front view explaining the inspection method in the apparatus, (b) principal part front view explaining the inspection method in the apparatus, (c) principal part front view explaining the inspection method in the apparatus 同検査方法における検査画像の一例を説明する図The figure explaining an example of the test | inspection image in the same inspection method 従来の検査装置を説明する正面図Front view explaining a conventional inspection device

符号の説明Explanation of symbols

５ 円筒状透明体
９ 照明用光源
１０ マスク
１０ａ 透明部
１０ｂ 不透明部
１１ 照明部
１３ 保持部
１４ 撮像手段
１５ 画像処理回路
１７ 画像処理部
２０ 欠陥部位 DESCRIPTION OF SYMBOLS 5 Cylindrical transparent body 9 Light source for illumination 10 Mask 10a Transparent part 10b Opaque part 11 Illumination part 13 Holding part 14 Imaging means 15 Image processing circuit 17 Image processing part 20 Defective part

Claims (6)

円筒状透明体の側面をその下方から照明して透過光を観察することで、前記側面の欠陥部位を検出する検査方法であって、前記照明は、透明部と不透明部とが交互に配列された縞模様を有するマスクを透過させた透過光であり、この縞模様と前記円筒状透明体の中心線とを略直交するように配置することで、欠陥部位の輪郭を強調させて検出する円筒状透明体の検査方法。 An inspection method for detecting a defective portion on the side surface by illuminating a side surface of a cylindrical transparent body from below and observing transmitted light, wherein the illumination includes alternating transparent portions and opaque portions. This is a transmitted light that has passed through a mask having a striped pattern, and this stripe pattern and the center line of the cylindrical transparent body are arranged so as to be substantially orthogonal to each other so that the outline of the defective part is emphasized and detected. Inspection method for glassy transparent bodies. 円筒状透明体を上下動させることで、欠陥部位の輪郭をさらに強調させる請求項１に記載の円筒状透明体の検査方法。 The cylindrical transparent body inspection method according to claim 1, wherein the outline of the defective portion is further emphasized by moving the cylindrical transparent body up and down. 円筒状透明体を間欠的に回動させて検査を行う請求項１または２に記載の円筒状透明体の検査方法。 The inspection method of a cylindrical transparent body according to claim 1 or 2, wherein the inspection is performed by intermittently rotating the cylindrical transparent body. 円筒状透明体の側面をその下方から照明して透過光を観察することで、前記側面の欠陥部位を検出する検査装置であって、照明用光源と、その上方に配置した、透明部と不透明部とが交互に配列された縞模様を有するマスクとからなる照明部と、前記照明部の上方に配置され、円筒状透明体を保持する保持部と、前記円筒状透明体の透過光を撮像する撮像手段と、この撮像した画像を処理する画像処理回路とからなる画像処理部とを備え、前記保持部は、前記円筒状透明体の中心線と前記縞模様とが略直交するように保持することで、欠陥部位の輪郭を強調させて検出する円筒状透明体の検査装置。 An inspection apparatus for detecting a defective portion on the side surface by illuminating the side surface of the cylindrical transparent body from below and observing the transmitted light, the light source for illumination, and the transparent portion and the opaque portion disposed above the light source An illumination unit composed of a mask having a striped pattern in which the unit is alternately arranged, a holding unit that is disposed above the illumination unit and holds the cylindrical transparent body, and images the transmitted light of the cylindrical transparent body And an image processing unit configured to process the captured image, and the holding unit holds the center line of the cylindrical transparent body and the striped pattern so as to be substantially orthogonal to each other. By doing so, an inspection apparatus for a cylindrical transparent body that detects an emphasis of the outline of a defective part. 保持部は、上下動可能な機構を有する請求項４に記載の円筒状透明体の検査装置。 The cylindrical transparent body inspection apparatus according to claim 4, wherein the holding portion has a mechanism capable of moving up and down. 保持部は、回動機構を有する請求項４または請求項５に記載の円筒状透明体の検査装置。 The cylindrical transparent body inspection apparatus according to claim 4, wherein the holding portion has a rotation mechanism.
JP2006255593A 2006-09-21 2006-09-21 Inspection method of cylindrical transparent body, and inspection apparatus used for it Pending JP2008076223A (en)

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