JP2012220341A - Shape measuring device, shape measuring method, and program therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measuring device capable of efficiently and properly measuring an inner shape of a hole for a tested object having the hole.SOLUTION: An shape measuring device that irradiates an inner surface of a hollow tested object with measurement light, receives the measurement light irradiated to the tested object, and measures a shape of the tested object comprises: a light output part for outputting the measurement light in a line shape irradiated to the tested object; a light reception part that is provided separated from the light output part and detects scattering light of the measurement light received from a predetermined direction; and a control part in which a position of the light reception part is controlled according to a position where the measurement light is detected and a distance to the tested object is calculated according to the distance between an output position of irradiated light and a position of the light reception part.

Description

  The present invention relates to a shape measuring device, a shape measuring method, and a program thereof.

  Various techniques for measuring the surface shape of an object such as an industrial product have been proposed in the past, such as measuring the shape of a test object three-dimensionally using a contact-type measurement probe, or a light cutting method, etc. One that performs three-dimensional measurement using a non-contact type measurement probe is known.

  By the way, there are various shapes of the test object, and the shape inside the hole may be measured for the test object having a hole. For example, when measuring the shape of a hole, there is a technique for measuring the coordinates of the spot position by guiding the laser spot to the inner surface of the hole and detecting the focal point of the spot position irradiated with the laser spot (Patent Document). 1). In addition, there is a technique that scans from the outside of the hole and measures the hole diameter from partial information on the inner surface near the entrance of the hole (see Patent Document 2).

JP 2010-101731 A JP 2006-208237 A

  However, in such a measuring method, it is desired to measure the shape inside the hole at high speed and appropriately. For example, it is desired that the shape inside the hole can be measured at high speed as compared with the case where a laser spot is used, and the shape inside the hole can be measured appropriately as in the case where a laser spot is used.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a shape measuring apparatus capable of measuring a shape inside a hole at high speed and appropriately with respect to an object having a hole. And a shape measuring method and a program thereof.

  This invention was made in order to solve the above-described problems, and the present invention irradiates the inner surface of a hollow specimen with measurement light and receives scattered light scattered by the specimen, A shape measuring device for measuring the shape of the inner surface of the test object, a light output unit for outputting line-shaped measurement light to be irradiated on the test object, and a light receiving unit for receiving scattered light of the measurement light An adjustment unit that adjusts an optical path length through which the light output from the light output unit is received by the light receiving unit, a detection unit that detects a position of the received scattered light, and the adjustment unit And a control unit that measures the shape of the test object based on the adjustment state by and the detection position by the detection unit.

  In addition, the present invention is a shape measurement for measuring the shape of the inner surface of the test object by irradiating the inner surface of the hollow test object with measurement light and receiving scattered light scattered by the test object. A light output process in which a light output unit outputs a line-shaped measurement light irradiated on the object; a light receiving unit that receives a scattered light of the measurement light; and an adjustment unit. An adjustment process for adjusting the optical path length through which the light output from the light output unit is received by the light receiving unit, a detection process for detecting the position of the received scattered light, and a control The shape measurement method is characterized in that the unit includes a control process of measuring the shape of the test object based on the adjustment state by the adjustment unit and the detection position by the detection unit.

  In addition, the present invention is a shape measurement for measuring the shape of the inner surface of the test object by irradiating the inner surface of the hollow test object with measurement light and receiving scattered light scattered by the test object. A step of causing the computer provided in the apparatus to output a line-shaped measurement light to be irradiated to the test object to the light output unit; a step of causing the light receiving unit to receive the scattered light of the measurement light; and the adjustment unit to output the light output Adjusting the optical path length through which the light output from the unit is received by the light receiving unit, detecting the position of the scattered light received by the detecting unit, and the adjustment state by the adjusting unit Measuring a shape of the test object based on a detection position by the detection unit.

  According to the present invention, the shape measuring apparatus can measure the shape inside the hole at high speed and appropriately with respect to the object having the hole.

It is a perspective view which shows the structural example of the shape measuring apparatus by this embodiment. It is the schematic which shows the output direction of a detection part line light. It is a schematic block diagram which shows an example of a structure of a detection part. It is a schematic block diagram which shows the structural example of the shape measuring apparatus by this embodiment. It is a schematic diagram which shows operation | movement in the case of measuring the hole shape of a to-be-tested object. It is a flowchart which shows the procedure of the process which a shape measuring apparatus measures a hole shape. It is explanatory drawing explaining correction | amendment of an imaging system. It is a schematic diagram which shows another example of operation | movement in the case of measuring the hole shape of a to-be-tested object.

  Hereinafter, a configuration according to an embodiment of the shape measuring apparatus of the present invention will be described with reference to the drawings. In addition, this embodiment is specifically described in order to make the gist of the invention better understood, and does not limit the present invention unless otherwise specified. In addition, in the drawings used in the following description, in order to make the characteristics easy to understand, there is a case where a main part is shown in an enlarged manner for convenience, and the dimensional ratios of the respective components are the same as the actual ones. Is not limited.

(Configuration of shape measuring device)
FIG. 1 is a perspective view showing an example of the configuration of a shape measuring apparatus 100 according to an embodiment of the present invention. The shape measuring apparatus 100 according to the present embodiment projects a line-shaped projection pattern composed of one line light on the surface of the test object by using the light cutting method, and the line-shaped projection pattern is projected onto the surface of the test object. Each time the entire area is scanned, the line-shaped projection pattern projected onto the test object is imaged from an angle different from the projection direction. Then, the distance from the reference plane of the test object surface is calculated from the captured image of the test object surface using the principle of triangulation for each pixel in the longitudinal direction of the linear projection pattern, and the test object surface It is a device for measuring the three-dimensional shape of. The shape measuring apparatus 100 of this embodiment is an apparatus characterized in that the shape of the surface (inner surface of the hole) of the test object 200 having a hollow hole is appropriately measured at high speed.

  As shown in FIG. 1, a shape measuring apparatus 100 includes a base 11 having a horizontal upper surface, a probe unit 20 for measuring the shape of a test object, a moving unit 30 for moving the probe unit 20, and a probe. A rotation mechanism 40 that rotates the unit 20 with respect to the moving unit 30 is provided. Further, the range shown in FIG. And the shape measuring apparatus 100 is provided with the control part mentioned later in FIG.3 and FIG.4, and controls the measuring apparatus main body 110. FIG.

  The base 11 has a gantry 12 and a surface plate 13 placed on the gantry 12. The gantry 12 is for adjusting the level of the entire shape measuring apparatus 100. The surface plate 13 is made of stone or cast iron, and its upper surface is kept horizontal by the gantry 12. A test object to be measured by the shape measuring apparatus 100 is installed on the base 11. Here, the test object 200 shown in FIG. 1 is an object having a hollow hole.

  Hereinafter, the configuration of the shape measuring apparatus 100 will be described using an XYZ coordinate system defined by three directions orthogonal to each other. Here, the XY plane defines a plane parallel to the upper surface of the base 11. That is, the X-axis direction defines one direction on the base 11, the Y-axis direction defines a direction orthogonal to the X-axis direction on the upper surface of the base 11, and the Z-axis direction. Defines a direction orthogonal to the upper surface of the base 11.

  The probe unit 20 irradiates the test object 200 installed on the base 11 with line-shaped measurement light (line light), and detects scattered light of the irradiated line light. In the optical cutting type shape measuring apparatus 100, the surface of the test object 200 on which the optical cutting surface (line) appears is detected by irradiating the line light from the probe unit 20.

  FIG. 2 is a schematic diagram illustrating the output direction of the line light La from the probe unit 20. As shown in this figure, the probe unit 20 outputs the line light La in one direction out of the directions orthogonal to the Z-axis direction. For example, the probe unit 20 is inserted into the hole of the test object 200, outputs the line light La in a direction perpendicular to the Z-axis direction, irradiates the inner surface of the hole, and the irradiated line light La Detects scattered light.

  The moving unit 30 moves the probe unit 20 in the X-axis direction, the Y-axis direction, or the Z-axis direction with respect to the test object 200 installed on the upper surface of the base 11. The moving unit 30 is mainly composed of a portal frame 15. The base 11 is configured such that an end portion (right end portion in FIG. 1) on the upper surface of the base 11 also serves as a Y-axis guide that drives the portal frame 15 on the base 11 in the Y-axis direction. Has been.

  The portal frame 15 includes an X-axis guide 15a extending in the X-axis direction, a drive-side column 15b driven along the Y-axis guide of the surface plate 13, and a follower that slides on the upper surface of the base 11 according to the drive of the drive-side column 15b. A side post 15c is provided.

  The head portion 16 can be driven along the X-axis direction along the X-axis guide 15 a of the portal frame 15. A Z-axis guide 17 that can be driven in the Z-axis direction with respect to the head portion 16 is attached to the head portion 16. The probe unit 20 is attached to the lower end portion of the head unit 16 via the rotation mechanism 40.

  The rotation mechanism 40 is a mechanism that drives the probe unit 20 to rotate with respect to the moving unit 30 about the Z axis. For example, the rotation mechanism 40 causes the probe unit 20 inserted into the hole of the test object 200 by the moving unit 30 to rotate 360 degrees around the Z axis with respect to the moving unit 30 and stops at a desired rotation angle. It is possible to make it. Thereby, the probe unit 20 irradiates the entire circumference of the inner surface of the hole of the test object 200 with the line light La in a direction perpendicular to the Z-axis direction, and detects the scattered light of the irradiated line light La.

(Configuration of detector)
FIG. 3 is a schematic configuration diagram illustrating an example of the configuration of the probe unit 20. This drawing is a cross-sectional view of the probe unit 20 and the test object 200 and is a cross-sectional view taken along the XZ plane in the XYZ coordinate system defined above. The same applies to a cross-sectional view taken along the YZ plane.

  The probe unit 20 detects the shape of the inner surface of the hole 200 in the test object 200 having a hollow hole. The probe unit 20 includes a light source 55, a line light generation unit 53 that converts the illumination light output from the light source 55 into line light La, and the generated line light La in the tip direction of the probe unit 20 (covered in the Z-axis direction). A reflection mirror 52 that reflects in the direction in which the inspection object 200 is installed, and a reflection mirror 51 that reflects the line light La reflected by the reflection mirror 52 in a direction perpendicular to the Z-axis direction of the probe unit 20. And an optical output unit 50. Further, the probe unit 20 receives the scattered light of the line light La irradiated on the test object 200 from the light output unit 50 and guides the line light La received by the light receiving unit 60 to the imaging unit 70. A reflection mirror 62 and an imaging unit 70 (detection unit) are provided. The light output unit 50 and the light receiving unit 60 are provided in the probe unit 20 in a rod-shaped housing whose longitudinal direction is the depth direction of the hole of the test object 200 having a hollow hole. Then, when the probe unit 20 is moved or rotated by the moving unit 30 or the rotating mechanism 40, the light output unit 50 and the light receiving unit 60 have a common housing so that a relative distance is maintained in the probe unit 20. It is provided in the body. In addition, the light receiving unit 60 is provided separately from the light output unit 50 so as to be movable in the Z-axis direction.

The light output unit 50 outputs the line light La generated by being output from the light source 55 in a direction perpendicular to the Z-axis direction and irradiates the inner surface of the hole of the test object 200.
As the light source 55, an LED, a laser light source, an SLD (super luminescent diode), or the like can be used. When the LED is used, the light source can be formed at a low cost. In addition, when a laser light source is used, since it is a point light source, it is possible to produce line light La with less aberrations, excellent wavelength stability and a small half width, and a filter with a small half width can be used for stray light cut. The influence of can be reduced. In addition, when an SLD (super luminescent diode) is used, in addition to the characteristics of the laser light source, the coherence is lower than that of the laser light, so that the generation of speckle on the surface of the test object can be suppressed.

  The line light generation unit 53 includes, for example, a cylindrical lens or a slit plate having a thin band-shaped notch, and generates line light La upon receiving illumination light from the light source 55. The reflection mirror 52 and the reflection mirror 51 are reflection mirrors that reflect light in a direction of, for example, 90 degrees, guide the line light La toward the tip of the probe unit 20 by the reflection mirror 52, and the probe unit 20 by the reflection mirror 51. The light is output in a direction perpendicular to the Z-axis direction.

The light receiving unit 60 includes a reflecting mirror 61 (reflecting unit) that receives the scattered light of the line light La irradiated on the test object 200 from the output from the light output unit 50.
The adjusting unit 25 detects the position of the reflection mirror 61 (the position of the light receiving unit 60) and the light receiving position driving unit 21 (the first driving unit) that moves the position of the reflecting mirror 61 and the position of the reflecting mirror 61 (the position of the light receiving unit 60). The light path length is adjusted until the light output from the light output section 50 is received by the light receiving section 60.

  The output position of the line light La from the light output unit 50 and the light receiving position of the light receiving unit 60 are the irradiation direction of the line light La from the light output unit 50 and the scattering by the line light La on the measurement surface of the test object 200. The incident direction of the light with respect to the light receiving unit 60 is set to form a predetermined angle θ. In the present embodiment, the predetermined angle θ is set to 45 degrees, for example.

  The reflection mirror 61 receives scattered light of the line light La irradiated on the test object 200 from a predetermined direction and guides the received light to the imaging unit 70. In the present embodiment, the reflection mirror 61 causes the scattered light of the line light La on the measurement surface of the test object 200 irradiated to the test object 200 to be 45 degrees with respect to the irradiation direction from the light output unit 50. It receives light from the incident direction. The reflection mirror 61 is a reflection mirror that reflects light in a direction of, for example, 135 degrees, and reflects the received line light La in a direction opposite to the tip direction of the probe unit 20 along the Z-axis direction. The reflected line light La is input to the imaging unit 70 via the reflection mirror 62 that reflects the light in the direction of 90 degrees.

  The light receiving position driving unit 21 moves the light receiving position of the light receiving unit 60 in the depth direction of the hollow hole of the test object 200. In other words, the light receiving position driving unit 21 moves the reflection mirror 61 of the light receiving unit 60 up or down along the Z-axis direction. Thereby, the optical path length from when the light from the light output unit 50 is reflected by the reflection mirror 51 to when it is received by the reflection mirror 61 of the light receiving unit 60 can be adjusted. Even if the distance between the probe portion 20 and the inner surface of the hole changes due to the change in the hole diameter of 200, the predetermined angle θ (for example, 45 degrees) can be set by moving the position of the light receiving portion 60. Can be maintained. The light receiving position driving unit 21 is controlled by the control unit 80.

  The light receiving position detection unit 22 detects the position of the light receiving unit 60 in the Z-axis direction. For example, the light receiving position detection unit 22 detects the distance between the output position of the line light La from the light output unit 50 and the position of the reflection mirror 61 of the light receiving unit 60 in the Z-axis direction and outputs the distance to the control unit 80.

  The reflection mirror 62 is a reflection mirror that reflects light in a direction of 90 degrees, for example. The line light La received and reflected by the light receiving unit 60 is reflected by the reflection mirror 62 and input to the imaging unit 70.

  The imaging unit 70 includes, for example, an imaging lens, an imaging element, and the like. Each time the moving unit 30 or the rotation mechanism 40 is driven by the control unit 80 and the line light La is scanned at a predetermined distance interval as described later. The test object 200 is imaged. Then, the imaging unit 70 outputs the captured image data of the test object 200 to the control unit 80. That is, the imaging unit 70 captures and detects the position of the scattered light received by the light receiving unit 60 when the line light La output from the light output unit 50 is scattered by the test object 200.

  The control unit 80 measures the shape of the test object 200 based on the adjustment state by the adjustment unit 25 and the detection position by the imaging unit 70. For example, the control unit 80 performs a predetermined image calculation process on the imaged image data of the test object 200 and based on the position of the light receiving unit 60 detected by the light receiving position detection unit 22 in the Z-axis direction. Thus, the distance between the surface of the test object 200 (the inner surface of the hole) and the light receiving unit 60 is calculated. For example, the control unit 80 moves and adjusts the position of the light receiving unit 60 according to the position where the line light La based on the hole diameter of the test object 200 is detected, and outputs the line light La from the light output unit 50. The distance between the surface of the test object 200 (the inner surface of the hole) and the probe unit 20 is calculated according to the distance between the position and the position of the light receiving unit 60.

  Specifically, the control unit 80 sets the light receiving position of the light receiving unit 60 to the light receiving position driving unit 21 so that the predetermined angle θ is maintained at, for example, 45 degrees based on the hole diameter of the test object 200. Move. Then, the control unit 80 detects the distance between the output position of the line light La from the light output unit 50 detected by the light receiving position detection unit 22 and the position of the reflection mirror 61 of the light receiving unit 60 in the Z-axis direction, and a predetermined angle θ. Based on (for example, 45 degrees), the distance between the surface of the test object 200 (the inner surface of the hole) and the probe unit 20 is calculated using the principle of triangulation. Note that the distance between the output position of the light output unit 50 and the position of the light receiving unit 60 includes the detection result detected by the light receiving position detection unit 22 and the line light La in the captured image data of the test object 200. The position information is also calculated.

  For example, when the surface of the test object 200 (inner surface of the hole) has irregularities, the control unit 80 uses the line light La deformed according to the irregularities of the test object 200 in the image of the test object 200. Based on the position information of (line) and the position of the light receiving unit 60 detected by the light receiving position detection unit 22, the principle of triangulation for each longitudinal pixel in which the light section (line) (line light La) extends. Is used to calculate the distance between the surface of the test object 200 (the inner surface of the hole) and the probe unit 20.

  Then, the control unit 80 drives the moving unit 30 and the rotating mechanism 40 to move the probe unit 20 in the hole depth direction (Z-axis direction) and rotate it around the rotating shaft 20a. Each time the line light La is scanned at a predetermined distance interval with respect to the surface of 200 (the inner surface of the hole), the distance between the surface of the test object 200 (the inner surface of the hole) and the probe unit 20 is calculated. A process for obtaining a three-dimensional shape of the surface of 200 (the inner surface of the hole) is performed.

  As described above, the shape measuring apparatus 100 irradiates the inner surface of the hole of the test object 200 having a hollow hole with the line light La in a direction perpendicular to the Z-axis direction, and scatters the irradiated line light La. Receives and detects light. Further, the shape measuring apparatus 100 can move the light receiving position with respect to the output position of the line light La according to the hole diameter. Thereby, the shape measuring apparatus 100 can measure the inner shape of the hole at a higher speed by using the light cutting method than in the case of using laser spot light. In addition, the shape measuring apparatus 100 can appropriately and accurately measure the shape inside the hole using a light cutting method.

(Configuration of functional block of shape measuring device)
FIG. 4 is a schematic block diagram illustrating an example of the configuration of the shape measuring apparatus 100. The same components as those in FIGS. 1 to 3 are denoted by the same reference numerals.
The shape measuring apparatus 100 includes a measuring apparatus main body 110 and a control unit 80.
The measurement apparatus main body 110 includes a position driving unit 112 (second driving unit), a position detection unit 113, and a probe unit 20.
The position driving unit 112 includes a moving position driving unit 115 and a rotational position driving unit 117.
The moving position driving unit 115 is provided inside the moving unit 30, and based on the control of the control unit 80, a Y-axis motor that drives the portal frame 15 in the Y-axis direction, and the head unit 16 in the X-axis direction. And an X-axis motor for driving the Z-axis guide 17 in the Z-axis direction. The movement position drive unit 115 receives a drive signal supplied from a drive control unit 83 of the control unit 80 described later. Then, the moving position driving unit 115 moves the position of the moving unit 30, that is, the position of the probe unit 20 in three directions (X, Y, and Z axis directions) based on the drive signal.

  The rotation position driving unit 117 is provided inside the rotation mechanism 40 and drives the rotation mechanism 40 based on the control of the control unit 80 to rotate the probe unit 20 around the rotation axis 20a. It has a motor. The rotational position drive unit 117 receives a drive signal supplied from the drive control unit 83. Then, the rotational position drive unit 117 rotates the probe unit 20 around the rotation axis 20a by driving the rotation mechanism 40 based on this drive signal.

The position detection unit 113 includes a movement position detection unit 116 and a rotation position detection unit 118.
The movement position detection unit 116 is provided inside the movement unit 30 and detects the position of the movement unit 30 in the X-axis, Y-axis, and Z-axis directions, respectively, an X-axis encoder, a Y-axis encoder, and a Z-axis. It has an encoder. The movement position detection unit 116 detects the position of the movement unit 30 using these encoders, and supplies a signal indicating the position of the movement unit 30, that is, the position of the probe unit 20, to the coordinate detection unit 84 of the control unit 80 described later. .

  The rotational position detector 118 is provided inside the rotating mechanism 40 and includes a rotary shaft encoder that detects the rotational position of the probe unit 20 around the rotary shaft 20a. The rotational position detector 118 uses this encoder to detect the rotational position of the probe unit 20 around the rotational axis 20a, and supplies a signal indicating the detected rotational position to the coordinate detector 84.

The probe unit 20 detects the surface shape of the inner surface of the hole in the test object 200 having a hollow hole.
In order to obtain the shape of the inner surface of the hole of the test object 200 by the light cutting method, the probe unit 20 includes the light output unit 50, the light receiving unit 60, the light receiving position driving unit 21, the light receiving position detecting unit 22, and the like. And an imaging unit 70.
The light output unit 50 is illuminated with respect to the Z-axis direction by illumination light (line light La) emitted from the light source 55 based on a control signal for controlling measurement timing supplied from a measurement instruction unit 86 of the control unit 80 described later. Then, the line light La is output in a direction perpendicular to the inner surface of the hole of the test object 200.

  The light receiving unit 60 is moved and positioned in a direction in which the incident direction of scattered light to the light receiving unit 60 is shifted by a predetermined angle θ (for example, 45 degrees) with respect to the irradiation direction from the light output unit 50. The light receiving position driving unit 21 is provided inside the probe unit 20 and includes a Z-axis motor that drives the light receiving unit 60 in the Z-axis direction based on the control of the control unit 80. The light receiving position drive unit 21 receives a drive signal supplied from the drive control unit 83 of the control unit 80. The light receiving position driving unit 21 moves the position of the light receiving unit 60 based on the drive signal.

  The light receiving position detection unit 22 is provided inside the probe unit 20 and includes a Z-axis encoder that detects the position of the light receiving unit 60 in the Z-axis direction based on the control of the control unit 80. The light receiving position detection unit 22 detects the position of the light receiving unit 60 using this encoder, and supplies a signal indicating the position of the light receiving unit 60 to the coordinate detection unit 84 of the control unit 80.

  The imaging unit 70 is formed on the surface of the test object 200 (the inner surface of the hole) by the line light La from the light output unit 50 based on a control signal for controlling the measurement timing supplied from the measurement instruction unit 86. The cutting line is imaged through the light receiving unit 60. Here, the light cutting line is formed according to the cross-sectional shape of the test object 200. The imaging unit 70 images a shadow pattern formed on the surface of the test object 200 and supplies the captured image data to the image input unit 81. The imaging unit 70 includes an individual imaging element such as a charge coupled device (CCD) or a complementary metal oxide semiconductor (C-MOS) sensor.

Next, the control unit 80 will be described.
The control unit 80 includes an image input unit 81, a measurement light position determination unit 82 (determination unit), a drive control unit 83, a coordinate detection unit 84, a coordinate calculation unit 85, a measurement instruction unit 86, and a storage unit 87. Image data captured by the image capturing unit 70 is input to the image input unit 81. The input image data is stored in the storage unit 87 and image processing is executed by the control unit 80.

  The measurement light position determination unit 82 is imaged by the imaging unit 70 through the position of the line light La received by the light receiving unit 60 (the position of the line light La in the region of the mirror surface of the reflection mirror 61 or the reflection mirror 61). The position of the line light La in the imaging region) is detected based on the image data captured by the imaging unit 70. Then, the measurement light position determination unit 82 determines whether or not the detected position of the line light La is within a predetermined range of the light receiving unit 60. For example, the measurement light position determination unit 82 determines whether or not the position of the line light La imaged by the imaging unit 70 is within the region (effective region) of the effective pixel range that is predetermined in the imaging region. That is, the measurement light position determination unit 82 calculates the distance between the surface of the test object 200 (the inner surface of the hole) and the light receiving unit 60 using the principle of triangulation, and the predetermined angle θ (for example, 45 degrees) described above. ) To determine whether or not the position of the light receiving unit 60 is appropriate. The measurement light position determination unit 82 determines whether or not the position of the line light La imaged by the imaging unit 70 is within a range that indicates a predetermined center position in the imaging region. You may determine whether it exists in an effective area | region.

  If the measurement light position determination unit 82 determines that the position of the line light La imaged by the imaging unit 70 is not within a predetermined effective area in the imaging region, the drive control unit 83 determines the position of the line light La. A drive signal for moving the light receiving unit 60 in a direction that becomes a position in the effective region in the imaging region is supplied to the light receiving position driving unit 21. On the other hand, when the measurement light position determination unit 82 determines that the position of the line light La imaged by the imaging unit 70 is within a predetermined effective area in the imaging region, the drive control unit 83 receives the light receiving unit 60. A drive signal for stopping the movement is supplied to the light receiving position drive unit 21. When the position of the line light La is in the range of the central position in the imaging region, the control unit 80 performs triangulation based on the driving amount of the light receiving position driving unit 21 and the position of the line light La to be imaged. Using the principle, the distance between the surface of the test object 200 (the inner surface of the hole) and the light receiving unit 60 is calculated.

  Then, in order to measure the hole shape by scanning the surface of the test object 200 (the inner surface of the hole) with the line light La at predetermined distance intervals, the drive control unit 83 determines the position of the probe unit 20 in three directions. A drive signal for moving in the (X, Y, Z axis directions) and a drive signal for rotating the probe unit 20 around the rotation axis 20 a are supplied to the position drive unit 112, and the probe unit 20 is moved relative to the position of the test object 200. Move the relative position.

Based on the signal indicating the position of the probe unit 20 supplied from the movement position detection unit 116, the coordinate detection unit 84 is in the horizontal direction (X and Y axis directions) and the vertical direction of the probe unit 20 with respect to the position of the test object 200. The relative position in the (Z-axis direction) is detected. Further, the coordinate detection unit 84 is based on a signal indicating the rotation position around the rotation axis 20a of the probe unit 20 supplied from the rotation position detection unit 118, and the position of the probe unit 20 in the rotation direction with respect to the position of the test object 200. Is detected. The coordinate detection unit 84 is based on the detected position information in the horizontal direction, vertical direction, and rotation direction, and information indicating the coordinate position and rotation position of the probe unit 20 relative to the object 200 (rotation position information). ) Is detected. Then, the coordinate detection unit 84 supplies the coordinate information and rotation position information of the probe unit 20 to the coordinate calculation unit 85.
Further, the coordinate detection unit 84 is based on a signal indicating the position of the light receiving unit 60 supplied from the light receiving position detection unit 22, and the distance between the output position of the line light La from the light output unit 50 and the position of the light receiving unit 60. Is detected. Then, the coordinate detection unit 84 supplies information (position information of the light receiving unit 60) indicating the distance between the detected output position of the light output unit 50 and the position of the light receiving unit 60 to the coordinate calculation unit 85.

  The coordinate calculation unit 85 calculates the measurement position in the test object 200 based on the coordinate information and the rotation position information of the probe unit 20 supplied from the coordinate detection unit 84, and the position information of the light receiving unit 60 and the imaging unit 70. The distance between the surface of the test object 200 (the inner surface of the hole) and the light receiving unit 60 is calculated using the triangulation principle based on the image data input from. Thereby, the coordinate calculation unit 85 calculates the point group data of the coordinate value (three-dimensional coordinate value) of the surface (the inner surface of the hole) for each measurement position in the test object 200.

  The measurement instruction unit 86 supplies a control signal for controlling the measurement timing. The measurement instructing unit 86 performs measurement by controlling the irradiation timing of the line light La from the light output unit 50 and the imaging timing of the imaging unit 70 by this control signal. For example, the measurement instructing unit 86 performs control so that the drive control unit 83 performs measurement each time the probe unit 20 scans the test object 200 at a predetermined distance interval.

The storage unit 87 holds the image data input from the image input unit 81. The storage unit 87 also includes coordinate information and rotation position information of the relative position of the probe unit 20, position information of the light receiving unit 60, a measurement position of the test object 200 calculated by the coordinate calculation unit 85, and a test for each measurement position. Point cloud data of the coordinate value (three-dimensional coordinate value) of the surface of the object 200 (the inner surface of the hole) is held.
In addition, the storage unit 87 includes data for the control unit 80 to execute predetermined control, such as various instruction information regarding predetermined measurement conditions and measurement procedures. For example, the coordinate value of the measurement start position (first measurement position) of the test object 200, the coordinate value of the measurement position indicating the measurement range, the moving direction of the measurement position, and the distance interval of the measurement position (for example, a predetermined constant interval) Measurement pitch), coordinate values of the measurement end position (last measurement position), and the like. Note that the storage unit 87 may store various instruction information related to measurement conditions and measurement procedures input by the operator. And the control part 80 may perform a measurement based on various input instruction information, predetermined various instruction information, or both.

(Example of hole shape measurement operation)
Next, the measurement procedure and measurement operation in the shape measuring apparatus 100 will be described.
FIG. 5 is a schematic diagram showing the operation of the probe unit 20 when measuring the hole shape of the test object 200a. This drawing is a cross-sectional view of the probe unit 20 and the test object 200a, and is a cross-sectional view taken along the XZ plane in the XYZ coordinate system defined above. The same applies to a cross-sectional view taken along the YZ plane.

The hole of the test object 200a shown in this figure is a hole whose hole diameter is not uniform depending on the depth of the hole, and is in the order of the region Z _r1 , the region Z _r2 , and the region Z _r3 from the entrance side in the Z-axis direction. The hole diameter is large. Specifically, the hole diameter in the region Z _r3, large with respect to the hole diameter in the region Z _r1, hole diameter in the region Z _r2 is gradually decreased toward the region Z _r1 side from the region Z _r3 side.

As shown in FIG. 5A, when the shape measuring apparatus 100 measures the inner surface of the hole in the region Z _r1 of the test object 200a, first, the rotational axis 20a of the probe unit 20 is positioned at the center of the hole. As described above, the probe unit 20 is moved in the horizontal direction (X and Y axis directions) on the XY plane. Next, the shape measuring apparatus 100 moves the probe unit 20 to the position of the region Z _{r1 in} the Z-axis direction. Subsequently, the shape measuring apparatus 100 moves the light receiving unit 60 in the Z-axis direction to a position where a predetermined angle θ (for example, 45 degrees) is maintained. In this figure, the light receiving unit 60 to the position where the distance of the output position of the light output section 50 and the light receiving position of the light receiving portion 60 becomes distance D ₁ is located. Here, the distance D _k1 between the inner surface of the hole and the probe portion 20 in the region Z _r1 of the test object 200a is calculated based on the predetermined angle θ (for example, 45 degrees) and the distance D ₁ . Further, the surface shape of the inner surface of the hole is obtained from image data obtained by imaging the light cutting line by the line light La irradiated on the inner surface of the hole from the light output unit 50 through the light receiving unit 60. Thereby, the coordinate calculation unit 85 uses the light cutting line (line light La) based on the predetermined angle θ (for example, 45 degrees), the distance D ₁ , and the position information of the light cutting line by the line light La in the captured image data. The distance between the inner surface of the hole of the test object 200a and the probe unit 20 is calculated using the principle of triangulation for each pixel in the longitudinal direction in which) extends.

Next, as shown in FIG. 5B, when measuring the inner surface of the hole in the region Z _r3 of the test object 200a, the shape measuring apparatus 100 moves the probe unit 20 from the position of the region Z _{r1 in} the Z-axis direction. Move to the position of the region Z _r3 . Subsequently, the shape measuring apparatus 100 moves the light receiving unit 60 in the Z-axis direction to a position where a predetermined angle θ (for example, 45 degrees) is maintained. In this figure, the position where the distance of the output position of the light output section 50 and the light receiving position of the light receiving portion 60 becomes distance D _2, the light receiving portion 60 is located. Here, the distance D _k2 between the inner surface of the hole in the region Z _r3 of the test object 200a and the probe unit 20 is calculated based on a predetermined angle θ (for example, 45 degrees) and the distance D ₂ . Further, the surface shape of the inner surface of the hole is obtained from image data obtained by imaging the light cutting line by the line light La irradiated on the inner surface of the hole from the light output unit 50 through the light receiving unit 60. Thereby, the coordinate calculation unit 85 uses the light cutting line (line light La) based on the predetermined angle θ (for example, 45 degrees), the distance D ₂ , and the position information of the light cutting line by the line light La in the captured image data. The distance between the inner surface of the hole of the test object 200a and the probe unit 20 is calculated using the principle of triangulation for each pixel in the longitudinal direction in which) extends.

Further, when measuring the inner surface of the hole in the region Z _r2 of the test object 200a, the shape measuring apparatus 100 _moves the probe unit 20 along the Z axis from the region Z _r3 side to the region Z _r1 side in the region Z _r2 . The light receiving unit 60 is moved in the Z-axis direction to a position where a predetermined angle θ (for example, 45 degrees) is maintained in accordance with the hole diameter that gradually decreases and moves. Thus, the shape measuring apparatus 100 can perform triangulation in the same manner as in the case of the areas Z _r1 and Z _r3 shown in FIGS. 5A and 5B even when measuring the inner surface of the hole in the area Z _r2 . The distance between the inner surface of the hole of the test object 200a and the probe unit 20 is calculated using the principle.

  For example, the shape measuring apparatus 100 inserts the probe unit 20 into the hole of the test object 200a, and scans the probe unit 20 along the Z axis from the deepest position of the hole toward the hole entrance at a predetermined distance interval. Each time, the position of the light receiving unit 60 is moved in the Z-axis direction according to the size of the hole diameter so as to maintain a predetermined angle θ (for example, 45 degrees), and the surface of the test object 200a (the inner surface of the hole) The distance from the probe unit 20 is calculated. Each time the probe unit 20 is rotated at a predetermined rotation angle interval with respect to the entire circumference of the hole, the distance between the inner surface of the hole of the test object 200a and the probe unit 20 is determined by scanning in the Z-axis direction. By calculating, the three-dimensional shape of the hole of the test object 200a is measured.

Next, the procedure of the process in which the shape measuring apparatus 100 measures the three-dimensional shape of the hole of the test object 200a will be described with reference to FIG.
FIG. 6 is a flowchart showing a processing procedure in which the shape measuring apparatus 100 measures the hole shape.
First, the test object 200a is installed at a position within the effective measurement range on the upper surface of the base 11 of the shape measuring apparatus 100 by the operator (step S1).

  Next, the shape measuring apparatus 100 moves the rotation center position (position of the rotation axis 20a) in the horizontal direction (X and Y axis directions) of the probe unit 20 so as to be near the center position of the hole of the test object 200a. To do. For example, the drive control unit 83 of the control unit 80 supplies a drive signal to the movement position driving unit 115 so that the rotation center position of the probe unit 20 is close to the center position of the hole of the test object 200a, thereby moving the movement unit 30. Is moved (step S2).

  Subsequently, according to the depth of the hole of the test object 200a, there are a speed (scan speed) measured by scanning in the Z-axis direction and a moving distance range (scan distance range) measured by scanning in the Z-axis direction. Are set in the shape measuring apparatus 100 (step S3). Note that the setting information regarding the scan speed and the scan distance range may be preset and stored in the storage unit 87, or may be input by the operator and stored in the storage unit 87. The control unit 80 of the shape measuring apparatus 100 executes measurement control in the shape measuring apparatus 100 based on the setting information.

For example, the scan speed and the scan distance range are set as shown below.
When generating the point cloud data of coordinate values by measuring the depth direction (Z-axis direction) of the hole of the test object 200a having the hole depth L (mm) at a distance interval of S (mm) pitch, Assuming that the imaging frame rate of the imaging unit 70 is f (frame / sec), the scan speed V (mm / sec) is set to a value represented by Equation 1 as an example.

  In addition, due to structural limitations, there is a range in which the line light La cannot be irradiated in the tip direction of the probe unit 20, and therefore the distance from the deepest part of the hole to the measurable position (distance that cannot be measured) is M (mm). Then, the measurable scan distance range E is set to a value represented by Expression 2 as an example.

In this case, the Z axis scan start position is the coordinate value of the Z axis at the entrance of the hole. The Z-axis scan end position is represented by the Z-axis coordinate value of “Z-axis coordinate value at the entrance of the hole−E (mm)”. These scan start position and scan end position are also stored in the storage unit 87 as setting information.
In this case, one scan time T in the Z-axis direction is expressed by Equation 3.

  Next, when the probe unit 20 is rotated by the rotation mechanism 40 with respect to the hole of the test object 200a, the rotation start angle (scan start angle) and the rotation end angle (scan end angle) measured by scanning in the rotation direction are measured. ) And a rotation angle unit (scan angle unit) are set in the shape measuring apparatus 100 (step S4). The setting information regarding the scan start angle, the scan end angle, and the scan angle unit may be preset and stored in the storage unit 87 or may be input by the operator and stored in the storage unit 87. Good. The control unit 80 of the shape measuring apparatus 100 executes measurement control in the shape measuring apparatus 100 based on the setting information.

For example, the scan angle unit is set as shown below.
When generating the point cloud data of coordinate values by measuring the entire circumference of the inner surface of the hole of the test object 200a whose radius is R (mm), scanning is performed when the effective width of the line light La is W (mm). The angle unit U is set to a value represented by Equation 4 as an example.

  In this case, the number of repetitions of scanning in the Z-axis direction when the probe unit 20 is rotated and measured with respect to the scan angle range P (rad) is expressed by Equation 5.

  Note that the scan start angle and the scan end angle are set to an angle predetermined in the shape measuring apparatus 100 or an arbitrary angle designated by the operator.

When the measurement condition is set in the shape measuring apparatus 100, the control unit 80 executes control for starting measurement.
First, the drive control unit 83 of the control unit 80 rotates the probe unit 20 to a set scan start angle by supplying a drive signal to the rotational position drive unit 117 and driving the rotation mechanism 40. Stop (step S5).

  Next, based on the rotation angle (rotation position) of the probe unit 20 detected by the rotation position detection unit 118, the control unit 80 determines that the rotation angle (rotation position) of the probe unit 20 is the set scan end angle. It is determined whether or not there is (step S6). When the rotation angle of the probe unit 20 is the set scan end angle in step S6, the control unit 80 advances the process to step S14.

  On the other hand, when the rotation angle of the probe unit 20 is not the set scan end angle in step S <b> 6, the drive control unit 83 of the control unit 80 supplies a drive signal to the moving position driving unit 115 to drive the moving unit 30. Thus, the position of the probe unit 20 is moved to the set scan start position in the Z-axis direction and stopped (step S7).

  Next, the measurement instructing unit 86 of the control unit 80 supplies a control signal for controlling the measurement timing to irradiate the inner surface of the hole of the test object 200a with the line light La from the light output unit 50, and the light receiving unit 60. The line light La received via the image pickup unit 70 is caused to pick up an image. Then, the measurement light position determination unit 82 of the control unit 80 determines whether or not the position of the captured line light La is within a predetermined effective region in the imaging region based on the image data captured by the imaging unit 70. Is determined (step S8).

  If it is determined in step S8 that the position of the captured line light La is not within the predetermined effective area in the imaging area, the drive control unit 83 determines that the position of the line light La is within the effective area in the imaging area. A drive signal for moving the light receiving unit 60 in the direction of the position is supplied to the light receiving position driving unit 21. The light receiving position driving unit 21 moves the position of the light receiving unit 20 based on the supplied drive signal (step S9). And the control part 80 returns a process to step S8.

  On the other hand, when it is determined in step S8 that the position of the captured line light La is within a predetermined effective area in the imaging area, the control unit 80 captures the image data (light receiving unit) captured by the imaging unit 70. Data obtained by imaging the line light La through 60), coordinate information and rotational position information of the probe unit 20 detected by the coordinate detection unit 84, and position information of the light receiving unit 60 detected by the coordinate detection unit 84. And it memorize | stores in the memory | storage part 87 (step S10).

  Next, the drive control unit 83 of the control unit 80 supplies a drive signal to the movement position driving unit 115 to drive the movement unit 30, thereby setting the scan position of the probe unit 20 in the Z-axis direction by one step (preset). It is moved and stopped (one of the distance distances (unit of movement amount)) (step S11).

  Subsequently, the control unit 80 determines whether the position of the probe unit 20 in the Z-axis direction is the set scan end position based on the position of the probe unit 20 detected by the movement position detection unit 116. (Step S12). If the position of the probe unit 20 in the Z-axis direction is not the set scan end position in step S12, the control unit 80 advances the process to step S8, and executes a measurement process for the next scan position in the Z-axis direction.

  On the other hand, when the position of the probe unit 20 in the Z-axis direction is the set scan end position in step S12, the drive control unit 83 of the control unit 80 supplies a drive signal to the rotation position drive unit 117 to rotate the rotation mechanism. By driving 40, the scan angle in the rotation direction of the probe unit 20 is moved by one step (one preset scan angle unit) and stopped (step S13). And the control part 80 returns a process to step S6, and performs the process of the measurement with respect to the next scanning angle of a rotation direction.

  When the rotation angle of the probe unit 20 is the set scan end angle in step S6, that is, when the measurement in the Z-axis direction is completed for the entire circumference of the hole, the coordinate calculation unit 85 of the control unit 80 is performed. Calculates and generates the three-dimensional shape data of the hole using the principle of triangulation based on the image data and position information acquired in step 10 (step S14).

As described above, the shape measuring apparatus 100 according to the present embodiment inserts the probe unit 20 into the hole and reflects the line light La for measurement at a depth position corresponding to the measurement position of the hole by 90 degrees. By outputting the line light La in a direction perpendicular to the Z-axis direction, the line light La can be irradiated from the probe unit 20 to the inner surface of the hole. In addition, since the shape measuring apparatus 100 can move the position of the light receiving unit 60 that receives the scattered light of the line light La irradiated on the inner surface of the hole in accordance with the size of the hole diameter, Accordingly, the distance between the probe unit 20 and the inner surface of the hole can be calculated using the principle of triangulation by moving the light receiving unit 60. Furthermore, the shape measuring apparatus 100 can measure the entire circumference of the inner surface of the hole by including the rotation mechanism 40 capable of rotating the probe unit 20 by 360 degrees.
Thereby, since the shape measuring apparatus 100 measures the shape inside a hole with the optical cutting method which uses the line light La as measurement light, it can measure at high speed compared with the case where laser spot light is used as measurement light. In addition, the shape measuring apparatus 100 can accurately and appropriately measure the shape inside the hole by inserting the probe unit 20 inside the hole and measuring the shape by the optical cutting method.

  In the above-described embodiment, the case where the hole to be measured is a vertically opened hole has been described, but the shape measuring apparatus 100 further includes, for example, a biaxial rotation mechanism on the rotation mechanism 40, By enabling rotation around the X-axis and rotation around the Y-axis, the probe unit 20 may be inserted in the depth direction of the hole even in a hole formed obliquely. Thereby, the shape measuring apparatus 100 can measure the hole shape even with respect to the hole opened obliquely.

  The control in the case where it is determined in step S8 in FIG. 6 that the position of the line light La is not within the effective region is not limited to the control that continues the measurement by adjusting the position of the light receiving unit 60. It is good also as control which returns and measures the probe part 20 to the scanning start position of a Z-axis direction again.

  Note that, referring to FIG. 6, the shape measuring apparatus 100 acquires all image data and position information in the Z-axis direction and the entire circumferential direction of the hole, and then calculates and generates the three-dimensional shape data of the hole. Although explained, it is not limited to this. For example, the shape measuring apparatus 100 may generate shape data for each measurement of the measurement position based on image data and position information acquired at each measurement position.

The shape of the hole may be a concave hole or a through hole.
In addition, when the shape measuring apparatus 100 has continuity in the surface shape of the inner surface of the hole (for example, when the hole diameter varies continuously according to the position in the depth direction of the hole), The position of the inner surface of the hole at the next measurement position may be predicted based on the position information of the inner surface of the hole obtained at the measurement position, and the light receiving unit 60 may be moved based on the predicted position. Thereby, the shape measuring apparatus 100 follows the position of the imaged line light La to the position in the effective area during the scan for detecting the position of the inner surface of the hole by moving the position of the probe unit 20 in the Z-axis direction. Can be made.

  Further, when generating hole shape data from image data obtained by imaging the line light La, the control unit 80, for example, for sampling data in pixel units (pixel units) for each scanning line in the image data, Spline interpolation or autocorrelation processing is performed to detect the peak position of the line light La with an accuracy of 1/100 pixel. Thereby, the control unit 80 can accurately detect the peak position of the line light La imaged in the image data.

Further, when generating hole shape data from image data obtained by imaging the line light La, the control unit 80 performs correction in the imaging system on the image data. Here, the correction is correction of an installation error of the imaging unit 70 (installation error due to the position in the three directions and the rotation in the three directions) or distortion in the optical component such as a reflection mirror or a lens.
FIG. 7 is an explanatory diagram illustrating correction of the imaging system. For example, as shown in FIG. 7, a reference grid Lc is installed on a light cutting surface 210 on the surface of the test object, and the pixel position in the image data obtained by capturing the image by the imaging unit 70 and the crossing that is the attitude of the reference grid Lc. The three-dimensional coordinates in the plane including the points are related by a correction formula or correction data.
For example, here, in a simplified manner, there is a relationship represented by Equation 6, and conversion from the screen coordinates to the reference lattice plane is defined as an imaging system correction function F as represented by Equation 7.

  When the hole shape data is generated from the image data obtained by imaging the line light La, the control unit 80 uses the imaging system correction function F to perform correction in the imaging system on the image data. Thereby, the control unit 80 can accurately detect the peak position of the line light La imaged in the image data.

(Another example of hole shape measurement operation)
In the above embodiment, when the shape measuring apparatus 100 measures the hole shape, the control for moving the position of the light receiving unit 60 in the Z-axis direction according to the size of the hole diameter has been described. You may control to move the position of the probe part 20 in the horizontal direction (X, Y axis direction) according to the size of the hole diameter.

  FIG. 8 shows the position of the probe unit 20 in the horizontal direction (X and Y axis directions) according to the size of the hole diameter as an example showing the operation of the probe unit 20 when measuring the hole shape of the test object 200b. It is a schematic diagram which shows an example in the case of making it move. This drawing is a cross-sectional view of the probe unit 20 and the test object 200b, and is a cross-sectional view taken along the XZ plane in the XYZ coordinate system defined above. The same applies to a cross-sectional view taken along the YZ plane. In this figure, the shape measuring apparatus 100 maintains a predetermined angle θ (for example, 45 degrees) by moving the position of the probe unit 20 in the horizontal direction (X and Y axis directions) according to the size of the hole diameter. The distance between the inner surface of the hole of the object 200b and the probe unit 20 is calculated using the principle of triangulation.

The hole of the test object 200b shown in FIG. 8 is a hole whose hole diameter is not uniform depending on the depth of the hole, and is in the order of the region Z _r5 , the region Z _r6 , and the region Z _r7 from the entrance side in the Z-axis direction. The hole diameter is small. Specifically, the hole diameter in the region Z _r7, smaller than the hole diameter in the region Z _r5, the hole diameter in the region Z _r6, gradually increases toward the area Z _r5 side from the region Z _r7 side.

As shown in FIG. 8A, when the shape measuring apparatus 100 measures the inner surface of the hole in the region Z _r7 of the test object 200b, first, the rotational axis 20a of the probe unit 20 is set to the center axis Z of the hole. _The probe unit 20 is moved in the horizontal direction (X and Y axis directions) on the XY plane so as to be the same as the position of ₂₀₀ . Next, the shape measuring apparatus 100 moves the probe unit 20 to the position of the region Z _{r7 in} the Z-axis direction. Subsequently, the shape measuring apparatus 100 moves the light receiving unit 60 in the Z-axis direction to a position where a predetermined angle θ (for example, 45 degrees) is maintained. In this figure, the light receiving unit 60 is located at a position where the distance between the output position of the light output unit 50 and the light receiving position of the light receiving unit 60 is a distance D ₅ . Here, the distance D _k5 the inner surface and the probe portion 20 of the bore in the region Z _r7 of the object 200a is a predetermined angle theta (e.g. 45 degrees), and is calculated based on the distance D _5. Further, the surface shape of the inner surface of the hole is obtained from image data obtained by imaging the light cutting line by the line light La irradiated on the inner surface of the hole from the light output unit 50 through the light receiving unit 60. Thereby, the coordinate calculation unit 85 uses the light cutting line (line light La) based on the predetermined angle θ (for example, 45 degrees), the distance D ₅ , and the position information of the light cutting line by the line light La in the captured image data. The distance between the inner surface of the hole of the test object 200b and the probe unit 20 is calculated using the principle of triangulation for each pixel in the longitudinal direction in which) extends.

Next, as shown in FIG. 8B, when measuring the inner surface of the hole in the region Z _r5 of the test object 200b, the shape measuring apparatus 100 moves the probe unit 20 from the position of the region Z _{r7 in} the Z-axis direction. Move to the position of the region Z _r5 . Further, as shown in FIG. 8B, the shape measuring apparatus 100 is arranged such that the position of the rotation axis 20a of the probe unit 20 is the center of the hole so that the distance _Dk5 between the probe unit 20 and the inner surface of the hole is maintained. The probe unit 20 is moved in the horizontal direction (X and Y axis directions) on the XY plane to a position different from the position of the axis Z ₂₀₀ (position in a direction approaching the inner surface of the hole). Thus, the predetermined angle θ (for example, 45 degrees) is maintained without changing the position of the light receiving unit 60 from the position measured in the region Z _r7 . Therefore, the coordinate calculation unit 85 adds the movement distance of the rotating shaft 20a of the probe unit 20 to add the predetermined angle θ (for example, 45 degrees), the distance D ₅ , and the light by the line light La in the captured image data. Based on the position information of the cutting line, the distance between the inner surface of the hole of the test object 200b and the probe unit 20 is calculated for each pixel in the longitudinal direction in which the light cutting line (line light La) extends using the principle of triangulation. .

Further, when the shape measuring apparatus 100 measures the inner surface of the hole in the region Z _r6 of the test object 200b, the probe unit 20 is moved along the Z axis from the region Z _r7 side to the region Z _r5 side in the region Z _r6 . The probe unit 20 is moved in the horizontal direction (X and Y axis directions) on the XY plane so that the distance D _k5 between the probe unit 20 and the inner surface of the hole is maintained in accordance with the diameter of the hole that is gradually increased as it moves. Moving. Thus, the predetermined angle θ (for example, 45 degrees) is maintained without changing the position of the light receiving unit 60 from the position measured in the region Z _r7 . Therefore, when measuring the inner surface of the hole in the region Z _r6 , the shape measuring apparatus 100 also uses the principle of triangulation as in the case of the region Z _r5 and the region Z _r7 shown in FIGS. 8 (a) and 8 (b). Is used to calculate the distance between the inner surface of the hole of the test object 200a and the probe unit 20.

  The position of the light receiving unit 60 is desirably positioned so as to be a predetermined angle θ (for example, 45 degrees) at the measurement position where the hole diameter is the smallest. Thereby, when moving to the measurement position where the hole diameter is large, the predetermined angle θ (for example, 45 degrees) can be maintained by moving the position of the probe unit 20 without changing the position of the light receiving unit 60.

As described above, the shape measuring apparatus 100 controls the position of the light receiving unit 60 by changing the position of the probe unit 20 in the horizontal direction (X and Y axis directions) according to the size of the hole diameter. The three-dimensional shape data of the hole of the test object 200b is calculated and generated using the principle of triangulation without moving in the Z-axis direction according to the size.
Thereby, the shape measuring apparatus 100 can measure the shape inside the hole at high speed and appropriately using the light cutting method.

  In the control for moving the position of the probe unit 20, when the hole diameter on the entrance side of the hole is small and the hole diameter on the deepest side of the hole is large as in the test object 200a shown in FIG. When measuring at a large position, the probe unit 20 may not be moved sufficiently. In such a case, the control of moving the position of the light receiving unit 60 according to the size of the hole diameter is superior.

According to the above embodiment, the shape measuring apparatus 100 irradiates the inner surface of the hollow test object 200 with the line light La (measurement light) and receives the line light La irradiated on the test object 200. Thus, the shape measuring apparatus measures the shape of the test object 200. The shape measuring apparatus 100 is provided separately from the light output unit 50 and the light output unit 50 that outputs the line light La (line-shaped measurement light) irradiated to the test object 200, and from a predetermined direction. And a light receiving unit 60 that detects scattered light of the line light La to be received. Further, the shape measuring apparatus 100 adjusts the position of the light receiving unit 60 according to the position where the measurement light is detected, and the shape measuring apparatus 100 and the test object 200 according to the distance between the output position of the irradiated light and the position of the light receiving unit 60. The control part 80 which calculates the distance of is provided.
That is, in the shape measuring apparatus 100, the light output unit 50 irradiates the line light La into the hole of the test object 200, and adjusts the position of the light receiving unit 60 provided separately from the light output unit 50. The line light La is received. Thereby, the shape measuring apparatus 100 can measure the shape inside the hole at high speed and appropriately using the light cutting method.

Further, according to the above embodiment, the shape measuring apparatus 100 includes the light receiving position driving unit 21 (first driving unit) that moves the position of the light receiving unit 60 in the hollow depth direction. In addition, the light receiving unit 60 detects the position of the line indicated by the detected line light La. Then, the control unit 80 moves the position of the light receiving unit 60 according to the detected position of the line by the light receiving position driving unit 21 so that the detected position of the line becomes a predetermined position. 60 position is adjusted.
That is, the shape measuring apparatus 100 can move the position of the light receiving unit 60 provided apart from the light output unit 50 up and down along the depth direction of the hole by the light receiving position driving unit 21. And the control part 80 moves the position of the light-receiving part 60 up and down along the depth direction of a hole so that the position where the line light La is received becomes an appropriate position.
Thereby, the shape measuring apparatus 100 can receive and detect the line light La applied to the inner surface of the hole at an appropriate position when measuring the inner shape of the hole using the light cutting method.

According to the above embodiment, the light receiving position driving unit 21 moves the position of the light receiving unit 60 relative to the output position of the irradiated light. The light output unit 50 outputs line-shaped line light La in a direction perpendicular to the direction in which the position of the light receiving unit 60 is moved. The light receiving unit 60 includes a reflecting mirror 61 (reflecting unit) that reflects the received line light La along a direction in which the light receiving position driving unit 21 moves the position of the light receiving unit 60. And the control part 80 is equipped with the measurement light determination part 81 (determination part) which determines the position of the line by the line light La detected based on the reflected line light La, and outputs a determination result, The position of the light receiving unit 60 is adjusted according to the determination result of the line position.
That is, the light receiving position driving unit 21 outputs the line light La in the direction in which the light output unit 50 moves the position of the light receiving unit 60, that is, in the direction perpendicular to the depth direction of the hole (Z-axis direction). The shape measuring apparatus 100 outputs in a direction perpendicular to the Z-axis direction and irradiates the line light La on the inner surface of the hole, and the irradiated line light La is reflected in the depth direction of the hole by the reflection mirror 61 of the light receiving unit 60. Reflected in the direction away from the hole in parallel to. Then, the reflected line light La is imaged by the imaging unit 70, and the position of the line by the line light La imaged by the measurement light determination unit 81 is determined.
Thereby, the measurement light determination unit 81 determines whether or not the position where the line light La irradiated to the inner surface of the hole is received is an appropriate position when measuring the inner shape of the hole using the light cutting method. Can be determined.
In addition, although the example in which the measurement light determination part 81 is provided in the control part 80 was demonstrated, it is not restricted to this. The measurement light determination unit 81 may be provided in the light receiving unit 60, determine the position of the line light La received by the light receiving unit 60, and supply the determined result to the control unit 80.

Further, according to the embodiment, the measurement light determination unit 81 determines whether or not the position of the line by the line light La is settled within a predetermined range.
For example, the measurement light determination unit 81 determines whether or not the position of the line by the received line light La is within a detectable effective region. Thereby, the measurement light determination unit 81 can determine whether or not the line position of the received line light La is received at an appropriate position where it can be detected.

Further, according to the embodiment, the measurement light determination unit 81 determines the position of the line by the line light La shown in the image formed by imaging the reflected line light La.
That is, the constant light determination unit 81 determines whether or not the position of the line by the received line light La is within the region (effective region) of the effective pixel range determined in advance in the imaging region. Thereby, the measurement light determination part 81 can determine whether the position of the line by the imaged line light La is received in the suitable position which can be detected.

Moreover, according to the said embodiment, the light output part 50 and the light-receiving part 60 were formed so that the relative distance between the light output part 50 and the light-receiving part 60 was hold | maintained based on instruction | command. A probe unit 20 (probe unit) provided in a common housing is formed.
In other words, the light output unit 50 and the light receiving unit 60 are provided in a common housing in the probe unit 20, and a structure that maintains a relative distance between the light output unit 50 and the light receiving unit 60 is provided. It has become. As a result, the shape measuring apparatus 100 inserts the probe unit 20 into the hole or moves or rotates the hole in the hole to perform the measurement between the light output unit 50 and the light receiving unit 60. Distance is maintained.

Further, according to the above embodiment, the shape measuring apparatus 100 includes the position driving unit 112 (second driving unit) that moves the position of the probe unit 20 relative to the test object 200.
Thereby, the shape measuring apparatus 100 can perform measurement by inserting the probe unit 20 into the hole or moving or rotating the hole 20 in the hole by the position driving unit 112.

Moreover, according to the said embodiment, the control part 80 scans along the shape of the recessed part or penetration part provided in the to-be-tested object 200 with the probe part 20, and calculates the shape of a recessed part or a penetration part. . That is, under the control of the control unit 80, the shape measuring apparatus 100 moves the probe unit 20 through the hole according to the shape of the hole of the test object 200, scans it, and calculates the shape of the hole.
Thereby, the shape measuring apparatus 100 can measure the shape of the hole which has a recessed part or a penetration part at high speed appropriately using an optical cutting system.

Moreover, according to the said embodiment, the light output part 50 and the light-receiving part 60 are provided in the rod-shaped housing | casing which makes a hollow depth direction a longitudinal direction. That is, the probe unit 20 is a rod-shaped housing whose longitudinal direction is the depth direction of the hole, and includes the light output unit 50 and the light receiving unit 60 inside the housing.
Thereby, the probe unit 20 is easy to insert into the hole, and irradiates the inner surface of the hole with the line light La while being inserted into the hole, and receives the scattered light of the irradiated line light La. Can do.

Moreover, according to the said embodiment, while irradiating line light La to the inner surface of the hollow test object 200, the line light La irradiated to the test object 200 is received, and the shape of the test object 200 is measured. In the shape measuring method, the light output unit 50 outputs the line light La that the light output unit 50 irradiates the test object 200, and the light receiving unit 60 provided apart from the light output unit 50 has a predetermined direction. The position of the light receiving unit 60 is adjusted according to the light receiving process for detecting the scattered light of the measurement light received from the light and the position where the line light La is detected, and the distance between the output position of the irradiated light and the position of the light receiving unit 60 And a control process for calculating the distance to the test object 200 according to the above.
That is, in the shape measuring method in the shape measuring apparatus 100, the light output unit 50 irradiates the line light La into the hole of the test object 200, and the position of the light receiving unit 60 provided separately from the light output unit 50 is determined. This is a method of adjusting and receiving the line light La. With this shape measuring method, the shape measuring apparatus 100 can measure the shape inside the hole at high speed and appropriately using the light cutting method.

Moreover, according to the said embodiment, while irradiating line light La to the inner surface of the hollow test object 200, the line light La irradiated to the test object 200 is received, and the shape of the test object 200 is measured. A program in a computer included in the shape measuring apparatus 100 is configured to cause the light output unit 50 to output the line light La to be irradiated onto the test object 200 and the light receiving unit 60 provided separately from the light output unit 50 in advance. The step of detecting the scattered light of the line light La received from a predetermined direction and the position of the light receiving unit 60 are adjusted according to the position where the line light La is detected, and the output position of the irradiated light and the light receiving unit 60 The step of calculating the distance to the test object 200 according to the distance to the position is executed.
That is, the program in the computer provided in the shape measuring apparatus 100 is such that the light output unit 50 irradiates the line light La into the hole of the test object 200 and the position of the light receiving unit 60 provided separately from the light output unit 50. To control to receive the line light La. With this program, the computer included in the shape measuring apparatus 100 can control the shape inside the hole at high speed and appropriately using the light cutting method.

The control unit 80 in FIG. 4 may be realized by dedicated hardware, and is configured by a memory and a CPU (central processing unit) to realize the functions of the control unit 80 described above. The function may be realized by loading a program into a memory and executing the program.
Further, instead of moving the probe unit 20, it is also possible to adjust the irradiation direction of the line light La by controlling the posture of the reflection mirror 51. In this case, the posture (angle) of the reflection mirror 51 is adjusted so that the line light La to be imaged falls within the imaging range of the imaging unit 70. In this case, the distance is calculated by using the posture of the reflection mirror 51 (angle with respect to the reference position) and the position of the line light La.

  4 is recorded on a computer-readable recording medium, and the program recorded on the recording medium is read into the computer system and executed. You may perform the process of each part of. Here, the “computer system” includes an OS and hardware such as peripheral devices.

Further, the “computer system” includes a homepage providing environment (or display environment) if a WWW system is used.
The “computer-readable recording medium” refers to a storage device such as a flexible medium, a magneto-optical disk, a portable medium such as a ROM and a CD-ROM, and a hard disk incorporated in a computer system. Furthermore, the “computer-readable recording medium” dynamically holds a program for a short time like a communication line when transmitting a program via a network such as the Internet or a communication line such as a telephone line. In this case, a volatile memory in a computer system serving as a server or a client in that case, and a program that holds a program for a certain period of time are also included. The program may be a program for realizing a part of the functions described above, and may be a program capable of realizing the functions described above in combination with a program already recorded in a computer system.

  The embodiment of the present invention has been described in detail with reference to the drawings. However, the specific configuration is not limited to this embodiment, and includes design and the like within a scope not departing from the gist of the present invention.

  20 Probe unit, 21 Light receiving position driving unit (first driving unit), 25 Adjustment unit, 50 Light output unit, 60 Light receiving unit, 61 Reflecting mirror (reflecting unit), 70 Imaging unit (detecting unit), 80 Control unit, 81 Measuring light determination unit (determination unit), 100 shape measuring device, 112 position driving unit (second driving unit), test object 200, 200a, 200b

Claims (11)

A shape measuring device that irradiates the inner surface of a hollow test object with measurement light, receives scattered light scattered by the test object, and measures the shape of the inner surface of the test object,
A light output unit that outputs line-shaped measurement light to be irradiated on the test object;
A light receiving portion for receiving the scattered light of the measurement light;
An adjusting unit that adjusts an optical path length through which the light output from the light output unit passes until the light is received by the light receiving unit;
A detection unit for detecting a position of the received scattered light;
A control unit for measuring the shape of the test object based on the adjustment state by the adjustment unit and the detection position by the detection unit;
A shape measuring apparatus comprising: The adjustment unit is
A first drive unit that moves the position of the light receiving unit in the hollow depth direction;
The detector is
Detecting the position of the line indicated by the received scattered light;
The controller is
The position of the light receiving unit is moved by the first driving unit according to the position of the line detected by the detection unit, and the position of the detected line becomes the predetermined position. The shape measuring apparatus according to claim 1, wherein the position of the light receiving unit is adjusted. The first driving unit includes:
Move the position of the light receiving unit relative to the output position of the light output from the light output unit,
The light output unit is
Outputting the line-shaped light in a direction perpendicular to the direction of moving the position of the light receiving unit;
The light receiving unit is
A reflection unit that reflects the received scattered light along a direction in which the first driving unit moves the position of the light receiving unit;
With
The detector is
Based on the reflected scattered light, the position of the line indicated by the received scattered light is detected.
A determination unit that determines the position of the detected line and outputs a determination result;
Have
The shape measuring apparatus according to claim 2, wherein the position of the light receiving unit is adjusted according to a determination result of a line position by the determining unit. The determination unit
The shape measuring apparatus according to claim 3, wherein it is determined whether or not the position of the detected line is settled within the predetermined range. The detector is
The shape measuring apparatus according to claim 4, wherein a position of a line by the reflected scattered light shown in an image formed by imaging the reflected scattered light is detected. The light output unit and the light receiving unit are:
A probe unit provided in a common housing formed so as to maintain a relative distance between the light output unit and the light receiving unit is formed based on a command. Item 7. The shape measuring apparatus according to any one of Items 1 to 6. The shape measuring apparatus according to claim 6, further comprising: a second drive unit that moves the position of the probe unit relative to the test object. The controller is
The shape of the concave portion or the penetrating portion is calculated by scanning with the probe portion along the shape of the concave portion or the penetrating portion provided in the test object. The shape measuring device described in 1. The light output unit and the light receiving unit are:
The shape measuring apparatus according to any one of claims 6 to 8, wherein the shape measuring apparatus is provided in the rod-shaped casing having the hollow depth direction as a longitudinal direction. A shape measuring method for irradiating the inner surface of a hollow test object with measurement light, receiving scattered light scattered by the test object, and measuring the shape of the inner surface of the test object,
A light output process in which a light output unit outputs a line-shaped measurement light irradiated on the test object; and
A light receiving process for receiving the scattered light of the measurement light;
An adjustment process in which the adjustment unit adjusts an optical path length through which the light output from the light output unit passes until the light is received by the light receiving unit;
A detection process in which the detection unit detects the position of the received scattered light;
A control process in which the control unit measures the shape of the test object based on the adjustment state by the adjustment unit and the detection position by the detection unit;
The shape measuring method characterized by including. A computer equipped with a shape measuring device that irradiates measurement light onto the inner surface of a hollow test object, receives scattered light scattered by the test object, and measures the shape of the inner surface of the test object,
Outputting a line-shaped measurement light to be irradiated to the test object to a light output unit;
Receiving a scattered light of the measurement light in a light receiving unit;
A step of causing the adjustment unit to adjust an optical path length through which the light output from the light output unit is received by the light receiving unit;
Causing the detector to detect the position of the received scattered light;
Measuring the shape of the test object based on the adjustment state by the adjustment unit and the detection position by the detection unit;
A program for running

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