JP2007271572A - Mobile type probe unit and inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve work efficiency of an adjustment work of a probe needle 13 as a contactor with respect to a liquid crystal panel 5 that has a different size. <P>SOLUTION: In this inspection device to be constituted, a test is performed by bringing the probe needle 13 of a probe block 12 into contact with the liquid crystal panel 5. This mobile type probe unit 21 for supporting the probe block 12 is equipped with a main base 22; a data signal side base 23 for supporting the probe block 12; a complex cross link 24 for supporting the data signal side base 23 at an arbitrary position; a gate signal side base 25 for supporting the probe block 12 by being slidably supported by the main base 22; a positioning fixing tool 27 for positioning and fixing the data signal side base 23 and the gate signal side base 25, respectively at each set positions; and a positioning fixing tool 29 for the probe block for simultaneously positioning and supporting all the plurality of probe blocks 12 on each set position. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a movable probe unit and an inspection apparatus that are tested by bringing a contact member into contact with an inspection object plate, and more particularly to an improvement in a probe block support system.

  An inspection apparatus that performs a lighting test or the like by bringing a probe needle of a probe block into contact with an inspection target plate such as a liquid crystal substrate is generally known. In such an inspection apparatus, each probe block is fixed to the probe base on the apparatus main body side, and the probe needle of each probe block is provided facing the inspection object plate placed on the work table. And alignment with a probe needle and the electrode of a test object board is performed by the work table which supported the test object board.

  An example of such an inspection apparatus is shown in FIG. The illustrated inspection apparatus 1 mainly includes a panel setting unit 2 and a measurement unit 3.

  The panel setting unit 2 is a device for transporting the liquid crystal panel 5 inserted from the outside to the measuring unit 3 and transporting the liquid crystal panel 5 after the inspection to the outside. The panel setting unit 2 has a panel setting stage 7 at the back of the opening 6, supports the liquid crystal panel 5 with the panel setting stage 7, and conveys it to the measuring unit 3. The panel set stage 7 receives the liquid crystal panel 5 after the inspection is completed by the measuring unit 3 and conveys it to the outside.

  The measuring unit 3 is a device for supporting and testing the liquid crystal panel 5 delivered from the panel setting unit 2. The measurement unit 3 includes a chuck top 8, a prober 9, and the like.

  The chuck top 8 is a member for supporting the liquid crystal panel 5. The chuck top 8 is supported by an XYZθ stage (not shown), and its movement and rotation in the XYZ axial directions are controlled to adjust the position of the liquid crystal panel 5. The prober 9 mainly includes a base plate 10, a probe unit 11, and a probe block 12. An example of the arrangement of these members is shown in FIG. A base plate 10 is supported on the apparatus main body side, a probe unit 11 is supported on the base plate 10, and a probe block 12 is attached to a distal end portion of the probe unit 11. A contact 13 is attached to the tip of the probe block 12. Then, the position of the liquid crystal panel 5 supported by the chuck top 8 is adjusted by an XYZθ stage, and the electrodes of the liquid crystal panel 5 and the contacts 13 are aligned and contacted with each other for inspection.

  By the way, in the above-described inspection apparatus, the contact 13 and the electrode of the liquid crystal panel 5 are aligned by the XYZθ stage, but the distance that can be aligned is very small. For this reason, if the dimensions of the liquid crystal panel 5 change, the positions of the electrodes also change significantly. Therefore, the XYZθ stage cannot be used, and the probe unit 11 and the probe block 12 must be replaced with ones corresponding to the dimensions of the liquid crystal panel 5. was there. The replacement work of the probe unit 11 and the probe block 12 takes time and the workability is poor.

  For this reason, Patent Document 1 proposes a support frame for a probe block that can be easily adjusted to the dimensions of the liquid crystal panel 5 by improving the support frame that supports the probe block 12.

As shown in FIG. 4, the support frame 14 is composed of four frame plates 15, which are appropriately shifted from the state shown in FIG. 4A to the state shown in FIG. 4B, thereby moving the probe block 12 to the liquid crystal panel 5. It is to match the dimensions.
JP 2001-74599 A

  However, in the support frame 14 having the above-described configuration, when the four frame plates 15 are brought close to each other to be in the state of FIG. The base end side 15A protrudes. For this reason, when attaching to the base plate 10, it is not easy to fix and support the frame plates 15 shifted in the four directions to the base plate 10 while allowing the protruding base end side to be allowed. There was a problem of poor alignment workability.

  The present invention has been made in view of such problems, and a movable probe unit and an inspection apparatus capable of easily aligning probe needles with respect to changes in inspection target plates such as liquid crystal panels having different dimensions. The purpose is to provide.

  A movable probe unit according to the present invention is made in order to solve the above-described problem, and is a movable probe unit that supports a probe block having a contactor that is brought into contact with a plate to be inspected. It is characterized by being positioned and supported at an arbitrary position.

  With the above configuration, the movable probe unit supports the probe block, and is positioned and supported by shifting to an arbitrary position.

The movable probe unit includes a main base that is disposed on both sides of the inspection target plate and supports the whole, a data signal side base that supports the probe block,
A composite cross link that supports the data signal side base at an arbitrary position while being supported by the main base, and is arranged in a direction orthogonal to the data signal side base and is slidably supported by the two main bases. A gate signal side base that supports the probe block in a state in which the probe block is supported, a linear guide that is provided on each of the gate signal side base and the data signal side base and supports the probe block slidably, and the data signal side base and A positioning fixing jig for positioning and fixing the gate signal side base at a set position; and a probe block positioning fixing jig for positioning and supporting the plurality of probe blocks at the same setting position at the same time. It is desirable to configure.

  With the configuration, the data signal base is shifted to a set value while being supported by the main base by the composite cross link. The gate signal side base slides with respect to the two main bases and is shifted to a set value. A positioning and fixing jig positions and fixes the data signal side base and the gate signal side base at the set positions. Further, the probe block positioning fixing jig simultaneously positions and supports the plurality of probe blocks supported by the linear guide so as to be slidable at their respective set positions.

  It is desirable to provide a positioning and fixing link for positioning and fixing the data signal side base at a set position.

  With this configuration, the positioning and fixing link, together with the positioning and fixing jig, positions and fixes the data signal side base at a set position with respect to the main base.

  The probe block positioning fixing jig integrally supports a plurality of fitting pins or clips to be fitted to clips or fitting pins provided on the probe block, and the respective fitting pins or clips at a set position. It is desirable to comprise a connecting plate.

  With the above configuration, each fitting pin or clip of the connecting plate of the probe block positioning jig is fitted to the clip or fitting pin of the probe block, respectively, and each probe block is integrated at a set position. To support.

  An inspection apparatus according to the present invention is made to solve the above-described problem, and is an inspection apparatus that performs a test by bringing a contact of a probe block into contact with an inspection target plate, and the probe block is placed at an arbitrary position. A movable probe unit that is positioned and supported is provided.

  With the above configuration, the movable probe unit supports the probe block, and is positioned and supported by shifting to an arbitrary position.

  The movable probe unit of the inspection apparatus is supported by the main base, the main base that is disposed on both sides of the inspection object plate and supports the whole, the data signal side base that supports the probe block, and the main base. A composite cross link that supports the data signal side base at an arbitrary position in a state, and the probe block in a state that is slidably supported by two main bases arranged in a direction orthogonal to the data signal side base. A gate signal side base to be supported, a linear guide provided on each of the gate signal side base and the data signal side base to slidably support the probe block, and the data signal side base and the gate signal side base are set. A positioning fixture for positioning and fixing each of the positions, and a plurality of the probes It is desirable to configure a probe block for positioning fixture positioning and supporting the respective set position simultaneously all the blocks.

  With the configuration, the data signal base is shifted to a set value while being supported by the main base by the composite cross link. The gate signal side base slides with respect to the two main bases and is shifted to a set value. A positioning and fixing jig positions and fixes the data signal side base and the gate signal side base at the set positions. Further, the probe block positioning fixing jig simultaneously positions and supports the plurality of probe blocks supported by the linear guide so as to be slidable at their respective set positions.

  It is desirable to provide a positioning and fixing link for positioning and fixing the data signal side base of the inspection apparatus at a set position.

  With this configuration, the positioning and fixing link, together with the positioning and fixing jig, positions and fixes the data signal side base at a set position with respect to the main base.

  The probe block positioning and fixing jig of the inspection apparatus is configured such that a plurality of fitting pins or clips that are fitted to clips or fitting pins provided on the probe block and each fitting pin or clip are integrated at a set position. It is desirable to be provided with the connection board supported to.

  With the above configuration, each fitting pin or clip of the connecting plate of the probe block positioning jig is fitted to the clip or fitting pin of the probe block, respectively, and each probe block is integrated at a set position. To support.

  As described above, according to the present invention, the following effects can be obtained.

  Since the movable probe unit supports the probe block, and is positioned and supported by shifting to an arbitrary position, the probe block can be easily aligned with the set position, and according to the inspection object plate having different dimensions, Positioning of the contacts can be easily performed in a short time, and workability is improved.

  The data signal side base is shifted to a set value by the composite cross link, the gate signal side base is slid to the set value by sliding with respect to each main base, and the data signal side base and Position and fix the gate signal side base at each set position, and set the probe block to position and support all of the plurality of probe blocks at the set position simultaneously with the probe block positioning fixing jig. The position can be easily aligned, and the position of the contact can be easily adjusted in a short time according to the inspection target plates having different dimensions, thereby improving workability.

  With the positioning and fixing link, together with the positioning and fixing jig, the data signal side base is positioned and fixed at a set position with respect to the main base. It is supported and can be reliably supported by being positioned at the set position.

  To fit each fitting pin or clip of the connecting plate of the probe block positioning fixing jig to the clip or fitting pin of the probe block, respectively, and to integrally support each probe block at a set position. This eliminates the need to position each probe block individually, and greatly improves the positioning workability of each probe block.

  Furthermore, by providing a movable probe unit, a single movable probe unit can handle differences in the size of the inspection target plate, and individual probe units can be designed and manufactured for each size of the inspection target plate. There is no need to do. As a result, significant cost reduction can be achieved.

  Hereinafter, an inspection apparatus provided with a movable probe unit according to an embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view showing a movable probe unit of an inspection apparatus according to an embodiment of the present invention, FIG. 5 is a plan view showing the movable probe unit of the inspection apparatus according to an embodiment of the present invention, and FIG. FIG. 7 is a perspective view showing a state in which the movable probe unit of the inspection apparatus according to the embodiment is aligned with a small-sized liquid crystal panel, and FIG. 7 shows the movable probe unit of the inspection apparatus according to the embodiment of the present invention as a small-sized liquid crystal panel. FIG. 8 is a perspective view showing the probe block positioning and fixing jig of the inspection apparatus according to the embodiment of the present invention from below, and FIG. 9 is a perspective view of the inspection apparatus according to the embodiment of the present invention. FIG. 10 is a perspective view showing the probe block positioning and fixing jig from above, and FIG. 10 shows the probe block positioning and fixing jig on the data signal side base side of the inspection apparatus according to the embodiment of the present invention. It is a side view showing a gate signal side base side of the probe block for positioning fixture. Here, a liquid crystal panel will be described as an example of the inspection target plate. Moreover, since the whole structure of the inspection apparatus which performs a lighting inspection is substantially the same as the conventional inspection apparatus mentioned above, the same code | symbol is attached | subjected to the same part and the description is abbreviate | omitted. Only the movable probe unit, which is a feature of the present invention, will be described.

  The movable probe unit 21 according to the present embodiment is a member for positioning and supporting the probe block 12 at an arbitrary position. The movable probe unit 21 mainly includes a main base 22, a data signal side base 23, a composite cross link 24, a gate signal side base 25, a linear guide 26, a probe block 12, and a positioning fixture 27. And a positioning / fixing link 28 and a probe block positioning / fixing jig 29.

  The main base 22 is a member for supporting the entire movable probe unit 21. The main base 22 is formed in a rectangular plate shape. The main base 22 is fixed to each base plate 10 disposed at both upper and lower positions (upper right and lower left positions in FIG. 1) with the liquid crystal panel 5 interposed therebetween. Each main base 22 supports a data signal side base 23 and a gate signal side base 25. Fixing screws 31 are provided at three positions on the base end side (outer end side) of the main base 22, and the main base 22 is fixed to the base plate 10 by the fixing screws 31.

  The data signal side base 23 is a member for supporting the probe block 12 while being supported by the main base 22 via the composite cross link 24. The data signal side base 23 is formed in a rectangular plate shape. The data signal side base 23 supports the probe block 12 that contacts an electrode (not shown) on one side of the liquid crystal panel 5 (upper right side in FIG. 1). A linear guide 26 described later is attached to the back surface of the data signal side base 23. A probe block positioning fixture 29 described later is attached to the surface of the data signal side base 23.

  The composite cross link 24 is a member for supporting the data signal side base 23 at an arbitrary position while being supported by the main base 22. The composite cross link 24 is configured by connecting two plate-like bars 24A so as to be rotatable at the center position, and further connecting these four sets so as to be rotatable with respect to each other. Two connecting pins 24B that connect the central positions of the four sets of plate-like bars 24A are rotatably attached to the main base 22 and the data signal side base 23, respectively, and the connecting pins 24B serve as link fulcrums. Yes. Further, the other connecting pins 24C are slidably attached to the two long holes 22A (see FIG. 6) of the main base 22 and the two long holes 23A (see FIG. 6) of the data signal side base 23, respectively. Yes. Each of the long holes 22A and 23A is provided on both sides of the connecting pin 24B, which is a link fulcrum, and the composite cross link 24 extends to both sides of the link fulcrum as a center. When the composite cross link 24 extends to both sides around the link fulcrum (state of FIG. 5), the data signal side base 23 approaches the main base 22 and the composite cross link 24 contracts (FIG. 6). State), the data signal side base 23 is separated from the main base 22.

  The gate signal side base 25 is a member for supporting the probe block 12 while being arranged in a direction orthogonal to the data signal side base 23. Note that the number of probe blocks 12 on the data signal side base 23 side and the number of probe blocks 12 on the gate signal side base 25 side are arranged according to the number of electrodes of the liquid crystal panel 5. Here, eight probe blocks 12 are attached to the data signal side base 23 side, and four probe blocks 12 are attached to the gate signal side base 25 side.

  The gate signal side base 25 is slidably supported on each main base 22 in a state where it is stretched over the two main bases 22. The gate signal side base 25 is formed in a rectangular plate shape. The gate signal side base 25 supports the probe block 12 that contacts an electrode (not shown) on the other side of the liquid crystal panel 5 (upper left side in FIG. 1). A linear guide 26 is attached to the back surface of the data signal side base 23. A probe block positioning fixture 29 described later is attached to the surface of the data signal side base 23.

Long plates 25A are provided at both ends in the longitudinal direction of the gate signal side base 25, respectively. The long plate 25A is disposed along the longitudinal direction of the main base 22 on both sides. The long plate 25A is provided with a long hole 25B. Each long hole 25B is slidably attached to a connecting pin 24C at the end of each composite cross link 24. The gate signal side base 25 can be freely moved in the longitudinal direction of each main base 22 by the two long holes 25B and the connecting pins 24C.

The linear guide 26 is a member for supporting the probe block 12 so as to be slidable. The linear guides 26 are respectively disposed on the back surfaces of the data signal side base 23 and the gate signal side base 25 over their entire lengths. As shown in FIG. 8, the linear guide 26 is formed in a flat bar shape, and on both sides thereof, there are provided fitting grooves 26A in which a slider 34 described later of the probe block 12 is slidably fitted. The slider 34 is fitted in the fitting groove 26A so that the probe block 12 can freely slide in the longitudinal direction of the data signal side base 23 and the gate signal side base 25.
The probe block 12 is a member for supporting a large number of probe needles 13 as contacts. The probe needle 13 is supported by the lower end portion of the probe block 12 and contacts the electrode of the liquid crystal panel 5. A slider 34 that is slidably fitted to the linear guide 26 is provided on the lower surface of the probe block 12. The slider 34 allows the probe block 12 to freely slide in the longitudinal direction of the data signal side base 23 and the gate signal side base 25. On the upper surface of the probe block 12, a clip 36 of a probe block positioning fixture 29 described later is provided.

  The positioning fixture 27 is a member for positioning and fixing the data signal side base 23 and the gate signal side base 25 at the set positions. As shown in FIGS. 1 and 5 to 7, the positioning and fixing jig 27 is formed in a T shape, and the main base 22 is provided with the data signal side base 23 supported by the main base 22 via the composite cross link 24. The gate signal side base 25 is set to be supported at a set interval with respect to the data signal side base 23. As a result, the positioning is supported so that the probe block 12 supported by the data signal side base 23 and the probe block 12 supported by the gate signal side base 25 are aligned with the electrode positions of the liquid crystal panel 5 to be inspected. Is done. The dimensions of the positioning and fixing jig 27 vary depending on the size of the liquid crystal panel 5. When the dimensions of the liquid crystal panel 5 are large as shown in FIGS. 1 and 5, the dimensions of the horizontal bars (the main base 22 and the data signal side base 23 and ) Is set short, and the length of the vertical bar is set long. 6 and 7, when the size of the liquid crystal panel 5 is small, the size of the horizontal bar is set long and the size of the vertical bar is set short. The vertical bar of the positioning fixture 27 and the gate signal side base 25 are fixed with screws (not shown) or the like.

  The positioning and fixing link 28 is a member for positioning and fixing the data signal side base 23 at a set position. The positioning and fixing link 28 is formed in a flat bar shape, and supports the data signal side base 23 supported by the main base 22 via the composite cross link 24 while maintaining a set interval with the main base 22. Is set. The positioning and fixing link 28 is set to the same size as the horizontal bar portion of the positioning and fixing jig 27, and keeps the distance between the main base 22 and the data signal side base 23 at a set interval together with the positioning and fixing jig 27. To support.

The dimension of the positioning and fixing link 28 differs depending on the size of the liquid crystal panel 5. When the dimension of the liquid crystal panel 5 is large as shown in FIGS. 1 and 5, the dimension is short, and when the dimension of the liquid crystal panel 5 is small as shown in FIGS. Is set longer.

  The probe block positioning and fixing jig 29 is a member for positioning and supporting a plurality of probe blocks 12 respectively provided on the data signal side base 23 and the gate signal side base 25 at the respective set positions simultaneously. The probe block positioning and fixing jig 29 is set to a length corresponding to the number of probe blocks 12 provided.

  As shown in FIGS. 8 to 10, the probe block positioning and fixing jig 29 includes a clip 36, a fitting pin 37, and a connecting plate 38.

  The clip 36 is a member for fitting with the fitting pin 37. The clip 36 is provided on the upper side surface of the probe block 12. The clip 36 includes two gripping plate portions 36A having elasticity. An arcuate recess that fits into the fitting pin 37 is formed on the inner surface of the gripping plate portion 36A. Thus, the fitting pins 37 are elastically sandwiched between the two gripping plate portions 36A so as to be fitted to each other. Then, the probe block 12 is positioned at the position of the fitting pin 37 by the fitting pin 37 being pushed between the two gripping plate portions 36A from the upper side and fitted together.

  The fitting pin 37 is a member for fitting with the two gripping plate portions 36 </ b> A of the clip 36. The fitting pin 37 is formed in a cylindrical shape, and is aligned with the arc-shaped recess on the inner surface of the gripping plate portion 36A. As many fitting pins 37 as the number of the probe blocks 12 arranged are provided in accordance with the set positions of the probe blocks 12.

  The connecting plate 38 is a member for integrally supporting the plurality of fitting pins 37 at respective setting positions. The connecting plate 38 includes a vertical plate portion 38A and a horizontal plate portion 38B. The fitting pin 37 is attached to the vertical plate portion 38A and disposed in the horizontal direction. The horizontal plate portion 38B is provided with two positioning pin holes 38C and two screw holes 38D. Further, the data signal side base 23 and the gate signal side base 25 are also provided with a pin hole 40 and a screw hole 41 at positions matching the positioning pin holes 38C and the screw holes 38D, respectively. As a result, the positioning pin 42 is inserted into the positioning pin hole 38C and the pin hole 40, the connecting plate 38 is positioned, the set screw 43 is screwed into the screw hole 38D and the screw hole 41, and the connecting plate 38 is connected to the data signal side base. 23 and the gate signal side base 25 are positioned and fixed.

[Operation]
The inspection apparatus configured as described above operates as follows.

  When the liquid crystal panel 5 is inserted into the panel setting unit 2 from the outside, the panel setting unit 2 conveys the liquid crystal panel 5 to the measurement unit 3. In the measurement unit 3, the liquid crystal panel 5 delivered from the panel setting unit 2 is supported by the chuck top 8 and tested.

  At this time, the test is performed with the probe needles 13 of the probe blocks 12 supported by the movable probe unit 21 in contact with the electrodes of the liquid crystal panel 5.

  On the other hand, when the dimension of the liquid crystal panel 5 to be inspected is changed, the arrangement position of the probe block 12 is adjusted accordingly.

  In this case, first, the positioning and fixing jig 27, the positioning and fixing link 28, and the probe block positioning and fixing jig 29 are changed to those corresponding to the liquid crystal panel 5. For example, when the large liquid crystal panel 5 shown in FIGS. 1 and 5 is changed to the small liquid crystal panel 5 shown in FIGS. 6 and 7, the positioning fixing jig 27 and the positioning fixing link 28 are removed, and the dimensions of the horizontal bar are removed. The positioning / fixing jig 27 has a long vertical bar and a short vertical bar, and the positioning / fixing link 28 has the same dimension as the horizontal bar of the positioning / fixing jig 27. In this case, the composite cross link 24 is contracted so that the data signal side base 23 is separated from the main base 22 and close to the liquid crystal panel 5 side, and is adjusted to the dimension of the horizontal bar of the positioning fixture 27. Next, the positioning fixing jig 27 and the positioning fixing link 28 are attached and fixed.

  Further, the gate signal side base 25 is moved in accordance with the dimension of the vertical bar of the positioning and fixing jig 27 and fixed to each other with screws or the like.

  Further, the number of probe blocks 12 is changed to the number corresponding to the electrodes of the liquid crystal panel 5. Here, the data signal side base 23 side is changed to five, and the gate signal side base 25 side is changed to three. In this case, first, the two probe block positioning and fixing jigs 29 are removed, three probe blocks 12 on the data signal side base 23 side and one probe block 12 on the gate signal side base 25 side are removed, and the probe The block positioning / fixing jig 29 is changed to a size matching the small liquid crystal panel 5.

  The five fitting pins 37 of the probe block positioning fixing jig 29 on the data signal side base 23 side are fitted into the clips 36 of the five probe blocks 12, respectively, and the probe block 12 is adjusted to the set position. Next, the positioning pin 42 is inserted into the positioning pin hole 38 </ b> C and the pin hole 40 of the connecting plate 38 to position the probe block positioning fixing jig 29 with respect to the data signal side base 23. Thereby, each probe block 12 is accurately positioned and supported. In this state, the probe block positioning fixing jig 29 is fixed to the data signal side base 23 by passing the set screw 43 through the screw hole 38D and the screw hole 41 of the connecting plate 38.

  Further, the three fitting pins 37 of the probe block positioning and fixing jig 29 on the gate signal side base 25 side are respectively fitted to the clips 36 of the three probe blocks 12 to align the probe block 12 with the set position. Next, the positioning pin 42 is inserted into the positioning pin hole 38 </ b> C and the pin hole 40 of the connecting plate 38 to position the probe block positioning fixing jig 29 with respect to the gate signal side base 25. Thereby, each probe block 12 is accurately positioned and supported. In this state, the probe block positioning and fixing jig 29 is fixed to the gate signal side base 25 through the set screw 43 through the screw hole 38D and the screw hole 41 of the connecting plate 38.

  The replacement of the positioning / fixing jig 27 and the positioning / fixing link 28 and the replacement of the probe block positioning / fixing jig 29 may be performed first.

[effect]
As described above, according to the inspection apparatus of the present embodiment, the following effects can be obtained.

  Since the movable probe unit 21 supports the probe block 12 and is positioned and supported by shifting to an arbitrary position, the probe block 12 can be easily aligned with the set position, and can be adjusted to the liquid crystal panels 5 having different dimensions. Thus, the alignment of the probe needle 13 can be easily performed in a short time. As a result, the workability of the adjustment work for the liquid crystal panels 5 having different dimensions is greatly improved.

  The data signal side base 23 is shifted to the set value by the composite cross link 24, and the gate signal side base 25 is slid to the set value by sliding with respect to each main base 22. The gate signal side base 25 is positioned and fixed at the set positions, respectively, and the probe block 12 is fixed and supported by the probe block positioning and fixing jig 29 at the same time. The probe needle 13 can be easily aligned in a short time according to the liquid crystal panel 5 having different dimensions, and the workability can be improved.

  In order to position and fix the data signal side base 23 at the set position with respect to the main base 22 together with the positioning fixing jig 27 by the positioning and fixing link 28, the data signal side base 23 is fixed to the main base 22 at a plurality of positions ( In this embodiment, it is supported at two locations) and can be reliably supported by being positioned at the set position.

  Each fitting pin 37 of the connecting plate 38 of the probe block positioning and fixing jig 29 is fitted to the clip 36 of the probe block 12 so as to integrally support each probe block 12 at the set position. There is no need to position the blocks 12 individually, and the positioning workability of each probe block 12 is greatly improved.

  Furthermore, by providing the movable probe unit 21, the single movable probe unit 21 can cope with the difference in the size of the liquid crystal panel 5, and an individual probe unit is designed for each size of the liquid crystal panel 5.・ No need to manufacture. As a result, significant cost reduction can be achieved.

[Modification]
In the above embodiment, the long plate 25A and the long hole 25B are provided at both ends of the gate signal side base 25, and the gate signal side base 25 is slidable. However, as shown in FIGS. Only the long plate 45 may be provided at both ends of the base 25 and may be rotatably connected to the connecting pin 24C. As a result, the gate signal side base 25 slides in the longitudinal direction of the data signal side base 23 in conjunction with the expansion and contraction of the composite cross link 24. In this case, since the gate signal side base 25 slides uniquely in conjunction with the composite cross link 24, the dimensions of the liquid crystal panel 5 of different sizes are set to the dimensions on the data signal side base 23 side and the dimensions on the gate signal side base 25 side. The dimension of each plate-like bar 24A of the composite cross link 24 is set so that the gate signal side base 25 slides according to the change. As a result, when the probe block 12 of the data signal side base 23 is moved in accordance with the liquid crystal panel 5, the gate signal side base 25 is moved in conjunction with the data signal side base 23 due to the expansion and contraction of the composite cross link 24. Align with the electrode of panel 5. In this case, the positioning fixing jig 27 may or may not be provided.

  In the above embodiment, in the probe block positioning and fixing jig 29, the clip 36 is provided on the probe block 12 and the fitting pin 37 is provided on the connecting plate 38 side. On the contrary, the fitting pin 37 is provided on the probe block 12. And the clip 36 may be provided on the connecting plate 38 side. Also in this case, the same operation and effect as the above-described embodiment are obtained.

  Moreover, in the said embodiment, although the liquid crystal panel 5 was demonstrated to the example as a test object board, this invention is not limited to the said embodiment, A various change can be made unless it deviates from the meaning. For example, the present invention can be applied not only to the liquid crystal panel 5 and the liquid crystal cell (electrodes exist only around the substrate) but also to the liquid crystal array (electrodes exist other than around the substrate).

  Furthermore, in the above-described embodiment, the case where the movable probe unit 21 is incorporated in the inspection apparatus 1 that performs the lighting inspection of the liquid crystal panel 5 that is the same as the conventional postoperative operation has been described as an example. However, the inspection in which the movable probe unit 21 is incorporated. The device 1 is not limited to the configuration of the above embodiment. Any inspection apparatus 1 including the movable probe unit 21 having the above-described configuration may be used. Various inspection apparatuses 1 may be used.

  In the above embodiment, the probe needle 13 is described as an example of the contact. However, the present invention is not limited to this, and may be a blade, a bump, a pogo pin, or the like. Also in this case, the same operations and effects as the above embodiment can be achieved.

It is a perspective view which shows the movable probe unit of the test | inspection apparatus which concerns on embodiment of this invention. It is the front view and side view which show the conventional inspection apparatus. It is a front view which shows the probe unit of the conventional inspection apparatus. It is a front view which shows the support frame body of the probe block of the conventional inspection apparatus. It is a front view which shows the movable probe unit of the inspection apparatus which concerns on embodiment of this invention. It is a perspective view which shows the state which match | combined the movable probe unit of the test | inspection apparatus which concerns on embodiment of this invention with the liquid crystal panel of a small dimension. It is a top view which shows the state which match | combined the movable probe unit of the test | inspection apparatus which concerns on embodiment of this invention with the liquid crystal panel of a small dimension. It is a perspective view which shows the positioning fixing jig for probe blocks of the inspection apparatus which concerns on embodiment of this invention from the lower side. It is a perspective view which shows the positioning fixing jig for probe blocks of the inspection apparatus which concerns on embodiment of this invention from the upper side. It is a side view showing a probe block positioning fixing jig on the data signal side base side and a probe block positioning fixing jig on the gate signal side base side of the inspection apparatus according to the embodiment of the present invention. It is a perspective view which shows the movable probe unit of the test | inspection apparatus which concerns on the modification of this invention. It is a front view which shows the movable probe unit of the inspection apparatus which concerns on the modification of this invention. It is a perspective view which shows the state which match | combined the movable probe unit of the test | inspection apparatus which concerns on the modification of this invention with the liquid crystal panel of a small dimension. It is a top view which shows the state which match | combined the movable probe unit of the test | inspection apparatus which concerns on the modification of this invention with the liquid crystal panel of a small dimension.

Explanation of symbols

1: inspection device, 2: panel setting unit, 3: measurement unit, 5: liquid crystal panel, 21: movable probe unit, 22: main base, 22A: long hole, 23: data signal side base, 23A: long hole, 24: Composite cross link, 24A: Plate bar, 24B, 24C: Connecting pin, 25: Gate signal side base, 25A: Long plate, 25B: Long hole, 26: Linear guide, 26A: Fitting groove, 27: Positioning and fixing jig, 28: Positioning and fixing link, 29: Positioning and fixing jig for probe block, 31: Fixing screw, 34: Slider, 36: Clip, 36A: Holding plate part, 37: Fitting pin, 38: Connecting plate , 38A: vertical plate portion, 38B: horizontal plate portion, 38C: positioning pin hole, 38D: screw hole, 40: pin hole, 41: screw hole, 42: positioning pin, 43: set screw.

Claims (8)

A movable probe unit that supports a probe block having a contact to be brought into contact with an inspection object plate,
A movable probe unit, wherein the probe block is positioned and supported at an arbitrary position. The movable probe unit according to claim 1, wherein
A main base that is disposed on both sides of the inspection object plate and supports the whole;
A data signal side base supporting the probe block;
A composite cross link that supports the data signal side base at an arbitrary position while being supported by the main base;
A gate signal side base that supports the probe block in a state of being slidably supported by the two main bases and disposed in a direction orthogonal to the data signal side base;
A linear guide provided on each of the gate signal side base and the data signal side base to support the probe block in a slidable manner;
A positioning fixture for positioning and fixing the data signal side base and the gate signal side base at a set position;
A movable probe unit comprising a probe block positioning fixing jig that positions and supports all of the plurality of probe blocks simultaneously at respective set positions. The movable probe unit according to claim 2,
A movable probe unit comprising a positioning and fixing link for positioning and fixing the data signal side base at a set position. The movable probe unit according to claim 2 or 3,
The probe block positioning fixing jig integrally supports a plurality of fitting pins or clips to be fitted to clips or fitting pins provided on the probe block, and the respective fitting pins or clips at a set position. An inspection apparatus comprising a connecting plate. An inspection apparatus for performing a test by bringing a contact of a probe block into contact with an inspection target plate,
An inspection apparatus comprising a movable probe unit that positions and supports the probe block at an arbitrary position. The inspection apparatus according to claim 5, wherein
The movable probe unit is
A main base that is disposed on both sides of the inspection object plate and supports the whole;
A data signal side base supporting the probe block;
A composite cross link that supports the data signal side base at an arbitrary position while being supported by the main base;
A gate signal side base that supports the probe block in a state of being slidably supported by the two main bases and arranged in a direction orthogonal to the data signal side base;
A linear guide provided on each of the gate signal side base and the data signal side base to support the probe block in a slidable manner;
A positioning fixture for positioning and fixing the data signal side base and the gate signal side base at a set position;
An inspection apparatus comprising: a probe block positioning fixing jig that positions and supports all of the plurality of probe blocks simultaneously at respective set positions. The inspection apparatus according to claim 6, wherein
An inspection apparatus comprising a positioning and fixing link for positioning and fixing the data signal side base at a set position. The inspection apparatus according to claim 6 or 7,
The probe block positioning fixing jig integrally supports a plurality of fitting pins or clips to be fitted to clips or fitting pins provided on the probe block, and the respective fitting pins or clips at a set position. An inspection apparatus comprising a connecting plate.

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