KR20080093873A - Probe unit and inspection apparatus - Google Patents

Abstract

A probe unit is provided to easily and stably replace parts alone by dividing a probe base into one reference plate and more than one adjustment plate so that the reference plate and the adjustment plate are individually replaced. A probe stage is fixed to a main body. A probe assembly(26) has a probe in direct contact with an electrode of an inspection target plate. A probe base supports the probe assembly, supported by the probe stage. The probe base includes one reference plate(31), one or more adjustment plates(32), and a position adjustment instrument(33) installed between the reference plate and the adjustment plate and between the respective adjustment plates wherein the position adjustment instrument adjusts the position of each adjustment plate. The reference plate of the probe base can be installed in a manner that doesn't fall outside a predetermined position of the probe stage, and the adjustment plate can be installed in a manner that is allowed to fall outside the predetermined position of the probe stage.

Description

Probe Unit and Inspection Apparatus

1 is an exploded perspective view showing the main parts of a probe unit according to an embodiment of the present invention.

2 is a front view showing a conventional inspection apparatus.

3 is a plan view showing a probe unit of a conventional inspection apparatus.

4 is a perspective view showing a probe unit of the inspection apparatus according to the embodiment of the present invention.

5 is a plan view showing a probe unit of the inspection apparatus according to the embodiment of the present invention.

6 is a perspective view showing a position adjusting mechanism of the inspection apparatus according to the embodiment of the present invention.

Description of the main symbols in the drawings

21: work table 22: liquid crystal panel

23: probe unit 25: probe stage

26: probe assembly 27: probe base

28: joining main part 31: reference plate part

32: adjustment plate part 33: position adjustment mechanism

35: fixing bolt 37: long hole

40: adjusting bolt 41: adjusting bolt holder

42: adjustment block 44: rotation allowance

45: screw portion 47: base plate

48: holder plate 49: coupling groove

50: base plate 51: screw plate

Field of invention

The present invention relates to a probe unit and an inspection apparatus used for inspection of an inspection object plate such as a liquid crystal panel.

Background of the Invention

For example, in a liquid crystal panel, a test (test) is carried out with respect to the liquid crystal panel in which the liquid crystal was enclosed in the manufacturing process whether it has the performance according to the specification. In this inspection, an inspection apparatus having a probe unit having a plurality of probes is generally used. In this case, it is performed by supplying a predetermined electric signal to a predetermined electrode while holding each probe of the inspection apparatus against the electrodes of the liquid crystal panel.

An example of such an inspection apparatus is shown in FIG. The inspection apparatus 1 shown is mainly comprised by the panel set part 2 and the measuring part 3. As shown in FIG.

The panel set part 2 is an apparatus for conveying the test | inspection board 5, such as a liquid crystal panel inserted from the outside, to the measurement part 3, and conveying the test | inspection board 5 after completion | finish of inspection to the outside. The panel set portion 2 has a panel set stage 7 inside the opening 6, supports the inspection target plate 5 in the panel set stage 7, and carries it to the measurement unit 3. Moreover, the panel set stage 7 receives the test | inspection board 5 after completion | finish of inspection by the measurement part 3, and carries it to the exterior.

The measuring unit 3 is a device for supporting and testing the inspection target plate 5 passed from the panel set unit 2. The measurement part 3 is equipped with the chuck saw 8, the prober 9, etc., and is comprised.

The chuck saw 8 is a member for supporting the inspection object plate 5. The chuck saw 8 is supported by an XYZθ stage (not shown), the movement and rotation in the XYZ axis direction are controlled, and the position of the inspection target plate 5 is adjusted. The prober 9 mainly comprises the base plate 10 and the probe unit 11. The probe unit 11 is supported by the base plate 10 in a state facing the opening 10A of the base plate 10.

Patent Document 1 is an example of the probe unit 11. This example is shown in FIG. The probe unit 11 mainly includes a probe base 12 and a probe assembly 13 supported by the probe base 12.

The probe base 12 is a plate that integrally supports the plurality of probe assemblies 13. In the probe base 12, a plurality of probe assemblies 13 are supported in a state of facing a test target plate 5 such as a liquid crystal panel.

The frame 14 is provided with a moving mechanism 15 for moving the probe unit 11 to adjust its position. The moving mechanism 15 is composed of a lead nut 16, a moving body (not shown), a lead screw 17, a motor 18, and a bracket 19. The lead nut 16 is assembled to the moving body and is coupled to the lead screw 17. The movable body is moved in the X-direction as the lead screw 17 is rotated by the motor 18. The motor 18 is provided on the frame 14 by the bracket 19.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2001-74778

By the way, in the said inspection apparatus 1, the probe unit 11 is also replaced by the varieties of the inspection object board | substrate 5 replaced. For example, in the case of a liquid crystal panel, the probe unit 11 is replaced with one suitable for the dimensions of the new varieties of liquid crystal panels.

The replacement of the probe unit 11 is not particularly a problem when the size of the liquid crystal panel is small. If the size of the liquid crystal panel is small, the size of the probe unit 11 is also small and not heavy, so that the replacement operation of the probe unit 11 is not disturbed. The probe unit 11 is installed, the motor 18 of the moving mechanism 15 is driven to rotate the lead screw 17 to move the lead nut 16, and the position of the probe unit 11 is moved through the movable body. Adjust Thereby, the probe unit 11 can be replaced easily.

However, when the size of the liquid crystal panel increases, the size of the probe unit 11 also becomes large and heavy, which impedes the replacement operation of the probe unit 11.

For example, in a 52-inch liquid crystal panel, the data side probe unit 11 has a length of 1650 mm and a weight of about 35 kg, so that only one worker can replace the probe unit 11. . In other words, the replacement work was dangerous and the work of two people, there was a problem of poor efficiency.

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a probe unit and an inspection apparatus in which replacement work is safe and single person work is possible.

The above and other objects of the present invention can be achieved by the present invention described below.

Summary of the Invention

In order to solve the above problems, a probe unit according to the present invention includes a probe assembly fixed to a main body side, a probe assembly having a probe in direct contact with an electrode of an inspection object plate, and a probe assembly supported on the probe stage. A probe base supporting, the probe base being provided between one reference plate portion, one or more adjustment plate portions, between these reference plate portions and the adjustment plate portion, and between each adjustment plate portion to adjust the position of each adjustment plate portion. It is characterized by having a positioning mechanism.

Thereby, the reference plate part of the said probe base is provided first, and one or two or more adjustment plate parts are provided, adjusting the position with a position adjustment mechanism.

It is preferable that the reference plate portion of the probe base is provided so as not to deviate from a specific position of the probe stage, and the adjustment plate portion is provided in a state allowing deviation from the probe stage. It is preferable that the reference plate part of the said probe base has a round hole of the diameter substantially the same as the fixing bolt fixed to the said probe stage, and the said adjustment plate part has a long hole allowing a deviation with respect to the said fixing bolt. The position adjusting mechanism includes an adjustment bolt for adjusting the interval between the reference plate portion and the adjustment plate portion of the probe base, or the interval between each adjustment plate portion, and the reference plate portion, the adjustment plate portion, or each adjustment plate, and rotating the adjustment bolt. It is preferable that it is comprised from the adjustment bolt holder which can be supported, and the adjustment block which has a screw hole provided in the said reference plate part, the adjustment plate part, or the other of each adjustment plate, and into which the said adjustment bolt is inserted.

Also, a panel set portion carrying the inspection object plate from the outside and conveying it to the outside after completion of the inspection, and a measurement portion for supporting and testing the inspection object plate passed from the panel set portion, is provided as the probe unit of the measurement unit. It is preferable to use.

Detailed description of the invention

EMBODIMENT OF THE INVENTION Hereinafter, the probe unit and inspection apparatus which concern on embodiment of this invention are demonstrated, referring an accompanying drawing.

Since the inspection apparatus of this embodiment is substantially the same as the said conventional inspection apparatus as a whole, the same code | symbol is attached | subjected to the same member here, and the description is abbreviate | omitted.

In the inspection apparatus of this embodiment, as shown in FIGS. 4 and 5, the probe unit 23 is provided along the edge of the liquid crystal panel 22 placed on the work table 21.

The probe unit 23 mainly includes a probe stage 25, a probe assembly 26, and a probe base 27.

The probe stage 25 is fixed to the apparatus main body side of the inspection apparatus 1 and is a member for supporting the probe base 27. The probe stage 25 is divided into four and fixed to the frame 14 of the inspection apparatus which is the main body side, respectively. The probe assembly 26 is provided on the work table 21 (liquid crystal panel 22) side of the probe stage 25. Each probe stage 25 is formed in substantially rectangular plate shape. On the upper surface of each probe stage 25, an engaging recess 28 for attaching the probe base 27 is provided. The engaging recess 28 is set to a length smaller than the probe base 27 so that the probe base 27 can be moved slightly in the longitudinal direction. In the engaging recess 28, a plurality of screw holes 28A (see Fig. 1) for fixing the probe base 27 are provided at predetermined intervals.

The dimensions of the four probe stages 25 are set in accordance with the horizontal and vertical dimensions of the liquid crystal panel 22. Specifically, it consists of two short probe stages 25A and two long probe stages 25B. One of the two short probe stages 25A and the long probe stage 25B is provided with a probe assembly 26.

The probe assembly 26 is a member for directly contacting an electrode of the liquid crystal panel 22 as an inspection object plate and transmitting an inspection signal to a circuit on the liquid crystal panel 22. The probe assembly 26 is comprised by combining a suspension block, a slide block, etc., and the probe (not shown) is provided in the front-end | tip. The probe directly contacts an electrode of the liquid crystal panel 22 to transmit an inspection signal to a circuit on the liquid crystal panel 22.

The probe base 27 is a member for supporting the probe assembly 26 in a state supported by the probe stage 25. The probe base 27A provided in the short probe stage 25A is configured as a single member because its entire length is short and its weight is not so heavy. The probe base 27B provided in the long probe stage 25B is divided because its entire length is long and its weight becomes heavy. That is, the probe base 27B is comprised with the reference plate part 31, the adjustment plate part 32, and the position adjustment mechanism 33. As shown in FIG.

The reference plate part 31 is a member serving as a reference for alignment of the probe base 27. As shown in Figs. 1 and 5, the reference plate portion 31 is provided accurately without departing from a specific position of the probe stage 25. Specifically, it is correctly installed so as not to deviate from one end (right end in FIG. 1) of the engaging recess 28 of the long probe stage 25B. The reference plate portion 31 has a round hole 31A having a diameter substantially the same as that of the fixing bolt 35 fixed to the probe stage 25. As a result, the fixing bolt 35 is screwed into the screw hole 28A of the engaging recess 28 through the round hole 31A, so that the reference plate portion 31 is provided at the correct position. The reference plate part 31 is provided with a probe assembly 26 and a positioning camera 36.

The adjustment plate part 32 is a member for constituting the probe base 27 by adjusting its position and being connected to the reference plate part 31. The adjusting plate portion 32 is disposed one or two or more depending on the length of the engaging recess 28 of the long probe stage 25B. In this embodiment, one adjustment plate part 32 is provided. The adjusting plate portion 32 is connected to the reference plate portion 31 and the position adjusting mechanism 33.

The adjusting plate part 32 is provided in the state in which deviation | deviation was allowed to the probe stage 25B. The adjusting plate part 32 is provided with the long hole 37 which allows a deviation with respect to the fixing bolt 35. With the fixing bolt 35 inserted into the long hole 37 and inserted into the screw hole 28A of the engaging recess 28, the adjusting plate part 32 is allowed to be separated by the long hole 37, The adjustment plate part 32 is adjusted to a position by the position adjustment mechanism 33.

The position adjustment mechanism 33 is provided between the reference plate portion 31 and the adjustment plate portion 32 and between each adjustment plate portion 32 and is a mechanism for adjusting the position of each adjustment plate portion 32. The position adjustment mechanism 33 is comprised from the adjustment bolt 40, the adjustment bolt holder 41, and the adjustment block 42, as shown to FIG.

The adjustment bolt 40 is a bolt for adjusting the space | interval of the reference plate part 31 and the adjustment plate part 32 of the probe base 27, or the space | interval of each adjustment plate part 32. As shown in FIG. Here, since the reference plate portion 31 and the adjustment plate portion 32 are provided one by one, the adjustment bolt 40 adjusts the distance between the reference plate portion 31 and the adjustment plate portion 32. The adjustment bolt 40 is comprised from the rotation allowance part 44 and the screw part 45. The rotation allowable part 44 is comprised by the head 44A, the shaft diameter part 44B, and the support half part 44C. The head 44A is provided with a hexagon hole 44D. A hexagon wrench is inserted into the hexagon hole 44D and rotated. The shaft diameter portion 44B is a portion that is rotatably coupled to the engaging groove 49 of the adjustment bolt holder 41 described later. The shaft diameter portion 44B is formed in a circumferential shape, and is inserted into the engaging groove 49 so that only the rotation in the fixed position of the adjustment bolt 40 is allowed, and is supported so as not to deviate in the axial direction. have.

The adjustment bolt holder 41 is a member for rotatably supporting the adjustment bolt 40. The adjustment bolt holder 41 is comprised from the base board 47 and the holder board 48 provided upright from the said base board 47. The base plate 47 is directly fixed to the end of the reference plate portion 31 or the adjustment plate portion 32. The holder plate 48 is provided with the engaging groove 49 in the upper end portion thereof, and rotatably supports the adjustment bolt 40. The engagement groove 49 is a portion for allowing the shaft diameter portion 44B of the adjustment bolt 40 to be rotatably fitted. The inner width of the engaging groove 49 is formed to have substantially the same dimensions as the outer diameter of the shaft diameter portion 44B. Thereby, the shaft diameter part 44B of the adjustment bolt 40 is rotatably fitted in the engaging groove 49, and is shaken correctly. In addition, the coupling groove 49 is configured to be slightly open in a tapered shape, and the shaft diameter portion 44B of the adjustment bolt 40 can be easily fitted.

The adjustment block 42 is a member for which the adjustment bolt 40 is tightened and the space | interval with the adjustment bolt holder 41 is adjusted. The adjustment block 42 is comprised from the base board 50 and the screw board 51 provided upright from the said base board 50. The base plate 50 is directly fixed to the end of the adjusting plate portion 32 or the reference plate portion 31. The screw plate 51 has 51 A of screw holes into which the adjustment bolt 40 is inserted, and is arrange | positioned facing the holder plate 48 of the adjustment bolt holder 41. As shown in FIG.

The probe unit 23 configured as described above is replaced as follows.

When removing the probe unit 23, first, the fixing bolt 35 of the adjusting plate part 32 is removed. Then, the adjusting bolt 40 of the position adjusting mechanism 33 is loosened.

Subsequently, the rotation allowance 44 of the adjustment bolt 40 is separated from the engaging groove 49 of the adjustment bolt holder 41, and the adjustment plate portion 32 is removed from the probe stage 25.

Subsequently, the fixing bolt 35 of the reference plate portion 31 is pulled out and the reference plate portion 31 is separated from the probe stage 25.

Subsequently, the probe unit 23 fitted with the new liquid crystal panel 22 is provided. Specifically, the probe base 27 in which the position of the probe assembly 26 is disposed in accordance with the electrode of the liquid crystal panel 22 is provided in the coupling recess 28 of the probe stage 25.

In this case, first, the reference plate portion 31 of the probe base 27 is provided. The fixing bolt 35 is inserted by aligning the round hole 31A of the reference plate portion 31 with the screw hole 28A of the engaging recess 28 of the probe stage 25. By inserting and tightening the fixing bolt 35 in all the round holes 31A, the reference plate portion 31 is fixed at the correct position.

Next, the adjusting plate part 32 is provided. While fitting the long hole 37 of the adjustment plate part 32 and the screw hole 28A of the engaging recess 28 of the probe stage 25, the adjustment bolt 40 of the positioning mechanism 33 is adjusted, It inserts into the screw hole 51A of 42, and fits into the engaging groove 49 of the adjustment bolt holder 41. As shown in FIG. Then, the fixing bolt 35 is tightened in all the long holes 37, and the adjustment bolt 40 of the positioning mechanism 33 is rotated with a hexagon wrench to adjust the adjustment bolt holder 41 and the adjustment block 42. The distance between and is adjusted, and the position of the reference plate part 31 and the adjustment plate part 32 is adjusted.

Next, the fixing plate part 32 is fixed by tightening each fixing bolt 35.

Since the probe base 27 of the short probe stage 25A is short and light, it replaces as it is.

By the above, the replacement operation of the probe unit 23 can be performed safely and easily. In addition, since the probe base 27B of the probe unit 23 on the longer probe stage 25B is divided into the reference plate portion 31 and the adjustment plate portion 32, the structure of the position adjustment mechanism 33 also works together. The replacement work can be performed safely and easily.

As a result, the work of exchanging the probe unit 23 can be performed by the worker alone, thereby improving the work efficiency.

[Modification]

In the probe unit 23 according to the above embodiment, an example in which the probe base 27 is divided into two, the reference plate portion 31 and the adjustment plate portion 32, has been described. However, when the size of the probe base 27 is large, The adjusting plate part 32 may be two or more, and three or more divisions may be used.

As an inspection apparatus in which the probe unit 23 according to the above embodiment is provided, it is a matter of course that the inspection apparatus is not limited to the inspection apparatus described as a conventional example and may be another inspection apparatus.

In the above embodiment, the coupling groove 49 of the adjustment bolt holder 41 of the position adjustment mechanism 33 has a tapered shape, but the coupling groove 49 is the shaft diameter portion 44B of the adjustment bolt 40. ) May be a shape that is easy to enter. For example, only the entrance may be largely opened without providing a taper in the whole engagement groove 49. The inner side of the engaging groove 49 is formed in a semicircular shape so as to be stable and easy to rotate.

In the above embodiment, the probe base 27 of the short probe stage 25A is configured as a single member without dividing. However, when the overall size is increased, the probe base of the short probe stage 25A ( 27) is divided into 2 or 3 or more.

Although the position adjustment mechanism 33 adjusted the space | interval of the reference plate part 31 and the adjustment plate part 32 using the pitch of the screw of the adjustment bolt 40, you may make it adjust the space | interval by a different structure.

As mentioned above, since the said probe base was divided into one reference plate part and one or two or more adjustment plate parts, and it exchanged separately, a variety change operation can be performed safely and easily by one person operation.

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and all such variations or modifications can be considered to be included within the scope of the present invention.

Claims (8)

A probe stage fixed to the main body side; A probe assembly having a probe in direct contact with an electrode of the inspection object plate; And A probe base supporting the probe assembly while being supported by the probe stage; Equipped with The probe base is provided with one reference plate portion, one or two or more adjustment plate portions, and a position adjusting mechanism provided between the reference plate portion and the adjustment plate portion and between each adjustment plate portion to adjust the position of each adjustment plate portion. Probe unit, characterized in that. The probe unit of claim 1, wherein the reference plate portion of the probe base is provided so as not to deviate from a specific position of the probe stage, and the adjustment plate portion is installed in a state in which deviation is allowed from the probe stage. The reference plate part of the said probe base has a round hole of the diameter substantially the same as the fixing bolt fixed to the said probe stage, The said adjustment plate part has a long hole which allows a deviation | deviation with respect to the said fixing bolt. Probe unit having a. 2. The adjustment mechanism according to claim 1, wherein the position adjusting mechanism is provided on an adjustment bolt for adjusting the distance between the reference plate portion and the adjustment plate portion of the probe base or the distance between each adjustment plate portion, and the reference plate portion, the adjustment plate portion, or each adjustment plate. And an adjustment block holder rotatably supporting the adjustment bolt, and an adjustment block having a screw hole in which the adjustment bolt is inserted and installed on the other side of the reference plate portion and the adjustment plate portion or each adjustment plate. An inspection apparatus used to inspect an inspection object plate, The panel set part which carries in a test | inspection board from the outside, conveys it to the outside after completion | finish of an inspection, and the measurement part which supports and tests the test board which were handed over from the said panel set part are equipped, The measuring unit has a probe unit, The probe unit includes a probe assembly having a probe stage fixed to the main body side, a probe in direct contact with an electrode of an inspection object plate, a probe base supporting the probe assembly in a state supported by the probe stage, The probe base is provided with one reference plate portion, one or two or more adjustment plate portions, a position adjusting mechanism provided between the reference plate portion and the adjustment plate portion and between each adjustment plate portion to adjust the position of each adjustment plate portion. Inspection device characterized in that provided. The inspection apparatus according to claim 5, wherein the reference plate portion of the probe base is provided without departing from a specific position of the probe stage, and the adjustment plate portion is provided in a state where deviation is allowed from the probe stage. The reference plate portion of the probe base has a round hole having a diameter substantially the same as that of the fixing bolt fixed to the probe stage, and the adjusting plate portion has a long hole allowing the deviating from the fixing bolt. Inspection device characterized in that it has. 6. The position adjusting mechanism according to claim 5, wherein the position adjusting mechanism is provided on an adjustment bolt for adjusting the distance between the reference plate portion and the adjustment plate portion of the probe base or the distance between each adjustment plate portion, and one of the reference plate portion, the adjustment plate portion, or each adjustment plate. And an adjusting bolt holder rotatably supporting the adjusting bolt, and an adjusting block having a screw hole installed at the other side of the reference plate portion and the adjusting plate portion or each adjusting plate and into which the adjusting bolt is inserted.

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