CN101290329A - Probe unit and checking device - Google Patents

Probe unit and checking device Download PDF

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Publication number
CN101290329A
CN101290329A CNA2008100901996A CN200810090199A CN101290329A CN 101290329 A CN101290329 A CN 101290329A CN A2008100901996 A CNA2008100901996 A CN A2008100901996A CN 200810090199 A CN200810090199 A CN 200810090199A CN 101290329 A CN101290329 A CN 101290329A
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CN
China
Prior art keywords
board
mentioned
probe
adjustment
bolt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2008100901996A
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Chinese (zh)
Inventor
小山内康晃
三浦一佳
齐藤裕树
福士俊雄
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Micronics Japan Co Ltd
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Micronics Japan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Micronics Japan Co Ltd filed Critical Micronics Japan Co Ltd
Publication of CN101290329A publication Critical patent/CN101290329A/en
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Liquid Crystal (AREA)

Abstract

This invention provides a probe unit and a detection unit, which are able to safely process the operation of changing the probe unit by one person. The probe unit includes a probe table fixed to a main body side, a probe composite unit with a probe which is directly contacted with the electrode of the detected object board such as a plasma liquid panel, a probe base that supports the probed composite unit while it is supported by the probe table; the probe base includes a standard plate part, one or more adjusting plate parts, a position adjusting mechanism mounted between the standard plate part and the adjusting plate part and between the adjusting plate parts and for adjusting the position of each adjusting plate. The standard plate part is installed at the special position of the probe table in the non-regmatic way; the adjusting plate part is installed at the probe table in the regmatic way.

Description

Probe unit and testing fixture
Technical field
The present invention relates to inspection employed probe unit of object plate and testing fixtures such as a kind of inspection liquid crystal panel.
Background technology
For example, in the manufacturing process of liquid crystal panel, whether have the described performance of instructions to the liquid crystal panel that has encapsulated liquid crystal and check (test).Usually, in this inspection, use the testing fixture that possesses probe unit with a plurality of probes.At this moment, each probe of testing fixture by on the electrode that is pressed in liquid crystal panel, under this state, is checked by electric signal from regulation to the regulation electrode that supply with.
Fig. 2 represents an example of such testing fixture.Illustrated testing fixture 1 mainly is made of panel arrangement portion 2 and determination part 3.
Panel arrangement portion 2 carries the inspection object plates 5 such as liquid crystal panel that insert from the outside to determination part 3, and the inspection object plate 5 that will finish after the inspection is transported to the outside.Panel arrangement portion 2 has panel mounting table 7 in its peristome 6, check object plate 5 with these panel mounting table 7 supportings, and be transported to determination part 3.In addition, panel arrangement portion 7 receives by determination part 3 and finishes inspection object plate 5 after the inspection, and is transported to the outside.
Determination part 3 is used to support the inspection object plate 5 that transports from panel arrangement portion 2 and tests.Determination part 3 possesses anchor clamps 8 and probe 9 etc.
Anchor clamps 8 are to be used to support the member of checking object plate 5.These anchor clamps 8 are by XYZ θ platform (not shown) supporting, thereby make moving axially and rotate along XYZ and being controlled of anchor clamps 8, thereby adjust the position of checking object plate 5.Probe 9 mainly possesses base plate 10, probe unit 11.Probe unit 11 is supported by base plate 10 with the state in the face of the opening 10A of base plate 10.
Patent documentation 1 discloses an example of probe unit 11.This example is shown in Fig. 3.This probe unit 11 mainly possesses probe base 12, by the contactor assembly 13 of this probe base 12 supportings.
Above-mentioned probe base 12 is the sheet material that supports a plurality of contactor assemblies 13 integratedly.A plurality of contactor assemblies 13 are supported by this probe base 12 with the state in the face of inspection object plates 5 such as liquid crystal panels.
On framework 14, be provided with the travel mechanism 15 that probe unit 11 is moved adjust the position.This travel mechanism 15 is made of feed screw nut 16, moving body (not shown), leading screw 17, motor 18 and carriage 19.Feed screw nut 16 is installed on the moving body, and screws togather with leading screw 17.Utilize motor 18 to make leading screw 17 rotations, thereby moving body is moved along the X edge direction.Utilize carriage 19 that motor 18 is installed on the framework 14.
Patent documentation 1: TOHKEMY 2001-74778 communique
But, in above-mentioned testing fixture 1, follow to change and check object plate 5 kinds, also to change probe unit 11.For example, when liquid crystal panel is detected, probe unit 11 is replaced by the probe unit that is fit to new varieties liquid crystal panel size.
In liquid crystal panel size hour, change this probe unit 11 and have no problem.In the size of liquid crystal panel hour, the size of probe unit 11 is also little and in light weight, therefore, bring difficulty can not for the operation of changing probe unit 11.Install probe unit 11, drive the motor 18 of travel mechanism 15 then, make leading screw 17 rotations and feed screw nut 16 is moved, thereby adjust the position of probe unit 11 by moving body.Thus, just can easily change probe unit 11.
But when the size of liquid crystal panel became big, the size of probe unit 11 also became big and weight becomes heavy, therefore, brought difficulty can for the operation of changing probe unit 11.
For example, for the liquid crystal panel of 52 inches levels, the length of the probe unit 11 of data side is 1650mm, and weight is about 35kg, only just can not change probe unit 11 by operating personnel.That is, have following problems: change the dangerous and needs two people operation of operation, efficient is low.
Summary of the invention
The present invention makes in order to address the above problem, and its purpose is, a kind of handling safety and can be by the probe unit and the testing fixture of one man operation changed is provided.
In order to solve above-mentioned problem, probe unit of the present invention is characterised in that, it possesses: be fixed on main body side probe station, have directly with the contactor assembly of checking the contacted probe of object plate electrode, at the probe base of the above-mentioned contactor assembly of state lower support that is supported by above-mentioned probe station, above-mentioned probe base possesses: benchmark board, one or more the adjustment board, be located at these benchmark boards and adjust between the board and respectively adjust and be used to adjust the position adjusting mechanism of respectively adjusting the board position between the board.
So, the benchmark board of above-mentioned probe base is installed at first, is adjusted the position of one or more adjustment board with position adjusting mechanism on one side again, adjust board Yi Bian these are installed.
Preferably, the benchmark board of above-mentioned probe base is installed on the ad-hoc location of above-mentioned probe station not can the changing of the relative positions, and above-mentioned adjustment board is being installed on the above-mentioned probe station under the state of the tolerable changing of the relative positions.Preferably, the benchmark board of above-mentioned probe base has diameter and the roughly the same circular hole of diameter that is fixed in the fixed-use bolt on the above-mentioned probe station, and above-mentioned adjustment board has allows that this adjustment board is with respect to the slotted hole of said fixing with the bolt changing of the relative positions.Preferably, above-mentioned position adjusting mechanism constitutes by adjusting bolt, adjust the bolt retainer and adjusting piece, and above-mentioned adjustment bolt is used to adjust the benchmark board of above-mentioned probe base and adjusts the interval between the board or respectively adjust interval between the board; Above-mentioned adjustment bolt retainer is located at the said reference board and is adjusted on the board, or is located at and respectively adjusts on the adjustment of one in the plate plate, and this adjustment bolt retainer is used to support can be with respect to the above-mentioned adjustment bolt of its rotation; Above-mentioned adjustment piece is located at the said reference board and is adjusted on the board, or is located on another adjustment plate of respectively adjusting in the plate, and has the screw that is used to screw in above-mentioned adjustment bolt.
In addition, preferably, possess panel arrangement portion and determination part, above-mentioned panel arrangement portion will check that the object plate moves into from the outside, and after finishing inspection, will check the object plate conveying to outside, the inspection object plate that the supporting of said determination portion transports from above-mentioned panel arrangement portion is also tested; Use the probe unit of above-mentioned probe unit as said determination portion.
As mentioned above,, individually change because above-mentioned probe base is divided into the adjustment board of a benchmark board and one or more, therefore, can be safely and easily change the operation of kind by a people.
Description of drawings
Fig. 1 is the exploded perspective view of the probe unit major part of expression embodiment of the present invention.
Fig. 2 is the front view of expression testing fixture in the past.
Fig. 3 is the vertical view of the probe unit of expression testing fixture in the past.
Fig. 4 is the stereographic map of the probe unit of the testing fixture of expression embodiment of the present invention.
Fig. 5 is the vertical view of the probe unit of the testing fixture of expression embodiment of the present invention.
Fig. 6 is the stereographic map of the position adjusting mechanism of the testing fixture of expression embodiment of the present invention.
Embodiment
Below, describe with reference to the probe unit and the testing fixture of accompanying drawing embodiment of the present invention.
The testing fixture of present embodiment is roughly the same with above-mentioned testing fixture in the past on the whole, therefore, at this identical components is marked identical Reference numeral, thereby omits its explanation.
As Fig. 4, shown in Figure 5, in the testing fixture of present embodiment, probe unit 23 is set along liquid crystal panel 22 peripheries that put on work stage 21.
Probe unit 23 mainly possesses probe station 25, contactor assembly 26, probe base 27.
Probe station 25 is fixed on the apparatus main body side of testing fixture 1, is used to support probe base 27.Probe station 25 is divided into 4 parts, is separately fixed at main body side, is on the framework 14 of testing fixture.Work stage 21 (liquid crystal panel 22) side at probe station 25 is provided with contactor assembly 26.Each probe station 25 forms that roughly rectangle is tabular.On the upper side of each probe station 25, be provided with the chimeric recess 28 that is used to install probe base 27.The lengthwise dimension of this chimeric recess 28 is set to slightly the youthful and the elderly in probe base 27, and makes the probe base 27 can the changing of the relative positions on its length direction.On chimeric recess 28, be separated by and set the compartment of terrain and be provided with a plurality of screw 28A (with reference to Fig. 1) that are used for fixing probe base 27.
The size in length and breadth of the size fluid,matching crystal panel 22 of 4 probe stations 25 is set.Specifically, probe station 25 is made of two short probe station 25A and two long probe platform 25B.On a short probe station 25A in two short probe station 25A and two long probe platform 25B and a long probe platform 25B contactor assembly 26 is installed.
Contactor assembly 26 directly contacts with electrodes as the liquid crystal panel 22 of checking the object plate, and the circuit that is used on liquid crystal panel 22 sends the inspection signal.Contactor assembly 26 is combination suspension piece, slide block etc. and constitute, and is provided with probe (not shown) on its top.This probe directly contacts with the electrode of liquid crystal panel 22, and the circuit on liquid crystal panel 22 is carried and checked signal.
Probe base 27 is used for by the above-mentioned contactor assembly 26 of state lower support of above-mentioned probe station 25 supportings.The total length that is installed on the probe base 27A on the short probe station 25A is short, and weight is so not heavy yet, therefore, constitutes as solid memder.The total length that is installed on the probe base 27B on the long probe platform 25B is long, and weight is also heavy, therefore, is separated.That is, probe base 27B possesses benchmark board 31, adjusts board 32 and position adjusting mechanism 33.
Benchmark board 31 is the members as the contraposition reference of probe base 27.As Fig. 1, shown in Figure 5, benchmark board 31 is installed in exactly can not the changing of the relative positions on the ad-hoc location of probe station 25.Specifically, benchmark board 31 can not be installed in to the changing of the relative positions end (right-hand end among Fig. 1) of the chimeric recess 28 of long probe platform 25B exactly.Benchmark board 31 has diameter and the roughly the same circular hole 31A of diameter that is fixed in the fixed-use bolt 35 on the probe station 25.Thus, by fixed-use bolt 35 being passed among the screw 28A that circular hole 31A screws in chimeric recess 28, and benchmark board 31 is installed in accurate position.Contactor assembly 26, contraposition video camera 36 are installed on benchmark board 31.
Adjust board 32 and be connected with benchmark board 31, constitute probe base 27 by adjusting self-position.Length according to the chimeric recess 28 of long probe platform 25B sets one or more this adjustment board 32.In the present embodiment, set one and adjusted board 32.This adjustment board 32 is connected with benchmark board 31 by position adjusting mechanism 33.
Adjusting board 32 is installed on the probe station 25B allowing under the state of the changing of the relative positions.On adjustment board 32, be provided with the slotted hole 37 of this adjustment board 32 of tolerable with respect to fixed-use bolt 35 changing of the relative positions.By fixed-use bolt 35 being inserted slotted holes 37 and screwing among the screw 28A of chimeric recess 28, under this state, utilize slotted hole 37 to make to adjust the board 32 can the changing of the relative positions, utilize position adjusting mechanism 33 to adjust the position of boards 32 again.
Position adjusting mechanism 33 is located between benchmark board 31 and the adjustment board 32 and is respectively adjusted between the board 32, is used to adjust the position of respectively adjusting board 32.As Fig. 1, shown in Figure 6, position adjusting mechanism 33 constitutes by adjusting bolt 40, adjust bolt retainer 41 and adjusting piece 42.
Adjusting bolt 40 is used to adjust the benchmark board 31 of probe base 27 and adjusts the interval between the board 32 or respectively adjust interval between the board 32.At this, because benchmark board 31 and adjust board 32 and respectively be provided with, therefore, that adjusts that bolt 40 adjusts is benchmark board 31 and adjusts interval between the board 32.Adjust bolt 40 and allow that by rotation portion 44, threaded portion 45 constitute.Rotation allows that portion 44 is made of head 44A, necking part 44B and the 44C of step disk portion.On head 44A, be provided with hexagonal hole 44D.Hex wrench is inserted into the rotatable bolt 40 of adjusting among this hexagonal hole 44D.Necking part 44B can be fitted in the embeded slot 49 of following adjustment bolt retainer 41 rotationally.Necking part 44B forms cylindric, by being fitted in the embeded slot 49, and only allow adjust that bolt 40 rotates in the fixed position and in the axial direction the supporting of changing of the relative positions ground adjust bolt 40.
Adjustment bolt retainer 41 is used to support can be with respect to the adjustment bolt 40 of its rotation.Adjust bolt retainer 41 by base plate 47, from this base plate 47 vertically with holding up the maintenance frame plate 48 of setting constitute.Base plate 47 directly is fixed on benchmark board 31 or adjusts the end of board 32.Keep the upper end of frame plate 48 to be provided with embeded slot 49, can be thereby can support with respect to the adjustment bolt 40 that keeps frame plate 48 to rotate.Embeded slot 49 be used for chimeric can be with respect to the necking part 44B of the adjustment bolt 40 that keeps frame plate 48 to rotate.The width of these embeded slot 49 inboard portions and the outside dimension of necking part 44B are roughly the same.Thus, the necking part 44B that adjusts bolt 40 can be rotationally in embeded slot 49 and is correctly not chimeric reelingly.In addition, embeded slot 49 is taper and expands out slightly, thus necking part 44B that can easily chimeric adjustment bolt 40.
Adjust piece 42 by screw in adjust bolt 40 adjust its with adjustment bolt retainer 41 between the interval.Adjust piece 42 by base plate 50, from this base plate 50 vertically with holding up the thread plate 51 of setting constitute.Base plate 50 directly is fixed on the end of adjusting board 32 or benchmark board 31.Thread plate 51 has the screw 51A that is used for screwing in adjustment bolt 40, and screw plate 51 is provided with Face to face with the holding plate 48 of adjusting bolt retainer 41.
Following the probe unit 23 of changing said structure like this.
When dismounting probe unit 23, at first unload the fixed-use bolt 35 of adjusting board 32.Then, unscrew the adjustment bolt 40 of position adjusting mechanism 33.
Then, from the embeded slot 49 of adjusting bolt retainer 41, unload the rotation of adjusting bolt 40 and allow portion 44, and unload adjustment board 32 from probe station 25.
Then, unload the fixed-use bolt 35 of benchmark board 31, unload benchmark board 31 from probe station 25.
Then, the probe unit 23 that is complementary with new varieties liquid crystal panel 22 is installed.Specifically, according to the electrode of liquid crystal panel 22 disposes contactor assembly 26 on probe base 27 position, the probe base 27 that then this has been configured contactor assembly 26 positions is installed in the chimeric recess 28 of probe station 25.
The benchmark board 31 of probe base 27 at first is installed in this case.The screw 28A of the circular hole 31A of involutory benchmark board 31 and the chimeric recess 28 of probe station 25 screws in fixed-use bolt 35.In all circular hole 31A, screw in fixed-use bolt 35 and bolt is tightened, thereby benchmark board 31 is fixed on the tram.
Then, adjustment board 32 is installed.The screw 28A of the slotted hole 37 of involutory adjustment board 32 and the chimeric recess 28 of probe station 25, and, the adjustment bolt 40 of position adjusting mechanism 33 screwed among the screw 51A that adjusts pieces 42 and with it be entrenched in the embeded slot 49 of adjusting bolt retainer 41.Then, screw in fixed-use bolt 35 in all slotted holes 37, with the adjustment bolt 40 of hex wrench turned position adjusting mechanism 33, the interval between bolt retainer 41 and the adjustment piece 42 is adjusted in adjustment, thereby adjusts the position of benchmark board 31 and adjustment board 32.
Then, screw each fixed-use bolt 35, the fixing board 32 of adjusting.
Because the probe base 27 of short probe station 25A is short and light, therefore, directly changes.
As mentioned above, can be safely and easily change the operation of probe unit 23.And the probe base 27B of the probe unit 23 of long probe platform 25B side is divided into benchmark board 31 and adjusts board 32, and therefore, the structure of binding site adjusting mechanism 33 can be safely and easily change operation.
So, thus just can improve operating efficiency by the operation that operation personnel change probe unit 23.
Embodiment
Illustrated in the probe unit 23 of above-mentioned embodiment, probe base 27 is divided into benchmark board 31 and adjusts board 32 two-part examples, but, when the size of probe base 27 is big, also can be divided into more than two parts or more than three parts with adjusting board 32.
The assembling of above-mentioned embodiment the testing fixture of probe unit 23 be not limited to the testing fixture that example is in the past put down in writing, also can be other testing fixtures, this point is self-evident.
In the above-described embodiment, the embeded slot 49 of the adjustment bolt retainer 41 of position adjusting mechanism 33 is taper and expands out slightly, but embeded slot 49 so long as the shape that can make the necking part 44B that adjusts bolt 40 be easy to enter get final product.For example, can on whole embeded slot 49, degree of tilt be set yet, only inlet be opened greatly.The inboard portion of embeded slot 49 forms semi-circular shape, to be convenient to that adjustment bolt 40 is stably rotated.
In the above-described embodiment, the probe base 27 of short probe station 25A is not cut apart, and is the structure of independent member, and still, when overall dimensions became big, the probe base 27 of this weak point probe station 25A also was divided into more than two or three parts.
Position adjusting mechanism 33 is that flight pitch that utilize to adjust bolt 40 is adjusted benchmark board 31 and adjusted interval between the board 32, still, also can utilize other to construct and adjust this interval.

Claims (8)

1. a probe unit is characterized in that, this probe unit possesses:
Be fixed on main body side probe station, have directly with the contactor assembly of checking the contacted probe of object plate electrode, at the probe base of the above-mentioned contactor assembly of state lower support that is supported by above-mentioned probe station;
Above-mentioned probe base possesses: benchmark board, one or more the adjustment board, be located at the said reference board and adjust between the board and respectively adjust and be used to adjust the position adjusting mechanism of respectively adjusting the board position between the board.
2. probe unit according to claim 1 is characterized in that,
The benchmark board of above-mentioned probe base can not be installed on the ad-hoc location of probe station to the changing of the relative positions, but above-mentioned adjustment board is installed on the above-mentioned probe station with the state of the changing of the relative positions.
3. probe unit according to claim 2 is characterized in that,
The benchmark board of above-mentioned probe base has diameter and the roughly the same circular hole of diameter that is fixed in the fixed-use bolt on the above-mentioned probe station, and above-mentioned adjustment board has allows that this adjustment board is with respect to the slotted hole of said fixing with the bolt changing of the relative positions.
4. probe unit according to claim 1 is characterized in that,
Above-mentioned position adjusting mechanism constitutes by adjusting bolt, adjust the bolt retainer and adjusting piece, and above-mentioned adjustment bolt is used to adjust the benchmark board of above-mentioned probe base and adjusts the interval between the board or respectively adjust interval between the board; Above-mentioned adjustment bolt retainer is located at the said reference board and is adjusted on the board, or is located at and respectively adjusts on the adjustment of one in the plate plate, and this adjustment bolt retainer is used to support can be with respect to the above-mentioned adjustment bolt of its rotation; Above-mentioned adjustment piece is located at the said reference board and is adjusted on the board, or is located on another adjustment plate of respectively adjusting in the plate, and has the screw that is used to screw in above-mentioned adjustment bolt.
5. a testing fixture that is used to check the object plate is characterized in that,
This testing fixture possesses panel arrangement portion and determination part, above-mentioned panel arrangement portion will check that the object plate moves into from the outside, and after finishing inspection, will check the object plate conveying to outside, the inspection object plate that the supporting of said determination portion transports from above-mentioned panel arrangement portion is also tested;
Said determination portion has probe unit;
This probe unit possesses: be fixed on main body side probe station, have directly with the contactor assembly of checking the contacted probe of object plate electrode, at the probe base of the above-mentioned contactor assembly of state lower support that is supported by above-mentioned probe station;
Above-mentioned probe base possesses: benchmark board, one or more the adjustment board, be located at the said reference board and adjust between the board and respectively adjust and be used to adjust the position adjusting mechanism of respectively adjusting the board position between the board.
6. testing fixture according to claim 5 is characterized in that,
The benchmark board of above-mentioned probe base can not be installed on the ad-hoc location of probe station to the changing of the relative positions, but above-mentioned adjustment board is installed on the above-mentioned probe station with the state of the changing of the relative positions.
7. testing fixture according to claim 6 is characterized in that,
The benchmark board of above-mentioned probe base has diameter and the roughly the same circular hole of diameter that is fixed in the fixed-use bolt on the above-mentioned probe station, and above-mentioned adjustment board has allows that this adjustment board is with respect to the slotted hole of said fixing with the bolt changing of the relative positions.
8. testing fixture according to claim 5 is characterized in that,
Above-mentioned position adjusting mechanism constitutes by adjusting bolt, adjust the bolt retainer and adjusting piece, and above-mentioned adjustment bolt is used to adjust the benchmark board of above-mentioned probe base and adjusts the interval between the board or respectively adjust interval between the board; Above-mentioned adjustment bolt retainer is located at the said reference board and is adjusted on the board, or is located at and respectively adjusts on the adjustment of one in the plate plate, and this adjustment bolt retainer is used to support can be with respect to the above-mentioned adjustment bolt of its rotation; Above-mentioned adjustment piece is located at the said reference board and is adjusted on the board, or is located on another adjustment plate of respectively adjusting in the plate, and has the screw that is used to screw in above-mentioned adjustment bolt.
CNA2008100901996A 2007-04-17 2008-04-17 Probe unit and checking device Pending CN101290329A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007108380A JP4903624B2 (en) 2007-04-17 2007-04-17 Probe unit and inspection device
JP2007-108380 2007-04-17

Publications (1)

Publication Number Publication Date
CN101290329A true CN101290329A (en) 2008-10-22

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Application Number Title Priority Date Filing Date
CNA2008100901996A Pending CN101290329A (en) 2007-04-17 2008-04-17 Probe unit and checking device

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JP (1) JP4903624B2 (en)
KR (1) KR100986640B1 (en)
CN (1) CN101290329A (en)
TW (1) TWI361895B (en)

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CN103837715A (en) * 2012-11-20 2014-06-04 里诺精密有限公司 Jig
CN106873195A (en) * 2015-12-11 2017-06-20 De&T株式会社 Probe unit more changing device
CN109143634A (en) * 2018-10-16 2019-01-04 武汉精毅通电子技术有限公司 A kind of manual simplified crimping jig
CN115754556A (en) * 2022-11-25 2023-03-07 温州众彩汽车零部件有限公司 Vehicle panel aging deformation rate detection equipment with multiple touch hands

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JP2010127706A (en) * 2008-11-26 2010-06-10 Micronics Japan Co Ltd Probe unit and inspection apparatus
KR101684449B1 (en) * 2016-04-05 2016-12-09 주식회사 프로이천 Probe device with probe block holding mechanism
CN109459595A (en) * 2018-12-29 2019-03-12 深圳市杰普特光电股份有限公司 Adjustable probe unit

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103837715A (en) * 2012-11-20 2014-06-04 里诺精密有限公司 Jig
CN103837715B (en) * 2012-11-20 2016-07-20 里诺精密有限公司 Fixture
CN106873195A (en) * 2015-12-11 2017-06-20 De&T株式会社 Probe unit more changing device
CN106873195B (en) * 2015-12-11 2020-10-30 De&T株式会社 Probe unit replacing device
CN109143634A (en) * 2018-10-16 2019-01-04 武汉精毅通电子技术有限公司 A kind of manual simplified crimping jig
CN109143634B (en) * 2018-10-16 2024-05-17 武汉精毅通电子技术有限公司 Simple manual crimping jig
CN115754556A (en) * 2022-11-25 2023-03-07 温州众彩汽车零部件有限公司 Vehicle panel aging deformation rate detection equipment with multiple touch hands
CN115754556B (en) * 2022-11-25 2024-01-05 温州众彩汽车零部件有限公司 Multi-tentacle vehicle panel aging deformation rate detection equipment

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JP2008267873A (en) 2008-11-06
KR100986640B1 (en) 2010-10-08
JP4903624B2 (en) 2012-03-28
TWI361895B (en) 2012-04-11
KR20080093873A (en) 2008-10-22

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