CN115435742A - Continuous online warpage rapid measuring device for substrate glass - Google Patents
Continuous online warpage rapid measuring device for substrate glass Download PDFInfo
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- CN115435742A CN115435742A CN202210957629.XA CN202210957629A CN115435742A CN 115435742 A CN115435742 A CN 115435742A CN 202210957629 A CN202210957629 A CN 202210957629A CN 115435742 A CN115435742 A CN 115435742A
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- plate
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- top surface
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- bearing platform
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/32—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring the deformation in a solid
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/03—Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/023—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
- C03B33/037—Controlling or regulating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The invention discloses a continuous online rapid warpage measuring device for substrate glass, which comprises an air-floatation bearing platform and a glass substrate arranged above the air-floatation bearing platform in a matching way, wherein detection mechanisms are arranged at the front end and the rear end of the air-floatation bearing platform in a matching way; the air supporting bearing platform comprises an installation plate and a vacuum adsorption plate evenly distributed on the top surface of the installation plate, support columns are fixedly installed on the periphery of the bottom surface of the installation plate, and an adjusting mechanism is fixedly installed on the bottom surface of the support columns. According to the invention, the air-floating bearing platform is arranged, so that the glass plate can be suspended in the air, and the edge part is ensured not to deform, thereby preventing the detection result from being influenced; through detection mechanism's setting, during the in-service use, but the limit is cut and the glass board carries out the angularity and detects while, realizes the on-line measuring of glass board warpage, and is applicable to the detection of different specification glass boards, and the testing result is reliable, convenient and fast.
Description
Technical Field
The invention belongs to the technical field of liquid crystal glass substrate processing and manufacturing, and particularly relates to a continuous online warpage rapid measuring device for substrate glass.
Background
The substrate glass is continuously thinned along with the thickness of the glass, the warping of the surface is more prominent, particularly, the warping detection is performed in a sampling inspection mode as a key quality control means after the advanced G7.5 generation (over 2000 mm), and the external condition factors such as the large size, the measurement range required by the large size, the detection time lengthening and the like cannot realize the online warping detection; and because the substrate glass has deflection, the non-support part can deform when the substrate glass is horizontally placed, and the support surface is uneven, so that the warping of the surface of the substrate glass can be directly influenced, and the detection result is influenced.
Disclosure of Invention
The invention aims to overcome the problems in the prior art and provides a continuous online rapid warpage measuring device for substrate glass, wherein a glass plate can be placed in the air in a suspension manner by arranging an air-floating bearing platform and an air-floating platform, and the edge part is ensured not to deform, so that the detection result is prevented from being influenced; through detection mechanism's setting, during the in-service use, but the limit is cut and the glass board carries out the angularity and detects while, realizes the on-line measuring of glass board warpage, and is applicable to the detection of different specification glass boards, and the testing result is reliable, convenient and fast.
In order to achieve the technical purpose and achieve the technical effect, the invention is realized by the following technical scheme:
a continuous online rapid warpage measuring device for substrate glass comprises an air floatation bearing platform and a glass substrate placed above the air floatation bearing platform in a matching mode, wherein detection mechanisms are installed at the front end and the rear end of the air floatation bearing platform in a matching mode;
the air floatation bearing platform comprises an installation plate and vacuum adsorption plates uniformly distributed on the top surface of the installation plate, support columns are fixedly arranged on the periphery of the lower bottom surface of the installation plate, and an adjusting mechanism is fixedly arranged on the lower bottom surface of each support column;
the detection mechanism comprises a linear guide rail and an inverted U-shaped bearing plate fixedly arranged at the top of a guide rail sliding block on the linear guide rail, a first mounting plate is fixedly arranged on the top surface of the inverted U-shaped bearing plate, a second mounting plate is arranged on the top surface of the first mounting plate in a matched manner, a first mounting hole and a second mounting hole are respectively formed in the left end and the right end of the top surface of the second mounting plate, a measurement mechanism is arranged in the first mounting hole in a matched manner, and a cutting mechanism is arranged in the second mounting hole in a matched manner;
measuring mechanism includes by lower supreme first erection column, first hydraulic stem and the first regulating plate that connects gradually, first erection column fixed mounting is in first mounting hole, first regulating plate leading flank central authorities fixed mounting has the second hydraulic stem, the output fixed mounting of second hydraulic stem has the second regulating plate, second regulating plate top surface central authorities open there is the third screw hole, third screw hole female connection has the threaded rod, bottom surface fixed mounting has test probe under the threaded rod.
Furthermore, first threaded holes are formed in the left end and the right end of the top surface of the first mounting plate, first bolts are connected with the first threaded holes in an internal thread mode, and two second threaded holes matched with the first bolts are formed in the center of the top surface of the second mounting plate.
Furthermore, the left end and the right end of the front side surface of the first adjusting plate are fixedly provided with positioning plates, and the left side surface and the right side surface of the second adjusting plate are provided with sliding long grooves matched with the positioning plates.
Furthermore, the cutting mechanism comprises a second mounting column and a third adjusting plate which are sequentially connected from bottom to top, and the second mounting column is fixedly mounted in the second mounting hole;
and a cutting tool bit is fixedly arranged at one end of the lower bottom surface of the third adjusting plate, which is far away from the second mounting column.
Furthermore, the adjusting mechanism comprises a supporting bottom plate and a bearing disc which are connected in a sliding manner, the supporting column is fixedly arranged at the front end of the top surface of the supporting bottom plate, a sliding groove is formed in the rear end of the top surface of the supporting bottom plate, and the bearing disc is arranged in the sliding groove in a sliding manner;
the front end of the sliding groove is fixedly provided with a first cylinder, and the output end of the first cylinder is fixedly connected with the bearing disc;
the bearing plate is characterized in that a placing circular groove is formed in the center of the top face of the bearing plate, a second air cylinder is fixedly mounted in the placing circular groove, and the output end of the second air cylinder is fixedly connected with the linear guide rail.
The beneficial effects of the invention are:
the invention provides a continuous online rapid warpage measuring device for substrate glass, which is provided with an air floating bearing platform, wherein a glass plate can be placed in the air, and the edge part is ensured not to deform, so that the detection result is prevented from being influenced; through detection mechanism's setting, during the in-service use, but the limit is cut and the glass board carries out the angularity and detects while, realizes the on-line measuring of glass board warpage, and is applicable to the detection of different specification glass boards, and the testing result is reliable, convenient and fast.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention. In the drawings:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is an exploded view of a portion of the structure of the present invention;
FIG. 3 is a schematic view of a partial structure of the present invention;
FIG. 4 is a schematic view of a partial structure of the present invention;
FIG. 5 is an exploded view of a portion of the structure of the present invention;
FIG. 6 is an exploded view of a portion of the structure of the present invention;
FIG. 7 is an exploded view of a portion of the structure of the present invention;
FIG. 8 is a schematic view of a portion of the present invention;
FIG. 9 is a partial schematic of the present invention;
fig. 10 is an exploded view of a partial structure of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that the terms "opening," "upper," "lower," "thickness," "top," "middle," "length," "inner," "peripheral," and the like are used in an orientation or positional relationship that is merely for convenience in describing and simplifying the description, and do not indicate or imply that the referenced component or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be considered as limiting the present invention.
As shown in fig. 1, the continuous on-line rapid warpage measuring device for substrate glass comprises an air-floating bearing platform 1 and a glass substrate 2 placed above the air-floating bearing platform 1 in a matching manner, wherein detection mechanisms 3 are respectively installed at the front end and the rear end of the air-floating bearing platform 1 in a matching manner.
As shown in fig. 2, the air-floating carrying platform 1 includes a mounting plate 11 and vacuum adsorption plates 12 uniformly distributed on the top surface of the mounting plate 11, support columns 13 are fixedly mounted on the periphery of the lower bottom surface of the mounting plate 11, and an adjusting mechanism 4 is fixedly mounted on the lower bottom surface of the support columns 13;
through this kind of setting, set up vacuum adsorption, during the in-service use, glass substrate 2 does not produce direct contact with air supporting load-bearing platform 1, avoids environmental shock to exert an influence to the measuring result among the measurement process.
As shown in fig. 3 to 5, the detecting mechanism 3 includes a linear guide 31 and an inverted U-shaped bearing plate 32 fixedly mounted on the top of a guide rail slider on the linear guide 31, a first mounting plate 33 is fixedly mounted on the top surface of the inverted U-shaped bearing plate 32, a second mounting plate 34 is mounted on the top surface of the first mounting plate 33 in a matching manner, a first mounting hole 341 and a second mounting hole 342 are respectively formed at the left end and the right end of the top surface of the second mounting plate 34, a measuring mechanism 35 is mounted in the first mounting hole 341 in a matching manner, and a cutting mechanism 36 is mounted in the second mounting hole 342 in a matching manner;
the left end and the right end of the top surface of the first mounting plate 33 are both provided with a first threaded hole 331, the first threaded hole 331 is connected with a first bolt 332 in an internal thread manner, and the center of the top surface of the second mounting plate 34 is provided with two second threaded holes 343 matched with the first bolt 332;
through the arrangement, the second mounting plate 34 is convenient to disassemble and assemble, and the disassembly and the assembly are convenient and quick; among them, the linear guide 31 is a known conventional linear actuator.
As shown in fig. 6 to 7, the measuring mechanism 35 includes a first mounting column 351, a first hydraulic rod 352 and a first adjusting plate 353 which are connected in sequence from bottom to top, the first mounting column 351 is fixedly mounted in the first mounting hole 341, a second hydraulic rod 354 is fixedly mounted at the center of the front side surface of the first adjusting plate 353, a second adjusting plate 355 is fixedly mounted at the output end of the second hydraulic rod 354, a third threaded hole 356 is formed at the center of the top surface of the second adjusting plate 355, a threaded rod 357 is connected in the third threaded hole 356 through a female thread, and a detection probe 358 is fixedly mounted at the lower bottom surface of the threaded rod 357;
the left end and the right end of the front side surface of the first adjusting plate 353 are fixedly provided with a positioning plate 3531, and the left side surface and the right side surface of the second adjusting plate 355 are provided with sliding long grooves 3551 matched with the positioning plate 3531;
through the arrangement, the height of the detection probe 358 can be changed, and the front and rear positions of the detection probe 358 can be finely adjusted, so that the detection probe is convenient to use in actual detection; a threaded rod 357 is arranged, so that the detection probe 358 is convenient to replace; the positioning plate 3531 is arranged, so that the stability of the adjusting process is improved; the first hydraulic rod 352 and the second hydraulic rod 354 are conventional electric hydraulic push rods.
As shown in fig. 8, the cutting mechanism 36 includes a second mounting column 361 and a third adjusting plate 362 connected in sequence from bottom to top, the second mounting column 361 is fixedly mounted in the second mounting hole 342;
a cutting bit 363 is fixedly mounted at one end of the lower bottom surface of the third adjusting plate 362 far away from the second mounting column 361;
through the arrangement, the device can be used for detecting the warping while cutting in practical use, and is convenient to use.
As shown in fig. 9 to 10, the adjusting mechanism 4 includes a supporting base plate 41 and a bearing disc 42 which are slidably connected, the supporting column 13 is fixedly installed at the front end of the top surface of the supporting base plate 41, the rear end of the top surface of the supporting base plate 41 is provided with a sliding slot 411, and the bearing disc 42 is slidably installed in the sliding slot 411;
a first cylinder 412 is fixedly installed at the front end of the sliding slot 411, and the output end of the first cylinder 412 is fixedly connected with the bearing disc 42;
a circular placing groove 421 is formed in the center of the top surface of the bearing plate 42, a second cylinder 43 is fixedly installed in the circular placing groove 421, and the output end of the second cylinder 43 is fixedly connected with the linear guide rail 31;
through the arrangement, the position of the linear guide rail 31 can be adjusted, and the practical use is convenient; the first cylinder 412 and the second cylinder 43 are conventional cylinders.
In the actual use process, the air-floating bearing platform 1 is arranged, the glass plate can be placed in the air, the edge part is ensured not to deform, and the detection result is prevented from being influenced; through detection mechanism 3's setting, during the in-service use, but the limit is cut and the glass board carries out the angularity and detects while, realizes glass board warping's on-line measuring, and is applicable to the detection of different specification glass boards, and the testing result is reliable, convenient and fast.
In the description herein, references to the description of "one embodiment," "an example," "a specific example" or the like are intended to mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed.
Claims (5)
1. The utility model provides a base plate glass is with quick measuring device of continuous online warpage which characterized in that: the device comprises an air-floating bearing platform (1) and a glass substrate (2) which is arranged above the air-floating bearing platform (1) in a matching way, wherein detection mechanisms (3) are arranged at the front end and the rear end of the air-floating bearing platform (1) in a matching way;
the air-floating bearing platform (1) comprises an installation plate (11) and vacuum adsorption plates (12) uniformly distributed on the top surface of the installation plate (11), support columns (13) are fixedly installed on the periphery of the lower bottom surface of the installation plate (11), and adjusting mechanisms (4) are fixedly installed on the lower bottom surfaces of the support columns (13);
the detection mechanism (3) comprises a linear guide rail (31) and an inverted U-shaped bearing plate (32) fixedly mounted at the top of a guide rail slider on the linear guide rail (31), a first mounting plate (33) is fixedly mounted on the top surface of the inverted U-shaped bearing plate (32), a second mounting plate (34) is mounted on the top surface of the first mounting plate (33) in a matching manner, a first mounting hole (341) and a second mounting hole (342) are respectively formed in the left end and the right end of the top surface of the second mounting plate (34), a measurement mechanism (35) is mounted in the first mounting hole (341) in a matching manner, and a cutting mechanism (36) is mounted in the second mounting hole (342) in a matching manner;
measuring mechanism (35) include by lower supreme first erection column (351), first hydraulic stem (352) and the first regulating plate (353) that connect gradually, first erection column (351) fixed mounting is in first mounting hole (341), first regulating plate (353) leading flank central authorities fixed mounting has second hydraulic stem (354), the output fixed mounting of second hydraulic stem (354) has second regulating plate (355), second regulating plate (355) top surface central authorities open has third screw hole (356), third screw hole (356) female connection has threaded rod (357), bottom surface fixed mounting has test probe (358) under threaded rod (357).
2. The continuous on-line rapid warpage measuring device for substrate glass according to claim 1, wherein: first screw hole (331) have all been opened at both ends about first mounting panel (33) top surface, first screw hole (331) female connection has first bolt (332), second mounting panel (34) top surface central authorities are opened there are two and first bolt (332) matched with second screw hole (343).
3. The continuous on-line rapid warpage measuring device for substrate glass according to claim 1, wherein: positioning plates (3531) are fixedly mounted at the left end and the right end of the front side face of the first adjusting plate (353), and sliding long grooves (3551) matched with the positioning plates (3531) are formed in the left side face and the right side face of the second adjusting plate (355).
4. The continuous on-line rapid warpage measuring apparatus for substrate glass according to claim 1, characterized in that: the cutting mechanism (36) comprises a second mounting column (361) and a third adjusting plate (362) which are sequentially connected from bottom to top, and the second mounting column (361) is fixedly mounted in a second mounting hole (342);
and a cutting tool bit (363) is fixedly mounted at one end of the lower bottom surface of the third adjusting plate (362) far away from the second mounting column (361).
5. The continuous on-line rapid warpage measuring device for substrate glass according to claim 1, wherein: the adjusting mechanism (4) comprises a supporting base plate (41) and a bearing disc (42) which are connected in a sliding manner, the supporting column (13) is fixedly arranged at the front end of the top surface of the supporting base plate (41), the rear end of the top surface of the supporting base plate (41) is provided with a sliding groove (411), and the bearing disc (42) is arranged in the sliding groove (411) in a sliding manner;
a first air cylinder (412) is fixedly mounted at the front end of the sliding groove (411), and the output end of the first air cylinder (412) is fixedly connected with the bearing disc (42);
bear dish (42) top surface central authorities and open and to have place circular slot (421), place circular slot (421) internal fixed mounting has second cylinder (43), the output and linear guide (31) fixed connection of second cylinder (43).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210957629.XA CN115435742A (en) | 2022-08-10 | 2022-08-10 | Continuous online warpage rapid measuring device for substrate glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210957629.XA CN115435742A (en) | 2022-08-10 | 2022-08-10 | Continuous online warpage rapid measuring device for substrate glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN115435742A true CN115435742A (en) | 2022-12-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210957629.XA Pending CN115435742A (en) | 2022-08-10 | 2022-08-10 | Continuous online warpage rapid measuring device for substrate glass |
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| CN (1) | CN115435742A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116045827A (en) * | 2023-02-22 | 2023-05-02 | 无锡星微科技有限公司 | System and method for detecting thickness and bending degree of large-size wafer |
-
2022
- 2022-08-10 CN CN202210957629.XA patent/CN115435742A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116045827A (en) * | 2023-02-22 | 2023-05-02 | 无锡星微科技有限公司 | System and method for detecting thickness and bending degree of large-size wafer |
| CN116045827B (en) * | 2023-02-22 | 2023-11-10 | 无锡星微科技有限公司 | System and method for detecting thickness and bending degree of large-size wafer |
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