CN103837715A - Jig - Google Patents
Jig Download PDFInfo
- Publication number
- CN103837715A CN103837715A CN201310589686.8A CN201310589686A CN103837715A CN 103837715 A CN103837715 A CN 103837715A CN 201310589686 A CN201310589686 A CN 201310589686A CN 103837715 A CN103837715 A CN 103837715A
- Authority
- CN
- China
- Prior art keywords
- probe
- lock dog
- dog body
- base plate
- dismounting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
- G01R1/0408—Test fixtures or contact fields; Connectors or connecting adaptors; Test clips; Test sockets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
- G01R1/07307—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
- G01R1/07314—Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
A jig of the invention comprises a probe and a block unit which guides the probe. One end of the probe is in contact with a circuit pattern of a substrate while the other end of the probe is in connection with an inspection part which determines whether the circuit pattern is abnormal or not. The block unit is arranged on a base and is capable of moving along the direction perpendicular to the probe in the state that the base is fixed, thereby changing the position of the guided probe to the target position of the circuit pattern. Therefore, the position of the probe can be changed easily according to the tolerance of the circuit pattern of the substrate.
Description
Technical field
The present invention relates to for the logical galvanoscopic fixture of circuit pattern.
Background technology
Conventionally adopt substrate is measured, processed or checks etc. in field of printed circuit board fabrication or field of semiconductor manufacture.
When the circuit pattern that substrate surface is formed carries out accurate mensuration, processing, inspection etc., require the tolerance of substrate circuit pattern to minimize.
But, the in fact very difficult tolerance of getting rid of tool completely, the tolerance of baseplate material, the tolerance of pattern.Due to these tolerances, utilize fixture possibly cannot carry out energising reliably to substrate circuit pattern and check.
Disclose the smooth substrate fixture that circuit pattern is checked that maintains substrate No. 0809648 at korean registered patent gazette.But do not disclose and check limited Corresponding Countermeasures because tolerance makes circuit pattern.
Look-ahead technique document
Patent documentation
No. 0809648th, korean registered patent gazette
Summary of the invention
The technical problem to be addressed by invention
The object of this invention is to provide and carry out reliably the logical galvanoscopic fixture of circuit pattern.
The object of the invention is to reach technical task as above, but be not limited to described technical task, can should clearly be understood by the technician in the technology of the present invention field with common knowledge by following record other technical task of not carrying.
Solve the technical scheme of problem
Fixture of the present invention can comprise its one end and contact with the circuit pattern of substrate, the other end has the probe that N/R inspection portion is connected and guides described probe with judging described circuit pattern, be arranged on base station and the described base station direction vertical with described probe under fixing state and change position, with described change position, the described probe location of described guiding is changed over to the block unit of the target location of described circuit pattern.
Effect of the present invention is as follows.
Fixture of the present invention changes bulk single bit position under the state of fixing base station, can easily change the position of probe according to the tolerance of substrate circuit pattern.
Therefore, can prevent reliably the problem that and then tolerance can not completing circuit pattern checks.This effect is by being divided into the block unit of guiding probe a plurality of blocks and making each block change independently respectively position and can more improve.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of fixture of the present invention.
Fig. 2 is the lock dog body of fixture of the present invention and the disassembly and assembly structure schematic diagram of base plate block.
Fig. 3 is the schematic cross-section that forms the probe of fixture of the present invention.
In figure:
100-probe, 111-the 1st probe, 112-the 2nd probe, 113-elastic, 130-block unit, 131-lock dog body, 132-base plate block, 133-the 1st groove, 135-the 2nd groove, 139-connecting portion, 150-base station, 170-support sector, 190-signal wire, 210-substrate.
Embodiment
Below, by reference to the accompanying drawings embodiments of the invention are described in detail.Size or the image etc. of the constituent element showing on accompanying drawing in this process can expand demonstration for the definition and the convenience that illustrate.In addition, consider formation of the present invention and effect, the term of special definition can change according to user, operator's intention or convention.Must give a definition according to the overall content of this instructions to the definition of these terms.
Fig. 1 is the schematic diagram of fixture of the present invention.
The fixture showing at Fig. 1 can comprise probe 110 and block unit 130.
One end of probe 110 contacts with the circuit pattern of substrate 210, and the other end can have N/R inspection portion to be connected with decision circuitry pattern.Disclose the state that inspection portion and probe 110 are connected with the other end of probe 110 with the signal wire 190 of the electric wire of electrical connection etc. at Fig. 1.
For example inspection portion, for decision circuitry pattern has or not extremely, can apply signal and picked up signal by the probe contacting with the circuit pattern of measuring.If the signal obtaining judgement state within the scope of expecting is normal, otherwise can have extremely by decision circuitry pattern.
Probe 110 (probe) is the detection utensil of measuring detected object circuit pattern state.Probe 100 can have according to circuit pattern the image that electrical specification is good.For example one end has sharp-pointed form and can have the thickness from tens of microns of units to hundreds of microns of units according to the size of circuit pattern.Recently very strong according to the trend of the circuit pattern of various electronic apparatus miniaturizations, highly integrated trend substrate 210 also miniaturization.The size of probe 100 also has thickness as hair or thinner thickness thus.
Even if circuit substrate 210 is produced because many factors can have tolerance at same system.This tolerance is in the generation as the same of fine circuit substrate.In the time that fine circuit substrate 210 exists tolerance, probe 110 may not contact the circuit pattern of initial stage design attitude.May there is larger problem in the trend of this problem along with the lasting miniaturization/miniaturization of circuit pattern later.
For a plurality of substrates 210 of inspection repeatedly, block unit 130 is arranged on fixing base station 150.The block unit 130 that is arranged on base station 150 is also fixed on same position.But because being fixed, block unit is difficult to tackle the tolerance of substrate 210 circuit patterns.Therefore, the block unit 130 of formation fixture of the present invention can change position with the direction perpendicular to probe in the situation that base station 150 is fixed.Change probe 110 positions that block unit 130 is guided and can change over the target location of circuit pattern with the position of block unit 130.
Elastic 113 can have variform.For example at probe 110, spring can be set, or 110 of probes are as elastic body.The latter's situation can be utilized line (wire) probe 110 of straight line or tracing pattern.
According to the trend of the circuit pattern of highly integrated, miniaturization/miniaturization, the wide grade of the circuit pattern that probe 110 will contact is designed to produce with very little direction as previously mentioned.This miniaturization/miniaturization makes the tolerance producing in the production run of substrate 210 reach debatable level in checking process uncontrollablely.This trend accelerationization more backward, therefore considers that tolerance need to configure probe 110 so that contact circuit pattern reliably.The configuration of probe 110 can be decided by the block unit 130 of guiding probe 110.
Especially the part that becomes problem due to tolerance is circuit pattern has vertical direction (the xy in-plane of Fig. 1) tolerance situation to the direction of principal axis of probe 110.Therefore, the block unit 130 of formation fixture of the present invention can change position in the direction vertical with the direction of principal axis of probe 110.The scheme that changes block unit 130 positions as the direction with perpendicular to probe 110, can change base station 150 positions that block unit 130 is set or the position that directly changes block unit 130.The position change that connects the base station 150 of gear, belt does not meet object of the present invention because the connection of gear, belt etc. has tolerance.
Therefore, the change of the position of probe 110 changes to carry out better by the position of block unit 130.Block unit 130 also may have tolerance, changes but can carry out more reliable position compared to base station 150.
Tolerance can not produce with same direction, same numerical value at all circuit of circuit substrate 210.For example part section is better in 110 position detections of original probe, and it is better in probe 110 position detections of changing that other section is considered tolerance.Thus, whole probe 110 may be not too suitable according to the situation of circuit substrate 210 with same direction change position.In order to tackle, block unit 130 is divided into a plurality of blocks by this situation and each block can change position independently of each other.Fig. 1 discloses the state that block unit 130 is divided into 3 blocks.
Form the perforation being run through by the 1st probe 111 at lock dog body 131, form the perforation being run through by the 2nd probe 112 at base plate block 132.These perforation determine probe 110 positions of interlock circuit pattern.
The position range that configures the 1st probe 111 or the 2nd probe 112 at Fig. 1 is with field
scope represent.The 1st probe 111 or the 2nd probe 112 can be formed on field with multiple thickness and position
scope within.
Be divided into the 1st probe 111 and the 2nd probe 112 in order to tackle multiple circuit pattern, for example the 2nd probe 112 is configured in whole field
with the number of the 1st probe 111, location-independent checking.The lock dog body 131 that, just exchange is provided with the 1st probe 111 just can check multiple circuit pattern.
Exchange respectively the 1st probe 111 more difficult, so that exchange is provided with the lock dog body 131 of the 1st probe 111 is whole better.Lock dog body 131 can be in 132 dismounting of base plate block for this reason.Now, base plate block 132 is fixed on base station 150.Disclose base plate block 132 and be fixed on by the support sector 170 of pillar or clavate shape the state of base station 150 at Fig. 1.
For example, lock dog body 131 can be included in a plurality of the 1st dismounting portions of the face formation that base plate block 132 is relative.Base plate block 132 can be included in a plurality of the 2nd dismounting portions of the face formation that lock dog body 131 is relative.Now, the 2nd dismounting portion and the dismounting of the 1st dismounting portion.When dismounting lock dog body 131 and base plate block 132 not to the utmost all the 1st dismounting portions of dismounting and all the 2nd dismounting portions also harmless.For example select respectively 2 of mutual correspondence can carry out reliable dismounting in the 1st dismounting portion and the 2nd dismounting portion.The number of selecteed the 1st dismounting portion and the 2nd dismounting portion exceed 3 also harmless above.During only with 1 dismounting portion according to disassembly and assembly structure take dismounting portion as shaft lock block body 131 with base plate block 132 rotation in the horizontal direction, therefore must be careful.
Can determine the change position of lock dog body 131 with the position of the 1st dismounting portion of selection and the 2nd dismounting portion of selection.
Fig. 2 is the lock dog body 131 of fixture of the present invention and the disassembly and assembly structure schematic diagram of base plate block 132.
As shown in Figure 2, lock dog body 131 can be included in a plurality of the 1st grooves 133 of the face formation that base plate block 132 is relative, and base plate block 132 can be included in a plurality of the 2nd grooves 135 of the face formation that lock dog body 131 is relative.
Now, the 1st groove 133 is equivalent to the 1st dismounting portion, and the 2nd groove 135 is equivalent to the 2nd dismounting portion.Owing to sandwiching the connecting portion 139 of the groove of selecting in the 1st groove 133 and the 2nd groove 135, lock dog body 131 can be installed maybe and can take apart at base plate block 132.The position that in addition, can complete lock dog body 131 according to the selection of groove that sandwiches connecting portion 139 changes.
For example Fig. 2 on the right side of lock dog body 131 and base plate block 132 a tangible groove that pluralizes.Now, be x1 with the interval between length direction (the x direction of principal axis of Fig. 1) the 1st groove 133 of block unit 130, when the interval between the 2nd groove 135 is x2, x1 and x2 can be unequal.Relatively connecting portion 139 is sandwiched in while forming the left side groove of x1 and right side groove respectively, and lock dog body 131 can change completing place as the size of x1 and x2 phase difference with the length direction of block unit 130.
Same, be y1 with the interval between direction (the y direction of principal axis of Fig. 1) the 1st groove 133 vertical with block unit 130 length directions, when the interval between the 2nd groove 135 is y2, y1 and y2 can be unequal.Relatively connecting portion 139 is sandwiched in while forming the upper side channel of y1 and lower side channel respectively, and lock dog body 131 can change completing place as the size of y1 and y2 phase difference with the direction vertical with block unit 130 length directions.
In x1 and x2 phase difference, while making at least one corresponding tolerance form the 1st groove 133 and the 2nd groove 135 in y1 and y2 phase difference, can remove the problem being caused by tolerance above.
When lock dog body 131 is arranged on base plate block 132, the 1st probe 111 and the 2nd probe 112 can be in contact with one another, if stagger and can not be in contact with one another in the position of the 1st probe 111 and the 2nd probe 112 when the position of lock dog body 131 changes.This kind of problem can be eliminated with scheme below.
Fig. 3 is the schematic cross-section that forms the probe 110 of fixture of the present invention.
The probe 110 of Fig. 3 can comprise the 1st probe 111 that is arranged on lock dog body 131 and the 2nd probe 112 that is arranged on base plate block 132.
The 1st probe 111 is factors of direct contact circuit pattern.The 2nd probe 112 is the factors that connect inspection portion.For the inspection lock dog body 131 of circuit pattern and base plate block 132 one end of the 1st probe 111 and one end of the 2nd probe 112 under the state of installing will contact.But, may change position due to one that is formed in each dismounting portion the 1st probe 111 of each block unit 130 and the 2nd probe 112, even if changing, position must prepare the means that the 1st probe 111 contacts with the 2nd probe 112 phase mutual energy.
The sectional area of the 2nd probe 112 ends that for example contact with the 1st probe 111 ends at Fig. 3 is greater than the sectional area of the 1st probe 111 ends.
Specifically, the thickness of the 1st probe 111 ends is w1, and when the thickness of the 2nd probe 112 ends is w2, the formation of w2 is greater than w1.Certainly these two can exchange mutually.
Differing as previously mentioned of w1 and w2 can be according to the differing of x1 and x2, and differing etc. of y1 and y2 decides.
In addition, although be formed on the 2nd probe 112 in Fig. 3 elastic 113, be formed on the 1st probe 111 or all form also harmless at the 1st probe 111 and the 2nd probe 112.Or do not utilize extra spring can utilize the elasticity of probe 111 own or the elasticity of probe 112 own as elastic 113.
Comprehensive, the sectional area of the 1st probe 111 ends of contact the 2nd probe 112 can be mutually unequal with the sectional area of the 2nd probe 112 ends that contact the 1st probe 111.Each sectional area differ the tolerance that must consider circuit pattern, so each sectional area differ may with the change distance dependent of probe 110 that changes position.
Above to being illustrated according to embodiments of the invention, but this is only illustrating, and the technician in this area with common knowledge should be appreciated that the embodiment that can implement thus various deformation and impartial scope.Therefore, real technical protection scope of the present invention must limit according to claims.
Claims (7)
1. a fixture, is characterized in that comprising:
One end contacts with the circuit pattern of substrate, the other end and the probe that judges that described circuit pattern has N/R inspection portion to be connected; And
Guide described probe, be arranged on base station and described base station under fixing state, the direction vertical with described probe changes position, and with described change position, the described probe location of described guiding changed over to the block unit of the target location of described circuit pattern.
2. fixture according to claim 1, is characterized in that,
Described block unit is divided into a plurality of blocks, and described each block changes respectively position independently.
3. fixture according to claim 1, is characterized in that,
The 1st probe that described probe comprises substrate described in an end in contact, the other end contact of one end and described the 1st probe and the other end are connected the 2nd probe of described inspection portion,
Described block unit comprises the lock dog body that is run through and can be changed with the direction of vertical described the 1st probe position by described the 1st probe, accommodates described the 2nd probe and the fixing base plate block of relatively described lock dog body.
4. fixture according to claim 3, is characterized in that,
Described lock dog body is in the dismounting of described base plate block.
5. fixture according to claim 3, is characterized in that,
Described lock dog body is included in a plurality of the 1st dismounting portions of the face formation that described base plate block is relative,
Described base plate block comprises face that described lock dog body is relative and a plurality of the 2nd dismounting portions in the dismounting of described the 1st dismounting portion of being formed on,
The position of the position of selecteed the 1st dismounting portion and selecteed the 2nd dismounting portion decides the position of described lock dog body to change.
6. fixture according to claim 3, is characterized in that,
Described lock dog body is included in a plurality of the 1st grooves of the face formation that described base plate block is relative,
Described base plate block is included in a plurality of the 2nd grooves of the face formation that described lock dog body is relative,
Owing to sandwiching the connecting portion of the groove of selecting in described the 1st groove and described the 2nd groove, described lock dog body is arranged on described base plate block, determines that the position of described lock dog body changes.
7. fixture according to claim 3, is characterized in that,
The sectional area of described the 1st probe tips that contacts described the 2nd probe is mutually unequal with the sectional area of described the 2nd probe tips that contacts described the 1st probe.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020120131281A KR101410991B1 (en) | 2012-11-20 | 2012-11-20 | Jig |
| KR10-2012-0131281 | 2012-11-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103837715A true CN103837715A (en) | 2014-06-04 |
| CN103837715B CN103837715B (en) | 2016-07-20 |
Family
ID=50801422
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310589686.8A Active CN103837715B (en) | 2012-11-20 | 2013-11-20 | Fixture |
Country Status (3)
| Country | Link |
|---|---|
| KR (1) | KR101410991B1 (en) |
| CN (1) | CN103837715B (en) |
| TW (1) | TWI511227B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101575318B1 (en) | 2014-05-28 | 2015-12-07 | 현대자동차 주식회사 | Air flow control system of vehicle |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0849599A1 (en) * | 1996-12-20 | 1998-06-24 | Lsi Logic Corporation | Apparatus for contacting semiconductor die |
| KR20060072916A (en) * | 2004-12-24 | 2006-06-28 | 주식회사 파이컴 | A probe card manufacturing method include sensing probe and the probe card, probe card inspection system |
| KR20080085322A (en) * | 2007-03-19 | 2008-09-24 | (주) 미코티엔 | Probe card |
| CN101290329A (en) * | 2007-04-17 | 2008-10-22 | 日本麦可罗尼克斯股份有限公司 | Probe unit and checking device |
| TW201011301A (en) * | 2008-06-20 | 2010-03-16 | Tokyo Electron Ltd | Contact structure for inspection |
| KR20120066418A (en) * | 2010-12-14 | 2012-06-22 | 엘지디스플레이 주식회사 | Probe unit and testing apparatus of thin film pattern using the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7218127B2 (en) * | 2004-02-18 | 2007-05-15 | Formfactor, Inc. | Method and apparatus for probing an electronic device in which movement of probes and/or the electronic device includes a lateral component |
| TWM371877U (en) * | 2009-05-15 | 2010-01-01 | Chunghwa Picture Tubes Ltd | Testing tool of display panel |
| KR100991367B1 (en) * | 2010-03-15 | 2010-11-02 | (주)아테코 | Module for testing display device |
| TWM413858U (en) * | 2011-06-07 | 2011-10-11 | Qi-Zong Lv | Fine-tuning device of circuit board inspection jig |
| TWM428360U (en) * | 2011-12-13 | 2012-05-01 | Soon Tan Entpr Co Ltd | Jig structure allowing separate angle adjustment |
-
2012
- 2012-11-20 KR KR1020120131281A patent/KR101410991B1/en active IP Right Grant
-
2013
- 2013-11-19 TW TW102142203A patent/TWI511227B/en not_active IP Right Cessation
- 2013-11-20 CN CN201310589686.8A patent/CN103837715B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0849599A1 (en) * | 1996-12-20 | 1998-06-24 | Lsi Logic Corporation | Apparatus for contacting semiconductor die |
| KR20060072916A (en) * | 2004-12-24 | 2006-06-28 | 주식회사 파이컴 | A probe card manufacturing method include sensing probe and the probe card, probe card inspection system |
| KR20080085322A (en) * | 2007-03-19 | 2008-09-24 | (주) 미코티엔 | Probe card |
| CN101290329A (en) * | 2007-04-17 | 2008-10-22 | 日本麦可罗尼克斯股份有限公司 | Probe unit and checking device |
| JP2008267873A (en) * | 2007-04-17 | 2008-11-06 | Micronics Japan Co Ltd | Probe unit and inspection apparatus |
| TW201011301A (en) * | 2008-06-20 | 2010-03-16 | Tokyo Electron Ltd | Contact structure for inspection |
| KR20120066418A (en) * | 2010-12-14 | 2012-06-22 | 엘지디스플레이 주식회사 | Probe unit and testing apparatus of thin film pattern using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI511227B (en) | 2015-12-01 |
| KR20140064214A (en) | 2014-05-28 |
| KR101410991B1 (en) | 2014-06-23 |
| TW201430989A (en) | 2014-08-01 |
| CN103837715B (en) | 2016-07-20 |
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| C14 | Grant of patent or utility model | ||
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