TWI511227B - Jig - Google Patents

Description

Fixture

The present invention relates to a jig for power-on inspection of circuit patterns.

The measurement, processing or inspection of substrates is generally employed in the field of printed circuit board manufacturing or semiconductor manufacturing.

When the circuit pattern formed on the surface of the substrate is precisely measured, processed, inspected, etc., the tolerance of the substrate circuit pattern is required to be minimized.

However, it is actually difficult to completely eliminate the tolerances of the fixture, the tolerance of the substrate material, and the tolerance of the pattern. Due to these tolerances, a reliable power-on check of the substrate circuit pattern may not be possible using the jig.

The substrate jig for inspecting the flatness of the substrate to inspect the circuit pattern is shown in Korean Patent Publication No. 0809648. However, there is no corresponding countermeasure for limiting the circuit pattern inspection due to tolerances.

Advanced technical literature

Patent literature

Korean Registered Patent Gazette No. 0809648

An object of the present invention is to provide a jig that reliably performs a power check of a circuit pattern.

An object of the present invention is to achieve the above-described technical problems, but it is not limited to the above-described technical problems, and other technical problems that have not been mentioned can be clarified by those skilled in the art of the present invention by the following description. understanding.

The jig of the present invention may include a probe whose one end is in contact with the circuit pattern of the substrate, and the other end is connected to the inspection portion that determines whether the circuit pattern is abnormal or not, and guides the probe, and is disposed on the base and the base is The direction perpendicular to the probe changes position in the fixed state, and the guided probe position is changed to the block unit of the target position of the circuit pattern at the changed position.

The jig of the present invention changes the position of the block unit in the state of fixing the base, and the position of the probe can be easily changed according to the tolerance of the circuit pattern of the substrate.

Therefore, it is possible to reliably prevent the problem that the circuit pattern inspection cannot be completed following the tolerance. This effect is further improved by dividing the block unit of the guiding probe into a plurality of blocks and changing the positions of the blocks independently.

110‧‧‧ probe

130‧‧‧Block units

210‧‧‧Substrate

190‧‧‧ signal line

100‧‧‧ probe

150‧‧‧Abutment

113‧‧‧Flexible Department

111‧‧‧1st probe

112‧‧‧2nd probe

131‧‧‧Lock block

132‧‧‧Bottom block

‧‧‧field

170‧‧‧Support Department

133‧‧‧1st slot

135‧‧‧2nd slot

139‧‧‧Connecting Department

Figure 1 is a schematic illustration of a clamp of the present invention.

2 is a schematic view showing the disassembly and assembly structure of the lock block body and the bottom plate block of the jig of the present invention.

Figure 3 is a schematic cross-sectional view of a probe constituting the jig of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The size or image of the constituent elements shown on the drawings in this process can be enlarged for clarity and convenience of explanation. In addition, the constitution and function of the present invention are considered, and the terms specifically defined may vary depending on the intention of the user, the operator, or the convention. The definition of these terms must be defined in the entirety of this specification.

Figure 1 is a schematic illustration of a clamp of the present invention. The clamp shown in FIG. 1 can include probe 110 and block unit 130.

One end of the probe 110 is in contact with the circuit pattern of the substrate 210, and the other end can be connected to the inspection portion for judging whether or not the circuit pattern is abnormal. FIG. 1 shows a state in which the signal line 190 of the electric wire or the like electrically connected to the inspection portion and the probe 110 is connected to the other end of the probe 110.

For example, in order to judge whether or not the circuit pattern is abnormal, the inspection unit can apply a signal and obtain a signal through a probe that is in contact with the measured circuit pattern. If the obtained signal judges that the state is normal within the expected range, otherwise it can be judged that the circuit pattern is abnormal.

The probe 110 (probe) is a detecting instrument that measures the state of the circuit pattern to be detected. The probe 110 can have an image with good electrical characteristics according to the circuit pattern. For example, one end has a sharp shape and may have a thickness ranging from tens of micrometers to hundreds of micrometers depending on the size of the circuit pattern. Recently, there has been a tendency for the circuit pattern of the substrate 210 to be miniaturized according to the miniaturization and high integration of various electronic appliances. The size of the probe 100 is thus also as thick or thin as hair.

The circuit substrate 210 is produced even in the same system due to various factors difference. This tolerance is also produced on a fine circuit substrate. When the fine circuit substrate 210 has a tolerance, the probe 110 may not be in contact with the circuit pattern of the initial design position. This problem may arise with a larger problem as the circuit pattern continues to be miniaturized/micronized.

The block unit 130 guides the probe 110. In order to make a plurality of probes 110 having a plurality of thicknesses contact the circuit pattern, the block 130 is used. A groove, a hole, or the like in which a probe can be placed is formed on the block unit 130 at a position corresponding to the circuit pattern. The grooves or holes formed in the block unit 130 can accommodate the probe 110.

In order to repeatedly inspect a plurality of substrates 210, the block unit 130 is disposed on the fixed base 150. The block unit 130 disposed on the base 150 is also fixed at the same position. However, it is difficult to cope with the tolerance of the circuit pattern of the substrate 210 because the block unit is fixed. Therefore, the block unit 130 constituting the jig of the present invention can be changed in position in the direction perpendicular to the probe in the case where the base 150 is fixed. The position of the probe 110 that guides the block unit 130 in the position change of the block unit 130 can be changed to the target position of the circuit pattern.

The probe 110 can be in contact with the circuit pattern in the direction of the vertical circuit pattern or in the direction of the almost vertical circuit pattern. The probe 110 is a factor that directly contacts the circuit pattern, so a reliable contact must be formed for inspection, and the formation of the damaged circuit pattern is not made good during the inspection. To this end, the probe 110 may include an elastic portion 113 such as a spring.

The elastic portion 113 can have various forms. For example, the probe 110 may be provided with a spring, or the probe 110 itself may be an elastomer. The latter case can utilize a wire probe 110 in a straight or curved configuration.

According to the trend of the highly integrated, miniaturized/reduced circuit pattern, the width of the circuit pattern to be contacted by the probe 110, etc., is designed and produced in a very small direction. This small The patterning/refinement makes the uncontrollable tolerances produced during the production of the substrate 210 reach a level that is problematic during the inspection process. This trend is more accelerated in the future, so it is necessary to configure the probe 110 to reliably contact the circuit pattern in consideration of tolerances. The configuration of the probe 110 can be determined by the block unit 130 of the pilot probe 110.

In particular, since the tolerance becomes a problem, the circuit pattern has a tolerance in the vertical direction (the xy plane direction of FIG. 1) of the axial direction of the probe 110. Therefore, the block unit 130 constituting the jig of the present invention can be changed in position in a direction perpendicular to the axial direction of the probe 110. As a scheme of changing the position of the block unit 130 in a direction perpendicular to the probe 110, the position of the base 150 in which the block unit 130 is set may be changed or the position of the block unit 130 may be directly changed. The change in the position of the base 150 connecting the gears and the belts is not in accordance with the purpose of the present invention due to the tolerance of the connection of the gears, belts and the like.

Therefore, it is preferable that the positional change of the probe 110 is changed by the position of the block unit 130. The block unit 130 may also have tolerances, but a more reliable position change can be made compared to the base 150.

The tolerances are not generated in the same direction and the same value in all circuits of the circuit substrate 210. For example, the partial segment is better in the original probe 110 position, and the other segments are better in checking the position of the modified probe 110. Thus, it may not be appropriate to change the position of the entire probe 110 in the same direction depending on the condition of the circuit substrate 210. In order to cope with this situation, the block unit 130 is divided into a plurality of blocks and each block can be changed in position independently of each other. FIG. 1 illustrates a state in which the block unit 130 is divided into three blocks.

The probe 110 may include a first probe 111 whose one end is in contact with the substrate 210, and a second probe 112 whose one end is in contact with the other end of the first probe 111 and whose other end is connected to the inspection portion.

The block unit 130 may include a first probe that is penetrated by the first probe 111 and that is perpendicular to the first probe The lock block body 131 in the direction in which the direction of the 111 is changed, and the floor block body 132 in which the second probe is housed and fixed to the lock block body 131 is fixed.

A perforation penetrating through the first probe 111 is formed in the lock block 131, and a perforation penetrating through the second probe 112 is formed in the floor block 132. These perforations determine the position of the probe 110 of the associated circuit pattern.

The position range of the first probe 111 or the second probe 112 is arranged in the field in FIG. The scope is expressed. The first probe 111 or the second probe 112 can be formed in the field in various thicknesses and positions. Within the scope of.

In order to deal with a plurality of circuit patterns divided into the first probe 111 and the second probe 112, for example, the second probe 112 is disposed in the entire field. Then, the inspection is performed regardless of the number and position of the first probe 111. That is, a plurality of circuit patterns can be inspected only by exchanging the lock block body 131 in which the first probe 111 is provided.

Since it is difficult to exchange the first probes 111, it is preferable to exchange the lock blocks 131 provided with the first probes 111. To this end, the lock block 131 can be detached from the bottom plate block 132. At this time, the floor block 132 is fixed to the base 150. FIG. 1 shows a state in which the floor block 132 is fixed to the base 150 by a support or a rod-shaped support portion 170.

The lock block 131 is detachable in a variety of ways in the floor block 132 fixed to the base 150.

For example, the lock block body 131 may include a plurality of first detachable portions formed on the surface opposite to the bottom plate block 132. The bottom plate block 132 may include a plurality of second detachable portions formed on the surface opposite to the lock block body 131. At this time, the second detachable portion and the first detachable portion are detachably attached. When the lock block body 131 and the floor block body 132 are attached and detached, it is also possible to remove all the first detachable parts and all the second detachable parts. For example, in the first disassembly The two parts and the second detachable part are respectively selected to correspond to each other and can be reliably attached and detached. It is also possible that the number of the first detachable parts and the second detachable parts to be selected is more than three. When only one detachable portion is used, the detachable portion and the bottom plate block 132 are rotated in the horizontal direction according to the detachable structure, so care must be taken.

The position at which the lock block 131 is changed can be determined by the position of the selected first detachable portion and the selected second detachable portion.

2 is a schematic view showing the disassembly and assembly structure of the lock block body 131 and the bottom plate block body 132 of the jig of the present invention.

As shown in FIG. 2, the lock block body 131 may include a plurality of first grooves 133 formed on the opposite faces of the bottom plate block 132. The bottom plate block 132 may include a plurality of second grooves formed on the opposite faces of the lock block body 131. 135.

At this time, the first groove 133 corresponds to the first detachable portion, and the second groove 135 corresponds to the second detachable portion. The lock block body 131 can be attached or detachable to the bottom plate block 132 by the connection portion 139 of the groove selected in the first groove 133 and the second groove 135. In addition, the positional change of the lock block 131 can be completed according to the selection of the groove sandwiched in the joint portion 139.

For example, in FIG. 2, a plurality of grooves are formed on the right side of the lock block body 131 and the floor block body 132. At this time, the interval between the first grooves 133 in the longitudinal direction of the block unit 130 (the x-axis direction in FIG. 1) is x ₁ , and when the interval between the second grooves 135 is x ₂ , x ₁ and x ₂ may be not equal. When the comparison connecting portion 139 is sandwiched between the left side groove and the right side groove forming the x ₁ , the lock block body 131 completes the position change in the longitudinal direction of the block unit 130 such as the difference between x ₁ and x ₂ .

Similarly, the interval between the first grooves 133 in the direction perpendicular to the longitudinal direction of the block unit 130 (the y-axis direction in Fig. 1) is y ₁ , and the interval between the second grooves 135 is y ₂ , y ₁ and y ₂ can be unequal. When the connection portion 139 is sandwiched between the upper side groove and the lower side groove forming the y ₁ , respectively, the lock block body 131 is changed in the direction perpendicular to the longitudinal direction of the block unit 130 such as the difference between y ₁ and y ₂ .

In the above difference between x ₁ and x _{2 , the} difference between y ₁ and y ₂ causes at least one corresponding tolerance to form the first groove 133 and the second groove 135, and the problem caused by the tolerance can be released.

When the lock block 131 is attached to the bottom plate block 132, the first probe 111 and the second probe 112 are in contact with each other, and when the position of the lock block 131 is changed, the positions of the first probe 111 and the second probe 112 are shifted. Can't touch each other. This kind of problem can be eliminated by the following scheme.

Figure 3 is a schematic cross-sectional view of a probe 110 constituting the jig of the present invention.

The probe 110 of FIG. 3 may include a first probe 111 provided in the lock block 131 and a second probe 112 provided on the bottom plate block 132.

The first probe 111 is a factor that directly contacts the circuit pattern. The second probe 112 is a factor that connects the inspection unit. In order to check the circuit pattern, the lock block body 131 and the bottom plate block 132 are in contact with one end of the first probe 111 and one end of the second probe 112. However, since one of the first probe 111 and the second probe 112 formed in each of the detachable portions of each block unit 130 may change position, the first probe 111 and the second probe 112 must be prepared even if the position is changed. A means of mutual contact.

For example, the cross-sectional area of the end portion of the second probe 112 that is in contact with the end portion of the first probe 111 in FIG. 3 is larger than the cross-sectional area of the end portion of the first probe 111.

Specifically, the thickness of the end portion of the first probe 111 is w ₁ , and when the thickness of the end portion of the second probe 112 is w ₂ , the formation of w ₂ is larger than w ₁ . Of course, these two can be exchanged.

The phase difference between w1 and w2 can be determined according to the phase difference of x1 and x2, the phase difference of y1 and y2, and the like as described above.

Further, although the elastic portion 113 is formed on the second probe 112 in FIG. 3, it is formed in It is also possible that the first probe 111 or both the first probe 111 and the second probe 112 are formed. Alternatively, the elasticity of the probe 111 itself or the elasticity of the probe 112 itself may be utilized as the elastic portion 113 without using an additional spring.

In general, the cross-sectional area of the end portion of the first probe 111 contacting the second probe 112 and the cross-sectional area of the end portion of the second probe 112 contacting the first probe 111 may not be equal to each other. The phase difference of each cross-sectional area must take into account the tolerance of the circuit pattern, so the difference in cross-sectional area may be related to the changing distance of the probe 110 at the changed position.

The embodiments of the present invention have been described above, but are merely illustrative, and those skilled in the art will understand that various modifications and equivalents can be made. Therefore, the true technical protection scope of the present invention must be defined in accordance with the scope of the following claims.

110‧‧‧ probe

130‧‧‧Block units

150‧‧‧Abutment

170‧‧‧Support Department

190‧‧‧ signal line

131‧‧‧Lock block

132‧‧‧Bottom block

133‧‧‧1st slot

210‧‧‧Substrate

‧‧‧field

Claims (4)

A jig comprising: a probe having one end in contact with a circuit pattern of a substrate, and the other end being connected to an inspection portion for determining whether the circuit pattern is abnormal; and guiding the probe to be disposed on the base and the The base station changes position in a direction perpendicular to the probe in a fixed state, and changes the position of the guided probe to a block unit of a target position of the circuit pattern with the changed position; The probe includes a first probe having one end contacting the substrate, a second probe having one end in contact with the other end of the first probe and the other end connected to the inspection portion; a lock block that penetrates the first probe and is capable of changing position in a direction perpendicular to the first probe, and a bottom block that accommodates the second probe and is fixed to the lock block; the lock block The bottom plate block is detachably mounted; the lock block body includes a plurality of first detachable portions formed on opposite surfaces of the bottom plate block; and the bottom plate block includes a surface formed on the opposite side of the lock block body And a plurality of second detachable parts detachably attached to the first detachable part; selected 1 and the position of the removable portion detachable position of the second portion is selected to determine the change in position of the lock block. A jig as claimed in claim 1, wherein the block unit is divided into a plurality of blocks, each of which independently changes position. The jig of claim 1, wherein the lock block body comprises a plurality of first grooves formed on opposite sides of the bottom plate block; and the bottom plate block is included in the lock block body. a plurality of second grooves formed on the opposite faces; the lock block is attached to the bottom plate block by the connection portion of the grooves selected in the first groove and the second groove, and the determining The position of the lock block changes. The jig according to claim 1, characterized in that the cross-sectional area of the first probe end portion contacting the second probe and the second probe end contacting the first probe are The cross-sectional areas of the sections are not equal to each other.