1361895 九、發明說明 【發明所屬之技術領域】 本發明係關於使用於液晶面板等檢查對象板的檢查之 探針單元及檢査裝置。 【先前技術】 例如在液晶面板中，於其製造步驟中會針對密封有液 晶的液晶面板進行是否具有規格書所示之功能的檢査（實 驗）。進行該檢查時，一般是使用具備具有複數探針的探 針單元之檢查裝置。此時，係在將檢查裝置的各探針推壓 至液晶面板之電極的狀態下，藉由對特定電極供給特定的 電性信號來進行。 第2圖係表示此種檢查裝置的一例。圖示的檢查裝置 1主要是由面板安置部2和測定部3所構成。 面板安置部2係用以將從外部被插入的液晶面板等檢 査對象板5搬送到測定部3，且將檢查結束後的檢查對象 板5搬送到外部的裝置。在面板安置部2之開口部6的內 測具有面板安置載置台7，以該面板安置載置台7支持檢 查對象板5並將其搬送到測定部3。又，面板安置載置台 7接承於測定部3檢查結束後的檢查對象板5並將其搬送 到外部。 測定部3係用以支持從面板安置部2搬送來的檢查對 象板5以進行實驗的裝置。測定部3係具備夾盤頂面（ chuck top) 8或探針器（prover) 9等而構成。 [S1 -5- 1361895 夾盤頂面8係用以支持檢查對象板5的構件。該夾盤 頂面8係被支持於ΧΥΖΘ載置台（沒有顯示圖），以控制 朝XYZ軸方向的移動及旋轉，來調整檢查對象板5的位 置。探針器9主要係具有底板（base palte) 10、探針單 元11而構成。探針單元11係在面對底板10之開口 10A 的狀態下被支持於底板10。 專利文獻1中具有作爲探針單元1 1的一例。第3圖 係表示該例。該探針單元11主要係具備探針基座12和被 支持於該探針基座12的探針組合體13而構成。 上述探針基座12係將複數探針組合體13予以一體支 持的板材。複數探針組合體1 3係在面對液晶面板等檢查 對象板5的狀態下被支持於該探針基座12。 框架（frame ) 14上設有使探針單元11移動以調整位 置的移動機構15。該移動機構15係由導螺帽（lead nut) 16、移動體（沒有顯不圖）、導螺桿（lead screw) 17、 馬達1 8和托架（bracket ) 19所構成。導螺帽16被組裝 於移動體’且與導螺桿17螺合。移動體係藉由導螺桿17 透過馬達18旋轉，而朝X邊方向移動。馬達1 8係藉由托 架1 9組裝框架1 4上。 〔專利文獻1〕日本特開2001 — 74778號公報 【發明內容】 〔發明所欲解決之課題〕 上述檢查裝置1中’隨著檢查對象板5之款式的更換 -6- 1361895 ，探針11也會被更換。例如在液晶面板的情況下，探針 單元11會更換成適合新款式之液晶面板的尺寸。 該探針單元11的更換在液晶面板的尺寸較小時不會 特別產生問題。由於當液晶面板的尺寸較小時，探針單元 11的尺寸也較小且重量不重，故不會對探針單元11的更 換作業造成妨礙。安裝探針單元11，驅動移動機構15的 馬達18以使導螺桿17旋轉以使導螺帽16移動，經由移 動體調整探針單元11的位置。依此方式，可容易地更換 探針單元1 1。 然而，當液晶面板的尺寸變大時，探針單元11的尺 寸也會變大且重量變重，故會對探針單元11的更換作業 造成妨礙。 例如在5 2英吋等級的液晶面板中，於資料側的探針 單元11中，其長度變成l65〇mm、重量變成約35kg，無 法只藉由一位作業員來更換探針單元11。亦即，更換作業 變危險且需要兩人作業，會有效率變差的問題。 本發明係有鑑於上述問題點而開發者，其目的在於提 供一種可安全且可以一人作業來進行更換作業的探針單元 及檢査裝置。 〔用以解決課題之手段〕 爲了解決上述課題，本發明之探針單元的特徵爲：具 備：探針載置台，被固定於本體側；探針組合體，具有與 檢查對象板之電極直接接觸的探針；和探針基座，在被支 1361895 持於上述探針載置台的狀態下支持上述探針組合體，並且 上述探針基座具備：1個基準板部；1或2個以上的調整 板部：和位置調整機構，設置於此等基準板部與調整板部 之間及各調整板部之間且用來調整各調整板部的位置。 依此構成，先安裝上述探針基座的基準板部，再將1 或2個以上的調整板部，利用位置調整機構一邊調整其位 置一邊予以安裝。 以上述探針基座的基準板部在不會偏移於上述探針載 置台的特定位置下被安裝，且上述調整板部在可容許於上 述探針載置台上偏移的狀態下被安裝爲佳。以上述探針基 座的基準板部具有與固定於上述探針載置台之固定用螺栓 大致相同直徑的圓孔，且上述調整板部具有可容許相對於 上述固定用螺栓偏移的長孔爲佳。上述位置調整機構係以 由：調整螺栓，用來調整上述探針基座之基準板部與調整 板部的間隔或各調整板部的間隔；調整螺栓保持器，設置 於上述基準板部與調整板部或各調整板中之一者，且將上 述調整螺栓以可轉動的方式支持；和調整區塊，設置於上 述基準板部與調整板部或各調整板中的另一者，且具有可 供上述調整螺栓螺入的螺孔所構成爲佳。 又’具備：面板安置部，將檢査對象板從外部搬入， 於檢查結束後再將其搬送到外部；和測定部，支持從該當 面板安置部搬送到的檢查對象板以進行實驗，且以使用上 述探針單元作爲上述測定部的探針單元爲佳。1361895 IX. Description of the Invention [Technical Field] The present invention relates to a probe unit and an inspection apparatus used for inspection of an inspection target panel such as a liquid crystal panel. [Prior Art] For example, in the liquid crystal panel, in the manufacturing step, an inspection (experiment) of whether or not the liquid crystal panel sealed with the liquid crystal has the function shown in the specification is performed. When performing this inspection, an inspection apparatus having a probe unit having a plurality of probes is generally used. In this case, a specific electrical signal is supplied to the specific electrode in a state where the probes of the inspection device are pressed to the electrodes of the liquid crystal panel. Fig. 2 shows an example of such an inspection apparatus. The illustrated inspection device 1 is mainly composed of a panel seating portion 2 and a measuring portion 3. The panel seating unit 2 is a device for transporting the inspection target panel 5 such as a liquid crystal panel inserted from the outside to the measurement unit 3, and transporting the inspection target panel 5 after the inspection is completed to the outside. The inside of the opening portion 6 of the panel seating portion 2 has a panel mounting mounting table 7 which supports the inspection target panel 5 and conveys it to the measuring portion 3. Further, the panel placement mounting table 7 is attached to the inspection target panel 5 after the inspection by the measurement unit 3, and is transported to the outside. The measuring unit 3 is a device for supporting the inspection target panel 5 conveyed from the panel seating unit 2 to perform an experiment. The measuring unit 3 is configured to include a chuck top 8 or a probe 9 or the like. [S1 -5 - 1361895 The top surface 8 of the chuck is used to support the member of the inspection target plate 5. The chuck top surface 8 is supported by a cymbal mounting table (not shown) to control the movement and rotation in the XYZ axis direction to adjust the position of the inspection target plate 5. The prober 9 is mainly composed of a base palte 10 and a probe unit 11. The probe unit 11 is supported by the bottom plate 10 in a state of facing the opening 10A of the bottom plate 10. Patent Document 1 has an example of the probe unit 11 . Figure 3 shows this example. The probe unit 11 mainly includes a probe base 12 and a probe assembly 13 supported by the probe base 12. The probe base 12 is a plate material in which the plurality of probe assemblies 13 are integrally supported. The plurality of probe assemblies 13 are supported by the probe base 12 in a state of facing the inspection target panel 5 such as a liquid crystal panel. A frame 15 is provided with a moving mechanism 15 for moving the probe unit 11 to adjust the position. The moving mechanism 15 is composed of a lead nut 16, a moving body (not shown), a lead screw 17, a motor 18, and a bracket 19. The guide nut 16 is assembled to the moving body' and screwed to the lead screw 17. The moving system moves in the X-direction by the lead screw 17 being rotated by the motor 18. The motor 18 is assembled on the frame 14 by the brackets 19. [Patent Document 1] JP-A-2001-74778 SUMMARY OF INVENTION [Problem to be Solved by the Invention] In the inspection apparatus 1 described above, "with the change of the style of the inspection target plate 5 - 6 - 1361895, the probe 11 is also Will be replaced. For example, in the case of a liquid crystal panel, the probe unit 11 is replaced with a size suitable for a new type of liquid crystal panel. The replacement of the probe unit 11 does not particularly cause a problem when the size of the liquid crystal panel is small. Since the size of the probe unit 11 is small and the weight is not heavy when the size of the liquid crystal panel is small, the replacement operation of the probe unit 11 is not hindered. The probe unit 11 is mounted, and the motor 18 of the moving mechanism 15 is driven to rotate the lead screw 17 to move the lead nut 16, and the position of the probe unit 11 is adjusted via the moving body. In this way, the probe unit 11 can be easily replaced. However, when the size of the liquid crystal panel becomes large, the size of the probe unit 11 also becomes large and the weight becomes heavy, which hinders the replacement operation of the probe unit 11. For example, in the liquid crystal panel of the 52-inch class, in the probe unit 11 on the data side, the length becomes l65 mm and the weight becomes about 35 kg, and the probe unit 11 cannot be replaced by only one operator. That is, the replacement work becomes dangerous and requires two people to work, which may cause a problem of inefficiency. The present invention has been made in view of the above problems, and an object thereof is to provide a probe unit and an inspection apparatus which are safe and can be replaced by one person. [Means for Solving the Problem] In order to solve the above problems, the probe unit of the present invention includes: a probe mounting table fixed to the main body side; and a probe assembly having direct contact with an electrode of the inspection target plate And the probe base supports the probe assembly while being held by the probe mounting table 1361895, and the probe base includes: one reference plate portion; one or two or more The adjustment plate portion and the position adjustment mechanism are disposed between the reference plate portion and the adjustment plate portion and between the adjustment plate portions, and are used to adjust the positions of the adjustment plate portions. According to this configuration, the reference plate portion of the probe base is attached first, and one or two or more adjustment plate portions are attached while being adjusted by the position adjustment mechanism. The reference plate portion of the probe base is mounted at a specific position that is not offset from the probe mounting table, and the adjustment plate portion is mounted while being allowed to be offset on the probe mounting table. It is better. The reference plate portion of the probe base has a circular hole having substantially the same diameter as the fixing bolt fixed to the probe mounting table, and the adjustment plate portion has a long hole that is allowed to be offset from the fixing bolt. good. The position adjustment mechanism is configured to adjust an interval between the reference plate portion and the adjustment plate portion of the probe base or an interval between the adjustment plate portions by adjusting the bolt; and adjusting the bolt holder to be disposed on the reference plate portion and adjusting One of the plate portion or each of the adjustment plates, and the adjustment bolt is rotatably supported; and the adjustment block is disposed on the other of the reference plate portion and the adjustment plate portion or each of the adjustment plates, and has It is preferable that the screw holes through which the adjustment bolts are screwed are formed. In addition, the panel is placed in the panel, and the inspection target plate is carried out from the outside, and then transported to the outside after the inspection is completed. The measuring unit supports the inspection target plate transported from the panel placement unit to perform the experiment and use it. The probe unit is preferably a probe unit of the measurement unit.
-8- 1361895 〔發明之功效〕 如上所述，由於係將上述探針基座分割成1個基準板 部與1或2個以上的調整板部以個別地進行更換，故可安 全且可以一人作業容易地進行款式更換作業。 【實施方式】 以下，參照附圖，說明本發明之實施型態的探針單元 及檢查裝置。 本實施型態的檢查裝置整體上係與上述習知的檢查裝 置大致相同，故在此相同構件係附註相同符號以省略其說 明。 本實施型態的檢査裝置係如第4圖、第5圖所示，以 沿著被載置於工作桌（worktable) 21上之液晶面板22周 緣的方式設有探針單元23。 探針單元23主要係具備探針載置台25、探針組合體 26、探針基座27而構成。 探針載置台25係被固定於檢查裝置1的裝置本體側 ’用來支持探針基座27的構件。探針載置台25被分割成 四部分’分別固定於作爲本體側之檢查裝置的框架（ frame ) 14。在探針載置台25的工作桌21 (液晶面板22 )側設有探針組合體2 6。各探針載置台2 5係形成大致長 方向板狀。在各探針載置台25的上側面，設有用以安裝 探針基座27的嵌合凹部28。該嵌合凹部28係以可將探針 基座27挪移於其長度方向的方式，設定成較探針基座27 -9- 1361895 稍長的尺寸。在嵌合凹部28上，隔著設定間隔設有複數 個用以固定探針基座27的螺孔28A (參照第1圖）。 四個探針載置台25的尺寸係配合液晶面板22之縱橫 的尺寸而設定。具體而言係由兩個短探針載置台25 A和兩 個長探針載置台25B所構成。在兩者之中的一個短探針載 置台25A及長探針載置台25B上，安裝有探針組合體26 〇 探針組合體26係與作爲檢查對象板之液晶面板22的 電極直接接觸，用以將檢查信號傳送到液晶面板22上的 電路之構件。探針組合體 26係將懸置塊（suspension block)、滑塊（slide block)等組合而構成，在其前端設 有探針（沒有顯示圖）。該探針係與液晶面板22的電極 直接接觸以將檢查信號傳送到液晶面板22上的電路》 探針基座27係在被支持於上述探針載置台25的狀態 下用以支持上述探針組合體26的構件。安裝於短探針載 置台25A的探針基座2 7A，其全長較短且重量也不是很重 ，故構成爲單一構件。安裝於長探針載置台25B的探針基 座27B，其全長很長且重量也很重，故被分割。也就是說 ，探針基座2 7B係具備基準板部31、調整板部32和位置 調整機構33而構成。 基準板部31係成爲探針基座27之位置對準的基準之 構件。如第1圖、第5圖所示，基準板部31係在不會偏 移於探針載置台25的特定位置下正確地被安裝。具體而 言，以不會偏移至長探針載置台25B之嵌合凹部28之一 I S3 -10- 1361895 邊的端部（第1圖中的右側端部）的方式正確地被安裝。 基準板部31具有與固定於探針載置台25之固定用螺栓35 大致相同直徑的圓孔31A。依此，將固定用螺栓35經由 圓孔31A螺入嵌合凹部28的螺孔28A，可將基準板部31 安裝於正確的位置。在基準板部31上安裝有探針組合體 26、位置對準用相機36。 調整板部32係用來調整其位置而與基準板部31連結 以構成探針基座27的構件。該調整板部32係因應長探針 載置台2 5B之嵌合凹部28的長度而配設1個或2個以上 。本實施型態中，配設有一個調整板部32。該調整板部 32係與基準板部31在位置調整機構33連結。 調整板部32係在被容許於探針載置台25B上偏移的 狀態下被安裝。調整板部32上設有可容許相對於固定用 螺栓35偏移的長孔37。在固定用螺栓35被插入長孔37 而被螺入嵌合凹部28之螺孔28A的狀態，調整板部32可 藉由長孔37容許偏移，且在位置調整機構33將調整板部 3 2進行位置調整。 位置調整機構33係設置於基準板部31與調整板部32 之間及各調整板部32之間，用以調整各調整板部32的位 置之機構。位置調整機構33係如第1圖、第6圖所示由 調整螺栓40'調整螺栓保持器41和調整區塊42所構成。 調整螺栓40係用來調整探針基座27之基準板部31 與調整板部32的間隔或各調整板部32的間隔之螺栓。在 此’由於基準板部31與調整板部32係各設置一片，故調 -11 - 1361895 整螺栓40係用來調整準板部31與調整板部32的間隔。 調整螺栓40係由旋轉容許部44和螺絲部45所構成。旋 轉容許部44係由頭部44A和縮徑部44B和支持盤部44C 所構成。在頭部44A設有六角孔44D。將六角板手（ wretch )插入該六角孔44D中可使之旋轉。縮徑部44B係 爲以可旋轉的方式嵌合於後述調整螺栓保持器41之嵌合 溝49的部分。縮徑部44B係形成圓柱狀，且以嵌合於嵌 合溝49，僅容許調整螺栓40於固定位置旋轉，而不會朝 向軸方向偏移的方式支持。 調整螺栓保持器41係用以將調整螺栓40以可轉動的 方式支持的構件。調整螺栓保持器41係由底板47和從該 底板47垂直立起而設置的保持板48所構成。底板47係被 直接固定於基準板部31或調整板部32的端部。保持板48 在其上端部設有嵌合溝49，將支持調整螺栓40以可旋轉 的方式支持。嵌合溝49係供調整螺栓40的縮徑部44B以 可旋轉的方式嵌合的部分。該嵌合溝49內部的寬度係形成 與縮徑部44B的外徑大致相同尺寸。依此構成，調整螺栓 40的縮徑部44B係在可旋轉且不會搖動下正確地被嵌合於 嵌合溝49。再者，嵌合溝49係以形成稍微斜狀開口的方 式構成，使調整螺栓40的縮徑部44B容易地嵌合。 調整區塊42係爲供調整螺栓40螺入以調整與調整螺 栓保持器41之間隔的構件。調整區塊42係由底板50和 從該底板50垂直立起而設置的螺絲板51所構成。底板50 係被直接固定於調整板部32或基準板部31的端部。螺絲 i S] -12- 1361895 板51具有可供調整螺栓4〇螺入的螺孔51A，且面對調整 螺栓保持器41的保持板48而配設。 以上述方式構成的探針單元23可利用如次的方式進 行更換。 拆除探針單元23時，先卸下調整板部32的固定用螺 栓35。接著’鬆弛位置調整機構33的調整螺栓40。 繼之’使調整螺栓40的旋轉容許部44從調整螺栓保 持器41的嵌合溝49脫離，並且將調整板部32從探針載 置台2 5拆除。 然後’將基準板部31的固定用螺栓35卸下，將基準 板部3 1從探針載置台25拆除。 其後，安裝符合新款式之液晶面板22的探針單元23 。具體而言，對準液晶面板22的電極而將配置有探針組 合體26之位置的探針基座27安裝於探針載置台25的嵌 合凹部28。 此時，先安裝探針基座27的基準板部31。將基準板 部31的圓孔31A與探針載置台25之嵌合凹部28的螺孔 28A對準，螺入固定用螺栓35。藉由在所有的圓孔31A 螺入固定用螺栓35加以鎖緊，可將基準板部31固定於正 確的位置。 繼之，安裝調整板部32。將調整板部32的長孔37與 探針載置台25之嵌合凹部28的螺孔28A對準，並且將位 置調整機構33的調整螺栓40螺入調整區塊42的螺孔 51A，使之嵌合於調整螺栓保持器41的嵌合溝49。然後 IS] -13- 1361895 · ，在全部的長孔37中螺入固定用螺栓35，利用六角板手 使位置調整機構33的調整螺栓40旋轉，藉以調整調整螺 栓保持器41與調整區塊42的間隔，以調整基準板部31 與調整板部32的位置。 接著’將各固定用螺栓35鎖緊以固定調整板部32。 由於短探針載置台25A的探針基座27較短且重量較 輕，故可直接更換。 利用上述方式’可安全且容易地進行探針單元23的 更換作業。而且，由於長探針載置台25B側之探針單元 23的探針基座27B被分割成基準板部31與調整板部32, 故在與位置調整機構33的構造結合下，可安全且容易地 進行更換作業。 因此’可以一位作業員進行探針單元2 3的更換作業 ，使作業效率提升。 〔變形例〕 上述實施型態的探針單元23中，係以將探針基座27 分割成基準板部31與調整板部32之兩部分爲例來說明， 但是當探針基座27的尺寸較大時，亦可將調整板部32分 割成兩部分或三部分以上。 作爲上述實施型態之組裝有探針單元23的檢查裝置 並不受限於作爲習知例所記載的檢查裝置，亦可爲其他的 檢查裝置乃毋庸贅述。 上述實施型態中，雖將位置調整機構33之調整螺栓 [S3 -14- 1361895 保持器41的嵌合溝49設成形成稍微斜狀開口的形狀，然 而只要嵌合溝49是調整螺栓40的縮徑部44B容易進入的 形狀即可。例如，亦可不在嵌合溝49的整體設置斜面（ taper )’而僅將入口形成較大的開口。嵌合溝49的內部 係以可穩定且容易旋轉的方式形成半圓形。 上述實施型態中，短探針載置台25A的探針基座27 雖構成爲單體的構件而沒有被分割，但是當整體的尺寸變 大時，該短探針載置台25A的探針基座27也可分割成兩 部分或三部分以上。 位置調整機構3 3係利用調整螺栓4 0之螺絲的間距來 調整基準板部31與調整板部32的間隔，但是亦可利用其 他的構造來調整間隔。 【圖式簡單說明】 第1圖係表示本發明之實施型態之探針單元的主要部 分之分解斜視圖。 第2圖係表示習知之檢查裝置的正面圖^ 第3圖係表示習知之檢查裝置之探針單元的平面圖。 第4圖係表示本發明之實施型態之檢查裝置的探針單 元之斜視圖。 第5圖係表示本發明之實施型態之檢査裝置的探針單 元之平面圖。 第6圖係表示本發明之實施型態之檢查裝置的位置調 整機構之斜視圖。 [S] -15- 1361895 【主要元件符號說明】 21 :工作桌（work table) 2 2 :液晶面板 23 :探針單元 25 :探針載置台 2 6 :探針組合體 2 7 :探針基座 28 :嵌合凹部 31 :基準板部 3 2 :調整板部 3 3 :位置調整機構 3 5 :固定用螺栓 3 7 :長孔 40 :調整螺栓 41 :調整螺栓保持器 42 :調整區塊 44 :旋轉容許部 4 5 :螺絲部 47 :底板 4 8 :保持板 49 :嵌合溝 5 0 :底板 5 1 :螺絲板-8- 1361895 [Effects of the Invention] As described above, since the probe base is divided into one reference plate portion and one or two or more adjustment plate portions to be individually replaced, it is safe and can be used alone. The job is easy to change the style. [Embodiment] Hereinafter, a probe unit and an inspection apparatus according to an embodiment of the present invention will be described with reference to the drawings. The inspection apparatus of the present embodiment is substantially the same as the above-described conventional inspection apparatus, and the same components are denoted by the same reference numerals to omit the description. As shown in Figs. 4 and 5, the inspection apparatus of the present embodiment is provided with a probe unit 23 so as to be placed along the periphery of the liquid crystal panel 22 placed on the work table 21. The probe unit 23 mainly includes a probe mounting table 25, a probe assembly 26, and a probe base 27. The probe mounting table 25 is fixed to a member for supporting the probe base 27 on the apparatus body side of the inspection apparatus 1. The probe mounting table 25 is divided into four portions 'fixed to a frame 14 as an inspection device on the main body side. The probe assembly 26 is provided on the side of the work table 21 (liquid crystal panel 22) of the probe mounting table 25. Each probe mounting table 25 is formed in a substantially long plate shape. A fitting recess 28 for attaching the probe base 27 is provided on the upper side surface of each probe mounting table 25. The fitting recess 28 is set to be slightly longer than the probe base 27-9-1361895 so that the probe base 27 can be moved in the longitudinal direction thereof. In the fitting recessed portion 28, a plurality of screw holes 28A for fixing the probe base 27 are provided at predetermined intervals (see Fig. 1). The size of the four probe mounting tables 25 is set in accordance with the vertical and horizontal dimensions of the liquid crystal panel 22. Specifically, it is composed of two short probe mounting stages 25 A and two long probe mounting stages 25B. The probe assembly 26 and the probe assembly 26 are attached to the short probe mounting table 25A and the long probe mounting table 25B, and the probe assembly 26 is in direct contact with the electrode of the liquid crystal panel 22 as the inspection target plate. A member of a circuit for transmitting an inspection signal to the liquid crystal panel 22. The probe assembly 26 is constructed by combining a suspension block, a slide block, and the like, and a probe (not shown) is provided at the tip end. The probe is in direct contact with the electrode of the liquid crystal panel 22 to transmit an inspection signal to the circuit on the liquid crystal panel 22. The probe base 27 is supported by the probe mounting table 25 to support the probe. The components of the assembly 26. The probe base 2 7A attached to the short probe mounting table 25A has a short overall length and a heavy weight, and is configured as a single member. The probe base 27B attached to the long probe mounting table 25B has a long length and a heavy weight, and is divided. In other words, the probe base 2 7B includes the reference plate portion 31, the adjustment plate portion 32, and the position adjustment mechanism 33. The reference plate portion 31 serves as a reference for the alignment of the probe base 27. As shown in Figs. 1 and 5, the reference plate portion 31 is accurately mounted at a specific position that does not deviate from the probe mounting table 25. Specifically, it is accurately mounted so as not to be shifted to the end portion (the right end portion in Fig. 1) of one of the fitting recesses 28 of the long probe mounting table 25B I S3 -10- 1361895. The reference plate portion 31 has a circular hole 31A having substantially the same diameter as the fixing bolt 35 fixed to the probe mounting table 25. As a result, the fixing bolt 35 is screwed into the screw hole 28A of the fitting recess 28 via the circular hole 31A, whereby the reference plate portion 31 can be attached to the correct position. The probe assembly 26 and the alignment camera 36 are attached to the reference plate portion 31. The adjustment plate portion 32 is a member for adjusting the position thereof and coupled to the reference plate portion 31 to constitute the probe base 27. The adjustment plate portion 32 is provided in one or two or more pieces in accordance with the length of the fitting recess portion 28 of the long probe mounting table 2 5B. In this embodiment, an adjustment plate portion 32 is disposed. The adjustment plate portion 32 is coupled to the reference plate portion 31 at the position adjustment mechanism 33. The adjustment plate portion 32 is attached while being allowed to be displaced on the probe mounting table 25B. The adjustment plate portion 32 is provided with an elongated hole 37 which is allowed to be offset with respect to the fixing bolt 35. In a state where the fixing bolt 35 is inserted into the long hole 37 and screwed into the screw hole 28A of the fitting recess 28, the adjustment plate portion 32 can be allowed to be displaced by the long hole 37, and the adjustment plate portion 3 is adjusted by the position adjusting mechanism 33. 2 Perform position adjustment. The position adjustment mechanism 33 is a mechanism for adjusting the position of each adjustment plate portion 32 between the reference plate portion 31 and the adjustment plate portion 32 and between the adjustment plate portions 32. The position adjusting mechanism 33 is constituted by adjusting the bolt holder 41 and the adjusting block 42 by the adjusting bolt 40' as shown in Figs. 1 and 6 . The adjusting bolt 40 is a bolt for adjusting the interval between the reference plate portion 31 and the adjusting plate portion 32 of the probe base 27 or the interval between the respective adjusting plate portions 32. Here, since the reference plate portion 31 and the adjustment plate portion 32 are provided one by one, the adjustment bolt -11 - 1361895 is used to adjust the interval between the alignment plate portion 31 and the adjustment plate portion 32. The adjustment bolt 40 is composed of a rotation permitting portion 44 and a screw portion 45. The rotation permitting portion 44 is composed of a head portion 44A, a reduced diameter portion 44B, and a support disk portion 44C. A hexagonal hole 44D is provided in the head portion 44A. A hexagonal wrench (wretch) is inserted into the hexagonal hole 44D to rotate it. The reduced diameter portion 44B is a portion that is rotatably fitted to the fitting groove 49 of the adjustment bolt holder 41 to be described later. The reduced diameter portion 44B is formed in a cylindrical shape and fitted to the fitting groove 49, and only the adjustment bolt 40 is allowed to rotate at a fixed position, and is not supported to be displaced in the axial direction. The adjustment bolt holder 41 is a member for rotatably supporting the adjustment bolt 40. The adjustment bolt holder 41 is constituted by a bottom plate 47 and a holding plate 48 which is provided to stand upright from the bottom plate 47. The bottom plate 47 is directly fixed to the end of the reference plate portion 31 or the adjustment plate portion 32. The retaining plate 48 is provided at its upper end with a fitting groove 49 for rotatably supporting the support adjusting bolt 40. The fitting groove 49 is a portion to which the reduced diameter portion 44B of the adjusting bolt 40 is rotatably fitted. The width inside the fitting groove 49 is formed to have substantially the same size as the outer diameter of the reduced diameter portion 44B. With this configuration, the reduced diameter portion 44B of the adjusting bolt 40 is correctly fitted to the fitting groove 49 while being rotatable and not rocking. Further, the fitting groove 49 is formed in a slightly inclined opening, and the reduced diameter portion 44B of the adjusting bolt 40 is easily fitted. The adjustment block 42 is a member for screwing the adjustment bolt 40 to adjust the distance from the adjustment bolt holder 41. The adjustment block 42 is composed of a bottom plate 50 and a screw plate 51 which is provided to stand upright from the bottom plate 50. The bottom plate 50 is directly fixed to the end of the adjustment plate portion 32 or the reference plate portion 31. Screw i S] -12- 1361895 The plate 51 has a screw hole 51A into which the adjusting bolt 4 is screwed, and is disposed to face the holding plate 48 of the adjusting bolt holder 41. The probe unit 23 constructed in the above manner can be replaced by a secondary method. When the probe unit 23 is removed, the fixing bolt 35 of the adjustment plate portion 32 is first removed. Next, the adjustment bolt 40 of the position adjusting mechanism 33 is relaxed. Then, the rotation permitting portion 44 of the adjusting bolt 40 is detached from the fitting groove 49 of the adjusting bolt holder 41, and the adjusting plate portion 32 is detached from the probe mounting table 25. Then, the fixing bolts 35 of the reference plate portion 31 are removed, and the reference plate portion 31 is removed from the probe mounting table 25. Thereafter, the probe unit 23 conforming to the new type of liquid crystal panel 22 is mounted. Specifically, the probe base 27 at the position where the probe assembly 26 is disposed is attached to the electrode of the liquid crystal panel 22, and is attached to the fitting recess 28 of the probe mounting table 25. At this time, the reference plate portion 31 of the probe base 27 is attached first. The circular hole 31A of the reference plate portion 31 is aligned with the screw hole 28A of the fitting recess 28 of the probe mounting table 25, and the fixing bolt 35 is screwed. The reference plate portion 31 can be fixed at a proper position by screwing the fixing bolts 35 in all the circular holes 31A. Next, the adjustment plate portion 32 is mounted. The long hole 37 of the adjustment plate portion 32 is aligned with the screw hole 28A of the fitting recess 28 of the probe mounting table 25, and the adjustment bolt 40 of the position adjusting mechanism 33 is screwed into the screw hole 51A of the adjustment block 42 so as to be The fitting groove 49 of the adjustment bolt holder 41 is fitted. Then, IS] -13 - 1361895, the fixing bolt 35 is screwed into all the long holes 37, and the adjusting bolt 40 of the position adjusting mechanism 33 is rotated by the hex wrench to adjust the adjusting bolt holder 41 and the adjusting block 42. The interval is to adjust the position of the reference plate portion 31 and the adjustment plate portion 32. Then, the fixing bolts 35 are locked to fix the adjustment plate portion 32. Since the probe base 27 of the short probe mounting table 25A is short and light in weight, it can be directly replaced. The replacement of the probe unit 23 can be performed safely and easily by the above method. Further, since the probe base 27B of the probe unit 23 on the side of the long probe mounting table 25B is divided into the reference plate portion 31 and the adjustment plate portion 32, it is safe and easy to combine with the structure of the position adjustment mechanism 33. Replace the work. Therefore, the replacement of the probe unit 23 can be performed by one operator, and the work efficiency can be improved. [Modification] In the probe unit 23 of the above-described embodiment, the probe base 27 is divided into two parts of the reference plate portion 31 and the adjustment plate portion 32, but the probe base 27 is used. When the size is large, the adjustment plate portion 32 may be divided into two or more parts. The inspection apparatus incorporating the probe unit 23 as the above-described embodiment is not limited to the inspection apparatus described in the conventional example, and other inspection apparatuses are not necessarily described. In the above-described embodiment, the fitting groove 49 of the position adjusting mechanism 33 is formed in a shape in which the fitting groove 49 of the retainer 41 is formed in a slightly oblique shape. However, the fitting groove 49 is the adjusting bolt 40. The shape in which the reduced diameter portion 44B easily enters may be used. For example, a taper may not be provided on the entire fitting groove 49, and only a large opening may be formed in the inlet. The inside of the fitting groove 49 is formed in a semicircular shape so as to be stable and easy to rotate. In the above embodiment, the probe base 27 of the short probe mounting table 25A is configured as a single member and is not divided. However, when the overall size is increased, the probe base of the short probe mounting table 25A is used. The seat 27 can also be divided into two parts or more. The position adjusting mechanism 3 3 adjusts the interval between the reference plate portion 31 and the adjustment plate portion 32 by the pitch of the screws of the adjusting bolts 40, but the interval can be adjusted by other structures. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded perspective view showing the main part of a probe unit of an embodiment of the present invention. Fig. 2 is a front view showing a conventional inspection apparatus. Fig. 3 is a plan view showing a probe unit of a conventional inspection apparatus. Fig. 4 is a perspective view showing a probe unit of an inspection apparatus according to an embodiment of the present invention. Fig. 5 is a plan view showing a probe unit of an inspection apparatus according to an embodiment of the present invention. Fig. 6 is a perspective view showing a position adjusting mechanism of the inspection apparatus according to the embodiment of the present invention. [S] -15- 1361895 [Description of main component symbols] 21 : Work table 2 2 : Liquid crystal panel 23 : Probe unit 25 : Probe mounting table 2 6 : Probe assembly 2 7 : Probe base Seat 28: fitting recess 31: reference plate portion 3 2 : adjusting plate portion 3 3 : position adjusting mechanism 3 5 : fixing bolt 3 7 : long hole 40 : adjusting bolt 41 : adjusting bolt holder 42 : adjusting block 44 : rotation allowance portion 4 5 : screw portion 47 : bottom plate 4 8 : holding plate 49 : fitting groove 5 0 : bottom plate 5 1 : screw plate
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