JP2007285727A - Probe card arrangement unit and measuring instrument having probe card - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To change arrangement of probe cards, when a measuring object is changed, by simple work, corresponding to the change, and to carry out measurement. <P>SOLUTION: This probe card arrangement unit 30 includes probe units 50 attached detachably the probe card, probe bases 32 with the plurality of probe units 50 alignment-arranged with an optional transverse space, orthogonal arrangement guides 40, 42 with the plurality of probe bases 32 attached with the plurality of already probe-card-attached probe units 50, along a direction orthogonal to an alignment direction in the probe bases 32, with an optional vertical space. The plurality of probe cards is thereby arranged two-dimensionally in an optional position. The specified probe card may be retracted from a measuring stage 22, using a retraction cylinder 70 to change the arrangement of the probe cards. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a probe card arrangement unit and a measurement apparatus having a probe card, and in particular, arranges and holds a probe card with respect to a measurement stage that holds an object to be measured and can be moved and positioned. The present invention relates to a probe card placement unit and a measurement apparatus having a probe card.

  To inspect the circuit characteristics of an IC chip manufactured on a semiconductor wafer or various characteristics of a liquid crystal display element manufactured on a glass substrate by bringing a probe into contact with an electrode terminal of the semiconductor wafer or liquid crystal display element. In addition, a so-called probe card is used.

  For example, in Patent Document 1, as a general probe card, a printed wiring is provided on a disk-shaped probe card substrate having an opening in the center, and the base end of each probe is connected and fixed to each printed wiring terminal, It is described that the tips of these probes extend toward an electrode terminal to be inspected such as a semiconductor wafer or a liquid crystal display element.

  For example, in order to sequentially measure each characteristic of a plurality of liquid crystal display elements fabricated on a glass substrate, each terminal of the measuring device is connected to the base end of each probe of the probe card, and the XYZ direction with respect to the probe card It is performed by holding a glass substrate on a measurement stage that can be moved to the position. Specifically, the measurement stage is moved in the XY plane at a Z height where the liquid crystal display element does not contact the probe tip of the probe card, and the electrode terminals of the liquid crystal display element and the probe tips of the probe card are positioned. Then, the measurement stage is raised in the Z direction, and the electrode terminals of the liquid crystal display element are brought into contact with the tips of the probes of the probe card. When the characteristics of one liquid crystal display element are measured by the measuring instrument via the probe card in this way, the measurement stage moves down in the Z direction and moves in the XY plane toward the next liquid crystal display element. By repeating this, various characteristics of each liquid crystal display element are sequentially measured.

Japanese Patent Laid-Open No. 6-222079

  In order to measure a measurement object using a probe card, as described above, a probe card is prepared in which a plurality of probes whose tips are aligned with a plurality of electrode pads of the measurement object are arranged. For example, when one liquid crystal display element has six electrode terminals, a probe card having six probes according to the six electrode terminals is used. Of course, when the measuring instrument has sufficient processing capacity, a plurality of liquid crystal display element probes are arranged on one probe card. For example, in the above example, when the liquid crystal display elements are arranged at a pitch of 5 mm in the horizontal direction on the glass substrate, a probe card in which another set of the above six probes is arranged 5 mm apart in the horizontal direction is used once. Two liquid crystal display elements can be measured. In the probe card in this case, a plurality of probe sets are arranged in accordance with the arrangement pitch of the liquid crystal display elements.

  As described above, the probe card is prepared in accordance with the electrode terminal arrangement of each measurement object, and in some cases, further in accordance with the planar arrangement of each measurement object on the IC wafer or on the glass substrate. Then, in a measurement system including a measurement stage, a probe card holder, and a measuring instrument, for example, an IC tester system or a liquid crystal display panel measurement system, it is possible to measure different types of measurement objects by exchanging the probe card. . As a result, the number of types of measurement systems can be reduced, and various types of measurement objects can be measured.

  However, as described above, the probe cards are prepared according to the arrangement of the electrode terminals of the measurement object, so that even if the electrode terminal arrangement is slightly different, a separate probe card is required. For example, in the above example, even if the liquid crystal display element has six electrode terminals, different probe cards are prepared if the pitch between the electrode terminals is different. Further, in a probe card in which two or more probe sets for liquid crystal display elements are arranged in one probe card, the arrangement interval of the probe sets is different if the sizes of the liquid crystal display elements are different even if the electrode terminals are arranged in exactly the same manner. Are different, so separate probe cards are prepared.

  In a small-lot, multi-model production line, even if the product specifications are slightly different, the probe card is different, so the probe card is frequently replaced in the measurement system. For example, the type of probe card is changed every day, or the type of probe card is changed many times during a day. Therefore, every time the measurement object is changed, work such as replacement of the probe card type or resetting of the probe card is frequently performed, and workability is lowered.

  An object of the present invention is to provide a probe card arrangement unit and a measurement device having a probe card that can proceed with measurement in a simple operation when a measurement object is changed. .

  A probe card arrangement unit according to the present invention includes a probe unit to which a probe card can be attached and detached, a probe base to which a plurality of probe units can be arranged and arranged in one direction at arbitrary lateral intervals, and a probe card A plurality of probe cards including a plurality of probe cards each having a plurality of probe bases to which a plurality of mounted probe units are attached and arranged in a direction orthogonal to the alignment direction of the probe bases at a predetermined vertical interval. Is two-dimensionally arranged at an arbitrary position.

  Further, in the probe card arrangement unit according to the present invention, the probe base has a positioning for arranging and arranging a plurality of probe units at an arbitrary lateral interval in advance, and a plurality of replaceable base plates having a common outer shape. And an attachment plate that holds and fixes an arbitrary base plate and is attached to the orthogonal arrangement guide.

  The probe base preferably has posture changing means that can change the posture of the probe unit between a measurement state with respect to the measurement object and a retreat state withdrawing from the measurement object.

  Moreover, it is preferable that the probe base has a height adjusting means capable of adjusting the mounting height of the probe card mounted on the probe unit to a predetermined height.

  In the probe card arrangement unit according to the present invention, the height adjusting means includes a moving means for lowering the probe of the probe card to the height confirmation reference plate, which is a conductor, and conduction between the probe and the height confirmation reference plate. And determining means for determining whether or not the probe card is at a predetermined height.

  Further, a measuring apparatus having a probe card according to the present invention holds a measurement object, can be moved to an arbitrary position and can be positioned, and a probe card that arranges and holds the probe card with respect to the measurement stage. A measurement device that positions and measures a probe card in accordance with the arrangement of a measurement pad of a measurement object, and the probe card arrangement unit is a probe that can be attached to and detached from the probe card. A probe base on which a unit, a plurality of probe units can be arranged and arranged in one direction at an arbitrary lateral interval, and a probe base on which a plurality of probe units with a probe card are attached are arranged in an alignment direction on the probe base. An orthogonal arrangement guide that can be arranged and fixed in a plurality of arbitrary vertical intervals in the orthogonal direction It has, characterized by two-dimensionally arranging a plurality of probe card to any location.

  With at least one of the above-described configurations, the probe unit can detach various probe cards, the probe base can arrange the probe units in the horizontal direction at arbitrary intervals, and the orthogonal arrangement guide can have the probe base in the vertical direction at arbitrary intervals. Can be placed. Here, the horizontal direction and the vertical direction correspond to the arrangement direction of the measurement object. For example, when the measurement object is arranged in the X direction and the Y direction, the vertical direction is the X direction. The horizontal direction is the Y direction.

  Therefore, by changing the arrangement pitch of the probe base and the arrangement pitch of each probe base, the two-dimensional arrangement of a plurality of probe cards can be easily changed. Correspondingly, the arrangement of the probe card can be changed to proceed with the measurement.

  In addition, the probe base includes a replaceable base plate for arranging and arranging a plurality of probe units at an arbitrary lateral interval in advance, and a mounting plate for fixing and holding the arbitrary base plate and attached to the orthogonal arrangement guide. Therefore, if a base plate with a standard arrangement is prepared in advance, it becomes easy to arrange a plurality of probe units in any lateral direction only by exchanging the base plate.

  Further, since the posture of the probe unit can be changed between the measurement state with respect to the measurement object and the retreat state withdrawn from the measurement object, for example, from the state in which the four probe units are arranged in the horizontal direction, The one probe unit can be withdrawn and the measurement can proceed with three probe units. Alternatively, if the three probe units are retracted, the measurement can be advanced with one probe unit. Thus, the number of probe units to be used can be easily changed according to the change of the measurement object.

  In addition, since it has height adjustment means that can adjust the mounting height of the probe card mounted on the probe unit to a predetermined height, if necessary when changing the arrangement of the probe unit, the mounting height can be easily Can be adjusted.

  Also, as height adjustment means, a height confirmation reference plate, which is a conductor, a moving means for lowering the probe card, and detecting that the probe is lowered and brought into contact with the height confirmation reference plate is conducted. Therefore, it is possible to easily adjust the mounting height of the probe card to a predetermined height.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the following, a characteristic inspection device for inspecting the characteristics of a liquid crystal display panel, etc. will be described as a measuring device having a probe card. . For example, a liquid crystal display panel lighting inspection device, a characteristic measurement device, or the like may be used. The measurement object may be an electronic component other than the liquid crystal display element, for example, an IC chip. Also, the dimensions and the like described below are illustrative examples, and other dimensions and the like may be used according to the measurement object.

  First, an example of a problem to be solved by the probe card arrangement unit according to the present invention will be described with reference to FIG. FIG. 1 is a diagram showing two cases in which a plurality of liquid crystal display panels are formed on one glass substrate. FIG. 1A shows a 6 × 5 = 30 liquid crystal display panel 12 formed on a glass substrate 10, and FIG. 1B shows a 4 × 4 = 16 liquid crystal display panel 13 formed on a glass substrate 11. It ’s bad. The liquid crystal display panel 12 has a display pixel portion 14 and six electrode terminals 16, and the liquid crystal display panel 13 has a display pixel portion 15 and seven electrode terminals 17. As described above, the liquid crystal display panel 12 and the liquid crystal display panel 13 have different external sizes, and the electrode terminals 16 and 17 have different numbers, sizes, and arrangement pitches of the electrode terminals.

  In such a case, when the characteristic inspection of each of the liquid crystal display panels 12 and 13 is to be performed, conventionally, in FIG. 1A, a probe card is prepared in accordance with the electrode terminals 16 of the liquid crystal display panel 12, and FIG. In 1 (b), a probe card that matches the electrode terminal 17 of the liquid crystal display panel 13 is prepared.

  In addition, when the characteristic inspection is not performed for each liquid crystal display panel but for a plurality of liquid crystal display panels, a large probe card adapted to the arrangement of the electrode terminals of the plurality of liquid crystal display panels. Prepare. In FIG. 1A, when the characteristic inspection is to be performed on the 6 × 1 = 6 liquid crystal display panel group 18 at once, the arrangement of the six electrode terminals 16 on the glass substrate 11, that is, the six electrode terminals 16. A probe card corresponding to one in which six sets are arranged at the horizontal arrangement pitch of the liquid crystal display panel 12 is prepared. Similarly, in the case of FIG. 1B, when the characteristic inspection is to be performed on the liquid crystal display panel group 19 in the unit of 2 × 2 = 4, the seven electrode terminals 17 are arranged in the horizontal arrangement pitch of the liquid crystal display panel 13. The probe card corresponding to what is arranged in two rows and two columns in the vertical direction is prepared.

  By the way, in the case of FIGS. 1A and 1B, the glass substrates 10 and 11 have almost the same outer shape. In fact, in the manufacturing process of a liquid crystal display panel, glass substrates having almost the same size are often used even when various types of liquid crystal display panels are made separately. That is, the manufacturing process of the liquid crystal display panel, like the manufacturing process of the IC chip, performs process processing such as photoresist coating, exposure, development, etc., so that the manufacturing apparatus matched to the size of the glass substrate that is the starting material is prepared. Because. Accordingly, in the manufacturing process of many types of liquid crystal display panels, substantially the same manufacturing process is performed on glass substrates having substantially the same size, but subsequent characteristic inspection differs depending on the type of each liquid crystal display panel. This is done while frequently changing the probe card.

  For example, in FIG. 1A, the liquid crystal display panel 12 having six electrode terminals 16 is subjected to a characteristic inspection in units of 6 × 1 = 6, and a probe card for that purpose is prepared. Even if it is a liquid crystal display panel having electrode terminals 16, another probe card must be prepared for other types of liquid crystal display panels that are slightly larger in width and cannot be arranged in the horizontal direction of the glass substrate 10. I must. As another case where another probe card has to be prepared, there are a liquid crystal display panel having the same six electrode terminals 16 but only five in the lateral direction of the glass substrate 10, a liquid crystal display panel having only four, and the like. is there.

  Similarly, in FIG. 1 (a), another probe card must be prepared when performing characteristic inspection in units of 6 × 2 = 12. Such a situation is the same in FIG. For example, in the case of a liquid crystal display panel having the same seven electrode terminals 17 but having different horizontal dimensions, and in the case of a liquid crystal display panel having different vertical dimension lengths, the characteristic inspection is performed except for 2 × 2 = 4. If you want to do so, you must prepare a separate probe card.

  As described above, when the object to be measured is changed in the characteristic inspection or the like, conventionally, a probe card corresponding to the measurement object must be prepared and mounted on the characteristic inspection apparatus. This is the same even if the arrangement of the electrode terminals is the same, even if the dimensions of the liquid crystal display panel are different, or the arrangement of the plurality of liquid crystal display panels constituting the measurement object is different.

  FIG. 2 is a configuration diagram of the characteristic inspection apparatus 20 that can rearrange the arrangement of the probe card corresponding to the measurement object even if the measurement object is changed, and particularly shows the periphery of the probe card arrangement unit 30. It is. The characteristic inspection apparatus 20 includes a measurement stage 22, a probe base 23 to which the probe card placement unit 30 is attached, and a control unit 24. In the probe card arrangement unit 30, as will be described later, a plurality of probe units 50 are arranged at arbitrary positions suitable for measurement.

  The measurement stage 22 is a measurement object holder that holds a glass substrate (not shown) and can move in the XYZ triaxial directions and rotate around the Z axis as shown in FIG. As described with reference to FIG. 1, a plurality of liquid crystal display panels are arranged in a plurality of rows and columns on the glass substrate. Therefore, the measurement stage 22 moves in the XY plane and rotates θ to position each electrode terminal of the liquid crystal panel or liquid crystal panel group to be measured according to the probe arrangement of the probe unit 50, and after the positioning, Z It has a function of moving in the direction and bringing the probe of the probe unit 50 into contact with each electrode terminal of the measurement object. The measurement stage 22 includes a plurality of table moving actuators that perform movement in the XYZ triaxial directions and θ rotation around the Z axis, and each actuator is connected to a control unit 24.

  The control unit 24 has a function of controlling the operation of each element constituting the characteristic inspection device 20 as a whole. That is, the drive of each actuator of the measurement stage 22 is controlled as described above. Further, a function of connecting to each probe of each probe unit 50 of the probe card arrangement unit 30 and performing a characteristic inspection of each liquid crystal display panel as a measurement object via the tip of each probe is not shown. However, the control unit 24 may have the function of the measurement unit.

  The probe base 23 is a member that supports the probe card placement unit 30 above the measurement stage 22, and thereby the measurement stage 22 can freely move in the XY plane without coming into contact with the probe card placement unit 30.

  The probe card arrangement unit 30 is a mechanism for arranging a plurality of probe cards at arbitrary intervals along the X and Y directions shown in FIG. Since each probe card is attached to the probe unit 50, the probe card placement unit 30 places a plurality of probe units 50 in the X and Y directions. Therefore, the probe card arrangement unit 30 includes a probe base 32 for arranging one or more probe units 50 along the X direction and an orthogonal arrangement guide for arranging one or more probe bases 32 along the Y direction. 40, 42. In FIG. 2, four probe units 50 are arranged on each probe base 32, and two probe bases 32 are arranged using orthogonal arrangement guides 40, 42, thereby 4 × 2 = 8 probe units 50. Is shown in a two-dimensional arrangement. Of course, other numbers of two-dimensional arrangements are possible. For example, three or four or more probe bases 32 can be arranged in the orthogonal arrangement guides 40 and 42. Further, when one probe base 32 is arranged on the orthogonal arrangement guides 40 and 42, a plurality of probe units 50 can be arranged one-dimensionally. It is also possible to arrange only one probe unit 50.

  3 is a plan view and a side view of the probe card placement unit 30, FIG. 4 is a partially exploded perspective view of the probe card placement unit 30, and FIG. 5 is a detailed enlarged view around the probe unit 50. It is.

  As described above, the probe base 32 has a function of arranging a plurality of probe units 50 at an arbitrary interval in the X direction, and includes the mounting plate 34, the lateral guide 36, and the base plate 38. The Here, the horizontal direction refers to the X direction, while the Y direction is referred to as the vertical direction.

  The base plate 38 is a member having positioning holes 63 at a predetermined interval along the longitudinal direction, and the interval between the positioning holes 63 is a lateral interval in which the probe units 50 are arranged. As will be described later, the positioning holes 63 have shapes corresponding to the positioning pins 62 provided in the probe unit 50, respectively. The mounting plate 34 is prepared in accordance with the arrangement form of the probe unit 50 in the lateral direction. The mounting plate 34 in the examples of FIGS. 3 and 4 has four probe units 50 arranged at a constant lateral pitch. However, this is an example, and various bases may be used depending on other arrangement forms. A plate 38 is prepared. For example, in order to correspond to FIG. 1A described above, a base plate 38 having positioning holes 63 in which six probe units 50 can be arranged at a horizontal arrangement pitch of the liquid crystal display panel 12 is prepared. ), A base plate 38 having a positioning hole 63 in which two probe units 50 can be arranged at the horizontal arrangement pitch of the liquid crystal display panel 13 is prepared.

  The outer shape of each base plate 38 is standardized so that it can be exchangeably attached to the mounting plate 34. That is, as shown in FIG. 4, the mounting plate 34 is provided with an elongated cutout shape in accordance with the outer shape of the base plate 38, and the base plate 38 is disposed so as to fit into the cutout shape. The base plate 38 is firmly fixed to the mounting plate 34 by the mounting screws 44 and 45 and integrated. As the base plate 38, a suitable metal plate processed into a predetermined shape can be used.

  The lateral guide 36 is a member having a function of sliding and guiding each probe unit 50 to an arbitrary position in the lateral direction, and is provided on the back side surface of the mounting plate 34, that is, on the surface where the mounting plate 34 faces the measurement stage 22. It is an elongate guide plate attached and arrange | positioned in a horizontal direction. As will be described later, each probe unit 50 is provided with a lateral groove portion having a groove cross-sectional shape corresponding to the cross-sectional shape of the lateral guide 36, so that each probe unit 50 is provided along the lateral guide 36. The mounting plate 34 can be guided and moved to an arbitrary position in the lateral direction.

  As such a lateral guide 36, an appropriate metal material processed into a predetermined shape can be used. The fixing to the mounting plate 34 can be performed by, for example, screwing or the like. Alternatively, it may be formed by integral processing with the mounting plate 34. With the lateral guide function of the lateral guide 36 and the positioning function of the positioning hole 63 of the base plate 38, each probe unit 50 is accurately laterally arranged at predetermined lateral intervals in the integrated probe base 32. Can be arranged in the direction.

  As described above, the mounting plate 34 is a member in which the lateral guide 36 is laterally disposed on the back side surface and the base plate 38 is replaceably mounted and integrated. On the other hand, it has a function of fixing and mounting at an arbitrary position in the vertical direction. For this purpose, longitudinal guide grooves are provided on the back side surfaces of both ends of the mounting plate 34, respectively. The groove cross-sectional shape of the longitudinal guide groove corresponds to the cross-sectional shape of the guide rail portions of the orthogonally arranged guides 40 and 42. As the mounting plate 34, an appropriate metal plate processed into a predetermined shape can be used. As shown in FIG. 3, the longitudinal guide groove portion may be manufactured as a separate member from the main body of the mounting plate, and attached to the mounting plate main body for assembly.

  Then, by aligning the guide grooves at both ends of the mounting plate 34 with the guide rail portions of the orthogonally arranged guides 40, 42, the mounting plate 34 is slid and guided by the orthogonally arranged guides 40, 42 arranged in parallel in the vertical direction. And can be moved to any position in the vertical direction. That is, the integrated probe base 32 is guided by the orthogonal arrangement guides 40 and 42, and can be moved to an arbitrary position in the vertical direction with the longitudinal direction set in the horizontal direction. The probe base 32 is firmly fixed to the orthogonally arranged guides 40 and 42 by the mounting screws 46, 47, 48 and 49 and integrated.

  The orthogonally arranged guides 40 and 42 are a pair of linear guide members attached to the probe base 23, and specifically, are members in which elongated guide rail portions are arranged on the upper surface. As described above, the cross-sectional shape of the guide rail portion corresponds to the groove cross-sectional shape of the guide groove of the mounting plate 34. The orthogonally arranged guides 40 and 42 have a function of moving the plurality of probe bases 32 to arbitrary positions in the vertical direction while maintaining the postures in the horizontal direction by the guide rail portions. Therefore, the probe base 32 to which the plurality of probe units 50 to which the probe cards have been attached are arranged and arranged at arbitrary horizontal intervals is attached in the vertical direction perpendicular to the alignment direction of the probe base 32 at arbitrary vertical intervals. A function of arranging and fixing a plurality of probe cards is provided, whereby a plurality of probe cards can be two-dimensionally arranged at arbitrary intervals.

  The orthogonal arrangement guides 40 and 42 are produced by processing an appropriate metal plate into a predetermined shape to produce an orthogonal arrangement guide main body, and separately producing an appropriate metal material into a predetermined shape to produce a guide rail portion. These can be obtained by connecting them with fixing means such as screws. Alternatively, a material obtained by processing an appropriate metal material and integrating the guide rail portion may be used.

  The probe unit 50 has a function of holding the probe card in an exchangeable manner and attaching the probe card to an arbitrary position in the lateral direction with respect to the probe base 32. FIG. 4 illustrates a state in which the probe card 52 is separated from the probe unit main body 54 in a replaceable manner with respect to the probe unit 50. As shown in FIGS. 5 and 6, the probe unit 50 includes a probe card 52, a probe unit main body 54, a lateral mounting portion 55, a probe card mounting screw 56, and a probe unit main body 54 as a lateral mounting portion 55. A rotating shaft 57 that is rotatably supported, a lateral guide portion 58 guided by the lateral guide 36, a positioning table 60 having positioning pins 62 corresponding to the positioning holes 63 of the base plate 38, and a height reference surface. A height determining table 64 is included. Here, the lateral guide 58 and the positioning base 60 are mounted on the lateral mounting portion 55, and the height determining base 64 is mounted on the probe unit main body 54.

  The probe card 52 is a wiring board on which a plurality of probes are fixed at a predetermined arrangement position, and a base portion of each probe is connected to a wiring pattern and is connected to a measurement unit (not shown) using an appropriate signal line. Is. Here, one probe card 52 can correspond to one liquid crystal display panel. For example, the glass substrate 10 in FIG. 1A can be a probe card in which six probes are arranged at a predetermined tip pitch, and the seven probes are arranged in the glass substrate 11 in FIG. Can be a probe card. In the case of FIG. 1A, in order to inspect the characteristics of the six liquid crystal display panel groups 18 arranged in the horizontal direction at a time, the probe unit 50 in which the probe card 52 is attached to the probe unit main body portion 54 is changed to six. These are used by arranging them on the probe base 32 at a predetermined lateral pitch.

  The probe unit main body portion 54 has a function of attaching the probe card 52 to the front end portion using a probe card attachment screw 56 in a replaceable manner. A height determining base 64 is mounted on a part of the rear end portion, and the central portion thereof. It is a frame member having an opening that can accommodate the lateral mounting portion 55. In addition, holes for supporting the rotating shaft 57 are provided at both ends on the front side of the opening that accommodates the lateral mounting portion 55, that is, at both ends on the probe card 52 side. The central axes of these holes are parallel to the Y axis, and the size of the holes corresponds to the outer diameter of the rotating shaft 57. As the probe unit main body 54, a material obtained by processing an appropriate metal material into a predetermined shape or a material molded with a plastic material can be used. The operation of the height determining table 64 will be described later.

  The rotating shaft 57 is a shaft that is fixed to the lateral mounting portion 55 or is rotatably mounted. Both ends of the rotating shaft 57 are rotatably supported by the pair of holes provided in the probe unit main body 54 as described above. In this way, as shown in FIG. 6, the lateral mounting portion 55 and the probe unit main body portion 54 are relatively rotatable around the axis of the rotation shaft 57. In the above description, the rotating shaft 57 is fixed to the lateral mounting portion 55 or is a shaft that is rotatably mounted. On the contrary, the rotating shaft is fixed to the probe unit main body portion 54 or is rotatably mounted. It is good also as what provides a pair of hole in the horizontal direction attachment part 55 corresponding to these as a pair of shafts. As the rotating shaft 57, a metal shaft or a plastic shaft of an appropriate material processed with high accuracy can be used.

  In relation to the rotating shaft 57, a biasing spring (not shown) is built in or attached between the probe unit main body 54 and the lateral mounting portion 55. As described above, the probe unit main body 54 is rotatable around the rotation shaft 57 with respect to the lateral mounting portion 55, but is urged away from the probe base 32 by the urging spring. ing. That is, the probe card 52, which is the tip of the probe unit 50, is urged in the pressing direction against the measurement stage 22 by the action of the urging spring and the rotating shaft 57. As an example of such an urging spring, a coil spring or the like attached around the rotating shaft can be used.

  The retracting cylinder 70 provided so as to be in contact with a part of the rear end portion of the probe unit main body 54 resists the biasing force, and the pressing force of the retracting cylinder 70 and the restoring force of the biasing spring Thus, the height position of the probe card 52 at the tip of the probe unit 50 is determined. Therefore, as indicated by the arrow in FIG. 6, by increasing the pressing force of the retracting cylinder 70, the probe card 52 of the probe unit 50 can be retracted from the measurement stage 22 and can be removed from measurement. In the example of FIG. 4, measurement can usually be performed with four probe cards. However, by operating the retracting cylinder 70 and retracting the probe card from the measurement stage 22, the measurement of three probe cards can be performed. The mode can be changed. Thus, by using the retracting cylinder 70, a specific probe card can be retracted according to the change of the measurement object, and the arrangement of the probe card can be easily changed. Thus, the retracting cylinder 70 is a posture changing means that can change the posture of the probe unit 50 between the measurement state with respect to the measurement object and the retraction state withdrawing from the measurement object.

  The lateral mounting portion 55 is a member having a size that can be accommodated in the central opening of the probe unit main body portion 54. The lateral guide portion 58 is attached to the central portion above the lateral mounting portion 55, and the positioning table 60 is mounted on the rear portion. Is done. The rotating shaft 57 is provided on the front side, that is, on the side opposite to the side on which the positioning table 60 is disposed with the lateral guide portion 58 interposed therebetween. As described above, the axial direction of the rotating shaft 57 is parallel to the direction in which the lateral guide 58 is guided by the lateral guide 36. That is, it is parallel to the Y direction. Here, as shown in FIG. 5, the lateral guide 36 is attached to the probe base 32, and the lateral attachment portion 55 is guided so as to be movable in the Y direction with respect to the lateral guide 36. Therefore, the probe unit main body 54 and the probe card 52 can also move freely in the Y direction with respect to the lateral guide 36 via the rotary shaft 57, but the position of the positioning pin 62 and the positioning hole 63 of the probe base 32. Thus, positioning in the Y direction is performed. As the lateral mounting portion 55, a material obtained by processing an appropriate metal material into a predetermined shape, or a material molded with a plastic material can be used.

  The lateral guide 58 is attached to the probe unit main body 54, has a lateral guide groove, and guides the probe unit 50 to the lateral guide 36 so as to be movable in the lateral direction relative to the probe base 32. It is a member which has. The cross-sectional shape of the lateral guide groove corresponds to the cross-sectional shape of the lateral guide 36. As the lateral guide 58, a material obtained by processing an appropriate metal material into a predetermined shape, or a material molded from a plastic material can be used.

  The positioning table 60 is a block member that is attached to the probe unit main body 54 and has positioning pins 62 on the upper surface thereof. As described above, the shape of the positioning pin 62 corresponds to the hole shape of the positioning hole 63 of the base plate 38. The positional relationship between the positioning pin 62 and the lateral guide portion 58 is set in association with the positional relationship between the positioning hole 63 and the lateral guide 36 in the probe base 32 accurately. As a result, the plurality of probe units 50 can be accurately aligned in the lateral direction at the pitch of the positioning holes 63. As the positioning table 60, a material obtained by processing an appropriate metal material into a predetermined shape or a material molded by a plastic material can be used. As the positioning pin 62, an appropriate metal material processed with a predetermined accuracy can be used.

  Here, the height determining base 64 mounted on the probe unit main body 54 will be described. The height determining table 64 is a block member that is attached to the probe unit main body 54 and whose upper surface serves as a height reference surface. As the height determining table 64, a material obtained by processing an appropriate metal material into a predetermined shape or a material formed by a plastic material can be used. As the positioning pin 62, an appropriate metal material processed with a predetermined accuracy can be used.

  The tip of a height adjusting micrometer 72 provided on the probe base 32 is pressed against the upper surface of the height determining table 64. The height adjusting micrometer 72 is used to adjust the height of each probe unit 50 disposed on the probe base 32. As described above, each probe unit 50 is attached to the base plate using the positioning hole 63. The positioning is performed so that the tip of the height adjusting micrometer 72 is just in contact with the height adjusting reference plane of the probe unit 50 when positioned at 38. Therefore, as shown by the arrow in FIG. 6, the height adjusting micrometer 72 is operated to project or retract the tip of the micrometer 72 from the base plate 38, so that the urging force of the urging spring can be changed. By matching, the height of the corresponding probe unit 50 can be adjusted.

  Returning to FIG. 2, the height confirmation reference plate 26 will be described. A height check reference plate 26 provided on the measurement stage 22 can be used as to whether or not the heights of the probe units 50 are accurately aligned. The height confirmation reference plate 26 is a flat conductive plate. Specifically, the control unit 24 issues a command for checking the probe height, moves the measurement stage 22, and arranges the height check reference plate 26 directly below each probe unit 50, where the measurement stage 22 is moved. By detecting the presence or absence of conduction between each probe and the height confirmation reference plate 26 when it is raised, it is possible to confirm whether or not the heights of the probes with respect to the height confirmation reference plate 26 are aligned. it can. When it is determined that the heights are not uniform, the height of each probe unit can be adjusted using the height adjustment micrometer 72 of the probe unit 50.

  As described above, the height confirmation reference plate 26, the moving means for moving the probe unit 50 up and down with respect to the measurement stage 22, and the determination means for determining the continuity between each probe and the height confirmation reference plate 26 are used. The height of the probe can be confirmed.

  In FIG. 2, the arrangement confirmation camera 28 provided on the measurement stage 22 confirms whether the probe base 32 is correctly attached to the reference coordinates of the measurement stage 22 when the probe unit 50 is replaced. It is a measuring camera to do. The arrangement confirmation camera 28 observes the alignment marks provided on the back side surfaces of both end portions of the probe base 32 and transfers the result to the control unit 24. The control unit 24 analyzes the transferred data and analyzes the mounting error. Judgment is made. Specifically, the control unit 24 issues a command for confirming the placement, moves the measurement stage 22, places the placement confirmation camera 28 on one side of both ends of the probe base 32, and the back side of the probe base 32. The alignment mark is read and the data is transferred to the control unit 24. Next, the measurement stage 22 is moved in the horizontal direction, the arrangement confirmation camera 28 is arranged on the other side of both ends of the probe base 32, the other alignment mark of the probe base 32 is read, and the data is sent to the control unit 24. Forward. Based on the data of these two alignment marks, the control unit 24 can detect the position of the probe base 32 with respect to the reference coordinates of the measurement stage 22 and reflect it in the control data to perform correction.

  In this way, a plurality of probe bases that are guided by the orthogonal arrangement guides and movable in the vertical direction are used, and a plurality of probe units are arranged at a predetermined lateral pitch on each probe base, and each probe base is arranged in the orthogonal arrangement guide. By arranging at a predetermined vertical pitch along the, a plurality of probe cards can be two-dimensionally arranged in an arbitrary arrangement relationship with a simple operation.

It is a figure explaining an example of the subject which the probe card arrangement unit of an embodiment concerning the present invention tends to solve. It is a block diagram of the characteristic inspection apparatus in the embodiment according to the present invention, and particularly shows the periphery of the probe card arrangement unit. It is the top view and side view of a probe card arrangement | positioning unit in embodiment which concern on this invention. It is a perspective view which shows a probe card arrangement unit in an embodiment concerning the present invention partially disassembled. It is a detailed enlarged view around the probe unit in the embodiment according to the present invention. It is a detailed enlarged view of the probe unit in the embodiment according to the present invention.

Explanation of symbols

  10, 11 Glass substrate, 12, 13 Liquid crystal display panel, 14, 15 Display pixel portion, 16, 17 Electrode terminal, 18, 19 Liquid crystal display panel group, 20 Characteristic inspection device, 22 Measurement stage, 23 Probe stand, 24 Control unit , 26 Confirmation reference plate, 28 Placement confirmation camera, 30 Probe card placement unit, 32 Probe base, 34 Mounting plate, 36 Lateral guide, 38 Base plate, 40, 42 Orthogonal placement guide, 44, 45, 46, 47, 48 , 49 Mounting screw, 50 Probe unit, 52 Probe card, 54 Probe unit main body, 55 Lateral mounting portion, 56 Probe card mounting screw, 57 Rotating shaft, 58 Lateral guide portion, 60 Positioning table, 62 Positioning pin, 63 Positioning hole, 64 Height determining base, 70 Retraction cylinder, 72 Height Adjust micrometer.

Claims (6)

A probe unit that can be attached and detached with a probe card; and
A probe base on which a plurality of probe units can be arranged and arranged in one direction at an arbitrary lateral interval; and
An orthogonal arrangement guide capable of arranging and fixing a plurality of probe bases with a plurality of probe units mounted with probe cards in a direction perpendicular to the alignment direction in the probe base at an arbitrary vertical interval;
And a plurality of probe cards are two-dimensionally arranged at an arbitrary position. In the probe card arrangement unit according to claim 1,
The probe base has a plurality of replaceable base plates having a common outer shape, and has a positioning for arranging and arranging a plurality of probe units at an arbitrary lateral interval in advance.
A fixed base plate is fixedly held and attached to the orthogonal arrangement guide; and
A probe card placement unit comprising: In the probe card arrangement unit according to claim 1,
The probe card placement unit characterized in that the probe base has posture changing means that can change the posture of the probe unit between a measurement state with respect to the measurement object and a retreat state withdrawing from the measurement object. In the probe card arrangement unit according to claim 1,
The probe card placement unit characterized in that the probe base has a height adjusting means capable of adjusting the mounting height of the probe card mounted on the probe unit to a predetermined height. In the probe card arrangement unit according to claim 4,
The height adjusting means includes a moving means for lowering the probe of the probe card to a height confirmation reference plate which is a conductor,
Detecting means for detecting conduction between the probe and the height confirmation reference plate, and determining whether the probe card is at a predetermined height; and
A probe card placement unit comprising: A measurement stage that holds the measurement object and can be moved to any position and positioned,
A probe card placement unit for placing and holding a probe card with respect to the measurement stage;
A measuring device that positions and measures a probe card corresponding to the arrangement of the measurement pad of the measurement object,
Probe card placement unit
A probe unit that can be attached and detached with a probe card; and
A probe base on which a plurality of probe units can be arranged and arranged in one direction at an arbitrary lateral interval; and
An orthogonal arrangement guide capable of arranging and fixing a plurality of probe bases with a plurality of probe units mounted with probe cards in a direction perpendicular to the alignment direction in the probe base at an arbitrary vertical interval;
And a two-dimensional arrangement of a plurality of probe cards at an arbitrary position.

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